KR101213230B1 - Recycling device of inorganic wastewater and the recycling method of inorganic wastewater using the solar heat - Google Patents
Recycling device of inorganic wastewater and the recycling method of inorganic wastewater using the solar heat Download PDFInfo
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- KR101213230B1 KR101213230B1 KR1020100135818A KR20100135818A KR101213230B1 KR 101213230 B1 KR101213230 B1 KR 101213230B1 KR 1020100135818 A KR1020100135818 A KR 1020100135818A KR 20100135818 A KR20100135818 A KR 20100135818A KR 101213230 B1 KR101213230 B1 KR 101213230B1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
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- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
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Abstract
Inorganic wastewater recycling apparatus according to the present invention, the collection tank for the low concentration of inorganic wastewater generated from the production process; An evaporator condenser into which a high concentration of inorganic wastewater from the production process is introduced; A first ion exchange unit for removing impurity ions from the low concentration inorganic wastewater introduced from the sump; A reverse osmosis treatment unit for separating contaminants from the inorganic wastewater of the low concentration in which the impurity ions introduced from the first ion exchange unit are removed; And a second ion exchange unit which removes impurity ions from the low concentration inorganic wastewater from which the contaminants introduced from the reverse osmosis treatment unit are separated to produce ultrapure water, wherein the ultrapure water is introduced into the production process. .
Description
The present invention relates to an inorganic wastewater recycling apparatus and method for purifying and recycling the inorganic wastewater generated in semiconductor, plating, printed circuit board (PCB), LCD (liquid crystal display) processes, and then recycling it back into process water. Preferably, the inorganic wastewater can be purified using ion exchange resins, reverse osmosis treatment units, electrolytic ion exchangers and / or mixed bed ion exchangers and recycled back into process water. A recycling apparatus and a method thereof.
Currently, inorganic wastewater generated in semiconductor, plating, PCB, LCD process, etc. contains a large amount of inorganic heavy metal material. An inorganic heavy metal generally means a heavy metal element having a specific gravity of 4 or more, and includes, for example, copper, nickel, gold, silver, arsenic, antimony, lead, mercury, cadmium, chromium, tin, zinc, barium, bismuth, Nickel, cobalt, manganese, vanadium, selenium, and the like. Some of these inorganic heavy metal materials are known to be very harmful to the human body, such as causing cancer, there is a problem that causes the environmental pollution when the inorganic wastewater containing such inorganic heavy metal materials are discharged to the outside. Therefore, there is a trend that technologies for properly purifying the above-mentioned inorganic wastewater are developed.
Recently, inorganic wastewater generated in semiconductor, plating, PCB, LCD process, etc. is a method of aggregating and collecting inorganic heavy metal substances dissolved in wastewater by chemical reaction using chemicals to discharge them to sewage treatment plants or streams. This is mainly used.
1 shows a conventional method for treating inorganic wastewater.
Referring to Figure 1, the conventional method for treating inorganic wastewater includes the steps of screening, sedimentation and filtration of the wastewater first, when the inorganic wastewater occurs; Oxidizing and reducing the filtered wastewater; Chemically and flocculating the oxidized and reduced wastewater using chemicals; Precipitating and dewatering chemical, flocculated wastewater; And filtration thereof to discharge the stream or sewage treatment plant.
However, this method uses chemical reactions to release methane, irritating gases such as ammonia and hydrogen sulfide, and corrosive gases that are harmful to the human body, and if accumulated in an unventilated place, it can cause suffocation and affect the brain or breathe. There is a problem that may cause difficulties.
In addition, according to the above method, as a result, a large amount of secondary pollutants such as solid waste or sludge is generated, thereby causing another environmental pollution.
In addition, there is a problem in that a large space is required to install a facility for treating inorganic wastewater by the above method, and since various types of chemicals are used in a large amount, corrosive gas is discharged to increase the wear of the facility. By shortening the life of the installation device, there is a problem that high operating costs occur.
