KR101143447B1 - Conversion valve for vacuum absorber - Google Patents

Abstract

The present invention relates to a vacuum suction switching valve, and in particular, to improve the valve for switching and supplying the positive pressure and the negative pressure to the pneumatic mechanism for conveying the vacuum suction of the small member, basically, without a separate control when switching from negative pressure to positive pressure An apparatus for collectively performing all switching control with only one solenoid at the same time supplying the atmospheric pressure, the switching means 100 for transferring the plunger 110 in one direction according to the input of the electrical signal; A chamber 210 in which the plunger 110 of the switching means 100 is located, a positive pressure port P connected to a positive pressure source to supply a positive pressure to the chamber 210, and a negative pressure source connected to the chamber ( A negative pressure port (V) for supplying a negative pressure to the 210, and an output port (W) connected to the vacuum suction pneumatic mechanism to supply a positive pressure or a negative pressure from the chamber 210 through a plurality of flow paths formed therein In the vacuum suction switching valve composed of the valve body 200 is connected; A throttle valve 220 capable of adjusting the magnitude of the positive pressure supplied to the chamber 210 at the stop of the flow path from the constant pressure port P to the chamber 210; A check valve 230 provided between the throttle valve 220 and the chamber 210 to open and close according to the position and the working pressure of the plunger 110; It is further provided between the throttle valve 220 and the check valve 230, an atmospheric pressure valve 240 for instantaneously opening the atmospheric pressure port (A) opened in the air according to the working pressure is further configured, from negative pressure to positive pressure It is possible to prevent the occurrence of overshoot by supplying atmospheric pressure instantaneously without any control when switching between parts. Therefore, errors occur in the assembly and production line of small members such as semiconductor chips because the small member to be transported is always seated in the correct position. Can be prevented drastically, and the delay time can be increased to increase the speed, and only one solenoid can perform all the switching controls collectively so that the control logic is simple and the production cost can be minimized to maximize productivity. It is.

Positive pressure, negative pressure, atmospheric pressure, overshoot, solenoid, valve, switching

Description

Conversion valve for vacuum absorber

The present invention relates to a vacuum suction switching valve, and in particular, to improve the valve for switching and supplying the positive pressure and the negative pressure to the pneumatic mechanism for transporting the vacuum suction of the small member, basically when switching from the negative pressure to the positive pressure without a separate control As a device for supplying atmospheric pressure at the same time and performing all switching control with one solenoid as a whole, it is possible to prevent the occurrence of overshoot by supplying the atmospheric pressure instantaneously without any control when switching from negative pressure to positive pressure. Since the small member to be transported is always seated in place, it is possible to drastically prevent errors occurring in the assembly and production line of small members such as semiconductor chips, and to increase the speed by reducing the delay time, and only one solenoid All switching controls can be carried out collectively It relates to a device that can maximize productivity by simplifying control logic and minimizing production cost.

In general, in the assembly and production line of small members such as semiconductor chips, a handler or a mounter is widely used as a vacuum suction pneumatic mechanism using vacuum suction for their transfer.

That is, the handler or the mounter temporarily takes a small member by using the negative pressure, transfers it to a predetermined position, and then uses the positive pressure to release them. For this purpose, the handler or the mounter uses a vacuum and a negative pressure. The valve mechanism which switches and supplies this is applied.

1 is a circuit diagram showing a general vacuum suction switching valve.

In the general vacuum suction switching valve as described above, as shown in FIG. 1, the negative pressure port V, the positive pressure port P, and the output port W are all formed on the valve body 23, and the negative pressure port ( V) and the positive pressure port P are provided with two solenoids, namely, a negative pressure solenoid 19 and a positive pressure solenoid 21, for selectively supplying negative pressure and positive pressure, respectively.

Accordingly, the negative pressure acts on the output port W of the valve body 23 under the control of the negative pressure solenoid 19 on the left side of the drawing, or the output port (under the control of the positive pressure solenoid 21 on the right side of the drawing). The positive pressure is switched to W).

However, as described above, in the case of a general vacuum suction switching valve that simply switches between negative pressure and positive pressure, a small member such as a semiconductor chip that has been vacuum-sucked by the negative pressure causes an overshoot due to the sudden positive pressure. There was a disadvantage in that it does not occur in a desired position by the generated.

