KR101258878B1 - The light addressing bio sensor chip and the driving method thereof - Google Patents

Abstract

The present invention relates to a biosensor chip, wherein the apparatus is arranged in a matrix, the plurality of biosensor cells selectively outputting a sensing signal by external light scanning, and the plurality of biosensor cells are simultaneously connected and selected. And a sensing line for transmitting the sensing signal from the biosensor cell, and an output terminal for receiving the sensing signal from the sensing line and outputting the sensing signal to the outside. Therefore, the biosensor chip does not include a separate driving unit while implementing the plurality of biosensor cells in an array form, thereby simplifying the manufacturing process. That is, by selectively scanning a cell to be sensed through an external light source, the cost of the biosensor chip that is used and discarded once can be reduced.

Biosensors, Biosensor Arrays, Optical Scanning, Optical Addressing

Description

The light addressing bio sensor chip and the driving method

The present invention relates to a biosensor. In particular, the invention relates to biosensors that are scanned by light.

Recently, efforts are being made to develop nano-bio fusion technologies that fuse technologies and bio technologies. In particular, in the field of nano-bio chips, which is one of nano-bio fusion technologies, researches on biosensors for the purpose of detecting proteins in the blood are being actively conducted.

 Representatively, biosensors based on silicon capable of mass production using semiconductor processes have been proposed, and biosensor chip technology using semiconductor microfabrication techniques has been proposed as shown in FIG. 1.

The biosensor chip of FIG. 1 uses a structure of a memory cell such as a conventional DRAM to form a bio cell in which specific probe molecules are dispersed, induces a reaction with a target molecule, and then general addressing used in a memory. The method detects whether the corresponding biosensor cell reacts.

Such a biosensor chip includes a biosensor connected to a transistor, and outputs a detection signal of the biosensor in which the transistor is selectively turned on and connected according to a scan input signal from the outside.

Accordingly, the biosensor chip includes a row scan unit and a column scan unit connected to the biosensor array as shown in FIG. 1, and the row and column scan units provide the scan input signal to the buffer unit and the corresponding scan line that receive external scan input signals. Contains a decoder to output. The circuit of the scan unit may be formed together when the transistor of the biosensor cell is formed, or may be attached to a separate chip after the biosensor is formed on the substrate.

However, when the circuit of the scanning unit for extracting the detection signal is formed in the biosensor chip as shown in FIG. 1, the manufacturing process of the biosensor chip is complicated, and the manufacturing cost of the biosensor chip discarded after one-time use becomes high.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a biosensor capable of selectively obtaining a detection signal by light without a separate scanning circuit.

The biosensor chips according to the present invention are arranged in a matrix and are selectively turned on by external light scanning to generate a reference electric signal, and the reaction between the probe molecule and the target molecule by receiving the reference electric signal. A plurality of biosensor cells comprising a biosensor for generating and outputting a sensing signal based on the reference electrical signal, and at least simultaneously connected with the plurality of biosensor cells to transfer the sensing signals from the selected biosensor cell One sensing line, and an output terminal for receiving the sense signal from the sense line and outputs to an external reader.

The biosensor may vary in resistance depending on a reaction between the probe molecule and the target molecule.

The optoelectronic device may include a solar cell generating a turn-on voltage according to the external light scanning, and a transistor turned on by the turn-on voltage of the solar cell to flow the reference electric signal to the biosensor.

The transistor may include a gate electrode connected to the solar cell to receive the turn-on voltage, a source electrode connected to a reference voltage, and a drain electrode connected to the biosensor to flow the reference electrical signal based on the reference voltage. Can be.

The optoelectronic device may include an optical transistor that is turned on in response to the external light scanning to flow the reference electrical signal to the biosensor.

The phototransistor may include a semiconductor layer in which electron-hole pairs are generated by the external light irradiation to lower the resistance.

The photo transistor is connected to a gate electrode connected to a first reference voltage, a source electrode connected to a second reference voltage, and connected to the biosensor to flow the reference electrical signal based on the first and second reference voltages. It may include a drain electrode.

The biosensor chip may include a plurality of biosensor cell groups including the plurality of biosensor cells, and one sensing line may be simultaneously connected to the plurality of biosensor cells of one biosensor cell group.

The number of output terminals may be equal to the number of sensing lines.

The biosensor chip may further include a power supply terminal that receives a power supply voltage from an external source and applies the power supply voltage to the plurality of biosensor cells.

The plurality of biosensor cells may include different probe molecules.