In addition, there is a problem that the economic efficiency is low due to the use of a large amount of various types of chemicals, there is a problem that the waste water is not recycled by discharged to the stream and sewage treatment plant.
The present invention has been invented to solve the above-described problems, the inorganic wastewater can be recycled again by filtration, thereby reducing the waste of water resources and inorganic wastewater recycling apparatus that can further suppress environmental pollution And a method thereof.
In addition, an object of the present invention is to generate the secondary contaminants such as solid waste or sludge by introducing impurity ions, contaminants, wastewater, etc. generated during the purification of the inorganic wastewater generated in the production process back into the inorganic wastewater recycling apparatus It is to provide an inorganic wastewater recycling apparatus and method that can further reduce the.
Furthermore, an object of the present invention is to simplify the apparatus for the treatment of inorganic wastewater, such as pumps, sump tanks, and the like, and thus, an inorganic wastewater recycling apparatus capable of realizing a reduction in operating costs, and facilitating maintenance and repair. To provide a way.
In addition, the object of the present invention is to reduce the degree of corrosion caused by the use of a small amount of various kinds of chemicals, and also to reduce the consumption and use of devices such as pumps, compared to conventional inorganic wastewater treatment method It is an object of the present invention to provide an inorganic wastewater recycling apparatus and method capable of reducing power consumption.
In order to solve the above problems, an embodiment of the present invention, the collection tank for the low concentration of inorganic wastewater generated from the production process; An evaporator condenser into which a high concentration of inorganic wastewater from the production process is introduced; A first ion exchange unit for removing impurity ions from the low concentration inorganic wastewater introduced from the sump; A reverse osmosis treatment unit for separating contaminants from the inorganic wastewater of the low concentration in which the impurity ions introduced from the first ion exchange unit are removed; And a second ion exchange unit which removes impurity ions from the low concentration inorganic wastewater from which the contaminant introduced from the reverse osmosis treatment unit is separated to produce ultrapure water, wherein the ultrapure water is introduced into the production process, and the evaporation is performed. The concentrator provides an inorganic wastewater recycling apparatus, characterized in that it is connected to a heat storage tank in which solar energy is regenerated.
In addition, the sump and the contaminant separated from the reverse osmosis treatment unit corresponding to the amount of the inorganic waste water of the high concentration is further introduced into the sump, the impurity ion and the impurity ion removed in the first ion exchange unit and the Impurity ions removed from the second ion exchange unit are further introduced, so that the evaporative concentrator is concentrated by evaporating the impurity ions and the high concentration inorganic wastewater.
In addition, a filtration device for filtering impurities from the low concentration of inorganic wastewater flowing from the collection tank between the collection tank and the second ion exchange unit; And an ozonizer for oxidizing the filtered low concentration inorganic wastewater introduced by the filtration by ozone.
In addition, the second ion exchange unit may be a mixed bed ion exchanger (MBD) or an electrolytic ion exchanger (EDI).
In addition, the filtration device preferably includes any one or more of a micro filter, a sand filter, and an activated carbon filter.
In order to solve the above problems, another embodiment of the present invention, (1) separating the inorganic wastewater generated from the production process into a low concentration of inorganic wastewater and a high concentration of inorganic wastewater; (2) replenishing the low concentration inorganic wastewater with supplemental water corresponding to the amount of the high concentration inorganic wastewater; (3) removing impurity ions in the first ion exchange unit from the low concentration inorganic wastewater supplemented with the supplemental water; (4) separating contaminants from the low concentration inorganic wastewater from which impurity ions have been removed in step (3) using reverse osmosis; (5) preparing ultrapure water by removing impurity ions in the second ion exchange unit from the low concentration inorganic wastewater in which the contaminants are separated in step (4); And (6) introducing the ultrapure water prepared in step (5) into the production process, wherein the impurity ions removed in step (3) and the impurity ions removed in step (5) are the high concentration. Provided is an inorganic wastewater recycling method, characterized in that evaporation and concentration using solar heat together with the inorganic wastewater.
