KR101033546B1 - Heating block - Google Patents

Abstract

According to the present invention, the heating block includes a main body having a container insertion groove; It is inserted into the main body, and includes a plurality of main body heaters spaced apart from each other generally side by side along the depth direction of the container insertion groove around the container insertion groove. The main body may have a polygonal pillar shape, and the main body heaters may be disposed at corners of the main body, respectively.

Canister, Heating Block, Heater

Description

Heating block {HEATING BLOCK}

The present invention relates to a heating block, and more particularly to a heating block capable of heating a vessel installed therein to a predetermined temperature.

In general, the heating block has a function of raising the temperature of another object by the self-heating function. Among the heating blocks, the cylindrical object such as the canister 10 is wrapped around the outside and the internal temperature of the object is controlled, as shown in FIG. 1, in which the heating wire 30 is installed inside the silicon rubber 20. Have

That is, the heating wire 30 is provided inside the silicone rubber 20 which is a flexible material, and heat generated by applying electrical energy to the heating wire 30 is used. This heating block has an arc shape so as to blink the outer surface of the canister 10, it is divided into two pieces for ease of installation.

However, such a conventional heating block has a problem that it is not easy to control the temperature of the object therein. When the temperature change curve of the heating block is heated, as shown in FIG. 2, a constant overheating period OH appears to reach the set temperature Ts. This is a problem that occurs because it is difficult to precisely control the temperature of the internal object.

In addition, since the heating block itself is flexible, the shape of the heating block is severely changed during its use, and there is a problem that the heating wire installed inside the silicone rubber is disconnected in the process, and in case of disconnection, it is difficult to replace the heating wire. There is also a problem that must be discarded.

It is an object of the present invention to provide a heating block capable of heating a substance stored therein to a uniform temperature according to a position.

Other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

According to the present invention, the heating block includes a main body having a container insertion groove; It is inserted into the main body, and includes a plurality of main body heaters spaced apart from each other generally side by side along the depth direction of the container insertion groove around the container insertion groove.

The main body may have a polygonal pillar shape, and the main body heaters may be disposed at corners of the main body, respectively.

The heating block may further include a cover which is fastened to an upper portion of the main body to seal the container insertion groove.

The heating block may further include a plurality of cover heaters inserted into the cover and spaced apart from each other.

The body and the cover may be made of aluminum.

The heating block may further include a plurality of lower surface heaters inserted into the main body and spaced apart from each other at a lower portion of the container insertion groove.

The container insertion groove may be cylindrical.

The main body is disposed along the circumference of the container insertion groove and has a heat generating portion and a transmission portion respectively located at the corners and sides of the main body,

The thickness of the delivery part measured along the radial direction of the container insertion groove from the inner wall of the container insertion groove to one side of the body is measured along the radial direction of the container insertion groove from the inner wall of the container insertion groove to the edge of the body. It may be less than the thickness of the heating portion.

According to the present invention, the substance stored in the heating block can be heated to a substantially uniform temperature regardless of the position.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to FIGS. 1 to 7. The embodiments of the present invention can be modified in various forms, and the scope of the present invention should not be construed as being limited to the embodiments described below. The embodiments are provided to explain the present invention to a person having ordinary skill in the art to which the present invention belongs. Accordingly, the shape of each element shown in the drawings may be exaggerated to emphasize a more clear description.

3 is an exploded perspective view showing the structure of a heating block according to an embodiment of the present invention. 4 is a plan view illustrating the main body shown in FIG. 3, and FIG. 5 is a cross-sectional view illustrating the main body shown in FIG. 3.

As shown in FIG. 3, the heating block 100 includes a main body 110, a main body heater 120, and a cover 130. The main body 110 has a polygonal pillar shape, and a container insertion groove 112 recessed from the top is formed at the center of the main body 110. The container insertion groove 112 is cylindrical in shape, and the container 10 (for example, a canister) is inserted into the container insertion groove 112.

The container insertion groove 112 preferably has a size substantially coincident with the container 10. If there is a gap between the container insertion groove 112 and the container 10, conduction heat transfer from the main body 110 to the container 10 may be difficult. Therefore, it is preferable that a gap does not exist between the container insertion groove 112 and the container 10, and the container insertion groove 112 is removed in order to remove a gap that may occur between the container insertion groove 112 and the container 10. And a heat transfer medium may be installed between the container and the container 10. The heat transfer medium surrounds the inner wall of the container insertion groove 112 and may closely contact the container insertion groove 112 and the container 10.

In the container 10, a material to be heated is stored using the heating block 100, and the stored material is heated by a heater 120 to be described later.

The material to be stored in the vessel 10 may be any one or two or more of the precursors described below in the manufacturing method using Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD). Can be selected).

