KR100933697B1 - Apparatus for inspecting three dimensional shape using camera, inspection system including the same and inspection method using the same - Google Patents

Abstract

PURPOSE: An apparatus for inspecting three dimensional shape using a camera, an inspection system including the same and an inspection method using the same are provided to reduce error range of the measured value. CONSTITUTION: An apparatus for inspecting three dimensional shape using a camera comprises a lighting-emitting part(110) and a camera part(120). The lighting-emitting part emits a line source on a measurement object at a fixed angle. The angle is a set angle. The line source is produced through one or more slits using white light. The camera part collects the reflection light of the line source which the lighting-emitting part emits. The camera part converts the line source into electric signals.

Description

3D shape inspection device using camera, inspection system including same and inspection method thereof {APPARATUS FOR INSPECTING THREE DIMENSIONAL SHAPE USING CAMERA, INSPECTION SYSTEM INCLUDING THE SAME AND INSPECTION METHOD USING THE SAME}

The present invention relates to an inspection system and method for measuring the shape of a measurement object using a camera and determining whether there is a defect, and more specifically, irradiating the measurement object within an angle reflecting light using white light having a wide wavelength range. The measured light is measured using a high-performance camera, and the relative measurement value of the measurement surface relative to the measurement value of the specific reference surface is compared with the stored reference surface and relative value data when measuring the shape of the measurement object. In addition, the present invention relates to a three-dimensional shape inspection apparatus using a camera, in which a plurality of measuring apparatuses are arranged in a single system and a conveyor allows movement between the measuring apparatuses, an inspection system including the same, and an inspection method thereof.

In general, a very precise measurement is required to check whether a foreign material adheres to the surface of an object such as an LED or a semiconductor wafer or whether the surface is uniform. Therefore, a method using an interference pattern or light having a short wavelength such as a laser is required. Methods have been used that enable precise measurements using

1 is a configuration diagram of a three-dimensional shape measuring device for measuring the shape of a measurement object using an interference fringe, the three-dimensional shape measuring device is a light source (2) through a beam splitter (4) in the light source (2) for irradiating illumination light Split the illumination light from 2). A part of the illumination light emitted from the beam splitter 4 is irradiated to the measurement object 6 having the highest point and the lowest point step, and the other part of the illumination light emitted from the beam splitter 4 is reflected on the reference plane 5 and reflected. . An image of the surface of the measurement object 6 and the interference fringe reflected from the reference surface 5 and merged are photographed by the photographing apparatus 1, and an image photographed by the photographing apparatus 1 is processed using a control computer. . The reference plane 5 further includes a reflection distance adjusting means 3 that provides reflection distances equal to the reflection distance of the highest point of the measurement object 6 and the reflection distance of the lowest point of the measurement object 6, thereby providing various measurement objects. The shape of can be measured.

However, the three-dimensional shape measuring device can measure the shape of an opaque object because the illumination light is reflected on the measurement object to generate an interference fringe, but when the shape of the semi-transparent or transparent object is measured, the illumination light measures the measurement object. Almost no transmission interference interference does not occur, there is a disadvantage that can not be measured.

2 is a block diagram of a three-dimensional shape measuring apparatus using a laser to enable a more accurate measurement, the light emitted from the light emitting unit 11, the irradiated light 14 is reflected to the measurement object 13 Then, the shape of the measurement object 13 may be measured by processing the light input through the camera unit 12. Unlike the three-dimensional shape measuring apparatus described with reference to FIG. 1, the three-dimensional shape measuring apparatus does not use an interference phenomenon of light, thereby measuring a shape of a semi-transparent or transparent measuring object. However, since the three-dimensional shape measuring apparatus measures the shape of the measurement target by using a light source having a narrow range of inherent wavelengths such as a laser, the measurement result is large and the measurement result is not accurate due to the transparency of the measurement target.

Therefore, a device capable of precise measurement of translucent or transparent objects required for inspections requiring precision such as surface inspection of highly transparent LED lamps is required, and other inspections required for LED lamps requiring such inspections together with the above inspections. You need a system that can be continuously tested. As described above, in order to continuously inspect a plurality of inspections, an error occurs due to the movement of a measurement object, so that accurate measurement is difficult, and an apparatus and method for correcting such an error are also required.

An object of the embodiments of the present invention for improving the above-mentioned problems is to measure translucent or transparent by irradiating a measurement object within an angle reflecting light using white light having a wide wavelength range and measuring the reflected light using a high performance camera. It is to provide a three-dimensional shape inspection apparatus using a camera that allows inspection of the shape of the object, an inspection system including the same, and an inspection method thereof.

