KR101119567B1 - Gap sensor and method for manufacturing the same, apparatus and method for measuring abrasion of gun barrel using the gap sensor - Google Patents

Abstract

The gap sensor according to the present invention faces a substrate, a first electrode coupled to a surface of the substrate to receive a voltage, and a first electrode facing the first electrode to generate a capacitance between the substrate and the first electrode. And a stretchable body coupled to the substrate and supporting the second electrode so as to be spaced apart from the first electrode. The stretchable body is made of a stretchable material that is elastically deformable so that the distance from the first electrode of the second electrode is variable, so that the capacitance generated between the first electrode and the second electrode changes when the stretchable body is deformed. . The gap sensor according to the present invention operates in a capacitive manner, has a fine resolution, and enables precise measurement.

Description

Gap SENSOR AND METHOD FOR MANUFACTURING THE SAME, APPARATUS AND METHOD FOR MEASURING ABRASION OF GUN BARREL USING THE GAP SENSOR}

The present invention relates to a gap sensor, and more particularly, to a gap sensor and a method of manufacturing the same, which can easily measure the wear depth of an inspection object, and an apparatus and method for measuring the wear of a barrel using the gap sensor.

In many mechanical devices, wear and tear on parts due to use has a major impact on the malfunction and life of the mechanical device. In particular, in machinery or firearms that require precise operation, predicting the life of parts and replacing parts that have reached the end of their life at the appropriate time is essential to reduce the occurrence of defective products or to increase the accuracy of shooting. For this reason, parts with a high risk of wear during use need to be measured for wear during development.

For example, firearms can damage the steel wire formed on the barrel by shooting, so that the development of the barrel's wear is essential. The liner of the barrel is a spiral groove formed inside the barrel to rotate the body fired from the chamber and to have rotational inertia. Typically, the carcass is made of a conical shape whose weight is concentrated on the anthracite so that the relatively heavy anthracite precedes the warhead when firing at high speed. For this reason, by using a steel wire to rotate the carcass can ensure that the carcass has a stable trajectory. It is important to measure the abrasion of firearms with firearms because knowing the wear of the barrel can improve the accuracy of the fire and predict the life of firearms.

Conventionally, the pull-over gauge method and the diamond indenter method are known as a method of measuring wear of a barrel. The pullover gauge method is a method of directly measuring the inner diameter of the barrel with a pullover gauge. The diamond indenter method is a diamond indenter that forms indentations on the inner surface of the barrel and compares the change of the indentation before and after the shot. .

However, since the pullover gauge method can measure only a wear depth of about 25 μm or more, there is a disadvantage in that a large number of water repellent shots are required to measure the wear of the barrel. In addition, the diamond inductor method can measure the abrasion of the barrel even with the minimum number of shots, but since the indentation must be formed on the inner surface of the barrel during the measurement process, the barrel is damaged.

The present invention is to solve the above problems, a gap sensor that can measure the wear of the test object in a simple method without damaging the test object, a manufacturing method thereof, and a wear measurement device of the barrel using the gap sensor. And to provide a method.

According to an embodiment of the present invention, a gap sensor includes a substrate, a first electrode coupled to a surface of the substrate to receive a voltage, and a voltage between the first electrode and the first electrode. And a second electrode facing the first electrode so as to generate capacitance, and an elastic body coupled to the substrate and supporting the second electrode to be spaced apart from the first electrode. The stretchable body is made of a stretchable material that is elastically deformable so that the distance from the first electrode of the second electrode is variable, so that the capacitance generated between the first electrode and the second electrode changes when the stretchable body is deformed. . The elastic body may include a ceiling portion disposed to face the first electrode and coupled with the second electrode, and a sidewall portion protruding from the ceiling portion and coupled to the substrate to space the ceiling portion from the first electrode.

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According to one aspect of the present invention, there is provided a method of manufacturing a gap sensor, which includes forming a first electrode on a surface of a substrate and a stretchable body having a ceiling portion and a side wall portion protruding from the ceiling portion. Forming a second electrode on the ceiling; forming a connecting terminal on the substrate; and a flexible terminal that can be stretched together with the sidewall to electrically connect the second electrode and the connecting terminal. Forming a sidewall portion, and coupling the elastic body to the substrate such that the first electrode and the second electrode face each other while being spaced apart from each other.

