KR101016621B1 - A Device for Compensating Bend of Nozzle and A Nozzle Device Having the Same, and A Method of Compensating Bend of Nozzle - Google Patents

Abstract

The present invention discloses a nozzle compensating apparatus for a nozzle, a nozzle apparatus having the same, and a method for compensating the bending of a nozzle.

The warpage compensation device of the nozzle according to an embodiment of the present invention comprises a nozzle hanger provided on the nozzle; A plurality of pairs of fixing members provided on the nozzle hanger; A plurality of gaps provided downward between each of the plurality of pairs of fixing members; And a plurality of gap adjusting members provided across each of the plurality of pairs of fixing members and configured to compensate for warpage of the nozzle by adjusting widths of the plurality of gaps.

Using the warpage compensation device of the nozzle of the present invention, the nozzle device having the same, and the warpage compensation method of the nozzle can be very easily and precisely compensate for the warpage of the nozzle.

Nozzle, Bent, Compensator, Nozzle Unit

Description

A device for compensating bend of nozzle and a nozzle device having the same, and a method of compensating bend of nozzle

The present invention relates to a warpage compensation device of a nozzle, a nozzle device having the same, and a warpage compensation method of a nozzle. More specifically, the present invention provides a nozzle hanger having a plurality of gap adjusting members along the longitudinal direction of the nozzle, and thus the amount of error in the bending of the nozzle and the assembly state of the nozzle due to the load of the coating liquid provided inside the nozzle. The present invention relates to a warpage compensation device for a nozzle capable of compensating for maintaining a nozzle in a horizontal state, a nozzle device having the same, and a warpage compensation method for a nozzle.

Generally, a slit die nozzle or dispenser nozzle is used to apply a coating solution onto a substrate or work piece such as glass to manufacture a PDP or LCD panel. Coating devices with nozzles such as dispenser nozzles are used.

More specifically, in the table coater 100 (hereinafter referred to as "coating apparatus") used to manufacture the PDP or LCD panel schematically shown in FIG. ) Is applied onto the substrate 110 while the nozzle 120 attached to the gantry 125 is moved in a horizontal direction after positioning the on the stage or suction table 112. It is used.

FIG. 1B shows a schematic perspective view of a nozzle for discharging a coating liquid used in the coating apparatus according to the prior art shown in FIG. 1A described above, and FIG. 1C shows one side cross-sectional view of the nozzle according to the prior art shown in FIG. 1B. It is shown.

1B and 1C, the nozzle 120 according to the related art is composed of a pair of first lip 122a and a second lip 122b facing each other. The coating liquid supply part (not shown) and the chamber 126 are formed in the inside of the 1st lip 122a. However, one of ordinary skill in the art will fully understand that the coating liquid supply (not shown) and the chamber 126 may be formed inside the second lip 122b. A slit or a plurality of nozzle holes 128 with a gap L is formed between the inner side of the first lip 122a and the inner side of the second lip 122b along the lower portion of the chamber 126. In addition, a discharge port 128a opened outward is formed at a bottom edge of the slit or the plurality of nozzle holes 128. Here, when reference numeral 128 is a slit, the nozzle 120 is a slit die nozzle 120, and when reference numeral 128 is a plurality of nozzle holes, the nozzle 120 is a dispenser nozzle 120. The coating liquid is discharged through the discharge holes 128a along the slit or the nozzle hole 128 to form a coating film or the like on the surface of the substrate 110 (see FIG. 1A). For example, when forming a coating film, the nozzle apparatus 120 and the workpiece 110 move relatively (see FIG. 1A).

1D shows a partial perspective view of a nozzle of the prior art including a crossbar 130.

Referring to FIG. 1D, the nozzle 120 of the related art includes a crossbar 130 coupled to an upper portion of the nozzle 120 by a plurality of bolts 140 to support the nozzle 120 in a fixed manner. The crossbar 130 is implemented as an I-shaped beam having excellent strength against bending, and is fixed to the upper portion of the nozzle 120 by a plurality of bolts 140 at the lower portion thereof.

However, as the large area of the substrate 110 shown in FIG. 1A increases, the length of the nozzle 120 that applies the coating liquid to the large area substrate 110 has also been continuously increased. As a result, the load increases due to the increase in the weight of the nozzle 120 itself and the weight of the coating liquid contained in the nozzle 120. Due to this increase in load, the nozzle 120 inevitably bends downward. In the above-described conventional technique, the nozzle 120 and the crossbar 130 are coupled only by the plurality of bolts 140, so that the nozzle 120 may be easily bent, but the bending of the nozzle 120 may be corrected or compensated. There was no proper means.

