KR101195984B1 - Vacuum pump - Google Patents

Abstract

The present invention relates to a vacuum pump installed in a semiconductor system, an industrial machine system, and other machinery, comprising: two root rotors comprising a plurality of impellers; Timing gears respectively provided on said root rotor end shafts; An intermediate casing in which two root rotors and a plurality of partition walls are built; A front casing installed so that two root rotor side shafts pass; A front cover coupled with the front bearing housing installed at the shaft end; A coupling casing configured to protect the outer surface connected by the drive motor shaft and the coupling and to fix the drive motor; A rear casing coupled to allow the two shafts to pass therethrough; A rear cover coupled to position the bearing housing and the timing gear; The vacuum pump is composed of a front oil pan flat and a rear oil pan plate installed on one side of the timing gear, and the present invention comprises a plurality of impellers installed in the main body casing to rotate in response to the power of the motor. The impellers are formed from one impeller to the other impeller side in order to increase in size by 0.3 times in size, or to be reduced in size by 0.3 times in size, thereby improving the compression efficiency to volume and improving the performance of the vacuum pump while simultaneously localizing imported products. It relates to a high efficiency vacuum pump.

Description

Vacuum pump {VACUUM PUMP}

The present invention relates to a vacuum pump installed in a semiconductor system, an industrial machinery system, and other mechanical devices, and more particularly, a plurality of impellers installed in a main body casing to rotate in response to a power of a motor. High efficiency that improves the performance of vacuum pumps while localizing imported products by increasing the compression efficiency to volume by increasing the thickness from one impeller to the other impeller side by 0.3 times or increasing the thickness by 0.3 times. It relates to a vacuum pump.

Generally, a vacuum pump is installed in a system requiring a vacuum and used to perform a vacuum. The vacuum pump used in this way is closely related to the vacuum efficiency and its lifespan according to the structure of the casing constituting the body, the infeller (wing) and the power transmission device for compressing air.

The vacuum pump becomes an essential component according to the development of industrial machinery, and it is absolutely necessary for the advancement of the national industrial structure in the future according to the development of localization due to the high dependence on imported products.

In particular, vacuum pumps with a medium vacuum of 2500㎥ / h × 10 ^-3 torr are highly dependent on imports (150 billion won in 2007), and imports from Japan account for 40% or more.

In the meantime, the machinery and parts industry related to vacuum pumps in Korea has not been developed because the production base of parts is weak, and the production of simple assembly processing mainly for finished products is carried out, and most of the core machinery parts depended on developed countries.

Domestic mid and high vacuum pumps are supplied by renowned overseas manufacturers to sell finished products and simply assembled at domestic plants.In addition, some domestic vacuum pump companies have advanced due to lack of technical skills and poor testing equipment due to difficulties in technology improvement and distrust of domestic demand. The market is occupied by foreign companies.

After designing, manufacturing and assembling precision parts, the vacuum pump performs various tests such as durability test, environmental test, and acceleration test from time to time by the field technicians, finds problems, and goes through feedback cycles without compensating for the optimal drawing. It is only necessary to secure the reliability of domestic large corporations and public corporations by producing products with the completed drawings, persuading domestic consumers with advanced performance standard products and comprehensive performance comparison data, and participating in performance tests directly on site product testing machines. Import substitution is possible.

Looking at such a vacuum pump, a dry vacuum pump is a roots rotor and one or more screw rotors equipped with one or more lobes for the purpose of maintaining a complete vacuum in the process chamber and reducing the required power costs. (screw rotor).

Looking at the prior art in the field below, Figure 1 (prior art 1) of Patent No. 0647012 has an interior receiving space, one side is provided with an inlet, the other side is provided with a discharge port; First and second root rotors that are accommodated in the inner receiving space of the housing and are installed to be engaged with each other; First and second screw rotors which are accommodated in the inner receiving space of the housing and are installed to be engaged with each other in close proximity to the first and second root rotors; First and second transmission shafts rotatably installed in the housing through the centers of the first and second root rotors and the first and second screw rotors; In the Roots rotor and screw rotor composite dry vacuum pump consisting of an electric motor for rotationally driving the first and second electric shaft,

The first and second roots rotor is a roots rotor and a screw rotor composite dry vacuum pump, characterized in that each consisting of three lobes.