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The wear measurement apparatus of the barrel according to an embodiment of the present invention for achieving the above object includes a gap sensor for generating a capacitance, and a support that can be inserted into the barrel and supports the gap sensor. The gap sensor includes a substrate, a first electrode coupled to a surface of the substrate to receive a voltage, and a second facing the first electrode to generate capacitance between the first electrode and a voltage supplied thereto. And an elastic body coupled to the substrate to support the second electrode so as to be spaced apart from the first electrode, and an elastic body capable of elastic deformation so that the distance from the first electrode of the second electrode is variable. The support has a support for supporting the substrate such that the elastic body can be elastically deformed in contact with the inner surface of the barrel.

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The wear measurement method of the barrel according to an embodiment of the present invention for achieving the above object, the elastic body and the gap sensor having two electrodes the interval of the variable according to the deformation of the elastic body, the elastic body is the inner surface of the barrel Positioning at a measurement position inside the barrel to be deformed in contact with the battery, supplying voltage to each of the two electrodes, measuring capacitance generated between the two electrodes before shooting, removing the gap sensor from the barrel, and then Firing the fire, placing the gap sensor at the measurement position after firing, supplying voltage to each of the two electrodes, and measuring the capacitance generated between the two electrodes after firing; Comparing the capacitance generated between the electrodes to measure wear of the barrel.

The gap sensor according to the present invention operates in a capacitive manner, has a fine resolution, and enables precise measurement.

In addition, the gap sensor according to the present invention uses a flexible terminal with a stretchable body, thereby reducing the risk of breakage and repeated service life due to repeated use.

The method of manufacturing the gap sensor according to the present invention enables the production and mass production of precise gap sensors by using MEMS technology.

Since the wear measurement apparatus of the barrel according to the present invention has a fine resolution, it can react sensitively to the height change of the steel wire, and can measure the wear change of the barrel at the minimum water repellency.

In addition, since the wear measurement apparatus of the barrel steel wire according to the present invention does not leave indentations in the barrel during wear measurement as in the conventional diamond indenter method, damage to the barrel can be prevented.

Hereinafter, a gap sensor according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the drawings, the size and shape of the components, etc. may be exaggerated or simplified to aid in understanding the invention.

As shown in Figures 1 to 3, the gap sensor 10 according to an embodiment of the present invention, by measuring the wear of the inspection object in a capacitive manner, the substrate 11, the elastic body 12, The first electrode 16 and the second electrode 19 are included. The gap sensor 10 generates a capacitance by supplying voltages to the two electrodes 16 and 19, respectively, and when the gap between the two electrodes 16 and 19 changes, the capacitance between them changes. This can be used to measure the wear of an inspection object.

The substrate 11 is made of an electrically insulating material such as glass so as not to affect the capacitance between the first electrode 16 and the second electrode 19. The substrate 11 may be made of an elastic material such as the elastic body 12. The first electrode 16, the terminal 17, and the connection terminal 18 are coupled to the surface of the substrate 11. The terminal 17 is connected to the first electrode 16 to supply a voltage to the first electrode 16, and the connection terminal 18 is electrically connected to the second electrode 19 to the second electrode 19. Supply the voltage. The terminal 17 and the connection terminal 18 may be made of a conductive material such as the first electrode 16, and formed together with the first electrode 16 when the first electrode 16 is formed on the substrate 11. Can be. Voltage supply means for supplying voltage is connected to the terminal 17 and the connection terminal 18, respectively.

The elastic body 12 is coupled to the substrate 11 and includes four rectangular sidewalls 13 and four sidewalls 14 connected to four sides of the ceiling 13. A groove 15 is formed between the ceiling portion 13 and the four side wall portions 14, and the first electrode 16 and the second electrode 19 are spaced apart from each other by being disposed with the groove 15 therebetween. do. The elastic body 12 is made of an elastic material so that its height can be varied. The stretchable material constituting the stretchable body 12 is an elastomer. Elastomer refers to a polymer compound that has a property of stretching many times when applied by an external force and returning to its original length when the external force is removed.

An example of the elastomer is polydimethylsiloxane (hereinafter referred to as PDMS). PDMS is a high-modulus elastomer with a Young's Modulus of 750 kPa, which is only 1/250 of silicon. In addition, PDMS has advantages such as chemical resistance, low cost, and fast manufacturing. In addition, PDMS is characterized by being able to stably adhere to a relatively large area, homogeneous (Homogeneous), isotropic (Isotropic), and durable. Of course, in the present invention, the stretchable body 12 may be made of a stretchable material other than PDMS.

