KR101218400B1 - Vacuum sticking apparatus - Google Patents

Abstract

A vacuum suction device is disclosed. The vacuum suction device of the present invention is a vacuum suction device,
An air controller having a non-contact air flow forming air supply for supplying air such that an air flow for non-contact adsorption with the product is formed and an air supply for discarding to discard the non-contact adsorption state; The nozzle having a plurality of blow holes for ejecting the supplied air radially to form a non-contact air flow is installed to protrude to the bottom, the bottom is formed with a digging flow path having a connection hole, the air supply for forming a non-contact air flow and An air distribution block configured to communicate with the nozzle and to be coupled with the air controller such that the discarding air supply unit and the connection hole communicate with each other; The nozzle is penetrated and disposed so that the ejection holes are located on the bottom surface, and a plurality of supply holes are formed to penetrate directly downward, and at the bottom, an air flow forming surface having a streamlined cross section whose area is gradually enlarged around the nozzle disposed at the center. Is formed, the air flow forming block coupled to the air distribution block so that the discarding passage and the supply hole is in communication; And a plurality of suction holes are uniformly arranged, a plurality of break holes connected to the supply holes are formed, and a plurality of gap retention holes are provided to be coupled to the air flow forming block to maintain a predetermined distance from the air flow forming surface. Characterized in that it comprises a.

Description

Vacuum adsorption device {VACUUM STICKING APPARATUS}

The present invention relates to a vacuum adsorption apparatus, and more particularly, to a vacuum adsorption apparatus capable of reducing the consumption of air and capable of vacuum adsorption and destruction as well as non-contact.

In general, flat panel displays (TFT-LCD, PDP, OLED, etc.) and solar cells are produced through numerous and repeated manufacturing processes such as cleaning, deposition, etching, and stripping. At the same time, the transportation process such as transfer, conveyance, rotation, and inclination in the manufacturing process line is sequentially performed.

In addition, large area flat panel displays are largely divided into TFT-LCD and PDP, and the product is divided into monitor and TV. The TFT-LCD and PDP displays are manufactured using a glass substrate as a base material. With the trend toward larger size, display manufacturers have to use large area glass. In the process line for producing flat panel displays, the transfer and return must be repeated many times.

In addition, the conventional glass substrate transfer device made of a vacuum adsorption method due to direct contact has a problem that the contaminants are transferred to the glass due to repeated contact with the adsorption pad during vacuum adsorption, resulting in a decrease in yield of product quality, and a large amount of air consumption. There is a problem and a problem that the vacuum adsorption is performed only in the central region, and thus there is an urgent need for a non-contact adsorption plate transfer device having excellent adsorption performance and fast feeding speed of the glass substrate.

In addition, there is a need for a vacuum adsorption device capable of adsorbing and transporting a damaged fine substrate with a uniform suction force.

The technical problem of the present invention is to provide a means for stably adsorbing and fixing an object such as a glass substrate by using vacuum adsorption through air spraying, and the destruction of adsorption can be made quickly and easily.

Another technical problem of the present invention is to provide non-contact adsorption to minimize contamination of the substrate and to provide a means for stable transport.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the particular embodiments that are described. It will be apparent to those skilled in the art, There will be.