Another object of the embodiments of the present invention is to calculate the error range of the measured value by calculating the relative measurement value of the measurement surface relative to the measurement value of the specific reference surface and the relative value data of the reference surface and the measurement surface when calculating the shape of the measurement object. The present invention provides a three-dimensional shape inspection apparatus using a reduced camera, an inspection system including the same, and an inspection method thereof.

Still another object of the embodiments of the present invention is to arrange a plurality of measuring devices in a single system and to move between the measuring devices by using a conveyor. And it provides a test method.

In order to achieve the above object, the inspection system including a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention, the loader unit for loading (loading) a collection of measurement objects in a cassette (Cassette), the cassette Conveyor unit for moving the three-dimensional inspection stage unit for moving the cassette in a sliding manner during stereoscopic inspection, Stereoscopic inspection unit for performing a three-dimensional inspection using a camera (the three-dimensional shape measuring device), Planar inspection in the sliding method A plane inspection stage for moving, a plane inspection for performing plane inspection, a marking portion for marking a defect mark on a measurement object determined to be defective in the three-dimensional inspection or plane inspection, and an unloading to unload the measurement object assembly It includes a loader part.

The loader unit loads the measurement object assembly in a cassette.

The conveyor section allows the plurality of inspections to be continuous by moving the cassette and seating on the stage section.

The stereoscopic inspection stage unit moves the cassette in a sliding manner when measuring a three-dimensional shape.

The stereoscopic inspection unit inspects a three-dimensional shape of the plurality of measurement objects included in the measurement object assembly, and may shorten the inspection time by measuring and inspecting a plurality of measurement objects at the same time.

The planar inspection stage unit moves the cassette in a sliding manner when measuring the planar shape of the measurement object.

The plane inspection unit may perform a plane inspection of a plurality of measurement objects included in the measurement object assembly, and may shorten an inspection time by simultaneously measuring and inspecting a plurality of measurement objects.

The marking unit marks a defect mark on the measurement object determined by the stereoscopic inspection unit or the planar inspection unit.

The unloader unit unloads the cassette from which the inspection is completed, from the inspection system.

The three-dimensional shape measuring unit irradiates a white linear light source from the light emitting unit to the measuring object, and the light source reflected from the measuring object enters the camera unit through the reflecting unit.

The light emitting unit irradiates the white light source toward the measurement object, and is inclined by a range of a reflection threshold value such that the light source irradiated to the measurement object can be reflected according to the transparency of the measurement object.

The reflector serves to reflect the light source reflected from the measurement object to the camera unit.

The camera unit may photograph a light source reflected through the reflector by using a high performance camera, and measure the shape of the object to be measured using the result photographed by the camera unit through a control computer connected to the camera unit.

The three-dimensional shape measurement unit includes a measurement control unit for calculating using a measurement result and determining whether or not a defect as a result of the calculation, the measurement control unit for measuring the measurement object using a measurement result image measured by the drive unit Computation unit for calculating the result value, the measurement target DB storing the standard range or the error range of the measurement result value of the measurement object, the measurement result value of the calculation unit can be compared with the measurement result value of the standard range previously stored in the measurement target DB Compensation unit for converting to a range, a display unit for enabling a user operation and the measurement result value converted in the compensation unit is compared with the standard range of the measurement result value of the measurement target DB to determine whether or not the measurement object is defective The control unit includes a control unit that controls the operation unit, the compensation unit, and the display unit.

An apparatus for inspecting a three-dimensional shape using a camera according to an embodiment of the present invention, an inspection system including the same, and an inspection method thereof employ a white light having a wide wavelength range to irradiate a measurement object within an angle reflecting light, and then reflect the reflected light to a high performance camera. By measuring by using to enable the inspection of the shape of the translucent or transparent measurement object has the effect of improving the shape inspection speed of the LED lamp.

Three-dimensional shape inspection apparatus using a camera according to an embodiment of the present invention, an inspection system including the same and a method for inspecting the reference plane and the measurement plane in which the relative measurement value of the measurement plane relative to the measurement value of the specific reference plane during the inspection of the shape of the measurement object By comparing with the relative value data of, the error range of the measured value is reduced, thereby enabling more accurate inspection.

