KR100981321B1 - A gas sensor and method for manufacturing thereof - Google Patents

A gas sensor and method for manufacturing thereof Download PDF

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Publication number
KR100981321B1
KR100981321B1 KR1020100031643A KR20100031643A KR100981321B1 KR 100981321 B1 KR100981321 B1 KR 100981321B1 KR 1020100031643 A KR1020100031643 A KR 1020100031643A KR 20100031643 A KR20100031643 A KR 20100031643A KR 100981321 B1 KR100981321 B1 KR 100981321B1
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South Korea
Prior art keywords
electrode
terminal
electrolyte tube
display unit
gas sensor
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Application number
KR1020100031643A
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Korean (ko)
Inventor
양철남
이창래
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한국기계연구원
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/404Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors
    • G01N27/4045Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors for gases other than oxygen
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073Composition or fabrication of the solid electrolyte
    • G01N27/4074Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • G01N27/417Systems using cells, i.e. more than one cell and probes with solid electrolytes

Abstract

PURPOSE: A manufacturing process whose manufacturing processes are simple, and a manufacturing method thereof are provided to simultaneously form an inner electrode and an outer electrode. CONSTITUTION: A manufacturing process comprises an electrolyte pipe, an electrode(140), a terminal(160), a display unit(180) and a switch. The electrolyte pipe is included of the reported material and is formed into the tubular that center. The electrode comprises an exterior electrode(144) and an inner surface electrode(142). The exterior electrode is included in the exterior of the electrolyte pipe. The inner surface electrode is separated from the exterior electrode by the electrolyte pipe. The terminal is connected to electrode. The display unit displays the chemical reaction of the electrolyte pipe and the specific component included in gas.

Description

Gas sensor and method for manufacturing thereof

The present invention relates to a gas sensor and a method of manufacturing the same for detecting the presence / absence and content of specific components included in the gas by an electrochemical method.

While there are some indispensable gases such as oxygen, there are many kinds of dangerous gases. In recent years, gas accidents at homes, businesses, and construction sites, explosion accidents in coal mines, chemical plants, etc. This is following.

Human sensory organs are unable to quantify the concentration of various dangerous gases that have no color or smell and hardly determine the type. For this reason, gas sensors using physical and chemical properties of materials have been developed and used for gas leak detection, concentration measurement records, and alarms.

A gas sensor is a medium that converts physical and chemical properties of gas into signals that are easy to process, such as electrical signals, optical signals, or magnetic signals.

Gas sensors have been used mainly for disaster prevention until now, so to speak, passive has been the center.

Recently, however, there has been a movement to actively use a gas sensor as a detection element of an automatic control system.

In addition, the development of the industry today has increased the chance of encountering flammable and toxic dangerous gases in industrial sites and home environments, and it is important to detect the occurrence of dangerous gases at an early stage and take prompt and accurate responses to accidents. Market demand is expanding in a very wide range, including disaster prevention, disaster prevention, medical, and pollution prevention.

Hereinafter, a configuration of an electrochemical gas sensor will be described with reference to FIG. 1.

As shown in the drawing, the electrochemical gas sensor 1 according to the related art reacts with a porous membrane 11 through which gas introduced and diffused through a gas inlet selectively passes therethrough, and reacts with a gas penetrating through the porous membrane 11. The reaction electrode 12 and the counter electrode 15 forming electrons, the separator 13 separating the reaction electrode 12 and the counter electrode 15, the counter electrode 15 and the porous membrane 11. Located in between, it comprises a liquid electrolyte for moving ions.

However, the gas sensor configured as described above has the following problems.

In other words, the manufacturing process is complicated because the manufacturing process is complicated by stacking a plurality of components composed of various materials, resulting in a decrease in price competitiveness due to an increase in manufacturing cost.

SUMMARY OF THE INVENTION An object of the present invention is to solve a conventional problem, and more specifically, to form an electrode layer on an inner / outer surface of an electrolyte tube, and to provide a terminal on the electrode layer so that a specific component oil in the gas penetrates inside the electrolyte tube. The present invention provides a gas sensor and a method of manufacturing the same that enable detection of nothing and quantity.

Gas sensor according to the present invention for achieving the above object, the electrolyte tube made of an electrolyte material, the center is formed in a perforated tube shape to form a passage through which the gas flows, and the inner and outer surfaces of the electrolyte tube And a display unit configured to display an electrode provided at the electrode, a terminal connected to the electrode, and a chemical reaction between the specific component included in the gas and the electrolyte tube.

One side of the terminal is characterized in that a switch for selectively connecting the display unit and the terminal is provided.

