KR101022740B1 - Vaccum pressurization and decompression equipment having double chamder - Google Patents

Vaccum pressurization and decompression equipment having double chamder Download PDF

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Publication number
KR101022740B1
KR101022740B1 KR1020100089004A KR20100089004A KR101022740B1 KR 101022740 B1 KR101022740 B1 KR 101022740B1 KR 1020100089004 A KR1020100089004 A KR 1020100089004A KR 20100089004 A KR20100089004 A KR 20100089004A KR 101022740 B1 KR101022740 B1 KR 101022740B1
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South Korea
Prior art keywords
chamber
housing
heater
vacuum
double
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KR1020100089004A
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Korean (ko)
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이영익
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주식회사 삼원테크
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/02—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/06—Controlling, e.g. regulating, parameters of gas supply
    • F26B21/10—Temperature; Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
    • F26B3/04—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air the gas or vapour circulating over or surrounding the materials or objects to be dried
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

PURPOSE: Vacuum pressurizing/depressurizing equipment having a double-chamber structure is provided to secure the optimum production condition by maintaining uniform temperature distribution in the inner chamber. CONSTITUTION: Vacuum pressurizing/depressurizing equipment having a double-chamber structure comprises inner and outer housings(20,30), an inner heater(22), an outer heater, inner and outer fan motors(23,33), and a second inner heater. The inner housing has an inner chamber(21) inside, and the outer housing has an outer chamber(31) and encloses the inner housing. The inner and outer heaters are respectively installed in the inner and outer chambers in order to heat the interior air. The inner and outer fan motors are respectively installed in the inner and outer housings in order to circulate the heated interior air of the inner and outer chambers. The second inner heater is located opposite to the inner heater and heats the interior air of the inner chamber.

Description

이중챔버구조를 갖는 진공 및 가감압 장비{Vaccum Pressurization and Decompression Equipment having double chamder}Vacuum Pressurization and Decompression Equipment having double chamder

본 발명은 이중챔버구조를 갖는 진공 및 가감압 장비에 관한 것으로서, 보다 상세하게는 피가공물이 내재되는 내부챔버에 2중의 외부챔버로 감싸게 되어 진공 또는 가감압 상태에서 항시 일정하게 온도분포를 유지할 수 있고, 내부챔버의 내측에 내부히터와 내부팬모터를 설치하고 외부챔버의 내측에 외부히터와 외부팬모터를 설치함으로써 내부챔버를 항시 균일한 온도분포를 유지하여 최적의 제품을 생산할 수 있는 이중챔버구조를 갖는 진공 및 가감압 장비에 관한 것이다.
The present invention relates to a vacuum and pressure reduction equipment having a double chamber structure, and more particularly, to be covered with a double outer chamber in the inner chamber in which the workpiece is embedded, so that the temperature distribution can be maintained at a constant time in a vacuum or depressurization state. In addition, by installing the inner heater and the inner fan motor inside the inner chamber and the outer heater and the outer fan motor inside the outer chamber, the inner chamber always maintains a uniform temperature distribution to produce an optimal product. TECHNICAL FIELD The present invention relates to a vacuum and a pressure reduction device having a structure.

일반적으로, 반도체나 전자부품의 기판을 제조한 후 기판에 함유된 수분이나 알코올, 기포, 불순물 가스 등을 제거하기 위한 건조 작업을 진행한다.Generally, after manufacturing a substrate of a semiconductor or an electronic component, a drying operation for removing water, alcohol, bubbles, impurity gases, etc. contained in the substrate is performed.

그리고, 식품이나 의약 분야에서도 1차 제조된 제품의 표면에 부착된 기포나 불순물을 제거하기 위하여 진공 건조작업은 필수적으로 진행하고 있다.In addition, in the food or pharmaceutical field, vacuum drying is inevitably performed to remove bubbles or impurities adhering to the surface of the first manufactured product.

