KR100917241B1 - Spin-on anti-reflective coatings for photolithography - Google Patents

Abstract

The antireflective coating material for ultraviolet photolithography includes at least one pH tuning agent and at least one absorbent compound included in the spin-on material. Suitable absorbing compounds are those that absorb near wavelengths such as 365 nm, 248 nm, 193 nm, and 157 nm that can be used in photolithography. Suitable pH adjusting agents not only control the pH of the final spin-on composition but also affect the chemical performance and properties, mechanical performance, and structural composition of the final spin-on composition that is part of the layered material, electronic device, or semiconductor device, resulting in final spin-on Make the composition more compatible with the resist material bound thereto. More specifically, the pH adjuster strongly influences the polymer properties, structural composition and spatial orientation that contribute to improving the surface properties of the antireflective coating for optimal resist performance. In other words, pH adjusters that simply adjust the pH of the spin-on material without affecting the mechanical properties and structural composition of the spin-on composition or bonded resist material are not considered herein. Methods of making absorbing and pH controlling spin-on materials include combining at least one pH adjusting agent and at least one organic absorbing compound having at least one silane reactant prior to synthesis of the spin-on materials and compositions. .

 Photolithography, Anti-Reflection, Coating

Description

Spin-on anti-reflective coating for photolithography {SPIN-ON ANTI-REFLECTIVE COATINGS FOR PHOTOLITHOGRAPHY}

The present invention relates generally to spin-on glass materials, and more particularly to light-absorbing spin-on glass materials for use as antireflective layers in photolithography.

In order to meet the requirements for faster performance, the characteristic dimensions of the appearance of integrated circuit elements have been gradually reduced. The manufacture of devices with smaller appearance sizes introduces new problems in many of the processes conventionally used in semiconductor manufacturing. One of the most important semiconductor manufacturing processes is photolithography.

Line width variations in the pattern generated by photolithography can result from optical interference from light reflecting off the underlying layer on the semiconductor wafer. In addition, variations in photoresist thickness due to the topography of the underlying layer cause line width variations. Anti-reflective coatings (ARC) applied under the photoresist layer have been used to prevent interference from reflection of the irradiation beam. In addition, antireflective coatings partially planarize the wafer topography.

Organic polymer films, in particular those absorbing at the i-line (365 nm) and g-line (436 nm) wavelengths for exposing photoresist and at the recently used 157 nm, 193 nm and 248 nm have been adopted or tested as antireflective coatings and have. However, the fact that organic ARCs share many chemical properties with organic photoresists can limit the process sequences available. Moreover, ARCs including organic and inorganic ARCs can be mixed with photoresist layers. Organic and inorganic ARCs can be mixed with the photoresist layers if they are not sufficiently baked or cured.

One solution to avoid mixing is to inject thermosetting binders as an additive component of organic ARCs, as described, for example, in US Pat. No. 5,693,691 to Flame et al. In addition to dyes, additional additives such as wetting agents, adhesion enhancers, preservatives and plasticizers, as described in US Pat. No. 4,910,122, optionally to Arnold et al. Can be included. Although these aforementioned patents may address some problems of mixing, the problem of lack of 86- to 90-degree uniformity on resist edges due to the bonded ARC layer is not addressed in the prior art.

The photoresist and antireflective coatings can influence each other so that once the pattern is developed into the resist, the chemical properties of the antireflective coating and / or resist material can lead the resist to "fall over". In other words, the patterned resist sidewalls cannot maintain an angle of about 90 degrees to the antireflective coating after photoresist development. Instead, the resist will have an angle of 120 degrees or 80 degrees with respect to the antireflective coating. This imperfection indicates that photoresist and antireflective coatings are not necessarily mixed chemically, physically or mechanically.

Another class of materials that can be used as antireflective layers are spin-on-glass (SOG) compositions containing dyes. Yaw et al., U.S. Patent 4,587,138, disclose dyes such as basic yellow # 11 that are mixed with spin-on glass by about 1% by weight. US Pat. No. 5,100,503 to Alman et al. Discloses crosslinked polyorganosiloxanes containing inorganic dyes such as TiO ₂ , Cr ₂ O ₇ , MnO ₄ , or ScO ₄ and adhesion promoters. Alman also teaches that spin-on-glass compositions also serve as planarization layers. However, the spin-on glass, dye bonds disclosed to date are not suitable for exposure to deep ultraviolet light, in particular 248 and 193 nm light sources, which have been used to produce devices with small appearance sizes. Moreover, not all dyes may be included in any spin-on-glass compositions. In addition, although these ARCs are chemically different from the aforementioned organic ARCs, they are based on the chemical, physical and mechanical incompatibility of the ARC layer and the resist layer, which is a common problem when attempting to combine resist materials and antireflective coatings. After the developed resist layer is developed, a "polling over" problem may still occur.

Thus, it is possible to a) absorb strongly and consistently in the ultraviolet spectral region, b) prevent the resist material from extending out of the intended resist line and "polling over" and c) an absorption spin-on- impermeable to the photoresist developer. Glass antireflective coatings and lithographic materials and the described SOG antireflective coating production method would be desirable to enhance the production of layered materials, electronic devices, and semiconductor devices.

The antireflective coating material for ultraviolet photolithography includes at least one pH tuning agent and at least one organic absorbent compound included in the spin-on-inorganic or spin-on glass (SOG) material.

Spin-on materials include inorganic compounds such as silicon based, gallium based, arsenic based, boron based or combinations of these inorganic elements and materials. Some contemplated spin-on glass materials may include methylsiloxane, methylsilsesquioxane, phenylsiloxane, phenylsilsesquioxane, methylphenylsiloxane, methylphenylsilsesquioxane, silicate polymers, and mixtures thereof. As used herein, the group known as the "spin-on-glass material" is also a siloxane polymer, a _{hydrogensiloxane} polymer of the general formula (H _{0 -1.0} SiO _{1 .5-2.0} ) _x and a general formula wherein X is greater than 4 (HSiO _{1 .5)} and a hydrochloride gensil silsesquioxane polymer of _X. Hydrogensilsesquioxanes and alkoxyhydridosiloxanes or hydroxyhydridosiloxanes are also included. _Spin -on-glass materials include organohydridosiloxane polymers of the general formula (H _{0 -1.0} SiO _{1 .5-2.0} ) _n (R _{0 -1.0} SiO _{1 .5-2.0} ) _m and the general formula (HSiO _{1). .5) n (RSiO 1 .5)} m of organo hydroxy Lido chamber sesquioleate further comprise siloxane polymer, and wherein m is greater than zero and the sum of m and n is greater than about 4, R is alkyl or aryl ( aryl).