In order to improve this disadvantage, Korean Patent Laid-Open Publication No. 2006-63882 discloses a conventional vacuum suction switching valve that is a "switching valve device."

2 is a circuit diagram showing a conventional vacuum suction switching valve, Figure 3 is a cross-sectional view showing a conventional vacuum suction switching valve.

At this time, Figure 3 (a) is a plan sectional view of a conventional vacuum suction switching valve, Figure 3 (b) is a front sectional view.

In the conventional vacuum suction switching valve disclosed in Korean Laid-Open Patent Publication No. 2006-63882, as shown in FIGS. 2 and 3, the check valve 15 and the throttle valve 53 are connected to the general vacuum suction switching valve described above. Is to prevent overshoot by adding

First, the check valve 15 is provided on the pipeline for acting underpressure to communicate the atmospheric pressure port A to the output port W while both the negative pressure solenoid 19 and the constant pressure solenoid 21 are turned off, When the negative pressure is applied to the port (W) and then switched to the positive pressure, it acts to temporarily operate the atmospheric pressure.

In addition, the throttle valve 53 is provided on the pipeline for acting the static pressure to properly regulate the static pressure to prevent the sudden action of the positive pressure.

However, the conventional vacuum suction switching valve as described above is provided with two solenoids, that is, a negative pressure solenoid and a positive pressure solenoid, respectively, so that the production cost is relatively high and the size of the valve is difficult to miniaturize. There is a technical problem that the control logic is complicated because the on / off control with a proper time difference.

The present invention is to solve the above problems, it is possible to prevent the occurrence of overshoot by supplying the atmospheric pressure instantaneously without any control when switching from negative pressure to positive pressure, the small member to be transported always seated in the right position This prevents errors occurring in assembly and production lines of small members such as semiconductor chips, while reducing the delay time and increasing the speed. All switching control can be performed collectively with only one solenoid. We want to provide a vacuum suction switching valve that allows simple control logic and minimizes production costs to maximize productivity.

The present invention includes switching means for transferring the plunger in one direction according to the input of the electrical signal; A chamber in which the plunger of the switching means is located, a positive pressure port connected to a positive pressure source to supply positive pressure to the chamber, a negative pressure port connected to a negative pressure source to supply negative pressure to the chamber, and a vacuum suction pneumatic mechanism A vacuum suction switching valve comprising a valve body having an output port for supplying a positive pressure or a negative pressure from the chamber; A throttle valve capable of adjusting the magnitude of the positive pressure supplied to the chamber at a stop of the flow path from the constant pressure port to the chamber; A check valve provided between the throttle valve and the chamber to open and close according to the position and the working pressure of the plunger; An atmospheric pressure valve is provided between the throttle valve and the check valve to further open the atmospheric pressure port opened in the atmosphere in accordance with the working pressure.

Here, the switching means is preferably made of a solenoid.

Further, in the above-described vacuum suction switching valve of the present invention, the check valve comprises: a check ball located in the valve chamber; Valve seats respectively formed at flow path openings located at both sides of the valve chamber; Preferably, the valve plunger is configured to selectively contact the plunger to limit the movement of the check ball in one direction.

In the vacuum suction switching valve, the atmospheric pressure valve includes: a valve seat formed at an atmospheric pressure port side flow path opening of the valve chamber; It is preferably composed of a ball located in the valve chamber and elastically supported toward the valve seat side.

Lastly, the ball inside the valve chamber is elastically supported in one direction by a coil spring, and it is most preferable that a cross-shaped groove is cut in the channel opening of the valve chamber in which the coil spring is located.

The present invention as described above can prevent the occurrence of overshoot by supplying the atmospheric pressure instantaneously without any control when switching from the negative pressure to the positive pressure, the small member to be transported is always seated in the correct position, such as a semiconductor chip It is possible to drastically prevent errors occurring in the assembly and production line of the members, and to increase the speed by reducing the delay time, and to control all the switching control with only one solenoid, so that the control logic is simple. It is an invention that can maximize the productivity by minimizing the production cost.

4 is a view showing a state in which the vacuum suction switching valve of the present invention is supplying a negative pressure to the output port, Figure 5 is a view showing a state in which the vacuum suction switching valve of the present invention is supplying atmospheric pressure to the output port. 6 is a view showing a state in which the vacuum suction switching valve of the present invention is supplying a constant pressure to the output port.