종래의 진공 건조기는 도 1에서 도시한 바와 같이, 반도체, 전자부품, 식품 및 의약 분야 등의 온도나 압력 및 진공하에서 가공되는 피가공품이 내재되는 챔버를 감싸는 하우징(1)과, 상기 하우징(1)의 일측에서 온도와 압력을 조절하는 콘트롤판넬(3)과, 상기 챔버의 내부를 저온으로 변환시키는 냉동기(4)와, 상기 챔버에 내재된 제품이 건조되도록 가열하는 히터(5)와, 상기 챔버에 내부의 공기를 순환시키는 팬모터(6)와, 상기 챔버를 진공상태로 유지시키는 진공펌프(7)로 구성된다.As shown in FIG. 1, a conventional vacuum dryer includes a housing 1 enclosing a chamber in which a workpiece to be processed under a temperature or pressure and a vacuum, such as semiconductors, electronic components, foods and pharmaceuticals, is embedded, and the housing 1 Control panel (3) for controlling the temperature and pressure at one side of the), a freezer (4) for converting the interior of the chamber to a low temperature, a heater (5) for heating to dry the products contained in the chamber, and It consists of a fan motor 6 for circulating air inside the chamber and a vacuum pump 7 for maintaining the chamber in a vacuum state.

이러한 구조에 의해 챔버에 내재된 피가공물을 진공을 시킨 후 히터(5)를 가동하여 피가공물에 온도를 가하게 되면 제품의 표면에 부착된 기포나 수분 및 불순물이 증발되어 하우징(1)의 외부로 배출된다.With this structure, after vacuuming the work inherent in the chamber and operating the heater 5 to apply a temperature to the work, air bubbles, moisture, and impurities adhering to the surface of the product evaporate to the outside of the housing 1. Discharged.

그러나 이러한 종래의 진공 건조기는 진공상태에서 유동성의 열전달매체가 없으므로 챔버의 온도가 불규칙하여 고정밀의 피가공물을 생산하지 못하는 문제점이 있었다.However, such a conventional vacuum dryer has a problem that it is impossible to produce a high-precision workpiece because the temperature of the chamber is irregular because there is no flowable heat transfer medium in a vacuum state.

또한, 종래의 진공 건조기는 챔버 내부의 공기를 가열하는 히터(5)가 하우징의 일측면에 설치되어 히터(5)가 설치된 근처의 온도와 히터(5)가 설치되지 않은 타측면의 온도에 편차가 발생되어 최적의 피가공물을 생산하지 못하는 문제점도 있었다.
In addition, in the conventional vacuum dryer, a heater 5 for heating the air inside the chamber is installed on one side of the housing so that the temperature is different between the temperature near the heater 5 and the other side where the heater 5 is not installed. There was also a problem that does not produce the optimum workpiece.

본 발명은 상기와 같은 종래 기술의 문제점을 해결하기 위해 창작된 것으로 본 발명에 의한 이중챔버구조를 갖는 진공 및 가감압 장비의 목적은, The present invention was created to solve the problems of the prior art as described above, the object of the vacuum and pressure-reducing equipment having a double chamber structure according to the present invention,

피가공물이 내재되는 내부챔버에 2중의 외부챔버로 감싸게 되어 진공 또는 가감압 상태에서 항시 일정하게 온도분포 유지할 수 있고, 내부챔버의 내측에 내부히터와 내부팬모터를 설치하고 외부챔버의 내측에 외부히터와 외부팬모터를 설치함으로써 내부챔버를 항시 균일한 온도분포를 유지하여 최적의 제품을 생산할 수 있는 이중챔버구조를 갖는 진공 및 가감압 장비를 제공함에 있다.
It is wrapped with a double outer chamber in the inner chamber where the workpiece is embedded, so that the temperature distribution can be maintained at any time in a vacuum or depressurization state, and an inner heater and an inner fan motor are installed inside the inner chamber, By installing a heater and an external fan motor, it provides a vacuum and pressure-reducing device having a double chamber structure that can produce an optimal product by maintaining a uniform temperature distribution in the inner chamber at all times.

