KR101064964B1 - Colling structure of crucible shaft for ingot growing apparatus - Google Patents

Colling structure of crucible shaft for ingot growing apparatus Download PDF

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KR101064964B1
KR101064964B1 KR1020090113464A KR20090113464A KR101064964B1 KR 101064964 B1 KR101064964 B1 KR 101064964B1 KR 1020090113464 A KR1020090113464 A KR 1020090113464A KR 20090113464 A KR20090113464 A KR 20090113464A KR 101064964 B1 KR101064964 B1 KR 101064964B1
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crucible
drive shaft
water cooling
cooling chamber
pedestal
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KR1020090113464A
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KR20110056949A (en
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박진섭
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(주)에스테크
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

본 발명은 잉곳성장장치(Ingot Growing Apparatus)에 설치되는 도가니(도가니 爐) 구동축(Crucible Shaft)의 상부에 보조수냉실(14)(15)을 형성하여 보다 효율적인 냉각이 이루어지도록 함으로써 장기간 사용에 따른 열변형이나 녹아 내림이 방지되고, 상부 핫죤(Hot Zone)과의 결합력이 향상되며, 장기간 사용하더라도 냉각수의 누수가 방지되어 안전사고가 발생하지 않도록 한 것이다.The present invention forms an auxiliary water cooling chamber (14, 15) on the top of the crucible drive shaft (Crucible Shaft) installed in the Ingot Growing Apparatus so that more efficient cooling is achieved according to long-term use. It prevents heat deformation and melting, improves the bonding force with the upper hot zone, and prevents leakage of cooling water even when used for a long time so that safety accidents do not occur.

잉곳성장장치, 도가니, 구동축, 냉각수, 열변형, 회전, 승강, 페데스탈 Ingot Growth Device, Crucible, Drive Shaft, Coolant, Heat Deflection, Rotation, Lift, Pedestal

Description

잉곳성장장치의 도가니 구동축 냉각구조{COLLING STRUCTURE OF CRUCIBLE SHAFT FOR INGOT GROWING APPARATUS}COLLING STRUCTURE OF CRUCIBLE SHAFT FOR INGOT GROWING APPARATUS}

본 발명은 잉곳성장장치(Ingot Growing Apparatus)의 도가니 구동축(Crucible Shaft)에 보조수냉실을 형성하여 열변형이 방지되도록 한 것이다.The present invention is to form an auxiliary water cooling chamber in the crucible drive shaft (Crucible Shaft) of the Ingot Growing Apparatus to prevent thermal deformation.

일반적으로 단결정 잉곳(Ingot)은 초크랄스키(Czochralski) 결정 성장법(CZ 법)으로 제조된다. 즉, 핫죤 영역에 설치되는 도가니에 실리콘(폴리 실리콘) 등의 고체 원료를 충전하고 히터로 가열 및 용융시켜 융액을 만든 다음에, 단결정 시드(seed)를 시드 커넥터에 매달아 융액에 접촉시킨 후 서서히 회전 및 인상시키면, 네크부(neck part), 직경이 증가하는 숄더부(shoulder part), 직경이 일정한 원기둥 형태의 바디부(body part)의 순서로 인상되고, 마지막으로 직경이 감소하는 테일부(tail part)를 끝으로 단결정 잉곳이 얻어진다.In general, single crystal ingots are manufactured by Czochralski crystal growth method (CZ method). That is, a crucible installed in the hot zone region is filled with a solid material such as silicon (polysilicon), heated and melted with a heater to form a melt, and then a single crystal seed is suspended in a seed connector to contact the melt, and then rotated slowly. And when pulled up, a neck part, a shoulder part of which diameter is increased, and a body part of a cylindrical shape having a constant diameter are pulled up, and finally, a tail part of which diameter is decreased. At the end of the part, a single crystal ingot is obtained.