The stretch length of the stretchable body 12 may vary depending on the material or shape thereof. When the gap sensor 10 is used as the wear measuring device 40 of the barrel 30 (see FIG. 18), the elastic body 12 can express a displacement of about 12 μm or more and with respect to the height change of the steel wire 31. It is good to be made of a material that can react sensitively. Examples of such materials include PDMS described above.

As shown in FIG. 3, the first electrode 16 and the second electrode 19 are arranged so as to be spaced apart from each other to generate a capacitance therebetween. The first electrode 16 is coupled to the surface of the substrate 11, and the second electrode 19 is coupled to the ceiling 13 of the stretchable body 12. The reason why the second electrode 19 is disposed inside the stretchable body 12 is that the second electrode 19 may be damaged if it comes into contact with an inspection object such as the barrel 30. The second electrode 19 is connected to the connecting terminal 18 coupled to the substrate 11 and the flexible terminal 20 for connecting the second electrode 19 to each other. The flexible terminal 20 extends from one side of the second electrode 19 to extend to one end of one side wall portion 14. Both the first electrode 16 and the second electrode 19 are made of a conductive material such as chromium (Cr) or gold (Au).

The second electrode 19 and the stretchable terminal 20 coupled to the stretchable body 12 should be able to withstand the deformation of the stretchable body 12. Accordingly, the second electrode 19 and the flexible terminal 20 may have elasticity so that the second electrode 19 and the elastic terminal 20 can be stretched together with the elastic body 12. If the second electrode 19 and the elastic terminal 20 are not elastic, the second electrode 19 and the elastic terminal 20 may not be able to withstand deformation of the elastic body 12. To this end, the second electrode 19 and the stretchable terminal 20 have fine wrinkles, and when the stretchable body 12 is stretched, the wrinkles are stretched and do not split and stretch. The wrinkle formation of the second electrode 19 and the flexible terminal 20 will be described later.

The second electrode 19 is supported by the stretchable body 12 and is structurally spaced apart from the first electrode 16, but when the distance is very small and the stretchable body 12 contracts, the first electrode 16 Can be contacted. When the first electrode 16 and the second electrode 19 are in contact with each other, no capacitance is generated between them, so it is necessary to stably space the first electrode 16 and the second electrode 19. To this end, a protective film 21 is interposed between the first electrode 16 and the second electrode 19.

The passivation layer 21 is bonded to the surface of the substrate 11 to cover the entire first electrode 16 except for a portion of the terminal 17. As the passivation layer 21, various electrical insulators may be used to prevent current flow between the first electrode 16 and the second electrode 19. As an example of the protective film 21, the protective film 21 can be formed by applying a photoresist that is an electrical insulator and easy to form a pattern to the substrate 11. Although the protective film 21 is shown to be coupled to the substrate 11 to cover the first electrode 16, the protective film 21 may be coupled to the flexible body 12 to cover the second electrode 19. It may be.

Hereinafter, a method of manufacturing a gap sensor according to an embodiment of the present invention will be described with reference to FIGS. 4 to 15.

First, as shown in FIG. 4, the first electrode 16, the terminal 17, and the connecting terminal 18 are formed on the surface of the substrate 11 made of an electrical insulator such as glass. These can be formed simultaneously by depositing a metal film on the surface of the substrate 11 and then patterning it. The first electrode 16 is connected to the terminal 17 and separated from the connection terminal 18. E-beam deposition may be used for the deposition of the metal film, and chromium (Cr) and gold (Au) may be used as the metal. Of course, the first electrode 16, the terminal 17 and the connection terminal 18 can be made of other conductive materials, and their formation can be used other than the E-beam deposition method.

After the first electrode 16 is formed on the substrate 11, the entirety of the first electrode 16 is covered with the protective film 21 except for a portion of the terminal 17 as shown in FIG. 5. When the photoresist is used as the protective film 21, the protective film 21 covering the first electrode 16 may be formed by spin coating the photoresist on the substrate 11 and patterning the photoresist using a known photolithography method. The passivation layer 21 may be formed by another method of covering the first electrode 16 with a material other than the photoresist.