The technical problem, according to the present invention,
As a vacuum adsorption device,
An air controller having an air flow forming part for supplying air so as to form an air flow for vacuum adsorption of the product, and an air blowing part for discarding the adsorbed state;
A nozzle having a plurality of ejection holes for radially ejecting the supplied air to form a contact airflow is installed to protrude to the bottom, and a bottoming flow passage having a connection hole is formed at the bottom, and the air supply for forming the airflow and the An air distribution block communicating with a nozzle and coupled with the air controller such that the discarding air supply unit and the connection hole communicate with each other;
The nozzle is penetrated and disposed so that the ejection holes are located on the bottom surface, and a plurality of supply holes are formed to penetrate directly downward, and at the bottom, an air flow forming surface having a streamlined cross section whose area is gradually enlarged around the nozzle disposed at the center. Is formed, the air flow forming block coupled to the air distribution block so that the discarding passage and the supply hole is in communication; And
A plurality of suction holes are uniformly arranged, a plurality of break holes connected to the supply hole is formed, the bottom surface is provided with a plurality of gap holding so that the product does not directly contact the bottom surface, and maintain a predetermined distance from the air flow forming surface And an adsorption block coupled to the airflow forming block to
Between the supply hole and the discarding hole, when the air for destruction is supplied from the supply hole, the supply hole and the breaking hole are connected to supply the discarding air to the breaking hole, and the airflow forming block and the adsorption block are predetermined. Connectors are arranged to maintain the spacing of
The upper edge of the adsorption block is achieved by providing a vacuum adsorption device, characterized in that the interference prevention portion having a discharge guide surface for allowing the air formed in the adsorption airflow flows upward along the air flow forming surface is formed.

delete

delete

delete

delete

delete

In addition, as a vacuum suction device,
An air controller having an airflow forming air supply for supplying air such that an airflow for adsorption of a product is formed, and an air supply for discarding to discard the adsorption state;
A nozzle having a plurality of ejection holes for radially ejecting the supplied air is installed to protrude toward the center of the bottom, and a plurality of supply holes are formed, and the streamlined shape is gradually enlarged around the nozzle disposed at the center. An airflow formation block having a cross-section and having an airflow formation surface, the airflow formation block being coupled with the air controller such that the airflow forming portion and the nozzle communicate with each other, and the discarding air supply portion and the supply holes communicate with each other; And
A plurality of suction holes are uniformly arranged, a plurality of break holes connected to the supply hole is formed, the bottom surface is provided with a plurality of gap holding so that the product does not directly contact the bottom surface, and maintain a predetermined distance from the air flow forming surface And an adsorption block coupled to the airflow forming block to
Between the supply hole and the discarding hole, when the air for destruction is supplied from the supply hole, the supply hole and the breaking hole are connected to supply the discarding air to the breaking hole, and the airflow forming block and the adsorption block are predetermined. Connectors are arranged to maintain the spacing of
The upper edge of the adsorption block is achieved by providing an anti-interference portion having an discharge guide curved surface for flowing the air forming the adsorption air flow upward along the air flow forming surface is discharged upward. .

delete

delete

delete

In addition, as a vacuum suction device,

An air controller having a non-contact air flow forming air supply for supplying air such that an air flow for non-contact adsorption with the product is formed and an air supply for discarding to discard the non-contact adsorption state;

The nozzle having a plurality of blow holes for ejecting the supplied air radially to form a non-contact air flow is installed to protrude to the bottom, the bottom is formed with a digging flow path having a connection hole, the air supply for forming a non-contact air flow and An air distribution block configured to communicate with the nozzle and to be coupled with the air controller such that the discarding air supply unit and the connection hole communicate with each other; And

The nozzle is penetrated and disposed so that the ejection holes are located on the bottom surface, and a plurality of supply holes are formed to penetrate directly downward, and at the bottom, an air flow forming surface having a streamlined cross section whose area is gradually enlarged around the nozzle disposed at the center. It is formed, and the air flow forming block coupled to the air distribution block so that the discarding passage and the supply hole,

When a non-contact air flow is generated in the air flow forming surface, it is achieved by providing a vacuum adsorption device, characterized in that the product is adsorbed in a non-contact state at a distance from the air flow forming surface.

delete

delete

The air controller, the air distribution block, the airflow formation block, and the adsorption block are formed of a metal material or a synthetic resin material.

According to the present invention, the glass substrate, which is a heavy material, is adsorbed in a contact or non-contact manner, so that no contamination is generated, the adsorption can be carried by a stable adsorption force, and the damaged fine substrate can be transferred. In addition, since the contactless adsorption, the contact adsorption and the adsorption destruction can be performed in one device, the effect of the device for the destruction is provided is provided.

