KR101116658B1 - Coupling and apparatus for supplying a processing liquid including the same - Google Patents

Abstract

In the apparatus for supplying the processing liquid onto the substrate, the supply piping has nozzles for supplying the processing liquid onto the substrate and is connected to the main piping through a coupling. The coupling may include a first sleeve connected to the main pipe, a body having a tube shape connected to the first sleeve, a second sleeve inserted into the body and connected to the supply pipe, and the supply pipe rotatable. And a retainer having a plurality of balls disposed between the body and the second sleeve, and a plurality of holes for receiving the balls to prevent the balls from contacting each other. Therefore, the supply pipe can be stably swinged together with the second sleeve, so that the treatment liquid can be uniformly supplied onto the substrate.

Description

Coupling and apparatus for supplying a processing liquid including the same}

Embodiments of the present invention relate to a coupling and a treatment liquid supply apparatus including the same. More particularly, the present invention relates to a coupling for connecting a processing liquid supply pipe for supplying a processing liquid onto a substrate in the manufacture of a flat panel display device to a main pipe, and a processing liquid supply device including the same.

Electrical circuit patterns may be formed on a substrate made of silicon or glass in the manufacture of a flat panel display device. The circuit patterns may be formed by performing a series of unit processes such as a deposition process, a photolithography process, an etching process, a strip process, and a cleaning process.

In particular, the unit processes such as etching, stripping, and cleaning may be performed by a wet method using a treatment liquid such as an etching solution, a strip solution, a cleaning solution, a rinse solution, and the like.

The substrate processing apparatus using the processing liquid as described above is transferred by the substrate transfer module and the substrate transfer module for transferring the substrate in the horizontal direction by using a plurality of transfer rollers in the treatment tank and the processing tank is performed. It may include a processing liquid supply device for supplying the processing liquid onto the substrate.

The processing liquid supply device may include a plurality of processing liquid supply pipes extending in the horizontal direction, and may include a driving unit for swinging the pipes at a predetermined angle. A power transmission unit may be provided between the driving unit and the processing liquid supply pipes to transmit a driving force, and the processing liquid supply pipes may be rotatably connected to the main pipe through couplings.

The couplings may include a first sleeve connected to the main pipe and a second sleeve connected to the treatment liquid supply pipe, and the plurality of couplings may be rotatable between the first sleeve and the second sleeve. Balls may be provided. That is, the second sleeve may swing with the processing liquid supply pipe by the balls. However, the balls may be in contact with each other inside the coupling, whereby the balls may be broken or a large amount of particles may be generated. In addition, the shaking of the processing liquid supply pipe may not be normally performed due to the breakage of the ball, whereby the processing liquid may not be uniformly supplied onto the substrate, thereby causing a defect in the processing of the substrate.

Embodiments of the present invention for solving the problems as described above is an object of the present invention to provide a coupling for the rocking motion of the treatment liquid supply pipe is made stable.

Embodiments of the present invention have another object to provide a treatment liquid supply apparatus including a coupling as described above.

According to embodiments of the present invention for achieving the above object, the coupling for connecting the first pipe and the second pipe, the first sleeve is connected to the first pipe, the tube shape is connected to the first sleeve A body, a second sleeve inserted into the body and connected to the second pipe, a plurality of balls disposed between the body and the second sleeve so that the second pipe is rotatable, and the balls contact each other. It may include a retainer having a plurality of holes for receiving the balls in order to prevent that.

According to embodiments of the present invention, the inner portion of the body may be provided with a ring-shaped protrusion, the end of the second sleeve which is inserted into the body may be provided with a flange, the ball and the protrusion It may be arranged between the flanges.

According to embodiments of the present invention, the coupling may include a third sleeve coupled to the other end of the second sleeve to be inserted into the body, and a plurality of couplings disposed between the third sleeve and the protrusion of the body. The second retainer may further include a second retainer having second balls and a plurality of second holes for receiving the second balls to prevent the second balls from contacting each other.

According to embodiments of the present invention, a through hole for supplying the liquid material flowing from the first pipe to the second pipe to the balls may be formed through the second sleeve.