4 to 6, each diagram (a) is a schematic circuit diagram of a vacuum suction switching valve of the present invention, (b) is a planar cross-sectional view, and (c) is a front sectional view in (b). Fig. 1 is a cross sectional view taken along lines I-I, II-II, and III-III, respectively.

7 (a) and 7 (b) are enlarged cross-sectional views of the X and Y portions of FIG. 4, respectively, and FIGS. 8A and 8B respectively illustrate the X 'and Y' portions of FIG. 9 (a) and 9 (b) are enlarged cross-sectional views of X ′ and Y ″ portions of FIG. 5, respectively.

As shown in FIGS. 4 to 9, a vacuum suction switching valve of the present invention is basically a pressure source for supplying a constant pressure, such as a compressor or a pressure vessel, not shown, and a compressor not shown. B. A vacuum source supplying negative pressure, such as a vacuum vessel, is selectively connected to a vacuum suction pneumatic mechanism such as a handler or a mounter, and the flow path thereof is communicated with the semiconductor chip. It is a basic feature of the technology to be able to quickly transfer a small member such as vacuum suction.

Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, the vacuum suction switching valve of the present invention is composed of a switching means 100 and the valve body 200.

First, the switching means 100 is a component for conveying the plunger 110 in one direction according to the input of an electrical signal, and a poppet or the like may be provided at an end surface thereof to maintain airtightness.

Here, when there is no input of an electrical signal, the plunger 110 provided in the switching means 100 protrudes by the elastic body 111 as shown in FIG. 8 (a), and FIG. 7 (a) according to the input of the electrical signal. As it acts as an electromagnet to pull the plunger 110.

Hereinafter, it will be described as pulling the plunger 110 when operating on, and plunger 110 protruding when operating off.

Next, the valve body 200 is fixed to one side of the switching means 100 as a metallic block forming a substantially hexagonal shape, the outside of the positive pressure port (P), negative pressure port (V), output port (W) And the atmospheric pressure port (A) is opened, there is formed a flow path for connecting the plurality of ports described above.

First, as a space for switching between the positive pressure and the negative pressure, a chamber 210 forming a predetermined space is formed at one side of the valve body 200, and the plunger 110 of the switching means 100 is formed in the chamber 210. ) End is located.

That is, the positive pressure and the negative pressure are switched by changing the flow path according to the movement of the plunger 110.

In addition, the constant pressure port P is connected to a constant pressure source such as a compressor or a pressure vessel (not shown), and a flow path is formed in the valve body 200 from the constant pressure port P to the chamber 210. Thereby, the positive pressure is supplied to the chamber 210 from an external positive pressure source.

At this time, the throttle valve 220 is provided at the stop of the flow path from the constant pressure port (P) to the chamber 210, it is possible to adjust the magnitude of the positive pressure supplied to the chamber (210).

The throttle valve 220, as shown in Figure 5 (c) by tightening or loosening the adjustment screw 221 protruding to the upper side of the valve body 200 as the needle 222 formed at the lower end of the cross-sectional area of the flow path It is a structure to increase and decrease.

In addition, a check valve 230 is provided to stop the flow path from the throttle valve 220 to the chamber 210, and the check valve 230 blocks supply of a constant pressure (sometimes atmospheric pressure) to the chamber 210. Done.

The check valve 230 is located adjacent to the chamber 210, the opening and closing of the plunger 110 is controlled as well as the positive and negative pressure acting on both sides of the check valve 230 as a center. .

Here, the check valve 230 is closed when the switching means 100 is operated on to block the supply of the positive pressure, open when the switching means 100 is operated off to the positive pressure (or atmospheric pressure) Various embodiments may be applied to cut off the supply of.

In particular, in the present invention, a preferred embodiment of the check valve 230 is a check ball 231 located in the valve chamber 234 as shown in FIG. A valve seat 232 positioned at one side of the valve chamber 234; The valve plunger 233 is configured to selectively contact the plunger 110 to limit the movement of the check ball 231 in one direction.

That is, in the check valve 230, the valve chamber 234 is formed at the stop of the flow path from the positive pressure port P to the chamber 210, and is located adjacent to the chamber 210, the valve chamber The diameter of the 234 is somewhat enlarged diameter is provided with a check ball 231 of a metal or ceramic material therein.