Absorbing compounds suitable for incorporation into spin-on-glass materials are strongly absorbed at wavelengths below 375 nm or about 260 nm. In particular, suitable absorbing compounds are around wavelengths of 248 nm, 193 nm, 157 nm or other ultraviolet wavelengths such as 365 nm that can be used in photolithography. Chrophores of suitable mixtures generally have at least one benzene ring, and in instances where two or more benzene rings are present, these rings may or may not be fused. Mixable absorbent compounds have an accessible reactor attached to a chromophore, wherein the reactor has a substitution with a hydroxyl group, an amine group, a carboxylic acid group, and a silicon bonded to one, two, or three alkoxy groups or halogen atom substituents It may include a silyl group. The reactors may be directly attached to the chromophore or may be attached to the chromophore via the linkage of a hydrocarbon bridge or oxygen ring. Chromophores may also include polymers or silicon-based compounds similar to those used to form spin-on glass materials.

A pH adjuster is added to the mixture of the organic absorbing compound and the spin-on material in part to adjust the pH of the final spin-on composition so that the final spin-on composition is more compatible with the binding resist layer or other bonded layers. , Substance or solution. However, pH regulators not only control the pH of the final spin-on composition, but also affect the chemical performance and properties, mechanical performance, and structural composition of the final spin-on composition that is part of the multilayer material, electronic device, or semiconductor device, resulting in a final spin-on. It is to be understood that the on composition makes it more compatible with the resist material bound thereto. More specifically, the pH adjuster strongly influences the polymer properties, structural composition and spatial orientation, which contributes to the improvement of the surface properties of the antireflective coating for optimal resist performance. In other words, pH adjusters that simply adjust the pH of the spin-on material without affecting the mechanical properties and structural composition of the spin-on composition or bonded resist material are not considered in the present invention.

According to one aspect of the invention, a method of synthesizing absorbent spin-on compositions is provided. Spin-on materials are generally triethoxysilane, tetraethoxysilane, methyltriethoxysilane, dimethyldiethoxysilane, tetramethoxysilane, methyltrimethoxysilane, trimethoxysilane, dimethyldimethoxysilane, It is synthesized from silane and silicone-based reactants such as phenyltriethoxysilane, phenyltrimethoxysilane, diphenyldiethoxysilane, and diphenyldimethoxysilane. However, gallium, arscenic, germanium, boron and similar atoms and materials are used in conjunction with silicon atoms or as sole atomic materials to produce spin-on materials. Halosilanes, in particular chlorosilanes, are also used as silane reactants.

The process for preparing the absorbent spin-on composition may comprise an acid / water mixture, such as at least one inorganic composition, at least one miscible organic absorbent compound, at least one pH adjuster, a nitric acid / water mixture, to form a reaction mixture, And combining at least one solvent; And refluxing the reaction mixture to form an absorbent spin-on composition. The formed spin-on composition is then diluted with at least one solvent to provide a coating solution that produces films of various thicknesses. The pH adjusting agent can be added during the reflux step or after the reflux step and can optionally be added.

In another method of making an absorption spin-on composition, at least one inorganic composition, at least one miscible organic absorption composition, at least one pH adjuster and at least one solvent may be combined to form a reaction mixture. The reaction mixture is then refluxed to form an absorbent spin-on composition. The formed spin-on composition is diluted with at least one solvent to provide a coating solution that produces films of varying thickness. The pH adjusting agent in this method may be a variant of the conventional acid / water mixture in that other acids may be added, less acid may be added or more water may be added. However, despite being the pH regulator of choice, the basic principle that pH is not only affected by the pH regulator but also the chemical, mechanical and physical properties of ARC are affected, resulting in more compatible resist / ARC bonds.

In another aspect of the invention, an absorbent spin-on composition is produced that includes at least one silicon-based compound, at least one blendable organic absorbent compound that absorbs light of wavelengths less than about 375 nm, and a pH adjuster. Further provided are absorbent spin-on compositions, wherein at least one of the silicon-based compounds or at least one of the blendable organic absorbent compounds comprises an alkyl group, an alkoxy group, a ketone group or an azo group.

According to another aspect of the invention, spin-on compositions are provided comprising absorbing compounds of the chemical class, including 9-anthracene carboxy-alkyl trialkoxysilane. The method of synthesizing any one of the 9-anthracene carboxy-alkyl trialkoxysilanes comprises combining 9-anthracene carboxylic acid, chloroalkyltrialkoxysilane, triethylamine and a solvent to form a reaction mixture; Refluxing the reaction mixture; Cooling the refluxed reaction mixture to form a precipitate and a residual solution; And filtering the residual solution to form a liquid 9-anthracene carboxy-alkyl trialkoxysilane.

According to the invention, it is possible to a) absorb strongly and consistently in the ultraviolet spectral region and b) prevent the resist material from extending out of the intended resist line and preventing "polling over" and c) an absorption spin impermeable to the photoresist developer. An on-glass antireflective coating and lithographic material and the SOG antireflective coating material described can be obtained.

The antireflective coating material for ultraviolet photolithography includes at least one pH adjusting agent and at least one organic absorbing compound included in the spin-on inorganic or spin-on-glass (SOG) material. Absorbent spin-on compositions are dissolved in a suitable solvent to form a coating solution and applied to various layers of materials in the manufacture of multilayer materials, electronic devices, and semiconductor devices. Absorption spin-on antireflective coatings are designed to be easily integrated in existing multilayer materials, electronic devices, and semiconductor manufacturing processes. Some properties that facilitate integration include a) developer resistance b) thermal stability during standard photoresist processes, and c) selective removal of underlying layers.

Spin-on material

Spin-on materials contemplated include inorganic compounds such as silicon-based, gallium-based, germanium-based, arsenic-based, boron-based compounds and combinations thereof. As used herein, the phrases "spin-on material", "spin-on organic material", "spin-on composition" and "spin-on inorganic composition" may be used interchangeably and rotate on a substrate or surface. Reference is made to the above solutions or compositions which may be employed. The phrase "spin-on-glass materials" refers to "spin-on inorganic materials" in that spin-on glass materials refer to the spin-on material in whole or in part comprising silicon-based compounds and / or polymers. It is further considered that it means a subgroup of. Examples of silicone compounds include siloxane mixtures such as methylsiloxane, methylsilsesquioxane, phenylsiloxane, phenylsilsesquioxane, methylphenylsiloxane, methylphenylsilsesquioxane, silazane polymers, silicate polymers and mixtures thereof. Include. A silazane polymer contemplated is perhydrosilazane, which has a "transparent" polymer backbone to which chromophores can be attached.