In addition, since the adsorption is stable in a large area of the entire adsorption block, the adsorption is stable, and since the air for destruction is discharged upward, when a plurality of adsorption apparatuses are disposed adjacent to and used, the interference with the peripheral apparatuses can be prevented. The effect is that less air is consumed.

1 is an exploded perspective view showing a vacuum suction device according to a first embodiment of the present invention.
Figure 2 is a perspective view of the bonded state showing the vacuum adsorption device shown in FIG.
Figure 3a, 3b is a cross-sectional view of the operating state for explaining the non-contact adsorption and adsorption destruction of the vacuum adsorption apparatus shown in FIG.
Figure 4 is a cross-sectional view of the bonded state showing a vacuum suction device according to a second embodiment of the present invention.
Figure 5 is a cross-sectional view showing a combined state of the vacuum adsorption apparatus according to a third embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, the well-known functions or constructions are not described in order to simplify the gist of the present invention.

1 is an exploded perspective view showing a vacuum adsorption apparatus according to a first preferred embodiment of the present invention, Figure 2 is a perspective view showing a combined state of the vacuum adsorption apparatus shown in Figure 1, Figure 3a Figure 1 vacuum It is an operation relative cross section for demonstrating the adsorption state of an adsorption apparatus, and FIG. 3B is an operation state sectional view for demonstrating the adsorption | discharge destruction state of the vacuum adsorption apparatus shown in FIG.

As shown in FIGS. 1 to 3A and 3B of the accompanying drawings, the vacuum adsorption apparatus according to the present embodiment includes an air controller 100 for controlling and supplying air for forming air flow and air for discarding adsorption state, and airflow. An air distribution block 200 having a nozzle 210 for forming and a flow path 220 for guiding air for destruction, and a streamlined cross section for inducing air flow by inducing the flow of air ejected from the nozzle 210. Air flow forming surface 310 is formed on the bottom surface and the air flow forming block 300 is formed with a supply hole 320 for passing through the air for destruction, and a plurality of suction holes 410 are uniformly arranged and supply holes ( A plurality of digging holes 420 connected to the 320 is formed to include an adsorption block 400 coupled to the airflow forming block 300 to maintain a predetermined distance from the airflow forming surface 310.

More specifically, it is as follows.

The air controller 100 is formed in the center of the air flow forming air supply unit 110 for supplying air so that the air flow for the adsorption of the product is formed, the air supply unit 120 for destruction to discard the adsorption state for the destruction It is formed in the vicinity of the air flow forming air supply unit 110 for forming the air flow as shown in Figure 3a having an air supply hole for the destruction is connected to the air flow path 220 for the air to be described later, this air controller 100 is It is coupled to the conveying apparatus by the fixing means of. And it is connected with the supply pipe for supplying air for airflow formation and air for destruction, respectively. In addition, the bottom is provided with a packing between the mating surface to keep the air distribution block 200 and the airtight coupling. The air controller 100 has a function of supplying air for forming air flow and air for adsorption destruction to the air distribution block 200.

The air distribution block 200 guides the nozzle 210 when the air for forming the air flow is supplied from the air controller 100, and the air for adsorption destruction guides the discharge flow path 220 to radially guide the supplied air. A nozzle 220 having a plurality of ejection holes 212 for ejecting and forming a non-contact air flow is installed to protrude to the bottom, and at least a connection hole 230 formed to be connected to the air supply unit 120 for digging. A digging channel 220 having one or more is formed. At this time, the nozzle 220 is installed through the center, the digging flow path 220 is formed in various forms around the installation hole of the nozzle 220, as shown in FIG. That is, it is formed in the form of connecting the respective supply holes 320 so that the air for the destruction from the air supply unit for destruction 120 is supplied to the plurality of air supply holes for destruction 320 formed in the airflow forming block 300 at the same time. Will be. Of course, a packing for maintaining airtightness may be installed between the bottom surface of the air distribution block 200 and the airflow forming block 300.

