KR101066665B1 - Double-belt press apparatus and manufacturing method of laminate with using the same - Google Patents

Abstract

Provided is a double belt press device or the like which can stably form a flexible metal foil laminate having a good appearance even after continuous production over a long period of time.

The double belt press apparatus is equipped with an endless belt having a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C. This increases the durability of the endless belt and ensures the surface smoothness of the endless belt, so that no defect is transferred to the product. Thus, a flexible metal foil laminate having a good appearance can be continuously produced.

Flexible metal foil laminate, double belt press device, endless belt, surface smoothness, hydraulic plate, hydraulic hermetic frame

Description

 Double-belt press apparatus and manufacturing method of laminate with using the same}

1 is a graph (graph) comparing the 0.2% yield strength of the endless belt A at room temperature and under 300 ° C.

2 is a graph (graph) comparing the 0.2% yield strength of the endless belt B at room temperature and 300 ° C.

3 is a graph (graph) comparing the 0.2% yield strength of the endless belt C at room temperature and under 300 ° C.

4 is a view showing an example of the prior art, reference diagram showing an outline of a hydraulic double belt press device.

Fig. 5 is a view showing an example of the prior art, and is a schematic view of the hydraulic surface 31 of the hydraulic plate 3 of the hydraulic double belt press apparatus.

It is a figure which shows the prior art, and is a cross-sectional schematic diagram of the part which applies the oil_pressure | hydraulic P to the sheet | seat material 2 of the hydraulic-type double belt press apparatus.

<Description of the symbols for the main parts of the drawings>

       1: endless belt 2: sheet material

       3: hydraulic plate 4: hydraulic sealing frame

       5; Hydraulic medium D: drum

       P: Hydraulic X: Direction of sheet material

This invention relates to the double belt press apparatus used for manufacture of a laminated body, and the manufacturing method using the said apparatus. More specifically, the present invention relates to a double belt press apparatus and a manufacturing method using the apparatus, which are used for the production of a flexible metal laminate obtained by thermocompression bonding a thermocompression multilayer polyimide film and a metal foil.

BACKGROUND ART An aromatic polyimide film and a laminate coated with metal foil are widely used for substrate materials of electronic parts and the like. Among them, the flexible metal foil laminate includes a thermocompression multilayer polyimide film (in which a highly heat-resistant aromatic polyimide layer and a thermocompression aromatic polyimide layer are integrally laminated by a casting film forming method) and a metal foil. It is laminated. Since this laminated body does not use the adhesive agent (embossing resin etc.) at the time of coating an aromatic polyimide film and metal foil, it is excellent in heat resistance and dimensional stability.

The flexible metal foil laminate is produced by thermocompression bonding of a thermocompression multilayer polyimide film and a metal foil after thermocompression bonding under pressure using a double belt press apparatus. In thermocompression, it is heated up to around 400 ° C.

Here, the term "double belt press device" refers to continuously feeding a plurality of sheet materials between endless belts arranged in a pair of upper and lower sides, and thermally compressing the sheet material through an end league belt by a thermocompression bonding apparatus to form a laminate. It is a device to form. There are several kinds of thermocompression bonding apparatuses such as a method of surface pressure using a hydraulic plate (called a “hydraulic method”), a roll press method formed by a drum for rotating the endless belt and / or a roller provided between the drums. .

As illustrated in FIG. 4, the hydraulic double belt press device includes a plurality of sheet materials 21 to 1 between the endless belts 1 and 1 arranged in a pair of upper and lower parts rotated by a drum indicated by the symbol D. FIG. (26) is continuously fed in the direction of the arrow X, and the sheet material 21 through ((b) through the endless belt by the hydraulic plate 3 disposed in the inner region 11 of each of the endless belts 1 and 1; The apparatus which forms the laminated bodies 27 and 28 by thermocompression bonding 23, 24-26, respectively. For example, when manufacturing a flexible metal foil laminated body, by supplying the metal foil 21, 23, 24, 26 and the thermocompression multilayer polyimide film 22, 25 as a sheet | seat material to the apparatus, it is a product (27, 28) are produced. The products 27 and 28 are produced as a three layer laminated body of metal foil / polyimide film / metal foil, respectively.

