KR101231522B1 - The printed circuit board and the method for manufacturing the same - Google Patents

Abstract

A printed circuit board according to an embodiment of the present invention includes a solder resist having an insulating layer, at least one circuit pattern or pad formed on the insulating layer, and an opening formed on the insulating layer to expose the top surface of the pad; And a bump formed on the pad by plating and protruding above the surface of the solder resist, wherein the bump has a lower surface area that is narrower than an upper surface area of the pad.

Description

[0001] The present invention relates to a printed circuit board and a method of manufacturing the same,

The present invention relates to a printed circuit board and a method of manufacturing the same.

A printed circuit board (PCB) is formed by printing a circuit pattern on a electrically insulating substrate with a conductive material such as copper, and refers to a board immediately before mounting an electronic component. That is, it means the circuit board which fixed the mounting position of each component, and printed and fixed the circuit pattern which connects components on the flat surface in order to mount various types of electronic elements on a flat plate.

In addition, with the development of the electronics industry, the demand for high functionalization, miniaturization, price competitiveness, and short delivery time of electronic components is increasing rapidly. In order to cope with this trend, printed circuit board manufacturers are applying semi-additive process (SAP) to cope with the trend of thinner and denser printed circuit boards.

1A to 1E are cross-sectional views illustrating a bump manufacturing process in a general printed circuit board.

First, as shown in FIG. 1A, the first metal layer 2 is formed on the insulating substrate (insulating plate) 1. In addition, the first metal layer 2 may be formed of copper, nickel, or an alloy thereof. When the first metal layer 2 is formed, a first mask pattern 3 is formed on the first metal layer 2. Then, the pad 4 is formed by electroplating the first metal layer 2 with the seed layer around the formed first mask pattern 3. When the pad 4 is formed, the first metal layer 2 and the first mask pattern 3, which are unnecessary parts, are removed through a peeling and etching process.

Next, as shown in FIG. 1B, the solder resist 5 exposing the formed pad 4 is formed on the insulating substrate 1 on which the pad 4 is formed.

Then, as shown in FIG. 1C, a second metal layer 6 is formed on the applied solder resist 5, and a second mask pattern 7 is formed on the formed second metal layer 6. At this time, in order to secure the adhesion between the solder resist 5 and the second metal layer 6, the surface treatment of the solder resist 5 is performed.

Then, as shown in FIG. 1D, the bumps 8 are formed on the pads 4, and after the peeling and etching process, as shown in FIG. 1E, the second metal layer 6 and the second mask, which are unnecessary parts, are formed. Remove the pattern (7).

However, according to the prior art as described above, when the bump 8 is formed as described above, an additional process such as surface treatment of the solder resist 5 and the formation of the second metal layer is required, which causes additional cost. .

An embodiment according to the present invention provides a printed circuit board having a new structure and a method of manufacturing the same.

In addition, in the embodiment according to the present invention, in a printed circuit board of SMD (Solder Mask Defined) and NSMD (Non Solder Mask Defined) design, a printed circuit board capable of realizing a fine pitch (Pitch) bump and a manufacturing method thereof To provide.

 Technical problems to be achieved in the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned above are clearly understood by those skilled in the art to which the embodiments proposed from the following description belong. Could be.

A printed circuit board according to an embodiment of the present invention includes a solder resist having an insulating layer, at least one circuit pattern or pad formed on the insulating layer, and an opening formed on the insulating layer to expose the top surface of the pad; And a bump formed on the pad by plating and protruding above the surface of the solder resist, wherein the bump has a lower surface area that is narrower than an upper surface area of the pad.

In addition, the method of manufacturing a printed circuit board according to an embodiment of the present invention comprises the steps of forming a pad on an insulating substrate, applying a solder resist having an opening exposing the pad on the insulating substrate, and on the solder resist Forming a mask having a window opening the opening, and forming a bump filling the opening of the solder resist and the window of the mask.

According to the embodiment of the present invention, by eliminating the surface treatment process of the solder resist during bump formation, it is possible to provide a highly reliable and stable printed circuit board with a minimum process.