The airflow forming block 300 controls the flow of air jetted through the nozzle 210 to form airflow, and guides the discarding air to the adsorption block 40. A through hole for the nozzle is formed at the center thereof. At the bottom of the nozzle through-hole, an air flow forming surface 310 having a streamlined cross section whose area is gradually enlarged is formed. As shown in FIG. 3A, the airflow forming surface 310 is recessed and protrudes curved toward the outside to form a streamlined shape. The curvature is such that the air ejected from the nozzle 210 flows rapidly along the airflow formation surface 310 to form a vacuum space V between the airflow formation block 300 and the adsorption block 400. That is, when the air blown out from the nozzle 210 flows along the streamlined airflow formation surface 310, the airflow formation surface 310 of the streamlined curved surface is long, so the speed of the air is high, and accordingly, The pressure is lowered so that the air under the adsorption block 400 is rapidly moved to the vacuum space V through the suction hole 410 to generate the adsorption force.

Then, the end of the airflow forming surface 310, that is, the edge of the airflow forming block 300 is formed to be curved upwards to form an induction curved surface 312. The guide curved surface 312 has a function for discharging upwardly the air forming the air flow for the suction together with the discharge guide curved surface 432 of the adsorption block 400 to be described later.

On the other hand, the airflow forming block 300 is formed with a plurality of supply holes 320 are connected to the discarding passage (220). The supply hole 320 is for communicating the digging passage 220 and the digging hole 420 of the adsorption block 400, which will be described later, and a plurality of penetrating holes are formed on the outer side thereof.

The adsorption block 400 is configured to adsorb the product in a non-contact manner, and a plurality of suction holes 410 are uniformly punctured to maintain a spacing, and at the bottom thereof, a minute predetermined spacing is performed so that the product and the adsorption block 400 do not directly contact each other. A plurality of spacing holders 440 for maintaining are installed. The spacing holder 440 is in contact with the product such that the bottom surface of the product and the adsorption block 400 is not in direct contact with the product, and the product is not in direct contact with the adsorption block 400 by the spacing holder 440. In the vacuum space (V) by the suction force that can be adsorbed on the adsorption block 400 in a non-contact manner. The spacing holder 440 is made of a synthetic resin material, it is preferable that the gap is made of a material that does not generate static electricity.

And, the discharge guide curved surface for allowing the air formed in the adsorption airflow flows along the non-contact airflow forming surface 310 at the upper edge of the adsorption block 400 to be discharged upwards rather than to the side of the adsorption block 400 ( An interference prevention portion 430 having a 432 is formed. The discharge guide curved surface 432 has an induction curved surface 312 formed to be curved upward at the end of the airflow forming surface 310 and the air forming the adsorption airflow is not discharged to the side of the adsorption block 400, It is to guide the discharge upward air to be discharged to. The interference prevention unit 430 is intended to not affect the apparatus, such as various devices in close proximity.

In addition, the suction block 400 is provided with a plurality of digging holes 420 for blowing the air supplied from the supply hole 320 of the airflow forming block 300 to the bottom surface of the suction block 400 to perform the adsorption destruction. . When the air for destruction is supplied through the hole 420, the adsorption of the product may be destroyed. The size of the drill hole 420 is finely formed to less than 0.3mm.

On the other hand, the adsorption block 400 and the airflow forming block 300 is provided with a hollow connection pipe 450 for communicating the supply hole 320 and the digging hole 420 because the coupling is maintained at a distance. That is, the connection pipe 450 is coupled to the dig hole 420 on the upper surface of the adsorption block 400, and the upper end of the connection pipe 450 is fitted into the supply hole 320 of the airflow forming block 300 The supply hole 320 and the hole 420 is in communication. To this end, an extension part for fitting the connection pipe 450 may be formed at the bottom of the supply hole 320.