FIG. 5 is a schematic diagram of the hydraulic surface 31 of the hydraulic plate 3 shown in FIG. 4. The hydraulic surface 31 of the hydraulic plate 3 is a surface opposite to the inner surface 12 of the endless belt 1 (see FIG. 4). As shown in FIG. 5, a groove 33 is formed along the circumference 32 of the hydraulic surface 31 on the hydraulic surface 31 of the hydraulic plate 3. The groove 33 is equipped with a hydraulic sealing frame 4. In addition, arrow X has shown the advancing direction of the sheet | seat material thermally crimped.

It is a cross-sectional schematic diagram which shows part A in FIG. As shown in FIG. 6, between the upper and lower endless belts 1 and 1, the sheet materials 2 and 21 to 26 travel in the direction of the arrow X, and the sheet materials 2 face the hydraulic plate 3. As shown in FIG. It is crimped by hydraulic pressure P in a viewing area.

The hydraulic sealing frame 4 is fitted into the groove 33 of the hydraulic plate 3. The hydraulic hermetic frame 4 is in contact with the endless belt 1 and faces the hydraulic plate 3. The hydraulic medium 5 is trapped by the pressing surface 31 of the hydraulic plate 3, the inner side 41 of the hydraulic sealing frame 4, and the endless belt 1. In the laminate structure, the sheet material 2 is pressurized by the hydraulic pressure P through the endless belt 1. In addition, heating is carried out through the endless belt 1 as well as pressurization by heating the hydraulic medium.

On the other hand, the roll press type double belt press apparatus, which is a typical example, is heated and pressurized through an endless belt by a group of heatable pressure rollers installed between drums installed to rotate the endless belt instead of the hydraulic hydraulic plate. It is an apparatus which forms a laminated body by this. In addition, the drum or the roller is mainly made by dielectric heating.

Patent Literature 1 describes a flexible metal foil laminate. The patent document 2 and patent document 3 have shown the specific structural example of a hydraulic double belt press apparatus, and patent document 4 the roll press type double belt press apparatus.

[Patent Document 1] Japanese Patent Laid-Open No. 2000-103010

[Patent Document 2] Japanese Patent Laid-Open No. 1986-144298

[Patent Document 3] Japanese Patent Laid-Open No. 1987-74611

[Patent Document 4] Japanese Patent Laid-Open No. 2001-129919

By the way, the flexible metal foil laminate is widely used for substrate materials of electronic components in conjunction with technological innovations such as high functionalization and high resolution of electronic devices. For this reason, this flexible metal foil laminate has been particularly required for high surface smoothness. However, in the long-term continuous manufacture of the flexible metal foil laminated body using the said double belt press apparatus, the part which damaged the surface smoothness of the product may generate | occur | produce.

Therefore, the present invention examines in detail the cause of the damage to the surface smoothness in detail, and improves the double belt press device so that the double belt can stably form a flexible metal foil laminate having a good appearance even after continuous production over a long period of time. It is a principal object to provide a press apparatus and a method for producing a laminate using the apparatus.

The present inventors have studied in detail the cause of the damage to the surface smoothness, and as a result, the drum disposed in the inner region of the endless belt, the hydraulic contact frame used by the hydraulic method, the pressure roller used in the roll press method and the endless When the belt is in contact, damage occurs inside the endless belt due to the physical action exerted by the contact and the mixing of foreign matter in the contact gap, and the damage is caused by fine distortion on the outside (between the endless belts). We found that we were transferred to product.

Therefore, when studying endless belts such that such minute distortion is unlikely to occur, it was concluded that by using a material with a specific strength above a certain value, the surface smoothness of the product can be effectively prevented from being damaged. . In addition, in this invention, "damage surface smoothness" means that a recessed part or a convex part is formed in the surface of the laminated body which is a product, regardless of a specific shape, and does not interpret it in detail.

More specifically, an endless belt having a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C was newly found to be difficult to deform even when the double belt press device was continuously operated for a long time. This invention is completed by such a novel knowledge.

That is, in the double belt press apparatus according to the present invention, first, a plurality of sheet materials are continuously fed between endless belts arranged in a pair of upper and lower sides, and the thermo-compression apparatus disposed in the respective inner regions of the endless belts is used. A double belt press apparatus for forming a laminate by thermally pressing the sheet material through an endless belt, wherein the endless is made of precipitation hardening stainless steel, and the 0.2% yield strength at 300 ° C is 1100N / mm2, and is 200 to 400 ° C. The thermal compression is carried out under the temperature condition of.
In this double belt press apparatus, the endless belt may be formed of a precipitation hardening stainless steel containing at least C, Si, Mn, Cr, Ni, Cu, and Mo as an alloy component, and containing Fe in an amount of 75.540% by weight or more.
Moreover, the said thermocompression bonding apparatus can be made into a hydraulic system or a roll press system, for example.
The endless belt may further contain Ti as an alloy component.

