KR101237869B1 - Method for manufacturing working stage with CNT antistatic treatment and the working stage with CNT antistatic treatment - Google Patents

Method for manufacturing working stage with CNT antistatic treatment and the working stage with CNT antistatic treatment Download PDF

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KR101237869B1
KR101237869B1 KR20100103637A KR20100103637A KR101237869B1 KR 101237869 B1 KR101237869 B1 KR 101237869B1 KR 20100103637 A KR20100103637 A KR 20100103637A KR 20100103637 A KR20100103637 A KR 20100103637A KR 101237869 B1 KR101237869 B1 KR 101237869B1
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South Korea
Prior art keywords
work stage
carbon nanotubes
oxide
antistatic
metal material
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KR20100103637A
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Korean (ko)
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KR20120042123A (en
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박도형
이동면
안요찬
구성창
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(주)탑나노시스
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Priority to KR20100103637A priority Critical patent/KR101237869B1/en
Priority to PCT/KR2011/007627 priority patent/WO2012053774A2/en
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment
    • C25D11/246—Chemical after-treatment for sealing layers

Abstract

The present invention relates to a work stage surface antistatic treatment method of a metal material and the work stage surface is antistatic, the work stage surface antistatic treatment method of a metal material according to a preferred embodiment of the present invention, a work stage of a metal material Anodizing the surface to form a plurality of oxide surface holes, inserting carbon nanotubes into the respective oxide surface holes, curing the carbon nanotubes, and curing the carbon nanotubes, Sealing the work stage surface.

Description

Method for manufacturing working stage with CNT antistatic treatment and the working stage with CNT antistatic treatment

The present invention relates to an antistatic treatment method on a surface of a work stage and to a work stage on which an surface is antistatically treated, and more particularly, to a stage applicable to an antistatic treatment stage such as semiconductor manufacturing equipment, a display device, and a test device. An antistatic treatment method for a surface and a work stage in which the surface is antistatically treated.

The work stage used in the semiconductor manufacturing apparatus is a wafer substrate to be seated, usually made of metal and ceramic materials. In the semiconductor manufacturing apparatus using the work stage, after the handler fixes the wafer substrate and moves to the work stage, tribostatic static electricity occurs between the work stage and the wafer substrate when the wafer substrate is placed on the work stage.

In addition, a work stage used in a dispenser for a flat panel display (FPD) generally adsorbs a display substrate in a vacuum manner. The work stage in this case is also usually made of a metallic material, and when the display substrate is adsorbed on the work stage or when the display substrate which was fixed to the adsorption is detached from the work stage, charging occurs in the work stage, so that the display It is charged to the substrate. In recent years, as the display substrate is enlarged, the amount of charging increases, so that the problem of electrostatic charging increases.

A plurality of electronic components such as semiconductor devices are disposed on the wafer substrate and the display substrate. Therefore, when static electricity is generated, it may be applied to the electronic component and transferred to the internal circuit. This, in turn, will seriously damage the reliability of the electronic components. In addition, there is a problem in that particles are attached to the substrate or the substrate is broken when the substrate is lifted up due to the electrostatic charging.

Conventionally, in order to prevent the charging of the static electricity, an ionizer is installed in the work stage to neutralize the charging potential. In this case, however, lift-up is not possible, and the ion wind of the ionizer does not reach, and even when lift-up occurs, static electricity generated between the work stage and the substrate is generated instantaneously, such as a discharge occurs before the ion wind reaches a place where neutralization is required. The problem of peeling charge caused by

In order to solve this problem, in order to prevent the static electricity of the work stage can be coated with a fluorine resin (aka, Teflon coating). Since the fluorine resin has a small adsorption energy with other substances, excellent non-tackiness, and a small coefficient of friction, the fluorine resin has a small correlation with the glass substrate, and thus a small amount of static electricity generated by peeling.

In this case, since the normal fluorine component has insulation, the teflon coating contains a charged material in the fluorine component. In other words, the work stage was subjected to Teflon coating to prevent the generation of static electricity in the work stage.