If the above-described bending of the nozzle 120 occurs, a problem occurs that the coating liquid is not evenly applied on the substrate 110. In this case, the tightening state of the plurality of bolts 140 may be precisely adjusted again or the whole nozzle 120 may be replaced. As a result, the manufacturing cost rises.

In order to solve the above problems, a method of correcting the warpage of a nozzle using a correction device has been proposed.

More specifically, FIG. 1E illustrates a partial perspective view and one side view of the nozzle deflection correction device according to the prior art, and FIG. 1F shows a partial front view of the nozzle deflection correction device according to the prior art shown in FIG. 1E. Doing. Such a device for correcting warpage of a nozzle according to the prior art was filed in the Korean Patent Application No. 10-2006-0133351 on December 26, 2006 under the name of “Invention and Apparatus for Correcting Deflection of Photoresist Coating Nozzle”. It is described in detail in published patent no. 10-2008-0059709 published on July 1.

1E and 1F, the warpage correcting apparatus 150 of the nozzle 120 according to the related art includes a crossbar 130, a crossbar 130 between the nozzle 120 and the crossbar 130. A plurality of warpage correction blocks 132 are provided spaced apart by a predetermined distance along the longitudinal direction, and the lower portion of the crossbar 130, the plurality of warpage correction blocks 132, respectively provided on the top of the nozzle 120 It consists of a plurality of bolts 140 for fastening the nozzle 120 and the crossbar 130 through a plurality of fastening through holes (not shown). The shape of the crossbar 130 is an I-shaped beam excellent in bending strength, and a fastening through hole (not shown) is provided at a lower portion thereof to enable fastening of the plurality of bolts 140 up and down. A plurality of warpage correction blocks 132 are provided below the crossbars 130 at positions spaced apart by a predetermined distance. The bending correction block 132 is also provided with a plurality of fastening through holes penetrating up and down. The nozzle 120 is fastened to the lower part of the warpage correction block 132. The warpage correction block 132 uses the same height at the time of initial installation, so that the crossbar 130 and the nozzle 120 can be fastened in a parallel state.

As the nozzle 120 continues to be used in a parallel initial installation state as described above, the nozzle 120 may be bent downward due to its own weight and the weight of the coating liquid supplied therein. In this case, the warpage of the nozzle 30 may be corrected using the warpage correction device 150 according to the related art.

Figure 1g is a partial cross-sectional view showing a method for correcting the warp of the nozzle using the prior art warp correction device of the nozzle.

Referring to FIG. 1G, when warpage occurs in the nozzle 120 while the nozzle 120 is in use (area A), the warpage correction block having a lower height than the warpage correction block 132 positioned above the corresponding area A is lower. Replace with 132a. In this case, by using the warpage correction block 132a having a lower height than the warpage correction block 132 originally used, the warpage generation area A of the nozzle 120 is bent by the crossbar 130 side. This is corrected.

However, when using the deflection correction device 150 of the nozzle 120 according to the prior art described above occurs the following problem.

1. When the bending of the nozzle 120 occurs, in order to replace the bending correction block 132 of the corresponding area, disassembly of the bending correction block 132 and the bolt 140, the new bending correction block 132 Replacement with the correction block 132a and reassembly of the new bending correction block 132a and the bolt 140 must be performed. Therefore, the replacement process of the warpage correction block 132 is complicated, and the replacement time increases.

2. Even if the bending correction block 132 of the area where the bending of the nozzle 120 is replaced is replaced, the area near the area where the bending of the nozzle 120 occurs due to the height difference of the replaced bending correction block 132. Therefore, it is difficult to precisely correct the bending of the nozzle 120. As a result, the possibility of defects in the final produced substrate 110 increases, resulting in lower productivity and increased production cost.

3. According to the bending size of the nozzle 120, a new bending correction block 132a having a height corresponding to the bending size should be used. As a result, a plurality of warpage correction blocks 132a having various heights are required according to the warpage size of the nozzle 120. Thus, component costs, such as warpage correction block 132, increase significantly.

4. If cleaning of the nozzle 120 is required or repair or replacement is required for failure of the nozzle 120, disassembly and reassembly of the plurality of warpage correction blocks 132 and the plurality of bolts 140 is performed. The assembly process is essential. Thus, the operation and time required to clean, repair or replace the nozzle 120 is significantly increased.

