KR101248862B1 - High-resolution pattering method by using solvent-mediated nano transfer roll-to-roll printing - Google Patents

Abstract

The present invention comprises the steps of selectively filling a functional liquid material only on the intaglio portion of the roll on which the intaglio pattern is formed, forming a liquid fluidized layer by spraying a solvent on the surface of the substrate to be transferred; Contacting the transfer substrate having the liquid fluidized layer formed thereon to transfer the pattern of the functional liquid material onto the transfer substrate, and separating the roll in contact with the transfer substrate from the transfer substrate. It relates to a fine pattern forming method using a nano-transfer roll to roll printing method through a liquid fluidized bed.

Liquid fluidized bed, functional liquid material, roll-to-roll printing, fine pattern

Description

Fine pattern formation method using nano-transfer roll-to-roll printing method through a liquid fluidized bed {HIGH-RESOLUTION PATTERING METHOD BY USING SOLVENT-MEDIATED NANO TRANSFER ROLL-TO-ROLL PRINTING}

The present invention relates to a method of forming a fine pattern of a functional material, and more particularly to a method of forming a fine pattern of a functional material using a nano transfer roll-to-roll printing method through a liquid fluidized bed.

Patterning methods are a very important factor in the fabrication of information storage and display, MEMS, small sensors, microfluidic devices, biochips, photonic crystals and optical devices. Such a patterning method has been tried in various ways from a photolithography process to an electron beam etching process and a bottom up process based on self-assembly. The choice of a particular method among the respective patterning methods will depend on the application technique, and in particular the easy method should be chosen depending on the size and density of the pattern required.

On the other hand, the conventional patterning methods each have problems, and there is a limit of its application. Specifically, photolithography has the disadvantage of requiring expensive equipment and complicated processes, and in the case of soft lithography, the use of soft stamps makes it difficult to print large areas and continuous printing, has a high defect rate, and directly prints materials to be patterned. Difficulty in printing, there was a problem that additional processing is required. In addition, in the case of imprinting, there is a problem in that large area patterning is difficult and direct printing of the material to be patterned is difficult, so that a subsequent process is additionally required, and in the case of inkjet printing, precision patterning of tens of micrometers or less has been difficult. .

Recently, gravure and gravure offset printing, flexographic printing, and the like have been developed to realize a roll-to-roll concept as a patterning method that can simplify the complex manufacturing process by using a printing process and lower the manufacturing cost of the device. .

However, as such a conventional patterning method, gravure and gravure-offset printing can freely control the depth of the grooves inscribed in the gravure roll to form a fine pattern to some extent, but there is a problem that precision patterning of several micro size or less is impossible. . In addition, flexographic printing also had a problem that precision patterning of several micro size or less is impossible.

Accordingly, an object of the present invention is to provide a fine pattern forming method using a nano transfer roll-to-roll printing method through a liquid fluidized bed in order to solve the problems of the conventional patterning methods as described above. By the micro-pattern forming method using the nano-transfer roll-to-roll printing method through the liquid fluidized bed according to the present invention, a complex manufacturing process can be simplified to lower the manufacturing cost of the device, and a roll-to-roll concept capable of precise patterning The subsequent process is simple by patterning the functional material directly on the transfer substrate using a functional liquid material containing organic molecules, polymers, nanoparticles, etc., and a liquid fluidized layer between the roll and the transfer substrate is formed. By using this, a liquid bridge is formed between the roll and the transfer substrate, so that a close contact is possible.

As a technical means for achieving the above technical problem, an aspect of the present invention provides a method for forming a fine pattern using a nano transfer roll to roll printing method through a liquid fluidized bed comprising the following steps: do:

Selectively filling the functional liquid material only in the intaglio portion of the roll on which the intaglio pattern is formed,

Spraying a solvent on the surface of the transfer substrate to form a liquid fluidized layer,

Transferring a pattern of the functional liquid material onto the transfer substrate by contacting a roll filled with a functional liquid material selectively to the intaglio portion only to the transfer substrate on which the liquid fluid layer is formed, and

Separating the roll in contact with the transfer substrate from the transfer substrate.

