KR101180067B1 - X-ray In-line Grating Interferometer - Google Patents

X-ray In-line Grating Interferometer Download PDF

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KR101180067B1
KR101180067B1 KR1020100048865A KR20100048865A KR101180067B1 KR 101180067 B1 KR101180067 B1 KR 101180067B1 KR 1020100048865 A KR1020100048865 A KR 1020100048865A KR 20100048865 A KR20100048865 A KR 20100048865A KR 101180067 B1 KR101180067 B1 KR 101180067B1
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최재호
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단국대학교 산학협력단
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Abstract

본 발명은 엑스선 위상 영상을 획득하기 위한 엑스선 간섭계에 관한 것으로 2차원 엑스선 광원 격자를 이용한 엑스선 직렬격자 간섭계에 관한 것이다.The present invention relates to an X-ray interferometer for acquiring an X-ray phase image and to an X-ray series lattice interferometer using a two-dimensional X-ray light source grating.

Figure 112010033516328-pat00017
Figure 112010033516328-pat00017

Description

엑스선 직렬 격자 간섭계 {X-ray In-line Grating Interferometer}X-ray In-line Grating Interferometer

본 발명은 엑스선 간섭계에 관한 것으로, 특히 엑스선 위상 영상을 획득하기 위한 엑스선 직렬 격자 간섭계에 관한 것이다. 본 발명은 종래의 엑스선 튜브 광원의 간섭계에서 엑스선 광원과 빔분할 격자 간의 기존 거리를 1/10~1/5 정도로 단축 시킨 거리에서 간섭영상 획득이 가능한 엑스선 격자 간섭계에 관한 것이다.The present invention relates to an X-ray interferometer, and more particularly, to an X-ray serial grating interferometer for obtaining an X-ray phase image. The present invention relates to an X-ray grating interferometer capable of acquiring an interference image at a distance of reducing the existing distance between the X-ray light source and the beam splitting grating by about 1/10 to 1/5 in a conventional interferometer of the X-ray tube light source.

기존의 엑스선 격자 간섭계는 주기적 구조를 갖는 격자의 자체영상을 응용하고 있다. 즉 자체 영상이 형성되는 위치에 해석격자를 설치하고 이 해석격자에 의해 형성되는 Moire 회절 영상을 영상화하여 엑스선 위상 영상을 획득하고 있다.
이러한 엑스선 간섭계의 광원은 결맞음성이 좋은 엑스선 광원이 요구되어 초기 엑스선 격자 간섭계의 광원으로는 전자빔 가속기에 의한 방사광 엑스선을 활용하였다.
일반적인 엑스선 튜브 광원의 경우, 엑스선 광원 격자를 설치하여 엑스선 광원의 결맞음성을 증가시켜 엑스선 광원으로 사용되고 있다. 이러한 저휘도 엑스선 튜브를 이용한 엑스선 광원은 광원과 빔분할 격자 간의 거리가 길게 되어 엑스선의 광자 손실이 크다.
기존의 엑스선 격자 간섭계에서는 광원의 결맞음성을 향상하기 위하여 엑스선 광원과 빔분할 격자 간 거리를 약 1m 거리를 두고 두 격자를 설치하여 사용하고 있다. 이 경우 광원이 가속기 방사광 엑스선 인 경우 엑스선 광자수가 충분히 많아 공기 중 1m 이상의 거리를 투과하면서 공기에 의한 산란으로 휘도가 감소하여도 엑스선의 휘도는 위상영상을 획득할 수 있기에 충분하다. 그러나 광원으로 엑스선 튜브 광원을 사용할 경우 광자수가 충분하지 않아 엑스선 튜브 출력단에 광원 격자를 사용하고 이후 공기 층을 투과하여야 빔분할 격자에 도달하게 되므로 공기 중 산란에 의한 엑스선 휘도의 감소가 위상 영상을 획득하기 충분치 못한 광원이 되는 문제점이 있다.Existing X-ray grating interferometers apply self-images of gratings with periodic structures. That is, an X-ray phase image is obtained by installing an analytical grid at a position where an image of itself is formed and imaging a Moire diffraction image formed by the analytical grid.
As the light source of the X-ray interferometer requires an X-ray light source having good coherence, radiated light X-rays by an electron beam accelerator are used as a light source of the initial X-ray grating interferometer.
In the case of a general X-ray tube light source, an X-ray light source grid is installed to increase the coherence of the X-ray light source and is used as an X-ray light source. An X-ray light source using such a low-brightness X-ray tube has a long distance between the light source and the beam splitting grating, resulting in large photon loss of X-rays.
In the existing X-ray grating interferometer, two gratings are installed at a distance of about 1 m from the X-ray light source and the beam splitting grating to improve coherence of the light source. In this case, when the light source is an accelerator radiation X-ray, the number of X-ray photons is large enough to transmit a distance of 1m or more in the air and the luminance of the X-ray is sufficient to obtain a phase image even when the luminance is reduced by scattering by air. However, when the X-ray tube light source is used as a light source, the number of photons is insufficient, so that a light source grating is used at the output end of the X-ray tube, and afterwards, the beam splitting grating is reached after passing through the air layer. There is a problem of not being sufficient light source.