The present invention is to solve the above-mentioned problems of the prior art, by providing a nozzle hanger having a plurality of gap adjusting member along the longitudinal direction of the nozzle and the bending of the nozzle due to the load of the nozzle and the coating liquid provided inside the nozzle and The present invention provides a nozzle compensating apparatus for a nozzle capable of compensating an error amount of an assembled state of a nozzle and maintaining a nozzle in a horizontal state, a nozzle apparatus having the same, and a method for compensating the bending of a nozzle.

The warpage compensation device of the nozzle according to the first aspect of the present invention comprises a nozzle hanger provided on the nozzle; A plurality of pairs of fixing members provided on the nozzle hanger; A plurality of gaps provided downward between each of the plurality of pairs of fixing members; And a plurality of gap adjusting members provided across each of the plurality of pairs of fixing members and configured to compensate for warpage of the nozzle by adjusting widths of the plurality of gaps.

The warpage compensation device of the nozzle according to the second aspect of the present invention comprises a nozzle hanger provided on the nozzle; A plurality of gaps provided downward from an upper surface of the nozzle hanger; A plurality of pairs of fixing bolts provided across the plurality of gap directions in the nozzle hanger; And a plurality of pairs of female threads respectively coupled to the plurality of pairs of fixing bolts, and a plurality of nuts for compensating the bending of the nozzle by adjusting widths of the plurality of gaps by a rotation operation with the plurality of pairs of fixing bolts. It characterized in that it comprises a.

According to a third aspect of the present invention, a nozzle device includes: a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip or the second lip; A chamber connected with the coating liquid supply part; And a slit having a first gap L between an inner side surface of the first lip and an inner side surface of the second lip along a lower portion of the chamber, and having a discharge opening opened outward at a bottom edge thereof. Or a nozzle including a plurality of nozzle holes; A warpage compensation device provided on the nozzle; And a plurality of spacer blocks connecting the nozzle and the warpage compensation device in a fixed manner, wherein the warpage compensation device comprises: a nozzle hanger provided on an upper portion of the nozzle; A plurality of pairs of fixing members provided on the nozzle hanger; A plurality of gaps provided inside the nozzle hanger between the plurality of pairs of fixing members; And a plurality of gap adjusting members provided across each of the plurality of pairs of fixing members and configured to compensate for warpage of the nozzle by adjusting widths of the plurality of gaps.

According to a fourth aspect of the present invention, there is provided a method for compensating warpage of a nozzle, including a) a plurality of pairs of fixing members, a plurality of gaps provided downward between each of the plurality of pairs of fixing members, and each of the plurality of pairs of fixing members. Providing a nozzle hanger on top of the nozzle, the nozzle hanger having a plurality of gap adjusting members provided across; b) measuring the bending of the nozzle using a sensor mounted to the nozzle; c) calculating a correction amount corresponding to the measured warp value; d) displaying the calculated value of the correction amount on a display device; And e) compensating for the bending of the nozzle by adjusting the widths of the plurality of gaps by the value of the correction amount using the plurality of gap adjusting members.

According to a fifth aspect of the present invention, there is provided a method for compensating warpage of a nozzle, the method comprising: a) a nozzle hanger having a plurality of gaps provided downward from an upper surface, and a plurality of gap adjusting members including a plurality of pairs of fixing bolts and a plurality of nuts. Providing a top of the nozzle; b) measuring the bending of the nozzle 220 using a sensor mounted to the nozzle; c) calculating a correction amount corresponding to the measured warp value; d) displaying the calculated value of the correction amount on a display device; And e) compensating for the bending of the nozzle by adjusting the widths of the plurality of gaps by the value of the correction amount using the plurality of gap adjusting members.

The following advantages are achieved by using the warpage compensation device of the nozzle of the present invention, the nozzle device having the same, and the warpage compensation method of the nozzle.

1. The warpage of the nozzle 220 can be compensated by adjusting the gap of the nozzle hanger using only a plurality of gap adjusting members on the nozzle hanger, so that the warpage compensation operation of the nozzle 220 is made very easy and necessary for compensation. The time is significantly reduced.

2. Precision compensation of the bending of the nozzle 220 is possible. As a result, the slit of the nozzle 220 or the discharge port 128a of the plurality of nozzle holes 128 can be kept in a horizontal state, so that the possibility of failure of the final produced substrate 110 is significantly lowered. Therefore, the productivity of the substrate 110 is increased to reduce the production cost.