However, the Teflon coating method is relatively expensive to manufacture. In particular, in the case of the dispenser, as the size of the display substrate is increased, the size of the work stage is also increased, so that the manufacturing cost is inevitably higher.

In addition, since the hardness of the fluorine itself is low, the hardness of the coating film made of fluorine is low, and scratches easily occur. As a result, it is difficult to maintain flatness of the scratched portion, which causes particles to occur.

In addition, since fluorine has an insulating property, a conductive filler such as carbon black or a conductive polymer should be added to have an antistatic sheet resistance. However, carbon black has a problem in that dust is generated as a spherical shape. Weakness is poor, an excess binder must be used, and there is a problem in that thin film formation is difficult.

In addition, in order to supplement the low hardness of the fluorine, anodizing treatment is required to undergo a separate coating process afterwards, thereby increasing the process cost and manufacturing time.

The present invention is to solve various problems including the above problems, while minimizing the generation of static electricity on the surface meeting the substrate of the stage, the manufacturing cost is reduced, the sheet resistance can be properly adjusted, the friction coefficient is low An object of the present invention is to provide an antistatic treatment method for a stage surface having improved wear resistance.

Another object of the present invention is to provide an antistatic treatment method for a work stage surface in which the process is simple and rapid processing is performed.

Accordingly, the method of antistatic treatment of a work stage surface of a metal material according to a preferred embodiment of the present invention comprises the steps of: anodizing a work stage surface of a metal material to form a plurality of oxidized surface holes; Inserting at least a portion of the carbon nanotubes in the core, curing the carbon nanotubes, and sealing the work stage surface after the carbon nanotubes curing.

 In this case, the step of inserting the carbon nanotubes into the oxidized surface hole may be made by electrolytically adsorbing a solution containing the carbon nanotubes. Alternatively, the step of inserting the carbon nanotubes into the oxide surface hole may be performed by electrostatic coating of the solution containing the carbon nanotubes.

The work stage surface preferably has a sheet resistance of 10 6 to 10 9 Ω / sq.

Further, in the step of forming oxide surface holes on the surface of the work stage, each of the oxide surface holes is preferably 30nm to 900nm in diameter, 100nm to 900nm in depth.

On the other hand, prior to inserting the carbon nanotubes into the respective oxide surface holes, the step of preheating the work stage surface to a temperature of 50 ℃ to 100 ℃ 20 minutes to 1 hour can be further roughened.

According to another aspect of the present invention, there is provided an antistatic treatment method for a work stage surface of a metal material, the method comprising: anodizing a work stage surface of a metal material to form a plurality of oxidized surface holes; Coating the carbon nanotubes on the anodized work stage surface, curing the carbon nanotubes, and sealing the work stage surface after curing the carbon nanotubes so as to cover the carbon nanotubes. .

According to another aspect of the present invention, a work stage having an antistatic surface may include a work stage body made of a metal material capable of anodizing, and formed on a surface of the work stage body, wherein the anode oxide and carbon nanotube of the metal material may be formed. An antistatic layer made of a mixture and a protective layer formed on the surface of the antistatic layer.

In this case, the anodic oxide may have a diameter of 30 nm to 900 nm, a depth of 100 nm to 900 nm, and a plurality of oxide surface holes, and the carbon nanotube may be inserted into the oxide surface hole.

The antistatic layer may further include a carbon nanotube layer including a mixed layer of the carbon nanotubes and the anode oxide mixed therein, and carbon nanotubes formed on an upper surface of the mixed layer.

On the other hand, the protective layer is made of a mixed material of boehmite and carbon nanotubes, the antistatic layer may further comprise a boehmite material.

According to the present invention, by coating an antistatic material including carbon nanotubes, the generation of static electricity in the work stage is reduced, the coefficient of friction is lowered, and the wear resistance is excellent.

In addition, since a separate coating process is unnecessary to form the antistatic layer, the process cost is reduced and the process time is shortened.

