KR101180082B1 - An Actuator with the Polygon Needle Bearing Guide - Google Patents

Abstract

According to the present invention, a finite or infinite stroke needle bearing retainer, which is designed to hold the needle bearing in the axial direction and maintain a constant distance, smoothly rolls the needle bearing, is assembled between the inside of the polygonal outer sleeve and the guide post. Configure an actuator equipped with a fixed finite or infinite stroke polygon needle bearing guide, and rotate the ball screw mounted in the center of the guide post with a power source consisting of a servo motor, etc. The present invention relates to an actuator configured to move forward and backward, to prevent rotation of a moving shaft, and to have a finite or infinite stroke polygon needle bearing guide having high rigidity and durability.

Description

An Actuator with the Polygon Needle Bearing Guide

The present invention provides a finite or infinite stroke needle bearing retainer which is designed to hold a needle or roller bearing (hereinafter referred to as 'needle bearing') in the axial direction and to smoothly roll the needle bearing while maintaining a constant distance. An actuator is constructed by mounting a polygon needle bearing guide for finite or infinite stroke assembled between the inside of the polygon out sleeve and the guide post, and the work table is moved forward and backward by using the ball screw as a power source to prevent rotation of the moving shaft. The present invention relates to an actuator using a finite or infinite stroke polygon needle bearing guide having high rigidity and durability.

Looking at the prior art related to the present invention, the present invention discloses a needle bearing retainer for a polygonal finite stroke is disclosed in the Patent Publication No. 10-0872499, the applicant of the patent application is registered, the guide post (guide) It is necessary to fasten the rotary shaft as a power source by fastening it with one side of the post) and to make the worktable linearly reciprocate to prevent rotation of the movable shaft, and to design and manufacture an actuator with high rigidity and durability. There was a problem that can not be easily applied to the process.

In addition, in the prior art, there is no polygon needle bearing guide shape for infinite stroke, and an actuator with high accuracy, which is engaged with an outer sleeve having a needle bearing guide for infinite stroke with a retainer, also does not exist. The long distance reciprocating linear movement, endures high loads, there is a problem that the manufacturing cost is required to be solved by the conventional technology in response to the demand for high accuracy.

The problem to be solved by the present invention is to solve the problems of the prior art is a polygonal finite or infinite stroke guide to prevent the rotation of the moving axis during movement and to withstand high loads for use in semiconductor manufacturing apparatus, etc. requiring precision processing The needle bearing is coupled to the guide post so that the needle bearing can be rolled smoothly, thereby providing durability, and smoothly performing a linear reciprocating motion while maintaining low noise, high accuracy, and high rigidity.

Another problem to be solved by the present invention is to install an outer sleeve employing an infinite stroke polygon guide designed to make a linear reciprocating motion by the needle bearing to maintain a long stroke of the actuator, high load load Excellent durability and achieve high accuracy.

Another problem to be solved by the present invention is to provide a high-precision actuator using a finite or infinite stroke-type polygon guide, ball screw and power source with a needle bearing inserted, so as to purchase the individual parts to assemble and use the actuator In contrast, the cost of production is greatly reduced.

Another problem to be solved by the present invention is to increase the uniformity of the actuator, and to increase the durability and reliability by integrally manufacturing and tightening the endless stroke retainer holding the needle bearing integrally made of a flexible and durable synthetic resin material.

The problem solving means according to the present invention is a finite or infinite stroke type needle bearing retainer which is designed to hold the needle bearing in the axial direction and smoothly roll the needle bearing at regular intervals. Configure an actuator equipped with a polygon needle bearing guide for finite or infinite strokes between the posts, but rotate the ball screw with a power source consisting of a servo motor, etc., so that the finite or infinite stroke polygon needle bearing guide posts move forward and backward. To prevent the rotation of the moving shaft, and to provide an actuator using a finite or infinite stroke polygon needle bearing guide with high rigidity and durability.

Another problem solving means according to the present invention is an infinite stroke polygon needle bearing guide in which the guide rail and the retainer holding the needle bearing are installed to the inside of the outsleeve in order to make the actuator work table reciprocating linearly. In the case of mounting the actuator, the stroke of the actuator is increased, and the actuator using the infinite stroke polygon needle bearing guide capable of withstanding high load load is provided.

