KR101261439B1 - The disposal system of volatile organic compound - Google Patents

Abstract

PURPOSE: A VOC processing system is provided to prevent the degradation of VOC adsorption concentration performance of a thickener due to particles, and to increase the performance and reliability by the improvement of VOC processing efficiency as the load of the main processor is able to be reduced. CONSTITUTION: A VOC processing system comprises a first pre-processor(1), a thickener(20), a second pre-processor(1a), a main processor(2), and an exhausting unit(40). The first pre-processor collects and removes large particles among particles in the waste gas through the contact of solid-liquid, and floating solid-liquid fine particles among particles through centrifugal force and liquid. The thickener adsorbs and purifies VOCs in the waste gas exhausted from the first pre-processor with an adsorbing agent. The second pre-processor collects and removes large particles among resins and particles contained in the condensed gas within the thickener, and floating solid-liquid fine particles among the particles using centrifugal force and liquid. The main processor is able to decompose the VOCs in the condensed gas supplied through the second pre-processor by the chain reaction of waste gas, through accelerating heat generation by plasma or changing into a radical state. The main processor comprises a frequency feed port generating high frequency using an applied power source, and a catalytic reactor. [Reference numerals] (1) First pre-processor; (1a) Second pre-processor; (2) Main processor; (20) Thickener; (40) Exhausting unit; (AA) Waste gas

Description

 VOC treatment system {The disposal system of volatile organic compound}

The present invention relates to a VOC treatment system, and more particularly, to collect and remove resins and particles in waste gas and concentrated gas delivered to the concentrator and the main treatment device to large solid particles as well as suspended solid and liquid fine particles. VOC adsorption prevents the deterioration of the concentration performance and at the same time reduces the load on the main processing equipment to increase the efficiency of VOC treatment, and it is possible to process VOC economically and efficiently because it can be processed at lower temperature than fossil fuel without using fossil fuel It is about a VOC processing system.

In general, the waste gas generated during the semiconductor or LCD production process is composed of volatile organic compounds (VOCs), perfluorinated compounds (PFCs), materials added in photoresists such as butyl acetate and 2-ectoethylethyl acetate, and water. And other foreign substances, ie mixtures of particles and the like.

The volatile organic compound (VOC) is a substance that causes harmful air and odors, such as the formation of smog through photochemical reactions with the harmful effects on the human body such as disorders of the respiratory tract and carcinogenicity, generation of odors, and urban ozone concentration. It is known as a major substance that causes environmental pollution such as rising, and PFC is one of gaseous components generated during semiconductor etching process and chemical vapor deposition process, and it is very stable gas that promotes global warming. Known.

In general, the VOC treatment system adsorbs and filters the VOC of the waste gas discharged from the filter unit 10 and the filter unit 10 which physically filters the particles of large particles contained in the waste gas, as shown in FIG. 8. A combustor 30 including a concentrator 20 for purifying, a nozzle for combusting the concentrated gas in the concentrator 20, and an exhaust unit for discharging the clean gas combusted through the clean gas and the combustor 30 ( 40).

However, this conventional VOC treatment system is designed to remove only particles of large particles contained in the waste gas by a simple filtering method, so that the waste gas is delivered to the concentrator without completely removing the particles contained in the waste gas. Particles included to block the surface pores of the concentrator, thereby lowering the adsorption concentration performance of the VOC, causing environmental pollution due to air emissions.

In addition, as described above, as the waste gas is transferred back to the main processing unit through the concentrator without completely removing particles, the processing capacity of the main processing unit is impaired due to particles and VOCs, thereby preventing the effective processing of VOC. There has been a problem that causes a decrease in performance and reliability of the system.

On the other hand, the combustor is a heat incineration method, which is a method of incineration of about 700 ~ 800 degrees Celsius or more because the reaction temperature is high, the nitrogen and oxygen contained in the exhaust gas reacts to generate a large amount of nitrogen oxides harmful substances In addition, there is a problem in that a reduction in durability due to high temperature operation shortens the maintenance period and increases the burden of operating costs due to high temperature operation.

In addition, regenerative thermal oxidation (RTO) and catalytic thermal oxidation (CTO) methods are used as the combustor, that is, the volatile organic compound (VOC) and the industrial waste gas removal apparatus, but all of them are LNG or other The need for a heat source not only reduces economics due to the enormous energy consumption, but also the risk of explosion of volatile organic compounds and industrial waste gas storage tanks when the fire flows back.