TEMAZr, TDMAZr, TDEAZr, Zr (OtBu) 4, TEMAHf, TDMAHf, TDEAHf, Hf (OtBu) 4, TEMATi, TDMATi, TDEATi, Ti (OtBu) 4, Ti (OiPr) 4, TiCl4, T (OiPr) 2 ( tmhd) 2, Ti (O) (tmhd) 2, PDMATa, PDEATa, PEMATa, TBTDETa, TBTEMTa, TBTTDTa, TATDMTa, TATDETa, TATEMTa, Ta (OEt) 5, Ta (OiPr) 5, PDMANb, PDEANb, PEMANb, TBTDENb , TBTEMNb, TBTTDNb, TATDMNb, TATDENb, TATEMNb, Nb (OEt) 5, Nb (OiPr) 5, TMAl, TEAl, DMAH, Alpis3, TEOS, RuEtCp2, Ru (DER), (CO) 3Ru (C6H8), (tBuN 2W (NMe2) 4, (hfac) Cu (VTMS), Cu (hfac) 2, Ba (tmhd) 2, Ba (METHD) 2, Ba (RCp) 2, Sr (tmhd) 2, Sr (METHD) 2 , Sr (RCp) 2, HnSi (NRR ') 4-n (n is an integer of 0 to 3, R and R' each have the same or different carbon atoms from 1 to 10, saturated hydrocarbons and unsaturated hydrocarbons.)

In addition to the precursors described above, it can be comprehensively used for liquid and solid precursors that can be vaporized by heating within a range of 30 to 300 degrees.

On the other hand, the body 110 is preferably a material having high thermal conductivity (thermal conductivity), it may be made of aluminum. The body 110 is heated by the body heater 120 installed around the container insertion groove 112, the heat generated from the body heater 120 is transmitted to the entire body 110 through the conductive heat transfer. Therefore, the higher the thermal conductivity of the material, the higher the heat transfer speed can be, and the temperature gradient according to the position of the main body 110 can be minimized.

3 and 4, the main body 110 has a square pillar shape and has four corner portions. The heater insertion groove 114 is formed at each corner of the body 110, the body heater 120 is inserted into the heater insertion groove 114 is installed. As shown in Figure 4, the heater insertion groove 114 is preferably disposed so as to be conformal to the center of the container insertion groove 112.

Meanwhile, the main body 110 has a heating part 111a and a delivery part 111b disposed along the circumference of the container insertion groove 112, and the heating part 111a is located at an edge of the main body 110 and is transmitted. The portion 111b is located at the edge portion between the edge portion and the edge portion. The heater insertion groove 114 is formed in the heating portion 111a, and the heating portion 111a is heated by the main body heater 120 inserted into the heater insertion groove 114 (in the direction of the arrow in FIG. 4 (b)). . The heat transferred from the main body heater 120 to the heating unit 111a is transferred to the transfer unit 111b (in the direction of the arrow in FIG. 4B), and is transferred to the entire body 110. That is, heat generated in the main body heater 120 is transmitted in a direction generally perpendicular to the main body heater 120 (the arrow direction in FIG. 4B).

At this time, the thickness of the transfer part 111b (measured along the radial direction of the container insertion groove 112 from the inner wall of the container insertion groove 112 to one side of the main body 110) d2 is the thickness of the heating portion 111a. (Measured along the radial direction of the container insertion groove 112 from the inner wall of the container insertion groove 112 to the edge of the body 110) (d1). Therefore, heat transfer through the transfer part 111b can be made faster, thereby minimizing the overall temperature gradient of the main body 110.

The main body heater 120 has a diameter enough to be inserted into the heater insertion groove 114 and has a straight shape. Therefore, the processing and installation is easy, especially in case of breakage has the advantage of very easy replacement. In addition, the body heater 120 is connected to a power source connected from the outside to heat itself, and heats the body 110 using the generated heat. Meanwhile, as described above, a separate heat transfer medium may be installed between the heater insertion groove 114 and the main body heater 120 to increase the heat transfer rate.

As described above, in the present embodiment, since the linear heater is used, unlike the conventional heater block using the curved heater, the hot wire is hardly damaged during use, and even if sometimes damaged, the replacement is very easy.

Meanwhile, a heater may be further provided on the lower surface of the main body 110. That is, as shown in Figure 3, after forming the lower heater installation groove 116 in the horizontal direction on the lower edge of the body 110, by inserting a linear heater 140 in the heater installation groove 116. To install. If a heater is further installed on the lower surface of the main body, the lower surface of the main body 110 may also be heated within a short time. Of course, since the body 110 according to the present embodiment is made of aluminum having excellent thermal conductivity, a heater may not be installed on the bottom surface of the body 110.

