KR101070091B1 - X-ray source including insulation column - Google Patents

Abstract

According to the present invention, the gate electrode and the focusing electrode are separated and fixed through one or more insulating pillars provided on the cathode electrode, thereby easily controlling the position and spacing between the electrodes and simplifying the trajectory of the emitted X-rays. The present invention relates to an x-ray source including an insulating pillar that can be easily controlled.

Description

X-ray source including insulation column

The present invention relates to an x-ray source comprising an insulating pillar, and more particularly, by separating and fixing the gate electrode and the focusing electrode through one or more insulating pillars provided on the cathode electrode, the position and spacing of the electrodes The present invention relates to an X-ray source including an insulating pillar that can easily control the X-rays and can easily control the trajectory of the emitted X-rays with a simpler structure.

In general, an X-ray source is also called an X-ray tube. A type of vacuum discharge tube is used to emit accelerated electrons under a high voltage, and the emitted electrons collide with a target metal plate to generate X-rays. Such X-ray sources may be classified into hot cathode X-ray tubes and gas-sealed X-ray tubes according to the method of making X-rays.

However, since the vacuum discharge tube used in the above-described X-ray source has a disadvantage in that its volume becomes very large in order to emit a large amount of electrons, recently, as an electron emission source, a synchrotron, which is a particle accelerator, has a magnetic field and an electric power. Particle accelerators for changing the frequency of the vibrator to maintain a constant radius of the charged particles in a circular motion), a laser plasma accelerator using a high power laser and a solid target, or a hot electron emitting device.

However, 1) X-ray light source generated in synchrotron has the advantage that it can provide a high average output, but this also has a large size and requires a constant installation space, the installation site is limited and the production cost is relatively high There is this.

2) Since the laser plasma accelerator has a non-uniform energy of electrons accelerated using the laser plasma accelerator, there is a problem in that the quality of generated electron beam or X-ray is very low.

3) Similar to synchrotron, the hot electron emitting device has a limitation in large area, so there is a problem in that it cannot provide an electron emitting device of a desired size.

4) In the case of hot electrons and cold cathode electronic devices, there is a problem that the shape of the electron emission source is planar and the area of initial electron emission is larger than that of the point light source. Therefore, there is a problem that large spreadability of the initial electron emission form leads to enlargement of the focusing electrode and the gate electrode.

Accordingly, there is an increasing need to develop new emitters having electron emitters of various capacities, shapes, and arrangements to solve problems arising from conventional x-ray sources.

Moreover, the development of a new type of X-ray source having a simpler structure and easily adjusting the position of various electrodes used in the X-ray source and the distance between the electrodes and easily controlling the trajectory of the electrons emitted. The need is increasing.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to use an emitter in the form of a point light source and a surface light source as an electron emission device to reduce the emission shape and to provide an electron emission device having a desired size. By providing an x-ray source that can reduce the total volume of the x-ray source.

Furthermore, an object of the present invention is to manufacture the X-ray source to easily control the position and spacing between the electrodes used in the X-ray source and to facilitate the extraction of the various electrodes, 1) through controlling the position of the electrodes through the insulating pillar It is possible to control the electron emission characteristics of high efficiency, 2) easy to adjust the beam diameter through the removable method, 3) to reduce the maintenance cost by extending the life of the equipment through stable electron emission, 4) the electrode in the X-ray source It is easy to extract them, and 5) reduces manufacturing costs due to the simple shape of the insulated column, and 6) provides an X-ray source with high resolution and easy output control through fine beam diameter.

It is also an object of the present invention, by fixing and adjusting the position of the gate electrode and the focusing electrode through one or more insulating pillars provided on the cathode electrode, it is possible to easily control the position of the various electrodes and the spacing between each other, thereby It is to provide an X-ray source including an insulating pillar that can easily control the trajectory of the X-rays.

It is also an object of the present invention to provide an X-ray source including an insulating pillar that is configured to more easily add and remove various electrodes used in the X-ray source, thereby easily controlling the trajectory of the emitted X-rays. .