As used herein, the phrase "spin-on-glass material" are also represented by the general formula (HSiO _{1 .5) x} with, the siloxane polymer and a block polymer represented by the general formula (H _{0 -1.0} SiO _{1.5 -2-0} ) _x 's _{hydrogensiloxane} polymer and hydrogensilsesquioxane polymers, wherein X is greater than about 4. Also included are copolymers of hydrogensilsesquioxane and alkoxyhydridosiloxanes or hydroxyhydridosiloxanes. Spin-on-glass materials include _{organohydridosilsesquioxane} polymers of the general formula (H _{0 -1.0} SiO _{1.5 -2.0} ) _n (R _{0 -1.0} SiO _{1.5 -2.0} ) _m and general formula ( _{HSiO 1 .5) n (RSiO 1} .5) m of organo hydroxy Lido silsesquioxane polymer further comprises, where m is greater than zero and the sum of m and n is greater than about 4, R is alkyl or Aryl. Some useful organohydridosiloxane polymers have a sum of n and m of about 4 to about 5000, wherein R is a C ₁ -C ₂₀ alkyl group or a C ₆ -C ₁₂ aryl group. Organohydridosiloxanes and organohydridosilsesquioxane polymers are optionally indicated spin-on-polymers. Some specific examples include alkylhydridosiloxanes such as methylhydridosiloxanes, ethylhydridosiloxanes, propylhydridosiloxanes, t-butylhydridosiloxanes, phenylhydridosiloxanes; And alkyl hydrides such as methylhydridosilsesquioxanes, ethyl hydridosilsesquioxanes, propylhydridosilsesquioxanes, t-butylhydridosilsesquioxanes, phenylhydridosilsesquioxanes Lidososilsessiloxanes, and combinations thereof.

Absorbent compound

Many naphthalene-, phenanthrene-, and anthracene-based compounds absorb significantly at 248 nm and below. Benzene-based compounds used here in the same way as phenyl-based absorb significantly at wavelengths shorter than 200 nm. These naphthalene-, anthracene-, phenanthrene- and phenyl-based compounds are often referred to as dyes, while the term absorbent compound is used in this specification. Because the absorption of these compounds is not limited to wavelengths in the visible region of the spectrum. However, not all such absorbent mixtures can be mixed into the spin-on material for use as antireflective coating materials. Absorbing compounds suitable for use in the present invention have a definable absorption peak centered around wavelengths such as 248 nm, 193 nm, 157 nm, or near ultraviolet wavelengths such as 365 nm that can be used for photolithography. Preferred "definable absorption peaks" are those peaks having a width of at least 1 nm, where the width is calculated by methods known in the photolithography art. In a more preferred embodiment, the definable absorption peak is at least 5 nm wide. In a still more preferred embodiment, the definable absorption peak is at least 10 nm wide.

Chromophores of suitable absorbing compounds generally have at least one benzene ring, and in the case where there are two or more benzene rings, the rings may or may not be fused. Mixable absorbent compounds have accessible reaction groups attached to the chromophore, wherein the reactors are hydroxyl groups, amine groups, carboxylic acid groups, and one, two, or three " departures such as alkoxy groups or halogen atoms. Substituted silyl groups with silicon bonded to a "leaving group". Ethoxy or methoxy groups or chlorine atoms are often used as leaving groups. Preferred reactors include silicon alkoxy, silicon dialkoxy and silicon trialoxy groups, such as silicon ethoxy, silicon diethoxy, silicon triethoxy, silicon methoxy, silicon dimethoxy, and silicon trimethoxy groups, and chlorosilyl, Halosilyl groups such as dicrolosilyl, and trichlorosilyl groups.

The reactors may be directly attached to the chromophore, for example as in phenyltriethoxysilane, or the reactors may be attached to the chromophore via a hydrocarbon bridge or a linkage of an oxygen ring, for example as in 9-anthracene carboxy-alkyl trialkoxysilane. The inclusion of silicontrialkoxy on the chromophore has been found to be particularly beneficial in enhancing the stability of absorbent SOG films. Other useful absorbing compounds are these mixtures comprising azo groups, -N = N-, and accessible reactors, especially those containing azo linking benzene rings when absorption around 365 nm is needed in certain applications. Azo groups may be included as part of straight-chain molecules, ring molecules or hybrid straight-chain / ring molecules.

The absorbent mixture may be included in the gaps in the spin-on material matrix. The absorbent compound may be chemically bound to the spin-on material or polymer. In some contemplated embodiments, the mixable absorbent mixtures form a bond with the spin-on material backbone or polymer backbone through accessible reactors.

Spin-on compositions and materials include silicon-based compounds and blendable organic absorbing compounds that absorb light at wavelengths up to about 375 nm. Moreover, in other embodiments, at least one of the silicon-based compound or the miscible organic absorbent compounds comprises at least one alkyl group, alkoxy group, ketone group or azo group.