Another problem solving means according to the present invention is to adopt a circular needle bearing retainer in the infinite stroke polygon needle bearing guide, the retainer holding the needle bearing is integrally made of a flexible, durable synthetic resin material It is to provide an actuator using endless stroke polygon needle bearing guide which is designed and adopted to improve durability and reliability.

Another problem solving means according to the present invention is to produce and provide a high-precision actuator by using a polygonal finite or infinite stroke needle bearing guide, a ball screw and a power source with a needle bearing, so as to purchase the respective parts to assemble the actuator In order to significantly reduce the production cost in comparison with the case of using, and to provide an actuator with durability and reliability.

The present invention is configured to allow the needle bearing inserted in a finite or infinite guide assembled in a polygonal structure to prevent rotation during movement and to withstand high loads for use in a semiconductor manufacturing apparatus that requires precision processing, so that it can be rolled smoothly. The high, low noise, high accuracy and high rigidity while maintaining a linear reciprocating movement smoothly has an effect.

Another effect of the present invention is to employ an endless circular needle bearing guide in an out sleeve designed to perform infinite linear reciprocating motions, thus increasing the stroke of the actuator, withstanding high load loads, and achieving high accuracy. .

Another effect of the present invention is to provide a high-precision actuator using a finite or infinite stroke polygon guide, a ball screw and a power source in which needle bearings are inserted, so as to purchase and purchase the respective parts to assemble and use the actuator. This is to significantly reduce the production cost.

Another effect of the present invention is to manufacture the endless stroke retainer holding needle bearings integrally with a flexible and durable synthetic resin material to increase the uniformity and reliability of the retainer, thereby increasing the uniformity of the actuator and improving durability and reliability. It is to raise.

1 is a perspective view of an actuator using a finite stroke polygon needle bearing guide according to the present invention
Figure 2 is an actuator side cross-sectional view using the infinite stroke polygon needle bearing guide according to the present invention
3 is a finite stroke polygon needle bearing guide mounted on an actuator according to the present invention.
4 is a shape of the endless stroke needle bearing retainer to be mounted to the actuator according to the present invention;
Figure 5 is an unfolded shape of the infinite stroke polygon needle bearing retainer mounted on the actuator according to the present invention
Figure 6 is a yellow cross section of the polygon needle guide for infinite stroke employed in the present invention
Figure 7 is the shape of both ends of the polygon needle guide for infinite stroke employed in the present invention
Description of the Related Art [0002]
11: power source 12; Coupling
13; Ball screw support 14; Ball screw
15; Work table 16; Retainer (for finite stroke)
17; Needle bearing 18; Needle bearing guide
19; Needle bearing guide post 20; Guide master housing
21; Stopper
31: power source 32; Coupling
33; Ball screw support 34; Ball screw
35; Work table 36; Retainer (For Infinite Stroke)
37; Needle bearing 38; Needle bearing guide
39; Needle bearing guide post 40; Guide master housing
41; Stopper
51; Circulating grooves 52, 53; Guide rail wing
54; Needle bearings 55, 56; Link
57; Lip 58; Guide rail
61, 62; Al Peace 63, 64; End cap

Hereinafter, the present invention will be described in detail. Actuator according to the present invention is designed and manufactured to perform a linear reciprocating motion by moving the ball screw to a power source consisting of a sub-motor to advance or reverse the guide post fastened to the polygon needle bearing guide for infinite strokes It is prevented and has high rigidity and durability.

Among the finite or infinite stroke polygon needle bearing guides mounted in the present invention, the infinite stroke polygon needle bearing guide fastens the stroke of the actuator by fastening the retainer holding the needle rail and the guide rail installed inside the outer sleeve. Compared with the stroke type, it can be configured long and can withstand higher load loads.

The infinitely cyclic needle bearing retainer mounted on the infinite stroke polygon needle bearing guide is designed, fabricated, assembled and manufactured with a flexible and durable synthetic resin material that retains the needle bearing and circulates indefinitely. It is configured for easy maintenance. Look at a more specific embodiment according to the present invention.