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본 발명에서 이루고자 하는 기술적 과제는 엑스선 튜브를 사용할 경우 엑스선 광원의 휘도를 유지하기 위해서 광원 격자와 빔분할 격자 간의 길이를 최소화 하면서도 광원의 결맞음성을 향상시킨 엑스선 격자 간섭계를 제공하는 것이다.The technical problem to be achieved in the present invention is to provide an X-ray grating interferometer to improve the coherence of the light source while minimizing the length between the light source grating and the beam splitting grating in order to maintain the brightness of the X-ray light source when using the X-ray tube.

이에 본 발명에서는 격자간 거리를 최소화 할 수 있는 엑스선 격자간섭계를 제안한다. 이 간섭계의 원리는 직렬 간섭계에서와 동일하게 위상 영상 정보 획득 가능한 격자 길이 내에서 격자 및 시료를 위치하고 Talbot 거리에서 위상 정보를 획득하는 구조를 갖는다. 광원의 결맞음성 향상을 위하여 2-차원 구조의 격자를 광원 격자로 사용하였다.Accordingly, the present invention proposes an X-ray lattice interferometer that can minimize the distance between the lattice. The principle of the interferometer has the structure of positioning the grating and the sample within the grating length that can acquire the phase image information and acquiring the phase information at the Talbot distance in the same way as in the serial interferometer. In order to improve coherence of the light source, a two-dimensional grating was used as the light source grating.

본 발명에서 구현하고자 하는 직렬 격자 간섭계는 엑스선 광원으로 엑스선 튜브를 사용하게 되고 간섭계 시스템의 전체 길이가 짧아지게 되어 엑스선 간섭계에 의한 엑스선 위상차 영상 획득이 일반 실험실 내에서도 가능하게 될 것이다. 엑스선 위상차 영상은 생체의 내부 구조를 공기 중에 시료를 장착한 상태로 측정할 수 있어 생명공학 분야의 연구 개발에 중요한 측정 장치가 될 것이다. The serial grating interferometer to be implemented in the present invention uses an X-ray tube as an X-ray light source, and the overall length of the interferometer system is shortened, so that X-ray phase difference image acquisition by the X-ray interferometer will be possible in a general laboratory. X-ray retardation images will be able to measure the internal structure of the living body with a sample in the air, which will be an important measurement device for research and development in the biotechnology field.

