KR101208015B1 - Air conditioning and desiccating system for clean room - Google Patents

Abstract

PURPOSE: An air conditioning device for dehumidifying a clean room is provided to maintain the dry state of an indoor space even if the humidity of outdoor air is high by preventing the outdoor air from flowing into the indoor space. CONSTITUTION: An air conditioning device for dehumidifying a clean room comprises a clean room chamber(100), an air conditioner(200), multiple mufflers(400), a compressor(500), a supply pipe opening and closing valve(530), and a controller(600). An air damper is installed in the clean room chamber. The air conditioner has a dehumidification unit. The mufflers are connected to the air outlet of the air conditioner. The compressor is connected to the air conditioner through a supply pipe. The supply pipe opening and closing valve opens and closes the supply pipe. The controller controls the operation of the air damper, the air conditioner, and the supply pipe opening and closing valve.

Description

Air Conditioning and Desiccating System for Clean Room

The present invention relates to a clean room dehumidification air conditioning apparatus. More specifically, by dehumidifying the interior space of the clean room chamber by supplying dry air to the clean room chamber through a separate compressor, when the humidity of the outside air is high, such as in summer, by preventing the inflow of outside air. In addition, it is possible to maintain a good dry condition of the space inside the clean room chamber, and the supply of dry air through the compressor also prevents the lack of oxygen to the space inside the clean room chamber, preventing product defects and Health risks can be prevented and the existing air conditioners can be used as it is, so that the cooling and dehumidification method through the dehumidification unit of the air conditioner or the dehumidification method using the dry air of the compressor can be selectively applied according to the external environment. It relates to a room dehumidification air conditioning apparatus.

In general, semiconductor devices, flat panel displays, microelectronic devices, and the like are manufactured in a clean room because high cleanliness is required for their manufacture. The clean room is configured to maintain a certain level of temperature, humidity, and particles (micro particles such as dust, etc.) at a predetermined level to prevent product defects from occurring during the manufacturing stage.

In the clean room, a separate air conditioner is installed to maintain such a clean environment in the inner space. Temperature and humidity are controlled in the inner space through air circulation through the air conditioner, and particles are prevented from entering. In particular, in recent years, products such as advanced electronic components and chips are extremely sensitive to humidity, so dehumidification of the interior space of the clean room becomes more important so that these products are not damaged by moisture.

1 is a conceptual diagram conceptually showing a configuration of a general clean room dehumidification air conditioning apparatus according to the prior art.

The clean room dehumidification air conditioning apparatus includes a clean room chamber 100 that is hermetically formed to form a clean space therein, and an air conditioner 200 that circulates air to the interior space of the clean room chamber 100. One side of the clean room chamber 100 is equipped with an air damper 110 to maintain a positive pressure for the interior space, the interior space is a temperature and humidity sensor 300 that can measure the temperature and humidity inside the clean room chamber 100 Is fitted.

The air conditioner 200 is disposed inside the clean room chamber 100, and an air inlet 202 and an air outlet 201 are formed at one side and the other side thereof, and a blower fan (not shown) to circulate the air therethrough. ) Is mounted. The air conditioner 200 performs a dehumidification function in the process of circulating the air, for this purpose, a dehumidification unit 210 is provided therein, and air introduced through the air inlet 202 passes through the dehumidification unit 210. And it is configured to be discharged through the air outlet 201 in a dehumidified dry state. At this time, the dehumidification unit 210 is generally used a refrigerator to perform a dehumidification function using a cooling method.

In the clean room dehumidification air conditioning apparatus configured as described above, since positive pressure is formed in the interior space of the clean room chamber 100, external air is not introduced by default, but the external air is air due to a pressure change according to a specific situation such as a worker's entrance. It has a structure that can only flow through the damper 110 or the like. In addition, the air conditioner 200 itself has a configuration in which external air is introduced and circulated for supplying oxygen to the interior space of the clean room chamber 100.