In one embodiment of the present invention, the step of transferring the pattern of the functional liquid material on the transfer substrate, wherein the liquid fluidized layer formed between the transfer substrate and the functional liquid material is a liquid bridge (bridge) Can be performed.

In another embodiment of the present invention, after the step of selectively filling the functional liquid material only in the negative portion of the intaglio patterned roll may further include soft-baking the selectively filled functional liquid material to reduce fluidity. .

In another embodiment of the present invention, the functional liquid material may include a metal ink or an oxide ink.

The method of forming a fine pattern using the nano-transfer roll-to-roll printing method using the liquid fluidized bed of the present invention can simplify the complicated manufacturing process, lower the manufacturing cost of the device, and realize a roll-to-roll concept capable of precise patterning. In addition, by using a functional liquid material containing organic molecules, polymers, nanoparticles, and the like, the functional material is directly patterned onto the substrate to be transferred. The subsequent process is simple, and the conventional roll-to-roll concept has less flexibility. Although there are many problems in contact with the present invention, in the present invention, a liquid bridge between the roll and the transfer substrate is used to form a liquid bridge between the roll and the transfer substrate, so that a close contact is possible. . In addition, since a liquid bridge is formed and transferred between the functional material filled in the roll and the substrate to be transferred, transfer of the functional material without fluidity is possible. In addition, the fine pattern forming method using the nano-transfer roll-to-roll printing method through the liquid fluidized bed of the present invention is capable of directly printing a functional material on a large area in a continuous production method, thereby making it possible to manufacture low-cost / large-area devices. It is very advantageous in that it can be applied to all devices and panels, regardless of the type of substrate, since all processes can be performed at room temperature, and in particular, it can be applied to the production of electronic and display devices requiring device integration through fine patterning. Can be.

DETAILED DESCRIPTION Hereinafter, embodiments and embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

Throughout this specification, when a member is located “on” with another member, this includes not only when one member is in contact with another member but also when another member exists between the two members. In addition, when a part is said to "include" a certain component, it means that it can include other components, not to exclude other components unless otherwise stated.

The method of forming a fine pattern using the nano-transfer roll to roll printing method through the liquid fluidized bed of the present invention may include the following steps:

Selectively filling the functional liquid material only in the intaglio portion of the roll on which the intaglio pattern is formed,

Spraying a solvent on the surface of the transfer substrate to form a liquid fluidized layer,

Transferring a pattern of the functional liquid material onto the transfer substrate by contacting a roll filled with a functional liquid material selectively to the intaglio portion only to the transfer substrate on which the liquid fluid layer is formed, and

Separating the roll in contact with the transfer substrate from the transfer substrate.

In one embodiment of the present invention, the pattern of the functional liquid material can be transferred onto the transfer substrate by contacting the roll on which the liquid liquid layer is selectively filled with only the intaglio portion to the transfer substrate on which the liquid fluid layer is formed. For example, the liquid fluidized layer formed between the transfer target substrate and the functional liquid material may act as a liquid bridge so that the pattern of the functional liquid material may be transferred onto the transfer substrate.

In another embodiment of the present invention, the step of selectively filling the functional liquid material only in the intaglio portion of the roll with the intaglio pattern is formed, filling the functional liquid material in the intaglio portion of the roll with the intaglio pattern is formed between the neighboring intaglio pattern The functional liquid material remaining in the embossed portion located in the can be removed, and, for example, the functional liquid material remaining in the embossed portion can be removed from the roll using a removing means such as a doctor blade. The removal means is not particularly limited as long as it is a removal means capable of removing the functional liquid material from the roll in the art.