The prior art 1 is a combination of the Roots rotor and the screw rotor, the Roots rotor is located on the inlet side, the screw rotor is located on the outlet side to increase the compression efficiency as the volume of air is reduced when compressing the air. Prior art 1 has a disadvantage in that the impeller of the rotor rotor is compressed when the air is compressed through the inlet port, so that the initial load generated during operation increases, which imposes an excessive force on the power generator, and the screw rotor located at the outlet side has an impeller from the tip. Impeller is made of the same thickness, but inefficient in compressing air, although the volume ratio decreases toward the outlet due to a constant thickness to the end.

2 (prior art 2) is a sectional view showing a roots type vacuum pump, which is a multi-stage roots type vacuum pump in which a pair of pump rotors are housed in a casing. Each of the pump rotors houses three stages of Roots-type rotors. As shown in the prior art 2, the pump rotor 51 includes rotors 51a, 51b, 51c disposed in the casing 52 and a main shaft 51d rotatably supported by the bearing 53. The vacuum pump is formed in the casing 52 and disposed below the rotor 51a having the largest width, and the inlet port 54 formed in the casing 52 and disposed below the rotor 51c having the smallest width. There is an exhaust port 55. The motor M is connected to the pump rotor 51 at the end of the main shaft 51d located on the exhaust port side. The timing gear 56 is fixed to the pump rotor 51 at the other end of the main shaft 51d located on the inlet port side. The timing gear 56 serves to connect a pair of opposing pump rotors 51. When the motor M is driven, the pair of pump rotors 51 are opposed by the timing gears 56 in the opposite direction. Is rotated synchronously, and gas is transferred and exhausted by the multi-stage rotors 51a, 51b, and 51c. When the multistage vacuum pump is in operation, the rotor 51a located near the intake port 54 is not heated to a high temperature, but the rotor 51c located near the exhaust port 55 has the rotors 51a, 51b, 51c in a multistage manner. It is heated to high temperature by the gas compressed by the pair. Motors used to drive vacuum pumps generally include induction motors. Motor (M) is made of electromagnetic steel

And a motor rotor 57 having an iron core 58 made of a laminated assembly of plates. Iron core 58 has a slot for receiving a rotor bar (not shown) as a secondary conductor. When the motor M is in operation, an induced current flows in the secondary conductor due to the rotating magnetic field generated by the stator 60 of the motor M. Thus, the rotating magnetic field and the induced current generate torque for rotating the motor rotor 57. However, the induced current flowing in the secondary conductor heats the motor rotor 57, thereby making the motor M itself higher.

When the motor is disposed on the exhaust port side heated by the compressed gas and generates heat by itself, the motor M is heated to an excessively high temperature, and thus the efficiency of the motor M is greatly reduced. Therefore, when the motor is disposed on the exhaust port side, it is necessary to connect the motor M to the main shaft 51d via a coupling or the like so that the motor M is spaced apart from the exhaust port 55 by a predetermined distance. The motor M having such a structure causes mechanical loss in the vacuum pump, and also has a problem in that the vacuum pump cannot be made compact.

The present invention comprises a plurality of impellers installed in the main casing, but a plurality of impellers sequentially increase in size from one side of the impeller stage to the other side of the impeller stage according to the position of the inlet and the exhaust port, or sequentially increase in the thickness of 0.3 Its purpose is to reduce the size of the ship and to improve the performance of the vacuum pump by increasing the efficiency of the impeller by matching the impeller according to the volume that is reduced when the air is compressed. One high efficiency vacuum pump is concerned.

The present invention relates to a vacuum pump installed in a semiconductor system, an industrial machine system, and other machinery, comprising: two root rotors comprising a plurality of impellers; Timing gears respectively provided on said root rotor end shafts; An intermediate casing in which two root rotors and a plurality of partition walls are built; A front casing installed so that two root rotor side shafts pass; A front cover coupled with the front bearing housing installed at the shaft end; A coupling casing configured to protect the outer surface connected by the drive motor shaft and the coupling and to fix the drive motor; A rear casing coupled to allow the two shafts to pass therethrough; A rear cover coupled to position the bearing housing and the timing gear; The vacuum pump is made up of a configuration including a front oil pan flat and a rear oil pan plate installed on one side of the timing gear, and the present invention improves the air compression rate for the vacuum to provide a high efficiency vacuum pump and at the same time imports. By replacing them with localization, it is possible to reduce product prices and provide high quality vacuum pumps.

