KR101101244B1 - Method for manufacturing high density SiCf/SiC composites - Google Patents

Method for manufacturing high density SiCf/SiC composites Download PDF

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KR101101244B1
KR101101244B1 KR1020090042051A KR20090042051A KR101101244B1 KR 101101244 B1 KR101101244 B1 KR 101101244B1 KR 1020090042051 A KR1020090042051 A KR 1020090042051A KR 20090042051 A KR20090042051 A KR 20090042051A KR 101101244 B1 KR101101244 B1 KR 101101244B1
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silicon carbide
slurry
powder
binder
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KR20100123048A (en
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김원주
윤당혁
이종현
박지연
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한국원자력연구원
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    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
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    • D06MTREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M11/00Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
    • D06M11/84Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising combined with mechanical treatment
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    • D10B2401/063Load-responsive characteristics high strength
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    • D10INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
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Abstract

본 발명은 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법에 관한 것으로서, 보다 상세하게는, 고효율 방사형 히터, 엔진부품, 가스터어빈 및 차세대 원자로용 구조 재료로서 사용할 수 있는 초고강도의 고온용 세라믹스 섬유를 함유한 소결체의 밀도 및 기계적인 강도를 증진시키는 상기 복합체의 제조방법을 제공한다.The present invention relates to a method for producing a high density silicon carbide fiber-reinforced silicon carbide composite (SiC f / SiC), and more particularly, ultra-high strength that can be used as a structural material for high efficiency radial heaters, engine parts, gas turbines and next-generation reactors The present invention provides a method for producing the composite, which enhances the density and mechanical strength of the sintered body containing the high temperature ceramic fibers.

탄화규소 섬유강화 탄화규소 복합체, SiC 분말, SiC 직조섬유, 진공침착 Silicon Carbide Fiber Reinforced Silicon Carbide Composite, SiC Powder, SiC Woven Fiber, Vacuum Deposition

Description

고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법{Method for manufacturing high density SiCf/SiC composites}Method for manufacturing high density silicon carbide fiber-reinforced silicon carbide composites (SiCb / SiC composite) {Method for manufacturing high density SiCf / SiC composites}

본 발명은 고밀도의 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법에 관한 것이다. 보다 상세하게는, 고효율 방사형 히터, 엔진부품, 가스터어빈 및 차세대 원자로용 구조 재료로서 사용할 수 있는 초고강도의 고온용 세라믹스 섬유를 함유한 소결체의 밀도 및 기계적인 강도를 증진시키는 상기 복합체의 제조방법에 관한 것이다. The present invention relates to a method for producing a high density silicon carbide fiber reinforced silicon carbide composite (SiC f / SiC). More specifically, the present invention provides a method for producing the composite, which enhances the density and mechanical strength of a sintered body containing high-efficiency radial heaters, engine parts, gas turbines, and ultra-high-temperature high-temperature ceramic fibers that can be used as structural materials for next-generation reactors. It is about.

산업구조의 고도화 및 에너지 효율 향상에 대한 요구로 초고온 등의 극한 환경에서 기능을 발휘하는 소재에 대한 요구가 급증하고 있다. 세라믹스 섬유강화 복합소재는 초고온 등의 극한 환경에서도 고강도, 고인성, 내식성 및 고신뢰도 특성을 유지하는 소재로 자동차용 디젤분진필터, 우주, 항공, 원자력 등의 산업분야에 필수소재로 인식되고 있다. 섬유강화 복합소재가 극한 환경에서 우수한 성능 을 발휘하기 위해서는 고강도의 내열 세라믹스 섬유가 기본요소가 되며, 이 섬유를 원하는 형태로 직조하여 치밀화하는 방법이 필요하다.The demand for materials that function in extreme environments such as ultra-high temperatures is rapidly increasing due to the demand for advancement of industrial structure and improvement of energy efficiency. Ceramic fiber-reinforced composite materials are materials that maintain high strength, high toughness, corrosion resistance and high reliability even in extreme environments such as ultra high temperature, and are recognized as essential materials for industrial fields such as diesel dust filter for automobile, aerospace, aviation and nuclear power. In order to achieve excellent performance in extreme environments, fiber-reinforced composite materials are required to be made of high-strength heat-resistant ceramic fibers and a method of weaving and densifying the fibers in a desired form.

탄화규소 (SiC)는 우수한 열적, 기계적 특성을 보유하는 세라믹 재료로 1891년 E. G. Acheson에 의하여 발견된 이래, 전기화학적인 방법과 기상화학증착법 (CVD) 등을 활용하여 분말로 제조되고 있다. Silicon carbide (SiC) is a ceramic material with excellent thermal and mechanical properties. Since it was discovered by E. G. Acheson in 1891, it has been made into powder using electrochemical methods and CVD.

탄화규소 섬유는 1970년대 중반에 미국의 NASA, Textron 및 Dow Corning 사가 연계하여 SylamicTM 섬유를 개발하였으며, 일본에서는 Nippon Carbon사가 극저 산소함유 NiCalonTM 섬유를 개발하였으며, Ube사에서는 전구체 고분자의 개질을 통하여 완전결정화 섬유 TyrannoTM를 제조하였다. 특히 TyrannoTM섬유는 C/Si의 화학양론 비가 1.08로서 거의 1 에 가까우며, 무산소 분위기에서 1900℃ 까지, 산소 분위기에서는 1000℃ 까지 안정성을 보여주어 내열성이 요구되는 우주, 항공, 원자력 등의 산업분야에 적합한 섬유이다.In the silicon carbide fiber has developed the Sylamic TM fibers of NASA, Textron and Dow Corning USA Inc. in conjunction in the mid-1970s, in Japan, Nippon Carbon Corp. has developed an extremely low oxygen-containing NiCalon TM fiber, Ube Corporation through the modification of the precursor polymer Fully crystallized fiber Tyranno was prepared. In particular, the Tyranno TM fiber has a C / Si stoichiometric ratio of 1.08, which is close to 1, and shows stability up to 1900 ° C in an oxygen-free atmosphere and up to 1000 ° C in an oxygen atmosphere. Suitable fibers.

상기의 분야에의 적용을 위해서는 고밀도 및 높은 기계적 강도가 요구된다. 탄화규소 (SiC) 분말을 이용하여 고밀도 세라믹의 제조는 가능하지만, 기계적인 강도 측면에서 취성 파괴를 일으키는 단점이 있다. 이러한 단점을 해결하기 위하여 일반적으로 직조섬유가 함유된 세라믹 기지 복합체(ceramic matrix composites, CMCs)를 제조하는 것이 바람직하다. 입자 또는 길이가 짧은 휘스커(whisker) 강화 세라믹 복합재료는 단일상 세라믹의 파괴에너지 범위를 크게 벗어나지 못하지만, 직조섬유 강화 세라믹 복합재료는 기지에 응력이 가해져 균열이 전파될 때, 섬유가 에너지를 흡수하여 세라믹의 파괴인성을 향상시킨다. 특히 결합력이 약한 세라믹 기지(matrix)와 섬유의 계면을 형성하는 것이 균열의 전파를 빗나가게 하여 취성 파괴의 문제점을 최소화할 수 있는데, 이러한 목적으로 섬유의 표면에 100 - 1000 nm 두께의 열분해 탄소(C)나 질화보론 (BN) 층을 형성하기도 한다. High density and high mechanical strength are required for the application in the above fields. The manufacture of high density ceramics using silicon carbide (SiC) powder is possible, but has the disadvantage of causing brittle fracture in terms of mechanical strength. In order to solve this disadvantage, it is generally desirable to manufacture ceramic matrix composites (CMCs) containing woven fibers. Particles or short whisker reinforced ceramic composites do not exceed the breaking energy range of single phase ceramics, but woven fiber reinforced ceramic composites absorb the energy when the stress is applied to the base and propagates the cracks. Improve the fracture toughness of ceramics. In particular, the formation of an interface between the ceramic matrix and the fiber, which has a weak bonding force, can deflect crack propagation, thereby minimizing the problem of brittle fracture. For this purpose, 100-1000 nm thick pyrolytic carbon (C) is formed on the surface of the fiber. ) Or boron nitride (BN) layer.

탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)를 제조하는 방법으로는 기상화학침착법(CVI: chemical vapor infiltration), 고분자 침착 후 열분해법 (PIP: polymer impregnation and pyrolysis), 반응소결법(reaction sintering) 및 이들을 조합한 방법들이 시도되었다. 특히, CVI 방법은 1000℃ 내외의 공정온도를 적용하여 기체를 출발물질로 하여 SiC 섬유 사이에 SiC 기지상(matrix phase)을 증착시키므로 고온에 의한 섬유의 손상을 최소화할 수 있다는 장점이 있다. 하지만, 고밀도 증착을 위하여 수십 시간의 가동 시간이 필요하며, 잔류 기공이 존재하며, 제조 단가가 높다는 단점이 있다. 특히, 증착 시 복합체의 표면에 우선적으로 기지상이 증착되어 내부로의 원활한 기지상 증착이 어렵기 때문에 4mm 이상의 두께를 보이는 고밀도의 복합체는 제조하기 어렵다는 단점이 있다. PIP와 반응소결법의 경우에도 상대적으로 낮은 순도 및 유리질의 존재로 기계적 강도가 낮은 단점이 있다. 상기의 방법들은 일반적으로 10 - 20 %의 기공을 함유하게 되므로, 기계적인 특성이 낮은 복합체가 제조되는 단점이 있다. Silicon carbide fiber-reinforced silicon carbide composites (SiC f / SiC) are prepared by chemical vapor infiltration (CVI), polymer impregnation and pyrolysis (PIP), and reaction sintering. ) And methods combining them have been attempted. In particular, the CVI method has the advantage of minimizing the damage of the fiber due to high temperature because the SiC matrix phase is deposited between the SiC fibers by using a gas as a starting material by applying a process temperature of about 1000 ℃. However, there is a disadvantage in that dozens of hours of operation time are required for high density deposition, residual pores exist, and manufacturing costs are high. In particular, since the matrix is deposited on the surface of the composite preferentially during deposition, it is difficult to manufacture a matrix having a thickness of 4 mm or more because it is difficult to smoothly deposit the matrix onto the substrate. In the case of PIP and reaction sintering, the mechanical strength is low due to the relatively low purity and the presence of glass. Since the above methods generally contain 10-20% of pores, there is a disadvantage in that a composite having low mechanical properties is produced.

고밀도 복합체의 제조를 위하여, 일본의 교토대학 고야먀 (Kohyama) 교수팀은 나노 SiC 분말을 함유한 폴리카보실란 (PCS, polycarbosilane) 슬러리를 제조하여 일방향 Tyranno SiC 섬유에 함침시킨 후, 1720 - 1780℃의 온도에서 가압 소결하는 방법을 사용하여 2.77 - 2.93 g/cm3 의 밀도를 구현하였다. 이는 종래의 CVI 및 PIP법으로 제조된 복합체 밀도 2.10 - 2.70 g/cm3에 비하여 매우 향상된 결과이다.For the production of high density composites, a team of professors Koyayama, Kyoto University, Japan, prepared a polycarbosilane (PCS) slurry containing nano SiC powder, impregnated the unidirectional Tyranno SiC fibers, and then slid it to 1720-1780 ° C. A density of 2.77-2.93 g / cm 3 was achieved using pressure sintering at a temperature of. This is a very improved result compared to the composite density of 2.10-2.70 g / cm 3 produced by the conventional CVI and PIP methods.

본 방법에서 사용된 치밀화의 기본 메커니즘은 SiC 슬러리에 10 중량% 정도로 함유된 Al2O3-Y2O3 소결 조제가 가압소결 시에 공융(eutectic) 액상으로 변화하여 치밀화를 증진시키므로, 이를 NITE (nano-infiltrated transient 공융)법으로 명명하였다.The basic mechanism of densification used in this method is that the Al 2 O 3 -Y 2 O 3 sintering aid contained in about 10% by weight of the SiC slurry is changed into an eutectic liquid upon pressurization to promote densification. (nano-infiltrated transient eutectic) method.

하지만, 본 NITE법은 밀도 증진을 위하여 PCS (polycarbosilane) 바인더에 나노 SiC 분말을 분산시킨 슬러리를 사용하였으므로, PIP법과 유사하여 최종적으로 C/Si의 비율이 화학양론에서 벗어날 가능성이 크다. 또한 슬러리에 일방향 Tyranno 섬유를 단순 함침시키는 방법을 사용하였기 때문에, SiC 분말의 직조섬유내부로의 효율적인 침착이 어렵다. 특히, 사용되는 나노 SiC 분말은 높은 비표면 적으로 인하여 응집하려는 경향이 강하므로, 슬러리 내의 SiC 분말의 최적 분산 조건을 모색하여 적용할 필요가 있다.However, this NITE method uses a slurry obtained by dispersing nano SiC powder in a polycarbosilane (PCS) binder to improve density, which is similar to the PIP method. In addition, since a method of simply impregnating unidirectional Tyranno fibers in the slurry is used, it is difficult to efficiently deposit SiC powder into the woven fibers. In particular, the nano SiC powders used have a strong tendency to agglomerate due to their high specific surface area, and therefore, it is necessary to find and apply the optimum dispersion conditions of the SiC powders in the slurry.

SiC 직조섬유 내부로의 SiC 분말의 침착률을 증진시켜 고밀도의 SiCf/SiC 복합체를 제조하기 위해서는, 1) 슬러리 내에서의 최적의 SiC 분산 조건을 확보하고, 2) 침착에 적합한 슬러리 조성을 결정하며, 3) 직조섬유 사이의 미세 틈으로 SiC 분말을 효율적으로 침착시키는 방법에 대한 모색이 필요하다. 본 발명은 이러한 요구들을 충족시키는 조건을 발견하여, 본 발명의 고밀도 SiCf/SiC 복합체를 제조하는 것이다.In order to improve the deposition rate of SiC powder into SiC woven fibers to produce high density SiC f / SiC composites, 1) to obtain optimum SiC dispersion conditions in the slurry, 2) determine the slurry composition suitable for deposition 3) There is a need for a method for efficiently depositing SiC powder into fine gaps between woven fibers. The present invention finds conditions that meet these needs and produces the high density SiC f / SiC composites of the present invention.