It is also an object of the present invention to utilize cathode, gate and focusing electrodes in contact with an external power source by using a space inside one or more insulated columns, which can be reduced in size and scale and can be operated more stably even in high voltage driving. It is to provide an x-ray source including an insulated column.

X-ray source according to the present invention, the cathode electrode; An emitter formed on the cathode electrode; An anode located above the emitter; A gate electrode positioned between the emitter and the anode electrode; And a focusing electrode positioned between the emitter and the anode electrode, wherein the cathode electrode is provided with at least one insulating pillar capable of fixing and adjusting positions of the gate electrode and the focusing electrode.

Preferably, the gate electrode and the focusing electrode is characterized in that the one or more insulating pillars are configured to pass through.

Preferably, the emitter is characterized in that it has any one or more of the form of a point light source and a surface light source.

Preferably, the at least one insulating pillar is formed in a hollow hollow inside, the at least one insulating pillar is characterized in that a wire connected to an external power source is located.

Preferably, at least one first hole is provided in each of the at least one insulating pillar, and at least one second hole is provided in each of the gate electrode and the focusing electrode, and penetrates the second hole and the first hole. Power is applied to each of the gate electrode and the focusing electrode from an external power source through a power connection member contacting the wire.

Preferably, the shape of the at least one insulating pillar is characterized in that any one or more of a circle, oval, triangle, square, polyhedron, and combinations thereof.

Preferably, the at least one insulating pillar is made of a material selected from the group consisting of ceramics, quartz, glass, Teflon, polymers and mixtures thereof.

Preferably, the position of each of the gate electrode and the focusing electrode is adjusted through the one or more insulating pillars to control the trajectory of electrons emitted from the emitter.

Preferably, at least one of the gate electrode and the focusing electrode is present, and the gate electrode and the focusing electrode are configured to be detachable from the at least one insulating pillar.

Preferably, the gate electrode and the focusing electrode is in the form of a plate member having a constant thickness in which there is a plate-shaped or circular hole having a constant thickness arranged at a constant interval.

Preferably, the gate electrode and the focusing electrode is characterized in that the circular ring shape.

Further preferably, the point light source type emitter is characterized in that it is any one of a conical, a tetrahedral and a cylindrical having a pointed tip and a polyhedron having a pointed tip.

Further preferably, the emitter in the form of a point light source is characterized in that the conductive material consisting of a metal, carbon-based material.

Further preferably, the surface light source type emitter is characterized in that the carbon structure formed on the silicon, metal, carbon series.

Further preferably, at least one emitter is present, and the number of emitters is controlled to control the amount of X-rays emitted.

According to the present invention, by separating and fixing the gate electrode and the focusing electrode through one or more insulating pillars provided on the cathode electrode, it is possible to easily control the position and spacing between the electrodes and thereby the trajectory of the emitted X-rays The effect can be easily controlled to a simpler structure.

According to the present invention, 1) high-efficiency electron emission characteristics can be controlled by adjusting the positions of electrodes through an insulated column, 2) beam diameter can be easily adjusted through a detachable method, and 3) lifetime of equipment through stable electron emission. Maintenance costs can be reduced, 4) easy to extract the electrodes used in the x-ray source, 5) reduced manufacturing costs due to the simple shape of the insulating pillar, and 6) beam diameter Through miniaturization, the effect of high resolution and easy output adjustment occurs.

In addition, according to the present invention, by using the space inside the one or more insulating pillars for the contact between the cathode, gate and focusing electrodes and the external power source, the size and scale can be reduced and can be operated more stably even at high voltage driving. Occurs.

In addition, the insulating pillar used in the present invention can be applied in a simple form, that is, circular and square pillars, and the like, since the processing of this type is very easy and mass production is possible, There is an effect that the processing cost of the insulating material can be reduced to reduce the manufacturing cost.

In addition, according to the present invention, according to the insulating properties of the product (for example, medical X-ray device, etc.) to be applied, it is possible to replace the insulating pillar as appropriate, thereby to have an electron beam of infinite size from nano level to various The effect is that it can be applied in the direction.