In addition, the step (4), it is preferable to further include the step of introducing the separated contaminants into the low concentration inorganic wastewater of the step (2).
In addition, between the step (2) and the step (3), (a) filtering the impurities in the low concentration inorganic wastewater supplemented with the replenishment water; And (b) oxidizing the filtered low concentration inorganic wastewater with ozone.
In addition, the step (5) is preferably performed by a mixed bed ion exchange device (MBD, Mixed Bed Deionizer) or an electrolytic ion exchange device (EDI, Electrodeionization).
In addition, the step (a) is preferably carried out by any one or more of a micro filter, a sand filter and an activated carbon filter.
According to the present invention, the inorganic wastewater can be filtered and recycled again, thereby further reducing the exhaustion of water resources and further suppressing environmental pollution.
In addition, according to the present invention, impurity ions, contaminants, wastewater, etc. generated during the purification of the inorganic wastewater generated in the production process are introduced into the inorganic wastewater recycling apparatus again, thereby generating secondary pollutants such as solid waste or sludge. Can be further reduced.
Moreover, according to the present invention, it is possible to further simplify the existing equipment for treating inorganic wastewater, such as a pump and a sump, thereby realizing a reduction in operating costs, ease of maintenance and repair.
In addition, according to the present invention, by using a small amount of a small amount of chemicals, the degree of corrosion is further reduced, the use of equipment such as a pump is further reduced, and the power consumption can be reduced by actively utilizing solar heat. It is economical to purify and recycle inorganic wastewater.
1 shows a conventional method for treating inorganic wastewater,
2 is a schematic diagram of an inorganic wastewater recycling apparatus according to an embodiment of the present invention,
3 is a schematic flowchart of an inorganic wastewater recycling method according to an embodiment of the present invention,
4 is a schematic diagram of an inorganic wastewater recycling apparatus according to another embodiment of the present invention,
5 is a schematic flowchart of an inorganic wastewater recycling method according to another embodiment of the present invention.
Hereinafter, a preferred embodiment of an inorganic wastewater recycling apparatus and method according to the present invention will be described with reference to the accompanying drawings.
2 is a schematic diagram of an inorganic wastewater recycling apparatus according to an embodiment of the present invention, Figure 3 is a schematic flowchart of an inorganic wastewater recycling method according to an embodiment of the present invention.
Referring to FIG. 2, the inorganic
On the other hand, the
Referring to Figure 3, the inorganic wastewater recycling method is as follows, (1) separating the inorganic wastewater generated from the production process into a low concentration of inorganic wastewater and a high concentration of inorganic wastewater (S100); (2) replenishing the low concentration inorganic wastewater with supplemental water corresponding to the amount of the high concentration inorganic wastewater (S110); (3) removing impurity ions from the low concentration inorganic wastewater supplemented with the supplemental water in a first ion exchange unit (S120); (4) separating the contaminants using reverse osmosis from the low concentration inorganic wastewater from which impurity ions have been removed in step (3) (S130); (5) preparing ultrapure water by removing impurity ions in the second ion exchange unit from the low concentration inorganic wastewater in which the contaminants are separated in step (4); And (6) evaporating and concentrating the impurity ions removed in the step (3) and the impurity ions removed in the step (5) together with the high concentration of inorganic wastewater (S150).
2 and 3, the inorganic
(1) separating the inorganic wastewater generated from the production process into a low concentration inorganic wastewater and a high concentration inorganic wastewater (S100)
In the present invention, "production process" means any kind of process in which wastewater used and released during the process can be recycled. Preferably, the production process may include a semiconductor, plating, PCB, LCD process.