Examples of absorbent mixtures suitable for use in the present invention are anthrabic acid (1), 9-anthracene carboxylic acid (2), 9-anthracene methanol (3), 9-anthracene ethanol (4), 9-anthracene propanol (5), 9-anthracene butanol (6), alizarin (7), quinizarine (8), plymulin (9), 2-hydroxy-4- (3-triethoxysilylprooxy) -diphenylketone (10), 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone (11), 2-hydroxy-4- (3-tributoxysilylpropoxy) -diphenylketone (12), 2-hydroxy-4- (3-tripropoxysilylpropoxy) -diphenylketone (13), rosolic acid (14), triethoxysilylpropyl-1, 8-naphthalimide (15 ), Trimethoxysilylpropyl-1, 8-taphthalimide (16), tripropoxysilylpropyl-1, 8-naphthalimide (17), 9-anthracene carboxy-methyl triethoxysilane (18), 9-anthracene carboxy-ethyl triethoxysilane (19), 9-anthracene carboxy-butyl triethoxysilane (20), 9-anthracene Carboxy-propyl triethoxysilane (21), 9-anthracene carboxy-methyl trimethoxysilane (22), 9-anthracene carboxy-ethyl tributoxysilane (23), 9-anthracene carboxy-methyl tripropoxysilane ( 24), 9-anthracene carboxy-propyl trimethoxysilane (25), phenyltriethoxysilane (26), phenyltrimethoxysilane (27), phenyltripropoxysilane (28), 10-phenanthrene carboxy- Methyl triethoxysilane (29), 10-phenanthrene carboxy-ethyl triethoxysilane (30), 10-phenanthrene carboxy-methyl trimethoxysilane (31), 10-phenanthrene carboxy-propyl triethoxysilane (32), 4-phenylazophenol, (33), 4-ethoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (34), 4-methoxyphenylazobenzene-4-carboxy-ethyl triethoxysilane (35), 4-ethoxyphenylazobenzene-4-carboxy-propyl triethoxysilane (36), 4-butoxyphenylazobenzene-4-carboxy-propyl triethoxy Column (37), 4-methoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (38), 4-ethoxyphenylazobenzene-4-carboxy-methyl triethoxysilane (39), 4-methoxyphenyl Azobenzene-4-carboxy-ethyl triethoxysilane (40), 4-methoxyphenylazobenzene-4-carboxy-propyl triethoxysilane (41), and combinations thereof. The chemical formulas of the absorbing compounds (1-41) are shown in Figures 1A-1F. For example, 9-anthracene carboxy having a combination of 9-anthracene methanol (3), 2-hydroxy-4- (3-triethoxysilylprooxy) -diphenylketone (10), and rosolic acid (14) Useful results have been obtained with -methyl triethoxysilane (18), and petyltriethoxysilane (26). However, it is to be understood that the above list of specific compounds is not an exhaustive list, and that the compounds considered and preferred may be selected from chemical compound classes comprising these specific compounds.

Absorbent compounds 1-25 and 29-41 are commercially available, for example, from Aldrich Chemical Company (Milwaukee, WI). 9-anthracene carboxy-alkyl trialkoxysilanes are synthesized using the esterification process as described in the Examples section below. Absorbent compounds 26-28 are commercially available from Gerest Corporation (Tulitown, Pa.). Examples of phenyl-based absorbent compounds other than the absorbent compounds (26-28), most of which are commercially available from Gerest, Inc., are silicone-based attached to substituted phenyl or phenyl rings such as methylfetyl, chlorophenyl, and chloromethylphenyl It includes a structure having reactors. Particular phenyl-based absorbent compounds include, for example, phenyltrimethoxysilane, benzyltrichlorosilane, chloromethylphenyltrimethoxysilane, phenyltrifluorosilane. Again, with a few examples, diphenyl silanes comprising one or two "leaving groups" such as diphenylmethylethoxysilane, diphenyldiethoxysilane, and diphenyldichlorosilane are suitable mixed absorbent compounds. . Alkoxybenzoic acids including methoxybenzoic acid can also be used as absorbing compounds.

A general method of synthesizing 9-anthracene carboxy-alkyl trialkoxysilane compounds comprises using chloromethyl trialkoxysilane and 9-anthracene carboxylic acid as reactants. Specifically, the method for synthesizing 9-anthracene carboxy-methyl triethoxysilane (18) uses chloromethyl triethoxysilane and 9-anthracene carboxylic acid (2) as reactants. These reactants are combined with triethylamine and methylisobutylketone (MIBK) previously dried on 4Å molecular sieves to form a reaction mixture, which is heated to reflux for about 6 hours to 10 It was refluxed for hours. After reflux, the reaction mixture is cooled for one night resulting in a large amount of solid precipitate. The residual solution is roto-evaporated, filtered through a silica gel column and second roto-vaporized to yield 9-anthracene carboxy-methyl triethoxysilane (18), a citrus oil liquid. Can be purified. This method classifies 9-anthracene carboxy-alkyl trialkoxysilanes including 9-anthracene carboxy-ethyl triethoxysilane, 9-anthracene carboxy-propyl trimethoxysilane, and 9-anthracene carboxy-propyl triethoxysilane. This is very important because it is suitable for use to produce any compound within.

pH  Regulator

The pH adjuster is a compound, substance or solution added to the mixture of organic absorbing compound and spin-on substance to adjust the pH of the final spin-on composition. Thus, it is compatible or more compatible with any selected resist material, including having absorption peaks around 365 nm, 248 nm, 193 nm and 157 nm.

However, the pH regulator not only regulates the pH of the final spin-on composition but also affects the chemical performance and properties, mechanical performance and structural composition of the final spin-on composition that is part of the layered material, electronic device or semiconductor device, resulting in a final spin-on. It is to be understood that the on composition makes it more compatible with the resist material bound thereto. More specifically, the pH adjuster strongly influences the polymer properties, structural composition and spatial orientation, which contributes to the improvement of the surface properties of the antireflective coating for optimal resist performance. In other words, pH adjusters that simply adjust the pH of the spin-on material without affecting the mechanical properties and structural composition of the spin-on composition or bonded resist material are not considered herein.

The pH regulator contemplated must perform two separate and sometimes related functions: a) affecting the pH of the composition to which the regulator is added; b) on the mechanical performance and / or structural composition of the spin-on composition, which may be referred to as strongly affecting polymer properties, structural composition and spatial orientation resulting in an improvement in the surface properties of the antireflective coating for optimal resist performance. Affecting.

The pH adjusting agent contemplated is partially designed to influence the pH of the composition to be added. Possible types of pH adjusting agents include a) any suitable acid or base solution, compound, and / or component and / or b) any suitable strength or concentration of acid or base solution, compound and / or component. This collection of suitable pH “influencers” is a larger collection of compounds from which the ultimate pH adjuster is selected. This is because the pH "affectant" should be able to make the final spin-on composition compatible or more compatible while influencing the mechanical performance and / or structural composition of the final spin-on composition. For example, this means that the pH adjuster selected is designed to match the solubility parameter, molecular weight, melting point or some other physical property of the spin-on material and organic absorption compounding mixture. In other words, although the pH adjuster performs the first function of influencing the pH of the mixture, the pH adjuster and the mixture of the spin-on material and the organic absorbing compound may be physically mixed depending on the desired physical properties. In a preferred embodiment, preferred physical properties are solubility parameters or molecular weights. In a more preferred embodiment, preferred physical properties are solubility parameters.

pH adjusters are also believed to affect mechanically and structurally the performance and properties of resist material / ARC bonds. For example, the pH controlled spin-on composition is applied to the substrate or multilayer material, and then the resist material is applied to the spin-on composition. When the resist material is exposed and subsequently developed, it will have an angle of 85-90 degrees with respect to the spin-on material (development line. In other words, the resist material does not "fall-over" onto the spin-on composition. Instead, it will have a useful development line: If the spin-on composition is not pH controlled, the resist material may "fall over" onto the spin-on composition after etching, which is apparently resist material and / or multilayer This is where the pH controlled spin-on composition affects the mechanical structural integrity of the final spin-on composition and the compatibility of resist material / ARC bonds. As used herein, the term "bonding Or "bond" means that the two materials or compositions are next to each other on top of each other at the point where they are physically, mechanically and / or chemically bonded to one another. All.