본 발명은 PVB (polyvinyl butyral) 바인더를 톨루엔/에탄올 혼합용매에 용해시킨 바인더 용액에 나노 SiC 분말을 효율적으로 분산시키는 분산방법; SiC 분말을 효율적으로 SiC 직조섬유에 흡착시키는 슬러리 조성; SiC 직조섬유 사이의 미세 틈으로 SiC 분말을 효율적으로 침착시키는 방법을 제공한다.The present invention provides a dispersion method for efficiently dispersing nano SiC powder in a binder solution in which a polyvinyl butyral (PVB) binder is dissolved in a toluene / ethanol mixed solvent; A slurry composition for efficiently adsorbing SiC powder to SiC woven fibers; Provided is a method for efficiently depositing SiC powder into fine gaps between SiC woven fibers.

또, 본 발명은 다수의 SiC 직조섬유를 내부 실린더 중간에 장착하는 단계, 그 위에 SiC 슬러리를 부은 후, 진공을 가하는 단계, 실린더 내부에 공기를 서서히 주입하여 실린더의 압력을 대기압으로 만드는 단계, 및 SiC 직조섬유의 기공에 SiC 슬러리가 침착하는 단계를 포함하는 SiC 슬러리의 SiC 직조섬유에의 침착 방법을 제공한다.In addition, the present invention comprises the steps of mounting a plurality of SiC woven fibers in the middle of the inner cylinder, pouring a SiC slurry thereon, applying a vacuum, gradually injecting air into the cylinder to make the pressure of the cylinder to atmospheric pressure, and Provided is a method of depositing a SiC slurry onto SiC woven fibers comprising the step of depositing a SiC slurry in the pores of the SiC woven fibers.

구체적으로는, 본 발명은 바인더를 용매에 용해시키고, 이에 가소제 및 분산제를 첨가하여 바인더 용액을 제조하는 단계, 상기 바인더 용액에 SiC 분말을 첨가하여 SiC 슬러리를 제조하는 단계, 및 상기 SiC 슬러리에 SiC 직조섬유를 함침하여, SiC 분말을 SiC 직조섬유에 침착시키는 단계를 포함하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법을 제공한다.Specifically, the present invention is to prepare a binder solution by dissolving a binder in a solvent, adding a plasticizer and a dispersing agent to the binder, adding a SiC powder to the binder solution to prepare a SiC slurry, and SiC to the SiC slurry Impregnating the woven fibers, to provide a method for producing a high density silicon carbide fiber-reinforced silicon carbide composite (SiC f / SiC) comprising the step of depositing SiC powder on the SiC woven fibers.

다른 관점에서, 본 발명은 분산 메커니즘인 입자들의 표면에 전하를 띄게 하여 정전기적 반발력을 응용하거나, 입자의 표면에 고분자로 이루어진 분산제를 활용하는 입체장애적 반발력을 활용하는 것을 특징으로 한다.In another aspect, the present invention is characterized in that the electrostatic repulsive force is applied to the surface of the particles as a dispersing mechanism by applying a charge, or the steric hindrance repulsive force using a dispersant made of a polymer on the surface of the particle.

특히, 정전기적 반발력의 관점에서는, 표면의 전하를 최대로 하는 pH 조건을 확보하고, 입체장애적 반발력에서는 SiC 분말의 표면에 흡착되어 가장 낮은 슬러리 점도 및 가장 높은 침강 밀도를 보여주는 분산제의 종류 및 첨가량을 결정하는 것을 바탕으로 한다.In particular, from the standpoint of electrostatic repulsion, the pH conditions for maximizing the charge on the surface are ensured, and in the steric hindrance repulsion, the type and amount of dispersant adsorbed on the surface of the SiC powder exhibiting the lowest slurry viscosity and the highest sedimentation density. Is based on determining.

바람직하게는, 에탄올을 용매로 사용 시에 슬러리의 제타포텐셜의 절대값이 30mV를 초과하여 최대의 정전기적 반발력을 보여주는 pH 5.5 이하, 혹은 8.5 이상의 조건을 특징으로 한다. 또한, 입체장애적인 관점에서는, 가장 낮은 점도를 보여주는 상업용 분산제인 Hypermer KD1을 SiC 분말 100 중량% 에 대하여 20 중량% 내지 50 중량% 를 첨가하여 132 s-1의 전단율에서 100 cPs 이하의 점도와 0.30 g/cm3 이상의 침강 밀도를 구현하는 현탁액을 특징으로 한다.Preferably, when using ethanol as the solvent, the absolute value of the zeta potential of the slurry exceeds 30 mV, which is characterized by a condition of pH 5.5 or lower, or 8.5 or higher which shows the maximum electrostatic repulsion. In addition, from the viewpoint of steric hindrance, 20 to 50% by weight of Hypermer KD1, a commercial dispersant showing the lowest viscosity, was added to 100% by weight of SiC powder, and a viscosity of 100 cPs or less at a shear rate of 132 s −1 was obtained. It is characterized by a suspension that achieves a settling density of at least 0.30 g / cm 3 .

또 다른 관점에서, 본 발명은 평균입도 52 nm 및 비표면적 80 m2/g 을 갖는 β-SiC 분말을 함유한 슬러리 조성으로서, 용매의 조성; PVB 바인더의 분자량 및 첨가량; SiC 분말의 함유량; 가소제 디옥틸 프탈레이트(DOP)의 첨가량; 이들의 기계적인 분산을 위한 밀링 방법 등을 포함한다.In another aspect, the present invention provides a slurry composition containing β-SiC powder having an average particle size of 52 nm and a specific surface area of 80 m 2 / g, comprising a composition of a solvent; Molecular weight and amount of PVB binder added; Content of SiC powder; Amount of plasticizer dioctyl phthalate (DOP) added; Milling methods for mechanical dispersion thereof, and the like.

바람직하게는, 본 발명은 조성의 최적화를 통하여 분산성이 확보되며 SiC 직조섬유 사이로의 흡착 및 침착이 우수하며, 테이프 캐스팅에 적합한 점도 및 유변학적 특성을 보유하는 것을 특징으로 한다.Preferably, the present invention is characterized in that the dispersibility is secured through the optimization of the composition, the adsorption and deposition between the SiC woven fibers and the viscosity and rheological properties suitable for tape casting.

또 다른 관점에서, 본 발명은 제조된 SiC 슬러리를 직조섬유 사이에 효율적으로 함침시키는 방법으로서, 함침을 위한 실험 기구의 구성; 진공을 이용한 압력구배의 형성을 통한 효율적인 함침법; 진공함침의 횟수를 포함한다.In another aspect, the present invention is a method for efficiently impregnating the prepared SiC slurry between the woven fibers, comprising a configuration of an experimental instrument for impregnation; Efficient impregnation method through the formation of pressure gradient using vacuum; Includes the number of vacuum impregnations.

본 발명의 방법으로, 고효율 방사형 히터, 엔진부품, 가스터어빈 및 차세대 원자로용 구조 재료로서 사용할 수 있는 고밀도, 특히 최대 3.13g/cm3 의 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)를 얻을 수 있다.By the method of the present invention, silicon carbide fiber-reinforced silicon carbide composites (SiC f / SiC) of high density, especially up to 3.13 g / cm 3 , can be obtained which can be used as structural materials for high efficiency radial heaters, engine parts, gas turbines and next-generation reactors. Can be.

상술한 것과 다른 관점들 그리고 본 발명의 이점은 하기의 바람직한 실시예들의 면면할 고찰을 통해 명백해 질 것이다.Other aspects than the above and the advantages of the present invention will become apparent from the following considerations of the preferred embodiments.