The present invention forms a plurality of impellers installed on the shaft, the thickness of the impeller sequentially formed from one side according to the direction of the inlet and exhaust ports to form a larger or smaller to correspond to the volume in which the air is compressed to sequentially compress the air during compression It is possible to generate high-efficiency vacuum by providing high quality vacuum pump and at the same time have import substitution effect, and it has the effect of economical supply and repair of goods quickly.

1 is a perspective view showing a vacuum pump impeller in a state of a conventional Roots rotor and a screw rotor in parallel.
Figure 2 is a cross-sectional view showing a conventional Roots rotor type vacuum pump coupled state.
Figure 3 is a perspective view of the vacuum pump coupled state of the present invention.
Figure 4 is a cross-sectional view showing a state cut in the longitudinal direction between two Roots rotor installed in the intermediate casing of the vacuum pump according to the present invention.
5 is a cross-sectional view showing a state in which the shaft of one of the roots rotors of the two roots rotors installed in the intermediate casing of the vacuum pump according to the present invention is cut in the longitudinal direction.
Figure 6 is an exemplary view showing a state in which two Roots rotor is installed in the vacuum pump casing of the present invention.
Figure 7 is a perspective view showing two Roots rotor installed in the vacuum pump of the present invention.
Figure 8 is a perspective view of the front and rear casing located at the root rotor shaft shaft of the present invention.
Figure 9a is a perspective view showing a bearing housing installed at the root rotor shaft end of the present invention.
Fig. 9B is a sectional view showing a bearing housing installed at the root rotor shaft end of the present invention.
10A and 10B are a perspective view and a cross-sectional view showing a vacuum pump rear oil pan plate of the present invention.
11A and 11B are a perspective view and a cross-sectional view showing a vacuum pump front oil pan plate of the present invention.
12A and 12B are a perspective view and a cross-sectional view showing a vacuum pump rear cover cover of the present invention.
Figure 13 is a perspective view showing a coupling casing connecting the front casing and the drive motor of the present invention.
Fig. 14 is a perspective view and a sectional view of a timing gear installed at the rear shaft end to rotate two root rotors of the present invention.
Figure 15a and Figure 15b is a perspective view and a cross-sectional view of the timing gear coupling state installed on the root shaft rear shaft end of the present invention.

Two Roots rotors 4 formed of a plurality of impellers so as to receive power from the driving motor 1 and compress air;

Timing gears 18 respectively provided on the roots rotor end shafts 6 so as to cooperate with rotation of the two roots rotors 4;

An intermediate casing (12) in which a plurality of roots (4) having a plurality of impellers (5) formed at a predetermined interval and a plurality of partitions (13) having flow path holes (13 ') are installed;

A front casing (16a) coupled to the front side of the middle casing and installed to allow two root rotor side shafts to pass therethrough;

 A front cover (8) coupled to one side of the front casing and coupled to a front bearing housing (11a) installed inside the shaft end;

Coupling casing coupled to the front cover one side and the drive motor flange to protrude toward one side of the front cover to protect the outer surface connected by the drive motor shaft (2) and the coupling (3) and to secure the drive motor ( 7);

A rear casing (16b) coupled to the rear surface of the middle case and coupled to allow two shafts to pass therethrough;

A rear cover (17) coupled to one side of the rear casing and coupled to the rear bearing housing (11b) and the timing gear (18) coupled to two shaft (6) ends therein;

 The vacuum pump 20 includes a front oil pan plate 9a installed on the shaft 6 in the front front cover and a rear fan plate 9b installed on one side of the timing gear 18.

The two Roots rotors 4 installed in the intermediate casing are sequentially formed with a thickness of 0.3 times in order from the impeller 5 on one side to the impeller 5 on the other side.

The partition wall installed inside the intermediate casing is located between the impellers of the two Roots rotors, characterized in that a plurality of passage holes through which compressed air passes are formed on both sides of the upper end adjacent to the inner wall of the intermediate casing.

"형의 3엽 날개가 형성된 것을 특징으로 한다 The impellers of the two Roots rotors are formed on the shaft line and each impeller 5 is formed about the shaft 6 "

It is characterized by the formation of a three-lobed wing

The intermediate casing has a suction hole 14 formed in the upper end of the casing located on the wide side of the impeller 5 of the Roots rotor 4, and the discharge hole 15 has an intermediate casing on the side of the narrow side of the impeller 5. Characterized in the lower portion.