Examples of some suitable pH adjusting agents include, but are not limited to, zi-aminoalkyltrialkoxysilanes, especially zi-aminopropyltriethoxysilanes (APTF or APTEOS); Oxides and alkoxides such as sodium alkoxides, potassium alkoxides, potassium hydroxide; Hydrogen halides such as hydrogen bromide; TMAH; Amine-based oligomers, including oligomers with inorganic atoms such as silicon, and various molar concentrations of amine classes such as combinations thereof. Considered molar concentrations of the pH adjuster include pure, 10 mol, 1.0 mol, 0.1 mol and 0.01 mol concentrations, depending on the pH adjuster selected for the resist material.

Resist materials contemplated include any photolithographic resist materials, including those having wavelength ranges around 157 nm, 193 nm, 248 nm and 365 nm. The main reason for the wide range of resist materials is that pH adjusters can match any photolithographic resist material with the antireflective coating and make them compatible with each other. Some examples of photolithographic resist materials contemplated are acrylate-based resist materials, epoxy-based chemically amplified resists, fluoropolymer resists, which are particularly useful when considering 157 nm absorption wavelengths, poly (norbornene-anhydride) Acid) alternating co-polymers, polystyrene systems and diazonaphthoquinone / novolak resists.

Manufacturing method

According to another aspect of the present invention, a method of synthesizing absorbent spin-on compositions described herein is provided. Spin-on materials generally include, for example, triethoxysilane (HTEOS), tetraethoxysilane (TEOS), methyltriethoxysilane (MTEOS), dimethyldiethoxysilane, tetramethoxysilane (TMOS), methyltrimeth Various, including methoxysilane (MTMOS), trimethoxysilane, dimethyldimethoxysilane, phenyltriethoxysilane (PTEOS), phenyltrimethoxysilane (PTMOS), diphenyldiethoxysilane, and diphenyldimethoxysilane It is synthesized from silane reactants. However, gallium, arscenic, germanium, boron and similar atoms and materials can also be used with silicon atoms or as the sole atomic material to produce spin-on materials.

Trichlorosilane, methyltrichlorosilane, ethyltrichlorosilane, phenyltrichlorosilane, tetrachlorosilane, dichlorosilane, methyldichlorosilane, dimethyldichlorosilane, chlorotriethoxysilane, chlorotrimethoxysilane, chloromethyltrier Halosilanes silane reactants including chlorosilanes such as oxysilane, chloroethyltriethoxysilane, chlorophenyltriethoxysilane, chloromethyltrimethoxysilane, chloroethyltrimethoxysilane, and chlorophenyltrimethoxysilane Also used as.

Generally, to produce absorbent spin-on compositions, absorbent compounds such as absorbent compounds 1-41 or combinations thereof are combined with silane reactants during the synthesis of SOG materials. The pH adjuster may also be combined with the silane reactants during the synthesis of the SOG material or once the synthesis is complete.

One contemplated method of preparing the absorbent spin-on composition is to form at least one inorganic composition, at least one miscible organic absorbent compound, at least one pH regulator, acid / water to form a reaction mixture. Combining an acid / water mixture, such as a mixture, and at least one solvent; And refluxing the reaction mixture to form an absorbent spin-on composition. The formed spin-on composition is then diluted with at least one solvent to provide a coating solution that produces films of various thicknesses. The pH adjusting agent may optionally be added during or after the reflux step.

In another contemplated method of preparing an absorption spin-on composition, at least one inorganic composition, at least one blendable organic absorption composition, at least one pH adjuster and at least one solvent can be combined to form a reaction mixture. have. The reaction mixture is then refluxed to form an absorbent spin-on composition. The refluxed spin-on composition is diluted with at least one solvent to provide a coating solution that produces films of varying thickness. The pH adjusting agent in the present method may also be a modification of the conventional acid / water mixture in that other acids may be added, less acid may be added or more water may be added. However, despite the pH regulator selected, the basic principle that the pH is not only influenced by the pH regulator but also the chemical, mechanical and physical properties of ARC, which results in more compatible resist / ARC bonds, remains the same.

More specifically, for example, silane reactants such as HTEOS or TEOS and MTEOS, or TMOS and MTMOS; Or optionally at least one absorbent compound such as tetrachlorosilane and methyltrichlorosilane, absorbent compound (1-41); At least one pH adjusting agent such as APTF; A solvent or combination of solvents; And a reaction mixture comprising an acid / water mixture is formed in the reaction vessel. Suitable solvents include acetone, 2-propanol, and other simple alcohols, ketones and esters such as 1-propanol, MIBK, propoxypropanol, and propyl acetate. For example, the acid / water mixture is nitric acid and water. Other protic acids or acid anhydrides such as acetic acid, formic acid, phosphoric acid, hydrochloric acid or other acetic anhydride are optionally used in the acid mixture. The resulting mixture is refluxed for about 1 to 24 hours to produce an absorbent spin-on solution. As mentioned above, the pH adjusting agent may be added during or after the reflux step, depending on the resist material selected. In addition, as noted above, the acid concentration and / or strength and water concentration in the acid / water mixture may be varied to be pH adjusters depending on the resist material selected for the particular multilayer material, electronic device or semiconductor device application.

The absorbing spin-on material can be diluted with a suitable solvent to obtain coating solutions that produce films of various thicknesses. Suitable diluent solvents include acetone, 2-propanol, ethanol, butanol, methanol, propylacetate, ethyl lactate, and propylene glycol propyl ether, commercially referred to as propasol-P. High boiling point dilution solvents such as ethyl lactate and propylene glycol propyl ether have been found to be beneficial. High boiling point solvents are believed to reduce the likelihood of formation of bubble film defects. In contrast, lower boiling point solvents are trapped under the crosslinked top layer of the film, thus creating voids when removed during the baking process step. Additional solvents useful in the present invention include ethylene glycol dimethyl ether, alternatively named glyme, anisole, dibutyl ether, dipropyl ether, propylene glycol methyl ether acetate, and pentanol . Optionally, a surfactant such as product FC430 provided by 3M (Minneapolis, MN) or product megaface R08 provided by DIC (Japan) can be added to the coating solution. The coating solvent is about 0.5 to 20 weight percent polymer. Prior to use, the coating solvent is filtered by standard filtration techniques.

