KR101260193B1 - Device and method for leak sensing - Google Patents

Device and method for leak sensing Download PDF

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KR101260193B1
KR101260193B1 KR1020110136140A KR20110136140A KR101260193B1 KR 101260193 B1 KR101260193 B1 KR 101260193B1 KR 1020110136140 A KR1020110136140 A KR 1020110136140A KR 20110136140 A KR20110136140 A KR 20110136140A KR 101260193 B1 KR101260193 B1 KR 101260193B1
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South Korea
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sensor
leak detection
sensing
leakage
supplying
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KR1020110136140A
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Korean (ko)
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조혁진
이상훈
서희준
문귀원
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한국항공우주연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/509—Detectors infrared

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  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: A device and a method for sensing a leakage are provided to sense leakages generated in several spots of a target object simultaneously by sensing the leakages by using infrared rays. CONSTITUTION: A device(1) for sensing a leakage comprises a supply unit(10) and a sensing unit(20). The supply unit supplies a sensitizer to the inside of a target object. The sensing unit senses the existence of a leakage of the sensitizer from the target object by using infrared rays. The supply unit supplies the sensitizer to the inside of the target object after heating.

Description

누설감지장치 및 방법{DEVICE AND METHOD FOR LEAK SENSING}Leak Detection System and Method {DEVICE AND METHOD FOR LEAK SENSING}

본 발명은 누설감지장치 및 방법에 관한 것으로서, 보다 구체적으로는 적외선을 이용하여 광범위한 영역의 미세 누설을 감지할 수 있는 누설감지장치 및 방법에 관한 것이다.
The present invention relates to a leak detection apparatus and method, and more particularly, to a leak detection apparatus and method capable of detecting fine leakage in a wide range using infrared light.

진공장치와 같은 밀폐력이 요구되는 장치의 경우, 미세 누설을 미연에 방지해야만 한다. 이러한 진공장치의 미세 누설 감지는 일반적으로, 진공장치의 내부에 헬륨가스를 채운 후, 내부로부터 헬륨가스가 누설되지를 스니퍼(sniffer)를 이용해 감지한다. 또는, 상기 진공장치의 내부를 진공상태로 만든 후, 상기 진공장치의 외부에서 누설이 의심되는 부위에 헬륨을 분사하여 연결된 헬륨누설감지기로 누설을 찾아내는 방법이 일반적이다. In the case of devices requiring a sealing force such as a vacuum device, fine leakage must be prevented in advance. In general, the microleak detection of the vacuum device is performed by filling a helium gas into the vacuum device, and then detecting a leak of helium gas from the inside using a sniffer. Alternatively, a method of finding a leak with a helium leakage detector connected by making the inside of the vacuum apparatus into a vacuum state and then spraying helium on a suspected leak from the outside of the vacuum apparatus.

그런데, 상기와 같은 일반적인 진공장치의 누설감지방법은, 누설이 의심이 되는 부위에 직접 스니퍼를 마주하도록 위치시키거나 헬륨 가스를 분사시켜야 하는 번거로운 문제점을 가진다. 뿐만 아니라, 상기 진공장치의 복수의 지점에서 동시에 누설이 발생될 경우, 이를 단시간에 확인하기 어려운 문제점도 가진다.
However, the leak detection method of the general vacuum apparatus as described above has a cumbersome problem of placing the sniffer directly on the suspected leak or injecting helium gas. In addition, when leakage occurs at a plurality of points of the vacuum apparatus at the same time, there is a problem that it is difficult to confirm this in a short time.

본 발명은 상기와 같은 문제점을 감안하여 안출된 것으로서, 대상체로부터 발생된 누설 여부를 적외선을 이용하여 광범위하게 감지함으로써 효율을 향상시킬 수 있는 누설감지장치 및 방법을 제공하기 위한 것이다.
SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a leak detection apparatus and method which can improve efficiency by detecting a wide range of leaks generated from an object using infrared rays.

상기 목적을 달성하기 위한 본 발명에 의한 누설감지장치는, 누설을 감지하고자 하는 대상체의 내부로 감지체를 공급하는 공급유닛 및, 상기 대상체를 향해 적외선을 이용하여, 상기 대상체 내부로부터의 상기 감지체가 누설되는지 여부를 감지하는 감지유닛을 포함한다. Leak detection apparatus according to the present invention for achieving the above object, the supply unit for supplying the sensor to the interior of the object to detect the leak, and using the infrared toward the object, the sensor from the inside of the object It includes a detection unit for detecting whether the leak.