The three-dimensional shape inspection apparatus using a camera according to an embodiment of the present invention, an inspection system including the same, and the inspection method thereof include a plurality of measurement apparatuses arranged in a single system and a plurality of inspection apparatuses can be moved between measuring apparatuses using a conveyor. There is an excellent effect of increasing inspection efficiency by automating.

The present invention as described above will be described in detail with reference to the accompanying drawings and embodiments.

3 is a view showing an example of a measurement target to be measured using a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention, Figure 3 is a perspective view and a cross-sectional view of the measurement target.

The object to be measured is composed of a mold part 20 having an LED configured therein, and an epoxy part 25 applied to the mold part 20 to protect the LED and to uniformly diffuse a light source of the LED. .

The epoxy portion 25 is transparent or translucent, and if the surface is normal, it should be uniform, and as shown, the surface should be concave to diffuse the light from the LED. At this time, the surface of the epoxy portion 25 should be inspected whether it is uniform or concave by a predetermined standard range, and only the measurement object passed the inspection should be shipped.

4 is a view illustrating a measurement object assembly in which the measurement object is collected according to an embodiment of the present invention, wherein the measurement object assembly is configured in the form of a lead frame so that the measurement object may be collected and simultaneously examined. In addition, the inspection system including a three-dimensional shape measuring apparatus using a camera according to the present invention loads the measurement object assembly to perform the inspection.

The measurement object assembly performs inspection while moving between inspection devices through the stage of the inspection system, because the individual measurement objects included in the measurement object assembly are very small and the inspection of a large amount of measurement objects must be measured at one time. Hour micrometer (μm) precision is required. In addition, measurement errors may occur in vibrations or shocks generated when the inspection apparatus moves by using the stage, and a method of correcting such measurement errors using a high resolution camera is required. The correction method is described again in FIGS. 10 to 12 below.

5 is a front view of an inspection system including a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention, the loader unit 30 for loading and loading the aggregate of the measurement object in a cassette, the cassette Conveyor unit 35 for moving the three-dimensional inspection stage unit 45 for mounting the cassette during stereoscopic inspection, stereoscopic inspection unit 40 for performing stereoscopic inspection using a camera, the three-dimensional shape measuring device, the plane inspection A planar inspection stage unit 55 for mounting a cassette, a planar inspection unit 50 for performing a planar inspection, a marking unit 60 for marking a defect mark on a measurement object that is determined to be defective in the three-dimensional inspection or the planar inspection, And an unloader unit 70 for unloading the measurement object assembly.

The loader unit 30 loads a measurement object assembly in a cassette.

The conveyor unit 35 allows the plurality of inspections to be continuously performed by moving the cassette between the plurality of inspection apparatuses 40 and 50 and seating the mounting portions 45 and 55.

The stereoscopic inspection stage unit 45 moves the cassette in a sliding manner when measuring the three-dimensional shape.

The stereoscopic inspection unit 40 inspects the three-dimensional shape of the plurality of measurement objects included in the measurement object assembly, and can shorten the inspection time by measuring and inspecting several measurement objects at the same time.

The planar inspection stage unit 55 moves the cassette in a sliding manner when measuring the planar shape of the measurement object.

The plane inspection unit 50 performs a plane inspection of the plurality of measurement objects included in the measurement object assembly, and can shorten the inspection time by simultaneously measuring and inspecting a plurality of measurement objects.

The marking unit 60 marks a defect mark on a measurement object that is determined to be defective by the stereoscopic inspection unit 40 or the planar inspection unit 50.

The unloader unit 70 unloads the cassette from which the inspection is completed, from the inspection system.

The inspection system including the three-dimensional shape measuring apparatus using the camera can be arranged in a single system and by using a conveyor can be moved between the measuring apparatus by automating a plurality of inspection to greatly increase the inspection efficiency.

Figure 6 shows the operating principle of the three-dimensional shape measuring unit according to an embodiment of the present invention. The three-dimensional shape measuring unit irradiates the white linear light source 150 from the light emitting unit 110 to the measurement target 200, and the light source reflected from the measurement target 200 is the camera unit 120 through the reflecting unit 130. Enter

The light emitting unit 110 irradiates the white light source 150 toward the measurement object 200, and the light source 150 irradiated to the measurement object may be reflected according to the transparency of the measurement object (eg, For example, it is installed inclined to within the angle of the reflection threshold value).

The reflector 130 serves to reflect the light source reflected from the measurement object to the camera unit 120.