<Examples>

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will now be described with reference to the drawings. 1 and 2 are perspective and side cross-sectional views of an actuator using a finite or infinite stroke polygon needle bearing guide according to the present invention. Figure 3 illustrates a finite stroke polygon needle bearing guide mounted to an actuator according to the present invention.

In the present invention, a finite or infinite stroke polygon needle bearing out sleeve and a polygon needle bearing guide post engaged therewith are collectively referred to as a 'guide master', and the housing surrounding the housing is referred to as a 'guide master housing'. '

The finite or infinite stroke polygon needle bearing guides shown in FIGS. 1 and 2 are finite or infinite stroke polygon needle bearing guides mounted in the guide master housings of FIGS. 1 and 2. Without separating each other, finite and infinite are expressed in the same terms.

&Lt; Example 1 >

Example 1 shows an actuator equipped with a finite stroke polygon needle bearing guide. 1 shows a cross-sectional side view of an actuator equipped with a finite stroke polygon needle bearing guide according to the present invention.

In Fig. 1, a polygonal needle bearing guide with a finite stroke is connected via a ball screw 14 via a ball screw support 13 and a coupling 12 with a power source 11 providing a servomotor or rotational force. It is configured to be transmitted to the work table 15 which is engaged with the post 19.

The work table 15 is fastened and fixed to the finite stroke polygon needle bearing guide post 19, and the polygon needle bearing retainer 16 holding the finite stroke polygon needle bearing has a guide master housing (Fig. 1). 20) is mounted inside the polygon needle bearing guide post 19 is configured to allow a smooth reciprocating movement without rotation. Figure 3 illustrates one embodiment of a polygonal finite needle bearing retainer 16 mounted in the present invention.

The needle bearing guide out sleeve is mounted to the guide master housing 20.

The polygon needle bearing guide post 19 to which the work table 15 is fixed is configured to perform a linear reciprocating motion by moving forward or backward by a rotational direction (clockwise or counterclockwise) of the ball screw 14. have.

The polygonal needle bearing guide post 19 and the ball screw 14 have a fastening structure in which a screw thread (male thread) is formed on a rotation shaft of the ball screw 14 which is rotated by the power source 11, and the male screw is fastened with the male screw. In accordance with the rotation direction, the polygon needle bearing guide post 19 is provided with a fastening groove in which a female thread is formed in consideration of the diameter of the male screw on one side of the polygon needle bearing guide post 19.

The length of the fastening groove is longer than the straight reciprocating distance in consideration of the straight reciprocating distance of the work table 15.

The power source 11 may be configured by selecting one of a servo motor, a stepping motor or various kinds of cylinders, but it is sufficient if the work table 15 can perform a linear reciprocating motion.

In the present invention, since the actuator is manufactured using a finite stroke-type polygon needle bearing guide 18 and a polygon needle bearing guide post 19 engaged therewith, which have high precision and high rigidity and can move smoothly, high accuracy can be achieved. have.

When the polygon needle bearing guide post 19 moves forward or backward by the rotation of the power source to make a linear reciprocating motion, the worktable 15 of the actuator does not escape from the ball screw 14 beyond the range of the linear reciprocating motion. A stopper 21 and / or a limit switch can be installed to prevent the contact.

The ball screw support 13 is installed on one side of the ball screw in a position adjacent to the servo motor which is the power source 11 to support the ball screw 14 while the rotating shaft of the ball screw 14 is engaged with the rotation axis of the servo motor to rotate It does not shake up, down, left, and right, and plays a role of enabling the reciprocating movement more accurately.

In Embodiment 1, a finite stroke-type polygon needle bearing guide 18 can be used to prevent the moving shaft from rotating during reciprocating motion, and the needle bearing 17 is used to provide high rigidity and durability. It is comprised so that the high precision with a deviation of 1 micrometer or less at the time of linear movement of 20 mm is maintained.

&Lt; Example 2 >

Embodiment 2 shows an actuator equipped with an endless stroke polygon needle bearing guide 38.

