KR100998763B1 - Probe card - Google Patents

Abstract

The present invention relates to a probe card that provides an electrical connection to an integrated circuit under test.

The probe card of the present invention comprises a probe in electrical contact with the integrated circuit; A main circuit board electrically connected to one side of the probe, the main circuit board including a region in which a plurality of electronic components are installed on the other side; A reinforcing member coupled to the other side of the main circuit board such that the main circuit board is not deformed; And a recess fixed to the reinforcing member, electrically connected to the main circuit board or the electronic component, and having a recess to avoid a region in which the plurality of electronic components are installed and formed adjacent to the region in which the plurality of electronic components are installed. And a circuit board.

Therefore, according to the present invention, the cable connecting means is formed adjacent to the main circuit board or the electronic component so as to correspond to the main circuit board or the electronic component, so that the cable can be connected to the shortest distance, and the sub circuit board can be formed in various forms. Therefore, a large number of electronic components can be efficiently arranged on the main circuit board, and there is an effect of providing excellent expandability and freedom of design.

Probe Card, Subcircuit Board

Description

Probe Card {PROBE CARD}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe card that provides an electrical connection to an integrated circuit to be inspected, and more particularly, by changing the shape of a sub PCB. The present invention relates to a probe card configured to achieve excellence in reliability and manufacturing cost.

In general, a process of manufacturing a semiconductor device, such as an integrated circuit, is composed of several steps. In the final step of assembling the semiconductor device, a plurality of devices manufactured to form individual integrated circuits (ICs) on a wafer are formed. Of the two semiconductor dies (ie, chips), only good dies excluding defective dies are selected and assembled.

Therefore, a probe (i.e. a probe) is contacted with each integrated circuit to electrically check its performance to determine whether the integrated circuits formed on the wafer are good or bad prior to assembly, and then automated probing. ) Use an inspection device (also called a prober).

The probing inspection apparatus generates a test signal and detects and analyzes a response signal received as a result of the tester, which is a kind of computer device for discriminating whether the integrated circuit is good, and between the tester and the integrated circuit which is the test object. It consists of a probe card (probe card) to be electrically connected in.

Hereinafter, for convenience of description, an integrated circuit to be inspected is referred to as a device under test (DUT).

6 is a cross-sectional view schematically showing the configuration of a conventional probe card.

The probe card includes a main PCB 200 and a lower portion of the main circuit board 200 having a plurality of connectors 230 to be electrically connected to the tester side and provided in a horizontal direction. It is provided with a plurality of coupled to the side and has a connection terminal on the DUT during the inspection, that is, the probe (100) in contact with the pad (pad), the main circuit board 200 to support the upper side and has an opening hole 310 penetrating up and down It is provided in the vertical direction in the opening hole 310 of the reinforcement plate 300 so as to be connected to the stiffener 300 and the main circuit board 200 side, and a plurality of relays 510 are mounted on the side surface. The main circuit board 200 and the main circuit board 200 and the relay circuit board 500 are connected to the relay circuit board 500, and the relay circuit board 500 is located on the upper side of the reinforcement plate 300 where the main circuit is not located. Sub-circuit board on which the controller 410 and various subcomponents (not shown) are mounted b PCB) 400.

Here, the main circuit board 200 is a circular flat plate having a rather large area, and is provided in the horizontal direction, and a plurality of connectors 230 such as ZIF (Zero Insertion Force) connectors are provided in the outer circumferential region on the upper surface thereof. The connector 230 is connected to and electrically connected to a connection cable (not shown) such as a flexible printed circuit (FPC) cable drawn out from the tester side.

A plurality of connection terminals (not shown) are formed on the lower surface of the main circuit board 200, and a plurality of connection connector portions 210 are provided on the upper surface of the main circuit board 200.

In addition, the main circuit board 200 has a signal wire (not shown) therein for electrically connecting the connection terminal, the connection connector 210, and the connector 230 provided therewith to each other. It is usually implemented as a multilayer wiring printed circuit board in which signal wiring layers are formed up and down therein.