As described above, the clean room dehumidification and air conditioning apparatus according to the prior art introduces external air into the interior space of the clean room chamber 100, and thus, when there is a lot of moisture in the external air, such as in summer, the clean room chamber 100 may be introduced by the external air. ) The humidity of the internal space is increased, and accordingly, high-tech products such as semiconductor parts and bio products are damaged by moisture.

In order to solve this problem, the air conditioner may be operated in such a way that the air damper 110 is specifically blocked only in summer to completely block the inflow of external air. In this case, the oxygen supply is blocked in the space inside the clean room chamber 100. There was a problem such that the lack of oxygen threatens the health of workers or the work efficiency is reduced.

The present invention has been made to solve the problems of the prior art, the object of the present invention is to perform a dehumidifying function for the interior space of the clean room chamber by supplying dry air to the clean room chamber through a separate compressor, By preventing the inflow of air, even when the humidity of the outside air is high, such as in summer, it is possible to maintain the dry condition of the interior of the clean room chamber well, and by supplying dry air through the compressor, oxygen to the interior of the clean room chamber It is to provide a clean room dehumidification and air conditioning system that can prevent shortages and prevent product defects and at the same time prevent worker health risks.

Another object of the present invention is to utilize a conventional air conditioner as it is, clean room dehumidification can be selectively applied according to the external environment cooling dehumidification method through the dehumidification unit of the air conditioner or the dry air of the compressor according to the external environment can be more efficient It is to provide an air conditioning apparatus.

Another object of the present invention is to circulate the dry air of the compressor in the clean room chamber space by using a separate injector, there is no need to operate the air conditioner additionally clean room dehumidification air conditioning apparatus that can provide improved energy efficiency To provide.

The above objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention by those skilled in the art.

The present invention, the clean room chamber is equipped with an air damper on one side to maintain a positive pressure in the inner space; An air conditioner which blows air into the inner space of the clean room chamber and is provided with a dehumidification unit to dehumidify the blown air; A plurality of silencers connected through the air conditioner and a circulation pipe to circulate the air by discharging the air blown from the air conditioner in a noise reduction method; A compressor connected to the air conditioner through a separate supply pipe to supply dry air to the air conditioner and blow dry air into the space inside the clean room chamber; A supply pipe open / close valve mounted to open and close the supply pipe; And a control unit controlling an operation state of the air damper, the air conditioner, and the supply pipe opening / closing valve so that the internal space of the clean room chamber is selectively dehumidified in the first dehumidification mode or the second dehumidification mode according to a user's selection operation through an operation unit. And the supply pipe opening / closing valve is closed in the first dehumidification mode and the dehumidification unit is operated to maintain an internal space of the clean room chamber through the dehumidification unit in a dry state, and in the second dehumidification mode, the air Clean room dehumidification air conditioning, characterized in that the damper is blocked, the operation of the dehumidification unit is stopped and the supply pipe opening and closing valve is opened to maintain the internal space of the clean room chamber by the dry air supplied from the compressor. Provide a device.

In this case, a separate cooler and a dryer may be installed in the supply pipe to cool and dry the drying air supplied from the compressor.

In addition, a separate injector is communicatively mounted on the circulation pipe, and the injector is connected to the supply pipe through a separate connection pipe so as to receive dry air from the compressor and to discharge the circulation pipe. A connecting pipe opening / closing valve capable of opening and closing the connecting pipe is mounted, and an inlet case having a suction hole formed to suck the air in the clean room chamber is connected to the injector through a separate suction pipe, and the injector Air in the clean room chamber is introduced into the injector through the suction case and the suction pipe and discharged together with the dry air by the pressure drop phenomenon generated during the discharge of the dry air, and the suction pipe has moisture from the air sucked in. Equipped with oil and water separation filter to remove the, the connection pipe The on / off valve is controlled by the controller to be opened in the second dehumidification mode according to a user's operation through the operation unit, and when the connection pipe open / close valve is opened, the air conditioner is operated by the controller to stop operation. Can be controlled.

At this time, the injector is a discharge flow path is formed in one direction so that the drying air is discharged, the injector block is formed in the inlet of the discharge flow path connected to the suction pipe is connected to the suction passage; An inlet port coupled to one end of an outlet flow path of the injector block; And a discharge port coupled to the other end of the discharge passage of the injector block, wherein the discharge passage may have a neck portion having a smaller diameter at a point communicating with the suction passage.