The electrode includes an outer surface electrode provided on the outer surface of the electrolyte tube and an inner surface electrode provided on the inner surface of the electrolyte tube, wherein the outer electrode and the inner surface electrode are spaced apart by the electrolyte tube.

The terminal may include an inner terminal and an outer terminal selectively connected to any one of the outer electrode and the inner electrode.

The switch is provided on any one of the inner terminal and the outer terminal, and the other is provided with a discharge terminal for selectively contacting when the connection of the display unit and the terminal is off (off).

The electrolyte tube is characterized in that Nafion (Nafion) is applied.

The electrolyte tube is characterized in that the electrolyte is impregnated in the porous tube formed of an insulating material.

A gas sensor manufacturing method according to the present invention includes a material preparation step of preparing a tubular electrolyte tube made of an electrolyte material, a conductive terminal and a display unit, and an electrode including platinum (Pt) on the inner and outer surfaces of the electrolyte tube. An electrode forming step of forming a, a terminal connecting step for connecting the electrode and the terminal, and a display unit coupling step for connecting the display unit on one side of the terminal.

The electrode forming step may include a masking process of waterproofing both ends of the electrolyte tube by using a masking member, a coating process of simultaneously applying a solution containing platinum (Pt) to the inside and the outside of the electrolyte tube, and the solution. Drying to form an electrode containing a platinum (Pt) and characterized in that consisting of a removal process of removing the masking member.

The electrode forming step is characterized in that the inner electrode or outer surface electrode is formed on the inner surface and the outer surface of the electrolyte tube.

Before the display unit coupling step, a switch installation step of installing a switch for selectively connecting the display unit and the terminal is selectively performed.

According to the present invention configured as described above, since the inner electrode and the outer electrode are formed at the same time only by the process of drying the electrolyte tube in the solution and then drying, it is possible to manufacture in a simple manufacturing process, can reduce the manufacturing cost and productivity There is an advantage that can be significantly improved.

In addition, in the present invention, the inner surface and outer surface of the electrolyte tube is configured to be selectively provided.

Therefore, since the size of the gas sensor can be reduced by reducing the thickness of the outer electrode and the outer electrode, there is an advantage that the weight and size can be reduced.

1 is a longitudinal cross-sectional view showing the configuration of an electrochemical gas sensor according to the prior art.
2 is a use state diagram of a gas sensor employing a preferred embodiment of the present invention.
Figure 3 is a perspective view showing the external configuration of the gas sensor according to the present invention.
Figure 4 is a state diagram of use of the gas sensor employing a preferred embodiment of the present invention.
5 is a process flowchart showing a method of manufacturing a gas sensor according to the present invention.
Figure 6 is a process flow chart showing in detail the electrode forming step of one step of the manufacturing method of the gas sensor according to the present invention.
7 is a discharge state diagram of a gas sensor employing a preferred embodiment of the present invention.
8 is a cross-sectional view showing the state of the electrolyte tube during the masking process in the manufacturing method of the gas sensor according to the present invention.

Hereinafter, a configuration of a preferred embodiment of a gas sensor according to the present invention will be described with reference to FIGS. 2 and 3.

2 is a state diagram of a gas sensor employing a preferred embodiment of the present invention, Figure 3 is a perspective view showing the appearance configuration of the gas sensor according to the present invention.

As shown in these figures, the gas sensor 100 detects the presence / absence of a specific component contained in the gas by an electrochemical method using a metal catalyst, and together with the specific component and the voltage excited at both ends during the oxidation / reduction reaction. It is configured to measure the amount of a specific component proportionally.

To this end, the gas sensor 100 is made of an electrolyte material, and formed in the shape of a perforated tube, the electrolyte tube 120 forming a passage through which gas is introduced, and the inner and outer surfaces of the electrolyte tube 120. It includes an electrode 140, a terminal 160 connected to the electrode 140, and a display unit 180 for displaying whether or not a chemical reaction between the specific component contained in the gas and the electrolyte tube 120. .

In addition, "G" in FIG. 2 denotes a gas supply device for supplying gas to the gas sensor 100, and a container containing water mixed with alcohol for the experiment and artificially injecting gas from the container. A number of tubes are shown for forcing inwards.

The electrolyte tube 120 is configured to allow the ions generated by the reaction with a specific component (eg, hydrogen included in the alcohol) included in the gas to move outward. In the present invention, Nafion is applied. It became.

In addition, the electrolyte tube 120 has a tubular shape in which the inside is perforated in the longitudinal direction, and the gas is configured to be introduced only in the inner direction of the electrolyte tube 120.

