KR101220300B1 - Vacuum hot pressing diffusion bonding apparatus - Google Patents

Vacuum hot pressing diffusion bonding apparatus Download PDF

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Publication number
KR101220300B1
KR101220300B1 KR1020110117037A KR20110117037A KR101220300B1 KR 101220300 B1 KR101220300 B1 KR 101220300B1 KR 1020110117037 A KR1020110117037 A KR 1020110117037A KR 20110117037 A KR20110117037 A KR 20110117037A KR 101220300 B1 KR101220300 B1 KR 101220300B1
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South Korea
Prior art keywords
heat insulating
diffusion bonding
space
jig
insulating cover
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KR1020110117037A
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Korean (ko)
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윤석호
최준석
이공훈
오동욱
김영
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한국기계연구원
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/044—Vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Abstract

PURPOSE: A vacuum diffusion bonding apparatus is provided to prevent a loss of thermal energy through an assembled portion between an insulating body and an insulating cover, and to improve use efficiency of thermal energy. CONSTITUTION: A vacuum diffusion bonding apparatus includes a heat blocking member(120), two or more heating elements(130), an upper jig(140), and a lower jig(150). The heat blocking member includes an insulating body(121) enclosing a work space(S) and open at the top or bottom and an insulating cover(122) finishing the opening of the insulating body. The heating elements are arranged separately top and bottom within the work space to form a space for arranging the insulating cover. The upper and lower jigs are arranged in the vertical direction at the upper and lower side of the work space to support an object(O) to be bonded or to provide a pressing force.

Description

진공 확산접합장치 {VACUUM HOT PRESSING DIFFUSION BONDING APPARATUS}Vacuum Diffusion Bonding Equipment {VACUUM HOT PRESSING DIFFUSION BONDING APPARATUS}

본 발명은 진공 확산접합장치에 관한 것으로서, 보다 상세하게는 접합대상물의 크기에 따라 확산접합에 필요한 분위기를 조성하는 작업공간이 가변되도록 함으로써 열에너지의 이용효율을 향상시킬 수 있는 진공 확산접합장치에 관한 것이다.The present invention relates to a vacuum diffusion bonding apparatus, and more particularly, to a vacuum diffusion bonding apparatus which can improve the utilization efficiency of thermal energy by varying a work space for creating an atmosphere required for diffusion bonding according to the size of the bonding target. will be.

서로 분리된 금속재료를 야금적으로 접합하는 방법에는 접합하고자 하는 물체의 모재를 용융시켜 용착시키는 용접(Welding)방법과, 두 모재 사이에 제 3의 용융된 재료를 주입하고 제 3의 재료를 매개로 하여 두 모재를 접합시키는 납땜(Soldering 및 Brazing)방법과, 두 모재를 아주 가깝게 밀착시켜 두 물체를 구성하는 원자간에 상호 확산이 일어나서 접합이 이루어지는 확산접합(Diffusion Bonding) 등의 방법이 있다.Metallurgical joining of the metal materials separated from each other includes a welding method of melting and welding the base metal of the object to be joined, and injecting a third molten material between the two base materials and mediating the third material. Soldering (Soldering and Brazing) method for joining the two base materials, and the diffusion bonding (bonding bonding) in which the two base materials are brought into close contact with each other and the mutual diffusion between the atoms constituting the two objects to be bonded.

상기한 금속의 접합방법 중에서 확산접합은 비교적 최근에 산업에 많이 이용되는 접합방법으로서, 용접 또는 납땜에 의한 금속의 접합 방법의 단점을 피하기 위하여 아주 정밀하고 높은 신뢰성을 요구하는 장치인 반도체 제조장비, 핵융합장치 및 입자가속기 등과 같은 정밀 과학실험장치 등의 분야에서 많이 적용되고 있다.Among the above metal joining methods, diffusion bonding is a bonding method widely used in the industry in recent years. In order to avoid the disadvantages of the metal joining method by welding or soldering, a semiconductor manufacturing equipment which requires very precise and high reliability, It is widely applied in the field of precision scientific experiment devices such as fusion device and particle accelerator.