Subsequently, in the manufacturing method which concerns on this invention, 200-400 degreeC temperature conditions using the double-belt press apparatus which consists of precipitation hardening stainless steel, and equipped with the endless belt whose 0.2% yield strength under 300 degreeC conditions is 1100 N / mm <2> or more. Below, a plurality of sheet materials are thermocompressed to prepare a laminate.
The laminate may be, for example, a flexible metal laminate in which metal foil is thermocompression-bonded to a surface of at least one side of a high heat resistant polyimide film.

Description of Embodiments Preferred embodiments and examples of the present invention will be described below.

First of all, the present invention can be used for a double belt press apparatus. Moreover, it is suitable for the hydraulic method which has a hydraulic contact frame in a thermocompression bonding apparatus, or the roll press system which performs pressurization and heating by a drum and / or a roller, and is especially suitable when thermocompression bonding under high temperature conditions 200 degreeC or more.

The endless belt used in this invention measures the 0.2% yield strength under 300 degreeC conditions, and employ | adopts this 0.2% yield strength more than 1100 N / mm <2>.

When manufacturing the flexible metal foil laminate by the double belt press device, the endless belt is also heated up to about 400 ° C, so that the endless belt can be judged whether or not the endless belt has sufficient durability even if the endless belt is measured at room temperature. it's difficult.

On the contrary, by measuring the 0.2% yield strength under 300 ° C conditions, the durability of the endless belt can be judged easily and accurately. In addition, the present invention also has the advantage that the endless belt can be inspected in advance before the endless belt is attached to the double belt press apparatus, and it is possible to empirically predict and determine how many hours of continuous operation is possible.

As an endless belt with a 0.2% yield strength of 1100 N / mm <2> or more under 300 degreeC conditions, a precipitation hardening type stainless steel belt can be employ | adopted, for example.

The term “precipitation hardening stainless steel” refers to adding one, two or more kinds of Al, Ti, Nb, Cu, and the like to heat-treat and increasing the strength. The heat treatment is carried out by keeping the elements such as Al, Ti, Nb, Cu at a supersaturated state, and after the heat treatment, by precipitating a compound between metals by leaving it in low humidity, the high strength of the stainless steel is achieved. Precipitation hardening stainless steels are classified into martensite, ferrite, austenite, and the like by the composition of the matrix.

As the endless belt having a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C. conditions, one containing at least titanium can be employed. In particular, precipitation hardening stainless steel containing at least titanium is preferable.

In the present invention, the flexible metal foil laminate refers to a laminate of an aromatic polyimide film and a metal foil. Aromatic polyimide-based films are suitable for the continuous production of a laminate comprising a thermocompression bonding process as in the present invention.

For example, a high heat resistant aromatic polyimide film having a thickness of 5 to 150 µm, particularly a high heat resistant aromatic polyimide having a two-layer structure of a thermocompression aromatic polyimide having a thickness of 2 to 30 µm and a high heat resistant aromatic polyimide having a thickness of 5 to 125 µm. Polyimide films are suitable. As the metal foil, for example, an electrolytic copper foil, a rolled copper foil, an aluminum foil, a stainless foil, or the like having a thickness of 5 to 50 µm can be used.

[Example]

First, endless belts A, B, and C having three kinds of compositions shown in Table 1 were produced, and continuous manufacturing experiments were conducted to compare endurance time and 0.2% yield strength. The continuous manufacturing experiment was carried out continuously under a heating temperature of 300 ° C. using a double belt press method. As a sheet material, a polyimide film (manufactured by Ubekosan, thickness of 25 μm) and copper foil (manufactured by Nippon Sardenkai Co., Ltd.) Thickness of 18 μm).