The difference between the second embodiment and the first embodiment is that in the first embodiment, the polygon needle bearing guide 18 mounted in the guide master housing 40 of FIG. 1 is mounted in a finite stroke type, and in the second embodiment, the stroke is infinite. This is a difference between the technical configuration in which the polygon needle bearing guide 38 is mounted in the shape, and the remaining technical configuration is substantially the same as the first and second embodiments.

In the case of the finite stroke of the first embodiment, in order to lengthen the stroke, the needle bearing retainer for finite stroke fastened to the post should be made short or the out sleeve should be made long, resulting in problems of low strength or material cost. There is an increasing problem, but in the case of the infinite stroke of Embodiment 2, such a problem can be improved a lot.

Next, the technical configuration of the actuator equipped with the infinite stroke polygon needle bearing guide 38 of the second embodiment will be described.

In Fig. 2, a polygonal needle bearing guide with infinite stroke is connected via a ball screw 34 via a ball screw support 33 via a ball screw support 33 and a coupling 32 with a power source 31 providing a servomotor or rotational force. It is configured to be delivered to the work plate 35 fastened to the post (39).

The work plate is fastened and fixed to the infinite stroke polygon needle bearing guide post 39, and the polygon needle bearing retainer 36 holding the infinite stroke polygon needle bearing is inside the guide master housing 40 of FIG. Is mounted on the polygon needle bearing guide post 39 is configured to enable a smooth reciprocating motion without rotation.

Figure 5 shows one embodiment of the infinite stroke polygon needle bearing retainer designed and manufactured in accordance with the present invention, Figure 4 is to adopt a polygon needle bearing guide for infinite stroke designed and manufactured according to the present invention The structure of the infinite stroke polygon needle bearing retainer is shown. In the second embodiment, all technical configurations except for the infinite stroke polygon needle bearing retainer 36 and the infinite stroke polygon needle bearing guide 38 are substantially the same as the first embodiment, and therefore, the second embodiment will not describe the specific description thereof. Omit.

When the endless stroke polygon needle bearing guide post 19 moves forward or backward by a power source to make a linear reciprocating motion, the worktable 35 of the actuator is out of the range of the linear reciprocating motion and is separated from the ball screw 34. The stopper 41 and / or the limit switch can be installed so as not to.

In the present invention, the infinite stroke-type polygon needle bearing guide 38 can be used to prevent rotation of the moving axis during the reciprocating motion, and the needle bearing 37 is used to provide high rigidity and durability, and 20 mm It is configured to maintain a high accuracy in which the straightness during the linear motion of the deviation is less than 1㎛.

The polygonal needle bearing guide 38 for infinite stroke mounted in the present invention fastens the guide rail and the retainer 36 holding the needle bearing installed in the inner side of the outer sleeve to each other in comparison with the finite stroke type of the first embodiment. It is designed to withstand high loads while increasing the stroke of the actuator.

In order to achieve the infinite stroke polygon needle bearing guide 38 according to the present invention, the needle bearing retainer 36 mounted on the infinite stroke polygon needle bearing guide 38 is provided between the inner surface of the outer sleeve and the guide post. The circulation groove (51 in Fig. 6) is formed long to penetrate in the axial direction on the out sleeve in order to allow infinite circulation through the passage.

6 is a cross-sectional view of the polygon needle guide for infinite stroke employed in the present invention. Figure 7 shows the shape of both ends of the polygon needle guide for infinite stroke employed in the present invention.

Between the inner side of the out sleeve and the circulation groove (51 in Fig. 6), the circular needle bearing retainer holding the needle bearing (54 in Fig. 6) has a semicircular shape so that it can be smoothly infinitely circulated at both ends of the out sleeve. The inner part of the semicircle is formed of a circular groove guide (61, 62; R-Piece of Fig. 7) is fixed by the bolt, the outer end cap (63, 64; End Cap) is mounted and circulated Type needle bearing retainers are configured to ensure a smooth circulation.

The endless circular needle bearing retainer employed in the polygon needle bearing guide holds the needle bearing (54 in FIG. 6) in the axial direction and maintains a constant distance during the retainer circulation so that the needle bearing can have a smooth rolling. A lip (57 in Fig. 6) is formed to face each other at a constant angle (<>) so that the needle bearing can be gripped at the minimum curvature.