According to embodiments of the present invention, the coupling is disposed between the first sleeve and the second sleeve and is in contact with the sleeve washer mounted on the end of the second sleeve inserted into the body. And an inner sleeve having a round ring-shaped protrusion, and a pusher mounted on the first sleeve and applying a force to the inner sleeve so that the protrusion of the inner sleeve adheres to the sleeve washer using an elastic restoring force of a spring. have.

According to embodiments of the present invention, the coupling may further include a positioning member coupled to the first sleeve through the inner sleeve and fixing the inner sleeve so as not to rotate with the second sleeve. .

According to embodiments of the present invention for achieving the above another object, the processing liquid supply apparatus is a main pipe for supplying a processing liquid for processing a substrate, and is connected to the main pipe in parallel with the substrate on the top of the substrate A supply pipe having a plurality of nozzles for supplying the treatment liquid onto the substrate, the drive unit configured to swing the supply pipe so that the nozzles pendulum at a predetermined angle, and the supply pipe to the main pipe. It may include a coupling to connect to. The coupling may include a first sleeve connected to the main pipe, a body having a tube shape connected to the first sleeve, a second sleeve inserted into the body and connected to the supply pipe, and the supply pipe may rotate. And a retainer having a plurality of balls disposed between the body and the second sleeve, and a plurality of holes for receiving the balls to prevent the balls from contacting each other.

According to the embodiments of the present invention as described above, the supply pipe swinging with a plurality of nozzles for supplying the processing liquid on the substrate may be connected to the main pipe through the coupling. Here, the coupling may include a first sleeve coupled to the main pipe, a second sleeve coupled to the supply pipe, and a body in the form of a tube coupled to the first sleeve to surround the second sleeve. Rotation of the supply pipe and the second sleeve is possible by means of a plurality of balls disposed between the body and the second sleeve and a retainer for fixing the mutual positions of the balls.

Since the balls are prevented from contacting each other by the retainer in the coupling as described above, damage or breakage of the balls can be prevented, and particle generation can be prevented accordingly. In particular, since the treatment liquid capable of functioning as lubricating oil can be supplied to the balls through the second sleeve, particle generation due to wear of the balls can be greatly reduced. As a result, the rocking motion of the supply pipe can be made stable, and accordingly, a defective occurrence rate can be greatly reduced in the processing process of the substrate.

1 is a schematic configuration diagram illustrating a treatment liquid supply apparatus including a coupling according to an exemplary embodiment of the present invention.
FIG. 2 is a schematic plan view for explaining the processing liquid supply device shown in FIG. 1.
FIG. 3 is a schematic side view for explaining the processing liquid supply device shown in FIG. 1.
4 is a schematic cross-sectional view for describing the coupling illustrated in FIG. 1.
FIG. 5 is a schematic plan view for explaining the first retainer illustrated in FIG. 4.

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail below with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

When an element is described as being disposed or connected on another element or layer, the element may be placed or connected directly on the other element, and other elements or layers may be placed therebetween. It may be. Alternatively, where one element is described as being directly disposed or connected on another element, there may be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Also, unless stated otherwise, all terms including technical and scientific terms have the same meaning as would be understood by one of ordinary skill in the art having ordinary skill in the art. Such terms, such as those defined in conventional dictionaries, will be construed as having meanings consistent with their meanings in the context of the related art and description of the invention, and ideally or excessively intuitional unless otherwise specified. It will not be interpreted.

Embodiments of the present invention are described with reference to cross-sectional illustrations that are schematic illustrations of ideal embodiments of the present invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected. Accordingly, embodiments of the invention are not to be described as limited to the particular shapes of the areas described as the illustrations, but include deviations in the shapes, and the areas described in the figures are entirely schematic and their shapes. Are not intended to describe the precise shape of the region nor are they intended to limit the scope of the invention.

1 is a schematic diagram illustrating a treatment liquid supply apparatus including a coupling according to an embodiment of the present invention, and FIG. 2 is a schematic plan view illustrating the treatment liquid supply apparatus illustrated in FIG. 1. 3 is a schematic side view for explaining the treatment liquid supply device shown in FIG. 1.

1 to 3, the processing liquid supply apparatus 100 according to an embodiment of the present invention may etch, strip, clean, or rinse a substrate 10 to be processed, such as a glass substrate, in the manufacture of a flat panel display device. It can be used to perform a unit treatment process using a treatment liquid, such as.