상기 잉곳성장장치(또는 잉곳생산장치)는 냉각수단이 구비된 베이스 챔버(진 공챔버)와, 상기 베이스 챔버 내부에 설치되고 폴리 실리콘(Hot Melt)을 용융시키는 석영 도가니와, 석영 도가니를 지지하는 흑연 도가니와, 석영 도가니와 흑연 도가니를 지지하는 페데스탈과, 상기 도가니를 가열하는 히터와, 상기 히터로 대전력(大電力)을 공급하는 전극(전극봉)과, 상기 페데스탈을 지지ㆍ회전ㆍ상승ㆍ하강시키는 구동축 및 구동수단과, 성장되는 잉곳을 상승시키는 잉곳 인상수단과, 게이트밸브, 진공수단, 냉각수단, 각종 제어수단과 계측수단 등으로 구성된다.The ingot growth apparatus (or ingot production apparatus) includes a base chamber (vacuum chamber) provided with cooling means, a quartz crucible installed inside the base chamber to melt polymelt, and a quartz crucible. A pedestal supporting a graphite crucible, a quartz crucible and a graphite crucible, a heater for heating the crucible, an electrode (electrode) supplying a large power to the heater, and the pedestal supporting, rotating, raising, The driving shaft and the driving means for lowering, the ingot pulling means for raising the growing ingot, the gate valve, the vacuum means, the cooling means, various control means, the measuring means and the like.

도 1은 종래 잉곳성장장치에 설치된 도가니 구동축의 냉각구조를 도시한 것으로, 베이스 챔버(1) 내부에 설치되고 폴리 실리콘(2)을 용융시키는 석영 도가니(3)와, 석영 도가니(3)를 지지하는 흑연 도가니(4)와, 석영 도가니(3)와 흑연 도가니(4)를 지지하는 페데스탈(5)과, 상기 페데스탈(5)을 지지ㆍ회전ㆍ상승ㆍ하강시키는 도가니 구동축(6) 및 구동수단과, 도가니 구동축(6) 내부에 설치되는 수냉실(7)과, 상기 수냉실(7)과 연결되는 급수구(8) 및 출수구(9)와, 급수구(8)와 출수구(9)가 연결되는 냉각수단(10)과 온도센서 및 온도제어기로 구성되며, 급수구(8)에 연결되는 유도관(11)은 수냉실(7) 상부 까지 상승 연장되어 냉각수가 수냉실(7)의 상부에서 하부로 이동하면서 효율적인 냉각이 이루어지도록 구성된다.1 illustrates a cooling structure of a crucible drive shaft installed in a conventional ingot growth apparatus, and supports a quartz crucible 3 and a quartz crucible 3 installed inside the base chamber 1 to melt polysilicon 2. A graphite crucible (4), a pedestal (5) supporting a quartz crucible (3) and a graphite crucible (4), a crucible drive shaft (6) and driving means for supporting, rotating, raising and lowering the pedestal (5). And a water cooling chamber 7 installed inside the crucible drive shaft 6, a water supply port 8 and an outlet 9 connected to the water cooling chamber 7, and a water supply port 8 and an outlet 9. Consisting of the cooling means 10 and the temperature sensor and the temperature controller connected, the induction pipe 11 connected to the water supply port 8 is extended to the upper portion of the water cooling chamber (7) so that the cooling water is the upper portion of the water cooling chamber (7) Moving from bottom to bottom is configured to achieve efficient cooling.

상기 페데스탈(5)은 내열특성이 우수한 카본이나 카본 그라파이터로 구성되며, 중앙 하부에는 하향 돌출형 축봉이 형성되고, 축봉 하단부에는 원추형 돌출부(12)가 형성되며, 수냉실(7)이 구비된 도가니 구동축(6)의 상단부에는 상기 돌출 부(12)가 결합될 수 있도록 원추형 요입부(13)가 형성되며, 상기 돌출부(12)와 요입부(13)는 폴리 실리콘(2) 용액과 도가니(3)(4) 및 페데스탈(5)의 자중에 의해 중력 결합 및 접촉된다.The pedestal (5) is composed of carbon or carbon graphite having excellent heat resistance, a downwardly protruding shaft is formed at the bottom of the center, and a conical protrusion (12) is formed at the lower end of the shaft, and the water cooling chamber (7) is provided. Conical indentation 13 is formed at the upper end of the crucible drive shaft 6 so that the protrusion 12 can be coupled, and the protrusion 12 and the recess 13 are formed of polysilicon 2 solution and crucible ( 3) Gravitational coupling and contact by self weight of (4) and pedestal (5).