3. Unlike the prior art, since the use of a plurality of warpage correction blocks 132a having various heights is not required to compensate for warpage of the nozzle 220, component cost is significantly reduced.

4. If cleaning, repair or replacement of the nozzle 220 is required, only the spacer block needs to be released and reassembled, thereby significantly reducing the operation and time required to clean, repair or replace the nozzle 220.

Further advantages of the present invention will become apparent from the following description with reference to the accompanying drawings in which like or like reference numerals designate like elements.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings of the present invention.

FIG. 2A is a front view of the warpage compensation device of the nozzle according to the first embodiment of the present invention.

Referring to FIG. 2A, the warpage compensation device 250 of the nozzle 220 according to the first embodiment of the present invention may include a nozzle hanger 230 provided on the nozzle 220; A plurality of pairs of fixing members 234a; 234b; 234c provided on the nozzle hanger 230; A plurality of gaps 236a; 236b; 236c provided downward between each of the plurality of pairs of fixing members 234a; 234b; 234c; And a plurality of gaps provided across each of the plurality of pairs of fixing members 234a; 234b; 234c and adjusting widths of the plurality of gaps 236a; 236b; 236c to compensate for the warpage of the nozzle 220. Adjusting members 241a; 241b; 241c. Here, the plurality of pairs of fixing members 234a; 234b; 234c are formed of a plurality of left and right fixing members 234a1, 234a2; 234b1, 234b2; 234c1, 234c2, and a plurality of gap adjusting members 241a; 241b; 241c. ) May be implemented with a plurality of bolts 240a; 240b; 240c and a plurality of nuts 242a; 242b; 242c. In addition, the bending compensation device 250 of the nozzle 220 according to the first embodiment of the present invention, for example, is mounted on the nozzle 220, the sensor 222 that can measure the bending of the nozzle 220 ); A control device (260) for receiving a value of warpage of the nozzle (220) measured by the sensor (222) and calculating a correction amount corresponding to the value of warpage; And a display device 262 connected to the control device 260 and displaying a value of the correction amount calculated by the control device 260.

Also, referring to FIGS. 1C and 2A, a nozzle apparatus 220a according to an embodiment of the present invention includes a pair of first and second lips 122a and 122b facing each other; A coating liquid supply unit (not shown) formed in the first lip 122a or the second lip 122b; A chamber 126 connected to the coating liquid supply part; And a first gap L formed between an inner side surface of the first lip 122a and an inner side surface of the second lip 122b along a lower portion of the chamber 126. The nozzle 220 includes a slit or a plurality of nozzle holes 128, the discharge port (128a) is opened to the outside; Warpage compensation device (250) provided on an upper portion of the nozzle (220); And a plurality of spacer blocks 232 connecting the nozzle 220 and the warpage compensation device 250 in a fixed manner. Here, the nozzle 220 is the same as the nozzle 120 according to the related art shown in FIG. 1C, and the warpage compensation device 250 is the warpage compensation device 250 according to the first embodiment of the present invention shown in FIG. 2A. Is implemented as

Hereinafter, the configuration and operation of the warpage compensation device 250 of the nozzle 220 according to the first embodiment of the present invention will be described in detail.

Referring again to FIG. 2A, the nozzle 220 according to the first embodiment of the present invention is connected to the warpage compensation device 250 by a plurality of spacer blocks 232 in a fixed manner. Although three spacer blocks 232 are illustrated in the embodiment shown in FIG. 2A, those skilled in the art will fully appreciate that a plurality of spacer blocks 232 may be provided.

On the other hand, as the nozzle 220 continues to be used in a parallel initial installation state, it may be bent in a downward direction by its own weight and the weight of the coating liquid supplied therein (see B position). In this case, the warp of the nozzle 220 is compensated for by using a plurality of gap adjusting members 241a; 241b; 241c provided to the nozzle hanger 230. More specifically, the bending correction amount of the first gap 236a should be the largest at the B1 position where the bending of the nozzle 220 is greatest. Therefore, the width of the first pair of fixing members 234a is increased by the rotational operation of the first gap adjusting member 241a (for example, by rotating the first bolt 240a counterclockwise). As a result, the first gap 236a is expanded by the first correction amount corresponding to the magnitude of the bending of the nozzle 220 at the B1 position. In addition, the bending correction amounts of the second and third gaps 236b and 236c should be relatively small at the positions of B2 and B3 where the bending of the nozzle 220 is relatively small. Thus, the second and third parts may be rotated by rotating the second and second gap adjusting members 241b and 241c (for example, by rotating the second and third bolts 240b and 240c counterclockwise, respectively). The width of the pair of fastening members 234b and 234c is increased to be smaller than the width of the first pair of fastening members 234a. As a result, the second and third gaps 236b and 236c respectively extend by the second and third correction amounts corresponding to the magnitudes of the warpage of the nozzles 220 at the B2 and B3 positions. Here, the second correction amount and the third correction amount may be the same or different. In the first embodiment, the plurality of bolts 240a; 240b; 240c are rotated counterclockwise to increase the width of the pair of fixing members 234a; 234b; 234c. Those skilled in the art will fully appreciate that it is also possible to rotate the plurality of bolts 240a; 240b; 240c clockwise to reduce the width of the plurality of pairs of fixing members 234a; 234b; 234c.