The treatment process may be performed in the treatment tank 20 through which the substrate 10 passes, and the treatment tank 20 may have inlets 22 and outlets 24 on sidewalls facing each other. . The substrate 10 may be transported in a horizontal transport direction connecting the inlet 22 and the outlet 24 by a substrate transport unit 30, and the substrate 10 may be transported while the substrate 10 is transported. The treatment liquid may be supplied onto the bed.

Although not shown in detail, the substrate transfer unit 30 includes a plurality of rotation axes 32 arranged in the substrate transfer direction and extending in another horizontal direction perpendicular to the substrate transfer direction, and the rotation axes 32. A plurality of conveying rollers 34 for supporting the substrate 10 and rotating together with the rotating shafts 32 to convey the substrate 10, and disposed outside the processing tank 20. And a driving unit (not shown) for rotating the rotating shafts 32. In particular, the drive unit may include a motor generating a rotational force, a belt transmission mechanism for transmitting the rotational force, and a plurality of magnetic pulleys for transmitting the rotational force from the belt transmission mechanism to the rotation shafts 32 using a magnetic force. Can be.

The processing liquid supply device 100 extends in parallel with the substrate 10 from an upper portion of the substrate 10 and supplies at least one supply pipe 110 for supplying the processing liquid onto the substrate 10. It may include. For example, the processing liquid supply device 100 may include a plurality of processing liquid supply pipes 110 extending in parallel with the transfer direction of the substrate 10. The supply pipes 110 may be arranged in a direction perpendicular to the transfer direction of the substrate 10.

Each of the treatment liquid supply pipes 110 may have a plurality of nozzles 112 to supply the treatment liquid onto the substrate 10, and the treatment liquid may be uniformly onto the substrate 10. It may be swung to be fed.

First ends of the processing liquid supply pipes 110 may be connected to the main pipe 120 supplying the processing liquid by the couplings 200. The couplings 200 will be described later.

In addition, the treatment liquid supply apparatus 100 may provide a driving unit 130 to provide a driving force and the driving force to the treatment liquid supply pipes 110 to oscillate the treatment liquid supply pipes 110 as described above. It may include a power transmission unit 140 for transmitting. A motor may be used as the driving unit 130.

On the other hand, as shown in the processing tank 20 extends in a direction perpendicular to the transfer direction of the substrate 10, the partition 42 and the lower panel 44 inside the processing tank 20 Power transmission chamber 40 may be provided that is isolated from the space.

The power transmission unit 140 may include a driving disk 142 connected to the driving unit 130, a plurality of driving shafts 144 disposed in the power transmission chamber 40, and a plurality of driving disks 144 mounted on the driving shafts 144. The first magnetic pulleys are connected to the first magnetic pulleys 146, the second magnetic pulleys 148 mounted on the processing liquid supply pipes 110, and the first magnetic pulleys 146 to reciprocate. A long axis bar 150 for oscillating the 146 and a short bar coupled to the long axis bar 150 and connected to one side of the drive disk 142 spaced apart from the center of the drive disk 142. 152 may include.

The drive shafts 144 may be disposed to be rotatable in the power transmission chamber 40 and may have a common central axis with the processing liquid supply pipes 110. For example, a support member 154 may be disposed in the power transmission chamber 40, and the driving shafts 144 may be disposed through the support member 154. A plurality of bearings 156 may be mounted on the support member 154 to support the drive shafts 144 so that the drive shafts 144 can rotate.

The first magnetic pulleys 146 may be mounted to the first ends of the driving shafts 144 so as to be adjacent to the partition wall 42, and a plurality of magnetic members may be formed to transmit the driving force. The magnetic pulleys 146 may be mounted in the circumferential direction.

The second magnetic pulleys 148 may be mounted to second ends of the treatment liquid supply pipes 110. In particular, the second magnetic pulleys 148 may be disposed to face the first magnetic pulleys 146 with the partition 42 therebetween, and a plurality of magnetic members may be used to transmit the driving force. Each of the two magnetic pulleys 148 may be mounted in the circumferential direction. That is, the driving force may be transmitted to the processing liquid supply pipes 110 by a magnetic force acting between the first and second magnetic pulleys 146 and 148.

