KR101040301B1 - Apparatus Patterning Shape Of Electrode On Insulator By Electrospinning or Electrospraying and Insulator of Forming Pattern Using The Same - Google Patents

Abstract

One embodiment of the present invention relates to an apparatus for patterning electrode shapes on insulators using electrospinning or spraying to selectively perform electrospinning or electrospraying to pattern one shape in bulk.

An apparatus for patterning an electrode shape on an insulator by using electrospinning or spraying according to an embodiment of the present invention includes a target insulator, an electrode bonded and grounded to a lower part of the insulator, and having an established shape, and the opposite side of the electrode. It is provided above the insulator and includes a tip for electrospinning or spraying a fluid to pattern the shape of the electrode on the insulator.

Electrospray, Electrospray, Shape, Insulator, Spray

Description

Apparatus Patterning Shape Of Electrode On Insulator By Electrospinning or Electrospraying and Insulator of Forming Pattern Using The Same}

The present invention relates to a device using electrospinning or electrospray and a production pattern using the same, and more particularly, to a device for patterning an electrode shape on an insulator using electrospinning / spray and a production pattern using the same.

Known patterning techniques include photolithography in the MEMS (Microelectromechanocal System) process, printing using patterned rollers, and dispensing fine droplets in desired positions using inkjet technology. And the like.

Photolithography requires high cleanliness of the process itself, and the equipment is very expensive and the price competitiveness is low. The use of rollers has various problems such as precision problems, difficulty in thinning, and loss of coating material. As an alternative to these problems, a patterning technique using an inkjet capable of low cost and fine patterns is emerging.

There are a piezoelectric element, a hot wire method and an EHD (electrohydrodynamic) method using the inkjet. However, these methods have to move the inkjet head in a pattern, which can cause time and cost problems. In other words, the inkjet method can dispense a single fine droplet to a desired material, but it is very inexpensive to pattern the same shape in large quantities.

An embodiment of the present invention relates to an apparatus for patterning the electrode shape on the insulator by using electrospinning or spraying to selectively pattern electrophoresis or electrospray in a large quantity, and an insulator having a production pattern using the same. will be.

An apparatus for patterning an electrode shape on an insulator by using electrospinning or spraying according to an embodiment of the present invention includes a target insulator, an electrode bonded and grounded to a lower part of the insulator, and having an established shape, and the opposite side of the electrode. It is provided above the insulator and includes a tip for electrospinning or spraying a fluid to pattern the shape of the electrode on the insulator.

The insulator may be formed of one of glass, quartz, paper, wrap, electrical tape, PMMA thin film, PET film, and OHP film.

The tip is formed of a conductive tip, and a high voltage can be applied. The tip is formed from a non-conductive tip, and a high voltage can be applied to the fluid.

DC or AC voltage may be applied to the tip. DC or AC voltage may be applied to the fluid.

The generation pattern using the patterning device according to the embodiment of the present invention is patterned on the insulator by the electrospinning of the tip, and is formed as a fine droplet on the portion corresponding to the electrode shape.

The pattern generated using the patterning device according to an embodiment of the present invention is patterned on the insulator by the electrospinning of the tip, the corresponding portion formed of fine fibers in the portion corresponding to the electrode shape, and the electrode shape , Between the shape and the portion corresponding to the shape is formed between the fine fibers.

The fine fibers formed in the corresponding portion, may be formed more than the fine fibers formed in the portion between the. In the intervening portion, the fine fibers may form a unidirectional alignment structure.

An apparatus for patterning an electrode shape on an insulator by using electrospinning or spraying according to an embodiment of the present invention may include a target insulator, an electrode bonded and grounded to an upper portion of the insulator, and having an established shape, and an opposite side of the electrode. It is provided below the insulator to electrospin or spray the fluid, and includes a tip for patterning the shape of the electrode on the lower surface of the insulator.

According to an embodiment of the present invention, since the insulator is installed on the electrode having one shape and the tip is installed above the insulator, electrospraying or electrospinning, the same electrode shape is applied to the plurality of insulators using the electrode having one shape. It has the effect of patterning.

Since the tip is dispensed into fine droplets and patterned without separately controlling the position of the tip, there is an effect of minimizing the loss of the patternable fluid. By controlling the viscosity of the fluid, it is possible to spray the fine droplets at the tip or to form a fine pattern by spinning the fine fibers to form a production pattern on the insulator.