The probe 100 is connected to the connection terminals formed on the lower surface of the main circuit board 200 and provided in the vertical direction, and contacts the connection terminals on the DUT during the inspection.

The probe 100 is provided to be fixed to the probe block 110, the probe block 110 is protruded from the reinforcing plate 300 to protrude through the through-hole 220 on the main circuit board 200 By being coupled to be supported by the 120, it is possible to block the change in position or height from the effects of high heat.

The reinforcement plate 300 is made of a metal material capable of suppressing heat deformation as much as possible. The reinforcement plate 300 is provided in a horizontal direction to closely support the main circuit board 200 from an upper side thereof, so that the main circuit board 200 is exposed to high heat during high temperature inspection. By suppressing the deformation of the main circuit board 200, the position and height of the probe 100 are changed according to the thermal deformation of the main circuit board 200, and the reliability of the electrical connection is prevented from being lowered.

The reinforcing plate 300 is provided with a plurality of opening holes 310 formed to be penetrated up and down by a predetermined area is deleted through several places.

The relay circuit board 500 includes a plurality of relay circuit boards 500 installed in the opening hole 310 of the reinforcing plate 300 in a vertical direction. The relay circuit board 500 includes a plurality of relays (ie, relays) through one side or both sides thereof. 510).

The relay 510 is a switching means provided for selectively isolating a test for a specific DUT in parallel inspection of a plurality of DUTs simultaneously. The relay 510 is turned on / off under the control of the main controller 410. / off) switching is activated.

The relay circuit board 500 has a connecting connector 520 at the lower end thereof, and the connecting connector 520 is connected to the connecting connector 210 on the upper surface of the main circuit board 200, and the upper end thereof. Another connection connector 530 is provided in the upper side connection connector 530 is electrically connected to the connection connector 430 and the connection cable 470 provided on the sub-circuit board 400. .

The relay circuit board 500 has signal wires (not shown) for electrically connecting the mounted relay 510, the lower end connection connector 520, and the upper end connection connector 530 to each other. In general, a multilayer wiring printed circuit board is implemented.

The sub-circuit board 400 is a circular flat plate having a relatively reduced area compared to the main circuit board 200. The sub-circuit board 400 is horizontally disposed on the upper side of the center of the reinforcement plate 300 where the relay circuit board 500 is not located. It is provided.

In summary, the sub-circuit board 400 is positioned at the center of the reinforcement plate 300, and the relay circuit boards 500 are located at the outer region.

The upper center portion of the sub-circuit board 400 extends a relatively small number of channels applied from the tester side to control operation of the relays 510 mounted on the relay circuit board 500. In addition to controlling operation of the relay 510, a main controller 410 is mounted that can be re-programmed to provide a routing change or the like for a circuit change in a DUT to be inspected.

Here, the main controller 410 is typically a field programmable gate array (FPGA), a programmable logic device (PLD), an application specific integrated circuit (ASIC), a sequencer, a microprocessor, a digital signal processor, or other reprogrammable controller. And so on.

In addition, on the upper surface of the sub-circuit board 400, various accessory components attached to the main controller 410 except for the relay 510 are mounted.

Furthermore, a plurality of connection connectors 430 are arranged on the upper surface of the sub circuit board 400, and the connection connector 430 is connected to the connection connector 530 formed at the upper end of the relay circuit board 500. It is electrically connected through the cable 470, while a plurality of connection connector 480 is formed on the lower surface of the sub-circuit board 400, the connection connector 480 is formed of the main circuit board 200 It is electrically connected through the connection connector 240 and the connection cable 540 formed on the upper surface.

In addition, the sub-circuit board 400 may include a signal wire (not shown) for selectively electrically connecting the mounted main controller 410, the accessory component, the connection connector 430, and the connection connector 480 to each other. It is provided inside and is usually implemented as a multilayer wiring printed circuit board.

However, the conventional probe card as described above has the following problems.

As the plurality of relay circuit boards 500 are positioned in the outer circumferential region on the reinforcement plate 300, the sub circuit board 400 positioned at the center portion is provided with a rather small area, and thus, on the sub circuit board 400 having a small area. There is a problem in that the main controller 410, various accessory components, and connection connectors 310 cannot be mounted in a sufficient number and / or efficient arrangement.