6 to 8 show the process of making the elastic body 12. First, as shown in FIG. 6, a mold 23 is formed on a mold substrate 22. As the mold 23, a photoresist may be used. Since the photoresist is good for patterning a desired shape, it can be easily used to make the mold 23 into a shape corresponding to the groove 15 of the elastic body 12. When the mold 23 is made of photoresist, the mold 23 may be formed by spin coating the photoresist on the mold substrate 22 and then patterning the photoresist by photolithography. The mold 23 may be formed on the surface of the mold substrate 22 by other methods in addition to these materials.

After the mold 23 is formed, a liquid stretchable material 24 is applied to the mold substrate 22, as shown in FIG. As the stretchable material 24, an elastomer such as PDMS may be used. When the stretchable material 24 is cured, it is separated from the mold substrate 22 and the mold 23. As shown in FIG. 8, the cured stretchable material 24 forms a stretchable body 12 having grooves 15 shaped to correspond to the mold 23.

9 to 14 illustrate a process of forming the second electrode 19 and the stretchable terminal 20 on the stretchable body 12. As shown in FIGS. 8 and 11, the stretchable body 12 at room temperature (eg, 25 ° C.) is brought to a high temperature (eg, 200 ° C.) at which the stretchable body 12 can maximally expand without plastic deformation. Upon heating, the stretchable body 12 expands, as shown in FIGS. 9 and 12.

In this expanded state, as illustrated in FIGS. 9 and 13, the metal film 25 is deposited on the ceiling 13 and the side wall 14 of the stretchable body 12. As the first electrode 16, chromium (Cr) and gold (Au) may be used as the metal layer 25, and an E-beam deposition method may be used as the deposition method. When using the E-beam deposition method, it is possible to heat the stretchable body 12 using the E-beam evaporator without the need for a separate heating means.

After depositing the metal film 25 on the stretchable body 12 and dropping the temperature of the stretched stretched body 12 to room temperature (eg, 25 ° C.), as shown in FIGS. 10 and 14, the stretchable body 12 is stretched. As the body 12 shrinks to its original state, compressive stress is applied to the metal film 25 to form a corrugated second electrode 19 and an elastic terminal 20. The corrugated second electrode 19 and the stretchable terminal 20 expand as the stretchable body 12 expands as the stretchable body expands, and when the stretchable body 12 contracts, the wrinkled second electrode 19 and the stretchable terminal 20 shrink. Therefore, the second electrode 19 and the elastic terminal 20 have the same elasticity as the elastic body 12, and do not easily crack or break even if used repeatedly.

Finally, as illustrated in FIG. 15, the manufacturing of the gap sensor 10 is performed by attaching the flexible body 12 having the second electrode 19 to the substrate 11 having the first electrode 16 formed thereon. Is done. Attachment of the substrate 11 and the flexible body 12 may be performed by an adhesive method or various physical and chemical methods. When attaching the substrate 11 and the stretchable body 12, the stretchable terminal 20 is connected to the connection terminal 18 to supply a voltage to the second electrode 19.

FIG. 16 is an enlarged view of the second electrode 19 or the flexible terminal 20 of the gap sensor 10 according to the present invention after repeated contraction and expansion, and it can be seen that the corrugation is not broken or broken. . On the contrary, FIG. 17 shows a general electrode, and it can be seen that the cracks appear after repeated contraction and expansion.

When using the gap sensor 10 according to an embodiment of the present invention, since the elastic body 12 is deformed only in the up and down direction, both the second electrode 19 and the flexible terminal 20 need not be stretched. Even if only the stretchable terminal 20 is stretched, there is no problem in operation. Therefore, the second electrode 19 may have the same shape as the first electrode 16, and only the flexible terminal 20 may have a wrinkle. In this case, the second electrode 19 and the flexible terminal 20 are made separately through separate processes, and the order of these forming processes may vary depending on the case.

In addition, when the second electrode 19 is directly connected to the voltage supply means in the ceiling portion 13 of the stretchable body 12 without using the connection terminal 18 provided on the substrate 11, the stretchable terminal 20 is omitted. May be

The manufacturing method of the gap sensor according to the embodiment of the present invention described above is applied to the MEMS technology as it is, by using such a manufacturing method of the gap sensor it is possible to mass-produce a precise gap sensor.

Hereinafter, with reference to the accompanying drawings will be described with respect to the wear measurement apparatus of the barrel having the above-mentioned gap sensor and the wear measurement method of the barrel using the same.

