KR100930357B1 - Vibration-isolation table - Google Patents

Abstract

PURPOSE: A vibration isolation table is provided to decrease the vibration transferred to a target object of vibration isolation steadily by lowering the stiffness of a vibration isolation table by a buckling plate and a coil spring. CONSTITUTION: A vibration isolation table(10) contains a case(100) installed on the ground, a table(140) coupled to the upper part of the case to support a target object of vibration isolation, a connector coupled to the lower part of the table, a first vibration isolation device provided with a support installed to the bottom of the case, a coil spring supporting the connector elastically and an adjustment screw adjusting the support to be ascent and descent, and a second vibration isolation device provided with a buckling plate connected to the connector to provide elastic force, a coupling bracket coupled to one end of the buckling plate and fastened to the connector, a support bracket coupled to the other end of the buckling plate, and a shock absorbing pad fixed to the support bracket and contacted with the inner circumference of the case and offsetting displacement to control the compressive force transferred to the buckling plate when the buckling plate buckles.

Description

Vibration Control Table {VIBRATION-ISOLATION TABLE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration damping table, and more particularly, to a vibration damping table that is directly or indirectly attached to a vibration damping object to damp vibrations transmitted to the vibration damping object.

In the case of high-tech equipment such as semiconductor manufacturing equipment or medical equipment, high-precision nano-optical microscope, scanning probe microscope, atomic microscope, including national treasure cultural assets, paintings, and arts and crafts in museums and art galleries Assets should not be damaged by falling or falling. To this end, various anti-vibration measures have been taken recently.

For example, in order to remove the microscopic vibrations from the floor and maintain a constant position, an air spring type vibration damping table has been conventionally proposed.

However, in the case of using the air spring as a vertical spring in the conventional vibration damping table, there is a problem that the flexible spring in the vertical direction, while the rigid spring in the horizontal direction. In addition, in the case of the air spring type vibration damping table, the natural frequency can be realized around 2Hz, and the complexity of installation with peripheral devices including the orifice nozzle, the compressor, and the leveling valve, and the smooth operation and continuous performance due to the intake and exhaust of air are ensured. There are difficult drawbacks to this.

Recently, an active type air spring type vibration damping table has been proposed. However, due to structural limitations, the natural frequency remains around 1.5 Hz, and manufacturing costs increase.

Accordingly, the present invention reduces the elastic modulus of the spring by using the kinematic principle, that is, the buckling principle of the buckling plate to solve the disadvantage of the air spring type to minimize the natural frequency of the system to ultimately reduce the vibration transmitted to the vibration damping object It is to be reliably blocked.

In order to solve this problem, the case having a predetermined content; A table positioned on an upper side of the case to seat a vibration damping object; A connector coupled to the lower side of the table; First damping means including a pedestal installed on a bottom surface of the case, a vertical elastic member seated on an upper side of the pedestal, and elastically supporting the connecting body, and an adjusting member to adjust the pedestal to be elevated; And a coupling bracket fastened to the connecting member, a buckling plate having one end coupled to the coupling bracket, a support bracket coupled to the other end of the buckling plate, and fixed to the support bracket and in contact with an inner circumferential surface of the case. A vibration damping table is provided, comprising: a second vibration damping means including at least two buffer pads to offset displacement during buckling of the plate.

In addition, a vibration damping table is provided on the bottom of the case, the bearing housing having a bearing embedded therein, and further comprising a support plate having a sliding groove recessed downwardly to enable sliding of the bearing under the case.

According to the vibration damping table of the present embodiment configured as described above, even if vibration occurs, the stiffness of the vibration damping table is lowered by the buckling plate and the coil spring provided on the lower side of the table, thereby stably reducing the vibration transmitted to the vibration damping object.

Referring to the damping table according to a preferred embodiment of the present invention with reference to the accompanying drawings as follows.

