KR100942241B1 - Shape examination metho for the glass panel having an incline - Google Patents

Shape examination metho for the glass panel having an incline Download PDF

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KR100942241B1
KR100942241B1 KR1020080032781A KR20080032781A KR100942241B1 KR 100942241 B1 KR100942241 B1 KR 100942241B1 KR 1020080032781 A KR1020080032781 A KR 1020080032781A KR 20080032781 A KR20080032781 A KR 20080032781A KR 100942241 B1 KR100942241 B1 KR 100942241B1
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plate glass
spot
reflected light
separation distance
glass
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KR1020080032781A
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Korean (ko)
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KR20090107331A (en
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이응석
이민기
박재범
이종근
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충북대학교 산학협력단
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Abstract

본 발명은 경사면을 갖는 판유리의 형상검사방법에 관한 것으로, 좀더 상세하게는 일면에 경사면을 갖도록 생산되는 판유리의 쐐기각을 비접촉방식으로 확인하여 판유리의 상태를 검사하고 불량 여부를 효율적으로 확인할 수 있도록 하는 것으로, 레이저광출력기(10)를 매개로 입사광(L1)을 일정 각도(θ1)만큼 경사지게 판유리(G)에 조사하여, 제1반사광(L2)에 의한 제3스폿(S3)과 제2반사광(L3')에 의한 제4스폿(S4')이 스크린(60)에 형성되도록 하는 제1단계;

Figure 112008025379121-pat00001
의 수학식을 이용해 유리(G)의 상면(G1)과 하면(G2)이 평행한 상태에서 서로 평행하게 반사하는 제2반사광과 제3반사광의 이격거리(D)를 산출하는 제2단계; 및
Figure 112008025379121-pat00002
의 수학식에서 제2단계에서 산출된 이격거리(D)를 삽입하여 쐐기각 'α'를 산출하는 제3단계를 포함하는 것이다.The present invention relates to a shape inspection method of a plate glass having an inclined surface, and more specifically, to check the wedge angle of the plate glass produced to have an inclined surface on one surface in a non-contact manner to inspect the state of the plate glass and to efficiently check whether there is a defect Thus, the incident light L1 is inclined by the predetermined angle θ1 to the plate glass G via the laser light output device 10, and the third spot S3 and the second reflected light by the first reflected light L2 are irradiated. A first step of forming a fourth spot S4 'by L3' on the screen 60;
Figure 112008025379121-pat00001
A second step of calculating a separation distance D between the second reflected light and the third reflected light reflecting in parallel with each other in a state where the upper surface G1 and the lower surface G2 of the glass G are in parallel with each other; And
Figure 112008025379121-pat00002
It includes a third step of calculating the wedge angle 'α' by inserting the separation distance (D) calculated in the second step in the equation.

Description

경사면을 갖는 판유리의 형상검사방법{Shape examination metho for the glass panel having an incline}Shape examination metho for the glass panel having an incline

본 발명은 경사면을 갖는 판유리의 형상검사방법에 관한 것으로, 좀더 상세하게는 일면에 경사면을 갖도록 생산되는 판유리의 쐐기각을 비접촉방식으로 확인하여 판유리의 상태를 검사하고 불량 여부를 효율적으로 확인할 수 있도록 하는 것이다.The present invention relates to a shape inspection method of a plate glass having an inclined surface, and more specifically, to check the wedge angle of the plate glass produced to have an inclined surface on one surface in a non-contact manner to inspect the state of the plate glass and to efficiently check whether there is a defect It is.

연속적으로 압출성형되어 대량으로 제작되는 판유리의 두께 및 형상에 대한 품질검사는 생산효율을 고려해 신속히 이루어져야 한다.Quality inspection of the thickness and shape of the plate glass, which is continuously extruded and produced in large quantities, should be made quickly in consideration of production efficiency.