In another embodiment of the present invention, the method may further include soft-baking the selectively filled functional liquid material after the step of selectively filling only the intaglio portions of the roll on which the intaglio pattern is formed to reduce fluidity. . For example, the functional liquid material may be soft baked using heating means such as a heater, and the heating means is not particularly limited as long as it is a heating means capable of soft baking the functional liquid material in the art. Conventional roll-to-roll printing method is impossible to precise patterning of several micros or less by using liquid ink, but in the present invention, since the liquid liquid filled in the roll is transferred to the transfer substrate through a soft baking step, a fluid ink is used. It is possible to solve the problem that occurs when the nano-size precision patterning is possible. Meanwhile, in the prior art, when the functional liquid material filled in the roll is transferred to the transfer substrate through the soft baking step, there is a problem in contact with the transfer substrate due to poor fluidity of the ink. Conformal contact is possible by forming a liquid bridge between the roll and the transfer substrate using a solvent layer between the transfer substrates.

In another embodiment of the present invention, any material that can be used to form a pattern in the art as the functional liquid material is not particularly limited. Specifically, a metal ink or an oxide ink may be used as the functional liquid material. For example, the metal ink may be an ink containing Ag, Au, Cu, or the like, and the oxide ink may be a functional ink including a semiconductor oxide or an insulator oxide, for example, an ink including ZnO or Al₂O₃, or the like. It may be, but is not limited thereto.

In another embodiment of the present invention, in the case where the functional liquid material is used, a solution in which the functional liquid material is dissolved or dispersed in a solvent may be used, and as the solvent, the functional liquid may be formed only in the negative portion of the pattern of the roll. As long as the solution of the liquid material can be filled can be used without limitation.

In another embodiment of the present invention, the step of transferring the pattern of the functional liquid material on the transfer substrate, the liquid fluidized layer is a roll formed with the negative pattern is filled with the functional liquid material selectively only in the intaglio portion It may be carried out by contacting and rotating the formed transfer substrate.

In another embodiment of the present invention, the pattern of the functional liquid material is rotated by contacting and rotating the roll having the intaglio pattern, which is selectively filled with the functional liquid material only to the intaglio portion, in contact with the transfer substrate having the liquid fluidized layer. During the step of transferring onto the transfer substrate, the method may further include heating the transfer substrate to dry the liquid fluidized layer. As a result, it is possible to accelerate the transfer of the transfer substrate and the functional liquid material onto the transfer substrate.

In another embodiment of the present invention, the solvent for forming the liquid fluidized bed on the surface of the transfer substrate is not particularly limited as long as it can. For example, polar solvents such as water, alcohols (methanol, ethanol, etc.), polar organic solvents, and mixtures thereof may be used, but are not limited thereto. Further, the liquid fluidized bed may be formed on the surface of the transfer substrate through injection means, and the injection means is not particularly limited as long as it is injection means capable of injecting the solvent onto the surface of the transfer substrate in the art. .

The transfer substrate is not particularly limited as long as it is used in the art. For example, silicon, a metal, a polymer, glass, an oxide substrate, or the like may be used as the transfer substrate, but is not limited thereto. The transfer substrate is washed with a suitable solvent to purge the N 2 gas to remove contaminants from the substrate. For example, the transfer substrate may be washed using distilled water, acetone, and ethanol, respectively, and purged with N 2 gas between each washing step to remove contaminants from the transfer substrate.

Hereinafter, the present invention will be described in more detail with reference to the drawings.

1 is a schematic view showing a method of forming a fine pattern using a nano-transfer roll-to-roll printing method through a liquid fluidized bed according to an embodiment of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, the pattern forming apparatus used for the fine pattern formation method using the nano transcription roll-to-roll printing method via the liquid fluidized bed which concerns on this invention is demonstrated.