1A to 1E are cross-sectional views illustrating a method for manufacturing a printed circuit board of the prior art.
2 is a cross-sectional view of a printed circuit board according to a first embodiment of the present invention.
3 to 10 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to a first embodiment of the present invention in the order of process.
11 is a cross-sectional view of a printed circuit board according to a second exemplary embodiment of the present invention.
12 to 15 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to a second embodiment of the present invention in the order of processes.
16 to 20 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to a third embodiment of the present invention in order of process.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

Throughout the specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding other components unless specifically stated otherwise.

In order to clearly illustrate the present invention in the drawings, thicknesses are enlarged in order to clearly illustrate various layers and regions, and parts not related to the description are omitted, and like parts are denoted by similar reference numerals throughout the specification .

When a portion of a layer, film, region, plate, etc. is said to be "on top" of another part, this includes not only when the other part is "right over" but also when there is another part in the middle. Conversely, when a part is "directly over" another part, it means that there is no other part in the middle.

Hereinafter, a printed circuit board according to a first embodiment of the present invention will be described with reference to FIGS. 2 to 10.

2 is a cross-sectional view of a printed circuit board according to a first embodiment of the present invention.

Referring to FIG. 2, the printed circuit board according to the first embodiment of the present invention may include an insulating plate 110, a pad 125 connected to a circuit pattern (not shown) formed on the insulating plate 110, A bump 160 formed on the pad 125, a plating seed layer 150 of the bump 160, and a solder resist 130 covering the circuit pattern are included.

The insulation plate 110 may be a thermosetting or thermoplastic polymer substrate, a ceramic substrate, an organic-inorganic composite material substrate, or a glass fiber impregnated substrate. When the insulation plate 110 includes a polymer resin, the insulation plate 110 may include an epoxy-based insulation resin. It may alternatively include polyimide resin.

A plurality of pads 125 connected to a plurality of circuit patterns are formed on the insulating plate 110. The pad 125 is formed to mount a device mounted on a printed circuit board, and refers to a pad 13 to which solder (not shown) is attached.

The pad 125 may be formed of a conductive material, and may be formed of an alloy including copper when the circuit pattern is formed by patterning a copper foil layer formed on the insulating plate 110.

In this case, the pad 125 may be formed by electroplating the plating layer 150 formed on the side surface of the solder resist 130 as a seed layer. The plating layer 150 may be formed on the side surface of the solder resist 130 and the top and side surfaces of the mask 140 by chemical copper plating.

A plurality of bumps 160 covering the top surface of the pad 125 are formed on the pad 125. In this case, the bump 160 may be formed to have an area smaller than that of the upper surface of the pad 125 by electroplating.

In addition, since the bumps 160 are formed by plating, the areas of the upper surface of the bumps 160 and the lower surface of the bumps 160 that are opposite to each other are the same. The bumps 160 may have a circular columnar shape or a square columnar shape having the same upper and lower surfaces.

In this case, the solder resist 130 has an opening 135 exposing the pad 125, and the bump 160 is formed while filling the opening 135. Accordingly, the bump 160 has the same area as that of the opening 135.

Substantially, a part of the bump 160 is composed of the plating layer 150, and thus the bump 160 includes the plating layer 150.

The bumps 160 may be formed of an alloy including copper having the same material as the pads 125.

In addition, the bump 160 may be a solder bump formed of an alloy including tin.

In other words, a bump 160 plated with an alloy containing copper may be formed on the pad 125, or a bump 160 plated with an alloy containing tin may be formed.

The solder resist 130 is formed on the insulating plate 110 to cover the circuit pattern.

The solder resist 130 is to protect the surface of the insulating plate 110, is formed on the front surface of the insulating plate 110, and has an opening 135 that opens an upper surface of the pad 125 to be exposed.

The bump 160 is formed by filling the opening 135 of the solder resist 130 and protrudes from an upper surface of the solder resist 130.

In this case, the plating layer 150 is formed on the side surface of the solder resist 130 and protrudes from the upper surface of the solder resist 130 to extend to the side surface of the bump 160.

This is because the plating layer 150 is not formed on the top and side surfaces of the solder resist 130 but is formed only on the side surfaces of the solder resist 130.

That is, according to the prior art, after the desmear process was performed to give roughness to the surface of the solder resist, electroless copper plating was performed to increase adhesion between the surface of the solder resist and the chemical copper. However, this is a problem that the desmear process must be additionally performed, and the surface of the solder resist is roughened by the desmear process, which acts as a factor of lowering the quality of the printed circuit board.