이를 위한 품질검사 방식은 판유리와의 접촉 방식과 비접촉 방식으로 대별된다. 여기서 접촉방식은 측정기구를 이용해 판유리의 두께와 형상을 확인하는 것으로서, 대표적인 측정기구로는 마이크로미터를 예로 들 수 있다. 하지만, 마이크로미터와 같은 측정기구는 마이크로미터가 갖는 구조적 한계로 인해 판유리의 테두리 두께만을 측정할 수 있을 뿐이므로, 비교적 넓은 면적을 갖도록 제작되는 판유리의 중심부분은 마이크로미터를 이용한 두께 측정이 사실상 불가능하다. 또한, 상기 마이크로미터를 이용한 판유리의 두께 측정은 접촉방식이므로, 정밀하게 폴리 싱(Polishing)된 유리 표면이 마이크로미터와의 접촉에 의해 오염 또는 손상되는 문제가 발생한다.Quality inspection methods for this purpose are roughly classified into a contact method and a non-contact method with plate glass. Here, the contact method is to check the thickness and shape of the plate glass using a measuring instrument, a representative measuring instrument may be a micrometer. However, because a measuring instrument such as a micrometer can only measure the edge thickness of the plate glass due to the structural limitations of the micrometer, it is virtually impossible to measure the thickness using a micrometer in the central portion of the plate glass manufactured to have a relatively large area. Do. In addition, since the thickness measurement of the plate glass using the micrometer is a contact method, a problem arises in that the polished glass surface is contaminated or damaged by contact with the micrometer.

한편, 비접촉방식의 측정은 서로 다른 매질을 통과하는 광선의 굴절현상을 응용한 것으로, 이를 통해 연속적으로 대량 제작되는 판유리의 두께와 형상에 대한 검사를 효율적으로 진행할 수 있고, 판유리의 모든 지점의 두께를 측정할 수 있다.On the other hand, non-contact measurement is applied to the refraction of light rays passing through different media, through which it is possible to efficiently inspect the thickness and shape of the glass plate continuously mass produced, the thickness of all points of the plate glass Can be measured.

그러나, 비접촉방식의 판유리 측정은 판유리의 상하면이 평행하게 형성된 경우에 한해 적용이 가능하므로, 판유리의 상하면이 점점 좁아지거나 멀어지는 형상을 한 경우에는 비접촉방식의 측정방법을 적용할 수가 없었다. 결국, 전술한 형상의 판유리를 검사하기 위해서는 별도의 측정기구를 이용한 접촉방식을 적용할 수 밖에 없었다. 하지만, 이러한 접촉방식은 앞서 제시한 문제점과 같이 판유리 전체에 대한 검사를 진행할 수 없고 손상의 위험이 있으므로, 상하면이 나란하지 않은 독특한 형상의 판유리 검사는 그 신뢰성과 안전성이 담보되지 못했다.However, the non-contact type plate glass measurement can be applied only when the upper and lower surfaces of the plate glass are formed in parallel, so that the non-contact measuring method cannot be applied when the upper and lower surfaces of the plate glass become narrower or farther away. As a result, in order to inspect the plate glass of the above-described shape was forced to apply a contact method using a separate measuring mechanism. However, such a contact method, such as the problem described above can not proceed with the inspection of the entire plate glass, there is a risk of damage, the unique shape of the plate glass inspection without the top and bottom side is not guaranteed its reliability and safety.

이에 본 발명은 상기와 같은 문제를 해소하기 위해서 안출된 것으로, 비접촉방식을 적용하여 판유리의 두께 및 형상을 용이하면서도 정밀하게 측정 검사할 수 있으면서, 판유리의 상면과 하면이 서로 나란하게 형성되지 않은 형상을 갖는 판유리의 형상 검사 또한 효율적으로 진행할 수 있도록 하는 경사면을 갖는 판유리 형상검사방법의 제공을 기술적 과제로 한다.Accordingly, the present invention has been devised to solve the above problems, and by applying a non-contact method, the thickness and shape of the plate glass can be easily and precisely measured and inspected, while the top and bottom surfaces of the plate glass are not formed in parallel with each other. It is a technical object of the present invention to provide a method for inspecting the shape of a plate glass having an inclined surface that allows the shape glass to have an efficient progress.