As shown in FIG. 18, the gap sensor 10 together with the support 40 constitutes a wear measurement apparatus 40 of the barrel that can measure wear of the barrel 30. The support 40 has an outer contact portion 42 in contact with the outer surface of the barrel 30 and a support 43 inserted into the barrel 30. The gap sensor 10 is fixed to the support 43. The gap sensor 10 measures the abrasion of the barrel 30 by measuring a change in height of the steel wire 31 formed on the inner surface of the barrel 30 and the barrel 30 is inserted therein together with the support 43. can do.

In order to measure the wear of the barrel 30, first, the support unit 43 to which the gap sensor 10 is coupled is brought into contact with the outer surface 42 of the support 40 against the outer surface of the barrel 30. Insert inside of. Since the barrel 30 has a cylindrical shape and its inner diameter is constant, when the support 43 is inserted into the barrel 30 while the external contact portion 42 is in contact with the outer surface of the barrel 30, the gap sensor ( 10) can be placed in a certain measuring position. The wear measurement position of the barrel 30 is a portion where the wear of the barrel 30 occurs most, and the 12 o'clock or 6 o'clock direction of the portion where the steel wire 31 starts is preferable. Of course, the measurement position can be changed in various ways.

As shown in FIG. 19, the gap sensor 10 is inserted into the barrel 30 with the substrate 11 fixed to the support 43, and the surface of the ceiling 13 of the stretchable body 12. Is compressed in contact with the measuring portion 32 protruding relatively between two adjacent steel wires 31. In this state, voltage is supplied to the first electrode 16 and the second electrode 19, respectively, and the capacitance generated between the first electrode 16 and the second electrode 19 before shooting is measured. After that, the gap sensor 10 is removed and fired. Then, after the shooting is finished, the gap sensor 10 is positioned at the same measurement position using the support 40.

20 shows a state in which the measuring portion 32 between the two steel wires 31 of the barrel 30 after being fired is worn. When the gap sensor 10 is positioned in the worn measuring portion 32, the elastic body 12 ) Is compressed in contact with this measuring portion 32. At this time, the elastic deformation amount of the elastic body 12 is smaller than the elastic deformation amount by the same measurement portion 32 before shooting. As a result, the distance between the first electrode 16 and the second electrode 19 is farther than when measured before shooting, and the capacitance between the first electrode 16 and the second electrode 19 changes. Therefore, if the relationship between the space | interval between the 1st electrode 16 and the 2nd electrode 19, and the magnitude | size of an electrostatic capacitance is known, the wear of the barrel 30 can be measured by measuring an electrostatic capacitance.

FIG. 21 schematically illustrates an experimental apparatus for checking the change in capacitance due to the change in the distance between the first electrode 16 and the second electrode 19. In practice, the wear measurement of the barrel 30 is to fix the gap sensor 10 and to measure the change in capacitance according to the height change of the inner surface of the barrel 30, but the experiment is to fix the inner surface of the barrel 30 and to measure the gap sensor. It corresponds to the measurement of the capacitance change of the gap sensor 10 while varying the height of (10).

The gap sensor 10 is fixed on the nano stage 50, and the fixing member 51 is positioned on the gap sensor 10. In the initial state, the gap sensor 10 is not in contact with the fixing member 51, but when the nano stage 50 is operated, the gap sensor 10 is raised toward the fixing member 51 to be in contact with the fixing member 51. The nano stage 50 is controlled by the nano stage controller 52 to raise the gap sensor 10 by 1 μm. When the gap sensor 10 is deformed in contact with the fixing member 51, the capacitance measuring instrument 53 measures the capacitance of the gap sensor 10, and the measured value is stored in the computer 54. Here, the MDT693 of THORLABS, Inc. was used as the nano stage controller 52, and the AD7745 Evaluation Board, manufactured by Analog Devices, was used as the capacitance measuring instrument 53.

The gap sensor 10 used in the experiment has a substrate 11 made of glass and an elastic body 12 made of PDMS. The flexible body 12 has a thickness of 180 μm of the ceiling 13, 200 μm of the thickness of the four side walls 14, a width of the groove 15 of 5000 μm × 7000 μm, and a depth of the groove 15. 20 micrometers. The first electrode 16 is composed of a chromium layer and a gold layer. The width of the first electrode 16 is 3000 μm × 3000 μm, the thickness of the chromium layer is 200 μs, and the gold layer is 800 μm. The second electrode 19 is made of a chromium layer and a gold layer having the same thickness as the first electrode 16, and the width thereof is 5000 µm x 5000 µm. The connecting terminal 18 is made of a chromium layer and a gold layer having the same thickness as the first electrode 16, and the width thereof is 1000 µm x 2000 µm.