In addition, a valve seat 232 having a pipe shape smaller than the diameter of the check ball 231 is fixed to the chamber 210 side of the valve chamber 234, and a valve plunger 233 is installed inside the valve seat 232. ) Is located, the valve plunger 233 is located between the check ball 231 and the plunger 110 of the switching means 100 in the valve seat 232 according to the position of the plunger 110 While moving in to limit the movement of the check ball 231 in one direction.

Accordingly, when the switching means 100 is turned on, the positive pressure acts from the right side to the left side in the valve chamber 234 as shown in FIG. 7A, so that the check ball 231 moves to the left side. By moving, the check valve 230 is closed by blocking the valve seat 232 to block the static pressure from being supplied to the chamber 210.

On the contrary, when the switching means 100 is turned off, the plunger 110 of the switching means 100 pushes the valve plunger 233 to the right in the drawing as shown in FIG. By restricting the movement of 231 in the valve chamber 234 to the left in the drawing, the check valve 230 is opened to supply a static pressure to the chamber 210.

In addition, an atmospheric pressure valve 240 for temporarily opening the atmospheric pressure port A is provided at an interruption of the flow path from the throttle valve 220 to the check valve 230, and the atmospheric pressure valve 240 is opened according to the opening. Temporarily supplying atmospheric pressure to the chamber 210.

At this time, the atmospheric pressure port (A) may be opened directly to the outside, it is preferable to provide an air filter 246 to prevent the inflow of foreign matter.

Here, the atmospheric pressure valve 240 is a valve that opens and closes itself according to the pressure acting on the flow path connected to the atmospheric pressure valve 240 without additional control, and various embodiments capable of supplying the atmospheric pressure in an instant may be applicable.

Particularly, in the present invention, a preferred embodiment of the atmospheric pressure valve 240 includes a valve seat 241 formed at an atmospheric pressure port A side flow path opening of the valve chamber 243; The ball 242 is disposed in the valve chamber 243 and elastically supported toward the valve seat 241.

Here, the atmospheric pressure valve 240 is formed in a flow path that is separately branched in the flow path interrupted from the throttle valve 220 to the check valve 230, as shown in Figure 7 (b), the valve chamber 243 is predetermined The diameter of the valve seat 243 is formed in the diameter of the valve chamber 243, the valve seat 241 of the pipe shape is provided on the atmospheric pressure port (A) side, the inner diameter of the valve seat 241 is the ball 242 It is formed to be somewhat smaller than the diameter, when the valve seat 241 and the ball 242 is in contact with the airtight state.

That is, the atmospheric pressure valve 240 is closed when a positive pressure greater than or equal to a predetermined pressure is applied from the right side in the drawing as shown in FIG. 7 (b) or 9 (b). Open as shown in 8 (b) can be the atmospheric pressure.

In particular, in the present invention, the ball 242 inside the valve chamber 243 is elastically supported in one direction by the coil spring 244, the of the valve chamber 243 in which the coil spring 244 is located Most preferably, the cross-shaped groove 245 is cut in the flow path opening.

That is, by adding a separate coil spring 244 in the valve chamber 243 of the atmospheric pressure valve 240 may adjust the pressure for the ball 242 to close the valve seat 241, the cross-shaped groove ( 245 may be further formed to prevent the passage of the passage opening on the right side of the atmospheric pressure valve 240 from being blocked.

Detailed operations of the check valve 230 and the atmospheric pressure valve 240 described above will be described in detail later.

In addition, the negative pressure port (V) is connected to a negative pressure source such as a compressor or a vacuum container (not shown), and a flow path is formed in the valve body 200 from the negative pressure port V to the chamber 210. Thereby, the negative pressure is supplied to the chamber 210 from an external negative pressure source.

At this time, the end surface of the plunger 110 described above directly opens and closes the end opening of the flow path from the negative pressure port V to the chamber 210 according to the on / off of the switching means 100.

That is, when the switching means 100 is turned on, a negative pressure is supplied into the chamber 210 by opening the flow path from the negative pressure port V as shown in FIG. 7 (a) and turning off the switching means 100. In operation, as shown in FIG. 9 (a), the flow path from the negative pressure port V is closed to block the negative pressure supplied to the chamber 210.