On the other hand, the biosensor cells according to the present invention are arranged in a matrix, a plurality of biosensor cells for selectively generating and outputting a detection signal by an external light scanning, the biosensors selected and connected simultaneously with the plurality of biosensor cells At least one sensing line for transmitting the sensing signal from the sensor cell, and an output terminal for receiving the sensing signal from the sensing line and outputting the sensing signal to an external reader.

The biosensor cell may include a photodiode formed of a P-type doping layer, an N-type doping layer, and an undoped region, and a plurality of probe molecules fixed on the undoped region.

The photodiode may change a current by a change in transmittance according to a reaction between the probe molecule and the target molecule.

The biosensor chip may further include a power terminal configured to receive a power voltage from an external source and apply the power voltage to the plurality of biosensor cells.

The plurality of biosensor cells may include different probe molecules.

Meanwhile, the method of driving a biosensor chip according to the present invention includes exposing a plurality of biosensor cells arranged in a matrix to a detection sample containing a target molecule, and selecting the biosensor cells from which a detection signal is to be acquired. Irradiating the light with the light, the transistor of the selected biosensor cell is turned on by the light to output a reference electrical signal to the biosensor, and obtains the detection signal from the biosensor based on the reference electrical signal. Outputting through the output terminal to the outside.

The sensing signal of the selected biosensor cell may be transmitted to the output terminal through a sensing line connected simultaneously with the plurality of biosensor cells.

The biosensor cell may include a solar cell generating a turn-on voltage according to external light, a transistor turned on by the turn-on voltage of the solar cell to flow the reference electric signal, and receiving the reference electric signal of the transistor and the probe molecule. It may include a biosensor varying according to the reaction between the target molecules to generate the detection signal.

The biosensor cell includes a semiconductor layer in which electron-hole pairs are generated by light to lower resistance, and are turned on according to the external light to flow the reference electric signal, and the reference electric signal of the photo transistor. In response to the reaction between the probe molecule and the target molecule may include a biosensor to generate the detection signal.

According to the present invention, since a plurality of biosensor cells are implemented in an array form in a biosensor chip, a separate driving unit is not included, thereby simplifying the manufacturing process. That is, by selectively scanning a cell to be sensed through an external light source, the cost of the biosensor chip that is used and discarded once can be reduced.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like parts throughout the specification.

Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between .

Throughout the specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding other components unless specifically stated otherwise. In addition, the terms “… unit”, “… unit”, “module”, etc. described in the specification mean a unit that processes at least one function or operation, which may be implemented by hardware or software or a combination of hardware and software. have.

Hereinafter, a biosensor chip according to the present invention will be described with reference to FIG. 2.

2 is a block diagram showing a biosensor chip according to the present invention.

Referring to FIG. 2, the biosensor chip according to the present invention includes a plurality of biosensor cells SC11-SCmn 210 formed on the substrate 200.

The plurality of biosensor cells (SC11-SCmn) 210 are arranged in the form of an mxn matrix, and each biosensor cell (SC11-SCmn) is formed by fixing a specific probe molecule.

That is, in order to detect various target molecules in one biosensor chip, each biosensor cell (SC11-SCmn) 210 includes specific prop molecules that react with specific target molecules.

The plurality of sensor cells (SC1n-SCmn) 210 forming one column (n, n = 1 ,,, n) are connected to a plurality of sensing lines extending in the column direction at the same time, and the plurality of sensing lines are connected to one sensor line. It is connected to sense terminal OUT at the same time. That is, the plurality of biosensor cells SC11-SCmn 210 forming a matrix output the sensing signal to the outside through one output terminal OUT 220.

Unlike in FIG. 2, a sensing line extends in a row direction and may be simultaneously connected to a plurality of sensor cells (SCm1-SCmn) 210 forming one row (m, m = 1 ,,, m), and a sensing line and a sensor cell. The connection of (SC11-SCmn) 210 may vary depending on the design.

For example, a plurality of biosensor cells (SCm1-SCmn) 210 in the biosensor chip are grouped by a predetermined number to form a plurality of biosensor cell groups, and a plurality of biosensor cells (SCm1-S) in each biosensor cell group. SCmn) 210 may be connected to one sensing line.

That is, the number of biosensor cell groups and the number of sensing lines may be the same, and the number of such sensing lines may be the same as the number of output terminals OUT 220.

Meanwhile, the biosensor chip includes a power supply terminal 230, and the power supply terminal 230 is connected to a plurality of reference voltage lines (not shown) according to a circuit of the biosensor cells SC11-SCmn 210 and at least one. The above reference voltage is supplied to each biosensor cell (SC11-SCmn) 210.

As such, the biosensor chip does not include a scanning circuit for selecting the biosensor cells (SC11-SCmn) 210 to detect the detection signal in the chip, and the plurality of biosensor cells (SC11-SCmn) forming a matrix. Only 210 is formed.