As a result, various kinds and a large number of objects are mounted on the sub-circuit board 400 having a small area, and the objects are mounted in a dense and disordered arrangement. The manufacturing of the sub-circuit board 400 to be implemented becomes very difficult, and the manufacturing cost is also greatly increased.

That is, the conventional probe card has a very poor problem in terms of design freedom, expandability and manufacturing cost.

On the other hand, the sub-circuit board 400 has not escaped from the circular shape as the main circuit board 200.

Accordingly, the distance between the sub-circuit board 400 and the relay circuit board 500 is somewhat longer, so that the connection length should be connected using a long connection cable 470, and thus the cable arrangement is not easy and the manufacturing cost is increased. There is also a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to form a subcircuit board on a main circuit board by avoiding the area of the electronic component provided on the main circuit board. Not only is it possible to mount a sufficient number, but also to provide a probe card which can arrange electronic components efficiently.

The above objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention by those skilled in the art.

Probe card of the present invention for achieving the above object, the probe is in electrical contact with the integrated circuit; A main circuit board having a probe electrically connected to the one side and including an area in which a plurality of electronic components are installed on the other side; A reinforcing member coupled to the other side of the main circuit board such that the main circuit board is not deformed; And a concave portion fixedly connected to the reinforcement member, electrically connected to the main circuit board or the electronic component, and avoiding a region in which the plurality of electronic components are installed, and formed adjacent to the region in which the plurality of electronic components are installed. And a circuit board.

Preferably, a main controller is mounted on the sub circuit board to control the electronic component, and a plurality of cable connecting means is formed to be connected to the main circuit board or the electronic component by a cable.

More preferably, the cable connection means is located adjacent to the edge of the sub circuit board so as to be the shortest distance when connecting the cable with the main circuit board or electronic components.

Also preferably, the cable connecting means is formed in the form of a socket or a connector.

Also preferably, the sub circuit board is mounted with one or more selected from the group of subcomponents consisting of a memory, a voltage regulator, a capacitor, a multiplexer, a resistor, and a jack.

Also preferably, the at least one substrate fixing end may be extended to be fixed on the reinforcing member, and a plurality of cable connecting means may be formed at the substrate fixing end.

Also preferably, the sub circuit board may have a circular or polygonal shape.

Also preferably, the reinforcing member has a rib formed radially so that one side of the main circuit board is fixed and supported evenly, and a circular rib is integrally formed to reinforce the radial rib stop portion, and the electronic component includes the main part. Opening portions are formed between the ribs so as to be exposed to the outside while being installed on the circuit board.

Also preferably, the electronic component may be a miniature circuit board on which a component for relay or interface is mounted, and the circuit board may be connected to a socket connection between a second connection portion formed at a lower end portion and a first connection portion formed at the main circuit board. The main circuit board is coupled to the main circuit board and installed vertically on the main circuit board.
Also preferably, the sub circuit board is located above the reinforcing member.

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According to the present invention, a sub-circuit board may be formed or positioned in a shape that avoids the area of the electronic component in a state in which a plurality of electronic components are installed or mounted on an appropriate and efficient position on the main circuit board. Accordingly, the probe card of the present invention can efficiently arrange electronic components corresponding to the probe formed on the probe card on the main circuit board having a limited area, and facilitate the arrangement of the corresponding electronic components even when the number of probes is increased. Can be extended, resulting in the freedom of electronic component placement design. Therefore, according to the probe card of the present invention, the effect of reducing the manufacturing cost of the sub-circuit board, which is usually implemented as a multilayer wiring printed circuit board, can also be achieved.