확산접합은 한국 공개특허 제10-2010-0010159호(특허문헌 1)과 같이 진공펌프를 이용하여 단열층으로 둘러싸인 작업공간 내부를 진공분위기로 조성하고, 단열층 내부에 마련된 히터를 통해 확산접합이 가능한 접합물의 융점 이하의 온도분위기로 조성한 다음, 가압용 지그를 통해 지지대상에 놓여진 접합물에 압력을 가하여 그 접합대상물간의 접합면에 발생하는 원자의 확산을 이용하여 고상 상태로 접합하는 방법으로, 접합하고자 하는 두 소재의 접합면을 아주 정밀하게 다듬질하고 큰 힘으로 접합부를 압착하여 접합면에 높은 압력이 유지되도록 하여 이루어지므로 가압확산접합이라고 칭하는데, 이와 같이하면 각각의 소재의 원자가 다른 쪽 소재의 내부로 확산에 의하여 침투하고 이 과정에서 두 소재가 일체로 접합이 된다.Diffusion bonding is formed by forming a vacuum atmosphere inside a work space surrounded by a heat insulating layer using a vacuum pump as in Korean Patent Application Publication No. 10-2010-0010159 (Patent Document 1), and allowing a diffusion bonding through a heater provided inside the heat insulating layer. The composition is formed by using a temperature atmosphere below the melting point of water, and then joining in a solid state using diffusion of atoms generated on the joining surfaces between the joining objects by applying pressure to the joining objects placed on the support through a pressurizing jig. It is called pressure diffusion bonding because it is made by precisely trimming the joint surface of two materials and pressing the joint with a large force to maintain high pressure on the joint surface. It penetrates by diffusion of the furnace and in this process the two materials are integrally joined.

금속 재료의 경우 절대온도로 환산한 융점의 40 내지 70%의 온도에서 원자의 확산이 아주 활발하게 일어나므로, 가압 확산접합시에는 압력과 함께 온도를 조절하여 접합이 잘 일어나게 하고 있다.In the case of the metal material, since the diffusion of atoms occurs very actively at a temperature of 40 to 70% of the melting point in terms of absolute temperature, the bonding is well performed by controlling the temperature together with the pressure during the pressure diffusion bonding.

이러한 확산접합을 통해 등록특허 제10-0991113호(특허문헌 2)와 같은 마이크로채널 열교환기용 스택을 제조할 수 있다. 이러한 마이크로채널 열교환기의 경우 스택을 구성하는 박판의 적층높이가 열교환기의 용량에 따라 매우 다양하게 이루어지므로, 종래의 진공 확산접합장치는 적층높이가 큰 접합대상물을 처리하기 위해 챔버 내부의 작업공간을 최대로 확보하게 된다.Through such diffusion bonding, a stack for a microchannel heat exchanger such as Patent Registration No. 10-0991113 (Patent Document 2) can be manufactured. In the case of such a microchannel heat exchanger, since the stacking height of the thin plates constituting the stack is made in various ways according to the capacity of the heat exchanger, the conventional vacuum diffusion bonding apparatus has a working space inside the chamber to process a large stacking object. Will be maximized.

그러나, 이러한 진공 확산접합장치에서 용량이 작은 열교환기, 즉 적층 높이가 낮은 접합대상물을 처리하기 위해서는 두께가 두꺼운 그라파이트 재질의 지지대를 적용해야 하는데, 두께가 두꺼운 지지대를 포함하는 작업공간을 접합온도로 가열하기 위해서는 상당히 많은 양의 열에너지가 소요될 뿐만 아니라, 가열과 냉각에 많은 시간이 소요되는 문제점이 있다. However, in order to process a heat exchanger having a small capacity, that is, a low stacking height object in such a vacuum diffusion bonding apparatus, a thick graphite support must be applied, and a work space including a thick support is used as the junction temperature. In addition to the considerable amount of heat energy to heat, there is a problem that takes a long time for heating and cooling.