The biosensor chip is connected to the detection signal of the selected biosensor cell (SC11-SCmn) 210 by selecting the biosensor cells (SC11-SCmn) 210 to detect the detection signal by the light incident from the outside. Output to the output terminal (OUT) through the sense line.

Accordingly, each biosensor cell (SC11-SCmn) 210 includes an optical element that is selectively activated by light to output a sensing signal to the output terminal OUT.

Hereinafter, a biosensor cell according to the present invention will be described with reference to FIGS. 3 to 6.

3 is a circuit diagram of a biosensor cell according to a first embodiment of the present invention.

The biosensor according to the first embodiment of the present invention includes a plurality of biosensor cells, and each biosensor cell is composed of a circuit as shown in FIG. 3.

Referring to FIG. 3, the biosensor cell includes an optoelectronic device 211, a transistor Tr, and a biosensor 213.

The transistor Tr includes a source electrode connected to the first power supply voltage REF1, a drain electrode connected to the biosensor 213, and a gate electrode connected to the photoelectric device 211.

The photoelectric device 211 is a photoreactive device such as a solar cell, and is formed between the second power supply voltage REF2 and the gate electrode of the transistor Tr, and turns on the transistor Tr in response to light from the outside. The voltage is supplied to the gate electrode.

The biosensor 213 includes a probe molecule capable of reacting with a specific target molecule, and a signal change occurs according to a reaction between the target molecule and the probe molecule.

Such probe molecules may be substances that can react with target molecules such as proteins, DNA or antigens in the blood.

The biosensor 213 is connected between the drain electrode of the transistor Tr and the sensing line S / L, and receives a current from the drain electrode of the transistor Tr and varies according to the reaction of the target molecule and the probe molecule. The signal flows through the sensing line S / L.

As described above, in the biosensor cell selected by the external light, the photoelectric element 211 generates an electrical signal by photoelectrically converting the external light, and the electrical signal is supplied to the gate electrode of the transistor Tr to supply the transistor Tr. Is turned on to flow a reference current to the drain electrode. That is, the biosensor 213 receives a reference current from the transistor Tr according to an external light scan and flows a signal, which is changed according to the response of the probe molecule, to the sensing line S / L as a sensing signal.

The sensing signal for the biosensor cell selected by the external light is output to the output terminal OUT of FIG. 1 through the sensing line S / L connected to the biosensor cell.

Accordingly, by selectively irradiating light to the biosensor cell to obtain the detection signal using external light without a separate scanning circuit in the biosensor chip, the detection signal of the biosensor cell can be obtained. In addition, by reading the detection signal, it is possible to determine whether a target molecule reacts with the probe molecule of the biosensor cell in the sample.

Meanwhile, by using the feature that the transistor Tr of the biosensor cell selected by light is turned on, the probe molecules may be electrically selectively surface-immobilized on the biosensor 213 of each biosensor cell.

In the selective surface fixation of the electrical method, if the voltage of the portion to which the surface is desired to be immobilized is higher than the threshold voltage, the probe molecules in the solution flowing over the portion react with the link molecules on the surface to form the surface.

Accordingly, when light is injected into a desired biosensor cell while flowing a specific probe molecule, the transistor Tr is turned on to apply the first power supply voltage REF1 to the biosensor, and the specific probe molecule currently flowing on the biosensor is selectively fixed. do. In this case, the level of the first power supply voltage REF1 in FIG. 2 satisfies a level capable of immobilizing a specific probe molecule.

Next, when the same process is repeated in neighboring biosensor cells while sequentially flowing other probe molecules, other probe molecules may be immobilized on the biosensor of the biosensor cell.

Hereinafter, another biosensor cell of the present invention capable of obtaining a reaction according to light scanning will be described with reference to FIGS. 4 to 6.

4 is a cross-sectional view of a biosensor cell according to a second embodiment of the present invention, FIG. 5 is a cross-sectional view of a biosensor cell according to a third embodiment of the present invention, and FIG. 6 is a reaction of the biosensor cell of FIG. The detection signal is shown.

Referring to FIG. 4, the biosensor cell according to the second embodiment of the present invention includes a phototransistor.

The phototransistor according to the second embodiment of the present invention is a combination of the transistor Tr and the photoelectric device 211 of FIG. 3. In the phototransistor of FIG. 4, the source electrode 450 is connected to the first power supply voltage REF1. The drain electrode 450 is connected to the biosensor 213, and the gate electrode 410 is connected to the second power supply voltage REF2.