However, in the embodiment according to the present invention, the desmear process performed on the surface of the solder resist is omitted, and the chemical copper is formed on the side surface of the solder resist, the top surface and the side surface of the mask, so that the solder resist is generated. It can provide a printed circuit board that solves the quality problem. That is, according to the embodiment of the present invention, it is possible to reduce the manufacturing cost by minimizing the process generated during the bump formation, it is possible to effectively protect the surface of the solder resist.

A method of manufacturing the printed circuit board of FIG. 2 will be described with reference to FIGS. 3 to 10.

3 to 10 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to the first embodiment of the present invention.

First, the insulating plate 110 is prepared as shown in FIG. 3.

A plurality of circuit patterns are formed on the insulating plate 110 of FIG. 3, and a circuit pattern may also be formed under the insulating plate 110.

That is, when the insulating plate 110 means one insulating layer among a plurality of stacked structures, a plurality of circuit patterns (not shown) may be continuously formed on the upper or lower portion of the insulating plate 110. Otherwise, a plurality of circuit patterns may be continuously formed on both the upper and lower portions of the insulating plate 110.

The insulation plate 110 may be a thermosetting or thermoplastic polymer substrate, a ceramic substrate, an organic-inorganic composite material substrate, or a glass fiber impregnated substrate. When the insulation plate 110 includes a polymer resin, the insulation plate 110 may include an epoxy-based insulation resin. It may alternatively include polyimide resin.

Thereafter, the conductive layer 120 is stacked on the insulating plate 110.

The conductive layer 120 may be formed by electroless plating a metal including copper on the insulating plate 110.

In addition, the conductive layer 120 may use CCL (Copper Clad Laminate), unlike the non-electrolytic plating formed on the insulating plate 110.

When the electroconductive layer 120 is formed by electroless plating, the plating may be smoothly performed by applying roughness to the upper surface of the insulating plate 110.

The conductive layer 120 is etched in the stacked structure of the insulating plate 110 and the conductive layer 120 to form a pad 125 and a circuit pattern (not shown) of FIG. 4.

In this case, the conductive layer 120 formed on the insulating plate 110 may be formed on the upper and lower surfaces of the insulating plate 110, and accordingly, the circuit pattern (not shown) and the pad 125 may be formed. It may also be formed on the lower surface of the insulating plate 110.

As such, the circuit pattern and the pad 125 are formed on at least one surface of the insulating plate 110, and as shown in FIG. 5, a solder resist to fill the circuit pattern formed on the insulating plate 110 ( 130).

In this case, the solder resist 130 includes an opening 135 exposing the pad 125, and the opening 135 is formed to have a width smaller than the width of the pad 125, thereby providing the pad 125. Edge region is protected by the solder resist 130.

Thereafter, a mask 140 is stacked on the solder resist 130 as shown in FIG. 6.

The mask 140 may use a photoresist or a dry film. At this time, it is preferable that the mask 140 uses a dry film having strong heat resistance.

The mask 140 has a window 145 corresponding to the opening 135 of the solder resist 130.

In other words, a window 145 is formed in the mask 140 to expose the pad 125.

In this case, the window 145 may be formed at the same area as the opening 135 of the solder resist 130.

Next, as shown in FIG. 7, the plating layer 150 is formed on the upper surface and the side surface of the mask 140 and the side surface of the solder resist 130.

The plating layer 150 may be formed on the top and side surfaces of the mask 140 and the solder resist 130 by chemical copper plating.

The chemical copper plating may be performed in the order of a degreasing process, a soft corrosion process, a precatalyst process, a catalyst process, an activation process, an electroless plating process, and an anti-oxidation process.

In addition, the copper plating is divided into heavy copper plating (Heavy Copper, 2㎛ or more), medium copper plating (Medium Copper, 1 ~ 2㎛), light copper plating (Light Copper, 1㎛ or less) according to the thickness, here, medium copper plating Alternatively, the plating layer 150 that satisfies 0.5 to 1.5 μm is formed of light copper plating.

Next, as illustrated in FIG. 8, the bumps 160 may be formed by filling the opening 135 of the solder resist 130 and the window 145 of the mask 140.

The bumps 160 may be formed by burying the entirety of the opening 135 and the window 145 by electroplating. Alternatively, the bumps 160 may be formed by filling only a part of the opening 135 and the window 145. have.