도1의 (a)에는 세라믹 기지상으로 사용된 평균입도 52nm 의 SiC 분말의 주사전자현미경 사진이 나타나 있으며, 도1의 (b)는 이에 대한 고배율 투과전자현미경 사진으로 표면이 1.7nm 두께의 SiO2 층으로 덮여 있음을 알 수 있다.Figure 1 (a) shows a scanning electron micrograph of an average particle size of 52 nm SiC powder used as a ceramic matrix phase, Figure 1 (b) is a high magnification transmission electron micrograph for this, the surface of 1.7 nm thick SiO 2 It can be seen that it is covered with layers.

도2의 (a)에는 7.5μm 두께의 TyrannoTM섬유 (Ube사, 일본)가 1600가닥씩 0/90o로 직조된 구조가 나타나 있으며, 도2의 (b)에는 메탄 (CH4)가스를 열분해 하여 증착한 200nm 두께의 열분해 탄소가 TyrannoTM섬유를 코팅하고 있음을 보여준다. FIG. 2 (a) shows a structure in which 7.5 μm-thick Tyranno fibers (Ube, Japan) are woven at 0/90 o of 1,600 strands, and FIG. 2 (b) shows methane (CH 4 ) gas. Pyrolytically deposited 200 nm thick pyrolytic carbon shows Tyranno fiber coating.

본 발명은 도2(a)의 TyrannoTM 미세 섬유 사이의 틈 및 섬유다발 간의 빈 공간에 도1(a)의 나노 SiC 분말을 침투 및 흡착을 시킴으로써, 기공이 거의 없는 치밀화된 구조를 얻는 것으로 구성된다. 하지만, SiC 분말만을 이용한 침착은 어렵기 때문에, 분말을 바인더 용액에 분산을 시킨 슬러리를 제조하여 침착을 실시한다. The present invention is obtained by infiltrating and adsorbing the nano SiC powder of FIG. 1 (a) into the gap between the Tiranno fine fibers and the void space between the fiber bundles of FIG. do. However, since deposition using only SiC powder is difficult, the slurry is prepared by dispersing the powder in a binder solution.

나노분말은 높은 비표면적으로 인하여 응집하려는 경향이 매우 크기 때문에, SiC 섬유 사이의 미세 틈으로의 침착을 위해서는 분산이 필수적이다. 분산의 메커니즘으로는 SiC 분말의 표면 전하에 의한 반발력을 활용하는 정전기적 반발력 (electrostatic repulsion)과, 고분자로 구성된 분산제를 분말의 표면에 흡착시켜 분산을 실시하는 입체장애 (steric mechanism)가 대표적이다. 정전기적 반발력에서는, 표면 전하인 제타포텐셜의 절대값이 30mV 이상이 되는 것이 바람직하며, 입체장애에서는, 분말에의 표면 흡착력이 좋으며 이로 인하여 반발력을 제공하는 분산제가 바람직하다.Since nanopowders tend to agglomerate due to their high specific surface area, dispersion is essential for the deposition into microgaps between SiC fibers. Dispersion mechanisms include electrostatic repulsion that utilizes the repulsive force of the surface charge of SiC powder, and steric mechanism of dispersing by adsorbing a dispersant composed of a polymer on the surface of the powder. In the electrostatic repulsive force, the absolute value of the zeta potential as the surface charge is preferably 30 mV or more, and in the steric hindrance, the surface adsorption force to the powder is good, and therefore, a dispersant that provides repulsive force is preferable.

특히, 입체장애를 활용할 경우에는 입자간 반발력을 직접적으로 측정할 수 없으므로, 분산제가 첨가된 슬러리나 슬러리의 점도나 침강 밀도를 측정하는 방법이 주로 사용되며, 점도가 낮고 침강 밀도가 높다는 것은, 분산성이 우수하다는 것을 의미한다.In particular, when the steric hindrance is not used, the repulsive force between particles cannot be directly measured. Therefore, a method of measuring the viscosity or sedimentation density of a slurry or a slurry to which a dispersant is added is mainly used. Means excellent acidity.

도3(a)에는 정전기적 반발력 활용을 위한 에탄올 SiC 슬러리의 제타포텐셜 값이 나타나 있으며, 도3의 (b)에는 4종의 상업용 분산제의 첨가량에 따른 제타포텐셜의 변화가 나타나 있다.Figure 3 (a) shows the zeta potential value of the ethanol SiC slurry for electrostatic repulsive force utilization, Figure 3 (b) shows the change in zeta potential according to the addition amount of the four commercial dispersants.

에탄올 SiC 슬러리의 SiC 분산을 위해서는 30mV 이상의 제타포텐셜을 보여주는 영역은 pH가 5.5 이하인 산성 분위기나 8.5 이상의 알칼리 영역이 바람직하다. 특히 제타포텐셜이 0이 되는 pH=7 영역에서는 표면 전하로 인한 반발력이 전혀 없으므로, 분산성이 악화된다.For SiC dispersion of ethanol SiC slurry, the region showing zeta potential of 30 mV or more is preferably an acidic atmosphere having a pH of 5.5 or less or an alkaline region of 8.5 or more. In particular, in the pH = 7 region where the zeta potential is zero, there is no repulsive force due to the surface charge, so that dispersibility is deteriorated.

도3(b)에 나타난 바와 같이, 사용된 4종의 분산제의 첨가에 따라 제타포텐셜의 값은 감소하는 경향을 보이므로, 정전기적 반발력이 감소함을 알 수 있다. PVB를 바인더로 활용한 SiC 슬러리의 pH는 7.5 - 8.5의 범위를 보여주어, 이 경우의 정전기적 반발력을 활용한 분산은 효과적이지 못할 것임을 유추할 수 있다.As shown in Figure 3 (b), the value of the zeta potential tends to decrease with the addition of the four dispersants used, it can be seen that the electrostatic repulsive force is reduced. The pH of SiC slurry using PVB as a binder is in the range of 7.5-8.5, and it can be inferred that the dispersion using the electrostatic repulsion in this case will not be effective.

일반적으로 톨루엔이나 에탄올을 용매로 사용하는 시스템에서는, 분산제를 활용하여 분산력을 증진시키는 입체장애가 효과적으로 알려져 있으며, 본 발명에서도 이러한 방법을 활용하기로 한다. 사용된 상업용 분산제는 총 4종으로 표 1에 제조사 및 특성이 나타나 있다.In general, in a system using toluene or ethanol as a solvent, steric hindrance to improve dispersibility by using a dispersant is known effectively, and the present invention will also utilize this method. Four commercial dispersants used are listed in Table 1 for their manufacturer and properties.

분산제Dispersant 공급사Supplier 분산작용기Disperser Rhodafac RE-610Rhodafac RE-610 RhodiaRhodia Nonylphenol ethoxylate based phosphate esters Nonylphenol ethoxylate based phosphate esters Disperbyk-103Disperbyk-103 BYKBYK Copolymer with pigment affinic groups Copolymer with pigment affinic groups EFKA 5044EFKA 5044 CibaCiba Unsaturated polyamide and acid ester salts Unsaturated polyamide and acid ester salts Hypermer KD1Hypermer KD1 ICIICI A polyester/polyamine co-polymer A polyester / polyamine co-polymer

도4에는 4종의 분산제 첨가량에 따른 SiC 슬러리의 점도가 나타나 있으며, 분산제 Hypermer KD 1의 점도가 가장 낮아 분산력이 최대이며 SiC 100 중량% 에 대하여 20 중량% 부터는 점도의 감소가 나타나지 않기 때문에 이를 적정 첨가량으로 결정한다.4 shows the viscosity of the SiC slurry according to the amount of the four dispersants added, and the viscosity of the dispersant Hypermer KD 1 is the lowest, so that the dispersibility is the maximum, and since the viscosity does not decrease from 20% by weight with respect to 100% by weight of SiC, the viscosity is appropriate. Determined by the addition amount.