And, the output port (W) is connected to a vacuum suction pneumatic mechanism such as a handler or mounter (not shown), the flow path from the chamber 210 to the output port (W) in the valve body 200 It is formed to supply the positive pressure, the negative pressure, or the atmospheric pressure acting on the chamber to a vacuum suction pneumatic mechanism not shown.

Hereinafter, the operation of the present invention will be described with reference to FIGS. 4 to 9.

For convenience of explanation, the vacuum suction switching valve of the present invention will be described in order by dividing the state in which the negative pressure acts, the atmospheric pressure acts, and the static pressure acts sequentially.

1) Negative pressure

First, the state in which the negative pressure acts is a state in which the positive pressure is interrupted and the negative pressure acts on the output port W, as shown in FIG.

At this time, as the solenoid switching means 100 is controlled to be on, the plunger 110 is moved to the left side of the drawing by the electromagnet as shown in FIGS. 4 and 7.

Accordingly, a flow path connected to the chamber 210 of the valve body 200 from the negative pressure port V is opened as shown in FIG. 7A, and negative pressure acts on the chamber 210.

At this time, in the check valve 230 located adjacent to the chamber 210, the positive pressure acts on the check ball 231 from the right side in the drawing and the negative pressure acts from the left in the drawing, thereby providing the valve plunger 233. As the check ball 231 moves to the left side together in the drawing, the check valve 230 is closed while the check ball 231 touches the valve seat 232 so that the supply of the positive pressure is blocked.

Accordingly, the negative pressure acting on the chamber 210 is supplied to a vacuum suction pneumatic mechanism, such as a handler or a mounter, through the output port W, so that a small member such as a semiconductor chip can be sucked in a vacuum. will be.

Here, Figure 7 (b) is a cross-sectional view where the check valve 230 is located for clarity.

2) Atmospheric pressure

Next, as shown in Fig. 5 (a), the atmospheric pressure is a state in which the atmospheric pressure acts on the output port W instantaneously during the switching from the negative pressure to the positive pressure.

As soon as the switching means 100, which is the solenoid, is turned off, the plunger 110 is moved to the right side of the drawing by the elastic body 111, as shown in FIGS.

Accordingly, the flow path connected to the chamber 210 of the valve body 200 from the negative pressure port V is closed as shown in FIG. 8A, so that the negative pressure stops in the chamber 210.

At this time, in the check valve 230 located adjacent to the chamber 210, the plunger 110 and the check ball 231 are moved to the right as the plunger 110 returns to the right in the drawing, thereby being fixed. The check valve 230 is opened while the check ball 231 is spaced apart from the valve seat 232.

In addition, as shown in FIG. 8B, in the flow path between the check valve 230 and the throttle valve 220, a negative pressure is instantaneously formed, and the ball 242 provided in the atmospheric pressure valve 240 is temporarily By moving to the right in the drawing, the atmospheric pressure valve 240 is opened while the ball 242 is spaced apart from the valve seat 241.

At this time, it is difficult for the ball 242 provided in the atmospheric pressure valve 240 to close the opening of the right side of the valve chamber 243, but if the cross-shaped groove 245 is formed in preparation for this, the ball 242 is right of the valve chamber 243. The phenomenon of blocking the opening can be prevented at the source.

Accordingly, the atmospheric pressure is momentarily acted on the chamber 210 by about 10 kPa, and the atmospheric pressure is supplied to the vacuum adsorption pneumatic mechanism not shown, such as a handler or a mounter, through the output port W, The same small member is released from vacuum to atmospheric pressure.

3) The state of static pressure

Finally, the state in which the positive pressure acts is a state in which the positive pressure is completely switched from the negative pressure to the positive pressure as shown in FIG.

6 and 9 after the solenoid switching means 100 is controlled to be off, the ball 242 of the atmospheric pressure valve 240 temporarily moved to the right side as shown in FIGS. 6 and 9 has a positive pressure port ( The positive pressure passing through the throttle valve 220 and the negative force of the coil spring 244 from P) is moved back to the left in the drawing, so that the ball 244 as shown in (b) of FIG. 241, the atmospheric pressure valve 240 is closed.