According to the present invention, by performing a dehumidification function for the interior space of the clean room chamber by supplying dry air to the clean room chamber through a separate compressor, by preventing the inflow of outside air, high humidity of the outside air, such as summer In this case, it is possible to maintain a good dry condition of the space inside the clean room chamber, and supply of dry air through the compressor also prevents oxygen shortage in the space inside the clean room chamber, thereby preventing product defects and Has the effect of preventing health risks.

In addition, by using the existing air conditioner as it is, it is possible to selectively apply the cooling dehumidification method through the dehumidification unit of the air conditioner or the dehumidification method using the dry air of the compressor according to the external environment can be used more efficiently.

In addition, by circulating the dry air of the compressor in the clean room chamber internal space using a separate injector, there is an effect that can provide an improved energy efficiency because it does not need to operate the air conditioner additionally.

1 is a conceptual diagram conceptually showing the configuration of a general clean room dehumidification air conditioning apparatus according to the prior art;
2 is a conceptual diagram conceptually showing a configuration of a clean room dehumidification air conditioning apparatus according to an embodiment of the present invention;
3 is a conceptual diagram conceptually showing a configuration of a clean room dehumidification air conditioning apparatus according to another embodiment of the present invention;
4 is a conceptual diagram conceptually illustrating an operation structure of the injector and the suction case illustrated in FIG. 3.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals have the same reference numerals as much as possible even if displayed on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

2 is a conceptual diagram conceptually showing a configuration of a clean room dehumidification air conditioning apparatus according to an embodiment of the present invention.

Clean room dehumidification air conditioning apparatus according to an embodiment of the present invention is an air conditioning apparatus for performing a dehumidification function by supplying dry air to the internal space of the clean room chamber 100 to block the outside air inflow, clean room chamber ( 100, an air conditioner 200, a silencer 400, a compressor 500, a supply pipe open / close valve 530, and a control unit 600.

The clean room chamber 100 is formed in a sealed form to form a clean space therein, and an air damper 110 is mounted at one side to form a positive pressure in the inner space. The interior of the clean room chamber 100 may be equipped with a temperature and humidity sensor 300 that can measure the temperature and humidity of the interior space.

The air conditioner 200 may be installed inside or outside the clean room chamber 100, blows air into the interior space of the clean room chamber 100, and dehumidifies to dehumidify the air during the blowing process. Unit 210 is provided. An air inlet 202 and an air outlet 201 are formed in the air conditioner 200, and a blower fan (not shown) may be provided therein. Accordingly, the air in the space inside the clean room chamber 100 is sucked through the air inlet 202, dehumidified through the dehumidification unit 210, and the dry air is again supplied to the clean room chamber 100 through the air outlet 201. ) Air circulation and dehumidification can be performed by discharging to the inner space. At this time, the dehumidifying unit 210 may be applied to a refrigerator using a general cooling method as described in the prior art.

Meanwhile, the air conditioner 200 receives dry air from the compressor 500 which will be described later in addition to the function of circulating the air inside the clean room chamber 100, and discharges the dry air to the interior space of the clean room chamber 100. The function also performs.

The silencer 400 is configured to discharge air blown out from the air conditioner 200 in a noise reduction manner, and is connected to the air outlet 201 of the air conditioner 200 through a separate circulation pipe P1. In this case, a plurality of silencers 400 may be provided, and each of the silencers 400 may communicate with each of the plurality of silencers 400 in a branched form. Since the silencer 400 is a known configuration as a device for discharging air in a noise reduction method, a detailed description thereof will be omitted.

The compressor 500 is configured to supply external air in a compressed and dried state, and is connected to the air conditioner 200 through a separate supply pipe P2 to supply dry air to the air conditioner 200. The dry air supplied from the compressor 500 to the air conditioner 200 is discharged through the air outlet 201 of the air conditioner 200 as described above, and passes through the circulation pipe P1 and the silencer 400 to clean the chamber 100. ) It is circulated and discharged into the inner space. In this case, a separate cooler 510 and a dryer 520 may be mounted in the supply pipe P2 so as to cool and dry the drying air supplied from the compressor 500. On the other hand, although not shown, the compressor 500 is equipped with a separate filter may be configured to remove foreign substances when the inflow of external air.