상기 페데스탈(5)은 내열특성이 우수한 카본이나 카본 그라파이터으로 구성되는 반면, 도가니 구동축(6)은 페데스탈(5)에 비하여 내열성은 떨어지지만 가격이 저렴하고, 강도가 우수하고, 제조가 쉬운 스텐레스로 구성되며, 상기 페데스탈(5)과 도가니 구동축(6)은 이종 재질이고 열팽창 계수도 상이하다. The pedestal (5) is composed of carbon or carbon graphite having excellent heat resistance, while the crucible drive shaft (6) is inferior in heat resistance to the pedestal (5), but is inexpensive, has excellent strength, and is easy to manufacture stainless steel. The pedestal (5) and the crucible drive shaft (6) is a different material and the thermal expansion coefficient is different.

따라서 도가니의 고열(1,420℃ 전후)이 페데스탈(5)로 전도된 다음 면접촉되는 돌출부(12)와 요입부(13)를 통하여 구동축(6)으로 전도되며, 도가니 구동축(6)으로 전도되는 고열은 수냉실(7)로 강제 순환되는 냉각수에 의해 냉각되면서 돌출부(12)와 요입부(13)의 양호한 결합을 유도하고 있다.Therefore, the high heat of the crucible (around 1,420 ° C.) is conducted to the pedestal 5 and then to the drive shaft 6 through the protrusion 12 and the indentation 13 which are in surface contact, and the high heat conducted to the crucible drive shaft 6. Is cooled by the cooling water forced to the water cooling chamber 7 to induce a good coupling of the projection 12 and the concave portion (13).

한편, 종래의 도가니 구동축(6)은 도 1에 도시한 것처럼, 수냉실(7)이 구동축(6)의 중앙부에만 형성되어 있을 뿐 아니라, 고열이 집중적으로 전도되고 두께가 얇아 열팽창이 심한 요입부(13) 주변은 냉각되지 않는 구조여서 냉각효율이 크게 떨어지는 문제점이 있다.On the other hand, the conventional crucible drive shaft (6), as shown in Figure 1, the water cooling chamber (7) is not only formed in the center portion of the drive shaft (6), high heat is concentrated intensively and the thickness is thin, the recess indentation is severe thermal expansion (13) Since the surroundings are not cooled, there is a problem that the cooling efficiency is greatly reduced.

따라서 잉곳성장장치를 장기간 사용하면 고열에 의해 도가니 구동축(6)의 상 부, 이를테면 요입부(13) 주변이 열스트레스에 의해 심하게 열변형되거나 서서히 녹아 내리게 되므로 상부 핫죤(Hot Zone)과의 결합력이 떨어지게되며, 도가니(3)(4)의 회전이 고르지 않아 멜트(Hot Melt)가 출렁거리게 되므로 잉곳(Ingot)의 품질이 떨어지며, 냉각효율이 낮아 장기간 사용시 냉각수의 누수가 발생되어 안전사고로 이어지는 등의 문제점이 있었다.Therefore, if the ingot growth apparatus is used for a long time, the upper part of the crucible drive shaft 6 due to high heat, for example, the periphery of the indentation part 13 is severely thermally deformed or slowly melted by heat stress, and thus the bonding force with the upper hot zone is increased. Since the melting of the crucible (3) (4) is uneven, the melt (Hot Melt) is slack, so the quality of the ingot is lowered, and the cooling efficiency is low, resulting in leakage of coolant during long-term use, leading to safety accidents. There was a problem.