10 : 엑스선 광원
20 : 광원 격자
30 : 빔분할 격자
40 : 해석격자
50 : 광변조소자
60 : 시료10: X-ray light source
20: light source grid
30: beam split grating
40: analysis grid
50: optical modulator
60: sample

이하에서, 도 1을 참조하여 본 발명의 구성을 설명하기로 한다. 본 발명에 따른 엑스선 격자 간섭계는 엑스선 광원(10), 광원 격자(20), 시료(60), 빔분할 격자(30), 해석 격자(40), 광변조 소자(50)를 포함한다.
즉, 엑스선 격자 간섭계는 최소한 두 개의 격자 즉 빔분할 격자(30)와 해석격자(흡수 격자)(40)로 구성된다. 시료(60)에서 굴절되는 엑스선의 빔을 빔분할 격자(30)에 의해 분할하고 이를 해석 격자(40)가 분석하는 역할을 한다. 엑스선 빔이 주기적 구조를 갖는 물체에 투과되어 일정한 거리에서 이 구조와 동일한 상을 형성하는데 이를 자체영상(self-image) 또는 Talbot-image 라고 부른다.
주기가 d인 회절격자에 λ의 파장을 갖는 빛이 입사하였을 때, 격자를 통과한 전파 함수는 다음과 같이 표현된다.

Figure 112012016620271-pat00019

여기서 an은 n 번째 조화함수의 진폭이며, 격자의 폭이 w일 때, 푸리에 계수는 다음과 같이 주어진다.
Figure 112012016620271-pat00020
여기서
Figure 112012016620271-pat00021

균일한 진폭을 가진 전기장 E(x,z)가 격자를 통과할 때 그 형태는 다음과 같다
Figure 112012016620271-pat00022
eiΦ(x, y) 물체를 투과한 빛의 위상 정보를 표현할 수 있고, 여기서 Φ(x, y)는 파면의 위상 정보이다. 격자로부터 Talbot 거리에 놓여진 해석 격자(40)에 의한 전자기파의 강도를 표현하면
Figure 112012016620271-pat00023
이고, 여기서
Figure 112012016620271-pat00024
이다.
즉, self-image의 강도분포에는 파면의 위상정보가 포함되어 있다.
Figure 112012016620271-pat00025
격자 간섭계는 self-image가 형성되는 Talbot 거리 지점에 해석 격자(40)를 배치하여 위상정보를 획득하고 이를 영상화하여 위상차 영상을 획득한다.
엑스선 Talbot 간섭계의 격자는 위상 정보가 포함된 파면을 형성하고 이를 측정하기 위해서는 격자 주기와 이에 따른 격자 위치를 결정하여야 한다.
엑스선 간섭계에서 방사광 엑스선을 광원으로 이용한 경우 빔분할 위상 격자와 해석 흡수 격자가 사용되는데 비해, 저휘도 엑스선 튜브 등 결맞음성이 낮은 엑스선 광원을 사용할 경우 광원 격자(20)가 추가되어 사용되고 있다. 이들 격자는 격자 주기 및 격자 간 거리의 상호 관계에 따라 각 격자의 위치가 결정된다.
직렬(In-line) 간섭계는 광원과 시료 사이의 거리에 따라 위상 영상 정보를 포함하는 거리가 존재한다는 원리를 이용하여 물체를 광축 방향으로 이동하며 영상 정보를 획득하는 위상정보 장치로 알려져 있으나 실용화되지 못하고 있었으나, 본 발명에 의하면, 직렬 격자 간섭계의 격자 주기 및 격자 간 거리는 다음과 같은 관계에 의하여 광원 격자와 빔분할 격자 간 거리가 주어진다.
Figure 112012016620271-pat00026
여기서, l은 광원 격자(20)와 빔분할 격자(30) 사이의 거리, P0는 광원 격자의 격자 주기, P1은 빔분할 격자의 격자 주기, P2는 해석 격자의 격자 주기, λ는 파장이다.
이 직렬 간섭계로부터 위상 정보를 획득할 수 있는지 여부를 다음의 두 수학식의 관계를 이용하여 광원의 결맞음성이 시스템에서 유용한지를 확인할 수 있다.
횡결맞음 길이는
Figure 112012016620271-pat00027
이며 shearing 길이는
Figure 112012016620271-pat00028
로 주어진다.
이 두 상수 값의 비에 의하여 구성된 간섭계의 위상차 가시도(phase visibility)를 평가할 수 있다.
Figure 112012016620271-pat00029
: 엑스선 광원이 완전한 결맞음성을 갖는다.
Figure 112012016620271-pat00030
: 엑스선 광원이 중간정도의 결맞음성을 갖는다.
여기서, 위상차 가시성은 Ls 가 클수록 커진다. 즉, 빔분할 격자(30)와 해석격자(40) 사이의 거리(d)가 짧을수록 위상차 가시성은 커진다.
본 발명에서 구현 하고자 하는 격자는 광원격자 G0(20, 주기P0), 빔분할 격자 G₁(30, 주기P₁), 해석 흡수격자 G₂(40, 주기P₂)로 구성된다. 격자 주기는 광원 격자의 격자 주기가 빔분할 격자 또는 해석 격자의 격자 주기 보다 작아 다음과 같은 관계를 갖는다. Hereinafter, the configuration of the present invention will be described with reference to FIG. 1. The X-ray grating interferometer according to the present invention includes an X-ray light source 10, a light source grating 20, a sample 60, a beam splitting grating 30, an analysis grating 40, and an optical modulator 50.
That is, the X-ray grating interferometer is composed of at least two gratings, namely, the beam splitting grating 30 and the analysis grating (absorption grating) 40. The beam of X-rays refracted by the sample 60 is divided by the beam splitting grating 30 and analyzed by the analysis grating 40. The X-ray beam is transmitted through an object having a periodic structure to form the same image as the structure at a certain distance, which is called a self-image or a Talbot-image.
When light having a wavelength of λ enters the diffraction grating having period d, the propagation function passing through the grating is expressed as follows.
Figure 112012016620271-pat00019
Where a n is the amplitude of the nth harmonic, and when the width of the grating is w, the Fourier coefficient is given by
Figure 112012016620271-pat00020
here
Figure 112012016620271-pat00021