Such a photo transistor has a structure as shown in FIG. 4.

The gate electrode 410 is formed on the substrate 400, and the gate insulating layer 420 and the semiconductor layer 430 are formed on the gate electrode 410.

The semiconductor layer 430 is a photosensitive layer, and may be doped with amorphous silicon and covered with the protective layer 440.

The passivation layer 440 may be formed of nitride, and the source electrode 450 and the drain electrode 450 are formed on both sides of the gate electrode 410 on the passivation layer 440.

In this case, the semiconductor layer 430 has a very high resistance when light is not emitted from the outside, and does not connect the source electrode 450 and the drain electrode 450, and when light is emitted from the outside, an electron-hole pair is generated. As a result, the resistance is very low to connect between the source electrode 450 and the drain electrode 450.

Therefore, in the biosensor cell including the phototransistor of FIG. 4, when light is irradiated from the outside to the selected biosensor cell, the phototransistor of the selected biosensor cell is turned on to receive a reference current based on the first power supply voltage REF1. It flows to the biosensor 213 through the drain electrode 450.

As illustrated in FIG. 3, the biosensor 213 receives a reference current from the phototransistor and transmits the signal to the sensing line S / L by varying a signal according to whether the probe molecule and the target molecule react.

In the case of such a photo transistor, the structure of the transistor is not limited to FIG. 4 and may be variously formed.

Meanwhile, the biosensor cell according to the third embodiment of the present invention may include a biosensor aligned with a photodiode as shown in FIG. 5.

Referring to FIG. 5, an insulating film 510 is formed on the substrate 500, and a silicon layer 550 is formed on the insulating film 510.

The silicon layer 550 is formed with an N-type doping layer (N) and a P-type doping layer (P), and the non-doped region (I) between the N-type doping layer (N) and the P-type doping layer (P). Is formed.

The N-type doping layer N and the P-type doping layer P may be formed by performing ion implantation on the surface of the substrate 500.

Next, the electrodes 560 are formed on the N-type doping layer N and the P-type doping layer P, respectively.

The electrode 560 may be formed of a doped polysilicon film, a metal film, a conductive metal nitride film, or the like, and may form ohmic contacts with the N-type doping layer (N) and the P-type doping layer (P). Includes all substances present

The light absorption layer 570 is formed on the photodiode.

The light absorbing layer 570 is formed while opening the undoped region I of the silicon layer 550, and reflects or absorbs light from the outside to prevent the light absorbing layer 570 from being transmitted to the lower portion.

The light absorption layer 570 may be made of a metal or the like, and may be omitted.

As such, the probe molecules 580 are fixed on the undoped region I opened by the light absorption layer 570 to form a biosensor.

In the biosensor cell of FIG. 5, the electrode 560 on the P-type doping layer P is connected to a power supply voltage (not shown), and the electrode 560 on the N-type doping layer N is a sensing line ( S / L) is connected.

The biosensor cell exposes the biosensor chip to the measurement sample to induce a reaction between the probe molecule and the target molecule of the biosensor cell, and selects a biosensor cell to detect the reaction and irradiates light.

When the probe molecule and the target molecule of the irradiated biosensor cell react with each other, the amount of light reaching the undoped region (I) of the photodiode decreases to form an electron-electron formed in the undoped region (I). The pair decreases.

Therefore, as shown in FIG. 6, the current flowing between the N-type doping layer N and the P-type doping layer P of the photodiode decreases.

When such a current is output to the output terminal OUT as a sensing signal along the sensing line S / L, it is possible to read whether or not the probe molecule of the corresponding biosensor cell reacts according to the magnitude of the current.

7 illustrates a biosensor chip and an optical scanning unit according to the present invention.

As shown in FIG. 7, the biosensor chip 700 includes a plurality of biosensor cells each including a specified probe molecule, and does not include a scanning circuit in the chip.

As described above, after the biosensor chip 700 is exposed to the detection sample, the reaction of the probe molecule and the target molecule is induced, and the reaction is detected using the optical scanning unit 750 outside the biosensor chip 700. The biosensor to be selectively irradiated with light.

The light scanning unit 750 may be formed of a plurality of light sources, and may be a short wavelength light source, a broadband light source, or a white light source.

The sensing signal is output to a sensing line connected to the selected biosensor cell by the optical scanning, and the sensing signal is applied to an external reading circuit through an output terminal.

Since the biosensor chip 700 including various probe molecules is only a one-time non-reusable product after being exposed to a detection sample, the biosensor chip 700 does not include a scanning circuit in the biosensor chip 700 and does not include a biosensor cell and a sensing line. And simplifying the chip to include only one output terminal, and by selecting the biosensor cell to be detected by light scanning of the external sensing cassette, the manufacturing process of the biosensor chip can be simplified and the cost can be reduced.