The short bar 152 is connected to the drive disk 142 at an eccentric position, that is, spaced apart from the center of rotation of the drive disk 142, and is coupled to the long axis bar 150, so that the The rotary motion is converted into reciprocating motion by the drive disk 142, the short bar 152 and the long axis bar 150, and the reciprocating motion moves the first magnetic pulleys 146 connected to the long axis bar 150. You can swing. As a result, the supply pipes 110 and the nozzles 112 may be oscillated, i.e., pendulum, within a predetermined angle, so that the treatment liquid may be uniformly provided on the substrate 10. .

4 is a schematic cross-sectional view for describing the coupling illustrated in FIG. 1, and FIG. 5 is a schematic plan view for explaining the first retainer illustrated in FIG. 4.

4 and 5, the coupling 200 may be used to connect the first pipe and the second pipe. According to an embodiment of the present invention, the coupling 200 may be connected between the main pipe 120 and the supply pipe 110, in particular, so that the supply pipe 110 is rotatable, that is, to the drive unit 130 The supply pipe 110 may be connected to the main pipe 120 to be swinged by. The coupling 200 may be directly connected to the main pipe 120, or may be connected to the main pipe 120 through a connection pipe 122 branched from the main pipe 120 as shown.

The coupling 200 is inserted into the first sleeve 202 connected to the main pipe 120, the body 204 in the form of a tube connected to the first sleeve 202, and into the body 204. A second sleeve 206 connected to the supply pipe 110 and a plurality of first balls 208 disposed between the body 204 and the second sleeve 206 such that the supply pipe 110 is rotatable. And a first retainer 210 having a plurality of first holes 210A for accommodating the first balls 208 to prevent the first balls 208 from contacting each other. That is, by maintaining the mutual distance between the first balls 208 constant by using the first retainer 210, it is possible to prevent the first balls 208 from being damaged or broken in contact with each other, Particles may be prevented from being caused by the first balls 208 contacting each other.

The body 204 may have a tube shape and may be coupled to the first sleeve 202 using fixing bolts 212. An inner surface of the body 204 may be provided with a ring-shaped protrusion 204A, and a ring-shaped flange 206A is provided at the first end of the second sleeve 206 inserted into the body 204. It may be provided. The first balls 208 and the first retainer 210 may be disposed between the protrusion 204A of the body 204 and the flange 206A of the second sleeve 206.

In addition, the coupling 200 may further include a third sleeve 214 coupled to an outer surface of the other end of the second sleeve 206. The third sleeve 214 may be inserted into the body 204, and the second balls 216 and the second ball may be disposed between the third sleeve 214 and the protrusion 204A of the body 204. A second retainer 218 having a plurality of second holes (not shown) for accommodating the balls 216 may be disposed.

Meanwhile, the first and second balls 208 and 216 may be supplied with a liquid substance as lubricating oil in order to reduce particle generation. According to one embodiment of the present invention, the second sleeve 206 to supply the processing liquid flowing from the main pipe 120 to the supply pipe 110 to the first and second balls 208, 216. A through hole 206B may be formed, and the treatment liquid supplied to the first and second balls 208 and 216 through the through hole 206B may function as a lubricant to reduce particle generation. In addition, a through hole 204B may be formed in the body 204 to discharge the treatment liquid supplied to the first and second balls 208 and 216.

As described above, the second sleeve 206 may be connected to the supply pipe 110 to rotate, for example, oscillate with the supply pipe 110. According to one embodiment of the invention, the coupling 200 is an inner sleeve 220 disposed between the first sleeve 202 and the second sleeve 206 and the second sleeve 206 is stable It may further include a pusher 222 for applying a force to the inner sleeve 220 in order to closely contact the flange 206A of the second sleeve 206 to the first balls 208 so as to oscillate. .

In particular, a sleeve washer 224 made of a ceramic material may be mounted at an end of the second sleeve 206, and the inner sleeve 220 may have a circular ring-shaped protrusion 220A in close contact with the sleeve washer 224. ) In addition, the pusher 222 may be mounted to the first sleeve 202 and may apply a force to the inner sleeve 220 by using a spring elastic restoring force. In particular, a groove into which the pusher 222 is inserted may be formed in the first sleeve 202, and a coil spring 226 may be disposed in the groove to provide the elastic restoring force.