In this case, the bumps 160 may be formed by plating an alloy including the same copper as the pads 125.

In addition, the bump 160 may be formed by plating an alloy including tin. That is, the bumps 160 may be formed only of tin, may be formed of an alloy in which tin and palladium are mixed at a predetermined ratio, and may be formed of an alloy including silver in addition to tin and palladium.

When the bumps 160 are formed of an alloy including the copper, solder may be additionally formed on the bumps 160 later.

In addition, when the bumps 160 are formed of an alloy including tin, the bumps 160 themselves may serve as solders.

Next, the etching process is performed as shown in FIG. 9 to selectively remove the plating layer 150 formed on the upper surface of the mask 140.

Next, as shown in FIG. 10, the mask 140 stacked on the solder resist 130 is removed.

That is, when the bumps 160 are formed, the plating layer 150 used as the seed layer is selectively removed when the bumps 160 are formed. In this case, the plating layer 150 may be removed from the upper surface of the mask 140 by a flash evaporation process.

When the plating layer 150 is removed, the mask 140 formed on the solder resist 130 is peeled off. In this case, when the mask 140 is peeled off, a solvent or the like remaining on the surface of the solder resist 130 may be removed through a cleaning process.

As described above, according to the method of manufacturing the printed circuit board according to the first embodiment of the present invention, the desmear process performed on the surface of the solder resist 130 may be omitted, and the solder resist 130 may be omitted. This can solve the quality problem that occurred on the surface of the machine.

Hereinafter, a printed circuit board according to a second exemplary embodiment of the present invention will be described with reference to FIGS. 11 to 15. At this time, for convenience of description, the description of substantially the same parts as the printed circuit board according to the first embodiment will be omitted.

11 is a cross-sectional view illustrating a printed circuit board according to a second exemplary embodiment of the present invention.

Referring to FIG. 11, a printed circuit board 200 according to a second embodiment of the present invention may include an insulating plate 210 and a pad connected to a circuit pattern (not shown) formed on the insulating plate 210. 225), a first bump (260) formed over the pad (225). The second bump 270 formed on the first bump 260, the plating seed layer 250 of the first bump 260 and the second bump 270, and the solder resist 230 covering the circuit pattern may be formed. Include.

Substantially, the printed circuit board 200 according to the second embodiment differs from only the bump portion of the printed circuit board 100 according to the first embodiment, and all other portions are the same.

Accordingly, only the bump part different from the printed circuit board 100 will be described.

The printed circuit board 200 according to the second embodiment of the present invention includes a first bump 260 and a second bump 270.

The first bump 260 is formed on the pad 225 and is formed of an alloy including copper.

In addition, the second bump 270 is formed on the first bump 260 and is formed of an alloy including tin.

That is, the first bump 260 is formed by plating an alloy including copper to fill only a portion of the opening 235 of the solder resist 230 and the window 245 of the mask 240.

In addition, the second bump 270 includes the tin to fill the entirety of the opening 235 of the solder resist 230 and the window 245 of the mask 240 on the formed first bump 260. It is formed by plating an alloy.

12 to 15, a method of manufacturing the printed circuit board of FIG. 11 will be described.

12 to 15 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to the second embodiment of the present invention.

First, the insulating plate 210 is prepared as shown in FIG. 12. A plurality of circuit patterns are formed on the insulating plate 210, and circuit patterns may also be formed on the lower portion of the insulating plate 210.

The insulation plate 110 may be a thermosetting or thermoplastic polymer substrate, a ceramic substrate, an organic-inorganic composite material substrate, or a glass fiber impregnated substrate. When the insulation plate 110 includes a polymer resin, the insulation plate 110 may include an epoxy-based insulation resin. It may alternatively include polyimide resin.

Thereafter, the conductive layer 220 is stacked on the insulating plate 210, and the stacked conductive layer 220 is selectively etched to form a pad 225.

The circuit pattern and the pad 225 as described above are formed on at least one surface of the insulating plate 210, and a solder resist 230 is applied to bury the circuit pattern formed on the insulating plate 110.

In this case, the solder resist 230 includes an opening 235 exposing the pad 225, and the opening 235 is formed to have a width smaller than the width of the pad 225, thereby providing the pad 225. Edge region is protected by the solder resist 230.

Thereafter, a mask 240 is stacked on the solder resist 230.