In the present invention, the term "low concentration inorganic wastewater" means wastewater containing a large amount of inorganic heavy metal material generated in the production process. Preferably, the inorganic wastewater means wastewater containing a large amount of heavy metal elements having a specific gravity of 4 or more. For example, inorganic heavy metal materials include copper, nickel, gold, silver arsenic, antimony, lead, mercury, cadmium, chromium, tin, zinc, barium, bismuth, nickel, cobalt, manganese, vanadium, selenium, and the like. can do. Most preferably, the total dissolved solids content (TDS) is in the range of 150-200 mg / L.
In the present invention, "high concentration inorganic wastewater" means wastewater containing a large amount of chemicals generated in the production process. Preferably, the total dissolved solids content (TDS) is characterized in that it has a range of 500 mg / L or more.
The step is carried out in the
On the other hand, as will be described later, the low concentration of inorganic wastewater generated from the
(2) replenishing the low concentration inorganic wastewater with supplemental water corresponding to the amount of the high concentration inorganic wastewater (S110)
In the present invention, "supplemental water" refers to water flowing into the sump tank 120 separately from the low concentration inorganic wastewater.
The step is carried out in the sump (120). The sump tank 120 serves to store a low concentration of inorganic wastewater. On the other hand, the sump tank 120 is supplied with an amount of water, for example, water, corresponding to the high concentration of inorganic wastewater generated in the
In addition, the contaminants separated from the reverse osmosis treatment unit 140 are introduced into the water collecting tank 120 as described below.
(3) removing impurity ions from the low concentration inorganic wastewater supplemented with the supplemental water in a first ion exchange unit (S120)
The step is performed in the first ion exchange unit 130. The first ion exchange part is, for example, a single phase ion exchange resin composed of single phase towers 2B2T and 2B3T. The first ion exchange unit 130 is connected to the collection tank 120, and serves to remove impurity ions from the low concentration of inorganic wastewater flowing in the collection tank 120. The first ion exchange unit 130 includes a plurality of ion exchange resins (or insoluble synthetic resins) having ions capable of ion exchange. The ion exchange resin may be made of a cation exchange resin, an anion exchange resin, an amphoteric resin, an electron exchange resin, a chelate resin and the like. Since a method of removing ions from impurities using an ion exchange resin uses a known method, description thereof will be omitted.
In one embodiment according to the present invention, the first ion exchange unit 130 may be set such that the total dissolved solids content of the low concentration inorganic wastewater from which the impurity ions have been removed is present in the range of 10 ~ 50 mg / L, such Note that the range can be set arbitrarily by the user.
The low concentration inorganic wastewater from which the impurity ions are removed from the first ion exchange unit 130 is introduced into the reverse osmosis treatment unit 140. In addition, as described below, the impurity ions removed from the first ion exchange unit 130 are introduced into the evaporator concentrator 160.
(4) separating contaminants using reverse osmosis from the low concentration of inorganic wastewater from which impurity ions have been removed in step (3) (S130)
In the present invention, "contaminants" means all kinds of inorganic ions, organic substances, pyrogenic substances, colloids or fine particles of 1 μm or more, which can be separated by reverse osmosis treatment, and the like.
The step is performed in the reverse osmosis processing unit 140. Reverse osmosis treatment unit 140 is a water purification system using a reverse osmosis, a general operation principle is a method of separating and removing contaminants contained in raw water using a semi-permeable membrane such as cellulose acetate or polyamide.
Currently, there are two kinds of reverse osmosis membranes or semi-permeable membranes used in water purification systems using reverse osmosis, and two kinds by shape. By material, there are cellulose acetate semipermeable membrane and polyamide semipermeable membrane, and by shape, there are spiral semipermeable membrane and hollow fiber semipermeable membrane.
The low concentration inorganic wastewater from which the impurity ions are removed from the first ion exchange unit 130 is introduced into the reverse osmosis treatment unit 140. Inflow of low concentration inorganic wastewater is pressurized to 10Kg / cm 2 ~ 42Kg / cm 2 and passes through the semipermeable membrane, but in the process of passing through the small pores of the semipermeable membrane, contaminants are separated and only inorganic wastewater from which the contaminants are removed It passes through this semipermeable membrane. On the other hand, the contaminants separated in this process flows into the sump (120).