본 발명은 잉곳성장장치(Ingot Growing Apparatus)에 설치되는 도가니(도가니 爐) 구동축(Crucible Shaft) 상부에 보조수냉실을 형성하여 열변형이 방지되는 도가니 구동축 냉각구조를 제공함에 목적이 있다.An object of the present invention is to provide a crucible drive shaft cooling structure to prevent heat deformation by forming an auxiliary water cooling chamber on the crucible drive shaft (Crucible Shaft) installed in the Ingot Growing Apparatus.

본 발명은 잉곳성장장치의 도가니를 지지하는 페데스탈과, 상기 페데스탈의 하단부에 형성되는 원추형 돌출부와, 상기 돌출부가 결합되고 도가니 구동축의 상단부에 형성되는 원추형 요입부와, 상기 도가니 구동축 내부에 형성되는 수냉실 및 유도관과, 상기 요입부 주변에 빙둘러 형성되고 상기 수냉실 및 유도관에 각각 연결되는 상하 보조수냉실과, 상기 상하 보조수냉실을 연결하는 연결부를 포함하여 구성된다.The present invention provides a pedestal for supporting a crucible of an ingot growth apparatus, a conical protrusion formed at a lower end of the pedestal, a conical recess formed at the upper end of the crucible drive shaft with the protrusion coupled thereto, and a number formed inside the crucible drive shaft. It comprises a cold chamber and the induction pipe, the upper and lower auxiliary water cooling chamber formed around the concave inlet portion and connected to the water cooling chamber and the induction pipe, respectively, and the connecting portion connecting the upper and lower auxiliary water cooling chamber.

상하 보조수냉실은 원추형이고, 기울기는 원추형 요입부의 기울기와 같은 기 울기 임을 특징으로 한다.The upper and lower auxiliary water cooling chambers are conical, and the slope is characterized by the same slope as the slope of the conical recesses.

본 발명은 도가니 구동축(6)의 상단부에 보조수냉실(14)(15)이 형성되어 도가니 구동축(6)의 열변형이 방지되므로 장기간 사용에 따른 열변형이나 녹아 내림이 방지되고, 도가니 구동축(6)의 양호한 냉각에 의해 이종 재질인 페데스탈(5)과 구동축(6)의 결합도와 상부 핫죤(Hot Zone)과의 결합력이 우수할 뿐 아니라, 상기 결합도를 수시로 확인(체크)하는 번거로움이 없어지며, 사용 수명이 길어지고 도가니의 진동과 멜트의 출렁거림이 없어지며, 냉각수의 누수(Cooling Water Leak)가 방지되어 안전사고가 예방되는 등의 효과가 있는 매우 유용한 발명이다.According to the present invention, since the auxiliary water cooling chambers 14 and 15 are formed at the upper end of the crucible drive shaft 6 to prevent thermal deformation of the crucible drive shaft 6, thermal deformation or melting due to long-term use is prevented, and the crucible drive shaft ( By good cooling of 6), the coupling between the pedestal 5 and the drive shaft 6, which is a different material, and the coupling between the upper hot zone is excellent, and the hassle of checking the coupling degree from time to time is not only excellent. It is a very useful invention that has the effect of disappearing, the service life is long, the vibration of the crucible and the melting of the melt is eliminated, and the safety accident is prevented by preventing the cooling water leak.

이하, 본 발명의 바람직한 실시 예들을 첨부한 도면에 따라 상세히 설명하고자 한다. 본 발명의 실시 예들을 설명함에 있어 도면들 중 동일한 구성 요소들은 가능한 한 동일 부호로 기재하고, 관련된 공지구성이나 기능에 대한 구체적인 설명은 본 발명의 요지가 모호해지지 않도록 생략한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the embodiments of the present invention, the same components in the drawings are denoted by the same reference numerals as much as possible, and detailed descriptions of related known configurations or functions will be omitted so as not to obscure the subject matter of the present invention.