As shown in FIG. 1, the roll-to-roll pattern forming apparatus used in the micro-pattern forming method using the nano-transfer roll-to-roll printing method through a liquid fluidized bed includes a container 11, a first roll 12, 2 roll 13, the 3rd roll 14, the removal means 15, the temperature control means 16, and the solvent injection apparatus 17 are included.

The functional liquid material 300 is stored in the container 11, and the first roll 12 rotates to transfer the functional liquid material 300 contained in the container 11 in the direction of the second roll 13. Do it.

The second roll 13 has an intaglio pattern 13a formed therein, and the intaglio pattern 13a is filled with the functional liquid material 300 transferred by the first roll 12 to the intaglio pattern 13a. The functional liquid material 300 filled in 13a) is transferred to the transfer substrate 100.

The third roll 14 faces the second roll 13 with the transfer substrate 100 interposed therebetween, and is rotated, so that the functional liquid material filled in the intaglio pattern 13a while moving the transfer substrate 100. 300 is transferred to the transfer substrate 100.

The removing means 15 may be a doctor blade or the like, and the functional liquid material 300 positioned in the embossed portion positioned between the intaglio portions of the neighboring intaglio patterns 13a of the second roll 13 may be a second roll ( 13 to selectively fill only the intaglio portion of the intaglio pattern 13a of the second roll 13 with the functional liquid material 300.

The temperature control means 16 may be a heater or the like, and soft-baked the functional liquid material 300 selectively filled only in the intaglio portion of the intaglio pattern 13a of the second roll 13 to provide fluidity of the functional liquid material 300. It serves to reduce.

The solvent injection device 17 serves to form a liquid fluidized layer 200 on the surface of the substrate to be transferred by spraying a solvent on the surface of the substrate to be transferred 100.

Hereinafter, a method of forming a fine pattern using the nano transfer roll-to-roll printing method using the liquid fluidized bed according to the present invention using the pattern forming apparatus described above will be described.

First, as shown in FIG. 1, only the intaglio portion of the roll on which the intaglio pattern is formed is selectively filled with the functional liquid material.

Specifically, when the first roll 12 in contact with the functional liquid material 300 stored in the first container 11 is rotated, the functional liquid material 300 is buried on the surface of the first roll 12. The functional liquid material 300 buried on the surface of the first roll 12 is buried in the intaglio and embossed portions of the intaglio pattern 13a of the second roll 13. Here, the functional liquid material 300 may be a metal ink including one or more of Ag, Au, and Cu or an oxide ink including one or more of ZnO and Al₂O₃, but is not limited thereto.

The functional liquid material 300 buried in the relief portions located between the intaglio portions of the neighboring intaglio patterns 13a of the second roll 13 is removed by the second roll 13 by removing the means 15 such as a doctor blade. ) Is removed from the second roll 13, whereby the functional liquid material 300 is selectively filled only in the intaglio portion of the intaglio pattern 13a of the second roll 13.

Next, a solvent is sprayed onto the surface of the transfer substrate to form a liquid fluidized bed.

Specifically, the solvent is sprayed onto the surface of the transfer substrate 100 through the solvent spraying device 17 to form the liquid fluidized layer 200 on the surface of the transfer substrate 100. The solvent for forming the liquid fluidized bed 200 may be, for example, a polar solvent, but is not limited thereto. Silicon, a metal, a polymer, glass, an oxide, or the like may be used as the transfer substrate 100. In the case of using the silicon substrate as the transfer substrate 100, the silicon substrate is washed in the order of distilled water, acetone, and ethanol, and purge of N2 gas between each washing step to purge the transfer substrate 100. Remove and use contaminants. The polar liquid fluidized layer 200 is formed on the surface of the substrate to be transferred by spraying the polar solvent on the surface of the substrate 100 prepared as described above using the solvent injector 17. The liquid fluidized layer 200 formed on the surface of the transfer substrate 100 has a second roll 13 filled with the transfer substrate 100 and the functional liquid material 300, as described later with respect to part A of FIG. 1. When the intaglio pattern 13a of) touches, it forms a liquid bridge therebetween.