The supply pipe opening and closing valve 530 is mounted on the supply pipe (P2) to open and close the supply pipe (P2), may be configured to be opened and closed by a manual operation of the user, the control unit according to an embodiment of the present invention It can be applied in the form of a solenoid valve or the like to automatically open and close operation by the control of (600).

The controller 600 controls the air damper 110 and the air conditioner 200 to selectively dehumidify the internal space of the clean room chamber 100 in the first dehumidification mode or the second dehumidification mode according to a user's selection operation through the operation unit 610. ), The operation of the components such as the supply pipe opening and closing valve 530 is controlled. The first dehumidification mode is an operating state in which a general dehumidification function by the dehumidification unit 210 of the air conditioner 200 is performed as described in the related art, and the second dehumidification mode is a dehumidification function through supplying dry air of the compressor 500. This means the operating state being performed.

That is, in the clean room dehumidification air conditioning apparatus according to an embodiment of the present invention, when the user selects the first dehumidification mode or the second dehumidification mode through the operation unit 610, the control unit 600 receives such an operation signal. The dehumidification function is selectively performed in the first dehumidification mode or the second dehumidification mode by controlling the operating states of the components.

In the first dehumidification mode, the supply pipe open / close valve 530 is controlled to be closed, and the dehumidification unit 210 of the air conditioner 200 is controlled to operate, whereby the dry air of the compressor 500 is transferred to the air conditioner 200. Without entering, air in the interior space of the clean room chamber 100 is circulated through the air conditioner 200 in a general dehumidifying manner, and a dehumidifying function is performed by the dehumidifying unit 210 in the circulating process. In this first dehumidification mode, the air damper 110 is kept unblocked.

In the second dehumidification mode, the air damper 110 is controlled to be blocked to prevent the inflow of external air, and to control the operation of the dehumidification unit 210 to be stopped, and to operate the opening and closing valve 530 of the supply pipe. Controlled. Accordingly, dry air is supplied from the compressor 500 to the air conditioner 200, and is circulated and discharged from the air conditioner 200 through the circulation pipe P1 to the interior space of the clean room chamber 100 through the silencer 400. The dehumidifying function for the interior space of the clean room chamber 100 is performed through the circulation of the dry air. Therefore, the dehumidification unit 210 that performs the dehumidification function in the air circulation process is preferably controlled to be stopped because its operation does not need to be maintained.

In the second dehumidification mode, since the air damper 110 is blocked and no external air is introduced, even when the humidity of the outside air is high, such as in summer, the interior space of the clean room chamber 100 is kept well in a low humidity state. do. In addition, even though the inflow of the outside air through the air damper 110 is blocked, since the outside air is supplied into the clean room chamber 100 in the dry air state through the compressor 500, unlike the prior art clean room chamber 100 ) Do not cause oxygen shortage in the internal space.

Therefore, the clean room dehumidification and air conditioning apparatus according to an embodiment of the present invention may be applied to the clean room chamber 100 in the first dehumidification mode in which the outside air may be introduced in a general case where the humidity of the outside air is low, such as in spring. In a selective manner to perform the dehumidification function and the dehumidification function for the clean room chamber 100 in the second dehumidification mode in which the inflow of high humidity outside air is blocked in case of rain or high humidity of the outside air such as in summer. Can be operated.

In particular, by acting in such an optional manner, it can be easily configured by additionally connecting the compressor 500, etc. to the existing air conditioning apparatus without the need to remove the dehumidification air conditioning apparatus installed in the existing manner.

3 is a conceptual diagram conceptually showing a configuration of a clean room dehumidification air conditioning apparatus according to still another embodiment of the present invention, and FIG. 4 is a conceptual diagram conceptually illustrating an operation structure of the injector and the suction case illustrated in FIG. 3. .