Also, in the related art, the main controller, the subcomponents, and the connection connector are concentrated in the limited sub circuit board area on the simple shape of the sub circuit board, so that the distance from the corresponding electronic components located on the main circuit board is far from the cable connection. In this case, the cable was concentrated on the connection connector, which made the operation difficult and the arrangement difficult. However, according to the probe card of the present invention, the shape of the sub-circuit board can be closely connected to the main controller, the accessory component, the connection connector, and the electronic component located on the main circuit board, so as to be connected to the connection connector (cable connecting means). Not only can the length of the cable be shortened, but also the arrangement of the main controller, the accessory component, the connection connector, and the like can be distributed, and the effect of facilitating the cable connection work can be achieved. In addition, the use of a short length of the connection cable can be achieved by reducing the consumption of the cable to reduce the manufacturing cost.

In addition, since the size of the sub-circuit board can be reduced, the thickness of the reinforcement plate can be made thicker for the portion where the sub-circuit board is not located, thereby preventing the thermal deformation of the main circuit board and ensuring reliability. Can be achieved.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a plan view of a probe card according to the present invention, FIG. 2 is a cross-sectional view taken along the line A-A of FIG. 1, and FIG. 3 is a plan view of the subcircuit board of FIG. 4 and 5 are front and rear perspective views of the probe card according to the preferred embodiment of the present invention.

1 and 2, FIG. 1 is a plan view of the perspective view illustrated in FIG. 4, and a reinforcing member 30 is formed on a circular main circuit board 20 in which a plurality of electronic components, that is, a relay circuit board 50 is installed. Is coupled, and the state in which the sub-circuit board 40 is coupled is shown. As shown in FIG. 5, the probe block 11 is arranged on the main circuit board 20 at predetermined intervals, and penetrates the main circuit board 20 so as to penetrate the reinforcement member. It is fixedly coupled to (30).

Hereinafter, the probe card of the present invention will be described in detail with reference to FIGS. 1 to 3, and the combining procedure and one embodiment of the probe card of the present invention will be described in detail with reference to FIGS. 2 to 5.

The probe 10 is configured to electrically contact the contact pad of the DUT in order to determine whether the probe is defective through an electrical performance test of an integrated circuit (hereinafter, referred to as a DUT) that is a test target, and the probe 10 is a probe block. Fixed to (11), the probe block 11 is fixedly coupled to the reinforcing member (30) coupled to the opposite side through the main circuit board (20). Here, the probe block 11 is formed of a bar-shaped block of a rectangular cross-section in order to increase the accuracy of the work and facilitate the installation during the installation of the probe 10, a plurality of probes (10) ) Is installed in one direction and arranged side by side on one side of the main circuit board (20). The probe 10 installed in the probe block 11 may be a needle (eg, a plate pin type probe) formed by a needle type or a lithography process. On the other hand, in the case of using a plate-shaped probe, it is also possible to install a method of inserting and fixing the probe after forming a slit (slit) groove in the side or the upper surface of the probe block (11).

The main circuit board 20 is a circuit board laminated with a plurality of layers, and a connection part is formed on one side so as to be electrically connected to each probe 10, and the other side outer peripheral part is a tester as a test equipment. The connector 23 for inputting and outputting a signal is formed, and the first connection portion 21 for installing a plurality of electronic components is formed in an area corresponding to the open portion 31 of the reinforcing member 30 on the other side. It is. The electronic component may be a relay 51 or an interface means as a means for electrically connecting the sub circuit board 40 and the main circuit board 20. In one embodiment of the present invention, at least one relay A small relay circuit board 50 on which 51 is mounted is used. Although the main circuit board 20 according to the present invention is formed in a circular shape for inspecting the DUT formed on the wafer, it is also possible to manufacture and carry out in various shapes according to the object to be inspected.

More specifically, the main circuit board 20 has a plurality of the relay circuit boards 50 on the center side of the reinforcing member 30 based on the ring-shaped ribs 34 formed to have a predetermined radius. It is provided vertically, and on the outer peripheral side, the connector 23 for electrically connecting with the cable drawn out from a tester side is aligned in the circumferential direction. The connector 23 may use a Zero Insertion Force (ZIF) connector or a Pogo-pin connector.

The reinforcing member 30 is coupled to the other side of the main circuit board 20 to fix the main circuit board 20 so as not to sag or be deformed by heat, and penetrates the main circuit board 20 to the opposite side. Directly coupled to the probe block 11 located in the serves to fix the position of the probe 10 even if the main circuit board 20 is deformed.