Next, the second roll 13 filled with the functional liquid material 300 is contacted with the transfer substrate 100 on which the liquid fluid layer 200 is formed to transfer the pattern of the functional liquid material onto the transfer substrate 100.

Specifically, the functional liquid material 300 filled only in the intaglio portion of the intaglio pattern 13a of the second roll 13 by the removal means 15 by the rotation of the second roll 13 is the second roll 13. Soft baking by the heating means 16 by successive rotations of reduces the fluidity of the functional liquid material 300 itself. The functional liquid material 300 with reduced fluidity may be in the form of sludge or gel or solid.

Subsequently, as shown in part A of FIG. 1 by the continuous rotation of the second roll 13, the negative portion of the negative pattern 13a of the second roll 13, which is selectively filled with the functional liquid material 300, In contact with the liquid fluid layer 200 formed on the surface of the transfer substrate 100. When the second roll 13 is in contact with the transfer substrate 100, the liquid fluid layer 200 formed on the surface of the transfer substrate 100 acts as a liquid bridge to form an intaglio pattern of the second roll 13. The functional liquid material 300 is filled in only the intaglio portion of the intaglio portion 13a, and is filled in only the intaglio portion of the intaglio pattern 13a by chemical affinity between the functional liquid material 300 and the liquid fluidized bed 200. The liquid material 300 is separated from the second roll 13 and transferred to the transfer substrate 100. By transferring the functional liquid material 300 to the transfer substrate 100, a pattern made of the functional liquid material 300 is formed on the transfer substrate 100.

After the functional liquid material 300 is transferred to the transfer substrate 100, the transfer layer 100 is transferred to the transfer substrate 100 by heating using at least one of the second roll 13, the transfer substrate 100, and other heating means. The pattern of the transferred functional liquid material 300 is dried to solidify the pattern of the functional liquid material 300. The pattern of the solidified functional liquid material 300 is formed as a fine pattern.

Next, the roll in contact with the transfer substrate is separated from the transfer substrate.

Specifically, after the functional liquid material 300 is separated from the intaglio portion of the intaglio pattern 13a of the second roll 13 by the continuous rotation of the second roll 13, the functional liquid material 300 is separated. The intaglio pattern 13a of the second roll 13 is separated from the transfer substrate 100.

By the above process, the fine pattern formation method using the nano transcription roll-to-roll printing method through the liquid fluidized bed which concerns on this invention is performed.

As described above, the present method is capable of directly printing a functional material on a large area by forming a pattern using a roll-to-roll continuous production method, which is very advantageous for low cost / large area device fabrication.

In addition, since the transfer directly to the transfer substrate using a roll-to-roll printing method, all processes are performed at room temperature, and thus the present invention can be easily applied to all devices and panels, regardless of the type of transfer substrate. . In particular, the roll-to-roll printing method according to the present invention can be applied to the production of electronic and display devices that require the integration of devices through fine patterning.

Hereinafter, the present invention will be described in more detail with reference to the following examples, which are not intended to limit the scope of the present invention.

First, silver ink, a solution containing silver (Ag) particles, was selectively filled in the intaglio pattern portion of the roll. At this time, the trace amount of silver ink remaining on the embossed portion of the roll was removed using a doctor blade.

Next, soft baking at 70 ° C. for 10 minutes reduced the flowability of the silver ink.

Next, using the silicon substrate as the transfer substrate, the transfer substrate was washed with distilled water, acetone and ethanol and purged with N2 gas between each washing step to remove contaminants on the transfer substrate.

Next, the transfer substrate was prepared by spraying distilled water as a liquid fluidized layer on the surface of the transfer substrate to which the silver ink is to be transferred. This liquid fluidized layer serves to form a liquid bridge between the transfer substrate and the silver ink filled in the intaglio pattern of the roll.