상기한 목적을 달성하기 위한 본 발명에 의한 이중챔버구조를 갖는 진공 및 가감압 장비는 온도와 압력 및 진공의 가감을 통하여 반도체, 전자부품, 화학, 의학, 식품, 및 약품 분야의 피가공물을 가공하는 진공건조기에 있어서, 상기 피가공물이 내재되도록 내측 공간에 내부챔버를 형성하는 내부하우징과, 상기 내부하우징을 감싸며, 내측 공간에 외부챔버를 형성하는 외부하우징과, 상기 외부챔버의 내측에 설치되어 상기 외부챔버의 공기를 가열하는 외부히터와, 상기 외부하우징의 일측에 설치되어 상기 외부챔버의 내부공기를 순환시키는 외부팬모터로 구성된 것을 특징으로 한다.
Vacuum and pressure reduction equipment having a double chamber structure according to the present invention for achieving the above object is processed workpieces in the fields of semiconductor, electronic components, chemistry, medicine, food, and medicine through the addition of temperature, pressure and vacuum In the vacuum dryer, the inner housing to form the inner chamber in the inner space so that the workpiece is embedded, the outer housing surrounding the inner housing, forming an outer chamber in the inner space, and installed inside the outer chamber An external heater for heating the air of the outer chamber and an external fan motor installed on one side of the outer housing to circulate the internal air of the outer chamber.

이와 같이 본 발명에 의한 이중챔버구조를 갖는 진공 및 가감압 장비는 다음과 같은 효과가 있다.As such, the vacuum and acceleration / deceleration equipment having a double chamber structure according to the present invention has the following effects.

첫째, 피가공물을 감싸는 2중의 내부챔버와 외부챔버가 형성됨으로써, 진공 또는 가감압시 내부챔버의 온도가 항시 균일하게 분포되어 고정밀의 제품을 생산할 수 있는 효과가 있다.First, by forming a double inner chamber and an outer chamber surrounding the workpiece, the temperature of the inner chamber is always uniformly distributed during vacuum or depressurization, thereby producing a high-precision product.

둘째, 외부챔버의 공기를 가열하는 외부히터를 설치하고, 외부챔버의 열을 순환시키는 외부팬모터를 설치함으로써 외부챔버의 대류에 의하여 내부챔버가 가열되어 내부챔버를 항시 일정한 온도로 가열시킬 수 있는 효과가 있다.Second, by installing an external heater for heating the air of the outer chamber, and by installing an external fan motor for circulating the heat of the outer chamber, the inner chamber is heated by the convection of the outer chamber, which can always heat the inner chamber to a constant temperature It works.

셋째, 내부챔버의 공기를 가열하는 내부히터를 설치하고, 내부챔버의 열을 순환시키는 내부팬모터를 설치함으로써 피가공물의 온도를 항시 일정하게 유지시켜 최적의 제품을 생산할 수 있는 효과가 있다.
Third, by installing an internal heater for heating the air of the inner chamber, and by installing an inner fan motor for circulating the heat of the inner chamber, there is an effect that can always maintain the temperature of the workpiece to produce the optimum product.

도 1은 종래의 진공건조기의 단면도.
도 2는 본 발명에 따른 이중구조의 진공 및 가감압 장비를 도시한 개요도.
도 3은 본 발명에 따른 이중구조의 진공 및 가감압 장비를 도시한 평면도.
도 4는 본 발명에 따른 이중구조의 진공 및 가감압 장비를 도시한 정면도.
도 5는 본 발명에 따른 이중구조의 진공 및 가감압 장비를 도시한 측면도.1 is a cross-sectional view of a conventional vacuum dryer.
Figure 2 is a schematic diagram showing a vacuum and deceleration equipment of a dual structure according to the present invention.
Figure 3 is a plan view showing a vacuum and deceleration equipment of a dual structure according to the present invention.
Figure 4 is a front view showing a vacuum and deceleration equipment of a dual structure according to the present invention.
Figure 5 is a side view showing a vacuum and deceleration equipment of a dual structure according to the present invention.