최대의 분산을 보여주는 슬러리는 분말의 침강 속도가 느리고, 충전고밀도 특징을 보여주는데, 도5에 나타난 침강 밀도 비교에서도 Hypermer KD 1이 분산제로 사용된 경우에 가장 느린 침강 속도와 가장 높은 침강 밀도를 보여주어 도4의 점도거동과 일치함을 알 수 있다.The slurry showing the maximum dispersion showed a slow settling rate of the powder and a high packing density characteristic. The settling density comparison shown in Fig. 5 also showed the slowest settling rate and the highest settling density when Hypermer KD 1 was used as the dispersant. It can be seen that it is consistent with the viscosity behavior of FIG.

소결조제는 Al2O3:Y2O3:MgO가 6.4:2.6:1.0의 중량비율로 혼합되었으며, SiC 분말 100 중량% 에 대하여 8 - 12 중량%, 바람직하게는 10 - 12 중량% 로 첨가한다. 이들의 초기 평균 입도가 수 ㎛ 로, 기지상으로 사용되는 52 nm의 SiC보다 크기 때문에 0.8mm ZrO2 비드(bead)와 3000 rpm의 회전력을 이용하는 고 에너지 밀 을 이용하여 1 - 3시간 분쇄하여 SiC와의 고른 혼합을 유도하는 것이 바람직하다. 보다 바람직하게는, SiC 분말의 평균 입도가 100nm 이내가 되도록 분쇄하는 것이 바람직하다.The sintering aid was mixed with Al 2 O 3 : Y 2 O 3 : MgO at a weight ratio of 6.4: 2.6: 1.0 and added in an amount of 8-12 wt%, preferably 10-12 wt%, based on 100 wt% of SiC powder. do. Their initial average particle size is several μm, which is larger than that of 52 nm SiC, which is used as a base phase, and then pulverized for 1 to 3 hours using 0.8 mm ZrO 2 beads and a high energy mill using a rotational force of 3000 rpm. It is desirable to induce even mixing. More preferably, it is preferable to grind so that the average particle size of SiC powder may be within 100 nm.

톨루엔/에탄올의 중량비가 6/4인 혼합 용매에 분자량이 55,000g/mol인 PVB 바인더를 용해하고, 용매 100중량%에 대하여 5 - 45 중량%의 바인더가 첨가된다. 여기에, 바인더 100중량%에 대하여 60 중량%의 가소제 DOP를 용해시킨 후, SiC 분말 100 중량%에 대하여 20 중량%의 Hypermer KD 1 분산제를 첨가하여 바인더 용액을 제조한다. 여기에, PVB 바인더/SiC가 0.4가 되도록 SiC 분말을 첨가한 후, 6 mm의 SiC 볼을 이용한 볼 밀을 36시간 동안 실시한다. ZrO2 비드를 사용하는 고 에너지 밀을 활용하여 SiC 슬러리 분산을 실시하는 경우에는 SiC 경도가 ZrO2 보다 크기 때문에, Zr 오염을 발생시키므로 피하는 것이 바람직하다. 이와 같이 제조된 SiC 슬러리를 이용하여 40 - 60 μm의 두께로 테이프 캐스팅(tape casting)을 실시한 후, 그린 테이프(green tape)을 보관한다.A PVB binder having a molecular weight of 55,000 g / mol is dissolved in a mixed solvent having a weight ratio of toluene / ethanol of 6/4, and a binder of 5-45% by weight is added to 100% by weight of the solvent. After dissolving 60% by weight of the plasticizer DOP with respect to 100% by weight of the binder, 20% by weight of Hypermer KD 1 dispersant was added to 100% by weight of SiC powder to prepare a binder solution. After adding SiC powder so that PVB binder / SiC may be 0.4, the ball mill using a 6 mm SiC ball is performed for 36 hours. When SiC slurry dispersion is performed using a high energy mill using ZrO 2 beads, the SiC hardness is larger than that of ZrO 2 , so it is preferable to avoid Zr contamination. After the tape casting to a thickness of 40-60 μm using the SiC slurry prepared as described above, the green tape is stored.

SiC 직조섬유에 슬러리를 함침하기 위하여 도6과 같이 특별히 제작된 치구를 사용한다. 치구는 하부가 밀봉된 내부 실린더, 이 실린더 내부에 직경 5cm의 직조섬유를 고정하기 위한 나사선, 5장의 직조섬유를 동시에 장착하기 위한 분리 링 및 진공을 가해주기 위한 외부 실린더로 구성된다. In order to impregnate the slurry into SiC woven fiber, a specially prepared jig as shown in FIG. 6 is used. The jig consists of an inner cylinder with a sealed bottom, a thread for fixing a woven fiber having a diameter of 5 cm inside the cylinder, a separation ring for simultaneously mounting five woven fibers, and an outer cylinder for applying a vacuum.

5장의 직조섬유를 내부 실린더 중간에 장착하고, 그 위에 제조된 SiC 슬러리를 부은 후, 내부 압력이 0.1 Pa이 되도록 진공을 가한다. 원하는 진공도가 달성되면, 밸브를 열어 서서히 공기를 주입하여 실린더 압력이 대기압이 되도록 한다. 실린더 내부의 압력을 증가시키는 과정에서 직조섬유 상부에 있는 슬러리가 압력구배에 의하여 내부 실린더 아래쪽으로 이동을 하게 되며, 이 과정에서 직조섬유의 기공에 슬러리가 침착하게 된다. 이러한 과정은 2분 이상이 소요되도록 천천히 진공을 풀어주는 것이 직조섬유 사이의 기공에 슬러리를 최대한 침착시키기 위해서 바람직하다. 또한, 슬러리의 침착 증진을 위하여 3회 이상에 걸쳐서 동일한 과정을 반복하는 것이 바람직하다.Five woven fibers were mounted in the middle of the inner cylinder, and the prepared SiC slurry was poured on it, and then vacuum was applied so that the internal pressure was 0.1 Pa. Once the desired degree of vacuum is achieved, open the valve and slowly introduce air to bring the cylinder pressure to atmospheric pressure. In the process of increasing the pressure inside the cylinder, the slurry on the top of the woven fiber is moved to the lower side of the inner cylinder by the pressure gradient, during which the slurry is deposited in the pores of the woven fiber. This process is preferably slowed in vacuum to take more than 2 minutes to maximize the deposition of the slurry in the pores between the woven fibers. In addition, it is preferable to repeat the same process three or more times to promote the deposition of the slurry.

도7에는 슬러리에 SiC 직조섬유를 단순 함침하는 경우와 진공침착 후의 침착정도를 비교하는 주사전자현미경 사진이 나타나 있다. 진공압력 구배를 이용한 경우의 슬러리 침착정도가 단순함침의 경우에 비하여 매우 크게 나타남을 알 수 있다.7 shows a scanning electron micrograph comparing the degree of deposition after vacuum deposition and the case of simple impregnation of SiC woven fiber in the slurry. It can be seen that the degree of slurry deposition in the case of using the vacuum pressure gradient is much larger than in the case of simple impregnation.