The mask 240 has a window 245 corresponding to the opening 235 of the solder resist 230. In other words, a window 245 is formed in the mask 240 to expose the pad 225.

Next, the plating layer 250 is formed on the upper surface and the side of the mask 240 and the side of the solder resist 230. The plating layer 250 may be formed on the top and side surfaces of the mask 240 and the solder resist 230 by chemical copper plating.

Next, the opening 235 of the solder resist 230 and the window 245 of the mask 240 are buried to form a first bump 260.

The first bump 260 is formed by filling only a part of the opening 235 and the window 245 by the electroplating process.

In this case, the first bump 260 may be formed by plating an alloy including the same copper as the pad 225.

Next, as shown in FIG. 13, a second bump 270 is formed on the first bump 260. The second bump 270 may be formed by filling the entire opening 235 and the window 245.

The second bump 270 may be formed by plating an alloy including tin. That is, the bump 160 may be formed of only tin, and may be formed of an alloy in which tin and palladium are mixed at a predetermined ratio. In addition to the tin and palladium, it may be formed of an alloy further including silver.

Next, the etching process is performed as shown in FIG. 14 to selectively remove the plating layer 250 formed on the upper surface of the mask 240.

Next, as shown in FIG. 15, the mask 240 stacked on the solder resist 230 is removed.

That is, when the first bump 260 and the second bump 270 are formed, the plating layer 250 used as the seed layer is selectively removed when the first bump 260 and the second bump 270 are formed. . In this case, the plating layer 250 may be removed from the upper surface of the mask 240 by a flash evaporation process.

When the plating layer 250 is removed, the mask 240 formed on the solder resist 230 is peeled off. In this case, when the mask 240 is peeled off, a solvent or the like remaining on the surface of the solder resist 130 may be removed through a cleaning process.

16 to 20 are cross-sectional views illustrating a method of manufacturing a printed circuit board according to the third embodiment of the present invention.

Referring to FIG. 16, an insulating plate 310 is prepared.

A plurality of circuit patterns are formed on the insulating plate 310, and circuit patterns may also be formed on the lower portion of the insulating plate 310.

That is, when the insulating plate 310 means one insulating layer among a plurality of stacked structures, a plurality of circuit patterns (not shown) may be continuously formed on the upper or lower portion of the insulating plate 310. Otherwise, a plurality of circuit patterns may be continuously formed on both the upper and lower portions of the insulating plate 310.

Thereafter, the conductive layer 320 is stacked on the insulating plate 310.

The conductive layer 320 may be formed by electroless plating a metal including copper on the insulating plate 310, or may use a copper clad laminate (CCL).

Thereafter, the conductive layer 320 is etched in the stacked structure of the insulating plate 310 and the conductive layer 320 to form a pad 325 and a circuit pattern (not shown).

In this case, the conductive layer 320 formed on the insulating plate 310 may be formed on the upper and lower surfaces of the insulating plate 310, and accordingly, the circuit pattern (not shown) and the pad 325 may be formed. It may also be formed on the lower surface of the insulating plate 310.

As such, the circuit pattern and the pad 325 as described above are formed on at least one surface of the insulating plate 310, and the solder resist to fill the circuit pattern and the pad 325 formed in the insulating plate 110. 330 is applied.

In this case, the solder resist 330 also fills the pad 325.

Thereafter, a mask 340 is stacked on the solder resist 330 as shown in FIG. 17.

The mask 340 may use a photoresist or a dry film. In this case, it is preferable that the mask 340 uses a dry film having high heat resistance.

Next, as shown in FIG. 18, an opening 350 exposing the pad 325 is formed in the solder resist 330 and the mask 340 by performing a laser process.

The laser process is highly flexible, can process complex shapes or small quantities of products without expensive mold costs, and is also suitable for prototyping as it is suitable for the recent market situation of small quantity production of various kinds.

The laser process concentrates optical energy on the surface to melt and evaporate a part of the material, and takes a desired shape. The laser process can easily process complex formations by a computer program, and a composite material that is difficult to cut by other methods. Can be operated. Cut diameters as small as 0.005 mm are possible, and the thickness range is wide.

As a laser drill, it is preferable to use a Yttrium Aluminum Garnet (YAG) laser or a CO2 laser. The YAG laser is a laser capable of processing both a copper foil layer and an insulating layer, and the CO2 laser is a laser capable of processing only an insulating layer.