In the case of fossil fuels, the processing temperature is about 1100 ~ 1300 ℃ and the environmental pollution is caused by the generation of carbon monoxide and rust due to incomplete combustion, and the temperature is high, so the material, namely heat resistance, acid resistance, etc. Difficult and expensive materials have caused a problem of economic deterioration due to cost increases.

Republic of Korea Patent No. 10-0811247 (2008.02.29). Republic of Korea Patent No. 10-0954751 (2010.04.19).

Accordingly, the present invention has been made to solve the conventional problems as described above, the object of the resin and particles in the waste gas and the concentrated gas delivered to the concentrator and the main treatment device to large particles as well as suspended solids and liquid fine particles By collecting and removing, it prevents the concentration of VOC adsorption of the concentrator due to particles, and reduces the load of the main processing device, thereby increasing the efficiency of VOC treatment, and treating at a lower temperature than fossil fuel without using fossil fuel. It is possible to provide a VOC treatment system that can handle VOCs economically and efficiently.

In addition, an object of the present invention is to improve the decomposition efficiency and energy savings and firearms for VOC and odor components by generating high heat without LNG or auxiliary heat source by complementing the calorific value of plasma when decomposition and treatment of VOC with plasma by high frequency It is to provide a VOC treatment system that can prevent the risk of explosion accident.

In addition, an object of the present invention is to provide a VOC treatment system that has the ability to decompose waste gas even at a temperature lower than the plasma temperature by a catalyst using a high frequency to ensure heat quantity for temperature rise, ease of material selection and economics. .

One embodiment of the VOC treatment system according to the present invention for achieving the object of the present invention is to collect and remove large particles in the particles in the waste gas through gas-liquid contact, the suspended solid particles in the particles are centrifugal force and liquid A first pretreatment device for collecting and removing using the; A concentrator for adsorbing and purifying VOC in the waste gas discharged from the pretreatment apparatus with an adsorbent; A second pretreatment device which collects and removes large particles in the resin and particles contained in the concentrated gas in the concentrator, and collects and removes the suspended solids liquid particles in the particles using centrifugal force and liquid; The VOC in the concentrated gas supplied through the second pretreatment device accelerates heat generation or changes into a radical state due to the resonance of the plasma by high frequency and the water molecules by the plasma, thereby improving the decomposition ability by promoting the chain reaction of the waste gas. A main processor having; And an exhaust unit for discharging the clean gas from which the VOC is removed through the concentrator and the main processor.

In addition, the first pre-treatment device and the second pre-treatment device comprises a venturi scrubber for removing the particles of the large particles contained in the waste gas and the concentrated gas introduced through the gas and liquid contact; A cyclone scrubber that collects and removes suspended solids and liquid fine particles in the waste gas and the concentrated gas by spraying water while forming a downturn air stream by the flow of the waste gas and the concentrated gas supplied from the venturi scrubber; And a dust collecting storage tank provided in communication with the lower portion of the venturi scrubber and the cyclone scrubber to collect the dust collected inside the venturi scrubber and the cyclone scrubber.

The venturi scrubber may include a vertical venturi body having a waste gas inlet formed at an upper side thereof and a process gas outlet formed at a lower side thereof; A venturi part which is gradually reduced in cross section in the venturi body and expands again through the neck portion to maintain the original cross-sectional size; And a dust collecting venturi supply pipe installed at an upper side of the venturi body and having a plurality of venturi injection nozzles so as to spray water to the lower side of the venturi body.

In addition, the cyclone scrubber is a vertical cyclone in which a waste gas supply unit is formed so that the waste gas and the concentrated gas of the venturi scrubber flow in a constant high speed in a tangential direction of the inner side wall on one side to form a descending turn air flow, and a process gas outlet is formed on the upper side. A main body; A hollow central axis formed in the center of the upper end of the cyclone body to be the center of the downturn air flow; A cyclone supply pipe installed at an outer side of the central axis and having a plurality of cyclone injection nozzles for injecting water into the cyclone body, wherein the cyclone body is disposed inside the upper part of the central axis. It characterized in that it further comprises.

In addition, the main processing unit includes a frequency supply unit for generating a high frequency by the applied power; A microwave plasma reactor including a plasma generator for generating a plasma by discharging high frequency transmitted from the frequency supply unit; Characterized in that it comprises a; water injection unit for spraying water in the form of a spray toward the plasma generator side of the microwave plasma reactor.