1 is a flowchart of an antistatic treatment method of a stage surface according to a preferred embodiment of the present invention.
2A to 2D are cross-sectional views showing the steps of the antistatic treatment method of the stage surface of FIG. 1, and FIG. 2A is a cross-sectional view showing the step of forming an oxide surface hole on the work stage surface.
2B is a cross-sectional view illustrating a step of inserting carbon nanotubes into the oxide surface holes.
Figure 2c is a cross-sectional view showing the step of curing the carbon nanotubes.
2D is a cross-sectional view illustrating the step of sealing the work stage surface.
3A to 3C are cross-sectional views illustrating modified examples of FIG. 2B, respectively.
4 is a cross-sectional view illustrating a work stage with an antistatic surface according to a preferred embodiment of the present invention.
5 is a cross-sectional view showing a work stage with an antistatic surface according to another embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a flowchart showing each step of the antistatic treatment method for a stage surface according to a preferred embodiment of the present invention.

As shown in FIG. 1, the antistatic treatment method of the stage surface of the present invention comprises the steps of forming an oxidized surface hole 22 by anodizing the surface of the work stage 10 of a metal material (S10); And inserting at least a portion of the carbon nanotubes into each of the oxide surface holes 22 (S20), curing the carbon nanotubes (S30), and after curing the carbon nanotubes, the work stage. (10) sealing the surface (S40).

Each step will be described in detail with reference to FIGS. 2A to 2D. First, as shown in FIG. 2A, anodizing the surface of the work stage 10 of a metal material to form a plurality of oxidized surface holes 22. Go through the steps.

The work stage 10 is mounted above the base frame (not shown). The work stage 10 and the base frame may be integrally formed or may be coupled to each other as separate components.

On the work stage 10, a workpiece including, for example, an electronic component that can be charged with the work stage 10 is seated. An example of the workpiece may be a wafer substrate or a glass substrate for a display. In this case, the apparatus to which the work stage 10 is applied may be a semiconductor manufacturing apparatus on which the wafer substrate is seated, or a dispenser on which the glass substrate for display is seated. The present invention is not limited to this, but it is obvious that the present invention is applicable to the work stage 10, which requires antistatic.

The most representative metal material for anodizing is aluminum (Al), and other metal materials such as magnesium (Mg), zinc (Zn), titanium (Ti), tantalum (Ta), hafnium (Hf), and niobium (Nb) Anodizing is also done. Recently, the anodizing treatment of magnesium and titanium materials is also increasingly used. Therefore, the metal material of the present invention is aluminum (Al), magnesium (Mg), zinc (Zn), titanium (Ti), tantalum (Ta), hafnium (Hf), niobium (Nb), magnesium (Mg), and titanium ( Ti) material and the like.

In this invention, an aluminum alloy is demonstrated to an example. Aluminum material is light, has a certain strength, and has excellent workability.

Anodizing is performed on the upper surface of the work stage 10. Anodizing (anodizing) treatment is an oxide film 20 having a great adhesion to the base metal by the oxygen generated from the anode when the metal or parts and the like are electrolyzed in a dilution-acid electrolyte. Aluminum oxide: Al 2 O 3 ) is formed. Anodization is a compound word of anode and oxidation (anodizing). There is a difference from the plating of metal parts on the cathode in normal electroplating.

In this case, anodizing on aluminum alloys to treat the oxide film 20 on the surface of the work stage of the aluminum material forms a film of aluminum oxide (Al 2 O 3 ) on the metal surface. When the anode is energized, the aluminum surface is oxidized by oxygen generated in the anode to form a film of aluminum oxide.

There are various electrolyte solutions used in the anodizing process, and for example, sulfuric acid and sulfuric acid such as sodium hydroxide may be used.

A plurality of oxide surface holes 22 (pores) are formed in the oxide film 20 formed by the anodizing treatment.

In this step, the concentration of sodium hydroxide is 20% to 50%, the supply voltage is DC 5V to 200V, and the supply current is 1 to 5A, and may be energized for 10 to 200 minutes.