On the left and right sides of the lip (57 in Fig. 6) formed to face each other, the connecting ring (55, 56 in Fig. 6) for holding the lip (57 in Fig. 6) holding the needle bearing (54 in Fig. 6) at a predetermined interval ) Is formed, it is preferable that the connecting ring (55, 56 of Figure 6) is protruded in a constant width direction to form a molded integrally long.

The needle bearing retainer can be configured to hold the needle bearing 37 and be inserted and fastened to the inside of the outsleeve without endless circulation, even if the needle bearing retainer is not manufactured integrally.

As described above, the polygon guide circular needle bearing retainer according to the present invention is adopted in the infinite stroke polygon needle bearing guide and is flexible to rotate smoothly by forming a semicircle at both ends in the axial direction of the outsleeve when circulating. It is preferable to carry out molding by using a synthetic resin material having high durability.

The position of the connecting ring (55, 56 in Figure 6) can be located in the center of the left and right sides of the lip (57 in Figure 6), in consideration of the bearing capacity and durability of the lip holding the needle bearing (Fig. 7) 61, 62 of the R-Piece) may be formed by moving slightly to the end cap (63, 64; End Cap) of Figure 7 may be formed by moving slightly.

The lip holding the needle bearing (54 in FIG. 6) is 45 ° relative to the center of the needle bearing 54 while the needle bearing 54 is not detached to the outside by an opposite lip (<>). Is formed between the range of 60 ° to minimize the frictional force and is configured to facilitate the straight reciprocating movement of the outsleeve smooth roll.

In order to connect the lip (57 of FIG. 6) formed to hold the needle bearing 54 to each other, a long connecting ring (55, 56 of FIG. 6) is formed to protrude to the left and right sides of the endless circular needle bearing retainer. It is.

The length of the connecting ring (55, 56 of Figure 6) protruding from the lip (57 of Figure 6) is preferably between 0.5mm to 1.5mm, depending on the size of the needle bearing 54 may be out of this range. .

The shape of the lip holding the needle bearing 54 is one wide in the width direction at a predetermined angle or two or more at regular intervals in the width direction as shown in FIG. 6 so that the needle bearing 54 can be held. Can be configured.

Connecting needles (55, 56 of Figure 6) of the needle bearing retainer is configured to be located on the upper surface of the wings (52, 53 of Figure 6) formed on both sides of the guide rail located in the angular portion of the inner sleeve formed in the polygon have.

In the specification of the present invention, different numbers are assigned to the same elements in the drawings to make the specification easier to understand.

In Fig. 6, the guide rail (58 in Fig. 6) is positioned at the angled portion of the polygon, and the linkage of the circular needle bearing retainer holding the needle bearing 54 is formed at the portion in which the polygonal surface is formed (55 in Fig. 6). , 56 is configured to be located on the upper surface of the blade 52 (53, 53) of the guide rail.

The worktable reciprocating with high accuracy is bolted and fixed to the out sleeve to which the infinite stroke type polygon needle bearing guide is equipped with a needle bearing retainer which circulates infinitely so as to reciprocate by a ball screw. have. The shape and size of the worktable can be variously modified according to the application.

The actuator using the infinite stroke polygon needle bearing guide designed according to the present invention is designed and manufactured to maintain a high accuracy with an error range of 1 μm or less when the linear movement of 20 mm is performed.

The life of the needle bearing used in the present invention is

Lt;

In contrast, the life of the ball bearing

to be.

Here, the unit of L is km, P is external force (external load), C means dynamic load rating. That is, as can be seen from the above equation, the life of the needle bearing is much longer than the life of the ball bearing.

3 shows a finite stroke polygon needle bearing guide mounted on an actuator according to the invention, and FIG. 5 shows an enlarged view of the infinite stroke polygon needle bearing retainer mounted on an actuator according to the invention.

The present invention constitutes an actuator equipped with a polygon needle bearing guide for finite or infinite stroke, and rotates the ball screw with a power source consisting of a servo motor, etc. so that the polygon needle bearing guide post for finite or infinite stroke is forward and backward. It is possible to provide a actuator using a finite or infinitely stroked polygon needle bearing guide with high rigidity and durability to prevent rotation of the moving shaft, and thus has high industrial applicability.