The present invention configured as described above will be described in detail with reference to the accompanying drawings.

Figure 3 is a perspective view of the vacuum pump coupled state of the present invention, Figure 4 is a cross-sectional view showing a state cut in the longitudinal direction between the two Roots rotor installed in the intermediate casing of the vacuum pump according to the present invention, Figure 5 is a present invention Cross-sectional view showing a state in which the shaft of one of the roots rotor of the two root rotors installed in the intermediate casing of the vacuum pump in the longitudinal direction, the configuration of the outer surface of the vacuum pump 20 of the present invention as shown in FIG. The drive motor 1 is installed in the drive motor 1 is connected to one side of the coupling casing (7), the other side of the coupling casing (7) is connected to one side of the front cover (8), the front cover (8) The other side is connected to the front casing 16a.

The other side of the front casing (16a) is connected to one side of the middle casing (12), the other side of the middle casing (12) is connected to one side of the rear casing (16b), the other side of the rear casing (16b) is the back cover (17) ) Is combined with the outer surface of the vacuum pump 20.

The front and rear oil pan plates 9a and 9b are characterized in that a plurality of bending wings 9 'are formed on the outer circumferential edge.

As shown in FIGS. 4 and 5, the vacuum pump of the present invention having the outer surface is configured such that one shaft of the two Roots rotors 4 is installed such that the shaft 2 of the driving motor 1 is adjacent to the inside. (6) It is connected to one side and the coupling (3). The coupling 3 connecting the shaft 6 and the drive motor shaft is located inside the coupling casing 7 connecting the drive motor 1 and the front cover 8.

In addition, one shaft 6 of one Roots rotor 4 connected to the shaft 2 of the drive motor 1 and the coupling 3 passes through one side of the front cover 8 connected to the coupling casing 7. This is connected to the drive motor shaft 2 and the shaft 6 end of the other Roots rotor 4 is not penetrated.

The front cover 8 has two front bearing housings 11a coupled therein, and a bearing 10 is fixed inside the front bearing housing 11a to fix one end of the two rotors 4 and the shaft 6. do.

In addition, the front side oil pan plate (9a) is coupled to one side of the shaft inside the front cover to lubricate by sprinkling oil on one side of the bearing and the shaft.

 In addition, the impeller 5 side of the Roots rotor 4 is located inside the intermediate casing 12, and two impellers 5 of the Roots rotor 4 are formed at regular intervals on the shaft 6 line, Each impeller is formed sequentially larger in thickness.

That is, the thickness of the impeller 5 constituting the Roots rotor 4 is 0.3 times larger than the thickness of the first impeller based on the impeller 5 on the driving motor 1 side, and the third impeller Is 0.3 times larger than the thickness of the second impeller is formed in a plurality of impeller (5) is formed larger in size 0.3 times sequentially from one side to the other side.

As described above, a plurality of impellers 5 are formed in different thicknesses, and an air inlet 14 is formed in the upper middle casing 12 on the thickest impeller side, and the impeller having the thinnest thickness on the driving motor 1 side ( The air outlet 15 is formed in the middle casing 12 on the lower side of 5). Therefore, the direction in which the impeller thickness gradually decreases or increases gradually depends on the direction of the inlet and exhaust ports of the vacuum pump.

That is, the impeller of the present invention is formed with the largest impeller thickness on the inlet side through which the air is introduced to start the compressed air and the volume of the compressed air becomes smaller toward the outlet side, so that a plurality of impeller thicknesses sequentially It is formed thin.

Between the two roots rotor 4 and the impeller 5 inside the intermediate casing 12, a partition wall having a flow path 13 ′ is installed to compress air introduced into the suction port 14 with an impeller to partition the partition wall 13. After moving to the next compression chamber through the flow path hole 13 'of the air), the compressed and introduced air is compressed by another impeller and then compressed to the next compression chamber to be discharged to the outlet 15.

In addition, bearings 10 are fitted to the ends of the other end shafts 6 of the two roots rotors 4, and the bearings 10 are fixed to the rear bearing housings 11b, and the rear bearing housings have rear covers 17. ) It is installed on one side inside.

Timing gears are respectively installed at the ends of the roots rotor 4 shaft 6 on the other side of the rear bearing housing, so that the timing gears installed at the other end are rotated when the roots rotor shaft of one of the two root rotors is rotated by the drive motor. By rotating the timing gear driven and engaged, the two Roots rotors installed adjacent to each other compress the air while rotating to move the air in the same direction.