By adjusting conditions such as the concentration of sodium hydroxide, supply voltage, supply current, and supply time, the size (D) and depth (L) of the surface oxide holes 22 may be adjusted. The antistatic effect, durability, and surface hardness can be adjusted according to the size and depth of the oxidized surface holes 22.

In the step of forming the oxidized surface holes 22 on the surface of the work stage 10, each of the oxidized surface holes 22 has a diameter D of 30 nm to 900 nm and a depth L of 100 nm to 900 nm. Do. The reason is that when the diameter (D) is less than 30nm, the insertion process of carbon nanotubes is not made well, and uniform oxide surface hole production is not easy. In addition, when the diameter (D) exceeds 900nm, the surface hardness is lowered, it is difficult to implement flatness. In addition, when the depth (L) is less than 100nm, the insertion of carbon nanotubes is not made smoothly, durability and sheet resistance uniformity is worse, and when the depth (L) exceeds 900nm, the insertion of carbon nanotubes is deep This is because the inner bubble layer is not filled and the surface hardness is also lowered.

On the other hand, although not shown, it is preferable to go through a pretreatment process for the anodizing process before the anodizing process. In this case, the pretreatment step may require a degreasing step, a neutralization step, and the like, and may further include a washing step between the steps.

After forming the oxide surface holes 22, as shown in FIG. 2B, carbon nanotubes 30 are inserted into the respective oxide surface holes 22.

Carbon nanotubes (CNT) form a tube by combining one carbon with a hexagonal honeycomb pattern with other carbon atoms. Indicates.

Carbon nanotube 30 has excellent mechanical properties, electrical selectivity, excellent field emission characteristics. When the carbon nanotubes 30 are formed in a thin conductive film on the work stage, the carbon nanotubes 30 have high conductivity and thus have an antistatic effect. In addition, since the carbon nanotubes 30 constitute a network with each other in a tube shape instead of a spherical shape, there is little possibility of dust and excellent moisture resistance.

The carbon nanotubes 30 may be selected from single-walled carbon nanotubes, double-walled carbon nanotubes, multi-walled carbon nanotubes and bundled carbon nanotubes, and combinations thereof.

As illustrated in FIG. 2B, the carbon nanotubes 30 may not only be inserted into the oxide surface holes 22 but may also be coated on the upper surface of the oxide film 20.

In addition, the carbon nanotubes 30 may be inserted only into the oxidized surface holes, as shown in FIG. 3A.

In addition, the carbon nanotubes 30 may be formed to be oriented upward in the oxidized surface holes, as shown in FIG. 3B.

In addition, although not shown, carbon nanotubes may be inserted into only a portion of the oxide surface hole.

On the other hand, the carbon nanotubes 30, as shown in Figure 3c, may be formed in a matrix shape on the upper surface of the oxide surface hole. In this case, a part of the carbon nanotube 30 is coated on the surface of the oxide film, so that the wear resistance and conductivity are excellent, so that the thickness thereof can be made to a minimum thickness.

In this case, the carbon nanotubes 30 may be coated with a carbon nanotube solution containing a dispersant. In this case, specific examples of the dispersant include sodium dodecyl sulfate (SDS), Triton X (Sigma), Tween20 (Polyoxyethyelene Sorbitan Monooleate), and CTAB (Cetyl Trimethyl Ammonium Bromide).

The sheet resistance of the carbon nanotubes 30 may be adjusted to be 10 6 to 10 10 Ω / □. The sheet resistance is at an appropriate level to prevent the generation of static electricity at the stage. If the sheet resistance exceeds 10 10 Ω / □, the electrical conductivity is not good and the effect of releasing static electricity on the stage to the outside is small. If the sheet resistance is less than 10 6 Ω / □, its electrical conductivity is too high. Cursors may affect adjacent electronic components.

The carbon nanotube solution may include a binder. The binder may be an acrylic, urethane, polyester, epoxy, polyimide, melamine, conductive polymer or organic / inorganic hybrid binder. The binder may be a thermosetting resin or a photocurable resin.