The reinforcement member 30 is a circular frame structure formed of a metal material, and the connector 23 and the relay circuit board 50 are installed when the reinforcement member 30 is coupled to the main circuit board 20. An opening 31 is formed through this area so that they are exposed to the outside in the state. The reinforcing member 30 has a ring shape so as to have a predetermined radius to reinforce the stop portion of the rib 32 and the rib 32 extending radially from the center so that one side of the main circuit board 20 is fixedly supported. Rib 34 formed in a circular shape is integrally formed, and an elliptic rib 35 is integrally formed in the center portion to support the subcircuit board 40 and reinforce the strength. Here, the radially extending ribs 32 do not deviate from the diameter of the main circuit board 20, and a part of the ribs 32 is formed with a fixing hole to be mounted and fixed to the tester (coupling end) 33). The coupling end 33 is formed in at least four directions in order to effectively fix the main circuit board 20. When the diameter of the main circuit board 20 is large, the coupling end 33 may be formed in 8 or 12 directions.

The sub circuit board 40 is positioned and fixed above the reinforcing member 30 and electrically connected to the main circuit board 20 and / or the relay circuit board 50. The sub-circuit board 40 has recesses 45 formed in at least one portion to avoid a region where the relay circuit board 50 is installed. As shown in FIG. 3, the sub-circuit board 40 according to the present invention is formed in a concave shape so as to avoid the relay circuit boards 50, and a portion of the rectangular-shaped board is shaped like an H. The substrate fixing end 44 for fixing the sub-circuit board 40 to the reinforcing member 30 is extended on both sides of the middle of the section 45. Here, the sub-circuit board 40 has a H-shape in which the quadrangle is deformed, but can be freely changed according to the arrangement form of the electronic components installed (mounted) on the main circuit board 20, and is circular or polygonal. It is also possible to form or to form a substrate in various forms based on it.

More specifically, a main controller 41 for controlling the relay 51 of the relay circuit board 50 is mounted at the center of the sub circuit board 40, and around the main controller 41. A plurality of accessory components 42 are mounted. A plurality of cable contact means 46 is formed in a region other than the region in which the main controller 41 and the accessory component 42 are mounted. The cable connecting means 46 is a means for connecting the main circuit board 20 and / or the relay circuit board 50 to the cable 47 in the form of a socket or a connector. In addition, the cable connecting means 46 may be formed on the substrate fixing end 44, and the sub-circuit board (the shortest distance from the connection part of the main circuit board 20 and / or the relay circuit board 50). Adjacent to the edge of 40).

Here, the main controller 41 is basically preferably an FPGA, a PLD, an ASIC, a sequencer, a microprocessor, a digital signal processor, or another reprogrammable controller. In addition, the accessory component 42 enables re-programming and routing changes to the main controller 41 and provides an auxiliary role necessary for executing control of the main controller 41. This includes regulators, capacitors, multiplexers, resistors, and jacks.

Next, an embodiment of the present invention will be described with reference to FIGS. 2 to 5.

On the other side of the main circuit board 20, a plurality of the relay circuit board 50 is installed vertically, for this purpose, the first connection portion 21 is formed at each predetermined position. The first connection portion 21 is preferably installed in a socket type so that the second connection portion 52 formed at the lower end of the relay circuit board 50 is connected securely, in this case, it is possible to quickly and conveniently work. Here, the relay 51 is pre-installed on the relay circuit board 50 installed on the main circuit board 20, and the connector 23 is provided on the outer peripheral portion of the other side of the main circuit board 20. It is installed.

On the other hand, it is also possible to replace the first connection portion 21 with a pad for a connector type or wire bonding.

After the relay circuit board 50 is installed on the main circuit board 20, the reinforcing member 30 is coupled to the relay circuit board 50, wherein an opening formed in the reinforcing member 30 is formed. Positioning and reinforcing the reinforcing member 30 so as to expose the area in which the relay circuit board 50 is installed through (31). When the reinforcing member 30 is coupled with the main circuit board 20, ribs 32 and coupling ends 33 extending in all directions of the reinforcing member 30, the inner circumference of the main circuit board 20, and The ribs 34 and 35 for reinforcing the center portion are fixed uniformly by screwing or the like.