이하, 첨부된 도면을 참조하여 본 발명의 일실시 예를 상세히 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

본 발명에 의한 이중챔버구조를 갖는 진공 및 가감압 장비는 도 2 내지 도 3에서, 온도와 진공의 가감을 통하여 반도체, 전자부품, 화학, 의학, 식품, 및 약품 분야의 제품을 가공하도록 하우징과, 히터와, 진공펌프와, 콘트롤러와, 냉동기와, 팬모터로 이루어진 진공 및 가감압 장치로서, 피가공물(10)을 감싸며 내측 공간에 내부챔버(21)를 형성하는 내부하우징(20)과, 상기 내부하우징(20)을 감싸며 내측 공간에 외부챔버(31)를 형성하는 외부하우징(30)으로 구성된다.Vacuum and pressure reduction equipment having a dual-chamber structure according to the present invention, in Figures 2 to 3, the housing and to process products in the fields of semiconductor, electronic components, chemistry, medicine, food, and medicine through the application of temperature and vacuum , A vacuum and pressure-reducing device comprising a heater, a vacuum pump, a controller, a freezer, and a fan motor, the inner housing 20 surrounding the work 10 and forming an inner chamber 21 in an inner space, The outer housing 30 surrounds the inner housing 20 and forms an outer chamber 31 in the inner space.

즉, 상기 피가공물(10)은 내부하우징(20)의 내부챔버(21)에 상하 2단으로 다수개 내재되며, That is, the workpiece 10 is embedded in a plurality of upper and lower stages in the inner chamber 21 of the inner housing 20,

상기 내부하우징(20)은 도 3 및 도 4에서, 피가공물(10)이 수용되는 내부챔버(21)가 형성되며, 상기 내부챔버(21)의 내측에는 상기 내부챔버(21)의 공기를 가열하는 내부히터(22)가 설치되며, 상기 내부하우징(20)의 일측에는 상기 내부챔버(21)의 내부공기를 순환시키는 내부팬모터(23)가 설치된다.3 and 4, the inner housing 20 is formed with an inner chamber 21 in which the workpiece 10 is accommodated, and heats the air in the inner chamber 21 inside the inner chamber 21. An inner heater 22 is installed, and an inner fan motor 23 for circulating the inner air of the inner chamber 21 is installed at one side of the inner housing 20.

그리고, 상기 외부하우징(30)은 도 3 및 도 5에서, 상기 내부하우징(20)을 수용하는 외부챔버(31)가 형성되며, 상기 외부챔버(31)의 내측에는 상기 외부챔버(31)의 공기를 가열하는 외부히터(32)가 설치되고, 상기 외부하우징(30)의 일측에는 상기 외부챔버(31)의 내부공기를 순환시키는 외부팬모터(33)가 설치된다.3 and 5, an outer chamber 31 for receiving the inner housing 20 is formed, and an inner side of the outer chamber 31 of the outer chamber 31 is formed. An external heater 32 for heating air is installed, and an external fan motor 33 for circulating internal air of the external chamber 31 is installed at one side of the external housing 30.

또한, 상기 내부챔버(21)의 내측에는 상기 내부히터(22)와 대향되어 상기 내부챔버(21)의 공기를 가열하는 제2내부히터(24)가 구비되는 것도 바람직하다.In addition, the inner chamber 21 is preferably provided with a second inner heater (24) facing the inner heater (22) for heating the air in the inner chamber (21).

그리고, 상기 내부하우징(20)의 내측에는 상기 피가공물(10)이 안착되도록 내부받침대(25)가 다수개 설치되고, 상기 외부하우징(30)의 하측에는 상기 내부하우징(20)이 안착되도록 다수개의 외부받침대(35)가 구비된 것을 특징으로 한다.
In addition, a plurality of internal support 25 is installed inside the inner housing 20 to allow the workpiece 10 to be seated, and a plurality of inner housings 20 are seated below the outer housing 30. Three external pedestals 35 are provided.

상기와 같은 구성으로 이루어진 본 발명에 따른 이중챔버구조를 갖는 진공 및 가감압 장비의 작동상태를 살펴보면 아래와 같다.Looking at the operating state of the vacuum and pressure-reducing equipment having a double chamber structure according to the present invention made of the above configuration as follows.

본 발명에 따른 이중챔버구조를 갖는 진공 및 가감압 장비는 도 1 내지 도 2에 도시된 바와 같이, 하측에 진공펌프(4)가 구비되어 피가공물(10)의 내측을 진공상태로 유지하여 온도와 압력의 가감을 통하여 반도체, 전자부품, 화학, 의학, 식품, 및 약품 분야의 제품을 가공하게 된다.Vacuum and depressurization equipment having a double chamber structure according to the present invention, as shown in Figure 1 to 2, the vacuum pump 4 is provided at the lower side to maintain the inside of the workpiece 10 in a vacuum state temperature Through the application of pressure and pressure, products in the fields of semiconductor, electronic parts, chemistry, medicine, food and medicine are processed.

