KR100941959B1 - 액정표시장치용 박막증착장치 - Google Patents
액정표시장치용 박막증착장치 Download PDFInfo
- Publication number
- KR100941959B1 KR100941959B1 KR1020030035046A KR20030035046A KR100941959B1 KR 100941959 B1 KR100941959 B1 KR 100941959B1 KR 1020030035046 A KR1020030035046 A KR 1020030035046A KR 20030035046 A KR20030035046 A KR 20030035046A KR 100941959 B1 KR100941959 B1 KR 100941959B1
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- KR
- South Korea
- Prior art keywords
- substrate
- gas
- film deposition
- thin film
- liquid crystal
- Prior art date
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
- 내부에 기판이 안착되는 반응챔버와, 일단은 소스 및 반응물질을 저장하는 가스 공급원과 연결되고 타단은 상기 반응챔버로 연결되는 가스유입관을 포함하는 액정표시장치용 박막증착장치에 있어서,상기 가스유입관의 타단에 연결된 가스 유입구와;상기 가스유입구에 연결되어 상기 기판의 주변부 방향으로 확장된 홈을 가지는 백킹플레이트와;상기 홈이 상기 가스유입구에서 연장되는 가스유로를 형성하도록 상기 백킹플레이트와 면접하는 제 1 분배판과;상기 제 1 분배판과 연결되어 상기 가스유입구와 연통하고 분배홀이 형성된 제 2 분배판과;상기 제 2 분배판의 하부에 위치하고, 상기 가스유로의 말단과 상기 제 2 분배판의 상기 분배홀을 통과한 통과한 소스 및 반응물질을 상기 기판으로 확산시키기 위해 다수의 관통홀이 형성된 샤워헤드를 포함하는 액정표시장치용 박막증착장치.
- 제 1항에 있어서,상기 가스유로의 말단은 상기 기판의 주변부를 초과하지 않는 범위 내에서 형성되는 것을 특징으로 하는 액정표시장치용 박막증착장치.
- 제 1항에 있어서,상기 제 1 분배판은 상기 가스유로의 말단과 대응되는 위치에 단차가 형성되는 것을 특징으로 하는 액정표시장치용 박막증착장치.
- 제 1항에 있어서,상기 분배홀은 상기 제 2 분배판의 측면부에 형성되는 것을 특징으로 하는 액정표시장치용 박막증착장치.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030035046A KR100941959B1 (ko) | 2003-05-31 | 2003-05-31 | 액정표시장치용 박막증착장치 |
Applications Claiming Priority (1)
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KR1020030035046A KR100941959B1 (ko) | 2003-05-31 | 2003-05-31 | 액정표시장치용 박막증착장치 |
Publications (2)
Publication Number | Publication Date |
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KR20040103124A KR20040103124A (ko) | 2004-12-08 |
KR100941959B1 true KR100941959B1 (ko) | 2010-02-11 |
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KR1020030035046A KR100941959B1 (ko) | 2003-05-31 | 2003-05-31 | 액정표시장치용 박막증착장치 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180002522A (ko) | 2016-06-28 | 2018-01-08 | (주)아이씨디 | 고밀도 박막증착을 위한 선형노즐 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10883174B2 (en) * | 2018-11-27 | 2021-01-05 | Applied Materials, Inc. | Gas diffuser mounting plate for reduced particle generation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020028921A (ko) * | 1999-06-30 | 2002-04-17 | 리차드 에이치. 로브그렌 | 반도체 처리 공정을 위한 가스 분산장치 |
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2003
- 2003-05-31 KR KR1020030035046A patent/KR100941959B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20020028921A (ko) * | 1999-06-30 | 2002-04-17 | 리차드 에이치. 로브그렌 | 반도체 처리 공정을 위한 가스 분산장치 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180002522A (ko) | 2016-06-28 | 2018-01-08 | (주)아이씨디 | 고밀도 박막증착을 위한 선형노즐 |
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KR20040103124A (ko) | 2004-12-08 |
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