상기의 기술적 과제를 달성하기 위하여 본 발명은,The present invention to achieve the above technical problem,

레이저광출력기를 매개로 입사광을 일정 각도(θ1)만큼 경사지게 판유리에 조사하여, 제1반사광에 의한 제3스폿과 제2반사광에 의한 제4스폿이 스크린에 형성되도록 하는 제1단계;A first step of irradiating the plate glass with the incident light inclined by a predetermined angle (θ1) so as to form a third spot by the first reflected light and a fourth spot by the second reflected light on the screen;

Figure 112008025379121-pat00003
의 수학식을 이용해 유리의 상면과 하면이 평행한 상태에서 서로 평행하게 반사하는 제2반사광과 제3반사광의 이격거리(D)를 산출하는 제2단계; 및
Figure 112008025379121-pat00003
A second step of calculating a separation distance (D) between the second reflected light and the third reflected light reflecting in parallel with each other in a state where the upper and lower surfaces of the glass are in parallel with each other; And

Figure 112008025379121-pat00004
의 수학식에서 제2단계에서 산출된 이격거리(D)를 삽입하여 쐐기각 'α'를 산출하는 제3단계;
Figure 112008025379121-pat00004
A third step of calculating the wedge angle 'α' by inserting the separation distance D calculated in the second step in the equation;

를 포함하는 판유리의 형상검사방법이다.Shape inspection method of the plate glass comprising a.

상기의 본 발명은, 판유리(G)의 상부에 배치되는 레이저광출력기(10)와 영상촬영기(20)를 이용해서 비접촉식으로 판유리(G)의 두께 및 형상을 측정 검사함으로서, 특정 위치에 제한없이 판유리(G)의 모든 곳에 대한 측정 및 검사가 가능하고, 판유리의 상면과 하면이 나란하지 않은 독특한 형상의 판유리에 대해서도 두께 또는 형상에 대한 검사를 효율적으로 진행할 수 있는 효과가 있다.According to the present invention, the thickness and shape of the plate glass G is measured and inspected in a non-contact manner by using the laser light output device 10 and the image photographing machine 20 disposed above the plate glass G, without being limited to a specific position. Measurement and inspection of all parts of the plate glass (G) is possible, and even the plate glass of a unique shape in which the upper and lower surfaces of the plate glass are not parallel to have an effect of efficiently inspecting the thickness or shape.

이하 본 발명을 첨부된 예시도면에 의거하여 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명에 따른 판유리 형상검사방법을 위한 형상검사장치와 검사모습을 설명하기 위한 도면인바, 이를 참조하여 설명한다.1 is a view for explaining the shape inspection apparatus and inspection pattern for the plate glass shape inspection method according to the present invention, it will be described with reference to this.

판유리 형상검사장치는, 입사광(L1)을 일정 각도(θ1)만큼 경사지게 판유리(G)의 상면(G1)으로 조사하는 레이저광출력기(10)와; 일정 각도(θ3)만큼 경사지게 배치되어, 판유리(G)로부터의 제1반사광(L2)과 제2반사광(L3)이 조사되는 스크린(60); 스크린(60)에 형성되는 제3스폿(S3)과 제4스폿(S4)간의 이격거리(x)를 촬영하는 영상촬영기(20); 레이저광출력기(10)와 영상촬영기(20)의 작동을 제어하고, 영상촬영기(20)로부터 입력되는 촬영 영상을 영상처리하여 판유리(G)의 두께(t) 또는 쐐기각(α)을 산출하는 제어유닛(30); 제어유닛(30)의 작동을 제어하는 입력유닛(40) 및; 제어유닛(30)에 의해 작동 제어되어, 제어유닛(30)의 데이터처리 결과를 외부로 출력하는 출력유닛(50)으로 구성된다.The plate glass shape inspection apparatus includes: a laser light output unit 10 for irradiating the incident light L1 to the upper surface G1 of the plate glass G so as to be inclined by a predetermined angle θ1; A screen 60 disposed to be inclined by a predetermined angle θ3 and irradiated with the first and second reflected light L2 and L3 from the plate glass G; An image photographing apparatus 20 for photographing the separation distance x between the third spot S3 and the fourth spot S4 formed on the screen 60; Controlling the operation of the laser light output device 10 and the imager 20, and processing the photographed image input from the imager 20 to calculate the thickness (t) or wedge angle (α) of the plate glass (G) Control unit 30; An input unit 40 for controlling the operation of the control unit 30; Operationally controlled by the control unit 30, the output unit 50 for outputting the data processing results of the control unit 30 to the outside.