On the other hand, in order to obtain the values of the first to third correction amount, the value of the warpage of the nozzle 220 should be measured. The bending value of the nozzle 220 is a sensor 222 mounted at a position capable of measuring straightness corresponding to a plurality of positions (B1, B2, and B3 positions in FIG. 2A) of the nozzle 220. Can be measured by It is preferable that the measurement of the value of the bending of the nozzle 220 is made in real time. The bending value of the nozzle 220 measured in real time by the sensor 222 is transmitted to the controller 260 in a wired or wireless manner. The control device 260 may be implemented with, for example, a microprocessor or a personal computer (PC). The controller 260 calculates a correction amount corresponding to the value of the warpage received. Thereafter, the value of the correction amount calculated by the control device 260 is displayed on the display device 262. When the value of the calculated correction amount is out of the allowable error range of the warp, the operator or the user may use the plurality of adjustment members 240a, 242a; 240b, 242b; 240c, 242c by the respective rotational motions of the plurality of adjustment members. The bending of the nozzle 220 is compensated for by expanding or contracting the gaps 236a; 236b and 236c, respectively. As a result, the nozzle 220 maintains the discharge port 128a (see FIGS. 1B and 1C) of the slit or the plurality of nozzle holes 128 in a horizontal state so that the amount of the plating liquid discharged onto the substrate 110 is constant. Can be discharged.

FIG. 2B is a front view of an alternative embodiment of the gap adjusting member used in the warpage compensation device of the nozzle according to the first embodiment of the present invention shown in FIG. 2A.

2A and 2B, in the embodiment of FIG. 2A, a plurality of nuts 242a, 242b, 242c are provided on the inner side (right side) of the plurality of left fastening members 234a1; 234b1; 234c1, respectively. In an alternative embodiment of FIG. 2B (only the first gap adjusting member 241a and the first pair of fixing members 234a are shown for convenience), the first nut 242a is external to the first left fixing member 234a1. The configuration and operation of the plurality of gap adjusting members 241a; 241b; 241c are substantially the same except that they are provided on the side (left).

FIG. 2C is a front view of the warpage compensation device of the nozzle according to the second embodiment of the present invention.

Referring to FIG. 2C, the warpage compensation device 250 of the nozzle 220 according to the second embodiment of the present invention may include a nozzle hanger 230 provided on the nozzle 220; A plurality of gaps 236a; 236b; 236c provided downward from an upper surface of the nozzle hanger 230; A plurality of pairs of fixing bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2 provided in the nozzle hanger 230 across the plurality of gaps 236a; 236b; 236c; And a plurality of pairs of female threads 244a1, 244a2; 244b1, 244b2; 244c1, 244c2 fastened to the plurality of pairs of fixing bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2, respectively. A plurality of nuts 242a for compensating the bending of the nozzle 220 by adjusting the widths of the plurality of gaps 236a; 236b; 236c by a rotation operation with the bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2. ; 242b; 242c). In addition, the bending compensation device 250 of the nozzle 220 according to the second embodiment of the present invention is mounted to the nozzle 220, the sensor 222 that can measure the bending of the nozzle 220; A control device (260) for receiving a value of the warpage of the nozzle (220) measured by the sensor (222) and calculating a correction amount corresponding to the value of the warpage; And a display device 262 connected to the control device 260 and displaying a value of the correction amount calculated by the control device 260.