In addition, the frequency supply unit includes a power supply for generating a high voltage, a magnetron for generating a high frequency by the power applied from the power supply, an isolate for preventing damage to the magnetron due to the reflected wave at the rear end, and impedance. Automatically set, characterized in that consisting of a tuner to achieve impedance matching with the microwave plasma reactor.

The plasma generator may further include a high frequency aggregation unit that aggregates high frequencies delivered into the microwave plasma reactor, an ignition unit that discharges the collected high frequencies, and supplies a carrier gas to maintain the generated plasma. Characterized in that it comprises a plasma discharge unit for creating a smooth plasma atmosphere, the main processing device is characterized in that it further comprises an oxygen supply unit for supplying oxygen to the plasma generator side of the microwave plasma reactor.

In addition, the main processing unit includes a frequency supply unit for generating a high frequency by the applied power; And a catalytic reactor absorbing the high frequency transmitted from the frequency supply unit to release heat, and reacting with the released heat to promote and remove and process the decomposition of VOC contained in the waste gas and the concentrated gas. The high frequency input unit and the waste gas input unit is formed on one side, the other side is characterized in that provided with an absorber and a catalyst unit in the interior of the reactor body formed with the processing gas discharge unit on the other side.

In addition, the catalytic reactor is formed by forming a honeycomb-type catalyst structure inside the reactor body in which the high frequency input unit and the waste gas input unit are formed at one side, and the processing gas discharge unit is formed at the other side, and a coating layer made of an absorber material is formed on the catalyst structure. It is characterized by.

As described above, the present invention allows the resin and particles in the waste gas and the concentrated gas delivered to the concentrator and the main treatment device by the pretreatment device to be collected and removed from the large particles as well as suspended solid and liquid fine particles. The VOC adsorption of the concentrator can be prevented from being lowered, and the load of the main treatment device can be reduced, thereby increasing the performance and reliability of the system according to the increase in the VOC treatment efficiency.

In addition, the present invention generates a plasma by using a high frequency to enable processing at a lower temperature than the fossil fuel without using fossil fuel in the main processing device, and the heat generated by the plasma by resonating by the plasma to accelerate heat generation or radicals Complemented by the supply of water molecules and oxygen that change to a state, it is possible to save energy by generating high heat without LNG or an auxiliary heat source, thereby more economically increasing the decomposition efficiency of VOC and odor components, The risk of an explosion can be prevented in advance, which will improve the performance and reliability of the system as well as ensure safety.

In addition, the present invention by having a high-frequency catalyst to have the ability to decompose VOC even at a temperature lower than the plasma temperature, it is possible not only to secure the heat amount for the temperature rise, but also to ensure the ease and economy of material selection, as well as to increase the efficiency. There is an advantage that can improve the performance of the device according to the simplification and miniaturization of the device.

1 is a block diagram showing the overall configuration of a VOC processing system according to the present invention.
2A and 2B illustrate first and second pretreatment apparatuses applied to the present invention.
Figure 2a is a longitudinal sectional view showing the overall configuration.
FIG. 2B is a plan sectional view of FIG. 2A;
Figure 3 is a block diagram showing a main processing device applied to the present invention.
4 is a block diagram showing a plasma generator provided in the microwave plasma reactor of FIG.
Figure 5 is a block diagram showing another embodiment of the main processing device applied to the present invention.
6 is a cross-sectional view of the catalytic reactor of FIG.
7 is a perspective view of a catalyst unit showing another embodiment of the catalytic reactor of FIG.
8 is a block diagram showing a conventional VOC processing system.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the present invention includes a first pretreatment device 1, a concentrator 20, a second pretreatment device 1a, a main processing device 2, and an exhaust unit 40.

The first pretreatment apparatus 1 collects and removes large particles in particles in the waste gas through gas and liquid contact, and collects and removes suspended solids and liquid fine particles in particles using centrifugal force and liquid. The apparatus 1a is configured in the same manner as the first pretreatment apparatus 1, except that the target processing gas is a concentrated gas.

The concentrator 20 adsorbs and purifies VOC in the waste gas discharged from the first pretreatment device 1 with an adsorbent. The adsorbent is provided inside the concentrator 20, and zeolite having excellent adsorption and porosity is generally used. do.