도 1을 참조하여 본 실시예에 따른 판유리 형상검사방법을 단계별로 설명하 면 다음과 같다.Referring to Figure 1, the step-by-step method for determining the shape of the plate glass according to the present embodiment are as follows.

1. 레이저광출력기(10)를 매개로 입사광(L1)을 일정 각도(θ1)만큼 경사지게 판유리(G)의 상면(G1)으로 조사하여 제1반사광(L2)에 의한 제3스폿(S3)과 제2반사광(L3')에 의한 제4스폿(S4')이 일정 각도(θ3)만큼 경사지게 배치된 스크린(60)에 형성되도록 하는 단계.1. Through the laser light output device 10, the incident light L1 is inclined by a predetermined angle θ1 to the upper surface G1 of the plate glass G, and the third spot S3 caused by the first reflected light L2 and A fourth spot (S4 ') by the second reflected light (L3') is formed in the screen 60 is disposed to be inclined by a predetermined angle (θ3).

상기 스크린(60)에 형성되는 제3스폿(S3)과 제4스폿(S4')은 판유리(G)의 상면(G1)에 형성되는 제1스폿(S1)과 제2스폿(S2)에 비해 매우 선명하게 나타난다. 따라서, 본 실시예에 따르면, 제어유닛(30)에서의 영상처리시에 스폿 간의 거리측정을 정확하게 할 수 있다.The third spot S3 and the fourth spot S4 ′ formed on the screen 60 are compared to the first spot S1 and the second spot S2 formed on the upper surface G1 of the plate glass G. It is very sharp. Therefore, according to the present embodiment, the distance measurement between the spots can be accurately measured during the image processing in the control unit 30.

2. 영상촬영기(20)를 매개로 스크린(60)에 형성된 제3스폿(S3)과 제4스폿(S4') 간의 이격거리(x)를 영상 촬영하는 단계.2. Taking an image of the separation distance (x) between the third spot (S3) and the fourth spot (S4 ') formed on the screen 60 via the imager 20.

상기 판유리(G)의 상면(G1)에 입사광(L1)이 조사되는 상태에서, 제어유닛(30)에 의해 작동 제어되는 영상촬영기(20)를 매개로 제3스폿(S3)과 제4스폿(S4') 간의 이격거리(x)를 촬영한다.In the state where the incident light L1 is irradiated on the upper surface G1 of the plate glass G, the third spot S3 and the fourth spot (S3) and the fourth spot (3) are operated through the image photographing machine 20 which is operated and controlled by the control unit 30. Photographing the separation distance x between S4 ').

3. 영상촬영기(20)의 촬영 영상으로부터 제3스폿(S3)과 제4스폿(S4') 간의 이격거리(x)를 구하는 단계.3. A step of obtaining the separation distance x between the third spot S3 and the fourth spot S4 'from the captured image of the image photographing machine 20.

본 실시예의 경우, 상기 제어유닛(30)이 영상촬영기(20)로부터 입력되는 촬영 영상을 영상처리하여 제3스폿(S3)과 제4스폿(S4')간의 이격거리(x)를 자동으로 측정토록 하였다.In the present embodiment, the control unit 30 automatically measures the separation distance x between the third spot S3 and the fourth spot S4 'by image processing the captured image input from the image photographing machine 20. It was forever.