When the electric field E (x, z) with uniform amplitude passes through the grating, its shape is
Figure 112012016620271-pat00022
e iΦ (x, y) It can represent the phase information of the light transmitted through the object, where Φ (x, y) is the wavefront phase information. Expressing the intensity of electromagnetic waves by the analysis grid 40 placed at the Talbot distance from the grid
Figure 112012016620271-pat00023
, Where
Figure 112012016620271-pat00024
to be.
That is, the intensity distribution of the self-image includes the phase information of the wavefront.
Figure 112012016620271-pat00025
The grating interferometer obtains the phase information by arranging the analysis grating 40 at the Talbot distance point at which the self-image is formed, and obtains the phase difference image by imaging it.
The grating of the X-ray Talbot interferometer must determine the grating period and the grating position accordingly to form and measure the wavefront including the phase information.
In the X-ray interferometer, a beam splitting phase grating and an analytical absorption grating are used when radiated X-rays are used as a light source, whereas a light source grating 20 is added when an X-ray light source having low coherence such as a low luminance X-ray tube is used. In these gratings, the position of each grating is determined by the relationship between the grating period and the distance between the gratings.
An in-line interferometer is known as a phase information device for moving an object in the direction of an optical axis by using a principle that a distance including phase image information exists according to the distance between a light source and a sample, but is not practical. However, according to the present invention, the grating period and the distance between gratings of a series grating interferometer are given the distance between the light source grating and the beam splitting grating.
Figure 112012016620271-pat00026
Where l is the distance between the light source grating 20 and the beam splitting grating 30, P 0 is the grating period of the light source grating, P 1 is the grating period of the beam splitting grating, P 2 is the grating period of the analysis grating, and λ is Wavelength.
Whether or not phase information can be obtained from the serial interferometer can be determined whether the coherence of the light source is useful in the system by using the following two equations.
Grazing length is
Figure 112012016620271-pat00027
And the shearing length is
Figure 112012016620271-pat00028
.
The phase visibility of the interferometer constructed by the ratio of these two constant values can be evaluated.
Figure 112012016620271-pat00029
: X-ray light source has perfect coherence.
Figure 112012016620271-pat00030
: X-ray light source has moderate coherence.
Here, the phase difference visibility becomes larger as L s increases. That is, the shorter the distance d between the beam splitting grating 30 and the analysis grid 40, the greater the phase difference visibility.
The grating to be implemented in the present invention is composed of a light source grating G 0 (20, period P 0 ), a beam splitting grating G ₁ (30, period P 해석), and an analytical absorption grating G ₂ (40, period P ₂). The lattice period has the following relationship because the lattice period of the light source grating is smaller than that of the beam splitting grating or the analysis grating.