In other words, an opening of the solder resist 330 and a window of the mask 340 are formed at a time by laser processing in a state where the solder resist 330 and the mask 340 are stacked.

Next, as shown in FIG. 19, the plating layer 360 is formed on the upper surface and the side surface of the mask 340 and the side surface of the solder resist 330. The plating layer 360 may be formed on the top and side surfaces of the mask 340 and the solder resist 330 by chemical copper plating.

The bump 370 is formed by filling the opening 350 including the opening of the solder resist 330 and the window of the mask 340.

The bump 370 may be formed by filling the entire opening 350 by an electroplating process. Alternatively, the bump 370 may be formed by filling only a part of the opening 350.

In this case, the bump 370 may be formed by plating an alloy including the same copper as the pad 325. Alternatively, the bump 370 may be formed by plating an alloy including tin. That is, the bump 370 may be formed only of tin, may be formed of an alloy in which tin and palladium are mixed at a predetermined ratio, and may be formed of an alloy including silver in addition to tin and palladium.

In addition, the bump 370 may include a first bump formed of an alloy containing copper and a second bump formed of an alloy containing tin.

Next, as shown in FIG. 20, the etching process may be performed to selectively remove the plating layer 360 formed on the upper surface of the mask 340. In addition, the mask 340 stacked on the solder resist 330 is removed.

In this case, when the mask 140 is peeled off, a solvent or the like remaining on the surface of the solder resist 130 may be removed through a cleaning process.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

110: insulation plate
125: pad
130: solder resist
160: bump

Claims (18)

Insulating layer;
At least one circuit pattern or pad formed on the insulating layer;
A solder resist formed on the insulating layer and having an opening exposing an upper surface of the pad;
A bump formed on the pad and protruding over the surface of the solder resist, the bump having a lower surface area narrower than an upper surface area of the fraud pad; And
A plating seed layer protruding over the solder resist between the solder resist and the bump and formed on a side surface of the bump,
A first side of the plating seed layer is in contact with the bump,
A portion of the second side surface of the plating seed layer is in contact with the side surface of the solder resist, and the other portion protrudes over the top surface of the solder resist and is exposed to the outside. The method of claim 1,
The bump is the printed circuit board having the same area of the upper surface and the lower surface facing the upper surface. The method of claim 1,
The bumps have an area equal to that of the solder resist openings. The method of claim 1,
The bump is a printed circuit board formed of an alloy containing copper or an alloy containing tin. The method of claim 1,
The bump is
A first bump formed of an alloy comprising copper,
A printed circuit board comprising a second bump formed of an alloy comprising tin. delete delete Forming a pad over the insulating substrate;
Applying a solder resist having an opening exposing the pad over the insulating substrate;
Forming a mask having a window for opening the opening over the solder resist;
Forming a plating layer surrounding the top and side surfaces of the mask on the mask; And
And forming a bump to fill an opening of the solder resist and a window of the mask by using the formed plating layer as a seed layer. The method of claim 8,
Forming the mask
Laminating a dry film for opening the opening on the solder resist. The method of claim 8,
Forming the mask
And forming a mask having a window having the same area as the opening of the solder resist. The method of claim 8,
Forming the bumps,
And plating an alloy including copper or an alloy including tin using the plating layer as a seed layer to form bumps filling the entire space formed by the openings and the windows. The method of claim 8,
Forming the bumps
Plating the alloy including copper using the plating layer as a seed layer to form a first bump filling a portion of the space formed by the opening and the window;
And plating a tin-containing alloy on the first bump to form a second bump filling a whole of the space formed by the opening and the window. The method of claim 8,
The step of applying the solder resist
Applying a solder resist filling the pad onto the insulating substrate;
Laser processing the applied solder resist to form an opening for exposing the pad. The method of claim 8,
Forming the mask
Laminating a mask for embedding the pad over the solder resist;
And laser processing the laminated mask to form a window that exposes the pad. The method of claim 8,
The opening of the solder resist and the window of the pad is formed at the same time by laser processing. delete The method of claim 8,
Forming the bumps
A method of manufacturing a printed circuit board comprising forming a bump having an upper surface and an area of a lower surface facing the upper surface. The method of claim 8,
Forming the bumps
Forming a bump having an area equal to an area of at least one of the solder resist opening and the window of the mask.

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