The main processing unit 2 accelerates heat generation or changes to a radical state by resonating the VOC in the concentrated gas supplied through the second pretreatment unit 1a with plasma by high frequency and water molecules by the plasma. It is configured to have a decomposition ability by promoting the chain reaction of the waste gas, the exhaust portion 40 is a kind of chimney discharges the clean gas from the resin, particles and VOC is removed through the concentrator 20 and the main processing device (2) Part.

Next, a device that is a feature of the present invention will be described in more detail with reference to the accompanying drawings.

2A and 2B show the first and second pretreatment apparatuses applied to the present invention, and FIG. 2A is a longitudinal sectional view showing the overall configuration, and FIG. 2B is a plan sectional view of FIG. 2A.

As shown therein, the first and second pretreatment apparatuses 1 and 1a are venturi scrubbers 11 which remove particles and particles of large particles contained in waste gas and concentrated gas through a gas-liquid contact. And a cyclone scrubber (Cyclone) that collects and removes suspended solids and liquid fine particles in the waste gas and the concentrated gas by spraying water while forming a descending swirl stream by the waste gas and the concentrated gas supplied from the venturi scrubber 11. scrubber (12), the dust collection storage tank is provided in communication with the lower side of the venturi scrubber 11 and the cyclone scrubber 12 so that the dust collection in the venturi scrubber 11 and the cyclone scrubber 12 is collected and stored It consists of (13).

The venturi scrubber 11 constitutes a venturi body 111 in a vertical tube shape, and waste gas inlet 111a to which waste gas and concentrated gas to be treated are supplied to upper and lower sides of the venturi body 111. And a treated gas outlet 111b through which the waste gas and the concentrated gas are discharged, which are introduced into the venturi body 111 through the waste gas inlet 111a and the resin and large particles are collected and removed.

In addition, the venturi main body 111 is gradually reduced in cross section and then expands again through the neck portion to form the venturi part 112 so as to maintain the original cross-sectional size, and the upper venturi main body of the venturi part 112 ( Inside the 111, a dust collecting venturi supply pipe 113 having a plurality of venturi injection nozzles 113a is installed.

The cyclone scrubber 12 constitutes a cyclone body 121 in a vertical cylindrical shape, and waste gas supplied at a constant high speed from the venturi scrubber 11 in the tangential direction of the inner sidewall on one side and the upper side of the cyclone body 121. The waste gas supply unit 121a and the waste gas in which the particulate particles are collected and removed in the cyclone body 121 and the concentrated gas are sent to the main processing unit 2 so as to form the downturn air flow by the concentrated gas. The outlet 121b is formed. In this case, the waste gas supply part 121a of the cyclone body 121 is connected to the processing gas outlet 111b of the venturi body 111 to communicate with each other.

In addition, a cylindrical central axis 122 penetrated up and down is formed at the center of the upper end of the cyclone body 121 and configured to be the center of the downturn air flow, and a plurality of cyclones are formed on the outside of the central axis 122. A dust collecting cyclone supply pipe 123 having an injection nozzle 123a is provided. In addition, the cyclone body 121 further includes a demister 124 inside the upper portion of the central axis 122. Reference numerals 113b and 123b herein refer to valves.

In the first and second pretreatment devices 1 and 1a of the present invention configured as described above, first, the waste gas or the concentrated gas to be treated is introduced through the waste gas inlet 111a of the venturi scrubber 11, thereby Water is injected from the venturi injection nozzle 113a of the dust collecting venturi supply pipe 113 installed inside the venturi main body 111.

The water sprayed from the venturi injection nozzle 113a of the dust collecting venturi supply pipe 113 is atomized by increasing the kinetic energy in the venturi part 112 and decreasing the static pressure, thereby increasing the flow velocity. The particles and the inertia collision to remove the particles of large particles, the particles and water of the large particles containing water is collected by dropping to the lower side dust collecting storage tank 13 side of the venturi body (111).

In addition, the waste gas or the concentrated gas from which the particles of large particles are removed is returned to the inner sidewall of the cyclone body 121 through the process gas outlet 111b of the venturi body 111 and the waste gas supply 121a of the cyclone venturi part 112. It is supplied in a tangential direction to form a descending swirl flow in the cyclone body 121, and water is injected from the cyclone injection nozzle 123a of the dust collecting cyclone supply pipe 123 provided inside the cyclone body 121.