특허문헌 1. 한국 공개특허 제10-2010-0010159호, 주식회사 쏠리스 (2010.02.01)Patent Document 1. Korean Patent Publication No. 10-2010-0010159, Solis Co., Ltd. (2010.02.01) 특허문헌 2. 한국 등록특허 제10-0991113호, 한국기계연구원 (2010.11.01)Patent Document 2. Korea Patent Registration No. 10-0991113, Korea Institute of Machinery and Materials (2010.11.01)

따라서, 본 발명의 목적은 이와 같은 종래의 문제점을 해결하기 위한 것으로서, 접합대상물의 크기에 따라 확산접합에 필요한 분위기를 조성하는 작업공간이 가변되도록 함으로써 열에너지의 이용효율을 향상시킬 수 있는 진공 확산접합장치를 제공함에 있다.Accordingly, an object of the present invention is to solve such a conventional problem, and the vacuum diffusion bonding that can improve the utilization efficiency of thermal energy by varying the work space for creating the atmosphere required for diffusion bonding according to the size of the bonding object. In providing a device.

상기 목적은, 본 발명에 따라, 확산접합이 이루어지는 작업공간을 감싸며 적어도 상면과 하면 중 적어도 어느 하나가 개구된 단열몸체와, 상기 단열몸체의 개구부를 마감하는 단열덮개가 형성된 열차단부재;와, 상기 작업공간의 내측에서 수직방향으로 이격 배치되는 적어도 두 개의 발열체;와, 상기 작업공간의 상측과 하측에 각각 배치되어 작업공간으로 반입되는 접합대상물을 지지하거나, 가압력을 제공하는 상부치구와 하부치구;를 포함하며, 상기 단열덮개는 접합대상물의 높이에 따라 단열몸체의 개구부 또는 발열체 사이의 이격공간에 선택적으로 배치되는 것을 특징으로 하는 진공 확산접합장치에 의해 달성된다.The object is, according to the present invention, the heat insulating member is formed with a heat insulating body surrounding at least one of the upper and lower surfaces and the heat insulating cover to close the opening of the heat insulating body is wrapped around the workspace in which the diffusion is made; At least two heating elements spaced apart from each other in the vertical direction from the inside of the work space; and an upper jig and a lower jig supporting upper or lower portions of the work space, respectively, to be joined to the work space or to provide a pressing force; It includes; The insulation cover is achieved by a vacuum diffusion bonding apparatus characterized in that it is selectively disposed in the space between the opening of the insulation body or the heating element according to the height of the bonding object.

여기서, 상기 상부치구와 하부치구는 접합대상물과 대향하는 면에는 지지력 또는 가압력을 제공하는 연결기둥이 형성되는 이 바람직하다.Here, the upper jig and the lower jig is preferably formed on the surface facing the joining object is provided with a connecting column for providing a supporting force or a pressing force.

또한, 상기 열차단부재의 단열몸체와 단열덮개에는 상부치구와 하부치구가 관통하는 관통공이 형성되는 것이 바람직하다.In addition, it is preferable that a through hole through which the upper jig and the lower jig are formed in the heat insulating body and the heat insulating cover of the thermal barrier member.

또한, 상기 단열몸체의 개구부 또는 발열체 사이의 이격공간에 돌출턱부가 형성되는 것이 바람직하다.In addition, the projection jaw portion is preferably formed in the spaced space between the opening of the heat insulating body or the heating element.

본 발명에 따르면, 접합대상물의 크기에 따라 확산접합에 필요한 분위기를 조성하는 작업공간이 가변되도록 함으로써 열에너지의 이용효율을 향상시킬 수 있는 진공 확산접합장치가 제공된다.According to the present invention, there is provided a vacuum diffusion bonding apparatus that can improve the utilization efficiency of thermal energy by varying the work space for creating the atmosphere required for diffusion bonding according to the size of the bonding object.