일측에 의하면, 상기 공급유닛은 상기 감지체를 가열한 후, 상기 대상체 내부로 공급한다. According to one side, the supply unit heats the sensing body, and supplies the inside of the object.

일측에 의하면, 상기 대상체는 내부가 진공인 진공기이며, 상기 감지체는 가열된 헬륨 가스를 포함한다. According to one side, the object is a vacuum inside the vacuum, the sensor includes a heated helium gas.

일측에 의하면, 상기 감지유닛은 상기 대상체의 외부에서 상기 대상체로 촬영하는 적외선 카메라를 포함한다. According to one side, the detection unit includes an infrared camera to take with the object from the outside of the object.

본 발명의 일 실시예에 의한 누설감지방법은, 누설을 감지하고자 하는 대상체의 내부로 감지체를 공급하는 단계 및, 상기 대상체 외부에서 적외선을 이용하여, 상기 대상체 내부로부터 상기 감지체가 누설되는 여부를 감지하는 단계를 포함한다. Leak detection method according to an embodiment of the present invention, supplying a sensor to the interior of the object to detect the leakage, and using the infrared ray from the outside of the object, whether or not the sensor leaks from the inside of the object Detecting.

일측에 의하면, 상기 공급단계는 상기 감지체를 가열한 후 상기 대상체로 공급하며, 상기 감지단계는 상기 가열된 감지체가 상기 대상체로부터 누설됨을 온도 차이로 감지하는 적외선 카메라를 이용한다.
According to one side, the supplying step is heated to the sensor and then supplied to the object, the detection step uses an infrared camera for detecting the temperature difference that the heated sensor leaked from the object.

상기 구성에 의한 본 발명에 의하면, 첫째, 대상체로부터 발생된 누설을 적외선을 이용하여 감지함에 따라, 대상체의 복수의 지점에서 동시적으로 발생된 누설을 동시에 감지할 수 있게 된다. According to the present invention by the above configuration, first, by detecting the leakage generated from the object using infrared rays, it is possible to simultaneously detect the leakage simultaneously generated at a plurality of points of the object.

둘째, 동시에 대상체 전체적인 면적에 대해 적외선을 이용하여 누설을 감지함으로써, 기존과 같이 누설이 예상되는 부위에 일일히 감지수단을 위치시키던 작업성 저하의 문제점을 개선시킬 수 있게 된다. Second, at the same time, by detecting the leakage using the infrared light for the entire area of the object, it is possible to improve the problem of the workability deterioration to place the detection means in the area where leakage is expected as before.

셋째, 가열된 감지체를 이용함으로써, 미세한 누설까지도 감지할 수 있어 감지 효율 향상에 기여할 수 있게 된다.
Third, by using the heated sensor, even minute leakage can be detected, thereby contributing to improvement of detection efficiency.

도 1은 본 발명의 일 실시예에 의한 누설감지장치를 개략적으로 도시한 구성도, 그리고,
도 2는 도 1에 도시된 누설감지장치의 누설감지방법을 개략적으로 도시한 순서도이다. 1 is a configuration diagram schematically showing a leak detection apparatus according to an embodiment of the present invention, and
FIG. 2 is a flowchart schematically showing a leak detection method of the leak detection apparatus shown in FIG. 1.

이하, 첨부된 도면들에 기재된 내용들을 참조하여 본 발명에 따른 실시예를 상세하게 설명한다. 다만, 본 발명이 실시예들에 의해 제한되거나 한정되는 것은 아니다.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments.

도 1을 참고하면, 일실시예에 의한 누설감지장치(1)는 공급유닛(10) 및 감지유닛(20)을 포함한다. Referring to FIG. 1, the leak detection apparatus 1 according to an embodiment includes a supply unit 10 and a detection unit 20.

상기 공급유닛(10)은 누설을 감지하고자 하는 대상체(O)의 내부로 감지체(H)를 공급한다. 여기서, 상기 대상체(O)는 내부가 진공인 진공기를 포함한다. 또한, 상기 감지체(H)는 실온에서 기체 상태로 존재하며 화학 반응성이 낮음으로 인해, 시험 안정성을 제공할 수 있는 헬륨(He) 가스를 포함한다. The supply unit 10 supplies the sensing body H to the inside of the object O to detect leakage. Here, the object O includes a vacuum inside the vacuum. In addition, the detector (H) is present in the gaseous state at room temperature and because of the low chemical reactivity, it contains a helium (He) gas that can provide test stability.