At this time, the impeller rotation direction of the two Roots rotors rotated by the drive motor is rotated in the same direction as the rotation direction of the timing gear at the end to compress air.

In addition, one side of the timing gear 18 has a rear oil pan plate 9b having a plurality of bending wings 9 'formed on an outer circumferential edge thereof, and is rotated to lubricate by sprinkling lubricant on bearings and timing gears.

 The outer side of the rear casing is coupled to protect the timing gear 18 is coupled to the rear cover 17 is closed.

Figure 6 is an exemplary view showing a state in which two root rotors are installed in the vacuum pump casing of the present invention, two root rotors 4 in a state in which the rear casing 16b coupled to one side of the intermediate casing 12 is removed. As shown in the drawing in the direction of showing the state of engagement of the impeller 5 and the impeller 5 during rotation.

"의 형상으로서 3엽의 날개로 이루어진다. 상기 3엽으로 이루어진 날개의 각은 3등분으로 균등하게 나누어진 각으로 형성된다.The impeller 5 shape of the roots rotor 4 is "

It consists of a blade of three lobes as the shape of ". The angle of the blade which consists of said three leaves is formed in the angle divided | segmentally evenly divided into three equal parts.

7 is a perspective view showing two Roots rotors installed in the vacuum pump of the present invention, which is installed to be adjacent to each other in the front and rear casing and the middle casing of the vacuum pump of the present invention, the shaft end of the Roots rotor of one side It is formed to connect the shaft of the drive motor with a coupling.

In the present invention, two Roots rotors are installed inside the front and rear casings and the intermediate casing, and one of the Roots rotors 4 on one side of the Roots rotors is formed longer to couple with the driving motor shaft 2. It is connected to the ring 3 (the root end of the Roots rotor right shaft shown in the front of FIG. 7 is the portion connected to the drive motor shaft).

"형의 3엽 날개로 이루어지고 구동모터 축과 연결되는 임펠러에서 부터 후면의 임펠러로 갈 수로 점차 더 크게 두께가 형성된다.The impeller formed in the shaft of the Roots rotor a plurality of "

From the impeller, which consists of a three-lobed wing and connected to the drive motor shaft, the thickness is gradually increased from the impeller to the rear impeller.

  The thickness of the impeller is based on the impeller located on the side of the driving motor, the thickness of the second impeller is 0.3 times larger than the thickness of the first impeller, the third impeller is 0.3 times larger than the thickness of the second impeller is formed in a multi-step manner The impeller is formed larger in size 0.3 times sequentially from one side to the other side. When the impeller thickness described in the present invention is 0.3 times larger, the impeller thickness at one side is 1, and the next impeller at the rear is formed by 0.3 times larger and the next is based on the impeller 0.3 times larger. It is formed in a way that is 0.3 times larger than that.

The plurality of impellers 5 formed in the roots rotor 4 are formed to have a larger thickness from one side to the other side, so that the impeller thickness of the air inflow side is larger and the impeller of the air discharge side is gradually smaller in thickness. It is formed so as to compress the air flowing into the first air inlet 14, and the air passed to the impeller of the next compartment is smaller in volume by compression, so that the smaller the volume of the compressed air to correspond to the smaller the thickness of the impeller sequentially To further improve the compression of the air to provide a high efficiency vacuum pump.

Fig. 8 is a perspective view of the rear casing in which the Roots rotor shaft end of the present invention is located, which is coupled to the rear side of the intermediate casing 12, and two through holes are formed to penetrate the two Roots rotor shafts.

Fig. 9A is a perspective view showing a bearing housing installed at the Roots rotor shaft end of the present invention, and Fig. 9B is a sectional view showing a front rear bearing housing installed at the Roots rotor shaft end of the present invention. (17) It is coupled to the inside to secure both ends of the shaft to the bearing 10 so that the Roots rotor (4) can be rotated smoothly.

10A and 10B are a perspective view and a cross-sectional view showing a vacuum pump rear oil pan plate of the present invention. The rear oil plate (9b) is passed through the shaft end in the center portion and is installed on one side of the timing gear 18 to lubricate by spraying the built-in oil. The rear oil pan plate 9b is formed with a plurality of cutouts on the rim of the outer circumferential surface thereof, and then the cutouts are folded to one side to form wings 9 '. Wings 9 ′ formed on the outer circumferential surface of the rear oil pan plate are rotated and lubricated by sprinkling oil in the lower portion of the rear cover 17 toward the timing gear 18 and the bearing 10.