Therefore, a specific component (H 2 ) in the gas introduced into the electrolyte tube 120 reacts with the electrode 140 provided on the inner surface of the electrolyte tube 120 to generate ions (2H + ) and electrons (2e ). Will form.

In addition, the electrolyte tube 120 transfers the ions (2H + ) generated in the internal electrode reaction to the outside direction to transfer to the electrode 140 formed on the outer surface of the electrolyte tube 120, the electrode provided on the outside ( In 140, the transferred ions and oxygen in the air meet to generate a reduction reaction to generate a voltage.

To this end, the inner surface and the outer surface of the electrolyte tube 120 is provided with an inner surface electrode 142 and the outer surface electrode 144, respectively, as shown in FIG.

The inner surface electrode 142 and the outer surface electrode 144 are formed to include platinum (Pt), is configured to perform a catalytic role for the specific component, it is possible to change and apply to a variety of materials.

In addition, the inner surface electrode 142 and the outer surface electrode 144 are separated from each other by being positioned inside / outside with respect to the electrolyte tube 120. That is, it is configured so as not to be electrically separated from each other.

This is to prevent the potential difference between the inner surface electrode 142 and the outer surface electrode 144 from becoming “0”.

Meanwhile, as illustrated in FIG. 4, terminals 160 are respectively connected to the inner surface electrode 142 and the outer surface electrode 144. The terminal 160 includes an inner terminal 162 connected to the inner surface electrode 142 and an outer terminal 164 connected to the outer surface electrode 144, and the inner terminal 162 and the outer terminal 164. The ends of are respectively connected to the display unit 180 to provide power.

Therefore, the inner terminal 162 and the outer terminal 164 is preferably formed of a conductive material.

The switch 190 is provided at any one of the inner terminal 162 and the outer terminal 164. The switch is configured to allow the electrode 140 and the display unit 180 to be selectively connected. In the embodiment of the present invention, the switch is configured on one side of the inner terminal 162.

In addition, the discharge terminal 166 is provided at the outer terminal 164 not provided with the switch. The discharge terminal 166 is configured to be selectively connected to the switch when the inner terminal 162 and the display unit 180 are short-circuited by the switch, and is connected to one side of the outer terminal 164.

That is, the inner terminal 162 may be connected to the display unit 180 as shown in FIG. 4 by the action of the switch. As shown in FIG. 7, the inner terminal 162 and the display unit are in contact with the switch and the discharge terminal 166. The connection of 180 may be disconnected.

This is to keep the voltage constant by discharging when the inner terminal 162 and the outer terminal 164 are not connected to each other and measured.

The display unit 180 is configured to detect and display when a specific component is included in the gas introduced into the electrolyte tube 120, and can be variously applied.

That is, the display unit 180 displays the presence / absence of a specific component with light using a light emitter, or is provided with light emitters of various colors having different operating voltages to selectively emit light according to the amount of the specific component. Can also be displayed.

In addition, the display unit 180 may be represented by a numerical value, it is obvious that it may be configured to be confirmed by a sound by applying a buzzer or the like.

Hereinafter, a method of manufacturing the gas sensor 100 according to the present invention will be described with reference to FIGS. 4 to 7.

4 is a state diagram of use of the gas sensor 100 employing a preferred embodiment of the present invention, Figure 5 is a process flow chart showing a manufacturing method of the gas sensor 100 according to the present invention.

And, Figure 6 is a process flow chart showing in detail the electrode forming step of one step of the manufacturing method of the gas sensor 100 according to the present invention, Figure 7 is a discharge of the gas sensor 100 employing a preferred embodiment of the present invention State diagram.

First, the process for manufacturing the gas sensor 100, a material preparation step (S100) for preparing a tubular electrolyte tube 120 made of an electrolyte material, the conductive terminal 160 and the display unit 180, An electrode forming step (S200) of forming an electrode 140 including platinum (Pt) on the inner surface and the outer surface of the electrolyte tube 120, and a terminal connecting step of connecting the electrode 140 and the terminal 160 ( S300 and the display unit coupling step (S400) for connecting the display unit 180 on one side of the terminal 160.

In the material preparation step (S100), the electrolyte tube 120 of the embodiment of the present invention adopts a Nafion having a center perforated in the longitudinal direction, and the display unit 180 is a voltage meter.

Thereafter, an electrode forming step S200 of forming one of an inner surface electrode 142 and an outer surface electrode 144 on the inner surface and the outer surface of the electrolyte tube 120 is performed.

The electrode forming step (S200) is a step to simplify the manufacturing process by simultaneously forming the inner surface electrode 142 and the outer surface electrode 144.