Table 1

The result of this Example 1 was shown to the following [Table 2] and attached FIGS. 1-3. 1 to 3 show [Table 2] in a graph. 1 shows an endless belt A, FIG. 2 shows an endless belt B, and FIG. 3 shows an endless belt C. FIG. In addition, the measurement of endurance time measured the time until the part which damages surface smoothness (an unevenness | corrugation of width 1mm or more in a planar direction, and 1 micrometer or more in width direction in a vertical direction) arises. The 0.2% yield strength was measured by the method defined by JIS Standards Z2201 and Z2241.

[Table 2]

As shown in Table 2 and FIG. 1, the endless belt A has a short endurance of about 600 hours even at room temperature and under 300 ° C. The 0.2% yield strength at room temperature falls below 1100 N / mm 2 under 300 ° C., compared to all three at around 1400 N / mm 2. Therefore, whether or not there is durability for continuous operation is apparently low value under the condition of 300 ° C., which cannot be judged at 0.2% yield strength at room temperature, and serves as a criterion for determination of durability.

Subsequently, as shown in Table 2 and FIG. 2, the endless belt B has a high durability of 1000 hours or more even at room temperature and under 300 ° C. The endless belt B is not much different from the endless belt A in terms of 0.2% yield strength at room temperature, but the 0.2% yield strength under 300 ° C is obviously higher than the endless belt A at 1100 N / mm 2 or more. Therefore, the result of the 0.2% yield strength measurement under 300 degreeC conditions is an index of durability.

Subsequently, as shown in Table 2 and FIG. 3, the endless belt C has a high durability of 1000 hours or more even at room temperature and under 300 ° C. Similarly to the endless belt B, the endless belt C had a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C, and apparently higher than the endless belt A. Therefore, the result of the 0.2% yield strength measurement under 300 degreeC conditions is an index of durability.

As a result, it can be judged that the endless belt having a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C has high durability. Therefore, by using the endless belt, the flexible metal foil laminate can be continuously produced without endless belt replacement.

In addition, when comparing the materials of the endless belt A, the endless belt B and the endless belt C, there is a difference in whether or not it contains titanium as shown in Table 1. Thereby, it can be estimated that the endless belt containing titanium has higher durability.

By the double belt press apparatus or the laminated body manufacturing method using the said apparatus which concerns on this invention, manufacture of a flexible metal laminated body can continuously and stably manufacture a high quality flexible metal laminated body with high surface smoothness for a long time. Therefore, manufacturing cost of the said laminated body can be reduced.

The double belt device according to the present invention or the method for producing a laminate using the device can be applied not only to the production of a flexible metal laminate but also to a relatively thick laminate, for example. In particular, the present invention is useful for laminates that need to be thermally pressed at a high temperature of 200 ° C or higher, laminates that require precise thermal compression and high surface smoothness.

By using the apparatus according to the present invention, it is possible to manufacture a good-looking laminate continuously and stably over a long period of time, thereby enabling industrial use. In particular, the apparatus or method according to the present invention is industrially useful in that the flexible metal foil laminate, which is widely used for electronic materials, can be continuously and stably produced for a long time.

Claims (6)

A plurality of sheet materials are continuously fed between the endless belts arranged in a pair of upper and lower sides, and the sheet material is thermally compressed through the endless belts by a thermocompression apparatus disposed in respective inner regions of the endless belts to form a laminate. In the double belt press apparatus to form, The endless belt is made of precipitation hardening stainless steel, and the 0.2% yield strength at 300 ° C. is not less than 1100 N / mm 2, Double belt press apparatus which performs thermocompression bonding under the temperature conditions of 200-400 degreeC. The method of claim 1, The endless belt is formed of a precipitation hardening stainless steel containing at least C, Si, Mn, Cr, Ni, Cu, and Mo as an alloy component and having an Fe content of 75.540 wt% or more. The method according to claim 1 or 2, And said thermocompression bonding apparatus is a hydraulic press or a roll press thermocompression apparatus. The method according to claim 1 or 2, The endless belt further comprises Ti as an alloy component. Lamination which consists of precipitation hardening stainless steel and thermo-compresses a plurality of sheet materials under a temperature condition of 200 to 400 ° C. using a double belt press device equipped with an endless belt having a 0.2% yield strength of 1100 N / mm 2 or more under 300 ° C. conditions. Method of making sieves. The method of claim 5, The laminated body is a method for producing a flexible metal foil laminate, characterized in that the metal foil is thermocompression-bonded to the surface of at least one side of the high heat resistant polyimide film.

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