KR101022704B1 - 듀얼 스크린프린터 - Google Patents
듀얼 스크린프린터 Download PDFInfo
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- KR101022704B1 KR101022704B1 KR1020090095063A KR20090095063A KR101022704B1 KR 101022704 B1 KR101022704 B1 KR 101022704B1 KR 1020090095063 A KR1020090095063 A KR 1020090095063A KR 20090095063 A KR20090095063 A KR 20090095063A KR 101022704 B1 KR101022704 B1 KR 101022704B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/742—Apparatus for manufacturing bump connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/742—Apparatus for manufacturing bump connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/40—Details of apparatuses used for either manufacturing connectors or connecting the semiconductor or solid-state body
Abstract
Description
Claims (5)
- 듀얼 스크린프린터에 있어서,투입 사이드컨베이어와 중앙 사이드컨베이어 및 배출 사이드컨베이어의 3단계로 배치하되 듀얼구조로 설치되는 이송유닛;상기 중앙 사이드컨베이어의 상측에 위치되고 듀얼로 설치되는 이송유닛을 커버하는 크기의 단일구성으로 형성되며, 제1마스크부 및 제2마스크부의 배열을 갖는 마스크를 배치하기 위한 마스크삽입부가 형성된 스텐실부;상기 스텐실부의 상측에 위치되며, 스퀴즈가 양측에 듀얼구조로 구비되는 스퀴즈부;상기 스텐실부의 하측에 위치되며, 스크린프린팅작업 완료 후 솔더가 도포된 마스크의 하부면을 세정하기 위한 단일구성의 클리너부;상기 이송유닛의 하측 중심부에 위치하여 듀얼구조로 설치되며, 중앙 사이드컨베이어 상에 위치된 회로기판에 대해 스크린프린팅작업 전에 스텐실부에 배치된 제1마스크부 및 제2마스크부측과의 얼라인을 위한 위치제어를 수행함과 더불어 회로기판을 제1마스크부 및 제2마스크부측에 밀착시키는 테이블유닛;상기 이송유닛과 스텐실부의 사이에는 듀얼로 공급되는 회로기판과 스텐실부 상에 배치되는 제1마스크부 및 제2마스크부와의 대응위치를 한번에 동시 파악하기 위해 설치된 제1카메라 및 제2카메라를 갖는 비전부; 를 포함하여 이루어지되,상기 투입 사이드컨베이어와 중앙 사이드컨베이어 및 배출 사이드컨베이어 각각은 폭의 가변 조절이 가능하도록 구성되고,상기 중앙 사이드컨베이어는 회로기판이 위치되는 경우 폭의 가변 조절을 통해 회로기판의 측면을 지지 고정 또는 해제할 수 있도록 구성되며,상기 테이블유닛은 회로기판을 x축 방향과 y축 방향 및 θ방향에 대해 위치 제어하기 위한 X축 플레이트와 Y축 플레이트 및 θ플레이트가 구비되고, 회로기판을 스텐실부에 배치된 마스크측에 밀착시키기 위한 승강플레이트 및 상기 승강플레이트 상측에 위치되고 승강플레이트의 동작에 따라 함께 승강되는 서포트핀플레이트를 포함하여 구비되며,상기 θ플레이트는 하모닉드라이브의 연결 구비를 통해 보다 정밀한 제어가 이루어질 수 있도록 구성한 것을 특징으로 하는 듀얼 스크린프린터.
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KR1020090095063A KR101022704B1 (ko) | 2009-10-07 | 2009-10-07 | 듀얼 스크린프린터 |
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KR1020090095063A KR101022704B1 (ko) | 2009-10-07 | 2009-10-07 | 듀얼 스크린프린터 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPWO2019234821A1 (ja) * | 2018-06-05 | 2021-03-11 | ヤマハ発動機株式会社 | 印刷装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005262689A (ja) | 2004-03-19 | 2005-09-29 | Hitachi Industries Co Ltd | スクリーン印刷機 |
JP2008109159A (ja) * | 1997-02-21 | 2008-05-08 | Speedline Technologies Inc | はんだ収集ヘッドを備えた二重トラックステンシル印刷装置 |
JP2008142949A (ja) | 2006-12-07 | 2008-06-26 | Matsushita Electric Ind Co Ltd | スクリーン印刷装置およびスクリーン印刷方法 |
JP2009070867A (ja) * | 2007-09-11 | 2009-04-02 | Panasonic Corp | スクリーン印刷装置 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008109159A (ja) * | 1997-02-21 | 2008-05-08 | Speedline Technologies Inc | はんだ収集ヘッドを備えた二重トラックステンシル印刷装置 |
JP2005262689A (ja) | 2004-03-19 | 2005-09-29 | Hitachi Industries Co Ltd | スクリーン印刷機 |
JP2008142949A (ja) | 2006-12-07 | 2008-06-26 | Matsushita Electric Ind Co Ltd | スクリーン印刷装置およびスクリーン印刷方法 |
JP2009070867A (ja) * | 2007-09-11 | 2009-04-02 | Panasonic Corp | スクリーン印刷装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2019234821A1 (ja) * | 2018-06-05 | 2021-03-11 | ヤマハ発動機株式会社 | 印刷装置 |
JP7008135B2 (ja) | 2018-06-05 | 2022-02-10 | ヤマハ発動機株式会社 | 印刷装置 |
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