Accordingly, particles in the form of suspended solid and liquid fine particles in the waste gas and the concentrated gas containing water collide with the inner wall of the cyclone body 121 by centrifugal force and then fall and are collected in the dust collecting storage tank 13. The waste gas and the concentrated gas from which particles are removed are raised from the hollow central axis 122, which is the center of the descending turn air, and pass through the demister 124, thereby again collecting and removing the fine particles contained in the waste gas and the concentrated gas. After that, it is sent to the concentrator 20 or the main processor 2 through the process gas outlet 121b of the cyclone scrubber 12 for processing.

Figure 3 is a block diagram showing the overall configuration of the main processing device applied to the present invention, the main processing device 2 is composed of a frequency supply section 21 and the microwave plasma reactor 22, microwave plasma reactor 22 Water injection unit 23 and oxygen supply unit 24 for spraying water in the form of a spray inside the microwave plasma reactor 22 to compensate for the heat of the plasma generated in the) and to promote decomposition of the target processing gas together It is provided.

The frequency supply unit 21 uses a microwave, that is, a high frequency, a power supply device 211 for generating a high voltage, and a magnetron 212 for generating a high frequency by the power applied from the power supply device 211 and And an isolator 213 for preventing damage to the magnetron 212 due to the reflected wave at the rear end, and a tuner 214 for automatically setting the impedance and matching the impedance with the microwave plasma reactor 22.

In addition, the microwave plasma reactor 22 has a plasma generator 221 disposed therein as shown in FIG. 4, and the plasma generator 221 discharges the high frequency gathering unit 222 and the collected high frequency waves. And an ignition unit 223 for generating plasma and a plasma discharge unit 224 for supplying a carrier gas to maintain the generated plasma to form a smooth plasma atmosphere. Water and oxygen in a spray form are supplied through the injection unit 23 and the oxygen supply unit 24.

In the main processing apparatus 2 configured as described above, first, a high voltage is applied to the magnetron 212 to generate a high frequency in the magnetron 212, and the high frequency is passed through the isolator 213 and the tuner 214. It is delivered to) side. At this time, the isolator 213 prevents damage to the magnetron 212 due to the reflected wave at the rear end, and the tuner 214 automatically sets the impedance to achieve impedance matching with the microwave plasma reactor 22.

The high frequency transmitted to the microwave plasma reactor 22 forms plasma by the plasma generator 221 inside the microwave plasma reactor 22. At this time, the water molecules injected into the microwave plasma reactor 22 may cause resonance by the plasma to accelerate heat generation or change to a radical state, thereby treating the target processing gas introduced into the microwave plasma reactor 22, that is, waste gas. And it promotes the chain reaction of the concentrated gas to increase the decomposition efficiency.

Accordingly, it is possible to solve the problem of economic efficiency and efficiency of decomposing target gas using plasma by supplementing the calorific value of plasma which is significantly insufficient compared with fossil fuel and promoting decomposition.

On the other hand, oxygen acts as a flame retardant to promote the heat of plasma and the target processing gas, thereby completely burning, thereby minimizing the environmental pollution due to the increase in energy efficiency and the emission of carbon monoxide. .

5 and 6 show another embodiment of the main treatment device applied to the present invention, wherein the characteristics are that the catalyst is used instead of the plasma using the high frequency, and as shown in FIG. 5, the frequency supply unit 21 and the catalyst are shown. It is composed of a reactor 25, the frequency supply unit 21 is the same as the configuration of the plasma using a high frequency, so in order to avoid duplication, a detailed description is omitted, with reference to the accompanying drawings for the catalytic reactor 25 in detail Let's explain.

Figure 6 is a cross-sectional view showing a catalytic reactor applied to the main treatment apparatus of the present invention, as shown in the catalytic reactor 25 is a high frequency input unit 251a and waste gas input unit 251b is formed on one side, the treatment on the other side It consists of the reactor main body 251 which has the gas discharge part 251c. In addition, an inside of the reactor body 251 is provided with an absorber 252 that absorbs high frequency and converts it into heat and releases it, and reacts with heat emitted from the absorber 252 to promote decomposition of VOC contained in waste gas and concentrated gas. The catalyst unit 253 is provided with the absorber 252 at intervals.

The catalyst portion 253 is provided with a plurality of pellets 253b in the inside of the network 253a, the pellet 253b is composed of copper-manganese, platinum (Pt), palladium (Pd), plasma It has the advantage that it can solve the difficulty of securing the heat and temperature selection for temperature increase because it has the ability to decompose VOC in the waste gas even at a temperature lower than the temperature of 200 ~ 300 ℃.