The reinforcing member 30 is fixedly coupled to the other side of the relay circuit board 50 so that the main circuit board 20 is deformed by a pressure or a pressure applied by a prober (not shown). And it prevents the occurrence of thermal deformation due to temperature serves to prevent the position (X, Y coordinate) of the probe 10 is changed.

After the reinforcing member 30 is coupled, the sub-circuit board 40 is positioned on the reinforcing member 30 to be coupled. At this time, the sub-circuit board 40 is formed so as not to overlap with the relay circuit boards 50 arranged on the main circuit board 20, and is mounted on the reinforcing member 30 to avoid this area. do. According to FIG. 1, the sub circuit board 40 according to the present invention is fixed by a substrate fixing end 44 extending in both directions, and both sides of the sub circuit board 40 are supported by the ribs 32 and 35.

After fixing the sub circuit board 40, the sub circuit board 40 and the relay circuit board 50 are connected by a cable 47. A third connecting portion 53 is formed at an upper end of the relay circuit board 50, and the cable connecting means 46 is provided at the sub circuit board 40 so as to correspond thereto. A plurality of fourth connectors 43 are connected to the cable 47 connected to the third connectors 53 in a one-to-one manner. Here, the cable connecting means 46 is positioned so as to be adjacent to each connecting portion 53 of the relay circuit board 50 in order to connect the cable with the sub circuit board 40 as short as possible. It is provided in a phase. The cable connecting means 46 is preferably distributed in the edge portion of the sub circuit board 40.

On the other hand, the cross-sectional view taken along line AA of FIG. 2 is not a cut-away view of the diameter of the center portion of the probe card, so as shown in FIG. 6, the lower surface of the sub circuit board 40 and the upper surface of the main circuit board 20 are directly connected. Although the main cable is not shown, the lower surface of the sub circuit board 40 and the upper surface of the main circuit board 20 are also connected to the probe card according to the present invention.

A command signal transmitted to the sub circuit board 40 is applied to the cable (not shown) through the connector 23 in a specific region formed on the main circuit board 20, and the command signal is applied to the tester (not shown). It is a signal input from the main controller 41 of the sub-circuit board 40 to generate a control signal generated for the control of the relay 51 as a signal input from.

Although the cable 47 connected to the cable connecting means 46 of the sub circuit board 40 according to the present invention is described to be connected to the relay circuit board 50, the present invention is not limited thereto, and the cable connecting means 46 is not limited thereto. The cable 47 connected to the third cable 53 is connected to the third circuit part 53 of the relay circuit board 50 so that the cable 47 is electrically connected directly to an electronic component or a connection part installed on the main circuit board 20. It is also possible to communicate with the relay circuit board 50 through a signal wire (not shown) formed in the main circuit board 20 without being connected to the main circuit board 20.

When the sub-circuit board 40 is completed as described above, the other side, that is, the upper surface of the probe card is completed as shown in FIG. For easy recognition of the configuration of the probe card of the present invention, Figure 4 is a state in which the cable connecting means 46 of the relay circuit board 50 and the sub-circuit board 40 is not connected by a cable 47 Is shown. Because a plurality of cables 47 are connected to each other, the sub-circuit board 40 is covered by the cable 47 so that the sub-circuit board 40 is installed between the relay circuit boards 50. This is because it is difficult to check.

After the installation of the sub-circuit board 40 and the connection of the cable 47 are completed, as illustrated in FIGS. 2 and 5, the probe 10 is positioned on one side of the main circuit board 20. The probe block 10 of the probe block 10 is installed, but the main circuit board 20 and the probe 10 to be electrically connected. Here, the probe block 11 is not fixed to the main circuit board 20, but the probe block 11 is inserted through the through-hole 22 formed to extend in one direction on the main circuit board 20. It is fixedly coupled to the reinforcing member (30). In more detail, a spacer 12 is interposed on the insertion side of the probe block 11 to prevent the probe block 11 from contacting the main circuit board 20, and the probe block 11 is connected to the main block. Protrudes higher than one side of the circuit board 20 so that all the probe 10 is fixed to the reinforcing member 30 to maintain the same height, that is, planarity (planarity). To this end, the spacer 12 preferably has a width and a width smaller than that of the through hole 22, and the height is formed somewhat higher.