In one embodiment according to the present invention, the reverse osmosis treatment unit 140 may be set such that the total dissolved solids content of the inorganic wastewater from which the contaminants have been removed is present in the range of 2.5 to 4.5 mg / L, and such a range may be arbitrarily selected by the user. Note that it can be set to.
(5) a step of preparing ultrapure water by removing impurity ions from the low concentration inorganic wastewater in which the contaminant is separated in the second ion exchange unit in step (4) (S140)
In the present invention, "ultra pure water" means water having a specific resistance range of 10 to 18 Mohm? Cm. However, note that the range of the resistivity is not necessarily limited thereto.
The step is performed in the second ion exchange unit 150. The second ion exchange unit 150 may include a mixed bed exchanger (MBD) or an electrolytic ion exchanger (EDI).
The electrolytic ion exchange device (EDI) serves to secondarily remove impurity ions from the inorganic wastewater having a low concentration of contaminants removed from the reverse osmosis treatment unit 140. Electrolytic ion exchanger (EDI) is generally composed of ion exchange membrane, ion exchange resin and direct current power, and removes impurity ions from low concentration of inorganic wastewater which is continuously and uniformly contaminated by electric method. Ultra pure water) is produced.
The mixed bed ion exchange device (MBD) also serves to remove impurity ions from the low concentration inorganic wastewater from which contaminants are removed from the reverse osmosis treatment unit 140. In general, a mixed bed ion exchange device (MBD) produces ultrapure water by completely filling a strong acidic cation exchange resin and a strong base anion exchange resin in a single column and completely removing cations and anion components in the inorganic wastewater. This mixed bed ion exchanger (MBD) has a merit that it can be repeatedly used as caustic soda (NaOH) and hydrochloric acid (HCI) after producing a certain capacity.
Meanwhile, in order to produce ultrapure water from a low concentration of inorganic wastewater from which contaminants have been removed from the reverse osmosis treatment unit 140, a user may optionally select one or more of an electrolytic ion exchanger (EDI) and a mixed bed ion exchanger (MBD). Note that you can choose.
The ultrapure water produced by the electrolytic ion exchanger (EDI) and / or the mixed bed ion exchanger (MBD) is introduced back into the
On the other hand, as will be described later, the impurity ions removed in the electrolytic ion exchange device (EDI) or hybrid phase ion exchange device (MBD) is introduced into the evaporator concentrator 160.
(6) evaporating and concentrating the impurity ions removed in the step (3) and the impurity ions removed in the step (5) together with the high concentration of inorganic waste water (S150).
The step is carried out in the evaporator (160). The evaporator concentrator 160 stores a high concentration of inorganic wastewater generated in the
The impurity ions removed by the first ion exchange unit 130 and the impurity ions removed by the electrolytic ion exchange device (EDI) or the hybrid phase ion exchange device (MBD) are introduced into the evaporative concentrator 160. These impurity ions are evaporated and concentrated with a high concentration of inorganic wastewater. The result is a small amount of waste.
In order to evaporate / concentrate the high concentration wastewater, impurity ions, etc. introduced into the evaporation concentrator 160, a plurality of energies are needed, and the wastewater can be treated from less energy by utilizing the
4 is a schematic diagram of an inorganic wastewater recycling apparatus according to another embodiment of the present invention, Figure 5 is a schematic flow chart of the inorganic wastewater recycling method according to another embodiment of the present invention.
Referring to FIG. 4, the inorganic
Compared with the inorganic
In addition, the inorganic wastewater recycling method shown in Figure 5 is compared with the inorganic wastewater recycling method shown in Figure 3, between step S110 and S120, (a) the low concentration inorganic wastewater supplemented with the replenishment water Filtering the impurities contained in the low concentration inorganic wastewater; And (b) oxidizing the filtered low concentration inorganic wastewater with ozone, which has the same construction step, and thus description thereof will be omitted.