도 1은 종래 진공 확산접합장치의 단면도,
도 2는 본 발명 진공 확산접합장치의 부분절개 사시도,
도 3 내지 도 4는 본 발명 진공 확산접합장치의 단열덮개의 설치위치를 변경한 상태를 각각 나타낸 도면이고,
도 5 내지 도 6은 본 발명의 제2실시예에 따른 진공 확산접합장치의 단열덮개의 설치위치를 변경한 상태를 각각 나타낸 도면이다.1 is a cross-sectional view of a conventional vacuum diffusion bonding apparatus,
2 is a partially cutaway perspective view of the vacuum diffusion bonding apparatus of the present invention;
3 to 4 are views showing a state in which the installation position of the heat insulation cover of the present invention vacuum diffusion bonding apparatus is changed,
5 to 6 are views showing a state in which the installation position of the heat insulating cover of the vacuum diffusion bonding apparatus according to the second embodiment of the present invention is changed, respectively.

설명에 앞서, 여러 실시예에 있어서, 동일한 구성을 가지는 구성요소에 대해서는 동일한 부호를 사용하여 대표적으로 제1실시예에서 설명하고, 그 외의 실시예에서는 제1실시예와 다른 구성에 대해서 설명하기로 한다.Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

이하, 첨부한 도면을 참조하여 본 발명의 제1실시예에 따른 진공 확산접합장치에 대하여 상세하게 설명한다.Hereinafter, a vacuum diffusion bonding apparatus according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

첨부도면 중 도 2는 본 발명 진공 확산접합장치의 부분절개 사시도이다.Figure 2 of the accompanying drawings is a perspective view of a partial cutaway of the vacuum diffusion bonding apparatus of the present invention.

상기 도면에서 도시하는 바와 같은 본 발명 진공 확산접합장치는 챔버(110), 열차단부재(120), 발열체(130), 상부치구(140) 및, 하부치구(150)를 포함하여 구성된다. The vacuum diffusion bonding apparatus of the present invention as shown in the drawings comprises a chamber 110, a heat shield member 120, a heating element 130, an upper jig 140, and a lower jig 150.

상기 챔버(110)는 내부에 진공상태를 유지할 수 있는 밀폐공간이 제공되며, 일측에 밀폐공간을 개폐할 수 있는 도어(미도시)가 형성된다. The chamber 110 is provided with a sealed space for maintaining a vacuum state therein, a door (not shown) for opening and closing the sealed space is formed on one side.

상기 열차단부재(120)는 챔버(110)의 밀폐공간 내에서 확산접합이 이루어지는 작업공간(S)을 둘러싸 가열공간을 최소화 하는 것으로, 측면부(121a)와 저면부(121b)로 구성되어 상측이 개구된 용기형태를 갖는 단열몸체(121)와, 상기 단열몸체(121)의 상측 개구부를 마감하는 단열덮개(122)로 구성되며, 상기 단열몸체(121)의 저면부(121b)와 단열덮개(122)에는 관통공(121c,122a)이 각각 형성된다. The thermal barrier member 120 is to minimize the heating space surrounding the working space (S) where the diffusion bonding is made in the closed space of the chamber 110, the upper side is composed of the side portion (121a) and the bottom portion (121b) It is composed of a heat insulating body 121 having an open container form, and a heat insulating cover 122 for closing the upper opening of the heat insulating body 121, the bottom portion 121b and the heat insulating cover of the heat insulating body 121 ( Through holes 121c and 122a are formed in 122, respectively.

상기 발열체(130)는 작업공간(S)의 내부에 수직방향으로 이격 배치되어 개별제어되는 제1히터(131)와 제2히터(132)로 구성되는 것으로, 상기 제1히터(131)와 제2히터(132)의 사이에는 단열덮개(122)가 배치될 수 있는 이격공간이 마련된다. 한편, 본 실시예에서는 두 개의 히터가 적용되는 것으로 예를 들어 설명하였으나, 두 개 이상의 히터가 적용되는 것도 가능하다.The heating element 130 is composed of a first heater 131 and a second heater 132 which are individually spaced apart in the vertical direction in the working space (S), and the first heater 131 and the first heater Between the two heaters 132 is provided a separation space in which the heat insulation cover 122 can be disposed. On the other hand, in the present embodiment has been described as an example that two heaters are applied, it is also possible to apply two or more heaters.