Inserting the carbon nanotubes 30 into the oxide surface hole 22 may be performed by electrolytically adsorbing the carbon nanotubes 30. That is, the carbon nanotube 30 is used as the anode, the stage oxidation surface is used as the cathode, and the carbon nanotubes 30 are supplied with electrolytically and electrolytically. And electrolytic precipitation on the oxidized surface.

Inserting the carbon nanotubes 30 into the oxidized surface holes 22 may also be performed through electrostatic painting. That is, the carbon nanotube solution and the oxide surface of the work stage 10 may be provided with different charges, thereby electrophoretic transfer of the carbon nanotube solution particles.

In the present invention, as the method of inserting the carbon nanotubes 30 into the oxide surface hole 22, the carbon nanotube 30 is not limited to the above-mentioned electrolytic adsorption method or electrostatic coating method, and the oxide surface hole may be formed by a known technique such as spray coating. It is clear that the carbon nanotubes 30 are included in the present invention.

In the case of the conventional antistatic coating of fluorine material, since the hardness of the fluorine is weak, the thickness of the fluorine coating layer is bound to be thick. Due to the thickness, the antistatic effect is reduced. However, in the case of the present invention, the carbon nanotube 30 is inserted into the hole of the oxide film 20 and a part thereof is coated on the surface of the oxide film 20, so that the wear resistance and conductivity are excellent, and the thickness thereof is minimized. I can thin it.

After inserting the carbon nanotubes 30 into the oxide surface holes 22, the carbon nanotubes 30 are hardened as shown in FIG. 2C. The curing step is to allow the carbon nanotubes 30 to be firmly adhered to the inside of the oxide surface hole of the work stage 10 and on the oxide surface.

The curing step is to heat the coating site to 70 ℃ to 200 ℃ according to the type of the binder by an ultraviolet heater (IR heater) or dry heater (Dry heater), by maintaining it for a predetermined time (for example, 30 minutes) Can be done. When the work stage 10 is heated to 200 ° C. or more, thermal deformation may occur in the work stage 10. For example, in the case of the dispenser, when the work stage 10 is deformed at 10 μm or more, a problem occurs in the work, because when the heating is performed at 200 ° C. or more, the deformation of the stage 10 μm or more occurs due to thermal deformation. .

After curing the carbon nanotubes 30, as shown in FIG. 2D, the surface of the work stage 10 is sealed to form a protective layer 40.

Sealing treatment is to seal the oxide surface holes 22 and the oxide film 20 to form a protective layer by improving various properties such as corrosion resistance. When the sealing process is largely divided, it is applied to or applied to hydrated sealing, which is a sealing method by boiling water, pressurized steam, sealing of metal salts, oil, etc., which is a sealing method by hot water including metal salt. Organic material sealing, which is a method of depositing, and sealing by coating, which is a method of coating the surface of the anodized coating layer.

As an example, the surface oxide holes are filled with aluminum oxide hydrate by a hydration sealing process. This is because Al 2 O 3 formed by anodizing changes to boehmite, and Al 2 O 3 contains crystal water and its volume expands and is sealed by blocking the oxide surface hole 22, or aluminum oxide is oxidized. Al 2 O 3 · H 2 O is bulky to block pores.

On the other hand, the pH can be controlled in the range of 5.5 to 6.5 in hydration sealing, because boehmite formation is strongly affected by pH, because if the pH is lower than 5.5, the sealing degree drops sharply and treatment under 4 should be avoided. to be.

Meanwhile, the step of preheating the surface of the work stage 10 may be further performed before inserting the carbon nanotubes 30 into the respective oxide surface holes 22.

In the preheating step, in order to improve the coating power of the carbon nanotubes 30, it is preferable to preheat 20 minutes to 1 hour at a temperature of 50 ° C to 100 ° C, which quickly increases the temperature of the coating surface to the required temperature. To achieve this, thereby to achieve a coating while quickly removing the unnecessary binder and dispersant contained in the coated particles.