1A is a perspective view of an X-ray source 100 including an insulation pillar according to an embodiment of the present invention.
Figure 1 (b) is a cross-sectional view of the x-ray source 100 including an insulating pillar according to an embodiment of the present invention,
2 is a perspective view from below of an X-ray source 100 including an insulating pillar according to an embodiment of the present invention.
3 is a diagram schematically illustrating an insulation pillar used in the X-ray source 100 including the insulation pillar according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings a preferred embodiment of an x-ray source comprising an insulating pillar according to the present invention. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation. In addition, terms to be described below are terms defined in consideration of functions in the present invention, which may vary according to the intention or convention of a user or an operator. Therefore, the definitions of these terms should be made based on the contents throughout the specification.

<Examples>

1A is a perspective view of an X-ray source 100 including an insulation pillar according to an embodiment of the present invention, and FIG. 1B is an X-ray including an insulation pillar according to an embodiment of the present invention. 2 is a cross-sectional view of the source 100, FIG. 2 is a perspective view of an X-ray source 100 including an insulation pillar according to an embodiment of the present invention, and FIG. 3 is an insulation pillar according to an embodiment of the present invention. FIG. 4 is a diagram schematically illustrating an insulating pillar used for an x-ray source 100 including the same.

1 to 3, an X-ray source 100 according to an exemplary embodiment of the present invention may include a cathode electrode 110, an emitter 120, an anode electrode 130, a gate electrode 140, and a focusing electrode ( 150 and one or more insulating pillars 160. Note that this X-ray source 100 operates in a vacuum even if not mentioned otherwise.

The cathode electrode 110 is positioned on an upper portion of a substrate (not shown) formed of glass, metal, quartz, silicon, or alumina. The cathode 110 has an emitter in the form of a point light source and / or a surface light source described below. 120 is located.

In addition, the cathode electrode 110 is provided with one or more insulating pillars 160 to separate and fix the gate electrode 140 and the focusing electrode 150, which will be described later, to easily control the position and the distance between the electrodes. This can be done, which will be described later.

The emitter 120 serves to emit electrons, and in one embodiment of the present invention, it is illustrated as having a point light source configuration.

The emitter 120 in the form of such a point light source is not particularly limited as long as the tip has a pointed shape from which electrons are emitted. However, preferably, it may be any one of a conical shape, a tetrahedron shape and a cylindrical shape having a pointed tip and a polyhedron having a pointed tip.

The emitter 120 in the form of a point light source is characterized in that the diameter of the bottom surface of about 0.1 ~ 4mm and its height is 0.5 ~ 5cm. This is because the electrons can be effectively emitted as a point light source in the case of having the above-described size and scale, and the effect according to the present invention can be achieved.

In addition, the type of emitter 120 is not particularly limited, but is preferably a conductive material composed of a metal or a carbon-based material.

On the other hand, the emitter 120 is to note that the emitter in the form of a surface light source as well as a point light source can be used according to the control of the trajectory of the electrons emitted or the performance of the desired X-ray source. In this case, the emitter in the form of a surface light source is preferably a carbon structure formed on silicon, metal, carbon series.

The anode electrode 130 is located above the emitter 120.

The anode electrode 130 is provided with an electrode and / or a DC power supply (not shown) for applying power, but this is well known and the detailed description thereof will be omitted.

The material of the anode electrode 130 is generally formed of a material selected from the group consisting of copper, tungsten, manganese, Maldives and combinations thereof. Also, in the case of a thin film type X-ray, the anode electrode 130 may be formed of a metal thin film.

Due to this configuration, when the emitter 120 described above emits electrons, the emitted electrons collide with the metal constituting the anode electrode 130, and then generate X-rays while reflecting or passing through the metal. do.

The gate electrode 140 is positioned between the emitter 120 and the anode electrode 130. The gate electrode 140 increases the amount of electrons emitted from the emitter 120 and accelerates the speed of the emitted electrons.

The focusing electrodes 150a and 150b are positioned between the gate electrode 140 and the anode electrode 130. The focusing electrode 150 allows electrons emitted from the emitter 120 to move toward the anode electrode 130 without spreading or scattering.