특히, 상기 열차단부재(120)의 단열덮개(122)는 접합대상물(O)의 높이에 따라 단열몸체(121)의 개구부 또는 발열체(130) 사이의 이격공간에 선택적으로 배치된다. In particular, the heat insulating cover 122 of the heat shield member 120 is selectively disposed in the spaced space between the opening of the heat insulating body 121 or the heating element 130 according to the height of the bonding object (O).

상기 상부치구(140)는 상기 작업공간(S)의 내측 상부에 수직방향으로 배치되어 작업공간(S)으로 반입되는 접합대상물(O)을 지지하는 것으로, 접합대상물(O)과 대향하는 면에는 가압력을 제공하는 연결기둥(141)이 형성된다. The upper jig 140 is disposed in a vertical direction on an inner upper side of the work space S to support the joining object O brought into the work space S, and faces the joining object O. A connecting column 141 is provided to provide a pressing force.

상기 하부치구(150)는 상기 작업공간(S)의 내측 하부에 수직방향으로 배치되어 작업공간(S)으로 반입되는 접합대상물(O)을 지지하는 것으로, 접합대상물(O)과 대향하는 면에는 지지력을 제공하는 연결기둥(151)이 형성된다.
The lower jig 150 is disposed vertically at an inner lower portion of the work space S to support a joining object O carried into the work space S, and is provided on a surface facing the joining object O. The connecting column 151 is provided to provide a bearing force.

지금부터는 상술한 진공 확산접합장치의 제1실시예의 작동에 대하여 설명한다.The operation of the first embodiment of the vacuum diffusion bonding apparatus described above will now be described.

첨부도면 중 도 3 내지 도 4는 본 발명 진공 확산접합장치의 접합대상물(O)의 두께에 따라 단열덮개(122)의 설치위치를 변경한 상태를 각각 나타낸 것이다.3 to 4 of the accompanying drawings shows a state in which the installation position of the heat insulating cover 122 is changed according to the thickness of the bonding object O of the present invention vacuum diffusion bonding apparatus.

먼저, 두께가 두꺼운 접합대상물(O)을 확산접합하는 경우, 도 3과 같이 단열덮개(122)를 단열몸체(121)의 상단부 개구측에 설치한 상태에서, 작업공간(S)으로 접합대상물(O)을 반입하여 접합대상물(O)이 상부치구(140)와 하부치구(150)의 사이에 위치하도록 한다. First, in the case of diffusion bonding the thick object to be bonded (O), as shown in Figure 3 in the state in which the heat insulating cover 122 is installed on the upper end opening side of the heat insulating body 121, the bonding object ( Import O) so that the bonding object (O) is located between the upper jig 140 and the lower jig 150.

이어서 챔버(110)의 밀폐공간을 진공상태로 설정하고, 작업공간(S) 내에 배치된 발열부의 제1히터(131)와 제2히터(132)를 통해 작업공간(S) 전체영역을 접합대상물(O)의 융점 이하의 온도분위기로 설정한다.Subsequently, the airtight space of the chamber 110 is set in a vacuum state, and the entire work area S is joined to the entire work space S through the first heater 131 and the second heater 132 disposed in the work space S. FIG. The temperature is set below the melting point of (O).

상기와 같이 진공분위기 내에서 확산접합을 위한 조건이 갖추어지면, 상부치구(140)의 연결기둥(141)의 타단부에서 가압기구를 이용하여 수직방향으로 가압력을 제공하여 상부치구(140)와 하부치구(150)의 사이에 위치한 접합대상물(O)을 확산접합한다. When the conditions for diffusion bonding in the vacuum atmosphere are prepared as described above, the upper jig 140 and the lower part are provided by applying a pressing force in the vertical direction at the other end of the connecting column 141 of the upper jig 140 by using a pressure mechanism. Splicing the bonding object (O) located between the jig 150.