In addition, the air controller 100, the air distribution block 200, the airflow formation block 300, and the adsorption block 400 may be formed of a metal or a synthetic resin material. That is, it may be formed of a metal such as aluminum, but may be made of a hard synthetic resin material in terms of processability, moldability, and cost reduction.

The operation of the present embodiment thus configured will be described.

First, the adsorption block 400 and the airflow formation block 300 are coupled, but a plurality of bosses are formed on the upper surface of the adsorption block 400 by a predetermined interval between the adsorption block 400 and the airflow formation block 300. To be formed. At this time, the upper portion of the connection pipe 450 fixed to the adsorption block 400 is inserted into the supply hole 320 is in a state in which the supply hole 320 and the digging hole 420 are in communication, the adsorption block 400 and the air flow A vacuum space V is formed between the forming blocks 300, and a discharge passage is formed between the discharge guide curved surface 432 and the guide curved surface 312 to discharge air having an air flow for vacuum suction thereon.

Subsequently, the air distribution block 200 is coupled to the upper surface of the airflow forming block 300. The coupling flow path 220 and the supply hole 320 is in communication with each other, and the nozzle 210 has a jet air hole 212 is located at the bottom of the air flow forming block 300, the air is blown air flow forming surface 310 ) To flow along.

Then, the air controller 100 is coupled to the upper surface of the air distribution block 200. By this coupling, the connecting hole 230 of the digging flow path 220 and the digging air supply unit 120 communicate with each other, and the airflow forming air supply unit 110 and the nozzle 210 communicate with each other.

When air is supplied to the airflow forming air supply unit 110 as shown in FIG. 3A in this coupling state, the supplied air is ejected through the ejection hole 212 of the nozzle 210.

The blown air flows at high speed along the airflow forming surface 310 and is guided to the discharge guide curved surface 432 formed on the induction curved surface 312 and the inner surface of the interference prevention part 430 and discharged to the upper portion of the adsorption block 400. do. At the same time, a vacuum space V is formed between the airflow forming surface 310 and the upper surface of the adsorption block 400 through which the air at the bottom of the adsorption block 400 is sucked through the suction hole 410. Therefore, when the air flows rapidly along the airflow forming surface 310, the pressure in the vacuum space V is lowered, whereby the air under the adsorption block 400 is sucked into the vacuum space V to form the airflow. It is discharged together with the air, and in this process the product is adsorbed on the bottom surface of the adsorption block 400 in a state supported by the spacer 440. That is, the product is moved to the vacuum space (V) where the pressure is lowered to be adsorbed on the bottom surface of the adsorption block (400).

In this way, the product is not directly in contact with the bottom of the adsorption block 400, but is supported only by the micro-spaced intervals 440, thereby preventing damage and contamination due to contact with the adsorption block 400. It can be. If there are no gap holding portions 440, the product is adsorbed on the bottom surface of the adsorption block 400. At this time, even if there is damage to the product, the bottom surface of the adsorption block 400 is formed wide and a plurality of suction holes 410 is formed so that the adsorption of the product can be made easily.

On the other hand, Figure 3b of the accompanying drawings shows a state in which the adsorption of the product is discarded. As shown in FIG. 3A, if the supply of adsorption air is blocked while the vacuum adsorption is in progress, the product does not form an adsorption airflow, so the product loses adsorption force and is separated from the adsorption block 400, but the airflow disappears and the product falls. It takes some time. However, as shown in FIG. 3B, when the discarding flow path is formed, the adsorption destruction of the product is performed quickly.

That is, as the airflow forming air supply unit 110 is closed and the air discharging unit 120 is opened, the air for digging is moved to the digging channel 220 through the air discharging unit 120. Subsequently, the air introduced into the digging channel 220 is blown into the product through the respective supply holes 320, the connection pipes 450, and the digging holes 420. Therefore, the adsorption state of the product can be quickly destroyed. In other words, the adsorption air flow is extinguished and at the same time, the air for destruction is blown into the product through each of the holes 420, so that the adsorption state of the product can be quickly destroyed.