Clean room dehumidification air conditioning apparatus according to another embodiment of the present invention is equipped with a separate injector 700 that receives the dry air from the compressor 500 and ejected to the circulation pipe (P1) as shown in FIG. It may be configured in the form.

One end of the injector 700 is connected to the circulation pipe (P1), the other end is connected to the supply pipe (P2) of the compressor 500 or the compressor 500 through a separate connection pipe (P3), connection pipe (P3) ) May be equipped with a separate connecting pipe opening and closing valve 750 that can open and close the connecting pipe (P3). At this time, the connecting pipe opening and closing valve 750 is configured to be controlled by the control unit 600. Therefore, when the connection pipe open / close valve 750 is opened, dry air flows from the compressor 500 into the injector 700 through the connection pipe P3 and is discharged into the circulation pipe P1, thereby circulating the circulation pipe P1. Through the silencer 400 is discharged to the interior space of the clean room chamber 100.

The injector 700 is connected to a suction case 800 in which a suction hole 810 is formed to suck air in the clean room chamber 100 through a separate suction pipe P4, and the injector 700 is connected to the injector 700. The air inside the clean room chamber 100 is introduced into the injector 700 through the suction case 800 and the suction pipe P4 by the pressure drop phenomenon generated during the discharge of the dry air, and discharged together with the dry air. do.

According to this configuration, the clean room dehumidification air conditioning apparatus according to the embodiment of the present invention operates in a circulation method of dry air using a separate injector 700 in addition to the circulation method of dry air through the air conditioner 200 in the second dehumidification mode. Can be.

That is, when the user selects the air circulation method using the injector 700 through the operation unit 610 in the second dehumidification mode, the control unit 600 receives such an operation signal so that the connection pipe open / close valve 750 is opened. After this, the dry air of the compressor 500 flows into the injector 700 through the connection pipe P3, and then passes through the circulation pipe P1 and the silencer 400 to the interior space of the clean room chamber 100. At the same time, the air inside the clean room chamber 100 is again introduced into the injector 700 through the suction case 800 and the suction pipe P4 and discharged together with the dry air, so that the dry air is clean room chamber 100. ) Will continue to cycle inside.

In this case, since the supply pipe open / close valve 530 is also opened in the second dehumidification mode, the dry air of the compressor 500 may be continuously supplied to the air conditioner 200 through the supply pipe P2, in which case the air conditioner ( Since it is not necessary to perform the air circulation function by the 200, it is preferable that the air conditioner 200 is controlled to be stopped when the connecting pipe open / close valve 750 is opened. Of course, in this case, the supply pipe open / close valve 530 may also be controlled to be closed. In addition, a separate circulation pipe opening and closing valve 220 is mounted on the circulation pipe P1 connected to the air outlet 201 of the air conditioner 200, and the circulation pipe opening and closing valve 220 is controlled in such a manner as to be closed. It may be configured.

According to this configuration, it is possible to smoothly circulate and supply dry air to the interior space of the clean room chamber 100 using the injector 700 without the operation of the air conditioner 200 in the second dehumidification mode, thereby improving energy efficiency. Can be.

On the other hand, looking at the configuration of the injector 700, the injector 700 is dry air in the inner flow path as shown in Figure 4 so that the internal air can be more smoothly sucked from the suction case 800 during the dry air injection process A neck portion 713 may be formed to induce a throttling action.

In more detail, the injector 700 has an injector block 710 having a discharge flow path 711 and a suction flow path 712 formed therein, and an inflow coupled to one end of the discharge flow path 711 of the injector block 710. And a port 720 and a discharge port 730 coupled to the other end of the discharge flow path 711 of the injector block 710.

The discharge flow path 711 formed in the injector block 710 is formed long in one direction so that the dry air supplied from the compressor 500 is introduced and discharged, and the inflow port 720 and both ends of the discharge flow path 711 are respectively formed. The discharge port 730 is coupled. The suction passage 712 is formed to be connected to the discharge passage 711 in a direction perpendicular to the stop of the discharge passage 711, the suction pipe (P4) is connected to the end of the suction passage 712.