The vibration damping table according to a preferred embodiment of the present invention is installed directly or indirectly under an exhibit, a cultural asset, a precision instrument, etc. (hereinafter referred to as a vibration damping object), so as to remove vibration generated by the vibration damping object, or from the bottom. It is used so that the vibration of is not transmitted to the vibration damping object.

As illustrated in FIGS. 1 to 5, the vibration damping table 10 according to an exemplary embodiment of the present invention is coupled to an upper side of the case 100 installed on the ground and supports the vibration damping object. Table 140.

The case 100 is formed in a cylindrical shape with an open top, and a first vibration damping means 110 is provided above the bottom surface of the case 100. Referring to the first vibration damping means 110 in detail, a pedestal 111 is provided in the upper center of the bottom surface of the case 100 so that the coil spring 114 is seated and coupled, and a vibration damping object is provided on the upper side of the pedestal 111. Coil spring 114 for reducing the vibration in the vertical direction is installed to elastically support the connecting body to be described later. The coil spring 114 is not only a means for supporting the vibration damping object placed on the table 140, but also made of a highly elastic shape memory alloy, which is elastic in the case of vibration, thereby providing a vertical direction to the vibration damping object. This effectively attenuates vibrations to the furnace.

In the center of the pedestal 111 is provided with an adjusting screw 115 to adjust the elongation and compression force of the coil spring 114 in the vertical direction so that the pedestal 111 can be elevated. The adjusting screw 115 penetrates from the bottom of the case 100 and is coupled to the pedestal 111, and the adjusting gear 116 is coupled to one end of the adjusting screw 115 protruding to the bottom of the case 100. In addition, a gear part 118 is provided at one end to be engaged with the adjusting gear 116, and the spring adjusting lever 117 is further provided to adjust the extension and compression force of the spring by elevating the pedestal 111 by rotating the adjusting gear 116. do.

At this time, the fixing bracket 120 is coupled to the bottom surface of the case 100 on one side of the gear 118 so as to adhere to the position where the gear 118 of the spring adjustment lever 117 engages with the adjustment gear 116.

On the other hand, any one portion of the pedestal 111 is formed with a guide groove 112, the bottom surface of the case 100 is inserted into the guide groove 112 corresponding to the guide pin for guiding the rise and fall of the pedestal 111 113 is installed vertically.

The table 140 has an upper surface formed flat so that an object can be seated, and a connecting body 141 is coupled by a fastening screw 143 at the center of the bottom of the table 140, and the second damping means is disposed laterally in such a connecting body. 150 is connected.

The second damping means 150 is connected to the connecting member 141 in substantially horizontal manner and is coupled to one end of the buckling plate 151 and the buckling plate 151 to impart an elastic force. The coupling bracket 154 fastened to the sieve 141, the support bracket 152 coupled to the other end of the buckling plate 151, and the support bracket 152 are fixed to the inner peripheral surface of the case 100 and buckled. A buffer pad 153 is included to control the compressive force transmitted to the buckling plate 152 by offsetting the displacement during buckling of the plate 152.

And the fastening block 165 is provided on the outside of the connecting body 141, the support 160 is fixed to the fixing member 166 at a lower distance to the lower side of the fastening block 165.

In addition, a rotary gear 142 is provided on the lower side of the connecting body 141, and when one side of the rotary gear 142 needs to modify the initial setting or setting state of the vibration damping table, the buckling plate can be adjusted manually. At least one lever 170 is preferably provided.

That is, when the circular buckling plate adjustment lever 170 is rotated, the gear part 171 formed on one side of the buckling plate adjustment lever 170 changes the load direction by the rotation in the vertical direction, and the changed load causes the collet-shaped block to be changed. By moving up and down to adjust the compressive force transmitted to the buckling plate (151).