도 2는 본 발명 도가니 구동축(6)의 냉각구조를 도시한 단면도이고, 도 3은 부분 확대 단면도로, 페데스탈(5)이 중력 결합되는 도가니 구동축(6)의 상부, 특히 요입부(13) 주변에 수냉실(7)과 연결되는 보조수냉실(14)(15)를 빙둘러 형성하여 보다 효율적인 냉각이 이루어지도록 함으로써 도가니 구동축(6)의 열변형이 근원적으로 방지된다.FIG. 2 is a cross-sectional view showing the cooling structure of the crucible drive shaft 6 of the present invention, and FIG. 3 is a partially enlarged cross-sectional view showing the upper part of the crucible drive shaft 6 to which the pedestal 5 is gravity coupled, especially around the recess 13. Auxiliary water cooling chambers 14 and 15 connected to the water cooling chambers 7 are formed around each other so that more efficient cooling is achieved, and thus thermal deformation of the crucible drive shaft 6 is fundamentally prevented.

본 발명 도가니 구동축(6)의 냉각구조는, 잉곳성장장치의 도가니(3)(4)를 지지하는 페데스탈(5)과, 페데스탈(5)의 하단부에 형성되는 원추형 돌출부(12)와, 상기 돌출부(12)가 결합될 수 있도록 도가니 구동축(6)의 상단부에 형성되는 원추형 요입부(13)와, 도가니 구동축(6) 내부에 형성되는 수냉실(7) 및 유도관(11)과, 원추형 요입부(13) 주변에 빙둘러 형성되고 상기 수냉실(7)과 유도관(11)에 각각 연결되는 보조수냉실(14)(15)과, 냉각수가 순환될 수 있도록 보조수냉실(14)(15) 끼리 연결시키는 연결부(16)로 구성된다.The cooling structure of the crucible drive shaft 6 of the present invention includes a pedestal 5 supporting the crucibles 3 and 4 of the ingot growth apparatus, a conical protrusion 12 formed at the lower end of the pedestal 5, and the protrusions. Conical concave portion 13 formed at the upper end of the crucible drive shaft 6, the water cooling chamber 7 and the guide tube 11 formed in the crucible drive shaft 6 and the conical yaw Auxiliary water cooling chambers 14 and 15 formed around the mouth 13 and connected to the water cooling chamber 7 and the induction pipe 11, respectively, and the auxiliary water cooling chamber 14 so that cooling water can be circulated ( 15) is composed of a connecting portion 16 for connecting.

상기 보조수냉실(14)(15)은 요입부(13)의 균일한 냉각을 위하여 원추형 요입부(13)의 기울기(θ)와 같거나 비슷한 기울기의 경사도가 유지된다.The auxiliary water cooling chambers 14 and 15 maintain the inclination of the same or similar inclination θ of the conical indentation 13 for uniform cooling of the indentation 13.

상기 보조수냉실(14)(15)은 냉각수가 순환될 수 있도록 유도관(11)과 연결되고 요입부(13)에 가까운 상부 보조수냉실(14)과, 수냉실(7)과 연결되고 요입부(13)로 부터 떨어진 하부 보조수냉실(15)로 구성된 2중 구조이며, 보조수냉실(14)(15)의 상부는 연결부(16)로 서로 연결되어 냉각수로(冷却水路)가 형성된다.The auxiliary water cooling chambers 14 and 15 are connected to the induction pipe 11 so as to circulate the cooling water, and are connected to the upper auxiliary water cooling chamber 14 close to the inlet 13 and the water cooling chamber 7, It is a double structure consisting of a lower auxiliary water cooling chamber 15 away from the mouth 13, the upper portion of the auxiliary water cooling chamber 14, 15 is connected to each other by the connecting portion 16 is formed a cooling water path (冷却 水路). .

상부 보조수냉실(14)과 하부 보조수냉실(15)은, 도 3 내지 도 5와 같이 원추 형 돌부(17a)와 원추형 요부(17b)가 형성되는 격리부재(17)에 의해 자연스럽게 격리된다.The upper sub-cooling chamber 14 and the lower sub-cooling chamber 15 are naturally isolated by the isolating member 17 in which the conical protrusion 17a and the conical recess 17b are formed, as shown in FIGS.