Also, referring to FIGS. 1C and 2C, a nozzle apparatus 220a according to another embodiment of the present invention includes a pair of first and second lips 122a and 122b facing each other; A coating liquid supply unit (not shown) formed in the first lip 122a or the second lip 122b; A chamber 126 connected to the coating liquid supply part; And a first gap L formed between an inner side surface of the first lip 122a and an inner side surface of the second lip 122b along a lower portion of the chamber 126. The nozzle 220 includes a slit or a plurality of nozzle holes 128, the discharge port (128a) is opened to the outside; Warpage compensation device (250) provided on an upper portion of the nozzle (220); And a plurality of spacer blocks 232 connecting the nozzle 220 and the warpage compensation device 250 in a fixed manner. Here, the nozzle 220 is the same as the nozzle 120 according to the related art shown in FIG. 1C, and the warpage compensation device 250 is the warpage compensation device 250 according to the second embodiment of the present invention shown in FIG. 2C. Is implemented as

Hereinafter, the configuration and operation of the warpage compensation device 250 of the nozzle 220 according to the second embodiment of the present invention will be described in detail.

Referring back to FIG. 2C, the nozzle 220 according to the second embodiment of the present invention is connected to the bending compensation device 250 in a fixed manner by the plurality of spacer blocks 232. As the nozzle 220 continues to be used in a parallel initial installation state, it may be bent downward due to its own weight and the weight of the coating liquid supplied therein (see B position). In this case, the warp of the nozzle 220 is compensated for by using a plurality of gap adjusting members 241a; 241b; 241c provided to the nozzle hanger 230. Here, the plurality of gap adjusting members 241a; 241b; 241c may include a plurality of pairs of fixing bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2 and a plurality of nuts 242a; 242b; 242c. More specifically, the bending correction amount of the first gap 236a should be the largest at the B1 position where the bending of the nozzle 220 is greatest. Accordingly, the first pair of bolts 240a1, by the rotational operation of the first gap adjusting member 241a (for example, by rotating the first nut 242a clockwise relative to the first bolt 240a1). 240a2 applies a force in a direction away from each other in the first pair of female threads 244a1 and 244a2 in the first nut 242a. As a result, the first gap 236a is expanded by the first correction amount corresponding to the magnitude of the bending of the nozzle 220 at the B1 position. To this end, for example, the first pair of bolts 240a1 and 240a2 each have male screw portions (not shown) in opposite directions with respect to each other. More specifically, the first bolt 240a1 has a male thread portion (not shown) in the right direction, and the second bolt 240a2 has a male thread portion (not shown) in the left direction, or the first bolt (not shown). The 240a1 has a male screw portion (not shown) in the left direction, and the second bolt 240a2 has a male screw portion (not shown) in the right direction (in this case, the first bolt 240a1 is referred to as a reference). When the nut 242a is rotated counterclockwise, the first pair of bolts 240a1 and 240a2 apply a force in a direction away from each other in the first pair of female threads 244a1 and 244a2 in the first nut 242a. ).

In addition, the bending correction amounts of the second and third gaps 236b and 236c should be relatively small at the positions of B2 and B3 where the bending of the nozzle 220 is relatively small. Accordingly, the rotational operation of the second and second gap adjusting members 241b and 241c (eg, rotating the second pair and the third pair of bolts 240b1, 240b2; 240c1, 240c2, respectively, in a counterclockwise direction). By means of the second and third pairs of bolts 240b1, 240b2; 240c1, 240c2, respectively, the second and third pairs of female threads 244b1, 244b2; 244c1 in the first and second nuts 242b; 242c, respectively. , 244c2) in a direction away from each other. As a result, the second and third gaps 236b and 236c respectively extend by the second and third correction amounts corresponding to the magnitudes of the warpage of the nozzles 220 at the B2 and B3 positions. Here, the second correction amount and the third correction amount may be the same or different.

In addition, since the measurement of the value of the curvature of the nozzle 220 for obtaining the value of a 1st thru | or 3rd correction amount is the same as the case of the 1st Example mentioned above, the detailed description is abbreviate | omitted here.

3A is a flowchart illustrating a method for compensating warpage of a nozzle according to an exemplary embodiment of the present invention.

Referring to FIG. 3A, the warpage compensation method 300 of the nozzle 220 according to an embodiment of the present invention may include a) a plurality of pairs of fixing members 234a and 234b and 234c and a plurality of pairs of fixing members 234a; A plurality of gaps 236a; 236b; 236c provided downwardly between each of the plurality of gap adjustment members 234b; 234c; and a plurality of gap adjusting members provided across each of the pair of fixing members 234a; 234b; 234c. Providing (310) a nozzle hanger (230) with 241a; 241b; 241c on top of the nozzle (220); b) measuring (320) the bending of the nozzle (220) using a sensor (222) mounted to the nozzle (220); c) calculating (330) a correction amount corresponding to the measured value of warpage; d) displaying (340) the calculated value of the correction amount on a display device (260); And e) compensating for the bending of the nozzle 220 by adjusting the widths of the gaps 236a; 236b; 236c by the value of the correction amount using the plurality of gap adjusting members 241a; 241b; 241c. Step 350 is included.