그리고, 상기 진공 및 가감압 장비(1)는 피가공물(10)을 감싸는 2중의 내부하우징(20)과 외부하우징(30)이 형성됨으로써, 2중의 내부챔버(21)와 외부챔버(31)의 온도를 항시 균일하게 유지시켜 고정밀의 제품을 생산할 수 있게 된다.In addition, the vacuum and pressure-reducing equipment 1 is formed of a double inner housing 20 and an outer housing 30 surrounding the workpiece 10, thereby forming a double inner chamber 21 and an outer chamber 31. By keeping the temperature uniform at all times, it is possible to produce high precision products.

또한, 상기 외부챔버(31)의 내측에는 도 3 및 도 5에서, 상기 외부챔버(31)의 내부 공기를 가열하는 외부히터(32)가 설치되고, 상기 외부하우징(30)의 일측에는 상기 외부챔버(31)의 내측에 가열된 공기를 순환시키는 외부팬모터(33)가 설치됨으로써 외부챔버(31)의 내부공기를 순환시켜 내부챔버(21) 공기의 온도를 항시 일정하게 유지시킬 수 있게 된다.3 and 5, an external heater 32 for heating the internal air of the outer chamber 31 is installed inside the outer chamber 31, and the outer housing 30 is provided at one side of the outer housing 30. By installing the external fan motor 33 for circulating the heated air inside the chamber 31, the internal air of the external chamber 31 can be circulated to maintain the temperature of the internal chamber 21 air at all times. .

그리고, 상기 내부하우징(20)의 내부챔버(21)는 상하 2단으로 다수개의 피가공물(10)이 내재됨으로써 동시에 다수의 제품을 진공가열하여 생산성을 대폭 향상시킬 수 있게 되며, In addition, the inner chamber 21 of the inner housing 20 has a plurality of workpieces 10 embedded in two stages up and down, thereby simultaneously heating the vacuum of a plurality of products, thereby greatly improving productivity.

또한, 상기 내부하우징(20)의 내부챔버(21) 내측에는 도 3 및 도 4에 도시된 바와 같이, 상기 내부챔버(21)의 공기를 가열하는 내부히터(22)가 설치되며, 상기 내부하우징(20)의 일측에는 상기 내부챔버(21)의 내측에 가열된 공기를 순환시키는 내부팬모터(23)가 설치됨으로써 내부챔버(21)의 가열공기가 순환되어 피가공물의 온도를 항시 일정하게 분포시켜 최적의 제품을 생산할 수 있게 된다.
In addition, as shown in FIGS. 3 and 4, an inner heater 22 for heating air in the inner chamber 21 is installed inside the inner chamber 21 of the inner housing 20, and the inner housing is provided. On one side of the inner chamber 21, the inner fan motor 23 for circulating the heated air is installed inside the inner chamber 21, the heating air of the inner chamber 21 is circulated to constantly distribute the temperature of the workpiece It is possible to produce an optimal product.

본 발명은 상술한 특정의 바람직한 실시 예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형실시가 가능한 것은 물론이고, 그와 같은 변경은 청구범위 기재의 범위 내에 있게 된다.
The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

1 : 진공건조기 3 : 콘트롤판넬
4 : 진공펌프 7 : 냉동기
10 : 피가공물 20 : 내부하우징
21 : 내부챔버 22 : 내부히터
23 : 내부팬모터 24 : 제2내부히터
25 : 내부받침대 30 : 외부하우징
31 : 외부챔버 32 : 외부히터
33 : 외부팬모터 35 : 외부받침대 1: vacuum dryer 3: control panel
4: vacuum pump 7: freezer
10: workpiece 20: internal housing
21: internal chamber 22: internal heater
23: internal fan motor 24: second internal heater
25: inner stand 30: outer housing
31: external chamber 32: external heater
33: external fan motor 35: external stand