도8에는 바인더 함량을 변화시킨 슬러리를 사용하여 직조섬유에 진공침착시킨 후 가소를 거친 시편의 전자현미경 사진이 나타나 있다. 바인더 함량이 0, 5, 10 및 45 중량%로 변화시킨 슬러리를 진공침착 시킨 후, 가소를 실시하였기 때문에 바인더가 함유되지 않은 SiC 분말만이 존재하고 있다.8 shows an electron micrograph of a specimen subjected to calcination after vacuum deposition on a woven fiber using a slurry having a changed binder content. Since the slurry was changed to 0, 5, 10 and 45% by weight after vacuum deposition, the calcination was carried out so that only SiC powder containing no binder was present.

바인더는 가소 과정 중에 연소되기 때문에 소량이 침착 정도를 높이는데 바람직할 것으로 예상되었지만, 45 중량%의 바인더를 함유한 슬러리가 섬유다발 사이의 큰 기공도 채워주어 가장 높은 침착 정도를 보여주고 있음을 알 수 있다.Although the binder was burned during the calcination process, a small amount was expected to increase the degree of deposition, but the slurry containing 45% by weight of the binder also filled the large pores between the fiber bundles and showed the highest degree of deposition. Can be.

도9에는 진공침착된 직조섬유 10장을 적층한 시편과, 직조섬유 10장 사이에 테이프를 1장씩 적층한 시편의 1750℃, 20 MPa에서 3시간 동안 고온가압소결(hot press)된 사진이 나타나 있다. 직조섬유만을 적층한 시편은 섬유 사이에 아직 기공이 남아 있는 반면에, 테이프를 끼워 넣은 시편은 기공이 존재하지 않는 매우 치밀화된 구조를 보여주고 있음을 알 수 있다.9 shows a picture of hot-sintered sintered specimens at 1750 ° C. and 20 MPa for 3 hours. have. It can be seen that the specimen laminated only the woven fiber still had pores between the fibers, while the tape-inserted specimen showed a very dense structure with no pores.

도10은 SiC 직조섬유를 함유한 복합체의 파단면 사진을 보여주고 있으며, 파괴시 사용된 섬유가 당겨져 취성파괴를 줄여 주고 있음을 알 수 있다. 특히 섬유와 기지상 간의 낮은 결합력을 목적으로 코팅된 열분해탄소 (PyC) 층이 1750℃의 고온에서도 섬유표면에 남아 있음을 알 수 있다.Figure 10 shows the fracture surface of the composite containing SiC weaving fibers, it can be seen that the fibers used in the breakage to reduce the brittle fracture. In particular, it can be seen that a coated pyrolytic carbon (PyC) layer remains on the fiber surface even at a high temperature of 1750 ° C for the purpose of low binding force between the fiber and the matrix.

도11은 진공침착된 직조섬유 10장을 적층한 시편, 직조섬유 10장 사이에 테이프를 1장씩 적층한 시편, 및 SiC 분말과 소결조제만을 첨가하여 제조된 모노리스(monolith) SiC 의 3점 곡강도 시험 결과가 나타나 있다.FIG. 11 is a three-point bending test of monolithic SiC prepared by laminating a sample of 10 woven fabrics vacuum-deposited, a piece of tape laminated between 10 woven fibers, and SiC powder and a sintering aid. The results are shown.

SiC 직조섬유를 함유하고 있는 시편의 파괴시 변위가, 섬유를 함유하지 않은 모노리스에 비하여 크게 나타나 취성파괴에 대한 저항성이 증가된 모습을 보여주고 있다. 파괴에 필요한 최대응력 또한 직조섬유를 함유한 시편이 높게 나타나며, 특히 함침된 직조섬유에 테이프를 적층한 시편의 경우에는 최대 3.13g/cm3의 밀도에서 607 MPa의 기계적 강도를 보여주어 모노리스에 비하여 2배 이상 증가함을 알 수 있다.Disruption of the specimens containing SiC woven fibers was larger than that of monoliths containing no fibers, increasing the resistance to brittle fracture. The maximum stress required for fracture is also higher in the samples containing woven fibers, especially in the case of specimens laminated with tape on impregnated woven fibers, showing a mechanical strength of 607 MPa at a density of up to 3.13 g / cm 3 compared to monolith. It can be seen that the increase more than two times.

표2에는 본 발명에서 제조된 시편들의 제반 특성이 나타나 있으며, 표3에는 최근에 보고된 SiC 복합체의 밀도 및 기계적 강도 값이 나타나 있다.Table 2 shows the various properties of the specimens prepared in the present invention, and Table 3 shows the density and mechanical strength values of the recently reported SiC composites.

본 발명에서 실시된 함침된 직조섬유에 테이프를 적층한 시편의 경우에는 최대 3.13g/cm3의 밀도로 현재까지 보고된 값보다 높은 밀도를 보여주고 있다.In the case of specimens laminated with tape on the impregnated woven fiber implemented in the present invention, the density is higher than the value reported so far at a density of up to 3.13 g / cm 3 .

제조방법Manufacturing method 섬유 분율
(Vol. %)
Fiber fraction
(Vol.%)
소결밀도
(g/cm3)
Sintered Density
(g / cm 3)
% 밀도* % Density * Flexural strength
(MPa)
Flexural strength
(MPa)
진공침착Vacuum deposition 62 - 7262-72 2.90 - 3.022.90-3.02 90 - 9490-94 312 ± 28 (Max. 342)312 ± 28 (Max. 342) 진공침착 + 테이프 삽입Vacuum Deposition + Tape Insertion 48 - 5548-55 3.04 - 3.133.04-3.13 94 - 9794-97 562 ± 36 (Max. 607)562 ± 36 (Max. 607) SiC 분말 소결체SiC Powder Sintered Body 00 3.14 - 3.193.14-3.19 98 - 9998-99 198 ± 36 (Max. 257)198 ± 36 (Max. 257) *: %밀도는 SiC의 이론밀도 (3.21 g/cm3) 대비 값*:% Density compared to SiC theoretical density (3.21 g / cm 3 )