Meanwhile, it is noted that a glass filter (not shown) may be further provided on the upper side of the anode electrode 130 to filter the X-rays generated by the reflection or transmission after the collision with the anode electrode 130.

In one embodiment of the present invention, although one such gate electrode 140 is present and two focusing electrodes 150a and 150b are illustrated as being present, it is possible to adjust the trajectory of the emitted electrons or adjust the performance of a desired X-ray source. Note that the number of the gate electrode 140 and the focusing electrodes 150a and 150b may vary.

In addition, the gate electrode 140 and the focusing electrodes 150a and 150b may be detachably configured from one or more insulating pillars 160 to be described later, so that the extraction thereof may be easily performed.

The shape of the gate electrode 140 and the focusing electrodes 150a and 150b may be determined according to the trajectory of electrons emitted from the emitter 120. In an embodiment of the present invention, the electrodes are shown as a plate-shaped member having a certain thickness in which a circular hole exists, but the electrodes are shaped like a cylindrical cylinder having a circular ring shape or a hole therein. Note that it may be formed in the form of a plate having a constant thickness and the like disposed at regular intervals.

One or more insulating pillars 160 are essential components of the present invention, and are provided to be provided on the cathode electrode 110 or inserted in the vertical direction to the cathode electrode 110, so that the above-described gate electrode 140 And to separate the focusing electrodes 150a and 150b, and to fix and adjust the positions of the gate electrode 140 and the focusing electrodes 150a and 150b.

The principle of controlling the positions of the at least one insulating pillar 160 and the gate electrode 140 and the focusing electrodes 150a and 150b will be described below.

One or more insulating pillars 160 are configured to penetrate through the gate electrode 140 and the focusing electrodes 150a and 150b. That is, through-holes corresponding to the size and shape of the insulating pillar 160 are formed in the gate electrode 140 and the focusing electrodes 150a and 150b so that the insulating pillar 160 can pass therethrough. In addition, at least one first hole 162 is formed in the side surface of the insulating pillar 160, and at least one second hole 151 is formed in each of the gate electrode 140 and the focusing electrodes 150a and 150b. Will be formed.

In the accompanying drawings, three first holes 162 are formed in the side surface of the cylindrical insulating pillar 160, but these are merely exemplary, and the gate electrode 140 and the focusing electrodes 150a and 150b are also provided. Note that four or more second holes 151 are formed in each side portion, but this is merely illustrative.

The insulating pillar 160 and each electrode using a power connection member (not shown, for example, a screw or a fastening member having a predetermined shape) that can penetrate the second hole 151 and the first hole 162. By fixing the, the gate electrode 140 and the focusing electrodes 150a and 150b can be separated from each other and maintained at a predetermined position.

At this time, by selectively adjusting the position of the first hole 162 formed in each insulating pillar 160, it is possible to easily control the distance between the electrodes.

On the other hand, the one or more insulating pillars 160 may be in the form of a full column, but referring to Figure 3, in one embodiment of the present invention, the one or more insulating pillars 160 is formed of a hollow hollow inside A wire 161 connected to an external power source is positioned inside the insulation pillar.

In this case, the power supply connecting member penetrates through the second hole 151 and the first hole 162 and contacts the wire located inside the insulating pillar 160, so that the gate electrode 140 and the focusing electrode 150a, 150b) Appropriate power can be applied to each.

For example, when there is one gate electrode 140 used in the X-ray source 100 and two focusing electrodes 150a and 150b, three insulating pillars 160 may be provided. desirable. In this case, the emitter 120 is located in the center of the cathode electrode 110, it is preferable that the three insulating pillars are positioned to surround the emitter 120, but the position of the three insulating pillars is not necessarily limited thereto. do. On the other hand, when one more focusing electrode is added, it is preferable that four insulating pillars 160 are positioned.

Inside the three insulated pillars, wires connected to an external power source are respectively located, and one electrode per one insulated pillar is connected to a power through a second hole formed in each electrode and a first hole formed in each insulated pillar. By being connected and fixed by the member, appropriate power can be applied to each electrode.