In the catalytic reactor 25 of the present invention configured as described above, the high frequency and the target processing gas are introduced into the reactor body 251 through the high frequency input unit 251a and the waste gas input unit 251b, and the absorber (inside the reactor body 251) ( 252 absorbs the high frequency and converts it into heat and releases it. The pellet 253b of the catalyst unit 253 reacts with the heat emitted from the absorber 252 to promote the decomposition of the VOC contained in the target processing gas, thereby removing and treating it. The clean gas is sent to the exhaust unit 40 through the processing gas discharge unit 251c and discharged into the atmosphere.

Figure 7 shows another embodiment of the catalyst unit of the main treatment device applied to the present invention, wherein the characteristics are not provided with the absorber 252 and the catalyst unit 253, respectively, as shown in Figure 6, the catalyst The part 253 absorbs a high frequency, converts it into heat, and discharges it in parallel. To this end, the catalyst unit 253 has a honeycomb-shaped catalyst structure 253c therein to have a stable structure, and a coating layer 253d of an absorber material is formed on the catalyst structure 253c to form a coating layer 253d. It is configured to absorb and convert high frequency to release heat. When the heat release and the catalyst are simultaneously performed in the catalyst unit 253, there is an advantage in that the configuration of the device can be simplified as well as the size can be reduced.

As such, the present invention allows the particles in the waste gas delivered to the concentrator and the main processor by the first and second pretreatment devices to collect and remove not only large particles but also suspended solid and liquid fine particles, thereby adsorbing VOCs of the concentrator due to the existing particles. It is possible to prevent the deterioration of the concentration performance and to reduce the load on the main processing device.

In addition, in the main processing unit, plasma is generated by using high frequency to enable processing at a lower temperature than fossil fuel without using fossil fuel, and the heat of plasma causes resonance by the plasma to accelerate heat generation or change into a radical state. By supplementing with the supply of water molecules and oxygen, it is possible to save energy by generating high heat without LNG or auxiliary heat source, thereby increasing the efficiency of decomposition of VOC and odor components more economically, The risk can be prevented in advance.

In addition, by using a high-frequency catalyst to have a VOC decomposition ability at a temperature lower than the temperature of the plasma, it is possible to secure the amount of heat for the temperature rise, as well as the ease of selecting materials and economics.

Although the VOC treatment system according to the present invention has been described in detail above, this is only for describing the most preferred embodiments of the present invention, and the present invention is not limited thereto, and the scope thereof is determined by the appended claims. Are limited. It will be apparent to those skilled in the art that various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention.

1,1a: First and second pretreatment device
11: Venturi Scrubber
111: Venturi body 111a: waste gas inlet
111b: process gas outlet 112: venturi section
113: collecting dust venturi supply piping 113a: venturi injection nozzle
113b: valve
12: cyclone scrubber
121: cyclone body 121a: waste gas supply unit
121b: treatment gas outlet 122: central axis
123: collection cyclone supply pipe 123a: cyclone injection nozzle
123b: valve 124: demister
13: collection tank
2: main processing unit
21: frequency supply
211: power supply 212: magnetron
213: isolator 214: tuner
22: microwave plasma reactor
221: plasma generator 222: high frequency aggregation unit
223 ignition unit 224 plasma discharge unit
23: water injection unit 24: oxygen supply unit
25: catalytic reactor
251: reactor body 251a: high frequency input unit
251b: waste gas input unit 251c: process gas discharge unit
252: absorber 253: catalytic part
253a: mesh 253b: pellet
253c catalyst structure 253d coating layer

Claims (12)