In this case, a neck portion 713 is formed in the stop portion of the discharge flow path 711 so that the inner diameter of the flow path becomes small at a point in communication with the suction flow path 712. That is, the discharge passage 711 has a neck portion 713 having a smaller diameter toward both points communicating with the suction passage 712 from both ends, and is communicated with the suction passage 712 by the neck portion 713. At this point, the diameter of the discharge passage 711 is minimized, thereby causing a throttling action on the dry air, and the air inside the clean room chamber 100 from the suction pipe P4 due to the pressure drop phenomenon due to the throttling action. The suctioned inside air is discharged together with the dry air through the discharge passage 711.

Therefore, the injector 700 according to an embodiment of the present invention can more smoothly inhale a larger amount of internal air by the neck portion 713 in the discharge passage 711 to clean room chamber 100 The dehumidification effect on the inner space can be performed more effectively and quickly.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

100: clean room chamber 110: air damper
200: air conditioner 210: dehumidification unit
300: temperature and humidity sensor 400: silencer
500: compressor 510: cooler
520: dryer 530: supply piping opening and closing valve
600: control unit 610: operation unit
700: injector 710: injector block
720: inlet port 730: outlet port
800: suction case 810: suction hole

Claims (4)

A clean room chamber in which an air damper is mounted at one side to maintain a positive pressure in an inner space;
An air inlet and an air outlet are formed, and a blower is provided therein to suck the air in the interior of the clean room chamber through the air inlet, and blow air back to the interior of the clean room chamber through the air outlet. An air conditioner having a dehumidification unit to dehumidify the air;
A plurality of silencers connected through the circulation pipe and the air outlet of the air conditioner to circulate the air by discharging the air blown from the air conditioner in a noise reduction manner;
A compressor connected to the air conditioner through a separate supply pipe to supply dry air to the air conditioner and blow dry air into the space inside the clean room chamber;
A supply pipe open / close valve mounted to open and close the supply pipe; And
Control unit for controlling the operation state of the air damper, air conditioner and supply piping opening and closing valves to selectively dehumidify the interior space of the clean room chamber in the first dehumidification mode or the second dehumidification mode according to the user's selection operation through the operation unit
In the first dehumidification mode, the supply pipe opening and closing valve is closed and the dehumidification unit is operated to maintain the interior space of the clean room chamber through the dehumidification unit in the dry state, in the second dehumidification mode The air damper is blocked, the operation of the dehumidification unit is stopped and the supply pipe open / close valve is opened so that the internal space of the clean room chamber is kept dry by the dry air supplied from the compressor,
The supply pipe is equipped with a separate cooler and dryer, respectively, to cool and dry the drying air supplied from the compressor,
The circulation pipe is equipped with a separate injector in communication,
The injector is connected to the supply pipe through a separate connection pipe so as to receive dry air from the compressor and to discharge the circulation pipe, and the connection pipe is equipped with a connection pipe opening / closing valve for opening and closing the connection pipe. ,
The injector is connected to a suction case in which a suction hole is formed to suck air in the clean room chamber through a separate suction pipe, and the cleanliness is caused by a pressure drop occurring in the process of discharging dry air. The air inside the room chamber is introduced into the injector through the suction case and the suction pipe and discharged together with the dry air, and the suction pipe is equipped with an oil / water separation filter to remove moisture from the air sucked in.
The connection pipe open / close valve is controlled by the controller to be opened in the second dehumidification mode according to a user's operation through the operation unit, and when the connection pipe open / close valve is opened, the air conditioner stops operating. Motion controlled by
The injector is
An injector block in which a discharge flow path is formed in one direction to discharge dry air, and a suction flow path connected to the suction pipe is connected to the discharge flow path at a stop of the discharge flow path;
An inlet port coupled to one end of an outlet flow path of the injector block; And
Discharge port coupled to the other end of the discharge passage of the injector block
Includes, wherein the discharge passage is a clean room dehumidification air conditioning apparatus characterized in that the neck portion is reduced in diameter is formed at the point in communication with the suction passage.
delete delete delete

Images