In addition, the coupling 200 is coupled to the first sleeve 202 through the inner sleeve 220 to prevent the inner sleeve 220 from rotating with the second sleeve 206. It may further include a position fixing member 228. Specifically, the inner sleeve 220 may be provided with a through hole as shown, and a bolt used as the position fixing member 228 may be coupled to the first sleeve 202 through the through hole. have.

According to the embodiments of the present invention as described above, the supply pipe swinging with a plurality of nozzles for supplying the processing liquid on the substrate may be connected to the main pipe through the coupling. Here, the coupling may include a first sleeve coupled to the main pipe, a second sleeve coupled to the supply pipe, and a body in the form of a tube coupled to the first sleeve to surround the second sleeve. Rotation of the supply pipe and the second sleeve is possible by means of a plurality of balls disposed between the body and the second sleeve and a retainer for fixing the mutual positions of the balls.

Since the balls are prevented from contacting each other by the retainer in the coupling as described above, damage or breakage of the balls can be prevented, and particle generation can be prevented accordingly. In particular, since the treatment liquid capable of functioning as lubricating oil can be supplied to the balls through the second sleeve, particle generation due to wear of the balls can be greatly reduced.

As a result, the rocking motion of the supply pipe can be made stable, and accordingly, a defective occurrence rate can be greatly reduced in the processing process of the substrate.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

10: substrate 20: treatment tank
30 substrate transfer unit 40 power transmission chamber
100: processing liquid supply device 110: supply piping
112: nozzle 120: main pipe
122: connection pipe 130: drive unit
140: power transmission unit 200: coupling
202: first sleeve 204: body
206: second sleeve 208, 216: ball
210, 218: Retainer 214: Third Sleeve
220: inner sleeve 222: pusher
224: sleeve washer 226: spring
228 position fixing member

Claims (7)

In the coupling for connecting the first pipe and the second pipe,
A first sleeve connected to the first pipe;
A body in the form of a tube connected to said first sleeve;
A second sleeve inserted into the body and connected to the second pipe;
A plurality of balls disposed between the body and the second sleeve such that the second pipe is rotatable; And
A retainer having a plurality of holes for receiving the balls to prevent the balls from contacting each other,
The inner ring of the body is provided with a ring-shaped projection, the end of the second sleeve is inserted into the body is provided with a flange, the coupling is characterized in that the ball is disposed between the projection and the flange. delete The apparatus of claim 1, further comprising: a third sleeve coupled to the other end of the second sleeve to be inserted into the body;
A plurality of second balls disposed between the third sleeve and the protrusion of the body; And
And a second retainer having a plurality of second holes for receiving the second balls to prevent the second balls from contacting each other. The coupling as claimed in claim 1, wherein a through hole for supplying the balls with the liquid material flowing from the first pipe to the second pipe is formed through the second sleeve. 2. The sleeve of claim 1, further comprising: a sleeve washer mounted to an end of the second sleeve inserted into the body;
An inner sleeve disposed between the first sleeve and the second sleeve and having a round ring shaped protrusion in contact with the sleeve washer; And
And a pusher mounted on the first sleeve and applying a force to the inner sleeve such that the protrusion of the inner sleeve is in close contact with the sleeve washer using the elastic restoring force of the spring. 6. The coupling of claim 5, further comprising a positioning member coupled to the first sleeve through the inner sleeve and fixing the inner sleeve so as not to rotate with the second sleeve. A main pipe for supplying a processing liquid for processing a substrate;
A supply piping connected to the main piping and extending in parallel with the substrate at an upper portion of the substrate and having a plurality of nozzles for supplying the treatment liquid onto the substrate;
A drive unit oscillating the supply pipe so that the nozzles pendulum at a predetermined angle; And
A coupling connecting the supply pipe to the main pipe,
The coupling may include a first sleeve connected to the main pipe, a body in the form of a tube connected to the first sleeve, a second sleeve inserted into the body and connected to the supply pipe, and the supply pipe rotatable. A retainer having a plurality of balls disposed between the body and the second sleeve, and a plurality of holes for receiving the balls to prevent the balls from contacting each other,
A protruding portion having a ring shape is provided inside the body, and a flange is provided at an end portion of the second sleeve inserted into the body, and the balls are disposed between the protruding portion and the flange. .

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