An inorganic
(a) filtering the low concentration inorganic wastewater supplemented with the supplemental water to filter impurities contained in the low concentration inorganic wastewater (S220)
The step is performed by filtration device 270. The filtration device 270 is connected to the
Meanwhile, the filtration device 270 may include at least one of a micro filter, a sand filter, and an active carbon filter. In addition, it is noted that the filter included in the filtration device 270 is not particularly limited as long as it can filter impurities contained in the inorganic wastewater.
(b) oxidizing the filtered low concentration inorganic wastewater by ozone (S230)
The step is performed by ozone processor 280. The ozone processor 280 is connected to the filtration device 270, and serves to oxidize the inorganic wastewater from which impurities are filtered out by ozone. The ozone processor 280 removes inorganic heavy metal substances and organic substances dissolved in the inorganic wastewater by using the oxidizing property of ozone, and serves to sterilize them. In addition, the inorganic wastewater oxidized by ozone in the ozone processor 280 is introduced into the ion exchange unit 220 and recycled in the same process as the inorganic
As mentioned above, although the present invention has been illustrated and described with reference to specific embodiments, the present invention is not limited thereto, and the following claims are not limited to the scope of the present invention without departing from the spirit and scope of the present invention. It can be easily understood by those skilled in the art that can be modified and modified.
120, 220: sump
130 and 230: first ion exchange unit
140, 240: reverse osmosis treatment unit
150, 250: second ion exchange unit
160, 260: evaporative concentrator
270: filter device
280: ozone processor
310: collection tank
320: heat storage tank
Claims (10)
An evaporator condenser into which a high concentration of inorganic wastewater from the production process is introduced;
A first ion exchange unit for removing impurity ions from the low concentration inorganic wastewater introduced from the sump;
A reverse osmosis treatment unit for separating contaminants from the inorganic wastewater of the low concentration in which the impurity ions introduced from the first ion exchange unit are removed; And
It includes a second ion exchange unit for producing ultra-pure water by removing impurity ions from the inorganic wastewater of the low concentration of the contaminants introduced from the reverse osmosis treatment unit separated,
The ultrapure water is introduced into the production process, and
The evaporator concentrator is characterized in that connected to the heat storage tank is the heat storage of solar energy,
Inorganic wastewater recycling unit.
The sump is further introduced with supplemental water corresponding to the amount of the inorganic wastewater of high concentration and the contaminant separated from the reverse osmosis treatment unit,
The evaporator is further introduced with impurity ions removed from the first ion exchange unit and impurity ions removed from the second ion exchange unit, and the evaporator concentrates by evaporating the impurity ions and the highly concentrated inorganic wastewater. Characterized by
Inorganic wastewater recycling unit.
Between the sump and the second ion exchanger,
A filtration device for filtering impurities from the low concentration inorganic wastewater introduced from the sump; And
Further comprising an ozonizer for oxidizing the filtered low concentration inorganic wastewater introduced by the filter by ozone,
Inorganic wastewater recycling unit.
The second ion exchange unit is characterized in that the mixed bed ion exchange device (MBD, Mixed Bed Deionizer) or electrolytic ion exchange device (EDI, Electrodeionization),
Inorganic wastewater recycling unit.
The filtering device may include any one or more of a micro filter, a sand filter, and an active carbon filter.
Inorganic wastewater recycling unit.
(2) replenishing the low concentration inorganic wastewater with supplemental water corresponding to the amount of the high concentration inorganic wastewater;
(3) removing impurity ions in the first ion exchange unit from the low concentration inorganic wastewater supplemented with the supplemental water;
(4) separating contaminants from the low concentration inorganic wastewater from which impurity ions have been removed in step (3) using reverse osmosis;
(5) preparing ultrapure water by removing impurity ions in the second ion exchange unit from the low concentration inorganic wastewater in which the contaminants are separated in step (4); And
(6) including the step of introducing the ultrapure water prepared in step (5) into the production process,
The impurity ions removed in the step (3) and the impurity ions removed in the step (5) is evaporated and concentrated using solar heat together with the high concentration of inorganic wastewater,
How to recycle inorganic wastewater.