Meanwhile, in the present embodiment, as illustrated in FIGS. 1 and 2, three second vibration damping means are disposed at an isometric angle of 120 ° with respect to the cylindrical case 100 to be perpendicular to the table 140. In case of displacement, the load is distributed to each other. In addition, the vibration transmitted to the vibration damping object by lowering the natural frequency by bringing the sum of the stiffness which resists the vertical vibration of the buckling plate 151 and the stiffness which resists the same vibration of the coil spring 114 to close to 0 is reduced. It has a structure that is attenuated.

In the accompanying drawings, it is shown that three second damping means having an equiangular angle are provided, and a support bracket 152 and a buffer pad 153 are correspondingly installed, and the support bracket 152 is attached to the case 100. Screwed together.

The buffer pad 153 fixed to the support bracket 152 may be made of an elastic material such as foamed urethane or rubber, and the buffer pad 153 is supported by being in contact with the inner circumferential surface of the case 100 and buckling plate when vibration occurs ( Buckling displacement of 151 is canceled so that the set natural frequency does not change.

However, since the elastic action of the shock absorbing pad has a non-linear characteristic, in order to compensate for this, the pair of slots 102 have a second vibration damping means in the case 100 to have elastic force in response to the bending motion of the buckling plate 151. It may be formed corresponding to each of the.

Slots 102 are formed in a pair spaced apart by a predetermined interval so as to sandwich the inner surface portion of the case 100 in contact with the above-described buffer pad 153, each slot 102 at one side of the case 100 It is formed extending upward to the upper opening of the case 100.

The surface of the case 100 in which the buffer pad 153 is contacted by the slot 102 may be elastically flown in the inner and outer directions of the case 100, and this action may be similar to that of the buffer pad 153 described above. In addition, the buckling displacement of the buckling plate 151 is stably canceled.

Meanwhile, in the accompanying drawings, an example in which the second vibration damping means 150 is installed at three places is illustrated, but the position and quantity may be freely selected in consideration of the size and shape of the entire vibration damping table or the weight or characteristics of the vibration damping object. Of course.

On the other hand, the above-mentioned buckling plate 151 and the coil spring 114 is a means for damping the vibration in the vertical direction of the damping object, and in the present embodiment, the third damping means for damping the vibration in the horizontal direction is It is further provided.

That is, the support plate 180 for supporting the case 100 is further provided below the case 100. At this time, a bearing housing 130 is installed on the bottom of the case 100, and the bearing 131 is slidably accommodated in the bearing housing 130. An elastic spring 132 is interposed in the bearing housing 130 to impart an elastic restoring force to the bearing 131.

In addition, a sliding groove 181 is formed on the upper surface of the support plate 180 to be concave with a predetermined curvature radius downward to allow the bearing 131 to be seated and slide.

At least one leveling screw 182 is preferably coupled to the bottom of the support plate 180 to adjust the horizontal state of the case 100 with respect to the ground. For example, in the present embodiment, three leveling screws 182 are arranged in the shape of an equilateral triangle, but the quantity and position thereof may be changed as necessary.

Referring to the damping table according to another embodiment of the present invention with reference to the accompanying drawings as follows.

Another embodiment of the present invention is generally the same as the above-described embodiment, the vibration damping table according to the present embodiment, as shown in Figures 6 to 9, the case 200 is installed on the ground, the case 200 It includes a rotating body 300 spaced apart from the upper side of) and a table 400 for supporting the vibration damping object.

The case 200 has a cylindrical shape with an open top. At least three or more leveling screws 210 may be coupled to the bottom of the case 200 to adjust the level or height of the case 200 with respect to the ground. However, the quantity and location may be changed as necessary.

Rotor 300 is formed in a ring shape rotatably installed on the upper side of the case 200, the case 200 so as not to interfere with the case 200 when rotating for the operation of the second vibration damping means 500 to be described later ) Is installed in a state spaced apart from the upper end of a predetermined height, the thread 201 is formed on the inner peripheral surface. At least one handle 310 may be provided on an outer circumferential surface of the rotating body 300 so as to be manually operated when the initial setting or setting state of the vibration damping table needs to be corrected.