이러한 공급유닛(10)은 도 1의 도시와 같이, 헬륨 가스인 감지체(H)를 공급하는 공급부(11)와 공급부(11)로부터 공급되는 감지체(H)를 가열하는 가열부(12)를 포함한다. 이에 따라, 상기 공급유닛(10)은 감지체(H)인 헬륨 가스를 가열한 상태로 즉, 고온의 헬륨 가스를 대상체(O)로 공급하게 된다. 이때, 상기 공급유닛(10)으로부터 공급되는 감지체(H)의 공급량은 도 1에 도시된 제어밸브(13)에 의해 제어된다. As shown in FIG. 1, the supply unit 10 includes a supply unit 11 for supplying a detector H that is helium gas, and a heating unit 12 for heating the detector H supplied from the supply unit 11. It includes. Accordingly, the supply unit 10 supplies the helium gas having a high temperature to the object O, that is, while the helium gas that is the sensing body H is heated. At this time, the supply amount of the sensing body H supplied from the supply unit 10 is controlled by the control valve 13 shown in FIG.

상기 감지유닛(20)은 대상체(O)를 향해 적외선을 이용하여, 대상체(O)의 누설여부를 감지한다. 상기 감지유닛(20)은 대상체(O)로부터 헬륨 가스를 포함하는 감지체(H)가 누설됨을 적외선 카메라와 같은 적외선 촬영수단을 이용하여 감지한다. 보다 구체적으로, 상기 감지유닛(20)은 적외선을 이용해 대상체(O)를 전 영역을 촬영함으로써, 가열된 헬륨 가스인 감지체(H)가 대상체(O)의 누설부위로부터 누설됨을 온도차이로 감지한다. 이에 따라, 상기 감지유닛(20)은 대상체(O)의 외부에서 적외선을 이용하여, 대상체(O)의 복수 지점에서 동시에 발생되는 누설을 동시에 감지할 수 있다.
The detection unit 20 detects the leakage of the object O by using infrared rays toward the object O. The sensing unit 20 detects leakage of the sensing body H containing helium gas from the object O by using infrared photographing means such as an infrared camera. More specifically, the sensing unit 20 detects the entire area of the object O by using infrared rays, and detects that the sensed body H, which is heated helium gas, leaks from the leaked portion of the object O at a temperature difference. do. Accordingly, the sensing unit 20 may simultaneously detect leakage occurring at a plurality of points of the object O by using infrared rays from the outside of the object O.

상기와 같은 구성을 가지는 본 발명에 의한 누설감지장치(1)의 누설감지방법을 도 1 및 도 2를 참고하여 설명한다. A leak detection method of the leak detection device 1 according to the present invention having the above configuration will be described with reference to FIGS. 1 and 2.

우선, 도 2의 도시와 같이, 상기 누설을 감지하고자 하는 대상체(O)의 내부로 감지체(H)를 공급한다(100). 여기서, 상기 공급단계(100)는 도 1과 같이, 공급부(11)로부터 공급되는 헬륨 가스를 포함하는 감지체(H)를 가열부(12)로 가열한 후, 공급한다. 이때, 상기 공급단계(100)의 감지체(H) 공급량은 제어밸브(13)에 의해 제어된다. First, as shown in FIG. 2, the sensor H is supplied into the object O to detect the leakage (100). Here, in the supplying step 100, as illustrated in FIG. 1, the sensing body H including the helium gas supplied from the supply unit 11 is heated by the heating unit 12, and then supplied. At this time, the supply amount of the sensing body (H) in the supply step 100 is controlled by the control valve (13).

상기 대상체(O)로 감지체(H)가 공급되면(100), 상기 대상체(O) 내부로부터 누설이 발생되는지를 적외선으로 이용하여 감지한다(200). 이때, 상기 적외선 감지단계(200)는 적외선 카메라와 같이, 가열된 감지체(H)가 대상체(O)로부터 누설됨을 온도 차이로 감지한다. 이와 같이, 상기 감지체(H)가 가열된 상태임에 따라, 상기 대상체(O)로부터 발생된 미세한 누설까지도 감지유닛(20)이 온도 차이로 감지하게 된다.
When the sensing body H is supplied to the object O (100), it detects whether leakage occurs from the inside of the object (O) using infrared rays (200). In this case, the infrared detection step 200 detects that the heated sensor H leaks from the object O, such as an infrared camera, by a temperature difference. As such, as the sensing body H is heated, even the minute leakage generated from the object O is sensed by the sensing unit 20 at a temperature difference.