The camera unit 120 photographs a light source reflected through the reflector 130 using a high performance camera, and a control computer connected to the camera unit 120 is photographed by the camera unit 120. By calculating using, it is possible to check whether the shape of the measurement object is normal.

Since the camera unit 120 may be disposed vertically by installing the reflector 130, the volume of the three-dimensional shape measuring unit may be greatly reduced, and the white light 150 having a wide wavelength range may be emitted from the light emitting unit 110. By irradiating the object to be measured within the range of reflecting light and measuring the reflected light with a high-performance camera, it is possible to inspect the appearance of the translucent or transparent object to improve the shape inspection speed of the LED lamp. .

7 is a front view of a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention, the reflecting unit 130 is located between the light emitting unit 110 and the camera unit 120 installed inside the head 140 and measured The camera unit 120 may be vertically disposed while maintaining the state, thereby reducing the volume according to the configuration of the light emitting unit 110 and the camera unit 120 as much as possible. In addition, the light emitting unit 110 is provided with a slit inside to irradiate the line light source.

8 is a view illustrating an operation of a light emitting unit of a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention, wherein the light emitting unit includes a light source unit 111 for irradiating a light source and a first light source for light source of the light source unit 111. The slit 112, the second slit 113 for controlling the line light source passing through the first slit 112 more precisely.

Since the slits 112 and 113 are dually operated, the light source from the light source unit 111 can be more precisely controlled, and thus, various measuring methods can be used according to the characteristics of the object to be measured.

9 is an appearance of an inspection system including a three-dimensional shape measuring device using a camera according to an embodiment of the present invention, the terminal, the monitor and the keyboard connected to the internal devices for the convenience of the user operation on the outside easily It is possible to control internal devices and to be able to cope quickly in case of failure.

In addition, although not shown, an inspection system including a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention includes a conveyor unit, and a cassette containing a target object aggregate includes movement of the apparatuses of the inspection system through the conveyor unit. This makes it possible to automate the entire inspection.

FIG. 10 is a diagram illustrating an internal operation of the head, and as described above with reference to FIG. 6, a plurality of measurement objects packaged in a measurement object assembly using a light emitting part, a reflection part, and a camera part installed in the head 140. Examine (200).

In this case, the measurement object is slidingly moved through the stage unit 300 as shown in FIG. 10 to perform the inspection. The cassette 200 on which the measurement object assembly is loaded vibrates in the stage unit 300 as the sliding movement is performed. And due to the change of the position of several to several tens of micrometers (μm) due to the movement, it is difficult to guarantee the reliability of the inspection because the error is likely to occur during the surface inspection to perform a precise inspection with a few micrometers (μm) resolution. Therefore, it is necessary to increase the reliability of the inspection by correcting the error in the manner described with reference to FIGS. 11 and 12 so as to perform an accurate inspection.

FIG. 11 is a configuration diagram of a measurement control unit 400 that calculates using a measurement result of a three-dimensional shape measurement unit using a camera according to an embodiment of the present invention and determines whether there is a defect as a result of the calculation. Is a driving unit 410 for measuring a measurement object, a calculation unit 420 for calculating a measurement result value using the measurement result image measured by the driving unit 410, and stores a standard range or an error range of the measurement result value of the measurement object. Compensation unit 430 for converting the measurement result value of the measurement target DB 510, the operation unit 420 into a range that can be compared with the measurement result value of the standard range previously stored in the measurement target DB 510, user operation The measurement result value converted by the display unit 520 and the compensator 430 for enabling the comparison with the standard range of the measurement result value of the measurement target DB 510 determines whether or not the measurement target is defective (530). ) And said And a controller 440 which controls the driver, the calculator, the compensator, and the display.

The driving unit 410 includes a light emitting unit, a reflecting unit, and a camera unit capable of inspecting a plurality of measurement objects packaged in the measurement object assembly as shown in FIG. 12, and measuring the measurement object to display the measurement result image. Send to 440.

The calculation unit 420 receives the measurement result image measured by the driving unit 410 from the control unit 440, and calculates the measurement result value of the measurement object by using the same. In particular, the measurement result is calculated by dividing the external surface height (mold part height) and the inner surface height (epoxy part height) of the measurement object.

The measurement target DB 510 stores the standard range or the error range of the measurement result value of the measurement target as a relative value of the external surface height and the internal surface height.