Claims (4)

온도와 압력의 가감을 통하여 반도체, 전자부품, 화학, 의학, 식품, 및 약품 분야의 피가공물을 가공하는 진공 및 가감압 장비에 있어서,
상기 피가공물(10)이 내재되도록 내측 공간에 내부챔버(21)를 형성하는 장방형의 내부하우징(20)과;
상기 내부하우징(20)을 감싸며, 내측 공간에 외부챔버(31)를 형성하는 외부하우징(30)과;
상기 외부챔버(31)의 내측에 설치되어 상기 외부챔버(31)의 공기를 가열하는 외부히터(32)와, 상기 외부하우징(30)의 일측에 설치되어 상기 외부챔버(31)의 내측에 가열된 공기를 순환시키는 외부팬모터(33)로 구성되며,
상기 내부챔버(21)의 내측에는 상기 내부챔버(21)의 공기를 가열하는 내부히터(22)가 설치되며, 상기 내부하우징(20)의 일측에는 상기 내부챔버(21)의 내측에 가열된 공기를 순환시키는 내부팬모터(23)가 설치되고,
상기 내부챔버(21)의 내측에는 상기 내부히터(22)와 대향되어 상기 내부챔버(21)의 공기를 가열하는 제2내부히터(24)가 구비된 것을 특징으로 하는 이중챔버구조를 갖는 진공 및 가감압 장비.
In vacuum and pressure reduction equipment for processing workpieces in the fields of semiconductor, electronic parts, chemistry, medicine, food and medicine through the addition of temperature and pressure,
A rectangular inner housing 20 forming an inner chamber 21 in an inner space such that the work 10 is embedded therein;
An outer housing 30 surrounding the inner housing 20 and forming an outer chamber 31 in an inner space;
An outer heater 32 installed inside the outer chamber 31 to heat air in the outer chamber 31 and a side of the outer housing 30 to be heated inside the outer chamber 31. It consists of an external fan motor 33 for circulating the air,
An inner heater 22 for heating the air of the inner chamber 21 is installed inside the inner chamber 21, and heated air inside the inner chamber 21 on one side of the inner housing 20. The inner fan motor 23 is installed to circulate the
A vacuum having a double chamber structure, wherein a second internal heater 24 is provided on the inner side of the inner chamber 21 so as to face the inner heater 22 and to heat air of the inner chamber 21. Decompression equipment.
삭제delete 삭제delete 제 1 항에 있어서,
상기 내부하우징(20)의 내측에는 상기 피가공물(10)이 안착되도록 내부받침대(25)가 구비되고, 상기 외부하우징(30)의 하측에는 상기 내부하우징(20)이 안착되도록 외부받침대(35)가 구비된 것을 특징으로 하는 이중챔버구조를 갖는 진공 및 가감압 장비.The method of claim 1,
An inner pedestal 25 is provided on the inner side of the inner housing 20 to allow the workpiece 10 to be seated, and an outer pedestal 35 so that the inner housing 20 is seated on the lower side of the outer housing 30. Vacuum and pressure reduction equipment having a double chamber structure, characterized in that the provided.
KR1020100089004A 2010-09-10 2010-09-10 Vaccum pressurization and decompression equipment having double chamder KR101022740B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190049957A (en) 2017-10-30 2019-05-10 주식회사 이노테크 Altitude Test Chamber Apparatus for Display Aerial Delivery

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101966A (en) * 1992-08-05 1994-04-12 Kimio Sakamoto Low temperature and low pressure drying machine
JP2008045802A (en) * 2006-08-14 2008-02-28 Toyota Motor Corp Vacuum drier
KR100882298B1 (en) 2008-02-05 2009-02-10 이인구 Pressure drying unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101966A (en) * 1992-08-05 1994-04-12 Kimio Sakamoto Low temperature and low pressure drying machine
JP2008045802A (en) * 2006-08-14 2008-02-28 Toyota Motor Corp Vacuum drier
KR100882298B1 (en) 2008-02-05 2009-02-10 이인구 Pressure drying unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190049957A (en) 2017-10-30 2019-05-10 주식회사 이노테크 Altitude Test Chamber Apparatus for Display Aerial Delivery

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