Adding an additive to the fluid has the effect of forming a pattern containing the additive on the insulator. By controlling the thickness and dielectric constant of the insulator, there is an effect of patterning the resulting pattern to the nanometer class (1 to 999nm).

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 is a block diagram of an apparatus for patterning an electrode shape on an insulator by using electrospinning or spraying (for convenience, hereinafter referred to as a "patterning apparatus") according to an embodiment of the present invention. Referring to FIG. 1, the patterning apparatus 100 according to an exemplary embodiment includes an insulator 1 that is a patterning target, an electrode 2 bonded to a lower portion of the insulator 1 and electrically grounded, and having a set shape. It is provided above the insulator 1 on the opposite side and comprises a tip 3 for electrospraying or electrospinning the fluid F.

The control device (not shown) controls the patterning device 100 as a whole and also controls the magnitude of the voltage applied to the tip 3, which is connected to the tip 3 or the fluid F, to which the fluid F is supplied. Tip 3 may be formed of a conductive tip or a non-conductive tip. If the tip 3 is conductive, a high voltage is applied to the tip 3, and if non-conductive, a high voltage is applied to the fluid F.

The patterning device 100 of the present embodiment can be seen in a combination of the inkjet method and the roller method. The fluid F charged at a high voltage is carried to the electrode 2 to be grounded, and the fluid F uses a property of patterning according to the shape of the electrode 2.

That is, the patterning device 100 of the present embodiment has an electrode (or dielectric) 1 on the insulator (ie, dielectric) 1 on the electrode 2 which is shaped and grounded by charging the fluid F at the tip 3 to electrospin or electrospray. 2) Pattern the shape. That is, the production patterns DP and FP are formed on the insulator 1. Figure 1 (a) shows the electrospray process, Figure 1 (b) shows the electrospinning process.

FIG. 2 is a state diagram of analyzing an electric field in an insulator of the patterning device of FIG. 1. FIG. Referring to FIG. 2, prior to patterning the shape of the electrode 2 on the insulator 1, the shape of the electrode 2 is actually applied to the insulator 1 by analyzing the electric field in the insulator 1 on the electrode 2. You can check if it is patternable.

2 shows the state of the electric field when the various insulators 11, 12, 13 correspond to the electrode 2 and a high voltage is applied between the electrode 2 and the tip 3. For example, Fig. 2A shows the state of the electric field line LE in the insulator 11 formed of glass having a dielectric constant of 4.82, a resistance of 10 ¹⁰ to 10 ¹⁴ mmm, and a thickness of 500 mu m. 2 (b) shows the state of the electric field line LE in the insulator 12 formed of a crystal having a dielectric constant of 3.78, a resistance of 10 ¹⁶ mA or more and a thickness of 500 mu m. Fig. 2C shows the state of the electric field lines LE in the insulator 13 formed of paper having a dielectric constant of 2.7, an infinite resistance, and a thickness of 500 mu m.

2 is a result of simulating an electric field in an insulator 1 having a relative dielectric constant of about 2 to 10 using a simulation program, for example, COMSOL 3.4. That is, the electric force lines LE formed between the electrodes 2 and the tips 3 pass through the insulators 11, 12, 13 and are not distorted and maintain the original electric force lines LE state.

It can be seen from this that electrospray and electrospinning phenomena will be patterned on the insulator 1 in the shape of the electrode 2 bonded under the insulator 1. However, when the thickness of the insulator 1 becomes thick, the electric field causes a difference from the electric field lines inherent in the electrode 2, so the insulators 11, 12, and 13 are illustrated in (a), (b), and (c). As it may be used in the form of a thin film of 100 to 500㎛.

Referring back to FIG. 1, patterning of the insulator 1 is possible with an electrical patterning device 100 having the same basic structure as shown in FIGS. 1A and 1B, with electrospray and electrospinning portions. Each can proceed. The electrical patterning device 100 causes an electrospray phenomenon when the viscosity of the fluid F supplied from the tip 3 is low (see (a)), and the viscosity of the fluid F supplied from the tip 3 is increased. If high, it produces an electrospinning shape (see (b)).