4. 입사광(L1)의 일정 각도(θ1)와 판유리(G) 내의 굴절각(φ)을 이용해 제1반사광(L2)과 제2반사광(L3')의 이격거리를 산출하는 단계.4. Calculating the separation distance between the first reflected light (L2) and the second reflected light (L3 ') by using a predetermined angle (θ1) of the incident light (L1) and the refractive angle (φ) in the plate glass (G).

Figure 112008025379121-pat00005
Figure 112008025379121-pat00005

[수학식 1]에 일정 각도(θ1)와, 굴절각(φ)과, 판유리(G)에서 상면(G1)과 하면(G2)이 서로 평행한 지점에서의 두께 't'를 삽입하여, 상면(G1)과 하면(G2)이 서로 평행한 형상의 판유리(G)에 반사되는 제1,2반사광(L2, L3')의 이격거리(D)를 산출한다. 여기서, 이격거리(D)는 판유리(G)의 상면(G1)과 하면(G2)이 서로 평행할 때의 이론적인 계산치로, 입사광(L1)이 입사한 지점이 상면(G1)과 하면(G2)이 서로 평행한 지점이라면, 제1반사광(L2)과 제2반사광(L3)은 서로 평행하게 진행하고, 최종으로 스크린(60)에 제3스폿(S3)과 제4스폿(S4)을 남길 것이다. 이때, 제3,4스폿(S3, S4)의 거리는 제1,2반사광(L2, L3)의 이격거리 'D'와 일치할 것이다.In Equation 1, the thickness 't' is inserted at a point where the constant angle θ1, the refraction angle φ, and the upper surface G1 and the lower surface G2 are parallel to each other in the plate glass G, and the upper surface ( G1) and the lower surface G2 calculate the separation distance D of the 1st, 2nd reflected light L2 and L3 'which are reflected on the plate glass G of the shape parallel to each other. Here, the separation distance D is a theoretical calculated value when the upper surface G1 and the lower surface G2 of the plate glass G are parallel to each other, and the point where the incident light L1 is incident is the upper surface G1 and the lower surface G2. ) Is the point parallel to each other, the first reflected light (L2) and the second reflected light (L3) proceeds in parallel with each other, finally leaving the third spot (S3) and the fourth spot (S4) on the screen (60). will be. In this case, the distance between the third and fourth spots S3 and S4 may coincide with the separation distance 'D' of the first and second reflection lights L2 and L3.

5. 제3,4스폿(S3, S4)의 이격거리(x)와 제1,2반사광(L2, L3)의 이격거리(D)를 비교하는 단계.5. Comparing the separation distance x of the third and fourth spots S3 and S4 and the separation distance D of the first and second reflection lights L2 and L3.

두 이격거리(x, D)가 동일하면, 입사광(L1)이 조사되는 판유리(G)의 지점은 상면(G1)과 하면(G2)이 평행한 형상의 판유리(G)인 것으로 확인된다. 그러나, 일치하지 안으면, 상면(G1) 또는 하면(G2')은 경사진 것으로 확인된다.If two separation distances x and D are the same, it is confirmed that the point of the plate glass G to which incident light L1 is irradiated is plate glass G of the shape in which the upper surface G1 and the lower surface G2 were parallel. However, if they do not coincide, it is confirmed that the upper surface G1 or the lower surface G2 'is inclined.

6. 판유리(G)의 상면(G1) 또는 하면(G2')이 경사진 것으로 확인되면, 경사면에 대한 쐐기각(α)을 산출하는 단계.6. If it is confirmed that the upper surface G1 or the lower surface G2 'of the plate glass G is inclined, calculating the wedge angle α with respect to the inclined surface.