한편, 두께가 도 3에 비해 두께가 상대적으로 얇은 접합대상물(O)을 접합하는 경우, 도 4와 같이 단열덮개(122)를 제1히터(131)와 제2히터(132)의 사이영역에 설치하면, 단열덮개(122)의 외연부가 단열몸체(121)의 측면부(121a) 내측면에 밀착되면서 열차단부재(120)의 내부공간 중 제1히터(131)가 설치된 상부영역을 제외한 나머지 영역을 작업공간(S)으로 설정하게 된다. On the other hand, in the case of bonding the bonding object (O), the thickness is relatively thin compared to Figure 3, as shown in Figure 4 the insulating cover 122 in the region between the first heater 131 and the second heater 132. When installed, the outer edge portion of the heat insulating cover 122 is in close contact with the inner surface of the side portion 121a of the heat insulating body 121, except the upper region in which the first heater 131 is installed in the inner space of the heat shield member 120. Is set to the workspace (S).

이러한 상태에서는 제1히터(131)는 발열하지 않고, 제2히터(132)만 발열하도록 함으로써 열차단부재(120) 내부공간 중 하부영역, 즉 확산접합을 위한 최소한의 공간만을 작업공간(S)으로 설정하고 가열하게 되므로 열에너지의 이용효율이 향상되고, 두께가 얇은 접합대상물(O)을 접합하기 위해 열차단부재(120)의 내부공간 전체를 확산접합에 필요한 온도분위기로 설정하지 않아도 되는 이점을 제공하게 된다. In this state, the first heater 131 does not generate heat, and only the second heater 132 generates heat so that only a minimum area of the inner region of the thermal barrier member 120, that is, a diffusion junction, is provided. Since it is set to and heated, the utilization efficiency of the thermal energy is improved, and in order to bond the thin-joined object O, the entire internal space of the thermal barrier member 120 does not need to be set as a temperature atmosphere necessary for diffusion bonding. Will be provided.

또한, 종래와 같이 두께가 얇은 접합대상물(O)의 접합을 위해 베이스의 두께를 두껍게 받쳐넣지 않아도 되므로, 예열시간 및 냉각시간이 단축되므로 장치의 이용효율도 향상된다.
In addition, since the thickness of the base does not have to be thickly supported for the bonding of the thin object to be bonded O as in the related art, the preheating time and the cooling time are shortened.

다음으로 본 발명의 제2실시예에 따른 진공 확산접합장치에 대하여 설명한다.Next, a vacuum diffusion bonding apparatus according to a second embodiment of the present invention will be described.

첨부도면 중 도 5 내지 도 6은 본 발명의 제2실시예에 따른 진공 확산접합장치의 접합대상물(O)의 두께에 따라 단열덮개(122)의 설치위치를 변경한 상태를 각각 나타낸 것이다.5 to 6 of the accompanying drawings show a state in which the installation position of the heat insulating cover 122 is changed according to the thickness of the bonding object (O) of the vacuum diffusion bonding apparatus according to the second embodiment of the present invention.

여기서, 도 5는 두께가 두꺼운 접합대상물(O)을 접합하는 상태를 나타낸 것이고, 도 6은 두께가 얇은 접합대상물(O)을 접합하는 상태를 나타낸 것으로서, 본 발명의 제2실시예에 따른 진공 확산접합장치는 상기 도 5 및 도 6과 같이 단열몸체(121)의 측면부(121a) 내측에서 제1히터(131)와 제2히터(132)의 사이영역과 개구부의 내측에 돌출턱부(121d)를 각각 형성하고, 단열덮개(122)의 외주면이 상기 돌출턱부(121d)의 내주면에 대응되도록 한 점에서 상술한 실시예와 차이를 갖는다. Here, FIG. 5 is a view showing a state in which a thick object to be bonded (O) is bonded, and FIG. 6 is a view showing a state in which a thin object is bonded (O), and a vacuum according to a second embodiment of the present invention. 5 and 6, the diffusion bonding apparatus includes a protruding jaw portion 121d in a region between the first heater 131 and the second heater 132 and in the opening portion in the side portion 121a of the heat insulating body 121, as shown in FIGS. 5 and 6. Respectively formed, and has a difference from the above-described embodiment in that the outer circumferential surface of the heat insulating cover 122 corresponds to the inner circumferential surface of the protruding jaw portion 121d.