According to a second method of forming absorption spin-on materials, the method comprises at least one silane reactant, at least one absorbent compound such as absorbent compound (1-41), at least one pH adjuster, and a solvent or combination of solvents The reaction mixture is formed in the reaction vessel. The reaction mixture is heated to reflux and refluxed for about 1 to 24 hours. Silane reactants and solvents are as described in the first method above. As mentioned above, the acid / water mixture is added to the reaction mixture during stirring. The resulting mixture is heated to reflux and refluxed for about 1 to 24 hours to produce an absorption and pH controlled spin-on material. The absorbing spin-on material is diluted and filtered as described above to form a coating solution. Again, as described above, the pH adjusting agent may be added during or after the first reflux step.

The method for forming the absorbing organohydridosiloxane material comprises forming a mixture of both a nonpolar and a polar solvent and a dual phase solvent comprising a phase transfer catalyst; Adding at least one organotrihalosilane, hydridotrihalosilane; Adding at least one pH adjusting agent and at least one absorbing compound, such as absorbing compounds 1-41, to provide a phase reaction mixture therefrom; And reacting the dual phase reaction mixture for 1 to 24 hours to produce an absorbing organohydridosiloxane polymer. Phase transfer catalysts include, but are not limited to, tetrabutylammonium chloride and benzyltrimethylammonium chloride. Exemplary nonpolar solvents include, but are not limited to, halogen solvents such as pentane, hexane, heptane, cyclohexane, benzene, toluene, xylene, carbon tetrachloride, and mixtures thereof. Useful polar solvents include water, alcohols, and alcohol and water mixtures. The absorbent polymer solution is diluted and filtered as described above to form a coating solution.

Applications

Absorption and pH controlled spin-on coating solutions are applied to various substrates, layers or electronic components used in semiconductor processing to form layered materials, generally by conventional spin-on deposition techniques, according to a particular manufacturing process. The layers used were applied. These techniques include a dispersion spin, a thickness spin, and a thermal baking step to produce an absorbent SOG antireflective coating. Typical processes include thickness spins between 1000 and 4000 rpm for about 20 seconds and two or three baking steps at temperatures between 80 ° C and 300 ° C for about one minute each. Absorption and pH controlled spin-on antireflective coatings according to the present invention exhibit refractive indices between about 1.3 and about 2.0 and an extinction coefficient of at least about 0.07.

Substrates contemplated herein may comprise any desired substantially solid material. Particularly preferred substrate layers may comprise a film, glass, ceramic, plastic, metal or coated metal, or composition. In a preferred embodiment, the substrate is at a packaging surface, circuit board or package interconnect trace as found in a silicon or germanium arsenide dye or wafer surface, copper, silver, nickel or gold plated leadframe. Copper surface as found, via well or stiffness interface ("copper" includes consideration of copper and its oxides), polymer series as found in polyimide-based flexible packages And polymers such as packaging or board interfaces, lead or other metal alloy solder ball surfaces, glass and polyamides. In a more preferred embodiment, the substrate comprises materials common in the packaging and circuit board industry, such as silicon, copper, glass and another polymer.

A general method of using the absorbent spin-on glass according to the invention as an antireflective coating in a photolithography process is illustrated in FIGS. 2A-2H. As shown in FIG. 2A, dielectric layer 22 is deposited on silicon substrate 20. The dielectric layer 22 may be, for example, a silico dioxide layer derived from TEOS, a silane-based silicon dioxide layer, a thermally grown oxide, or methylhydridosiloxane or other elements produced by chemical vapor deposition or It can be composed of a variety of dielectrics including silicon dioxide including compounds. The dielectric layer 22 is generally an optically transparent medium, but need not be optically transparent. An absorbed and pH controlled spin-on antireflective coating layer 24 is applied over the dielectric layer 22 (FIG. 2B) of the conventional positive photoresist covered by the photoresist 26 to produce the stack shown in FIG. 2C. The stack of FIG. 2C is exposed to ultraviolet light 32 through mask 30, as shown in FIG. 2D. During exposure, the absorbed and pH controlled spin-on antireflective coating layer 24 absorbs UV light 32 transmitted through the photoresist. The dielectric layer 22 is usually and mainly transparent in the UV wavelength range, so that if the absorbing spin-on ARC layer 24 was not present, the UV light 32 would have a critical dimension, for example the critical dimension 27 of the exposed photoresist. ) Is reflected from the lower silicon layer 20 dropping. In this embodiment, positive photoresists that provide direct image transfer are contemplated. However, it becomes apparent that some organic dielectrics are not optically transparent.

The exposed stack is developed to produce the stack of FIG. 2E. The absorbed and pH controlled spin-on ARC layer 24 is resistant to conventional photoresist developers, such as 2.5% solutions of tetramethylammonium hydroxide (TMAH). In contrast, ARC layers with some chemical characteristics of the photoresist material are more sensitive to photoresist developers. Moreover, the absorbed and pH controlled spin-on ARC layers 24 are expected to be resistant to the photoresist stripping process, while the organic ARCs are not tolerant. Thus, the use of a spin-on layer that is absorbed and pH controlled can facilitate the photoresist reprocessing without the need to reapply the ARC layer.

Next, the pattern is etched into the spin-on ARC layer 24 which is absorbed and pH controlled through the openings of the photoresist 26 to produce the etched stack of FIG. 2F. Fluorocarbon etching with high sensitivity to photoresist is used to etch the absorbing spin-on ARC layer 24. The reaction of the absorbing spinon layer to fluorocarbon etching provides the additional benefit of the spinon layer being absorbed and pH controlled over the organic ARC layer requiring oxygen plasma etching. Oxygen plasma etching can reduce the critical dimensions of the photoresist being developed since the organic photoresist is also etched by the oxygen plasma. Fluorocarbon plasmas consume less photoresist than oxygen plasmas. At shorter UV wavelengths, the depth of focus requirement will limit the thickness of the photoresist layer 26 in the exposure step shown in FIG. 2D. For example, at 193 nm, it is estimated that the thickness of the photoresist layer should be about 300 nm. Thus, when these short wavelengths begin to be used, it will be important to have an ARC layer that can be selectively etched into the photoresist.