상기 격리부재(17)의 하부에는 하향 돌출부(18)가 형성되고, 상기 돌출부(18)의 외주면에는 나사부(19)가 형성되고, 상기 나사부(19)는 도가니 구동축(6)의 중앙에 형성되는 나사홈(20)에 체결되고, 격리부재(17)의 중앙에는 냉각수가 상승할 수 있게 유도관(11)의 상부가 결합되고, 돌출부(18) 내부에는 수냉실(7)과 연결되는 요입홈(21)이 형성되며, 요입홈(21)의 상부에는 하부 보조수냉실(15)과 연결되는 복수의 통공(22)이 형성된다.A downward protrusion 18 is formed below the isolation member 17, a threaded portion 19 is formed on an outer circumferential surface of the protrusion 18, and the screwed portion 19 is formed at the center of the crucible drive shaft 6. It is fastened to the screw groove 20, the upper portion of the induction pipe 11 is coupled to the center of the isolation member 17 so that the coolant can rise, and the inlet groove connected to the water cooling chamber 7 inside the protrusion 18 21 is formed, and a plurality of through holes 22 connected to the lower auxiliary water cooling chamber 15 are formed at an upper portion of the recessed groove 21.

원추형 요입부(13)가 형성되는 지지부재(23)와, 도가니 구동축(6)은 결합링(24)으로 수밀(水密)되게 연결되며, 결합링(24)과 격리부재(17)는 서로 이격되며, 그 사이에 연결부(16)가 형성된다.The support member 23 in which the conical recess 13 is formed, and the crucible drive shaft 6 are watertightly connected to the coupling ring 24, and the coupling ring 24 and the isolation member 17 are spaced apart from each other. The connecting portion 16 is formed therebetween.

상기 지지부재(23)의 하부에는 경사면(25)이 형성되어 유도관(11)을 따라 상승하는 냉각수가 보조수냉실(15)로 큰 저항없이 쉽게 유입될 수 있게 구성된다.An inclined surface 25 is formed at the lower portion of the support member 23 so that the coolant rising along the induction pipe 11 can be easily introduced into the auxiliary water cooling chamber 15 without great resistance.

또한 본 발명에서 격리부재(17)의 내주면 및 외주면 기울기와, 지지부재(23)의 외주면 기울기와, 도가니 구동축(6)의 상부에 형성되는 내주면의 기울기는 원추형 요입부(13)의 기울기(θ)와 같거나 비슷한 기울기의 경사도를 유지함으로써 상 ㆍ하부 보조수냉실(14)(15)이 저절로 형성된다.In addition, the inner circumferential surface of the isolation member 17 in the present invention and the outer peripheral surface slope, and a support member 23, the outer peripheral surface inclination and the slope (θ of the crucible drive shaft upper inner peripheral surface of concave inlet 13. The slope is conical formed of 6 of The upper and lower auxiliary water cooling chambers 14 and 15 are formed by themselves by maintaining the inclination of the slope equal to or similar to).

본 발명은 냉각수단(10)에 의해 급수구(8)로 공급되는 냉각수는 유도관(11)을 따라 상승한 다음 요입부(13)와 가까운 보조수냉실(14)로 유입되어 요입부(13)로 전도되는 고열을 흡수하면서 연결부(16)를 통하여 보조수냉실(15)로 유입되고, 복수의 통공(22)과 수냉실(7)을 거쳐 하강한 다음 출수구(9)를 경유하여 냉각수단(10)으로 유입되어 냉각 또는 열교환된 다음 급수구(8)로 재공급되는 과정의 반복으로 냉각수가 강제 순환되며, 도가니 구동축(6)의 상부가 효율적으로 냉각되므로 열변형이 방지된다.According to the present invention, the cooling water supplied to the water inlet 8 by the cooling means 10 rises along the induction pipe 11, and then flows into the auxiliary water cooling chamber 14 close to the inlet 13, and thus the inlet 13. While absorbing the high heat is transferred to the auxiliary water cooling chamber 15 through the connecting portion 16, descending through the plurality of through holes 22 and the water cooling chamber (7) and then through the outlet (9) cooling means ( 10, the cooling water is forcedly circulated by repetition of the cooling or heat exchange and then re-supply to the water inlet 8, and the heat deformation is prevented because the upper part of the crucible drive shaft 6 is efficiently cooled.