The electrospray has a low viscosity to form the formation pattern DP on the insulator 1 with the droplets D of the fluid F (see (a)). Electrospinning has a high viscosity to form the formation pattern FP on the insulator 1 with the fine fibers FB of the fluid F (see (b)).

First, electrospray is demonstrated. 3 is a photograph of a first experimental example and a production pattern of electrospray; For example, during the electrospraying, the gap G between the insulator 1 and the tip 3 is 10 cm and the voltage applied to the tip 3 is 10 kV (see (a)). The fluid F uses black ink for general printers, the electrode 2 is formed of a copper electrode having a circular shape S, and the periphery of the electrode 2 is composed of Teflon 2a, which is an insulator (( b)). The tip 3 is formed of a conductive stainless flat tip, and the insulator 1 is formed of general office A4 paper.

The production patterns DP1, DP2, DP3 of the first experimental example show that the ink is electrosprayed, that is, patterned according to the shape S of the electrode 2 bonded under the insulator 1 over time. (see (c)). In other words, the difference in brightness is confirmed in the insulator 1 at the portion corresponding to the shape S of the electrode 2 (upper photo) and at a portion not corresponding to the shape S (photo below) (see (d)). When comparing the paper of the actual pattern (DP1, DP2, DP3), that is, the insulator (1) magnified 100 times with a microscope, the difference in brightness is greater after 10, 30, and 120 seconds ((c)). Reference). As such, since the droplets of the fluid F cannot be grasped under the microscope in the production patterns DP1, DP2, and DP3, the size of the droplets of the fluid F cannot be observed with the naked eye, for example, 1 To 999 nm.

4 is a photograph of a second experimental example and a production pattern of electrospray; 4 is a case where the shape S of the electrode 22 is complicated as compared with that of FIG. 3, and it is a result confirming whether electrospray is possible even in this case. The electrode 22 cuts a copper tape to form a letter S2 on the glass plate 22a. The remaining experimental conditions are the same as those of the first experiment.

The generation patterns DP21, DP22, and DP23 of the second experimental example differ depending on the progress of the electrospraying time, for example, 10, 20, and 120 seconds, but according to the shape S2 of the lower electrode 22. Electrospray is made to the insulator 1, showing that the difference in brightness increases. As such, the accuracy in electrospray can vary depending on the spray time, the thickness of the insulator 1, the dielectric constant of the insulator 1, and the degree of bonding of the insulator 1 and the electrodes 2, 22.

Next, the electrospinning will be described. Electrospinning is a technique of extracting very fine fibers using coulomb force and gravity by applying a high voltage to a high viscosity fluid (F). In other words, electrospinning is a phenomenon in which a polymer solution or a melt having sufficient viscosity becomes a fiber when subjected to a static field. Electrospraying is a phenomenon in which fine droplets are produced by controlling an electric field.

Fig. 5 is a photograph of shapes and production patterns of electrodes applied to the first to fifth experimental examples of electrospinning. In the patterning apparatus 100, during electrospinning, the applied voltage, which is the same condition as the electrospray, is 10 kV, and the distance between the tip 3 and the dielectric 1 is 10 cm. Fluid F2 is possible with a PEO (7wt%) solution and a TiO ₂ pretreatment solution having a viscosity higher than that of fluid F used for electrospray, and PEO solution was used in this experimental example.

5A illustrates electrodes 32 having various shapes S as shown in (a1) to (a5). The electrodes 32 are each formed of a shape S of copper, which is a conductor, and the outside of the shape S is formed of a crystal 32a, which is an insulator. 5 (b) shows a state before electrospinning, as shown in (a11) to (a51). Substantially, the shapes of the electrodes 32 covered by the insulator 31 do not appear well. As shown in (a12) to (a52), (c) shows a state in which electrospinning is performed on the insulator 31 along each shape S of the lower electrodes 32 during the electrospinning. That is, during electrospinning, the generation pattern FP31 has a large brightness difference.

In addition, the generation pattern FP31 by electrospinning shows that the fine fibers are radiated in the shape S of the electrode 32 (see (b) and (c)), and the portion corresponding to the insulator 31 (below) It is shown that more fine fibers are generated in the portion (picture above) corresponding to the shape S of the electrode 32 than the fine fibers generated in the photo) (see FIG. 5 (d)).