P0<P₁=P₂P 0 <P₁ = P₂

본 발명의 일 실시예에서 사용한 광원 격자의 주기는 12.5 μm(개구부7.5 μm) 이며, P₁= P₂= 63μm(개구부 42μm )일 경우, 광원 격자(20)와 빔 분할 격자(30) 사이의 거리 l은 [수학식 5])에 의하여 l=16.7×10-2m 이며 또한 빔분할 격자가 해석격자 사이 거리 d=5×10-3m가 되도록 빔분할 격자(30)와 해석 격자(40)를 설치하면 위상 영상을 획득할 수 있다. 본 실시예에서는 l0=6.0×10-2m, λ=1.51×10-10m , s=7.5×10-6m 인 경우, Ll=1.2 μm 이며 Shearing 길이는 u=1.43x105, magnification

Figure 112012016620271-pat00014
, Ls는 1.06x10-7 m 이므로, 본 실시예의
Figure 112012016620271-pat00015
이다. 따라서, 본 실시예에 사용된 광원은 결맞음성을 가지고 있다는 것을 확인할 수 있다.The period of the light source grating used in one embodiment of the present invention is 12.5 μm (opening part 7.5 μm), and when P₁ = P₂ = 63 μm (opening part 42 μm), the distance between the light source grating 20 and the beam splitting grating 30 is l. Equation 5] is equal to l = 16.7 × 10 −2 m and the beam splitting grating 30 and the analysis grating 40 are arranged such that the beam splitting grating becomes the distance d = 5 × 10 −3 m between analysis gratings. If installed, a phase image can be obtained. In this embodiment, when l 0 = 6.0 × 10 -2 m, λ = 1.51 × 10 -10 m, s = 7.5 × 10 -6 m, L l = 1.2 μm and the shearing length is u = 1.43x10 5 , magnification
Figure 112012016620271-pat00014
, L s is 1.06x10 -7 m,
Figure 112012016620271-pat00015
to be. Therefore, it can be confirmed that the light source used in this embodiment has coherence.

삭제delete

본 실시예에서 위상 영상을 획득하기 위해 사용된 직렬 격자 간섭계의 시료는 IC chip(TOSHIBA, TC4030BP)을 package 된 상태를 사용하였다. 엑스선 영상은 빔분할 격자 앞에 5×10-3m 앞에 설치한 시료 내부 IC회로의 일부의 흡수영상은 도 2의 (a)와 같다. 영상 획득 시간은(exposure time) 34msec 이다. 위상 영상을 5 μm씩 이동하여 exposure time을 34msec로 하여 9장의 스캔 영상을 획득하여 이를 영상을 조합하여 위상 정보가 포함된 영상을 획득한다.In the present embodiment, a sample of a serial grating interferometer used to acquire a phase image was used in which an IC chip (TOSHIBA, TC4030BP) was packaged. An X-ray image is an absorption image of a part of the internal IC circuit of the sample installed 5 × 10 −3 m in front of the beam division grating as shown in FIG. Image acquisition time is (exposure time) 34msec. Nine scanned images are obtained by shifting the phase image by 5 μm and the exposure time is 34msec, and the images are combined to obtain an image including phase information.