The roll filled with silver particles was then rotated to contact the transfer substrate onto which distilled water was sprayed as a liquid fluidized bed. At this time, a liquid-liquid fluid layer sprayed on the surface of the transfer substrate between the silver particles filled in the roll and the transfer substrate acts as a liquid bridge, and the silver particles filled in the roll are transferred to the transfer substrate as a pattern. That is, a pattern made of silver particles is transferred to and formed on the substrate to be transferred by the liquid bridge phenomenon by the liquid fluidized bed.

SEM (Scanning Electron Microscopy) image of the pattern is shown in Figures 2, 3 and 4.

2 and 3 are SEM images of a silver particle pattern formed according to an embodiment of the present invention, Figure 4 is a SEM image of the silver particle pattern of various shapes formed according to an embodiment of the present invention.

As can be seen from the SEM images of FIGS. 2 to 4, it can be confirmed that a uniform metal pattern is formed by a method of forming a micro pattern using a nano transfer roll-to-roll printing method through a liquid fluidized bed of the present invention.

The foregoing description of the present invention is intended for illustration, and it will be understood by those skilled in the art that the present invention may be easily modified in other specific forms without changing the technical spirit or essential features of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is shown by the following claims rather than the above description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention. do.

1 is a schematic view showing a fine pattern forming method using a nano-transfer roll-to-roll printing method through a liquid fluidized bed according to an embodiment of the present invention,

2 and 3 are SEM images of a silver particle pattern formed according to an embodiment of the present invention,

4 is an SEM image of silver particle patterns of various shapes formed according to an embodiment of the present invention.

Description of the main parts of the drawing

11: functional liquid material supply container

12: first roll

13: 2nd roll, 13a: intaglio pattern of 2nd roll

14: third roll

15: Removal means

16: temperature control means

17: solvent spray device

100: transfer substrate

200: liquid fluidized bed

300: functional liquid material

Claims (8)

Method of forming a fine pattern using a nano-transfer roll to roll printing method through a liquid fluidized bed comprising the following steps: Selectively filling the functional liquid material only in the intaglio portion of the roll on which the intaglio pattern is formed, Spraying a solvent on the surface of the transfer substrate to form a liquid fluidized layer, The liquid fluidized layer formed between the transfer substrate and the functional liquid material acts as a liquid bridge by rotating the roll filled with the functional liquid material selectively to the intaglio portion only in contact with the transfer substrate on which the liquid fluid layer is formed. Transferring the pattern of the functional liquid material onto the transfer substrate, and Separating the roll in contact with the transfer substrate from the transfer substrate. delete The method of claim 1, Selectively filling the functional liquid material only in the intaglio portion of the roll on which the intaglio pattern is formed, Filling the intaglio portion of the roll where the intaglio pattern is formed with the functional liquid material and removing the functional liquid material remaining in the relief portion located between the neighboring intaglio patterns; A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed. The method of claim 1, And further softly baking the selectively filled functional liquid material after the step of selectively filling the intaglio portion of the roll having the intaglio pattern formed thereon, thereby reducing fluidity. A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed. The method of claim 1, Wherein the functional liquid material comprises a metal ink or an oxide ink, A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed. 6. The method of claim 5, The metal ink is a metal ink containing at least one of Ag, Au, and Cu, the oxide ink is an oxide ink containing at least one of ZnO and Al₂O₃, A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed. The method of claim 1, Transferring the pattern of the functional liquid material onto the transfer substrate by rotating the roll filled with the functional liquid material selectively to the intaglio portion only in contact with the transfer substrate on which the liquid fluid layer is formed; Further comprising heating the substrate to dry the liquid fluidized bed, A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed. The method of claim 1, The solvent for forming the liquid fluidized bed, It contains one or more selected from the group consisting of water, alcohols and polar organic solvent, A fine pattern formation method using a nano transfer roll-to-roll printing method using a liquid fluidized bed.

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