11A and 11B are a perspective view and a cross-sectional view of the vacuum pump front oil pan plate of the present invention, wherein the front oil pan plate 9a is installed on the shaft in the front cover and is bent to one side of the outer circumferential surface while rotating. ) To lubricate the lubricant to the bearing 10 and the shaft (6). The function of the front oil pan plate has the same function as the rear oil pan plate described with reference to FIGS. 10A and 10B.

In the vacuum pump of the present invention, the coupling portion of the front casing and the middle casing, the rear casing and the middle casing, which are coupled to both sides of the middle casing, is kept airtight so that oil is not leaked.

12A and 12B are a perspective view and a cross-sectional view showing a vacuum pump rear cover cover of the present invention, wherein a timing gear, a bearing housing, and a rear oil pan plate are located therein, and if the oil is built in the inner lower portion, the coupling part may not leak. Tightly coupled. .

Figure 13 is a perspective view showing a coupling casing connecting the front casing and the drive motor of the present invention, one side is connected to the drive motor (1) and the other side is connected to one side of the front cover (8) drive motor shaft (2) And the coupling (3) connecting the shaft (6).

Fig. 14 is a perspective view of the front casing in which the Roots rotor shaft end of the present invention is located, and a through hole is formed to pass one shaft on one surface thereof.

The front cover is installed between the coupling casing and the front casing, and the bearing and bearing housing in which the shaft is coupled are located inside, and the front oil pan plate is located at one inner side thereof.

15A and 15B are a perspective view and a cross-sectional view of a timing gear installed at the rear shaft end for rotating two Roots rotors of the present invention, and are installed at both shaft ends of the rear of the Roots rotor shaft connected to the drive gear.

The timing gears are installed to be engaged with both ends of the rear end of the shaft, and when the Roots rotor shaft of one side and the Roots rotor of the side connected with the driving motor shaft rotate, the timing gear connected to the rear end of the shaft rotates to rotate the interlocked timing gears so that the two roots rotors rotate. Simultaneously rotates and compresses air to discharge and acts as a vacuum pump.

A stable vacuum can be obtained only by maintaining an interval between the impeller of the Roots rotor used in the vacuum pump of the present invention and the casing at an appropriate value. Impellers assembled on the shaft connected to the drive motor and impellers mounted on the shaft, which are driven shafts, should not touch each other even when they are rotated in opposite directions by the timing gear, and the distance between the intermediate casing and the impeller is about 0.15 ~ 0.20mm. It is desirable to maintain.

Therefore, in order to increase the life of the vacuum pump and to reduce the noise and thermal expansion generated while the impeller is flowing at a high speed by the air flowing between the intermediate casing or the corresponding impeller, the parts are made of materials with low heat deformation, wear resistance and corrosion resistance. Should be processed. In addition, the front and rear casing and the middle casing portion must be all made of the same material to reduce the deformation caused by heat to increase the pump efficiency and reduce the leakage.

In addition, the impeller and shaft constituting the two Roots rotors are components for rotating the impeller by receiving rotation from the drive motor and require strength, abrasion resistance, heat resistance, and corrosion resistance, and operate to rotate the shaft of the drive shaft. If this is not correct, the space forming the vacuum between each casing and the impeller will be deformed and it will be difficult to obtain a constant vacuum, so it must be operated correctly. In addition, there is a large difference in noise generation and vibration depending on the machining accuracy and the squareness of the shaft which is the driving shaft during operation. Therefore, when machining the shaft, it is not processed separately from the impeller, and most machining does not move from side to side inside the shaft. It is preferable to produce after casting.

In addition, the intermediate casing of the present invention (MIDDLE CASING) should be kept as small as possible the gap between the intermediate casing and the impeller in the vacuum pump, the material of the intermediate casing, like the impeller is selected to have strength, wear resistance, heat resistance. When processing this, it is desirable to keep the gap between 0.1 and 0.5 mm because the gap between the impeller and the intermediate casing affects the degree of vacuum.

Timing gear of the present invention is the most important component in reducing the noise of the vacuum pump, the timing gear is important for concentricity point and dimensional control in order to reduce the noise and the gear should be heat treated wear resistance tooth surface roughness management.