6 is a photograph of insulators and a production pattern applied to Experimental Examples 6 to 9 of electrospinning. Referring to Fig. 6, (a) is an insulator 41 formed of glass having a thickness of 150 mm, (b) is an insulator 51 formed of a wrap of 10 mu m, and (c) is 130 mu m of 130 mu m. It is an insulator 61 formed of an electrical tape, and (d) is an insulator 71 formed of a 130 [mu] m OHP film. Insulators may also be formed of PMMA thin films or PET films (not shown). The electrode 22 is formed on the glass plate 32b by cutting the copper tape to form the shape S2 in the same manner as in the second experimental example (e). The remaining conditions are the same as in the first to fifth experimental examples.

As shown in Figs. 6A to 6D, each of the insulators 41 to 71 bonded to the electrodes 32 along the shape S of the lower electrode 32 during the progress of each electrospinning. In the electrospinning takes place. At this time, the generation patterns FP41 to FP71 have a greater brightness difference as the time of electrospinning elapses.

FIG. 6 shows the production patterns FP41 to FP71 in which the shape S of the electrode 32 is patterned on the insulators 41 to 71 by electrospinning to various insulators 41 to 71, and the insulators 41 to 71. FIG. It shows that there is a difference in the degree of patterning according to the material, the thickness, the degree of bonding with the electrode 32, and the applied voltage.

7 is a photograph of a production pattern of aligned fine fibers. Referring to Fig. 7, microscopic analysis of the production pattern FP (left photograph) made of fine fibers obtained by electrospinning revealed that the microfibers FB were similarly subjected to electrospinning to the electrode 32 without an insulator. It can be seen that the electrodes 32 are aligned in a unidirectional direction between the shape S and the shape S G1.

On the other hand, the present embodiments can be applied to the nano-patterning technology by controlling the thickness and dielectric constant of the insulator, and the conductive material, for example, ITO and CNT on the transparent thin film, for example, glass and plastic to improve the conductivity It can be applied to the development of transparent materials having.

The present embodiments can be applied to the development of a process technology for directly patterning a mask or materials, replacing complex photolithography technology in MEMS, and applying to the development of a new printer using ink.

The embodiments may be utilized in organic solar cells and fuel cells by patterning polymer materials, coating a fine thin film in a desired pattern, or coating a hydrophobic or hydrophilic surface at a desired location, or by using biocompatible materials. It can be applied to construct a scaffold. In addition, the present embodiment may form the ground electrode in a matrix structure, thereby varying the ground state to vary the shape of the generation pattern.

8 is a block diagram of an apparatus for patterning electrode shapes on an insulator by using electrospray according to another embodiment of the present invention.

In the case of direct current electrospray in the patterning apparatus 100 of FIG. 1, the repulsive force between the droplets D is formed because the droplets D patterned on the insulator 1 have charge amounts of the same polarity. Therefore, it is difficult to form the production pattern DP in a uniform state.

The patterning device 200 of FIG. 8 applies a high voltage alternating current to the tip 3 or the fluid F. As shown in FIG. Therefore, since the charge amount polarity of the droplets D1 and D2 discharged from the tip 3 is changed to positive (+), an attractive force is formed between the droplets D1 and D2. Accordingly, the patterning device 200 of FIG. 8 enables more uniform patterning than the patterning device 100 of FIG. 1 implementing direct current electrospray. That is, the generation pattern D1D2P may be formed in a more uniform state. At this time, the electrode 2 is grounded (for example, 0 volts), and the droplets D1 and D2 are patterned on the target insulator 1 because they have gravity with positive (+) and negative (-) polarities. .

Figure 9 is a block diagram of an apparatus for patterning the shape of the electrode on the lower surface of the insulator by using electrospray according to another embodiment of the present invention.

The patterning apparatus 100 of FIG. 1 includes a tip 3 on the upper side of the insulator 1 to spray the droplet D on the upper surface of the insulator 1 to form a production pattern DP.

The patterning device 300 of FIG. 9 includes a tip 3 below the insulator 1 to spray the droplet D onto the lower surface of the insulator 1 to form a production pattern DP. That is, the electrode 2 is bonded to the upper part of the insulator 1 and grounded. The tip 3 is provided below the insulator 1 opposite to the electrode 2 to electrospray the fluid to the lower surface of the insulator 1 to pattern the shape of the electrode 2.