The embodiments of the present invention described above are not only implemented by the apparatus and method but may be implemented through a program for realizing the function corresponding to the configuration of the embodiment of the present invention or a recording medium on which the program is recorded, The embodiments can be easily implemented by those skilled in the art from the description of the embodiments described above.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It belongs to the scope of right.

1 is a block diagram showing a conventional biosensor chip.

2 is a block diagram showing a biosensor chip according to the present invention.

3 is a circuit diagram of a biosensor cell according to a first embodiment of the present invention.

4 is a cross-sectional view of a biosensor cell according to a second embodiment of the present invention.

5 is a cross-sectional view of a biosensor cell according to a third embodiment of the present invention.

6 illustrates a sensing signal according to the response of the biosensor cell of FIG. 5.

7 illustrates a biosensor chip and an optical scanning unit according to the present invention.

Claims (20)

An optoelectronic device arranged in a matrix and selectively turned on by external light scanning to generate a reference electric signal, and A biosensor that receives the reference electrical signal and generates and outputs a detection signal based on the reference electrical signal according to a reaction between the probe molecule and the target molecule. A plurality of biosensor cells, including At least one sensing line connected to the plurality of biosensor cells simultaneously to transfer the sensing signal from the selected biosensor cell, and An output terminal receiving the sensed signal from the sensed line and outputting the sensed signal to an external reader Containing Biosensor chip. The method of claim 1, The biosensor may vary in resistance according to a reaction between the probe molecule and the target molecule. Biosensor chip. The method of claim 1, The photoelectric device is A solar cell generating a turn-on voltage according to the external light scanning, and A transistor which is turned on by the turn-on voltage of the solar cell and flows the reference electric signal to the biosensor Containing Biosensor chip. The method of claim 3, The transistor A gate electrode connected to the solar cell to receive the turn-on voltage; A source electrode connected to the reference voltage, and A drain electrode connected to the biosensor to flow the reference electrical signal based on the reference voltage Containing Biosensor chip. The method of claim 1, The photoelectric device is An optical transistor that is turned on according to the external optical scan to flow the reference electrical signal to the biosensor Containing Biosensor chip. The method of claim 5, The photo transistor is And a semiconductor layer in which electron-hole pairs are generated by the external light irradiation to lower the resistance. Biosensor chip. The method of claim 5, The photo transistor is A gate electrode connected to the first reference voltage, A source electrode connected to the second reference voltage, and A drain electrode connected to the biosensor to flow the reference electrical signal based on the first and second reference voltages; Containing Biosensor chip. The method of claim 1, The biosensor chip is And a plurality of biosensor cell groups including the plurality of biosensor cells, One sensing line is connected to the plurality of biosensor cells of one biosensor cell group simultaneously. Biosensor chip. The method of claim 1, The number of output terminals is equal to the number of sensing lines. Biosensor chip. The method of claim 1, The biosensor chip is A power supply terminal that receives a power supply voltage from the outside and applies it to the plurality of biosensor cells Further comprising Biosensor chip. 3. The method of claim 2, The plurality of biosensor cells Containing the different probe molecules Biosensor chip. delete delete delete delete delete Exposing a plurality of biosensor cells arranged in a matrix to a detection sample containing target molecules, Selecting the biosensor cell to acquire the detection signal and irradiating light from the outside; The transistor of the selected biosensor cell is turned on by the light to output a reference electrical signal to a biosensor, and Acquiring the detection signal from the biosensor based on the reference electrical signal and outputting the detected signal to the outside through an output terminal; Method of driving a biosensor chip comprising a. 18. The method of claim 17, The sensing signal of the selected biosensor cell is transmitted to the output terminal through a sensing line connected to the plurality of biosensor cells simultaneously. Method of driving biosensor chip. 19. The method of claim 18, The biosensor cell is A solar cell generating a turn-on voltage according to external light, A transistor turned on by the turn-on voltage of the solar cell and flowing the reference electric signal; A biosensor that receives the reference electrical signal of the transistor and varies according to a reaction between a probe molecule and the target molecule to generate the detection signal Containing Method of driving biosensor chip. 19. The method of claim 18, The biosensor cell is A phototransistor including a semiconductor layer in which electron-hole pairs are generated by light to lower resistance, and are turned on according to the external light to flow the reference electrical signal; and A biosensor that receives the reference electrical signal of the phototransistor and varies according to a reaction between a probe molecule and the target molecule to generate the detection signal Containing Method of driving biosensor chip.

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