Claims (12)

In the actuator for linear reciprocating motion,
A needle bearing guide post having a male screw formed on the ball screw connected to the power source and coupled to the coupling, and having a fastening groove formed with a female thread to be engaged with the male screw formed on the ball screw;
A ball screw which is coupled to each other by a female screw formed in the needle bearing guide post and a male screw formed in the ball screw to rotate by rotation of a power source;
The worktable is configured to linearly reciprocate by fastening with the ball screw and polygon needle bearing guide post, and the needle bearing guide out sleeve is inserted and fastened to the outside of the needle bearing guide post to guide the needle bearing guide post. Needle bearing guide A stroke-type polygon needle bearing guide equipped with a needle bearing retainer in which a needle bearing is inserted and fastened inside the needle sleeve; And
And said stroke type polygon needle bearing guide out sleeve is mounted on a guide master housing. delete The method according to claim 1,
The stroke polygon needle bearing guide actuator using a polygon needle bearing guide, characterized in that for mounting a finite or infinite stroke needle bearing retainer. The method according to claim 1,
Actuator using a polygon needle bearing guide further provided with a ball screw support on one side of the ball screw so that the ball screw rotation shaft, which is rotated by rotating with the rotation axis of the power source while supporting the ball screw, does not move up, down, left, and right, and is accurately reciprocated. . The method according to claim 3,
The endless stroke polygon needle bearing guide is installed inside the needle bearing guide out sleeve and engaged with the endless needle bearing retainer, and a guide rail for circulating the endless needle bearing retainer for infinite circulation;
A circular needle bearing retainer positioned above the guide rail to hold the needle bearing and to circulate indefinitely; And
An actuator using a polygon needle bearing guide, characterized in that it has a circulation groove formed to penetrate in the axial direction of the out sleeve so that the circulation needle bearing retainer passed through the inner surface of the out sleeve can be infinitely circulated. The method according to claim 5,
Both ends of the outer sleeve where the circular needle bearing retainer holding the needle bearing are mounted are composed of semicircles for infinite circulation, and are located inside the semicircles to guide the circular needle bearing retainers to the circulation grooves. Alpis for; And
An actuator using a polygon needle bearing guide with an end cap positioned outside the semicircle to guide the circulating needle bearing retainer into the circulation groove. The method according to claim 1,
The circular needle bearing retainer may include: a lip formed to face each other at a predetermined angle to hold the needle bearing at a minimum curvature during circulation to hold the needle bearing;
Connection rings installed at left and right sides of a needle bearing retainer for connecting the ribs formed to face each other with a predetermined interval and connecting the ribs formed to face each other to hold the needle bearings; And
At both ends of the retainer in the axial direction, the ribs facing each other are formed to have a cut surface.
Actuator using a polygon needle bearing guide, characterized in that formed in a straight shape with a predetermined width. The method of claim 7,
The connecting ring is formed by protruding in the width direction on the left and right sides of the circular needle bearing retainer so as not to be separated from the needle rail guide when it is engaged with the needle bearing guide. Actuator. The method according to claim 8,
The circular needle bearing retainer is an actuator using a polygon needle bearing guide, characterized in that the connecting ring used when engaging with the guide rail while connecting between the lip and the lip for holding the needle bearing in one piece. The method according to claim 9,
The circular needle bearing retainer is an actuator using a polygon needle bearing guide, characterized in that made of a synthetic resin material having flexibility and durability to be circulated in a semicircle at both ends of the outsleeve for infinite circulation. The method of claim 10,
The lip holding the needle bearing is formed in one wide or at a predetermined interval in the width direction in consideration of the support force, friction force and the material required to form the lip supporting the needle bearing, characterized in that formed at least two regular intervals Actuator using polygon needle bearing guide. The method according to claim 7 or 8,
The connecting ring of the circular needle bearing retainer may be formed by being positioned at the center of the left and right sides of the lip, and moved to the alpis side or the end cap side in consideration of the support force and durability of the lip holding the needle bearing. An actuator using a polygon needle bearing guide.

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