Step (4), characterized in that further comprising the step of introducing the separated contaminants into the low concentration inorganic wastewater of the step (2),
How to recycle inorganic wastewater.
Between step (2) and step (3),
(a) filtering impurities in the low concentration inorganic wastewater replenished with the replenishment water; And
(b) oxidizing the filtered low concentration inorganic wastewater with ozone.
How to recycle inorganic wastewater.
Step (5) is characterized in that performed by a mixed bed exchanger (MBD, Mixed Bed Deionizer) or electrolytic ion exchange (EDI, Electrodeionization),
How to recycle inorganic wastewater.
The step (a) is characterized in that performed by any one or more of a micro filter, a sand filter, and an activated carbon filter,
How to recycle inorganic wastewater.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100135818A KR101213230B1 (en) | 2010-12-27 | 2010-12-27 | Recycling device of inorganic wastewater and the recycling method of inorganic wastewater using the solar heat |
| CN201110035928.XA CN102531257B (en) | 2010-12-27 | 2011-02-11 | Recycling device of inorganic wastewater and the recycling method of inorganic wastewater using the solar heat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| KR1020100135818A KR101213230B1 (en) | 2010-12-27 | 2010-12-27 | Recycling device of inorganic wastewater and the recycling method of inorganic wastewater using the solar heat |
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| KR20120073897A KR20120073897A (en) | 2012-07-05 |
| KR101213230B1 true KR101213230B1 (en) | 2012-12-18 |
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| CN104193080B (en) * | 2014-07-25 | 2016-05-04 | 中国环境科学研究院 | A kind of apparatus and method that purify poison sewage |
| CN107673533B (en) * | 2015-11-13 | 2020-12-04 | 江苏理工学院 | Method for preparing ultrapure water without wastewater discharge |
| CN105366866A (en) * | 2015-12-11 | 2016-03-02 | 浙江华立涂装设备有限公司 | Wastewater zero discharge system |
| WO2020241476A1 (en) * | 2019-05-30 | 2020-12-03 | オルガノ株式会社 | Ultrapure water production system and ultrapure water production method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11319850A (en) | 1998-05-12 | 1999-11-24 | Nippon Light Metal Co Ltd | Treatment of boron-containing water |
| KR100253102B1 (en) | 1997-12-05 | 2000-04-15 | Samsung Electronics Co Ltd | Water treatment facility having the photo-oxidationequipment, for manufacturing semiconductor device and water treating method |
| KR101121225B1 (en) | 2009-09-16 | 2012-03-23 | 주식회사 제이미크론 | recycling device of inorganic wastewater and the recycling method of inorganic wastewater |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100515957C (en) * | 2005-10-12 | 2009-07-22 | 王凌云 | Waste liquid treating method and treating system thereof |
| JP2009095821A (en) * | 2007-09-28 | 2009-05-07 | Asahi Kasei Chemicals Corp | Method of treating salt water |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100253102B1 (en) | 1997-12-05 | 2000-04-15 | Samsung Electronics Co Ltd | Water treatment facility having the photo-oxidationequipment, for manufacturing semiconductor device and water treating method |
| JPH11319850A (en) | 1998-05-12 | 1999-11-24 | Nippon Light Metal Co Ltd | Treatment of boron-containing water |
| KR101121225B1 (en) | 2009-09-16 | 2012-03-23 | 주식회사 제이미크론 | recycling device of inorganic wastewater and the recycling method of inorganic wastewater |
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| CN102531257B (en) | 2014-06-11 |
| CN102531257A (en) | 2012-07-04 |
| KR20120073897A (en) | 2012-07-05 |
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