Figure 112008025379121-pat00006
Figure 112008025379121-pat00006

[수학식 1]에서 확인된 이격거리(D), 입사광(L1)의 일정각도(θ1), 굴절각(φ)을 [수학식 2]에 각각 대입하여서 방정식으로 쐐기각(α)을 산출한다. 여기서, 도 1에 도시한 바와 같이, 수평면 부분의 하면(G2)과 경사면 부분의 하면(G2')이 만나는 부분은 판유리(G)의 두께가 동일할 것이나, 상기 하면(G2')이 경사지면서 θ1'로 입사되는 입사광(L1)의 하면(G2')에 대한 반사각(θ2')에 변화가 생긴다.The wedge angle α is calculated by the equation by substituting the separation distance D, the constant angle θ1 and the refraction angle φ of the incident light L1 into Equation 2, respectively. Here, as shown in FIG. 1, the portion where the lower surface G2 of the horizontal surface portion and the lower surface G2 'of the inclined surface portion meet may have the same thickness of the plate glass G, but the lower surface G2' is inclined. A change occurs in the reflection angle θ2 'with respect to the lower surface G2' of the incident light L1 incident at θ1 '.

한편, [수학식 2]는 판유리(G)의 하면(G2')이 'α'의 쐐기각으로 경사진 지점에 대한 이격거리(D)의 측정 오차를 보정하기 위한 것으로, 'α'에 상기 지점의 쐐기각을 삽입하면, 상면(G1)과 하면이 평행한 판유리(G)에 대한 이격거리(D)를 산 출할 수 있다. 따라서, 판유리(G)의 이격거리(D)는 [수학식 1]을 통해 확인되므로, [수학식 2]에서 쐐기각 'α'를 산출할 수 있다.On the other hand, [Equation 2] is to correct the measurement error of the separation distance (D) with respect to the point where the lower surface (G2 ') of the plate glass (G) is inclined at the wedge angle of' α ', the' α ' Inserting the wedge angle of the point, it is possible to calculate the separation distance (D) with respect to the plate glass (G) parallel to the upper surface (G1). Therefore, since the separation distance (D) of the plate glass (G) is confirmed through [Equation 1], the wedge angle 'α' can be calculated in [Equation 2].

계속해서, 이렇게 산출된 쐐기각(α)과 판유리(G)의 설계치를 확인하여 판유리(G)의 경사진 면(본 발명에 따른 실시예에서는 하면(G2'))에 대한 불량 여부를 확인한다.Subsequently, the wedge angle α and the design value of the plate glass G thus calculated are checked to determine whether the inclined surface of the plate glass G is defective (lower surface G2 'in the embodiment according to the present invention). .

입사광(L1)이 굴절하여 판유리(G)를 관통할 때의 제1각(θ1')과, 이렇게 관통하는 광이 판유리(G)의 하면(G2)에 반사될 때의 제2각(θ2')과, 쐐기각(α)은 [수학식 3]의 관계를 이룬다.A first angle θ1 'when the incident light L1 is refracted and penetrates the plate glass G, and a second angle θ2' when the light so penetrating is reflected on the lower surface G2 of the plate glass G. ) And the wedge angle α form a relationship of Equation (3).

Figure 112008025379121-pat00007
Figure 112008025379121-pat00007

[수학식 3]을 이용해 쐐기각(α)의 변화에 따른 판유리(G)에 대한 각종 측정 오차를 확인할 수 있다.Using Equation 3, various measurement errors for the plate glass G according to the change in the wedge angle α can be confirmed.

한편, 상기 두 이격거리(x, D)의 확인단계 없이도 판유리에서 경사면이 존재하는 지점에 대해 불량 여부를 곧바로 확인할 수 있다. 즉, 대상 판유리의 일면이 경사지도록 제작할 경우, 경사면이 시작하는 부분에서 입사광(L1)의 조사를 시작하여 곧바로 [수학식 2]를 이용해 쐐기각(α)을 확인하는 것이다. 이렇게 확인된 쐐기각(α)이 설계치와 다를 경우엔 이를 불량 처리한다.On the other hand, even without the step of checking the two separation distance (x, D) it can be immediately confirmed whether or not for the point where the inclined surface in the plate glass exists. That is, when one surface of the object glass is manufactured to be inclined, irradiation of the incident light L1 is started at the portion where the inclined surface starts, and the wedge angle α is immediately confirmed by using Equation 2. If the wedge angle (α) thus identified is different from the design value, it is treated badly.