Next, as shown in FIG. 1, the cover 130 is fastened to the upper portion of the main body 110, and is a metal component that seals the cylindrical container insertion groove 112. In this embodiment, the cover 130 is made of a metal of the same material as the main body 110. Therefore, it is most preferable to consist of aluminum. The cover 130 is fastened to the upper side of the main body 110 to cover the upper portion of the container 10 mounted in the container insertion groove 112. By covering the upper part of the main body using the cover in this way, the heating effect can be further improved. In this embodiment, a heater is also provided in the cover 130. That is, as shown in Figure 3, after forming the heater insertion groove 132 in the horizontal direction in the edge portion of the cover 130, a linear cover heater 150 in the heater insertion groove 132 Insert is to install. When the heater 150 is installed on the cover in this way, there is an open part, which has the advantage of completely heating the upper part of the container, which may have a lower temperature than other parts of the container 10.

And the heating block 100 according to the present embodiment is provided with a sensor 160 for measuring the temperature. For example, as shown in FIG. 3, a sensor for measuring the temperature of the main body 110 is mounted at a portion of the main body sidewall, and a sensor for measuring the temperature of the cover 130 is mounted at a portion of the cover. By using the sensor 160 mounted as described above, the temperature of the main body 110 and the cover 130 may be measured in real time to precisely adjust the temperature of the container inserted therein.

Next, the handle 170 is preferably further provided on the side surface of the heating block 100 according to the present embodiment. Since the heating block 100 according to the present embodiment is made of metal, it has a considerable weight per se, and also a container 10 such as a canister mounted on the heating block is also made of metal and has a considerable weight. Therefore, it is not easy for the worker to move the heating block 100 while the container is mounted. Therefore, in this embodiment, as shown in Figure 3, the handle 170 is provided on the side of the heating block 100 has the advantage that the worker's moving operation is easy.

6 is a graph showing a temperature change according to a position when heating a material inside a heating block using a conventional heating block, and FIG. 7 is a material inside a heating block using a heating block according to an embodiment of the present invention. This is a graph showing the temperature change according to the position when heating. 8 is a graph schematically illustrating a change in CPB according to use.

As shown in FIG. 6, when heating using a conventional heating block, the temperature gradient according to the position (for example, the height from the bottom of the heating block) in a steady state is about 11.4 ° C. Indicates. (a) is a graph showing the temperature change with time according to the position, and (b) is a graph showing the temperature gradient according to the position in the steady state.

As shown in FIG. 7, when heating using a heating block according to an embodiment of the present invention, a temperature according to a position (for example, height from the bottom of the heating block) in a steady state The gradient represents about 1.9 ° C. (a) is a graph showing the temperature change with time according to the position, and (b) is a graph showing the temperature gradient according to the position in the steady state.

As shown in FIG. 8, in the case of using a conventional heating block, the CPB value (red graph) is lowered according to the number of batches. In the case of 900 batches, the CPB value is only 0.9 and no further work is possible. When using the heating block according to an embodiment of the present invention, it can be seen that there is almost no change in the CPB value (blue graph) according to the number of batches, and continuous work is possible.

Although the present invention has been described in detail by way of preferred embodiments thereof, other forms of embodiment are possible. Therefore, the technical idea and scope of the claims set forth below are not limited to the preferred embodiments.

1 is a cross-sectional view showing the structure of a conventional heating block.

2 is a graph showing a change in heating temperature by a conventional heating block.

3 is an exploded perspective view showing the structure of a heating block according to an embodiment of the present invention.

4 is a plan view of the main body illustrated in FIG. 3.

5 is a cross-sectional view showing the main body shown in FIG. 3.

6 is a graph showing a temperature change according to a position when heating a material inside the heating block using a conventional heating block.

7 is a graph showing a temperature change according to a position when heating a material inside a heating block using a heating block according to an embodiment of the present invention.

8 is a graph schematically illustrating a change in CPB according to use.

<Description of Symbols for Main Parts of Drawings>

10 container 110 body

112: container insertion groove 114: heater insertion groove

116: heater installation groove 120: main body heater

130: cover 132: heater insertion groove

140,150: Heater 160: Sensor

170: handle

Claims (8)

A main body having a polygonal pillar shape and having a cylindrical container insertion groove in a center thereof; A plurality of linear body heaters inserted into corners of the main body and spaced apart from each other in parallel with the container inserting groove in the depth direction of the container inserting groove; A cover fastened to an upper portion of the main body to seal the container insertion groove; A plurality of straight cover heaters inserted into the cover in a horizontal direction and spaced apart from each other; And And a plurality of straight bottom heaters inserted into the body in a horizontal direction and spaced apart from each other at a lower portion of the container insertion groove. The body heater, the cover heater and the bottom heater is replaceable, The main body is disposed along the circumference of the container insertion groove and has a heat generating portion and a transmission portion respectively located at the corners and sides of the main body, The thickness of the delivery part measured along the radial direction of the container insertion groove from the inner wall of the container insertion groove to one side of the body is measured along the radial direction of the container insertion groove from the inner wall of the container insertion groove to the edge of the body. Heating block, characterized in that less than the thickness of the heating portion. delete delete delete The method of claim 1, The main body and the cover is a heating block, characterized in that the aluminum material. delete delete delete

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