Here, the reason for fixing the probe block 11 by using the spacer 12 is that the probe block 11 is fixed to one side of the main circuit board 20 or of the main circuit board 20. When inserted and fixed in contact with the through hole 22, even when the main circuit board 20 is coupled to the reinforcing member 30, when a high temperature heat and a predetermined compressive force are applied in a tester (not shown) Due to the nature of the thermal deformation and deformation caused by the external force due to the temperature and pressure, the position of the probe 10 is slightly changed. Therefore, the probe block 11 is fixed to the reinforcing member 30 which does not come into contact with the main circuit board 20 while being hardly deformed due to thermal deformation due to temperature and external force (compression force) applied to the probe 10. It is desirable to make it.

In one embodiment of the present invention, the relay circuit board 50 and the reinforcing member 30 are installed on the other side of the main circuit board 20, and the sub on the reinforcing member 30 is provided. After completing the installation of the circuit board 40 and the connection of the cable 47, the probe block 11 is described as a method of coupling to be positioned on one side of the main circuit board 20, but is not limited thereto. After the reinforcing member 30 is coupled to the other side of the main circuit board 20, the probe block 11 is fixedly coupled to the main circuit board 20, and then the relay circuit board is formed on the other side of the main circuit board 20. After the 50 is installed, the probe card may be coupled to the reinforcing member 30 in the order of installing the sub-circuit board 40 and connecting the cable 47.

Although not described in the exemplary embodiment of the present invention, the sub-circuit board 40 is fixed on the reinforcing member 30 and the cable 47 is connected to the ring of the reinforcing member 30. Protecting the relay circuit board 50 and the sub-circuit board 40 from the outside by combining a separate cover plate on the rib 34 formed in a shape (circular shape) or the rib 32 formed in a radial shape. It is possible to do so. In this case, the cover plate should be manufactured within the radius of the rib 34 so that the connector 23 formed on the outer peripheral portion of the other side of the main circuit board 20 is not covered.

As described above, when the coupling of the probe card according to the present invention is completed, the probe card is electrically contacted with the pad of the integrated circuit (DUT) to perform an electrical performance test to check whether there is a defect.

To this end, the probe card is seated on a tester (not shown) and the connector 23 of the main circuit board 20 is connected to a connection means (not shown) of the tester (not shown). When the DUT approaches and contacts the probe 10 of the probe card for inspection, an inspection input signal for electrical performance inspection is applied through the connector 23 to detect the main circuit board 20. It is transmitted to the probe 10 via a signal wire (not shown) formed therein. In addition, an input signal for relay transmitted to the probe 10 through the relay 51 is also applied to the connector 23, which is a signal wire (not shown) formed inside the main circuit board 20. And the relay 51 are connected to the relay 21 through the relay circuit board 50, and the relay 51 is connected by the control signal of the relay generated by the main controller 41. The probe 10 is transmitted to the probe 10 through a signal wire formed in the main circuit board 20.

Meanwhile, a signal for a controller for generating a control signal of the relay 51 from the main controller 41 is applied to the connector 23 in a specific region except for the connector 23, which is the main circuit board. It is transmitted to the main controller 41 through a signal wire (not shown) formed inside the 20 and a cable (not shown) connected to the sub circuit board 40. In the main controller 41, a signal for controlling the on / off operation of the relay 51 is generated and transmitted to the relay 51 of the relay circuit board 50 through the cable 47. Here, the main controller 41 is mounted on the sub-circuit board 40 to enable re-programming and routing changes for the main controller 41 and to provide an auxiliary role necessary for executing control. In conjunction with the components 42, the overall inspection process through the relay circuit board 50 is controlled.