In this way, the vacuum adsorption of the product, as well as the adsorption destruction of the product is made in one device, it is possible to facilitate the transfer of the product by rapid adsorption and destruction operation. In addition, since the adsorption airflow is formed on the entire bottom of the adsorption block 400, the adsorption of the product can be made stable, and the air can be consumed less since it is not a structure that directly adsorbs the air.

4 illustrates a second preferred embodiment of the present invention.

As shown in FIG. 4, the air distribution block 300 is the same as the above-described embodiment except that the air distribution block is integrally coupled. That is, a nozzle 210 having a plurality of blowing holes 212 for radially ejecting the supplied air is installed to protrude to the bottom center, and a plurality of supply holes 320 are formed to be punched out, An air flow forming surface 310 having a streamlined cross section whose area is gradually enlarged is formed around the disposed nozzle 210, and the air flow forming unit 10 and the nozzle 210 communicate with each other and the air supply unit for digging ( 120 is coupled to the air controller 100 so that the supply holes 320 communicate with each other, and is coupled with the adsorption block 400 to the bottom.

As such, the air distribution block 300 performs the function of the air distribution block so that the air distribution block can be eliminated, thereby reducing the manufacturing cost and making the assembly work easy.

On the other hand, Figure 5 shows a third preferred embodiment according to the present invention.

As shown in FIG. 5, the vacuum adsorption device according to the third embodiment is a non-contact airflow forming air supply unit 110 for supplying air such that air flow for non-contact adsorption with a product is formed, and for discarding the non-contact adsorption state. An air controller 100 having a scavenging air supply unit 120 and a nozzle 210 having a plurality of blow holes 212 for ejecting the supplied air radially to form a non-contact airflow are projected to the bottom surface. The bottom surface is formed with a digging flow path 220 having a connection hole 230, the non-contact air flow forming air supply unit 110 and the nozzle 210 is in communication, the digging air supply unit 120 and the connection hole 230 ) Is communicated with the air distribution block 200 coupled to the air controller 100 so that the nozzles 210 are disposed to be disposed so that the ejection holes 212 are located on the bottom, and a plurality of supply holes 320 are directly below. It is formed through, and the bottom is the center The airflow formation surface 310 for non-contact adsorption having a streamlined cross section whose area is gradually enlarged is formed around the nozzles arranged, and the air distribution block 200 is formed so that the digging passage 220 and the supply hole 320 communicate with each other. It is configured to include an airflow forming block 300 coupled to. That is, by removing the adsorption block 400, the adsorption device for non-contact can be completed.

When the adsorption device supplies air to the airflow forming air supply unit 110, the supplied air is ejected through the ejection holes 212 of the nozzle 210. The blown air flows at high speed along the airflow forming surface 310 for non-contact adsorption and is discharged to the outside along the guide curve surface 312. At the same time, the air around the upper surface of the product is discharged to the outside along the air (airflow) flowing through the airflow forming surface 310 between the airflow forming surface 310 and the upper surface of the product is formed a vacuum space (V). Therefore, when the air flows rapidly along the airflow forming surface 310, the pressure of the vacuum space V is lowered, whereby the air around the upper portion of the product moves to the vacuum space V to form the air for forming the airflow. The product is discharged together with the non-contact adsorption while maintaining a predetermined interval with the bottom surface of the airflow forming block (300).

As such, since the product does not directly contact the bottom surface of the airflow forming block 300, damage due to contact and contamination due to foreign substances during vacuum adsorption may be prevented.

On the other hand, during adsorption destruction, the airflow forming air supply unit 110 is closed and the air disposal unit 120 is opened, so that the air for disposal is moved to the disposal passage 220 through the air supply unit 120 for destruction. Subsequently, air introduced into the discarding passage 220 is blown into the product through the respective supply holes 320. Therefore, the adsorption state of the product can be quickly destroyed. That is, the adsorption air flow disappears and at the same time the air for destruction is blown into the product through each of the holes 420, so that the adsorption state of the product can be quickly destroyed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It is obvious to those who have. Accordingly, it should be understood that such modifications or alterations should not be understood individually from the technical spirit and viewpoint of the present invention, and that modified embodiments fall within the scope of the claims of the present invention.