Looking in more detail, the electrode forming step (S200), a masking process (S220) to mask both ends of the electrolyte tube 120 by using a masking member (reference numeral 200 of FIG. 8) and the electrolyte A coating process (S240) for simultaneously applying a solution containing platinum (Pt) to the inner and outer surfaces of the tube 120, and a drying process of drying the solution to form an electrode 140 containing platinum (Pt) ( S260 and, the removal process (S280) for removing the masking member 200.

The masking member 200 is configured such that the solution containing platinum is not applied to the entire outer surface of the electrolyte tube 120 during the coating process (S240), but only the portions except both ends thereof.

That is, when the electrolyte tube 120 is supported in a solution without the masking member 200, the solution is applied to all of the outer surface, both end surfaces, and the inner surface of the electrolyte tube 120, and thus, the inner electrode 142. This is because the external electrode 144 and the outer surface electrode 144 are in electrical contact with each other so that the entire position does not occur.

Therefore, the masking member 200 may be provided to cover the inner surface and the outer surface at the same time at both ends of the electrolyte tube 120 at the same time as shown in FIG. 8, and various modifications may be applied.

The drying process (S260) is a process of drying the solution applied to the remaining portions except for both ends of the electrolyte tube 120, is completed by maintaining for a predetermined time at room temperature, the inner surface electrode 142 by the drying process (S260) ) And the outer surface electrode 144 may be formed to be spaced apart from the electrolyte tube 120.

After the drying process (S260), a removal process (S280) is carried out. The removal process (S280) is a process of removing the masking member 200, it can be carried out in a variety of ways depending on how the masking member 200 is applied, in the embodiment of the present invention both sides from the electrolyte tube 120 Complete by separating in the direction.

On the other hand, when the electrode forming step (S200) consisting of the above process is completed, the inner surface electrode 142 and the outer surface electrode 144 is formed on the inner surface and the outer surface of the electrolyte tube 120 spaced from each other, after The terminal connection step (S300) is carried out.

The terminal connection step (S300) is a process of connecting the terminal 160 formed of a conductive material to the inner electrode 142 and the outer electrode 144, respectively, of the inner electrode 142 and outer electrode 144 Preferably, the ends are configured not to connect with each other.

The inner surface electrode 142 and the outer surface electrode 144 are combined with the display unit 180 through the display unit coupling step S400.

As described above, the inner electrode 142 may be connected to the display unit 180 or the discharge terminal 166 as shown in FIGS. 4 and 7.

Therefore, before the display unit coupling step S400, a switch installation step S350 is provided to selectively connect the inner terminal 162 and the display unit 180 to include a switch.

In addition, it is preferable that one side of the outer terminal 164 is provided with a discharge terminal 166 during the switch installation step (S350), and the end of the discharge terminal 166 is connected to the switch and the display unit 180. It is configured to be connected when shorted.

Hereinafter, the operation of the gas sensor 100 according to the present invention will be described with reference to the accompanying drinking situation as an example with reference to FIGS. 4 and 7.

First, the intermittent subject introduces exhalation in the direction of the arrow in the state as shown in FIG. 4, that is, the switch connects the inner terminal 162 and the display unit 180.

At this time, when alcohol is not included in the blood, the inner electrode 142 does not generate a chemical reaction because almost no specific component (for example, alcohol contained in the exhalation or hydrogen gas in the atmosphere) in the exhalation, Therefore, the display unit 180 does not display any display.

On the other hand, if the intermittent subject who ingested alcohol in the state as shown in FIG. 4 causes the exhalation to flow into the inner right direction of the electrolyte tube 120, the exhalation includes ethanol, and the ethanol contained in the respiration is the inner electrode 162. And the oxidation reaction as follows.

C 2 H 5 OH -> CH 3 CHO + 2H + + 2e -

Along with this, the outer electrode 164 causes a reduction reaction as follows.

1 / 2O 2 + 2H + + 2e - -> H 2 O

In this case, a potential difference is generated between the inner electrode 142 and the outer surface electrode 144 by the inner / outer oxidation / reduction reactions. As a result, the inner terminal 162 and the outer terminal 164 are disposed on the display unit 180. Power is applied to the display through warning sound, light emission, etc.

In addition, in order to control the drinking of other enforcement subjects, the switch must be operated as shown in FIG. 7.

That is, since alcohol is detected in the exhalation of the intermittent subject, the alcohol adsorbed inside the electrolyte tube 120 reacts for a long time, so that the intermittent operates the switch so that the inner electrode 142 and the outer electrode 144 operate. It is discharged by being connected. That is, the alcohol remaining in the electrolyte tube 120 is exhausted in a short time.