The compensation unit 430 converts the measurement result value calculated by the calculation unit 420 into a range that can be compared with the measurement result value of the standard range previously stored in the measurement target DB 510. In more detail, as the measurement object slides along the stage, the external surface height calculated by the calculation unit 420 is changed by vibration, etc., so that the external surface height is transmitted to the measurement target DB 510. The relative value of the external surface height and the internal surface height is converted by converting the internal surface height calculated by the operation unit 420 by the ratio which the external surface height is converted into, by converting into a previously stored standard range and according to a preset rule. Comparison with the standard range previously stored in the measurement target DB (510). That is, the accuracy can be obtained within a few micrometers (μm).

The control unit 440 determines whether the measurement object is defective by comparing the measurement result value converted by the compensation unit 430 with a standard range of the measurement result value of the measurement target DB 510.

The display unit 520 displays a measurement value and a determination of whether or not the measurement object is defective so that a user recognizes an error when the device malfunctions.

When measuring the shape of the measurement object as described above, the relative measurement value of the internal measurement plane relative to the measurement value of the external reference plane is calculated by comparing the data of the reference plane and the measurement plane previously stored in the measurement target DB, and thus the error range of the measurement value due to vibration or the like. There is an effect that allows for a more precise inspection by reducing the.

12 is an exemplary view for explaining a measuring method using a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention, since the outer surface height 210 of the measurement object 200 is a constant of the inner surface height The normality is calculated by comparing the outer surface height 160 and the inner surface height 150 calculated from the plurality of measured images taken by the light source passing through the measurement object, and calculating the relative value, and the distribution of the calculated relative values. Precise inspection is possible by comparing with the distribution of the stored standard range.

13 and 14 are image scanning results obtained through a measuring method using a three-dimensional side suit value using a camera according to an embodiment of the present invention. FIG. 13 is a 2D (Two-Dimentional) image representing two-dimensional measurement results. 14 is a 3D (Three-Dimentional) image representing the measurement result in three dimensions. In the above image, the last third image of the three measurement object images indicates that the uniformity or concaveness of the inner surface is inferior to a predetermined range, and it is easy to determine whether the measurement object is defective through the measurement result image. .

In the above described and illustrated with respect to preferred embodiments according to the present invention. However, the present invention is not limited to the above-described embodiment, and various modifications can be made by those skilled in the art without departing from the gist of the present invention attached to the claims. .

1 is a block diagram of a three-dimensional shape measuring device for measuring the shape of a certain measurement object using an interference fringe.

2 is a block diagram of a three-dimensional shape measuring device using a laser.

3 is an example of a measurement object to be measured using a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention.

4 is a measurement object assembly in which the measurement object is collected according to an embodiment of the present invention.

5 is a front view of the inspection system including a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention.

6 is an operating principle of the three-dimensional shape measuring unit according to an embodiment of the present invention.

7 is a front view of a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention.

8 is an operation of the light emitting unit of the three-dimensional shape measuring unit using a camera according to an embodiment of the present invention.

9 is an appearance of an inspection system including a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention.

10 is an exemplary view showing an internal operation of a head of a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention.

11 is a block diagram of a measurement control unit of a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention.

12 is an exemplary view for explaining a measuring method using a three-dimensional shape measuring unit using a camera according to an embodiment of the present invention.

FIG. 13 is a two-dimensional image scanning result obtained by using a three-dimensional shape measuring apparatus using a camera according to an embodiment of the present invention.

14 is a three-dimensional image scan result obtained by using a three-dimensional shape measurement apparatus using a camera according to an embodiment of the present invention.

** Description of symbols for the main parts of the drawing **

40: three-dimensional shape measuring unit 50: planar shape measuring unit

60: marking unit 110: light emitting unit

120: camera unit 130: reflecting unit

200: measuring object

Claims (16)