100: air controller 110: air supply for forming a non-contact air flow
120: air supply for digging 200: air distribution block
210: nozzle 212: jet hole
220: digging euro 230: connection hole
300: air flow forming block 310: air flow forming surface
320: supply hole 312: guide surface
400: adsorption block 410: suction hole
420: digging hole 430: interference prevention unit
432: discharge guide surface 440: spacing area
450: connector

Claims (6)

As a vacuum adsorption device,
An air controller having an air flow forming part for supplying air so as to form an air flow for vacuum adsorption of the product, and an air blowing part for discarding the adsorbed state;
A nozzle having a plurality of ejection holes for radially ejecting the supplied air to form a contact airflow is installed to protrude to the bottom, and a bottoming flow passage having a connection hole is formed at the bottom, and the air supply for forming the airflow and the An air distribution block communicating with a nozzle and coupled with the air controller such that the discarding air supply unit and the connection hole communicate with each other;
The nozzle is penetrated and disposed so that the ejection holes are located on the bottom surface, and a plurality of supply holes are formed to penetrate directly downward, and at the bottom, an air flow forming surface having a streamlined cross section whose area is gradually enlarged around the nozzle disposed at the center. Is formed, the air flow forming block coupled to the air distribution block so that the discarding passage and the supply hole is in communication; And
A plurality of suction holes are uniformly arranged, a plurality of break holes connected to the supply hole is formed, the bottom surface is provided with a plurality of gap holding so that the product does not directly contact the bottom surface, and maintain a predetermined distance from the air flow forming surface And an adsorption block coupled to the airflow forming block to
Between the supply hole and the discarding hole, when the air for destruction is supplied from the supply hole, the supply hole and the breaking hole are connected to supply the discarding air to the breaking hole, and the airflow forming block and the adsorption block are predetermined. Connectors are arranged to maintain the spacing of
At the upper edge of the adsorption block is characterized in that the interference prevention portion having a discharge guide curved surface for allowing the air formed in the adsorption airflow is discharged upward while flowing along the air flow forming surface,
Vacuum adsorption device. As a vacuum adsorption device,
An air controller having an airflow forming air supply for supplying air such that an airflow for adsorption of a product is formed, and an air supply for discarding to discard the adsorption state;
A nozzle having a plurality of ejection holes for radially ejecting the supplied air is installed to protrude toward the center of the bottom, and a plurality of supply holes are formed, and the streamlined shape is gradually enlarged around the nozzle disposed at the center. An airflow formation block having a cross-section and having an airflow formation surface, the airflow formation block being coupled with the air controller such that the airflow forming portion and the nozzle communicate with each other, and the discarding air supply portion and the supply holes communicate with each other; And
A plurality of suction holes are uniformly arranged, a plurality of break holes connected to the supply hole is formed, the bottom surface is provided with a plurality of gap holding so that the product does not directly contact the bottom surface, and maintain a predetermined distance from the air flow forming surface And an adsorption block coupled to the airflow forming block to
Between the supply hole and the discarding hole, when the air for destruction is supplied from the supply hole, the supply hole and the breaking hole are connected to supply the discarding air to the breaking hole, and the airflow forming block and the adsorption block are predetermined. Connectors are arranged to maintain the spacing of
At the upper edge of the adsorption block is characterized in that the interference prevention portion having a discharge guide curved surface for allowing the air formed in the adsorption airflow is discharged upward while flowing along the air flow forming surface,
Vacuum adsorption device. delete delete delete The method of claim 1,
And said air controller, said air distribution block, said airflow formation block and said adsorption block are formed of a metal material or a synthetic resin material.

Images