According to the present invention, a plurality of the relay circuit boards 50 may be optimally disposed on the main circuit board 20 by utilizing the openings 31 formed in the reinforcing member 30 to the maximum. The sub-circuit board 40 is formed so as to avoid this portion in the state where the circuit board 50 is disposed, and the connecting portion 53 of the relay circuit board 50 and the connecting portion 43 of the sub-circuit board 40 are provided. ) Adjacent to each other can be connected using a short cable when each of the connecting parts (43, 53) are connected by a cable (47).

In addition, since the shape of the sub-circuit board 40 can be molded into various shapes to avoid the pre-installed relay circuit board 50, it is easy to expand the board, and the concave or convex portion of the sub-circuit board 40 is formed. The cable connecting means 46 and the accessory component 42 can be positioned with respect to all portions of the part and the substrate fixing end 44 of the subcircuit board 40 so as to be mounted on the subcircuit board 40. Efficient placement of multiple entities is possible. As a result, the design and manufacture of a sub-circuit board, which is usually implemented as a multilayer wiring printed circuit board, can be facilitated.

Furthermore, since the area of the center portion of the sub circuit board 40 may be reduced, the thickness of the steel member 30 may be further thickened with respect to the center portion, whereby the main circuit board 20 may be affected by heat or external force. The deformation can be completely prevented.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications can be made within the scope of the technical idea of the present invention, and it is obvious that the present invention belongs to the appended claims. Do.

1 is a plan view of a probe card according to the present invention;

2 is a cross-sectional view taken along the line A-A of FIG.

3 is a plan view of the sub-circuit board of FIG. 1;

4 is a front perspective view of a probe card according to a preferred embodiment of the present invention;

5 is a rear perspective view of a probe card according to a preferred embodiment of the present invention;

6 is a cross-sectional view showing a conventional probe card.

<Description of the symbols for the main parts of the drawings>

10: probe 20: main circuit board

30: reinforcing member 31: opening

32, 34, 35: rib 40: sub circuit board

41: main controller 42: accessories

44: substrate fixing end 45: recess

46: cable connection means 47: cable

50: relay circuit board 51: relay

Claims (11)

A probe in electrical contact with the integrated circuit; A main circuit board electrically connected to one side of the probe, the main circuit board including a region in which a plurality of electronic components are installed on the other side; A reinforcing member coupled to the other side of the main circuit board such that the main circuit board is not deformed; And A sub-circuit connected and fixed to the reinforcement member, electrically connected to the main circuit board or the electronic component, and including a concave portion which avoids the region in which the plurality of electronic components are installed, and formed adjacent to the region in which the plurality of electronic components are installed. Board; Probe card comprising a. The method of claim 1, And the main controller for controlling the electronic component is mounted on the sub circuit board, and a plurality of cable connecting means is formed to be connected to the main circuit board or the electronic component by a cable. The method of claim 2, And the cable connecting means is positioned adjacent to an edge of the sub circuit board so as to be the shortest distance when the cable is connected to the main circuit board or the electronic component. The method of claim 2, The cable connecting means is the probe card, characterized in that formed in the form of a socket or connector. The method of claim 2, And at least one selected from the group of subcomponents consisting of a memory, a voltage regulator, a capacitor, a multiplexer, a resistor, and a jack. The method of claim 2, The sub-circuit board has at least one substrate fixing end extending to be fixed on the reinforcing member, and the substrate fixing end has a plurality of cable connecting means formed therein. The method of claim 1, The sub-circuit board may have a circular or polygonal shape. The method of claim 1, The reinforcing member has radial ribs formed so that one side of the main circuit board is fixed and supported evenly, and circular ribs are integrally formed to reinforce the radial rib stop portion, and the electronic component is installed on the main circuit board. The probe card, characterized in that the opening is formed between the rib so as to be exposed to the outside. The method of claim 1, The electronic component is a miniature circuit board mounted with a component for relay or interface, The circuit board is coupled to the main circuit board by a socket connection between the second connection portion formed in the lower end and the first connection portion formed in the main circuit board, the probe card, characterized in that installed on the main circuit board vertically . delete The method of claim 1, And the sub circuit board is positioned above the reinforcing member.

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