도 2는 본 발명에 따른 판유리 두께측정방법을 설명하기 위한 도면이고, 도 3은 스크린에 형성된 제3,4스폿을 영상촬영기로 촬영한 영상인 바, 이를 참조하여 설명한다.2 is a view for explaining a method for measuring the thickness of the plate glass according to the present invention, Figure 3 is an image taken by the image pickup of the third, fourth spot formed on the screen, it will be described with reference to this.

도 3에서 보이는 바와 같이, 스크린(60)의 위치에 따라 제3,4스폿(S3,S4)의 촬영 영상 상태에 차이가 발생한다. 참고로, 도 3(a)는 판유리(G)로부터의 제1반사광(L2)과 제2반사광(L3)이 조사되는 스크린(60)의 배치 각도(θ2)를 입사광(L1)의 조사 각도(θ1)와 일치시킨 상태에서, 스크린(60)에 형성된 제3스폿(S3)과 제4스폿(S4)을 영상촬영기(20)로 촬영한 영상이고, 도 3(b)는 입사광(L1)의 조사 각도(θ1)와 스크린(60)의 배치 각도(θ2)를 일치시키지 않은 상태에서, 스크린(60)에 형성된 제3스폿(S3)과 제4스폿(S4)을 영상촬영기(20)로 촬영한 영상이다.As shown in FIG. 3, a difference occurs in the captured image state of the third and fourth spots S3 and S4 according to the position of the screen 60. For reference, FIG. 3A illustrates an arrangement angle θ2 of the screen 60 on which the first and second reflection lights L2 and L3 are radiated from the plate glass G, and the irradiation angle of the incident light L1. In the state coinciding with [theta] 1), the third spot S3 and the fourth spot S4 formed on the screen 60 are images taken by the imaging device 20, and FIG. 3 (b) shows the incident light L1. The third spot S3 and the fourth spot S4 formed on the screen 60 are photographed by the imager 20 while the irradiation angle θ1 and the arrangement angle θ2 of the screen 60 do not coincide. It is a video.

즉, 판유리(G)의 정밀한 두께 측정을 위해서는 스크린(60)의 배치 각도(θ2)를 입사광(L1)의 조사 각도(θ1)에 일치시켜서, 판유리(G)로부터 반사되 조사되는 제1반사광(L2) 및 제2반사광(L3)의 방향과, 스크린(60)을 직접 촬영하는 영상촬영기(20')의 광축(21)의 방향이 서로 평행하도록 하는 것이 바람직하다.That is, in order to accurately measure the thickness of the plate glass G, the arrangement angle θ2 of the screen 60 is matched to the irradiation angle θ1 of the incident light L1, and the first reflected light reflected from the plate glass G is irradiated. It is preferable that the directions of L2) and the second reflected light L3 and the direction of the optical axis 21 of the image photographing device 20 'for directly photographing the screen 60 are parallel to each other.

도 1은 본 발명에 따른 판유리 형상검사방법을 위한 형상검사장치와 검사모습을 설명하기 위한 도면이고, 1 is a view for explaining the shape inspection apparatus and inspection pattern for the plate glass shape inspection method according to the present invention,

도 2는 본 발명에 따른 판유리 두께측정방법을 설명하기 위한 도면이고, 2 is a view for explaining a plate glass thickness measuring method according to the present invention,

도 3은 스크린에 형성된 제3,4스폿을 영상촬영기로 촬영한 영상이다.3 is an image of the third and fourth spots formed on the screen by an image photographing apparatus.