According to the present invention, the carbon nanotube 30 is coated on the work stage 10 to maximize the antistatic effect. In addition, the protective layer 40 can be formed in the state where the carbon nanotubes 30 are inserted by anodizing and sealing, thereby providing excellent corrosion resistance. In addition, the process cost is reduced because there is no need to perform a separate coating process to have an antistatic effect.

4 is a cross-sectional view illustrating an antistatic work stage 100 according to an embodiment of the invention. As shown in FIG. 4, the antistatic work stage 100 of the present invention includes a work stage body 110, an antistatic layer 200, and a protective layer 40.

The work stage body 110 is made of a metal material capable of anodizing. Therefore, the metal material of the present invention is aluminum (Al), magnesium (Mg), zinc (Zn), titanium (Ti), tantalum (Ta), hafnium (Hf), niobium (Nb), magnesium (Mg), and titanium (Ti) material may be any one. In this case, an aluminum alloy is more preferable as the metal material.

The antistatic layer 200 is formed on the surface of the work stage main body 110 and is made of a mixture of the anode oxide 120 and the carbon nanotubes 30 of the metal material. Therefore, when the metal material is aluminum, the anode oxide 120 of the metal material may be aluminum oxide (Al 2 O 3 ). The carbon nanotubes 30 are mixed in the anode oxide 120. In this case, the carbon nanotubes 30 are preferably mixed so that the antistatic layer 200 has a sheet resistance of 10 6 to 10 9 Ω / sq.

To this end, the anode oxide 120 may be formed through anodizing (anodizing) a metal material. Through the anodization, a plurality of pores (oxidation surface holes) may be formed in the film formed of the anodization, and the carbon nanotubes 30 are inserted into the oxide surface holes 22 (see FIG. 2A). Can be mixed.

By adjusting the size and depth of the oxidized surface holes, it is possible to control the antistatic effect, durability and surface hardness.

The protective layer 40 is formed on the surface of the antistatic layer 200. The protective layer 40 prevents the wear of the carbon nanotubes 30 and the anode oxide, improves the adhesion, and improves the corrosion resistance.

In this case, the protective layer 40 is preferably made of boehmite material. The boehmite is Al 2 O 3 formed by the anodization process is changed, Al 2 O 3 contains the crystal water, the volume is expanded and sealed by blocking the oxidation surface hole (22, see Fig. 2a), Al 2 O 3 · H 2 O, in which aluminum oxide is oxidized, becomes bulky to close the oxide surface hole. Accordingly, the boehmite material may form the antistatic layer 200 together with the carbon nanotubes 30 and the anode oxide 120.

The carbon nanotubes 30 may be formed to protrude to the outer side of the upper side of the protective layer 40. This is because the thickness of the protective layer 40 is several to several hundred nm, and the thickness of the carbon nanotubes disposed on the oxide surface hole may be several to several hundred μm, so that the carbon nanotubes extend to protrude on the protective layer. It may be formed.

Accordingly, the work stage 100 of which the surface is antistatic according to the present invention can be prevented by using the carbon nanotube 30, thereby lowering the sheet resistance, thereby providing an excellent antistatic effect.

In addition, since the carbon nanotubes 30 are mixed with the anode oxide 120 having excellent corrosion resistance, the corrosion resistance is excellent.

5 is a cross-sectional view illustrating a modification of FIG. 4. As shown in FIG. 5, the antistatic work stage 1000 of the present invention includes a work stage body 1100, a sealing layer 1200, and an antistatic layer 1300.

The work stage body 1100 is made of a metal material capable of anodizing. Therefore, the metal material of the present invention is aluminum (Al), magnesium (Mg), zinc (Zn), titanium (Ti), tantalum (Ta), hafnium (Hf), niobium (Nb), magnesium (Mg), and titanium (Ti) material may be any one. In this case, an aluminum alloy is more preferable as the metal material.