또한 상ㆍ하부 보조수냉실(14)(15)은 원추형으로 빙둘러 형성되는 구조이고, 냉각수단(10)으로부터 공급되는 냉각수는 유도관(11)을 따라 고열이 가장 먼저 전도되는 보조수냉실(14)로 제일 먼저 공급되므로 도가니 구동축(6)의 상부가 효율적으로 냉각된다.In addition, the upper and lower auxiliary water cooling chamber (14, 15) is a conical structure is formed around the cooling water, the cooling water supplied from the cooling means 10 is the auxiliary water cooling chamber in which high heat is conducted first along the induction pipe (11) ( 14, the upper part of the crucible drive shaft 6 is efficiently cooled.

따라서 장기간 사용에 따른 도가니 구동축(6)의 열변형이나 녹아 내림이 방지되고, 도가니 구동축(6)의 양호한 냉각에 의해 이종 재질인 페데스탈(5)과 구동축(6)의 결합도와 상부 핫죤(Hot Zone)과의 결합력이 우수할 뿐 아니라, 상기 결합도를 수시로 확인(체크)하는 번거로움이 없어지며, 사용 수명이 길어지고 도가니의 진동과 멜트의 출렁거림이 없어지며, 냉각수의 누수(Cooling Water Leak)가 방지되 어 안전사고 등이 예방된다.Therefore, thermal deformation or melting of the crucible drive shaft 6 with long term use is prevented, and the coupling of the pedestal 5 and the drive shaft 6, which are different materials, and the upper hot zone by hot cooling of the crucible drive shaft 6 are performed. ) As well as excellent binding force, and eliminates the hassle of checking (checking) the coupling degree from time to time, long service life, elimination of crucible vibration and melt smelting, and cooling water leak (Cooling Water Leak) This prevents safety accidents.

본 발명에서 돌출부(12)와 요입부(13) 및 보조수냉실(14)(15)은 원추형으로 설명하였으나, 물론 원추형에 가까운 다각형, 예컨대 6각형 내지 20각형으로 구성할 수 있다. 도면상 미설명부호 (26)은 원추형 돌출부를 받치는 받침부재이고, (27)은 받침부재(26)를 지지부재(23)에 고정시키는 체결부재이다.In the present invention, the protrusion 12, the recess 13 and the auxiliary water cooling chamber 14, 15 has been described as a cone, of course, it can be configured of a polygon close to the cone, for example, hexagonal to pentagonal. In the drawings, reference numeral 26 denotes a support member that supports the conical projection, and 27 is a fastening member that fixes the support member 26 to the support member 23.

이상과 같이 설명한 본 발명은 본 실시 예 및 첨부된 도면에 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위내에서 여러가지 치환, 변형 및 변경이 가능하며, 이는 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 있어 자명한 것이다.The present invention as described above is not limited to the present embodiment and the accompanying drawings, various substitutions, modifications and changes are possible within the scope without departing from the technical spirit of the present invention, which is usually in the art It is self-evident for those who have knowledge.

도 1 : 종래 발명의 단면도.1 is a cross-sectional view of a conventional invention.

도 2 : 본 발명의 단면 구성도.2 is a cross-sectional configuration of the present invention.

도 3 : 본 발명의 요부 확대 단면도.3 is an enlarged cross-sectional view of the main portion of the present invention.

도 4 : 본 발명 도 3에서 냉각수가 순환되는 상태도.4 is a state diagram in which the coolant is circulated in FIG. 3 of the present invention.

도 5 : 본 발명 격리부재의 부분 절개 사시도.5 is a partially cutaway perspective view of the isolation member of the present invention.

도 6 : 본 발명 도 3의 A-A`선 단면도.Figure 6 is a cross-sectional view taken along the line A-A 'of the present invention.