Therefore, according to the above process, the gas sensor 100 can quickly perform the drunk enforcement of the other enforcement subjects.

The scope of the present invention is not limited to the above-exemplified embodiments, and many other modifications based on the present invention may be made by those skilled in the art within the above technical scope.

That is, in the embodiment of the present invention, the Nafion (electrolyte) is applied to the Nafion (Nafion), but the inside has a tubular shape, the inner surface and the outer surface of the inner electrode and the outer electrode can be formed at the same time, the movement of ions Of course, various modifications can be made within the range possible.

For example, the electrolyte tube is configured to form a tubular shape with an insulating material such as teflon or polypropylene, and at this time, to have a porosity so as to impregnate the electrolyte (H 2 SO 4 ) to perform the same role as the embodiment of the present invention. You could do it.

100. Gas sensor 120. Electrolyte tube
140. Electrode 142. Internal electrode
144.External electrode 160.Terminal
162. Inner terminal 164. Outer terminal
166. Discharge terminal 180. Display
200. Masking member G. Gas supply
S100. Material preparation step S200. Electrode Formation Step
S220. Masking process S240. Coating process
S260. Drying process S280. Removal process
S300. Terminal connection step S350. Switch installation step
S400. Display part combining step

Claims (11)

delete delete An electrolyte tube made of an electrolyte material and formed in a tubular shape having a center perforated to form a passage through which gas is introduced;
An electrode including an outer surface electrode provided on an outer surface of the electrolyte tube and an inner surface electrode provided on an inner surface of the electrolyte tube and spaced apart from the outer surface electrode by an electrolyte tube;
A terminal connected to the electrode;
A display unit displaying whether or not a chemical reaction between a specific component included in the gas and the electrolyte tube is performed;
Gas sensor, characterized in that it comprises a switch for selectively connecting the display unit and the terminal on one side of the terminal.
The gas sensor according to claim 3, wherein the terminal comprises an inner terminal and an outer terminal selectively connected to any one of the outer electrode and the inner electrode. The method of claim 4, wherein the switch is provided on any one of the inner terminal and the outer terminal, the other is provided with a discharge terminal for selectively contacting when the connection of the display unit and the terminal (off) off (off) Gas sensor. The gas sensor according to claim 5, wherein Nafion is applied to the electrolyte tube. The gas sensor according to claim 5, wherein the electrolyte tube is formed by impregnating an electrolyte in a porous tube formed of an insulating material. A material preparation step of preparing a tube-shaped electrolyte tube made of an electrolyte material, a conductive terminal and a display portion;
An electrode forming step of forming an electrode including platinum (Pt) on an inner surface and an outer surface of the electrolyte tube;
A terminal connecting step of connecting the electrode and the terminal;
Method of manufacturing a gas sensor comprising a display unit coupling step of connecting the display unit on one side of the terminal.
The method of claim 8, wherein the electrode forming step,
A masking process for waterproofing by masking both ends of the electrolyte tube by using a masking member;
A coating process of simultaneously applying a solution containing platinum (Pt) to the inside and the outside of the electrolyte tube;
Drying the solution to form an electrode including platinum (Pt);
Method for producing a gas sensor, characterized in that consisting of a removal process for removing the masking member.
10. The method of claim 9, wherein the electrode forming step is a process for forming an inner surface electrode or an outer surface electrode on the inner surface and the outer surface of the electrolyte tube at the same time. The method of claim 10, wherein before the display unit combining step,
And a switch mounting step of installing a switch for selectively connecting the display unit and the terminal.

KR1020100031643A 2010-04-07 2010-04-07 A gas sensor and method for manufacturing thereof KR100981321B1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR870000260B1 (en) * 1981-09-25 1987-02-21 사바 쇼오이찌 Detecting element for gas leak
JPH10239274A (en) * 1997-02-21 1998-09-11 Chikyu Kankyo Sangyo Gijutsu Kenkyu Kiko Gas sensor
KR100948893B1 (en) 2006-12-04 2010-03-24 한국전자통신연구원 Electrochemical Gas Sensor Chip and Method for Preparing the Same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR870000260B1 (en) * 1981-09-25 1987-02-21 사바 쇼오이찌 Detecting element for gas leak
JPH10239274A (en) * 1997-02-21 1998-09-11 Chikyu Kankyo Sangyo Gijutsu Kenkyu Kiko Gas sensor
KR100948893B1 (en) 2006-12-04 2010-03-24 한국전자통신연구원 Electrochemical Gas Sensor Chip and Method for Preparing the Same

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