The encapsulation layer 1200 is formed on an upper surface of the work stage main body 1100 and is made of an anode oxide 1210 and a boehmite 1220 material of the metal material. Through the anodization treatment, a plurality of pores (oxidation surface holes) may be formed in the film made of the anodization, and boehmite may be formed by performing a sealing process on the pores.

In the boehmite material, Al 2 O 3 formed by anodizing is changed, Al 2 O 3 contains crystal water, its volume expands, and is sealed by blocking an oxide surface hole, or aluminum oxide is oxidized. 2 O 3 · H 2 O may be bulky to block the oxide surface hole.

The antistatic layer 1300 is formed on the surface of the sealing layer 1200, and is formed by mixing the sealing member 1320 and the carbon nanotube 1310 of the metal material. Therefore, if the metal material is aluminum, the sealing product is preferably made of boehmite material which is a component of the sealing layer 1200. As described above, although described with reference to the preferred embodiment of the present invention, those skilled in the art various modifications and variations of the present invention without departing from the spirit and scope of the invention described in the claims below I can understand that you can.

10, 100, 1000: job stage
20: oxide film
22: oxide surface hole
30: carbon nanotube
40: protective layer
110: work stage body
200: antistatic layer

Claims (12)

Anodizing a work stage surface of a metal material to form a plurality of oxide surface holes;
Inserting at least a portion of carbon nanotubes into each of the oxide surface holes;
Curing the carbon nanotubes; And
After hardening the carbon nanotubes, sealing the work stage surface;
Work stage surface antistatic treatment method of a metal material comprising a. The method of claim 1,
And inserting the carbon nanotubes into the oxidized surface hole, electrostatically adsorbing the solution containing the carbon nanotubes. The method of claim 1,
And inserting the carbon nanotubes into the oxidized surface hole, by electrostatic coating the solution including the carbon nanotubes. Anodizing a work stage surface of a metal material to form a plurality of oxide surface holes;
Coating carbon nanotubes on the anodized work stage surface to cover the respective oxide surface holes;
Curing the carbon nanotubes; And
After hardening the carbon nanotubes, sealing the work stage surface;
Work stage surface antistatic treatment method of a metal material comprising a. The method according to any one of claims 1 to 4,
The work stage surface antistatic treatment method of a metal material, characterized in that the surface resistance of 10 6 to 10 9 Ω / sq. The method according to any one of claims 1 to 4,
And forming oxide surface holes on the work stage surface, each of the oxide surface holes having a diameter of 30 nm to 900 nm and a depth of 100 nm to 900 nm. 4. The method according to any one of claims 1 to 3,
Prior to inserting carbon nanotubes into the respective oxide surface holes, the work stage of the metal material further comprises preheating the work stage surface to a temperature of 50 ° C. to 100 ° C. for 20 minutes to 1 hour. Surface antistatic treatment method. delete A work stage body made of a metal material capable of anodizing;
An antistatic layer formed on a surface of the work stage, the antistatic layer comprising a mixture of anodic oxide and carbon nanotubes formed by anodizing the metal constituting the work stage body; And
To include; a protective layer formed on the surface of the antistatic layer,
The anodic oxide has a diameter of 30nm to 900nm, a depth of 100nm to 900nm includes a plurality of oxide surface holes,
And the carbon nanotubes are inserted into the oxidized surface holes. 10. The method of claim 9,
The antistatic layer includes a carbon nanotube layer comprising carbon nanotubes and a mixture of carbon nanotubes and anodized oxide, and carbon nanotubes formed on an upper surface of the mixed layer. 10. The method of claim 9,
The protective layer is made of boehmite material,
And the antistatic layer further comprises a boehmite material. A work stage body made of a metal material capable of anodizing;
An encapsulation layer formed on the surface of the work stage, the metal material forming the work stage body being anodized and having a mixture of anodic oxide having a plurality of oxide surface holes and boehmite material blocking the oxide surface holes; And
An antistatic layer formed on a surface of the encapsulation layer and having a mixture of carbon nanotubes and boehmite material;
Surface antistatic work stage comprising a.
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