도 7 : 본 발명 도 3의 B-B`선 단면도.7 is a cross-sectional view taken along the line B-B 'of the present invention.

<도면의 주요 부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

(1)--베이스 챔버 (2)--폴리 실리콘(멜트)(1)-base chamber (2)-polysilicon (melt)

(3)(4)--도가니 (5)--페데스탈(3) (4)-Church (5)-Pedestal

(6)--도가니 구동축 (7)--수냉실(6)-Crude Drive Shaft (7)-Water Cooling Chamber

(8)--급수구 (9)--출수구(8)-Water inlet (9)-Outlet

(10)--냉각수단 (11)--유도관(10)-cooling means (11)-induction pipe

(12)--원추형 돌출부 (13)--원추형 요입부(12)-conical protrusion (13)-conical indent

(14)(15)--보조수냉실 (16)--연결부(14) (15)-Auxiliary Water Cooling Room (16)-Connection

(17)--격리부재 (17a)--돌부(17)-Isolation member (17a)-protrusion

(17b)--요부 (18)--돌출부(17b) --the main body (18)-the protrusion

(19)--나사부 (20)--나사홈(19)-Screw part (20)-Screw groove

(21)--요입홈 (22)--통공(21)-Indentation Groove (22)-Public

(23)--지지부재 (24)--결합링(23)-support member (24)-engagement ring

(25)--경사면 (θ)--기울기(25)-Slope ( θ )-Slope

Claims (3)

잉곳성장장치의 도가니를 지지하는 페데스탈;A pedestal for supporting the crucible of the ingot growth apparatus; 상기 페데스탈의 하단부에 형성되는 원추형 돌출부;A conical protrusion formed at the lower end of the pedestal; 상기 돌출부가 결합되고 도가니 구동축의 상단부에 형성되는 원추형 요입부;A conical concave in which the protrusion is coupled and is formed at an upper end of the crucible drive shaft; 상기 도가니 구동축 내부에 형성되는 수냉실 및 유도관;A water cooling chamber and an induction pipe formed inside the crucible drive shaft; 상기 요입부 주변에 빙둘러 형성되고 상기 수냉실 및 유도관에 각각 연결되는 상하 보조수냉실;Upper and lower auxiliary water cooling chamber formed around the concave inlet portion and connected to the water cooling chamber and the induction pipe, respectively; 상기 상하 보조수냉실을 연결하는 연결부:Connection portion for connecting the upper and lower auxiliary water cooling chamber: 를 포함하는 잉곳성장장치의 도가니 구동축 냉각구조.Crucible drive shaft cooling structure of the ingot growth apparatus comprising a. 청구항 1에 있어서; 상하 보조수냉실은 원추형 임을 특징으로 하는 잉곳성장장치의 도가니 구동축 냉각구조.The method according to claim 1; The upper and lower auxiliary water cooling chamber is a crucible drive shaft cooling structure of the ingot growth apparatus, characterized in that the conical shape. 청구항 1 또는 청구항 2에 있어서; 보조수냉실의 기울기는 원추형 요입부의 기울기와 같은 기울기 임을 특징으로 하는 잉곳성장장치의 도가니 구동축 냉각구조.The method according to claim 1 or 2; Crucible drive shaft cooling structure of the ingot growth apparatus, characterized in that the inclination of the auxiliary water cooling chamber is the same as the slope of the conical indentation.
KR1020090113464A 2009-11-23 2009-11-23 Colling structure of crucible shaft for ingot growing apparatus KR101064964B1 (en)

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JPH06345585A (en) * 1993-06-14 1994-12-20 Sumitomo Metal Ind Ltd Method for pulling up single crystal
KR20030055900A (en) * 2001-12-27 2003-07-04 주식회사 실트론 Growing apparatus of a single crystal ingot

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06345585A (en) * 1993-06-14 1994-12-20 Sumitomo Metal Ind Ltd Method for pulling up single crystal
KR20030055900A (en) * 2001-12-27 2003-07-04 주식회사 실트론 Growing apparatus of a single crystal ingot

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