The fluorocarbon etching continues through the dielectric layer 22 to produce the stack of FIG. Photoresist layer 26 is partially lost during subsequent etching processes. Finally, the photoresist layer 26 is stripped using oxygen plasma or hydrogen reducing chemistry or through wet chemistry and the spin-on ARC layer 24 is buffered with oxygen etching, for example, Removed using standard hydrofluoric acid / water mixture, non-aqueous, partially aqueous or fully aqueous fluorine chemistry or aqueous or non-aqueous organoamine. Advantageously, spin-on ARC layer 24 may be removed with a solution that exhibits good selectivity for the underlying dielectric layer. Thus, the general photolithography method shown in FIGS. 2A-2H shows the process advantages of absorbing spin-on materials as antireflective coating layers and as sacrificial antireflective coating layers.

Example

A method of synthesizing an absorbent spin-on material comprising a pH adjuster to bind to a resist material and to improve compatibility is illustrated in the following examples. The solutions and coatings prepared in the following examples are adjusted to be compatible with several photoresist materials, including photoresist materials that absorb about 157 nm, 193 nm, 248 nm, and 375 nm. An example of a 193 nm resistive material is an acrylate resistive material.

Example  One

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 22 liter flask, 6331.20 grams of 2-propanol, 3166.66 grams of acetone, 2633.78 grams of TEOS, 1639.78 grams of MTEOS, 958.97 grams of 9-anthracene carboxy-methyl triethoxysilane, 119.24 grams of 0.1 M nitric acid and 1425.58 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 932.80 grams butanol and 20650.0 grams ethyl lactate. The solution was filtered for use in pH adjustment experiments. Two separate solutions of 650 g of spin-on material having an initial pH of about 1.5 were added with 0.1 M nitric acid as a pH regulator. The nitric acid was added in the following amounts so that the pH was as follows: a) 2.794 g (pH = 0.7); b) 0.293 g (pH = 0.75). APTEOS was added to two additional separate solutions of 650 g of the same spin-on material in the following amounts, so that the pH value was as follows: a) 0.053 g (pH = 4.13); b) 0.151 g (pH = 5.47). The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1402.17 kPa. At 248 nm, the refractive index n was 1.47 and the extinction coefficient k was 0.429. The same spin and bake process parameters and measurement techniques were used in all of the examples below.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Another Absorbing Spin-on Material Containing pH Control

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams of butanol and 488 grams of 2-propanol, 245 grams of acetone, 329 grams of ethanol, 53 grams of deionized water and 3.8 grams of 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3. At 248 nm, the refractive index n was 1.373 and the extinction coefficient k was 0.268. However, the refractive index and extinction coefficient data for this example and all of the examples observed below may vary depending on the purity of the initial reactants and the starting mixture. The same spin and heating parameters and measurement techniques were used in all of the examples below.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbent Spin-On Materials Containing pH Adjusters

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.01 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3. At 248 nm, the refractive index n was 1.373 and the extinction coefficient k was 0.268.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 1.0 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid and 100 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid and 130 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid and 77 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. 1 gram of APTEOS was added to the solution during reflux. After reflux, 115 grams of butanol, 488 grams of 2-propanol, 245 grams of acetone, 329 grams of ethanol, 53 grams of deionized water and 3.8 grams of 10% FC 430 (3M, Minneapolis, MN) were added. The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3. At 248 nm, the refractive index n was 1.373 and the extinction coefficient k was 0.268.

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid and 77 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. After reflux, 1 gram of APTEOS was added to the solution. After reflux, 115 grams of butanol, 488 grams of 2-propanol, 245 grams of acetone, 329 grams of ethanol, 53 grams of deionized water and 3.8 grams of 10% FC 430 (3M, Minneapolis, MN) were added. The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. The film thickness was 1635 mm 3.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 1.0 M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of pure acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 10M acetic acid and 100 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 1.0 M acetic acid and 130 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of pure acetic acid and 72 grams of deionized water were mixed. One gram of potassium hydroxide was added before reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. 1 gram of potassium hydroxide was added during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 grams of 1.0 M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 h. One gram of potassium hydroxide was added before reflux. To this solution was also added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams deionized water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of pure lactic acid, and 40 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. Thickness = 1487.1 mm, k = 0.4315, n = 1.4986.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 40 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of pure lactic acid, and 40 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 1.0 M lactic acid and 70 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 90 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 40 grams of deionized water were mixed. Prior to reflux, 1.5 grams of TMAH was added to the solution. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 40 grams of deionized water were mixed. 1.5 grams of TMAH was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 40 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. After reflux, 1.5 grams of TMAH was added to the solution. After reflux, 26 grams of butanol, 488 grams of 2-propanol, 245 grams of acetone, 329 grams of ethanol, 53 grams of deionized water and 3.8 grams of 10% FC 430 (3M, Minneapolis, MN) were added. The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 178 grams of 2-propanol, 89 grams of acetone, 52 grams of TEOS, 59 grams of MTEOS, 29 grams of 9-anthracene carboxy-propyl triethoxysilane, 3.3 grams of 10 M lactic acid and 40 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 26 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water and 3.8 grams 10% FC 430 (3M, Minneapolis, MN). The solution was filtered. The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute, respectively. Optical properties were measured with a N & K Technology Model 1200 analyzer. Thickness = 1487.1 mm, k = 0.4315, n = 1.4986.

Example  2

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 1436 ms, n = 1.479, k = 0.1255.

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.01 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 1.0 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 95 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 110 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilylpropoxy) -di 10 grams of phenylketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. 1.2 grams of APTEOS was added to the solution prior to reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. 1.2 grams of APTEOS was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 111 grams butanol, 459 grams 2-propanol, 230 grams acetone, 309 grams ethanol, 50 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent spin-on material containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 25 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 10 grams of ketone, 5 grams of rosolic acid, 0.6 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. 1.2 grams of APTEOS was added to the solution after reflux. Further, after reflux, 111 g of butanol, 459 g of 2-propanol, 230 g of acetone, 309 g of ethanol, 50 g of deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto.

Example  3

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 10M acetic acid and 71.90 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 1.0M acetic acid and 71.90 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysiloxy proxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of pure acetic acid and 71.90 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 10M acetic acid and 95 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 10M acetic acid and 120 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 10M acetic acid and 71.90 grams of deionized water were mixed. 2.2 grams of potassium hydroxide was added to the solution prior to reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 10M acetic acid and 71.90 grams of deionized water were mixed. 2.2 grams of potassium hydroxide was added to the solution while refluxing. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator.