The table 400 has an upper surface formed flat so that an object can be seated thereon, and a connecting body 410 protrudes from the bottom surface of the table 400 so that the second damping means 500 is connected thereto.

The vibration damping table of the present embodiment includes a first vibration damping means 110 connected longitudinally between the case 200 and the table 400 to attenuate the vibration transmitted to the vibration damping object, the table 400 and the rotating body 300. At least two or more second vibration suppression means 500 are connected in the transverse direction therebetween, the detailed description of the vibration suppression function by the first vibration suppression means 110 and the second vibration suppression means 500 is a preferred embodiment of the present invention. This can be replaced by the description in the example.

The configuration, the connection relationship, and the function of the first vibration suppressing means 110 may be understood as described in the above-described preferred embodiment of the present invention.

The second damping means 500 has a buckling plate 520 which is connected substantially horizontally to the connecting body 410 of the table 400 to impart an elastic force, and an L-shaped couple to the end of the buckling plate 520. The support bracket 510, and is fixed to the support bracket 510, and coupled to the inner peripheral surface of the case 200 includes a stretch guide block 530 for inducing the expansion and contraction of the buckling plate (520).

The damping function by the second damping means of the present embodiment including the buckling plate 520 can be understood by the description in the above-described embodiment, except for the parts that differ from the second damping means of the embodiment. The explanation is as follows.

The elastic induction block 530 is formed to protrude a predetermined height above the case 200, and a thread 531 is formed on the outer circumferential surface thereof so as to be engaged with the thread 301 of the rotating body 300. At this time, the elastic induction block 530 is tapered so that its thickness gradually decreases toward the upper side. Therefore, when the rotational body 300 rotates, the elastic induction block 530 meshed with the rotational body 300 may move in a horizontal direction to adjust the load transmitted to the buckling plate 520, and by adjusting the load. You can set the desired natural frequency.

6 and 7, in the present embodiment, three second damping means are formed at an isometric angle with respect to the connecting body 410, and the size, shape, or vibration damping object of the entire damping table. It does not differ significantly from the above-described embodiment in that the position and quantity of the second vibration damping means can be freely selected in consideration of the weight, the characteristics, and the like.

In addition, although not shown, in the present embodiment, the third vibration suppressing means of the above-described embodiment may further include a bearing housing in which the bearing is embedded and a support plate on which the sliding groove is formed. In this case, the aforementioned leveling in the present embodiment may be provided. Screw 210 is coupled to the bottom of the support plate. The configuration, the connection relationship, and the functions included in the third binary means may be replaced by the description in the above-described embodiment.

As described above, the vibration damping table according to the preferred embodiment of the present invention effectively attenuates the vibration transmitted to the vibration damping object by lowering the natural frequency to 0.5 Hz, and separates air from the vibration damping table of the conventional air spring method. No compressor or electrical equipment is required, which simplifies the overall configuration and provides vibration isolation performance of more than 95% even at a natural frequency of 2 Hz.

1 is a perspective view showing a vibration damping table according to an embodiment of the present invention.

2 is an exploded perspective view of the vibration damping table according to FIG. 1.

3 is an exploded perspective view of the second vibration isolating means according to FIG.

4 is a cross-sectional view taken along line “IV-IV” of FIG. 1.

5 is a bottom view of the case of the vibration damping table according to FIG. 1.

6 is a perspective view showing a vibration damping table according to another embodiment of the present invention.

7 is an exploded perspective view of the vibration damping table according to FIG. 6.