연구자

Researcher
제조방법
사용된 섬유 (섬유 부피 분율 %)
Manufacturing method
Fiber Used (% Fiber Volume Fraction)
밀도* (g/cm3)Density * (g / cm 3 ) 최대 기계적 강도 (MPa)Max mechanical strength (MPa)
Yano et al. [1]Yano et al. [One] Slurry impregnation and tape stacking
Nicalon, Hi-Nicalon
Slurry impregnation and tape stacking
Nicalon, Hi-Nicalon
2.38 - 3.072.38-3.07 260260
Pasquier et al. [2]Pasquier et al. [2] CVI
(35.1 - 38.2)
CVI
(35.1-38.2)
2.34 - 2.622.34-2.62
Yamada et al. [3]Yamada et al. [3] CVI and PIP
Hi-Nicalon (26 - 35)
CVI and PIP
Hi-Nicalon (26-35)
380380
Ortona et al. [4]Ortona et al. [4] CVI and PIP
NL 207 fiber (32 - 40)
CVI and PIP
NL 207 fiber (32-40)
1.58 - 1.801.58-1.80 247247
Cheng et al. [5]Cheng et al. [5] CVI
Hi-Nicalon (40 - 45)
CVI
Hi-Nicalon (40-45)
2.46 - 2.492.46-2.49
Yoshida et al. [6]Yoshida et al. [6] Slurry impregnation and tape stacking
Hi-Nicalon (40 - 52)
Slurry impregnation and tape stacking
Hi-Nicalon (40-52)
2.79 - 3.052.79-3.05 460460
Yang et al. [7]Yang et al. [7] CVI
Tyranno-SA (43)
CVI
Tyranno-SA (43)
2.58 - 2.632.58-2.63 296296
Lee et al. [8]Lee et al. [8] Slurry infiltration and reaction sintering
Tyranno-SA (10 - 15)
Slurry infiltration and reaction sintering
Tyranno-SA (10-15)
2.20 - 3.002.20-3.00 505505
Katoh et al. [9]Katoh et al. [9] Slurry infiltration
Tyranno-SA (30)
Slurry infiltration
Tyranno-SA (30)
2.77 - 2.932.77-2.93 710710
Nannetti et al. [10]Nannetti et al. [10] CVI and PIP
Hi-Nicalon (40)
CVI and PIP
Hi-Nicalon (40)
2.19 - 2.232.19-2.23 761761
Kang et al. [11]Kang et al. [11] Whisker growing and CVI
Tyranno-SA
Whisker growing and CVI
Tyranno-sa
2.54 - 2.672.54-2.67
Taguchi et al. [12]Taguchi et al. [12] PIP-CVD and reaction bonding
Hi-Nicalon (33)
PIP-CVD and reaction bonding
Hi-Nicalon (33)
2.65 - 2.702.65-2.70 280280
Katoh et al. [13]Katoh et al. [13] CVI
Tyranno-SA (35 - 40)
CVI
Tyranno-SA (35-40)
2.42 - 2.742.42-2.74 304304
Yoshida et al. [14]Yoshida et al. [14] Tape stacking and reaction sintering
Hi-Nicalon
Tape stacking and reaction sintering
Hi-icalon
2.902.90 200200
Lim et al. [15]Lim et al. [15] Slurry infiltration and tape stacking
Tyranno-SA
Slurry infiltration and tape stacking
Tyranno-sa
2.95 - 3.102.95-3.10 370370
Yoshida et al. [16]Yoshida et al. [16] EPD and tape stacking
Tyranno-SA
EPD and tape stacking
Tyranno-sa
2.75 - 2.922.75-2.92 123123
*: 섬유밀도 (g/cm3): Nicalon (2.55), Hi-Nicalon (2.73) and Tyranno SA (3.10)*: Fiber Density (g / cm 3 ): Nicalon (2.55), Hi-Nicalon (2.73) and Tyranno SA (3.10)

참조문헌References

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[12] Taguchi T, Igawa N, Yamada R, Jitsukawa S. Effect of thick SiC interphase layers on microstructure, mechanical and thermal properties of reaction-bonded SiC/SiC composites. J Phys Chem Solids 2005;66:576-80.[12] Taguchi T, Igawa N, Yamada R, Jitsukawa S. Effect of thick SiC interphase layers on microstructure, mechanical and thermal properties of reaction-bonded SiC / SiC composites. J Phys Chem Solids 2005; 66: 576-80.

[13] Katoh Y, Nozawa T, Snead LL. Mechanical properties of thin pyrolitic carbon interphase SiC-matrix composites reinforced with near-stoichiometric SiC fibers. J Am Ceram Soc 2005;88(11):3088-95.[13] Katoh Y, Nozawa T, Snead LL. Mechanical properties of thin pyrolitic carbon interphase SiC-matrix composites reinforced with near-stoichiometric SiC fibers. J Am Ceram Soc 2005; 88 (11): 3088-95.

[14] Yoshida K, Mukai H, Imai M, Hashimoto K, Toda Y, Hyuga H, Kondo N, Kita H, Yano T. Reaction sintering of two-dimensional silicon carbide fiber-reinforced silicon carbide composite by sheet stacking method. J Nucl Mater 2007;367-370:769-73.[14] Yoshida K, Mukai H, Imai M, Hashimoto K, Toda Y, Hyuga H, Kondo N, Kita H, Yano T. Reaction sintering of two-dimensional silicon carbide fiber-reinforced silicon carbide composite by sheet stacking method. J Nucl Mater 2007; 367-370: 769-73.

[15] Lim KY, Jang DH, Kim YW, Park JY, Park DS. Fabrication of dense 2D SiC fiber-SiC matrix composites by slurry infiltration and a stacking process. Met Mater Int 2008;14(5):589-91.[15] Lim KY, Jang DH, Kim YW, Park JY, Park DS. Fabrication of dense 2D SiC fiber-SiC matrix composites by slurry infiltration and a stacking process. Met Mater Int 2008; 14 (5): 589-91.

[16] Yoshida K, Matsukawa K, Imai M, Yano T. Formation of carbon coating on SiC fiber for two-dimensional SiCf/SiC composites by electrophoretic deposition. Mater Sci Eng B 2009; In Press.[16] Yoshida K, Matsukawa K, Imai M, Yano T. Formation of carbon coating on SiC fiber for two-dimensional SiC f / SiC composites by electrophoretic deposition. Mater Sci Eng B 2009; In Press.

도1은 (a) 사용된 β-SiC 분말의 주사전자현미경 사진 및 (b) 표면에 흡착된 SiO2를 보여주는 고배율 투과전자현미경 사진이다.Figure 1 is a high magnification transmission electron micrograph showing (a) a scanning electron micrograph of the β-SiC powder used and (b) SiO 2 adsorbed on the surface.

도2는 (a) 사용된 Tyranno SA Grade 3 직조섬유 및 (b) 200nm 열분해 탄소층을 보여주는 주사전자현미경 사진이다.FIG. 2 is a scanning electron micrograph showing (a) Tyranno SA Grade 3 woven fibers used and (b) a 200 nm pyrolytic carbon layer.

도3은 사용된 β-SiC의 에탄올에서의 (a) pH 및 (b) 분산제의 종류 및 첨가량에 따른 제타포텐셜 거동이다.3 is zeta potential behavior according to the type and amount of (a) pH and (b) dispersant in ethanol of β-SiC used.

도4는 β-SiC 슬러리의 분산제의 종류 및 첨가량에 따른 점도 거동이다.4 is a viscosity behavior according to the type and amount of dispersant of the β-SiC slurry.

도5는 β-SiC 슬러리의 분산제의 종류에 따른 침강 밀도이다.5 is a settling density according to the type of dispersant of the β-SiC slurry.

도6은 진공 압력 구배를 활용한 슬러리 침착 구조도이다: (a) 내부 실린더, 외부 챔버 및 진공펌프를 포함한 전체 시스템, (b) 내부 실린더의 구성품 및 조립도, (c) 진공을 가할 때와 (d) 진공을 풀 때의 개요도.6 is a schematic diagram of slurry deposition utilizing a vacuum pressure gradient: (a) the entire system including the inner cylinder, the outer chamber and the vacuum pump, (b) the components and assembly of the inner cylinder, (c) when applying vacuum and ( d) Schematic diagram when releasing vacuum.