도 2의 (a)에서 A, B부분은 시료를 약간 기울여 설치하였기에 측면부가 흐르게 보인다.In Figure 2 (a) A and B parts are installed at a slight inclination of the sample, so the side portion seems to flow.

도 2의 (b)는 기울어진 A, B 부분이 주기적인 위상으로 나타내고 있다.2 (b) shows the inclined A and B portions in periodic phases.

A부분의 두께는 위상변화 4번 즉 250μm이고 그림 B부분의 두께는 315 mm 즉 5번의 위상변화를 볼 수 있음 즉, 두께 정보를 획득하였다. 또한 A, B 부분과 C부분을 비교해 보면 A, B부분의 위상변화는 C부분에 비해 완만하여 wrap된 위상 영상을 통하여 두께정보 및 물체의 기울기 정보를 획득 가능하다.The thickness of part A is phase change 4, that is, 250μm, and the thickness of part B is 315 mm, which is 5 times. In addition, when comparing the A, B and C parts, the phase change of the A and B parts is smoother than the C part, and the thickness information and the inclination information of the object can be obtained through the wrapped phase image.

10 : 엑스선 광원
20 : 광원 격자
30 : 빔분할 격자
40 : 해석격자
50 : 광변조소자
60 : 시료10: X-ray light source
20: light source grid
30: beam split grating
40: analysis grid
50: optical modulator
60: sample

Claims (3)

엑스선 직렬 격자 간섭계에 있어서,
엑스선 광원;
상기 엑스선 광원에서 엑스선 진행 방향으로 이격하여 위치하는 광원 격자;
상기 광원 격자로부터 상기 엑스선 진행 방향으로 이격하여 배치되는 시료;
상기 시료로부터 상기 엑스선 진행 방향으로 이격하여 배치되는 빔분할 격자; 및
상기 빔 분할 격자로부터 상기 엑스선 진행 방향으로 이격하여 배치되는 해석 격자를 포함하고,
광원 격자와 빔분할 격자 사이의 거리(l)는,
Figure 112012016620271-pat00031

(여기서, P0는 광원 격자의 격자 주기, P1은 빔분할 격자의 격자 주기, P2는 해석 격자의 격자 주기, l은 광원 격자와 빔분할 격자 사이의 거리, λ는 엑스선 파장)
인 엑스선 직렬 격자 간섭계.In the X-ray serial grating interferometer,
X-ray light source;
A light source grid spaced apart from the X-ray light source in an X-ray traveling direction;
A sample spaced apart from the light source grating in the X-ray traveling direction;
A beam splitting grating disposed to be spaced apart from the sample in the X-ray traveling direction; And
An analysis grating spaced apart from the beam splitting grating in the X-ray traveling direction,
The distance l between the light source grating and the beam splitting grating is
Figure 112012016620271-pat00031

Where P 0 is the grating period of the light source grating, P 1 is the grating period of the beam splitting grating, P 2 is the grating period of the analysis grating, l is the distance between the light grating and the beam splitting grating, and λ is the X-ray wavelength.
X-ray serial grating interferometer. 제1항에 있어서,
상기 광원 격자는 다수 개구부의 조합으로 이루어지고, 상기 개구부의 형상은 2차원 구조인 엑스선 직렬 격자 간섭계.The method of claim 1,
And the light source grating is a combination of a plurality of openings, and the shape of the opening is a two-dimensional structure. 제1항에 있어서,
상기 광원 격자는 주기가 상기 빔분할 격자 또는 해석 격자의 주기보다 작고, 상기 빔분할 격자의 주기와 상기 해석 격자의 주기는 동일한 것을 특징으로 하는 엑스선 직렬 격자 간섭계. The method of claim 1,
And the light source grating has a period smaller than that of the beam splitting grating or analysis grating, and the period of the beam splitting grating and the period of the grating are the same.
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