- 첨부도면의 주요 부분에 대한 용어 설명 --Explanation of terms for the main parts of the accompanying drawings-

10 ; 레이저광출력기, 20 ; 영상촬영기,10; Laser light output machine, 20; Photography,

30 ; 제어유닛, 40 ; 입력유닛,30; Control unit, 40; Input unit,

50 ; 출력유닛, 60 ; 스크린,50; Output unit, 60; screen,

G ; 판유리, G1 ; 상면,G; Plate glass, G1; Top View,

G2, G2' ; 하면, L1 ; 입사광,G2, G2 '; L1; Incident Light,

L2 ; 제1반사광, L3, L3' ; 제2반사광,L2; First reflection light, L3, L3 '; Second Reflector,

Claims (3)

레이저광출력기(10)를 매개로 입사광(L1)을 일정 각도(θ1)만큼 경사지게 판유리(G)에 조사하여, 제1반사광(L2)에 의한 제3스폿(S3)과 제2반사광(L3')에 의한 제4스폿(S4')이 스크린(60)에 형성되도록 하는 제1단계;Through the laser light output device 10, the incident light L1 is inclined by the predetermined angle θ1 to the plate glass G, and the third spot S3 and the second reflected light L3 ′ caused by the first reflected light L2 are emitted. A first step of forming a fourth spot (S4 ') formed on the screen (60);
Figure 112009067128805-pat00008
의 수학식을 이용해 유리(G)의 상면(G1)과 하면(G2)이 두께 't'로 평행한 상태에서 서로 평행하게 반사하는 제2반사광과 제3반사광의 이격거리(D)를 산출하는 제2단계; 및
Figure 112009067128805-pat00008
Computing the separation distance (D) of the second reflected light and the third reflected light reflecting in parallel with each other in a state where the upper surface (G1) and the lower surface (G2) of the glass (G) is parallel to the thickness 't' Second step; And
Figure 112009067128805-pat00009
의 수학식에서 제2단계에서 산출된 이격거리(D)와, 유리(G)에 입사된 입사광(L1)의 굴절각(Φ)을 각각 삽입하여 쐐기각 'α'를 산출하는 제3단계;
Figure 112009067128805-pat00009
A third step of calculating the wedge angle 'α' by inserting the separation distance D calculated in the second step and the refractive angle Φ of the incident light L1 incident on the glass G, respectively;
를 포함하는 것을 특징으로 하는 경사면을 갖는 판유리의 형상검사방법.Shape inspection method of the plate glass having an inclined surface comprising a.
삭제delete 제 1 항에 있어서,The method of claim 1, 상기 스크린(60)은 판유리(G')에 조사되는 입사광(L1)과 평행하도록 배치된 것을 특징으로 하는 경사면을 갖는 판유리의 형상검사방법.The screen (60) is a shape inspection method of a plate glass having an inclined surface, characterized in that arranged in parallel with the incident light (L1) irradiated to the plate glass (G ').
KR1020080032781A 2008-04-08 2008-04-08 Shape examination metho for the glass panel having an incline KR100942241B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216903A (en) 1982-06-11 1983-12-16 Toshiba Corp Thickness measuring device
JP2000065537A (en) 1998-08-17 2000-03-03 Dainippon Screen Mfg Co Ltd Film thickness measuring equipment
US20030025899A1 (en) 2001-06-18 2003-02-06 Amara Mohamed Kamel Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
KR20090007172A (en) * 2007-07-13 2009-01-16 (주)키메스 Thickness measuring instrument for a plate glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58216903A (en) 1982-06-11 1983-12-16 Toshiba Corp Thickness measuring device
JP2000065537A (en) 1998-08-17 2000-03-03 Dainippon Screen Mfg Co Ltd Film thickness measuring equipment
US20030025899A1 (en) 2001-06-18 2003-02-06 Amara Mohamed Kamel Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
KR20090007172A (en) * 2007-07-13 2009-01-16 (주)키메스 Thickness measuring instrument for a plate glass

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