On the other hand, the insulating pillar 160 is provided with a separate DC power supply (not shown) for applying power to each electrode in the case of a columnar shape is filled inside, it can be configured to apply power to each electrode have.

Here, it is preferable that the shape of one or more insulating pillars is any one or more of circular, elliptical, triangular, square, polyhedral and combinations thereof.

In addition, the at least one insulating pillar is preferably composed of a material selected from the group consisting of ceramic, quartz, glass, Teflon, polymer and mixtures thereof.

Due to this configuration, according to the present invention, 1) by adjusting the position of the first hole 162 formed in each of the insulated pillars it is possible to adjust the fixed position and the distance between each of the gate electrode and the focusing electrode, 2) insulation The number of electrodes that can be used can be adjusted by adjusting the number of pillars. 3) By controlling the shape and arrangement of the insulating pillars, it is possible to easily control the change of the electron trajectory emitted from the emitter 120. .

Therefore, according to the X-ray source 100 according to an embodiment of the present invention 1) it is possible to control the electron emission characteristics of the high efficiency by adjusting the position of the electrodes through the insulating pillar, 2) the beam diameter adjustment through the removable method 3) It can reduce the maintenance cost by extending the life of the equipment through stable electron emission, 4) It is easy to extract the electrodes used in the X-ray source, and 5) The processing cost due to the simple shape of the insulation pillar Reduction reduces the manufacturing cost, and 6) the effect of high resolution and easy power control through finer beam diameter.

As mentioned above, although the present invention has been illustrated and described with reference to specific embodiments, the present invention is not limited thereto, and the following claims are not limited to the scope of the present invention without departing from the spirit and scope of the present invention. It can be easily understood by those skilled in the art that can be modified and modified.

<Description of Major Symbols in Drawing>
100 x-ray source
110: cathode electrode
120: emitter
130: anode electrode
140: gate electrode
150a, 150b: focusing electrode
151: Second Hall
160: insulated pillar
161: wire
162: Hall 1

Claims (11)

Cathode electrode;
An emitter formed on the cathode electrode;
An anode located above the emitter;
A gate electrode positioned between the emitter and the anode electrode; And
And a focusing electrode positioned between the emitter and the anode electrode.
The cathode electrode is provided with one or more insulating pillars for fixing and adjusting the position of the gate electrode and the focusing electrode,
The gate electrode and the focusing electrode is characterized in that the one or more insulating pillars are configured to pass through,
X-ray source.
delete The method of claim 1,
The emitter is characterized in that it has a form of any one or more of the point light source form and the surface light source form,
X-ray source.
The method of claim 1,
The one or more insulating pillars are formed hollow hollow inside,
In the interior of the at least one insulating pillar, characterized in that the wire connected to the external power source,
X-ray source.
The method of claim 4, wherein
Each of the one or more insulating pillars is provided with one or more first holes,
At least one second hole is provided in each of the gate electrode and the focusing electrode,
Characterized in that the power is applied to each of the gate electrode and the focusing electrode from an external power source through a power connection member which penetrates the second hole and the first hole to contact the wire.
X-ray source.
The method of claim 1,
The shape of the at least one insulating pillar is characterized in that at least one of circular, oval, triangular, square, polyhedral and combinations thereof.
X-ray source.
The method of claim 1,
The at least one insulating pillar is characterized in that consisting of a material selected from the group consisting of ceramic, quartz, glass, Teflon, polymer and mixtures thereof,
X-ray source.
The method of claim 1,
By controlling the fixing position of each of the gate electrode and the focusing electrode through the at least one insulating pillar, the trajectory of the electrons emitted from the emitter is controlled,
X-ray source.
The method of claim 1,
At least one gate electrode and at least one focusing electrode are present.
The gate electrode and the focusing electrode is configured to be detachable from the at least one insulating pillar,
X-ray source.
The method of claim 1,
The gate electrode and the focusing electrode,
Characterized in that it is in the form of a plate member having a predetermined thickness in which a plate-shaped or circular hole having a predetermined thickness arranged at regular intervals,
X-ray source.
The method of claim 1,
And the gate electrode and the focusing electrode are in the form of a circular ring.

Images