상기와 같이 단열몸체(121)의 측면부(121a) 내측면에 돌출턱부(121d)를 형성하는 경우, 단열덮개(122)의 위치이동과정에서 발열부가 단열덮개(122)의 이동에 방해되는 것이 방지된다. 또한, 단열덮개(122)의 외주면이 돌출턱부(121d)의 내주면에 밀착되므로 단열몸체(121)와 단열덮개(122)의 조립부위를 통해 열에너지가 손실되는 것이 방지된다.As described above, when the protruding jaw portion 121d is formed on the inner surface of the side portion 121a of the heat insulating body 121, the heating part is prevented from interfering with the movement of the heat insulating cover 122 during the position movement of the heat insulating cover 122. do. In addition, since the outer circumferential surface of the heat insulating cover 122 is in close contact with the inner circumferential surface of the protruding jaw portion 121d, heat energy is prevented from being lost through the assembly portion of the heat insulating body 121 and the heat insulating cover 122.

한편, 상기 단열덮개(122)를 상부치구(140)에 고정하여 상부치구(140)와 함께 승강하도록 구성함으로써, 단열덮개(122)를 단열몸체(121)의 개구부와 제1히터(131)와 제2히터(132)의 사이영역간의 이동을 위해 챔버(110)를 개방하지 않은 상태에서 간편하게 위치이동되도록 하는 것도 가능할 것이다. On the other hand, by fixing the insulating cover 122 to the upper jig 140 to move up and down with the upper jig 140, the insulating cover 122 and the opening and the first heater 131 of the insulating body 121 and In order to move between the regions between the second heater 132, it may be possible to simply move the position without the chamber 110 being opened.

또한, 상기 돌출턱부(121d)의 두께를 단열덮개(122)의 두께보다 두껍게 설정하여 상부치구(140)의 압축과정에서 단열덮개(122)와 돌출턱부(121d) 사이의 결합면에 이격공간이 발생되는 것을 방지하는 것도 가능하다.
In addition, by setting the thickness of the protruding jaw portion 121d to be thicker than the thickness of the insulating cover 122, the space between the insulating cover 122 and the protruding jaw portion 121d in the compression process of the upper jig 140 is spaced apart. It is also possible to prevent the occurrence.

한편, 상술한 실시예들에서는 단열몸체(121)의 상측이 개구되고, 단열덮개(122)가 상측의 개구부를 마감하는 것으로 예를 들어 설명하였으나, 이에 한정하는 것은 아니며, 단열몸체(121)의 하측이 개구되거나, 상측과 하측이 각각 개구되어 위치변경이 가능한 단열덮개(122)로 마감되는 것도 가능할 것이다. Meanwhile, in the above-described embodiments, the upper side of the heat insulating body 121 is opened, and the heat insulating cover 122 is described as an example of closing the upper opening, but is not limited thereto, and the heat insulating body 121 is not limited thereto. The lower side may be opened, or the upper side and the lower side may be opened to finish with a heat insulating cover 122 capable of changing the position.

본 발명의 권리범위는 상술한 실시예에 한정되는 것이 아니라 첨부된 특허청구범위 내에서 다양한 형태의 실시예로 구현될 수 있다. 특허청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 누구든지 변형 가능한 다양한 범위까지 본 발명의 청구범위 기재의 범위 내에 있는 것으로 본다.The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.

110:챔버, 120:열차단부재, 121:단열몸체, 121a:측면부, 121b:저면부,
121c:관통공, 121d:돌출턱부, 122:단열덮개, 122a:관통공, 130:발열체,
131:제1히터, 132:제2히터, 140:상부치구, 141:연결기둥, 150:하부치구,
151:연결기둥, S:작업공간, O:접합대상물110: chamber, 120: heat blocking member, 121: insulating body, 121a: side portion, 121b: bottom portion,
121c: through hole, 121d: protrusion jaw, 122: insulation cover, 122a: through hole, 130: heating element,
131: the first heater, 132: the second heater, 140: upper jig, 141: connecting column, 150: lower jig,
151: connecting column, S: working space, O: bonding object