도7은 (a) 단순 함침과 (b) 진공압력 구배를 활용한 침착 시의 침착 정도의 비교이다.7 is a comparison of the degree of deposition during deposition utilizing (a) simple impregnation and (b) vacuum pressure gradient.

도8은 슬러리에 함유된 바인더 함량에 따른 침착 정도의 비교이다: (a) 0, (b) 5, (c) 10 및 (d) 45 중량% 의 PVB 바인더 함유.8 is a comparison of the degree of deposition according to the binder content contained in the slurry: (a) 0, (b) 5, (c) 10 and (d) 45 wt% PVB binders.

도9는 (a) 및 (b) 진공함침을 실시한 SiC 직조섬유의 소결구조; 및 (c) 및 (d) 진공함침을 실시한 직조섬유에 SiC 테이프를 삽입한 복합체의 소결구조이다.9 is a sintered structure of (a) and (b) SiC woven fibers subjected to vacuum impregnation; And (c) and (d) a sintered structure of a composite in which a SiC tape is inserted into a woven fiber subjected to vacuum impregnation.

도10은 제조된 복합체의 파괴단면 사진이다.10 is a fracture cross-sectional photograph of the prepared composite.

도11은 제조된 복합체의 3점 곡강도 시험시의 stress displacement 거동이다.11 is a stress displacement behavior during the three-point bending strength test of the prepared composite.

Claims (17)

바인더를 톨루엔, 에탄올 또는 이의 혼합물에 용해시키고, 이에 가소제 및 분산제를 첨가하여 바인더 용액을 제조하는 단계,Dissolving the binder in toluene, ethanol or a mixture thereof, and adding a plasticizer and a dispersant thereto to prepare a binder solution, 상기 바인더 용액에 SiC 분말을 첨가하여 pH 5.5 이하 또는 pH 8.5 이상인 SiC 슬러리를 제조하는 단계, 및 Adding SiC powder to the binder solution to prepare a SiC slurry having a pH of 5.5 or less or a pH of 8.5 or more; and 상기 SiC 슬러리에 SiC 직조섬유를 함침하여, SiC 분말을 SiC 직조섬유에 침착시키는 단계Impregnating the SiC woven fibers in the SiC slurry to deposit SiC powder on the SiC woven fibers 를 포함하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.Method for producing a high density silicon carbide fiber-reinforced silicon carbide composite (SiC f / SiC) comprising a. 청구항 1 에 있어서, 바인더는 분자량 55,000 g/mol 의 PVB (polyvinyl butyral) 인 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The method according to claim 1, wherein the binder is a polyvinyl butyral (PVB) having a molecular weight of 55,000 g / mol (SiC f / SiC) method for producing a high density silicon carbide fiber reinforced silicon carbide composite. 청구항 1 에 있어서, SiC 분말은 평균입도 52 nm 및 비표면적이 80 m2/g 를 갖는 β-SiC 분말인 것을 특징으로 하는 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The method of claim 1, wherein the SiC powder is a β-SiC powder having an average particle size of 52 nm and a specific surface area of 80 m 2 / g, the method of producing a silicon carbide fiber-reinforced silicon carbide composite (SiC f / SiC). 삭제delete 삭제delete 청구항 1 에 있어서, SiC 분말은 바인더/SiC 중량비가 0.4 가 되는 양으로 첨가되는 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법. The method according to claim 1, SiC powder, method for producing a high-density silicon carbide fiber reinforced silicon carbide composites (SiC f / SiC), it characterized in that the binder / SiC weight ratio is added in an amount which is 0.4. 삭제delete 삭제delete 삭제delete 청구항 1 에 있어서, 가소제는 디옥틸 프탈레이트인 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The method according to claim 1, wherein the plasticizer is dioctyl phthalate of high density silicon carbide fiber reinforced silicon carbide composites (SiC f / SiC), characterized in that. 청구항 1 에 있어서, 상기 바인더 용액에의 SiC 분말의 첨가시, 소결 조제 Al2O3:Y2O3:MgO (중량비 6.4:2.6:1.0) 를 추가로 첨가하는 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The high-density silicon carbide fiber according to claim 1, wherein at the time of addition of the SiC powder to the binder solution, a sintering aid Al 2 O 3 : Y 2 O 3 : MgO (weight ratio 6.4: 2.6: 1.0) is further added. Method of producing a reinforced silicon carbide composite (SiC f / SiC). 청구항 11 에 있어서, 소결 조제의 양은 SiC 분말 100 중량% 에 대하여 8 - 12중량% 인 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.Method of producing a high-density silicon carbide fiber reinforced silicon carbide composites (SiC f / SiC), characterized in that 12% by weight according to claim 11, the amount of sintering aid 8 with respect to 100% by weight of SiC powder. 청구항 1 에 있어서, 상기 바인더 용액에의 SiC 분말의 첨가 후, 6 mm 의 SiC 볼밀을 이용한 볼 밀을 36시간 동안 실시하는 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The method of claim 1, wherein after the addition of the SiC powder to the binder solution, a ball mill using a 6 mm SiC ball mill for 36 hours of a high density silicon carbide fiber reinforced silicon carbide composite (SiC f / SiC) Manufacturing method. 청구항 1 에 있어서, 바인더의 양은 용매 100중량%에 대하여 5 - 45 중량% 이고, 가소제의 양은 바인더 100중량%에 대하여 60 중량% 인 것을 특징으로 하는 고밀도 탄화규소 섬유강화 탄화규소 복합체(SiCf/SiC)의 제조방법.The method of claim 1, wherein the amount of binder is 5 to 45% by weight based on 100% by weight of the solvent, the amount of plasticizer is 60% by weight based on 100% by weight of the binder, the high density silicon carbide fiber reinforced silicon carbide composite (SiC f / SiC) manufacturing method. 다수의 SiC 직조섬유를 내부 실린터 중간에 장착하는 단계,Mounting a plurality of SiC woven fibers in the middle of the inner cylinder, 그 위에 SiC 슬러리를 부은 후, 진공을 가하는 단계,Pouring the SiC slurry on it, and then applying a vacuum, 실린더 내부에 공기를 서서히 주입하여 실린더의 압력을 대기압으로 만드는 단계, 및Gradually injecting air into the cylinder to bring the cylinder to atmospheric pressure, and SiC 직조섬유의 기공에 SiC 슬러리가 침착하는 단계SiC slurry is deposited in the pores of SiC woven fibers 를 포함하는 SiC 슬러리의 SiC 직조섬유에의 침착 방법.Method for depositing SiC woven fibers of SiC slurry comprising a. 청구항 15 에 있어서, 테이프 캐스팅으로 얻은 SiC 테이프를 다수의 SiC 직조섬유 사이에 끼워 넣는 것을 특징으로 하는 SiC 슬러리의 SiC 직조섬유에의 침착 방법.The method of claim 15, wherein the SiC tape obtained by tape casting is sandwiched between a plurality of SiC woven fibers. 하부가 밀봉된 내부 실린더, 이 실린더 내부에 직조섬유를 고정하기 위한 나사선, 직조섬유를 동시에 장착하기 위한 분리 링, 및 진공을 가해주기 위한 외부 실린더를 포함하는, 청구항 15 의 방법에 사용되는 치구.A jig for use in the method of claim 15 comprising an inner cylinder with a lower seal, a thread for securing the woven fiber inside the cylinder, a separation ring for mounting the woven fiber simultaneously, and an outer cylinder for applying a vacuum.
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