Then, the positive pressure acts inside the chamber 210 through the check valve 230 in the already open state, and the positive pressure is a vacuum suction pneumatic mechanism such as a handler or a mounter through the output port W. By supplying to the substrate, a small member such as a semiconductor chip can be temporarily released from the vacuum to atmospheric pressure and then accurately seated in place without overshooting.

In this case, the throttle valve 220 may adjust the strength of the positive pressure by varying the position of the needle 222 through the adjustment screw 221.

Therefore, the vacuum suction switching valve of the present invention supplies a negative pressure to the vacuum suction pneumatic mechanism, transfers a small member such as a semiconductor chip, instantaneously supplies atmospheric pressure to break the vacuum, and then supplies a positive pressure. It is an invention that has an excellent advantage that the small member can be seated in the right position at all times by preventing the occurrence of overshoot, and in particular, all the switching control is possible with only one solenoid, which simplifies the control logic and realizes the miniaturization of the device itself. .

The above embodiment is an example for explaining the technical idea of the present invention in detail, and the scope of the present invention is not limited to the above drawings and embodiments.

1 is a circuit diagram showing a general vacuum suction switching valve,

2 is a circuit diagram showing a conventional vacuum suction switching valve;

3 is a cross-sectional view showing a conventional vacuum suction switching valve;

Figure 4 is a vacuum suction switching valve of the present invention is supplying a negative pressure to the output port

       Degrees showing states,

5 is a vacuum suction switching valve of the present invention to supply the atmospheric pressure to the output port

       Degree showing the state,

Figure 6 is a vacuum suction switching valve of the present invention is supplying a constant pressure to the output port

       Degrees showing states,

(A) and (b) of FIG. 7 are enlarged cross-sectional views of X and Y portions of FIG. 4, respectively.

(A) and (b) of FIG. 8 are enlarged cross-sectional views of X 'and Y' portions of FIG. 5, respectively.

9 (a) and 9 (b) are enlarged cross-sectional views of X ′ and Y ″ portions of FIG. 5, respectively.

<Explanation of symbols for the main parts of the drawings>

100: switching means (solenoid) 110: plunger

200: valve body 210: chamber

220: throttle valve 221: adjusting screw

222: needle 230: check valve

231: check ball 232: valve seat

233: valve plunger 234: valve chamber

240: atmospheric pressure valve 241: valve seat

242: ball 243: valve chamber

244: coil spring 245: cross recess

P: Positive pressure port V: Negative pressure port

W: Output port A: Atmospheric pressure port

Claims (5)

Only one switching means for transferring the plunger in one direction according to the input of the electrical signal; A chamber in which the plunger of the switching means is located, a positive pressure port connected to a positive pressure source to supply positive pressure to the chamber, a negative pressure port connected to a negative pressure source to supply negative pressure to the chamber, and a vacuum suction pneumatic mechanism A vacuum suction switching valve comprising a valve body having an output port for supplying a positive pressure or a negative pressure from the chamber; In the flow path interruption from the constant pressure port to the chamber, A throttle valve capable of adjusting the magnitude of the positive pressure supplied to the chamber; A check valve provided between the throttle valve and the chamber to open and close according to the position and the working pressure of the plunger; An atmospheric pressure valve provided between the throttle valve and the check valve and configured to instantly open the atmospheric pressure port opened in the atmosphere according to the working pressure; The switching valve for vacuum suction, characterized in that for controlling the position of the plunger in the chamber only by controlling the switching means to supply any one of positive pressure, negative pressure, and atmospheric pressure to the vacuum suction pneumatic mechanism. The switching valve for vacuum suction according to claim 1, wherein the switching means comprises a solenoid. The method of claim 1, wherein the check valve, A check ball located in the valve chamber; A valve seat positioned at one side of the valve chamber; And a valve plunger configured to selectively contact the plunger to limit the movement of the check ball in one direction. The method of claim 1, wherein the atmospheric pressure valve, A valve seat formed in the atmospheric pressure port side flow path opening of the valve chamber; And a ball positioned in the valve chamber and elastically supported toward the valve seat. 5. The vacuum suction switch according to claim 4, wherein the ball inside the valve chamber is elastically supported in one direction by a coil spring, and a cross-shaped groove is cut in the channel opening of the valve chamber in which the coil spring is located. valve.

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