A first pretreatment device (1) for collecting and removing large particles in particles in the waste gas through gas and liquid contact, and collecting and removing suspended solids and liquid fine particles in particles using centrifugal force and liquid; A concentrator 20 for adsorbing and purifying VOC in the waste gas discharged from the first pretreatment device 1 with an adsorbent; A second pretreatment apparatus (1a) which collects and removes large particles in the resin and particles contained in the concentrated gas in the concentrator 20, and collects and removes the suspended solids liquid particles in the particles using centrifugal force and liquid; The VOC in the concentrated gas supplied through the second pretreatment device 1a accelerates heat generation or changes into a radical state by resonance of water plasma by high frequency plasma and water plasma, thereby promoting chain reaction of waste gas. A main processing apparatus 2 having a decomposition capability; And an exhaust unit 40 for discharging the clean gas from which the VOC is removed through the concentrator 20 and the main processor 2.
The main processing unit (2) includes a frequency supply unit (21) for generating a high frequency by the applied power; A catalytic reactor (25) for absorbing the high frequency transmitted from the frequency supply unit (21) to release heat, and reacting with the released heat to accelerate and remove and process the decomposition of VOC contained in the waste gas and the concentrated gas; VOC treatment system.
The method of claim 1,
The first pretreatment apparatus 1 and the second pretreatment apparatus 1a include a venturi scrubber 11 which removes particles of large particles contained in the introduced waste gas and the concentrated gas through gas and liquid contact;
A cyclone scrubber (12) which collects and removes suspended solids and liquid fine particles in the waste gas by spraying water while forming a downturn air stream by the flow of the waste gas and the concentrated gas supplied from the venturi scrubber (11);
And a dust collecting storage tank 13 provided in communication with the lower portion of the venturi scrubber 11 and the cyclone scrubber 12 to store dust collected in the venturi scrubber 11 and the cyclone scrubber 12. One VOC treatment system.
The method of claim 2,
The venturi scrubber 11 includes a vertical venturi body 111 having a waste gas inlet 111a formed at an upper side thereof and a process gas outlet 111b formed at a lower side thereof;
A venturi part 112 formed in the venturi main body 111 to gradually reduce the cross section and expand again while passing through the neck portion to maintain the original cross-sectional size;
The dust collecting venturi supply pipe is installed inside the venturi body 111 of the upper side of the venturi part 112 and has a plurality of venturi injection nozzles 113a to spray water to the lower side of the venturi body 111. (113); VOC processing system, characterized in that consisting of.
The method of claim 2,
The cyclone scrubber 12 is a waste gas supply portion 121a is formed so that the waste gas and the concentrated gas of the venturi scrubber 11 flows in a constant high speed in a tangential direction of the inner side wall on one side to form a downturn air flow, the processing gas to the upper side A vertical cyclone body 121 having a discharge port 121b;
A hollow central shaft 122 formed at the center of the upper end of the cyclone body 121 to be the center of the downturn air flow;
A dust collecting cyclone supply pipe 123 installed at an outer side of the central axis 122 and having a plurality of cyclone injection nozzles 123a to inject water into the cyclone body 121; One VOC treatment system.
5. The method of claim 4,
The cyclone body (121) further comprises a demister (124) on the upper inner side of the central axis (122).
The method of claim 1,
The main processing unit (2) includes a frequency supply unit (21) for generating a high frequency by the applied power;
A microwave plasma reactor (22) comprising a plasma generator (221) for generating a plasma by discharging high frequency transmitted from the frequency supply part (21);
And a water injection unit (23) for spraying water in a spray form to the plasma generator (221) side of the microwave plasma reactor (22).
The method according to claim 6,
The frequency supply unit 21 includes a power supply device 211 for generating a high voltage, a magnetron 212 for generating a high frequency by the power applied from the power supply device 211, and a magnetron 212 due to a reflected wave at a rear end thereof. VOC processing system comprising an isolator (213) to prevent damage to the (), and a tuner (214) to automatically set the impedance, to achieve impedance matching with the microwave plasma reactor (22).
The method according to claim 6,
The plasma generator 221 includes a high frequency collection unit 222 for collecting high frequencies transmitted to the inside of the microwave plasma reactor 22, an ignition unit 223 for generating plasma by discharging the collected high frequencies, and VOC processing system comprising a plasma discharge unit 224 for supplying a carrier gas to maintain a plasma to create a smooth plasma atmosphere.
The method according to claim 6,
The main processing device (2) further comprises an oxygen supply unit (24) for supplying oxygen to the plasma generator (221) side of the microwave plasma reactor (22).
delete The method of claim 1,
The catalytic reactor 25 has a high frequency input unit 251a and a waste gas input unit 251b formed on one side, and an absorber 252 and a catalyst unit inside the reactor body 251 on which the processing gas discharge unit 251c is formed on the other side. A VOC processing system characterized by including 253 at intervals.
The method of claim 1,
The catalytic reactor 25 has a honeycomb-shaped catalyst structure 253c inside the reactor body 251 in which a high frequency input unit 251a and a waste gas input unit 251b are formed at one side and a process gas discharge unit 251c is formed at the other side. And forming a coating layer (253d) of absorber material on the catalyst structure (253c).

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