3B is a flowchart illustrating a method for compensating for warpage of a nozzle according to still another exemplary embodiment of the present invention.

Referring to FIG. 3B, the warpage compensation method 300 of the nozzle 220 according to another embodiment of the present invention may include: a) a plurality of gaps 236a; 236b; 236c provided downward from the upper surface, and a plurality of Nozzle hanger 230 having a plurality of gap adjusting members 241a; 241b; 241c consisting of a pair of fixing bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2 and a plurality of nuts 242a; 242b; 242c. Providing (310) an upper portion of the nozzle (220); b) measuring (320) the deflection of the nozzle (220) using a sensor (222) mounted to the nozzle (220); c) calculating (330) a correction amount corresponding to the measured value of warpage; d) displaying (340) the calculated value of the correction amount on a display device (262); And e) compensating for the bending of the nozzle 220 by adjusting the widths of the gaps 236a; 236b; 236c by the value of the correction amount using the plurality of gap adjusting members 241a; 241b; 241c. Step 350 is included.

In the embodiment of FIG. 3B, the adjustment of the width of the plurality of gaps 236a; 236b; 236c in the step 350 rotates the plurality of nuts 242a; 242b, 242c clockwise or counterclockwise. The plurality of pairs of fixing bolts 240a1, 242a2; 240b1, 242b2; 240c1, 242c2 are applied by applying a force in a direction away from or close to each other in the plurality of nuts 242a; 242b, 242c, respectively.

As described above, by using the bending compensation device of the nozzle of the present invention, the nozzle device having the same, and the bending compensation method of the nozzle, the bending of the nozzle can be compensated very easily and precisely.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Therefore, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

1A is a view schematically showing a coating apparatus for manufacturing a PDP or LCD panel of the prior art.

FIG. 1B is a schematic perspective view of a nozzle for discharging a coating liquid used in the coating apparatus according to the related art shown in FIG. 1A.

Figure 1c is a view showing one side cross-sectional view of the nozzle according to the prior art shown in Figure 1b.

1D illustrates a partial perspective view of a nozzle of the prior art including a crossbar 130.

Figure 1e is a view showing a partial perspective view and one side view of the device for compensating the warp of the nozzle according to the prior art.

FIG. 1F illustrates a partial front view of a device for correcting warpage of a nozzle according to the related art shown in FIG. 1E.

Figure 1g is a partial cross-sectional view showing a method for correcting the warp of the nozzle using the prior art warp correction device of the nozzle.

FIG. 2A is a front view of the warpage compensation device of the nozzle according to the first embodiment of the present invention.

FIG. 2B is a front view of an alternative embodiment of the gap adjusting member used in the warpage compensation device of the nozzle according to the first embodiment of the present invention shown in FIG. 2A.

FIG. 2C is a front view of the warpage compensation device of the nozzle according to the second embodiment of the present invention.

3A is a flowchart illustrating a method for compensating warpage of a nozzle according to an exemplary embodiment of the present invention.

3B is a flowchart illustrating a method for compensating for warpage of a nozzle according to still another exemplary embodiment of the present invention.

Claims (12)