The graphs shown in FIGS. 22 and 23 show experimental results. As shown in the graph, the experiment was able to confirm the change in capacitance for 1㎛ displacement, the gap sensor 10 was confirmed that the resolution is 1㎛. In addition, in order to measure the wear of the barrel 30 at the minimum water repellency, it is necessary to measure a change in abrasion depth of 1 μm to 12 μm. And it was found.

In the experiment, the capacitance measurement value was repeatedly measured for a 1 μm displacement, and 100 of the repeated measurements were randomly sampled to obtain an average, and the error between the average value and the remaining values was confirmed. The maximum error was about 35 fF and the maximum displacement error was about 0.35 μm. FIG. 23 is an enlarged view of a portion corresponding to 1 μm to 12 μm displacement in FIG. 22. Referring to FIG. 23, it can be seen that the capacitance change of the gap sensor 10 is linear in the displacement of 1 μm to 12 μm. In the initial state where no deformation occurs, the capacitance of the gap sensor 10 is about 2.75 pF, and a capacitance change of about 100 fF is observed for a displacement of 1 μm.

Using the data obtained through the experiment, the wear of the barrel 30 can be easily measured by measuring the capacitance of the gap sensor 10 before and after shooting. For example, using FIG. 23, when the capacitance of the gap sensor 10 before firing is 3.0 pF and the capacitance of the gap sensor 10 after firing is 3.2 pF, it is understood that abrasion of about 2 μm occurred by shooting. Can be.

As described above, according to the present invention, the wear change of the barrel 30 can be measured at the minimum water repellency without leaving indentation on the barrel 30 during wear measurement as in the conventional diamond indenter method.

In the present invention, the gap sensor 10 can be applied not only to the abrasion measurement device 40 of the barrel as described above, but also to various fields requiring abrasion measurement such as a machine or a firearm that requires precise operation.

The present invention described above is not limited to the configuration and operation as shown and described, and various changes and modifications are possible within the spirit and scope of the appended claims.

1 is an exploded perspective view showing a part of the gap sensor in accordance with an embodiment of the present invention.

2 is a perspective view showing a gap sensor according to an embodiment of the present invention.

3 is a cross-sectional view showing a gap sensor according to an embodiment of the present invention.

4 to 15 show a process of manufacturing a gap sensor according to an embodiment of the present invention.

16 is an enlarged photograph of a second electrode of a gap sensor according to an exemplary embodiment of the present invention.

FIG. 17 is a photograph illustrating a split state of a general electrode through repeated contraction and expansion processes as compared with a second electrode of a gap sensor according to an exemplary embodiment of the present invention.

Figure 18 shows a method of measuring the wear of the barrel using the wear measurement apparatus of the barrel according to an embodiment of the present invention.

19 and 20 illustrate a process of measuring the wear of the barrel using the wear measurement apparatus of the barrel shown in FIG. 18.

21 shows an experimental device for measuring the capacitance change according to the deformation of the gap sensor according to an embodiment of the present invention.

22 and 23 are graphs showing the result of the capacitance change according to the deformation of the gap sensor according to an embodiment of the present invention.

♣ Explanation of symbols for the main parts of the drawing ♣

10: gap sensor 11: substrate

12: elastic body 13: the ceiling

14: side wall portion 15: groove

16, 19: 1st, 2nd electrode 17: terminal

18: connection terminal 20: elastic terminal

21: protective film 22: substrate for mold

23 mold 24 elastic material

25 metal film 30 barrel

31: steel wire 32: measurement part

40 wear measurement device 41 support

42: external contact 43: support

50: nano stage 51: fixing member

52: nano stage controller 53: capacitance measuring instrument

54: computer

Claims (22)