During the formation of the production pattern DP from the droplet D, a droplet BD larger than the normal droplet D may be formed and patterned on the insulator 1. This large droplet BD is more affected by gravity than the normal droplet D, so that the large droplet BD falls out of the spray direction and does not reach the insulator 1. Therefore, the large droplet BD is prevented from breaking the generated pattern DP formed in the fine pattern on the insulator 1.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

1 is a block diagram of an apparatus for patterning an electrode shape on an insulator by using electrospinning or spraying according to an embodiment of the present invention.

FIG. 2 is a state diagram of analyzing an electric field in an insulator of the patterning device of FIG. 1. FIG.

3 is a photograph of a first experimental example and a production pattern of electrospray;

4 is a photograph of a second experimental example and a production pattern of electrospray;

Fig. 5 is a photograph of shapes and production patterns of electrodes applied to the first to fifth experimental examples of electrospinning.

6 is a photograph of insulators and a production pattern applied to Experimental Examples 6 to 9 of electrospinning.

7 is a photograph of a production pattern of aligned fine fibers.

8 is a block diagram of an apparatus for patterning electrode shapes on an insulator by using electrospray according to another embodiment of the present invention.

Figure 9 is a block diagram of an apparatus for patterning the shape of the electrode on the lower surface of the insulator by using electrospray according to another embodiment of the present invention.

<Explanation of symbols for main parts of the drawings>

100: patterning device 1, 11, 12, 13, 41, 51, 61, 71: insulator

2, 22, 32: electrode 2a: teflon

22a, 32b: glass plate 32a: crystal

3: tip F: fluid

D, BD: Droplet FB: Fine Fiber

DP, FP, D1D2P: Generation Pattern DP1, DP2, DP3: Generation Pattern

DP21, DP22, DP23: Generation Pattern DF31: Generation Pattern

FP41, FP51, FP61, FP71: Generation Pattern G: Spacing

G1: Between S, S2: Shape

Claims (13)

Target insulators; An electrode bonded to a lower portion of the insulator and grounded, the electrode having a predetermined shape; And A tip provided above the insulator on the opposite side of the electrode to electrospin or spray a fluid to pattern the shape of the electrode on the insulator; A device for patterning electrode shapes on insulators using electrospinning or spraying. The method according to claim 1, The insulator is, Formed of one of glass, quartz, paper, wrap, electrical tape, PMMA thin film, PET film and OHP film, A device for patterning electrode shapes on insulators using electrospinning or spraying. The method according to claim 1, The tip is Formed with a conductive tip, A device for patterning electrode shapes on insulators using electrospinning or spraying. The method according to claim 1, The tip is Formed with a non-conductive tip, where a high voltage is applied to the fluid A device for patterning electrode shapes on insulators using electrospinning or spraying. The method according to claim 1, DC or AC voltage is applied to the tip A device for patterning electrode shapes on insulators using electrospinning or spraying. The method according to claim 1, DC or AC voltage is applied to the fluid A device for patterning electrode shapes on insulators using electrospinning or spraying. Using the patterning device of any one of claims 1 to 6, patterning the insulator by electrospray of the tip, An insulator having a generation pattern using a patterning device in which fine droplets are formed in a portion corresponding to the electrode shape. The patterning device of claim 1, wherein the patterning device is patterned onto the insulator by electrospinning of the tip, A corresponding portion formed of fine fibers in a portion corresponding to the electrode shape; An insulator having a production pattern using a patterning device including a portion formed between fine fibers in a portion corresponding to the shape between the shapes. The method of claim 8, The fine fiber formed in the corresponding portion, An insulator having a production pattern using a patterning device that is formed more than the fine fibers formed between the portion. The method of claim 8, In the couple between the above, And the fine fibers have a production pattern using a patterning device to form a unidirectional alignment structure. Target insulators; An electrode bonded to an upper portion of the insulator and grounded, the electrode having a predetermined shape; And A tip provided below the insulator on the opposite side of the electrode to electrospin or spray a fluid to pattern the shape of the electrode on the bottom surface of the insulator; A device for patterning electrode shapes on insulators using electrospinning or spraying. 12. The method of claim 11, DC or AC voltage is applied to the tip A device for patterning electrode shapes on insulators using electrospinning or spraying. 12. The method of claim 11, DC or AC voltage is applied to the fluid A device for patterning electrode shapes on insulators using electrospinning or spraying.

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