In the warpage compensation device of the nozzle, A nozzle hanger provided above the nozzle; A plurality of pairs of fixing members provided on the nozzle hanger; A plurality of gaps provided downward between each of the plurality of pairs of fixing members; And A plurality of gap adjusting members provided across each of the plurality of pairs of fixing members, and adjusting the widths of the plurality of gaps to compensate for the bending of the nozzles; Bent compensation device of the nozzle comprising a. The method of claim 1, The plurality of pairs of fixing members are composed of a plurality of left and right fixing members, The plurality of gap adjusting members may be implemented by a plurality of bolts and a plurality of nuts. Nozzle warpage compensation device. The method according to claim 1 or 2, The warpage compensation device A sensor mounted to the nozzle and capable of measuring the bending of the nozzle; A control device that receives the value of the warp of the nozzle measured by the sensor and calculates a correction amount corresponding to the value of the warp; And A display device connected to the control device and displaying a value of the correction amount calculated by the control device The bending compensation device of the nozzle further comprising. In the warpage compensation device of the nozzle, A nozzle hanger provided above the nozzle; A plurality of gaps provided downward from an upper surface of the nozzle hanger; A plurality of pairs of fixing bolts provided across the plurality of gap directions in the nozzle hanger; And A plurality of nuts having a plurality of pairs of female threads respectively engaged with the plurality of pairs of fixing bolts, and adjusting the widths of the plurality of gaps by rotating the plurality of pairs of fixing bolts to compensate for the bending of the nozzles; Bent compensation device of the nozzle comprising a. The method of claim 4, wherein The warpage compensation device A sensor mounted to the nozzle and capable of measuring the bending of the nozzle; A control device which receives the value of the warp of the nozzle measured by the sensor and calculates a correction amount corresponding to the value of the warp; And A display device connected to the control device and displaying a value of the correction amount calculated by the control device The bending compensation device of the nozzle further comprising. The method according to claim 4 or 5, The width of the plurality of gaps is adjusted by rotating the plurality of nuts in a clockwise or counterclockwise direction so that the plurality of pairs of fixing bolts apply a force in a direction away from or close to each other in the plurality of nuts. Nozzle warpage compensation device. In the nozzle device, A pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip or the second lip; A chamber connected with the coating liquid supply part; And a slit having a first gap L between an inner side surface of the first lip and an inner side surface of the second lip along a lower portion of the chamber, and having a discharge opening opened outward at a bottom edge thereof. Or a nozzle including a plurality of nozzle holes; A warpage compensation device provided on the nozzle; And A plurality of spacer blocks connecting the nozzle and the warpage compensation device in a fixed manner; Including, The warpage compensation device A nozzle hanger provided above the nozzle; A plurality of pairs of fixing members provided on the nozzle hanger; A plurality of gaps provided inside the nozzle hanger between the plurality of pairs of fixing members; And A plurality of gap adjusting members provided across each of the plurality of pairs of fixing members, and adjusting the widths of the plurality of gaps to compensate for the bending of the nozzles; Containing Nozzle device. The method of claim 7, wherein The warpage compensation device A nozzle hanger provided above the nozzle; A plurality of gaps provided downward from an upper portion of the nozzle hanger; A plurality of pairs of fixing bolts provided across the plurality of gap directions; And A plurality of nuts having a plurality of pairs of female threads respectively engaged with the plurality of pairs of fixing bolts, and adjusting the widths of the plurality of gaps by rotating the plurality of pairs of fixing bolts to compensate for the bending of the nozzles; Containing Nozzle device. The method according to claim 7 or 8, The warpage compensation device A sensor mounted to the nozzle and capable of measuring the bending of the nozzle; A control device which receives the value of the warp of the nozzle measured by the sensor and calculates a correction amount corresponding to the value of the warp; And A display device connected to the control device and displaying a value of the correction amount calculated by the control device Nozzle device further comprising. In the warp compensation method of the nozzle, a) a nozzle hanger having a plurality of pairs of fixing members, a plurality of gaps provided downwardly between each of the plurality of pairs of fixing members, and a plurality of gap adjusting members provided across each of the plurality of pairs of fixing members. Providing a top of the nozzle; b) measuring the bending of the nozzle using a sensor mounted to the nozzle; c) calculating a correction amount corresponding to the measured warp value; d) displaying the calculated value of the correction amount on a display device; And e) compensating for the bending of the nozzle by adjusting the widths of the plurality of gaps by the value of the correction amount using the plurality of gap adjusting members. Bent compensation method of the nozzle comprising a. In the warp compensation method of the nozzle, a) providing a nozzle hanger on top of the nozzle, the nozzle hanger having a plurality of gaps provided downward from an upper surface and a plurality of gap adjusting members consisting of a plurality of pairs of fixing bolts and a plurality of nuts; b) measuring the bending of the nozzle 220 using a sensor mounted to the nozzle; c) calculating a correction amount corresponding to the measured warp value; d) displaying the calculated value of the correction amount on a display device; And e) compensating for the bending of the nozzle by adjusting the widths of the plurality of gaps by the value of the correction amount using the plurality of gap adjusting members. Bent compensation method of the nozzle comprising a. The method of claim 11, Adjusting the width of the plurality of gaps in step e) rotates the plurality of nuts in a clockwise or counterclockwise direction so that the plurality of pairs of fixing bolts respectively move away from or close to each other in the plurality of nuts. Method for compensating the warp of the nozzle formed by applying a force.

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