Claims (4)

확산접합이 이루어지는 작업공간을 감싸며 적어도 상면과 하면 중 적어도 어느 하나가 개구된 단열몸체와, 상기 단열몸체의 개구부를 마감하는 단열덮개가 형성된 열차단부재;
상기 작업공간의 내측에서 사이영역에 단열덮개가 배치될 수 있는 이격공간이 마련되도록 수직방향으로 이격 배치되는 적어도 두 개의 발열체;
상기 작업공간의 상측과 하측에 각각 수직방향으로 배치되어 작업공간으로 반입되는 접합대상물을 지지하거나, 가압력을 제공하는 상부치구와 하부치구;를 포함하며,
상기 단열덮개는 접합대상물의 높이에 따라 단열몸체의 개구부 또는 발열체 사이의 이격공간에 선택적으로 배치되고,
상기 적어도 두 개의 발열체는 확산접합에 필요한 작업공간에 대응하는 발열체만 발열하도록 개별 제어되는 것을 특징으로 하는 진공 확산접합장치.A heat shield member surrounding a work space in which diffusion bonding is made and having a heat insulating body having at least one of an upper surface and a lower surface opened, and a heat insulating cover closing the opening of the heat insulating body;
At least two heating elements spaced apart from each other in a vertical direction to provide a space in which an insulating cover may be disposed in an area between the working spaces;
And an upper jig and a lower jig disposed at upper and lower sides of the work space, respectively, to support a joining object carried into the work space or to provide a pressing force.
The insulation cover is selectively disposed in the spaced space between the opening of the insulation body or the heating element according to the height of the bonding object,
And the at least two heating elements are individually controlled to generate only the heating elements corresponding to the working space required for the diffusion bonding. 제 1항에 있어서,
상기 상부치구와 하부치구는 접합대상물과 대향하는 면에는 지지력 또는 가압력을 제공하는 연결기둥이 형성되는 것을 특징으로 하는 진공 확산접합장치.The method of claim 1,
The upper jig and the lower jig is a vacuum diffusion bonding apparatus characterized in that the connection column for providing a supporting force or a pressing force is formed on the surface facing the bonding object. 제 2항에 있어서,
상기 열차단부재의 단열몸체와 단열덮개에는 상부치구와 하부치구가 관통하는 관통공이 형성되는 것을 특징으로 하는 진공 확산접합장치.The method of claim 2,
And a through hole through which the upper jig and the lower jig are formed in the heat insulating body and the heat insulating cover of the thermal barrier member. 제 1항 내지 제 3항 중 어느 한 항에 있어서,
상기 단열몸체의 개구부 또는 발열체 사이의 이격공간에 돌출턱부가 형성되는 것을 특징으로 하는 진공 확산접합장치.4. The method according to any one of claims 1 to 3,
And a projection jaw portion is formed in the spaced space between the opening of the heat insulation body or the heating element.
KR1020110117037A 2011-11-10 2011-11-10 Vacuum hot pressing diffusion bonding apparatus KR101220300B1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102213855B1 (en) * 2019-09-20 2021-02-08 한국기계연구원 Apparatus for aligning and bonding heat plate and methof of aligning and bonding heat plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005186105A (en) 2003-12-25 2005-07-14 Ishikawajima Harima Heavy Ind Co Ltd Diffusion welding equipment and method
JP2010147048A (en) 2008-12-16 2010-07-01 Adwelds:Kk Tilt adjusting method and tilt adjusting device, and device adjusted by the tilt adjusting method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005186105A (en) 2003-12-25 2005-07-14 Ishikawajima Harima Heavy Ind Co Ltd Diffusion welding equipment and method
JP2010147048A (en) 2008-12-16 2010-07-01 Adwelds:Kk Tilt adjusting method and tilt adjusting device, and device adjusted by the tilt adjusting method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102213855B1 (en) * 2019-09-20 2021-02-08 한국기계연구원 Apparatus for aligning and bonding heat plate and methof of aligning and bonding heat plate

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