상술한 바와 같이, 본 발명의 바람직한 실시예를 참조하여 설명하였지만 해당 기술분야의 숙련된 당업자라면 하기의 청구범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.
Although the present invention has been described with reference to the preferred embodiments thereof, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined in the following claims. It can be understood that

1: 누설감지장치 10: 공급유닛
11: 공급부 12: 가열부
20: 감지유닛1: leak detection device 10: supply unit
11: supply part 12: heating part
20: detection unit

Claims (6)

누설을 감지하고자 하는 대상체의 내부로 감지체를 공급하는 공급유닛; 및
적외선을 이용하여 상기 대상체 내부로부터의 상기 감지체가 누설되는지 여부를 감지하는 감지유닛;
을 포함하며,
상기 공급유닛은 상기 감지체를 가열한 후, 상기 대상체 내부로 공급하는 누설감지장치.
A supply unit supplying a sensor to the inside of the object to detect leakage; And
A sensing unit detecting whether the sensing body leaks from the inside of the object by using infrared rays;
/ RTI >
The supply unit is a leak detection device for supplying the inside of the object after heating the sensor.
삭제delete 제1항에 있어서,
상기 대상체는 내부가 진공인 진공기이며, 상기 감지체는 가열된 헬륨 가스를 포함하는 누설감지장치.
The method of claim 1,
The object is a vacuum inside the vacuum chamber, the detector is a leak detection device comprising a heated helium gas.
제1항에 있어서,
상기 감지유닛은 상기 대상체의 외부에서 상기 대상체를 촬영하는 적외선 카메라를 포함하는 누설감지장치.
The method of claim 1,
The detection unit includes a leak detection apparatus including an infrared camera to photograph the object from the outside of the object.
누설을 감지하고자 하는 대상체의 내부로 감지체를 공급하는 단계; 및
상기 대상체 외부에서 적외선을 이용하여, 상기 대상체 내부로부터 상기 감지체가 누설되는 여부를 감지하는 단계;
를 포함하며,
상기 공급단계는 상기 감지체를 가열한 후 상기 대상체로 공급하는 누설감지방법.
Supplying a sensor to an interior of an object to detect leakage; And
Detecting whether the sensor leaks from the inside of the object by using infrared rays outside the object;
Including;
The supplying step is a leak detection method for supplying to the object after heating the sensor.
제5항에 있어서,
상기 감지단계는 상기 가열된 감지체가 상기 대상체로부터 누설됨을 온도 차이로 감지하는 적외선 카메라를 이용하는 누설감지방법. The method of claim 5,
The detecting step is a leak detection method using an infrared camera for detecting a temperature difference that the heated sensor leaks from the object.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101406697B1 (en) * 2013-06-21 2014-06-13 김동언 Apparatus inspecting waterproof of mobile by thermal imaging camera
KR101860201B1 (en) * 2016-05-20 2018-05-23 한국에너지기술연구원 A leak test apparatus and a leak test mothod for a fuel cell stack

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003042886A (en) 2001-07-30 2003-02-13 Japan Atom Energy Res Inst Leak detecting method and leak measuring apparatus
JP2010096741A (en) 2008-10-16 2010-04-30 Korea Plant Service & Engineering Co Ltd Nondestructive inspection equipment
KR101017480B1 (en) * 2009-01-30 2011-02-25 주식회사 디섹 Method of leak detection for lngc cargo tank using infrared rays camera

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Publication number Priority date Publication date Assignee Title
JP2003042886A (en) 2001-07-30 2003-02-13 Japan Atom Energy Res Inst Leak detecting method and leak measuring apparatus
JP2010096741A (en) 2008-10-16 2010-04-30 Korea Plant Service & Engineering Co Ltd Nondestructive inspection equipment
KR101017480B1 (en) * 2009-01-30 2011-02-25 주식회사 디섹 Method of leak detection for lngc cargo tank using infrared rays camera

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101406697B1 (en) * 2013-06-21 2014-06-13 김동언 Apparatus inspecting waterproof of mobile by thermal imaging camera
KR101860201B1 (en) * 2016-05-20 2018-05-23 한국에너지기술연구원 A leak test apparatus and a leak test mothod for a fuel cell stack

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