The material of the front and rear casings of the vacuum pump of the present invention selects the same material as the intermediate casing, and has a structure in which a bearing housing and a timing gear, a supporting bearing and a sealing seal are installed so that the driving timing gear and the driven timing gear are engaged. In addition to allowing rotation, it also functions as an oil tank for storing oil to lubricate gears and support bearings.

The rear end bearing housing of the present invention selects the same material as the intermediate casing, and is directly subjected to the high heat generated during the compression of air, so that the thermal expansion is low and sufficient strength must be maintained for the bearing support load. In addition, since the center distance between the drive shafter and the driven shafter operated inside the intermediate casing is determined, the machining of the bearing mounting part must be precisely processed, so that additional thermal deformation due to vibration and contact between the impeller and the intermediate casing is prevented. Does not occur.

In the vacuum pump of the present invention, the front cover material is selected from the same material as the middle casing and, like the rear end bearing housing, receives the air compression heat from the impeller operated inside the middle casing, so that the inlet port for introducing air from the outside is located at the bottom. A monitoring window (not shown) for lubricating oil level is installed on the upper right side of the shaft.

As a result of comparing the performance of the vacuum pump of the present invention configured as described above and the vacuum pump of the other company's products, the results shown in Table 1 below were obtained.

As can be seen from Table 1, the vacuum pump of the present invention has superior performance compared to domestic products of other companies in terms of degree of vacuum, power, gear precision, soy, use, etc. in the same model, and it can be seen that the performance of Japanese products does not fall at all. As can be seen, the present invention has the advantage of replacing the imports by achieving localization of the vacuum pump with high quality.

1: drive motor 2: drive motor shaft
3: Coupling 4: Roots rotor
5: impeller 6: shaft
7: Coupling Casing 8: Front Cover
9a: Front Oil Pan Flat 9b: Rear Oil Pan Flat
9 ': wing 10: bearing
11a: front bearing housing 11b: rear bearing housing
12: middle casing 13: bulkhead
13 ': Europe 14: Suction port
15: outlet 16a: front casing
16b: rear casing 17: rear cover
18: Timing Gear

Claims (5)

Two Roots rotors 4 formed of a plurality of impellers so as to receive power from the driving motor 1 and compress air;
Timing gears 18 respectively provided on the roots rotor end shafts 6 so as to cooperate with rotation of the two roots rotors 4;
An intermediate casing (12) in which a plurality of roots (4) having a plurality of impellers (5) formed at a predetermined interval and a plurality of partitions (13) having flow path holes (13 ') are installed;
A front casing (16a) coupled to the front side of the middle casing and installed to allow two root rotor side shafts to pass therethrough;
A front cover (8) coupled to one side of the front casing and coupled to a front bearing housing (11a) installed inside the shaft end;
Coupling casing coupled to the front cover one side and the drive motor flange to protrude toward one side of the front cover to protect the outer surface connected by the drive motor shaft (2) and the coupling (3) and to secure the drive motor ( 7);
A rear casing (16b) coupled to the rear surface of the middle case and coupled to allow two shafts to pass therethrough;
A rear cover (17) coupled to one side of the rear casing and coupled to the rear bearing housing (11b) and the timing gear (18) coupled to two shaft (6) ends therein;
Vacuum pump characterized in that the configuration of the vacuum pump 20 comprising a front oil pan plate (9a) installed on the shaft (6) in the front cover and a rear fan plate (9b) installed on one side of the timing gear (18) . The method of claim 1,
The two Roots rotors (4) installed in the intermediate casing is a vacuum pump, characterized in that sequentially formed in the order of the size of 0.3 times larger in the order of the impeller (5) on the other side impeller (5). The method of claim 1,
The partition wall installed inside the intermediate casing is a vacuum pump, characterized in that formed between the impeller of the two Roots rotor is formed a plurality of passage holes through which compressed air passes on both sides of the upper end adjacent to the inner wall of the intermediate casing. The method of claim 1,
The impellers of the two Roots rotors are formed on the shaft 6, a plurality of impellers, each impeller (5) is characterized in that the three-blade blades. The method of claim 1,
The intermediate casing has a suction hole 14 formed in the upper end of the casing located on the wide side of the impeller 5 of the Roots rotor 4, and the discharge hole 15 has an intermediate casing of the narrow side of the other impeller 5. Vacuum pump, characterized in that formed in the lower portion.

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