FIG. 8 is a sectional view taken along the line “VIII-VIII” of FIG. 6;

<Description of Symbols for Main Parts of Drawings>

100; Case 101; Longevity

102; Slot 110; First vibration damping means

111; Pedestal 112; Guide

113; Guide pin 114; Coil spring

115; Adjusting screw 116; Adjusting gear

117; Control lever 118; Gear

119; Handle 120; Fixed Bracket

130; Bearing housing 131; bearing

132; Elastic spring 140; table

141; Linkage 142; Rotary gear

143; Fastening Screw 150; Second vibration damping means

151; Buckling plate 152; Combined bracket

152; Support bracket 153; Buffer pad

160; Support 170; Control lever

171; Gear portion 172; handle

180; Support plate 181; Sliding groove

182; Leveling screw

200; Case 210; Leveling screw

300; Rotating body 301; Thread

310; Handle 400; table

410; Linker 500; Second vibration damping means

510; Support bracket 520; Buckling plate

530; Expansion guide block 531; Thread

Claims (11)

A case having a predetermined contents; A table positioned on an upper side of the case to seat a vibration damping object; A connector coupled to the lower side of the table; First damping means including a pedestal installed on a bottom surface of the case, a vertical elastic member seated on an upper side of the pedestal, and elastically supporting the connecting body, and an adjusting member to adjust the pedestal to be elevated; And A coupling bracket fastened to the connecting member, a buckling plate having one end coupled to the coupling bracket, a support bracket coupled to the other end of the buckling plate, and fixed to the support bracket and in contact with an inner circumferential surface of the case to allow the buckling plate to be connected. And a second vibration damping means made up of at least two buffer pads to offset displacement during buckling. The method according to claim 1, And a pair of slots in the case corresponding to each of the second damping means, respectively, having a pair of slots interposed therebetween so as to have an elastic force in response to the bending motion of the buckling plate. The method according to claim 1, And a buckling plate adjustment lever for adjusting the compression force of the buckling plate by raising and lowering the connecting body by rotating the rotary gear, provided with a rotary gear provided at the lower side of the connecting body, and a gear unit at one end to be coupled to the rotating gear. A vibration damping table characterized by the above. A case having a predetermined contents; A ring-shaped rotating body installed above the case; A table positioned above the rotating body and on which a vibration damping object is seated; A connector coupled to the lower side of the table; First damping means including a pedestal installed on a bottom surface of the case, a vertical elastic member seated on an upper side of the pedestal, and elastically supporting the connecting body, and an adjusting member to adjust the pedestal to be elevated; And Second damping means comprising a buckling plate having one end connected to the connecting body, a support bracket coupled to the other end of the buckling plate, and an elastic guide block having one end fixed to the inside of the case and the other end coupled to the support bracket. And a vibration dampening table comprising:. The method according to claim 4, The expansion guide block is formed to reduce the thickness toward the upper side, and a thread is formed on the outer peripheral surface, the vibration damping table, characterized in that the thread is formed on the inner peripheral surface of the rotating body to be correspondingly coupled. The method according to claim 4, At least one handle is provided on an outer circumferential surface of the rotating body. The method according to claim 1 or 4, A guide groove is formed in the pedestal, and a vibration damping table is installed on the bottom surface of the case in such a manner that the guide pin is inserted into the guide groove to guide the rise and fall of the pedestal. The method according to claim 1 or 4, The vertical elastic member is a vibration damping table, characterized in that the coil spring. The method according to claim 1 or 4, The adjustment member is provided with a control screw which is penetrated from the bottom surface of the case and coupled to the pedestal, a rotary gear coupled to the adjustment screw, and a gear portion at one end to be coupled to the rotary gear, thereby elevating the pedestal by rotating the rotary gear. A vibration damping table comprising: The method according to claim 1 or 4, The bottom surface of the case is provided with a bearing housing in which the bearing is embedded, the vibration damping table, characterized in that the lower side of the case is further provided with a support plate formed with a sliding groove recessed downwardly to enable the sliding of the bearing. The method according to claim 10, A vibration damping table, characterized in that a plurality of leveling screws are coupled to the bottom of the support plate.

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