A substrate; A first electrode coupled to a surface of the substrate to receive a voltage; A second electrode facing the first electrode to receive a voltage so that capacitance can be generated between the first electrode and the first electrode; A ceiling part disposed to face the first electrode and coupled with the second electrode, a side wall part protruding from the ceiling part and coupled to the substrate to separate the ceiling part from the first electrode, and a voltage to the second electrode; It is coupled to the side wall portion for supplying and has a plurality of wrinkles, when the side wall portion is made of an elastic terminal that can be expanded as the wrinkles are stretched, stretchable body made of an elastic material capable of elastic deformation; includes Gap sensor, characterized in that. delete delete The method of claim 1, And a connection terminal coupled to the flexible terminal and coupled to the substrate to supply a voltage to the second electrode. The method of claim 1, And the second electrode has a plurality of wrinkles so that the second electrode can stretch together when the ceiling portion is stretched. The method of claim 1, And a protective film interposed between the first electrode and the second electrode to prevent mutual contact between the first electrode and the second electrode. The method of claim 6, The protective film is coupled to the surface of the first electrode so as to completely cover the first electrode. The method of claim 7, wherein The protective film is a gap sensor, characterized in that made of a photoresist. The method of claim 7, wherein And a terminal coupled to the substrate to be connected to the first electrode to supply a voltage to the first electrode, the end of the terminal being exposed to the outside of the passivation layer. The method of claim 1, The elastic body is a gap sensor, characterized in that made of an elastomer. Forming a first electrode on the surface of the substrate; Forming a stretchable body having a ceiling portion and a side wall portion protruding from the ceiling portion from a stretchable material; Forming a second electrode on the ceiling; Forming a connection terminal on the substrate; Forming a stretchable terminal that can be stretched together with the sidewall portion to electrically connect the second electrode and the connection terminal; And coupling the stretchable body to the substrate such that the first electrode and the second electrode face each other in a state where they are spaced apart from each other. The method of claim 11, And forming a passivation layer covering the first electrode after the forming of the first electrode. 13. The method of claim 12, The forming of the passivation layer may include applying a liquid photoresist to the surface of the substrate to cover the first electrode, and curing and patterning the liquid photoresist. Method of manufacturing the gap sensor. delete The method of claim 11, The forming of the flexible terminal may include heating and expanding the sidewall portion, depositing a metal film on the expanded sidewall portion, and contracting the sidewall portion to apply compressive stress to the metal film. Method for producing a gap sensor comprising the step of forming a wrinkle. The method of claim 11, The forming of the stretchable body using a stretchable material may include forming a mold on a surface of a mold substrate, applying a liquid stretchable material to cover the mold on the mold substrate, and forming the stretchable material. After curing, the method of manufacturing a gap sensor comprising the step of separating from the mold. In the wear measurement apparatus of the barrel for measuring the wear on the inner surface of the barrel in which the steel wire is formed, A substrate, a first electrode coupled to a surface of the substrate to receive a voltage, and a second electrode facing the first electrode to generate a capacitance between the first electrode and a voltage; And an elastic body coupled to the substrate to support the second electrode so as to be spaced apart from the first electrode, and an elastic material capable of elastic deformation so that a distance from the first electrode of the second electrode is variable. A gap sensor; And a support having a support portion that can be inserted into the barrel and supports the substrate such that the elastic body is elastically deformed in contact with the inner surface of the barrel. The method of claim 17, And the support further includes an external contact portion coupled to the support portion and in contact with the outer surface of the barrel so that the insertion position of the gap sensor can be kept constant. The method of claim 17, The stretchable body includes a ceiling portion facing the first electrode and to which the second electrode is coupled, and a sidewall portion protruding from the ceiling portion and coupled to the substrate to separate the ceiling portion from the first electrode. Abrasion measuring device for barrel. The method of claim 19, It is coupled to the side wall portion for supplying a voltage to the second electrode, and has a plurality of wrinkles, the wear resistance measuring device of the barrel further characterized in that it stretches as the wrinkles are expanded when the side wall portion is stretched . The method of claim 17, And a protective film interposed between the first electrode and the second electrode to prevent mutual contact between the first electrode and the second electrode. Positioning a gap sensor having a stretchable body and two electrodes having a variable spacing according to the deformation of the stretchable body at a measurement position inside the barrel such that the stretchable body is deformed in contact with the inner surface of the barrel; Supplying a voltage to each of the two electrodes, and measuring capacitance generated between the two electrodes before shooting; Removing the gap sensor from the barrel and then shooting with the barrel; Positioning the gap sensor at the measurement position after shooting; Supplying a voltage to each of the two electrodes, and measuring capacitance generated between the two electrodes after shooting; And measuring the wear of the barrel by comparing the capacitance generated between the two electrodes before and after shooting.

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