A light emitting unit which inclines and irradiates a line light source generated through at least one slit using a white light at a predetermined angle to a measurement object; A camera unit for collecting the reflected light from the light source irradiated by the light emitting unit and converting the reflected light into an electrical signal; And a stage unit which moves the measurement object in a sliding manner in the measurement area set between the light emitting unit and the camera unit. The method according to claim 1, A measurement target DB in which information about an appearance of the measurement target is stored; And a compensation unit for comparing the information of the measurement target DB with the information measured by the camera unit and compensating for the measured value according to the appearance information of the measurement target. The method of claim 2, wherein the compensation unit The information about the appearance stored in the measurement target DB is information about a reference plane, and the information measured by the camera unit is classified into a reference plane and a measurement plane, and the information of the reference plane is compared with the reference plane information stored in the measurement target DB. A three-dimensional shape inspection apparatus using a camera, characterized in that for compensating the measurement information of the measurement surface with a relative value. The method according to claim 1, And a reflection unit for reflecting the reflected light of the line light source irradiated by the light emitting unit to the camera unit. The method of claim 1, wherein the light emitting unit A light source unit irradiating a light source; A first slit for linearizing the light source of the light source unit; And a second slit for finely controlling the thickness of the line light source passing through the first slit. The method according to claim 1, The object to be photographed by the camera is classified into a reference plane and a measurement plane, and the relative value of the surface height of the reference plane and the measurement plane is calculated, and the result of the comparison is compared with a standard range of the stored relative value to determine whether the measurement object is defective. Three-dimensional shape inspection apparatus using a camera, characterized in that it further comprises a measurement control unit for determining. The method of claim 6, wherein the measurement control unit And a display unit for displaying the measured value of the measurement object and a determination of whether there is a failure. A loader unit for loading a cassette in which a measurement object assembly is loaded; Stereoscopic inspection unit for performing a three-dimensional shape inspection of the measurement object assembly; A plane inspection unit which performs a plane shape inspection of the measurement object assembly; A marking unit which displays a defective mark on the measurement object determined by the three-dimensional inspection unit or the planar inspection unit; An unload unit for unloading the cassette; The stereoscopic inspection unit may include: a light emitting unit configured to irradiate a linear light source generated through at least one slit with white light at a predetermined angle to a measurement object; A camera unit which collects the reflected light of the line light source irradiated by the light emitting unit and converts the reflected light into an electrical signal; And a stage unit for slidingly moving the object to be measured in the measurement area set between the light emitting unit and the camera unit. The method according to claim 8, wherein the three-dimensional inspection unit A measurement target DB in which information about an appearance of the measurement target is stored; And a compensation unit which compares the information of the measurement target DB with the information measured by the camera unit and compensates the measured value according to the appearance information of the measurement target. The method of claim 9, wherein the compensation unit The information about the appearance stored in the measurement target DB is information about a reference plane and the information measured by the camera unit is classified into a reference plane and a measurement plane to compare the reference plane information stored in the reference plane and the measurement target DB to measure the measurement plane. Inspection system including a three-dimensional shape inspection apparatus using a camera, characterized in that the information is compensated by a relative value. In the three-dimensional shape inspection method using a three-dimensional shape inspection apparatus including a light emitting unit for irradiating a light source, a camera unit for collecting the light source, a stage unit for moving the object to be measured in the measurement area set between the light emitting unit and the camera unit, a) irradiating the light source by tilting the line light source generated through at least one slit using white light at a predetermined angle to a measurement object; b) collecting, by the camera unit, the reflected light of the line light source irradiated by the light emitting unit and converting the reflected light into an electrical signal; and c) moving the stage unit in a sliding manner by the stage unit. The method according to claim 11, d) a measurement control unit for determining whether the measurement object is defective is further installed, and the measurement control unit compares the information on the appearance of the measurement object and the information measured by the camera unit in accordance with the appearance information of the measurement object Three-dimensional shape inspection method using a camera, characterized in that it further comprises the step of compensating the measured value. The method of claim 12, wherein step d) e) The pre-stored information about the appearance of the measurement object is information about a reference plane, and the measurement control unit classifies the information measured by the camera into a reference plane and a measurement plane, and relates to the information of the reference plane and the previously stored reference plane. Compensating the measurement information of the measurement surface by a relative value by comparing the information characterized in that the three-dimensional shape inspection method using a camera. The method according to claim 11, f) a reflecting unit is further provided between the light emitting unit and the camera unit, and the reflecting unit further includes reflecting the reflected light of the line light source irradiated by the light emitting unit to the camera unit. . The method of claim 11, wherein step a) g) irradiating a light source in the illumination of the light emitting unit; h) linearizing the light source by a first one of the slits; i) finely adjusting the thickness of the line light source passed through the first slit by the second slit among the slits. The method according to claim 11, j) a measurement control unit for determining whether the measurement object is defective is further installed, and the measurement control unit classifies the measurement object photographed by the camera unit into a reference plane and a measurement plane to determine a relative value of the surface height of the reference plane and the measurement plane. Comprising the calculation and comparing the result of the calculation with the standard range of the pre-stored relative value to determine whether or not the measurement object is defective.

Images