To 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 93 grams of TEOS, 77 grams of MTEOS, 20 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 1075M acetic acid and 71.90 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. 2.2 grams of potassium hydroxide was added to the solution after reflux. Further, after reflux, 57 g of butanol, 88 g of 2-propanol, 44 g of acetone, 59 g of ethanol, 9.5 g deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto.

Example  4

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.01 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 1.0M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 95 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 125 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. 3 grams of APTEOS was added to the solution before reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. 3 grams of APTEOS was added to the solution during reflux. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 4275 kPa, n = 1.529, k = 0.124.

Synthesis of absorbent SOG containing 9-anthracene methanol, 2 -hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, rosolic acid and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 108 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenyl 60 grams of ketone, 5 grams of rosolic acid, 0.5599 grams of 0.1 M nitric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. After reflux, 3 grams of APTEOS was added to the solution. Further, after reflux, 57 g of butanol, 88 g of 2-propanol, 44 g of acetone, 59 g of ethanol, 9.5 g deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto. Thickness = 4275 kPa, n = 1.529, k = 0.124.

Example  5

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 3592 mm 3, n = 1.563, k = 0.067.

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1-liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.01 M nitric acid 0.6 grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 1.0 M nitric acid 0.6 grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 90 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 125 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 72 grams of DI water were mixed. 0.26 grams of APTEOS was added to the solution before reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysiloxypropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 72 grams of DI water were mixed. 0.26 grams of APTEOS was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 0.1 M nitric acid 0.6 grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. After reflux, 0.26 grams of APTEOS was added to the solution. After reflux, 57 g of butanol, 88 grams of 2-propanol, 44 grams of acetone, 59 grams of ethanol, 9.5 grams of deionized water and 3.75 grams of 10% FC 430 (3M, Minneapolis, MN) were added.

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 72 grams of deionized water. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 M lactic acid 0.6 Grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 M lactic acid 0.6 Grams and 72 grams of DI water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 75 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 72 grams of deionized water. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 115 grams of deionized water. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 72 grams of deionized water. Prior to reflux, 0.06 grams of APTEOS was added to the solution. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 72 grams of deionized water. 0.06 grams of APTEOS was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorbent Spin-on Materials Containing 2 -Hydroxy -4- (3 -trimethoxysilylpropoxy ) -diphenylketone and pH regulator

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51 grams of MTEOS, 60 grams of 2-hydroxy-4- (3-trimethoxysilylpropoxy) -diphenylketone, 0.6 grams of 10M lactic acid And 72 grams of deionized water. The flask was refluxed and / or heated for 1-12 hours. After reflux, 0.06 grams of APTEOS was added to the solution. Further, after reflux, 57 g of butanol, 88 g of 2-propanol, 44 g of acetone, 59 g of ethanol, 9.5 g deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto.

Example  6

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.01 M hydrochloric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams of deionized hot water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 1.0 M hydrochloric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 100 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 130 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 72 grams of deionized water were mixed. 1.2 grams of potassium hydroxide was added to the solution before reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 72 grams of deionized water were mixed. 1.2 grams of potassium hydroxide was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

9-anthracene methanol and pH Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 10 grams of 9-anthracene methanol, 0.6 grams of 0.1 M hydrochloric acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. 1.2 g of potassium hydroxide was added to the solution after reflux. Further, after reflux, 57 g of butanol, 88 g of 2-propanol, 44 g of acetone, 59 g of ethanol, 9.5 g deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto.

Example  7

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 1.0M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 3503 Hz, n = 1.475, k = 0.193.

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of pure M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 98 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 120 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. Prior to reflux, 1.5 grams of TMAH was added to the solution. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. 1.5 grams of TMAH was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M acetic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. 1.5 g of TMAH was added to the solution after reflux. After reflux, 57 grams of butanol, 88 grams of 2-propanol, 44 grams of acetone, 59 grams of ethanol, 9.5 grams of deionized water and 3.75 grams of 10% FC 430 (3M, Minneapolis, MN) were added.

Example  8

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10 M nitrate and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 3119 mm 3, n = 1.454, k = 0.175.

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 1.0 M lactic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of pure lactic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M lactic acid and 100 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10M lactic acid and 130 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10 M lactic acid and 72 grams of deionized water were mixed. 0.1 grams of APTEOS was added to the solution before reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of all the material-absorbing spin containing jolsan and pH control agents as diphenoxylate ketone carbonyl-9-anthracene methanol, 2-hydroxy-4- (3-tree Messenger Sicily propoxy)

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10 M lactic acid and 72 grams of deionized water were mixed. 0.1 g of APTEOS was added to the solution during reflux. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

Synthesis of Absorption Spin-on Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 0.6 grams of 10 M lactic acid and 72 grams of deionized water were mixed. The flask was refluxed and / or heated for 1-12 hours. After reflux, 0.1 gram of APTEOS was added to the solution. Further, after reflux, 57 g of butanol, 88 g of 2-propanol, 44 g of acetone, 59 g of ethanol, 9.5 g deionized water and 3.75 g of 10% FC 430 (3M, Minneapolis, MN) were added thereto.

Example  9

Synthesis of Absorbent Spin-On Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid, Quinizarin, Alizarin and pH Adjuster

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 20 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid, 2 grams of quinizaline, 2 grams of alizarin, 0.1 grams of nitric acid, 1.0 M nitric acid and 0.6 grams of 0.01 M nitric acid (added to three separate mixtures) and 72 grams of deionized water were mixed. To two other solutions containing 0.1 M nitric acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN). Thickness = 3554 mm 3, n = 1.489, k = 0.193.

To three additional solutions, 1.1 g of potassium hydroxide was added. To each solution, the potassium hydroxide was added before, during and after reflux.

Example  10

Synthesis of Absorbent Spin-On Materials Containing 9-Anthracene Methanol, 2 -Hydroxy -4- (3- triethoxysilylpropoxy ) -diphenylketone, Rosolic Acid , Alizarin and pH Control Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 51.5 grams of MTEOS, 5 grams of 2-hydroxy-4- (3-triethoxysilpropoxy) -diphenylketone, 9-anthracene 25 grams of methanol, 5 grams of rosolic acid and 2 grams of alizarin, 1.0 M, 10 M and 0.5599 grams of pure acetic acid (added to three separate mixtures each) and 71.90 grams of deionized water were mixed. To another two solutions containing 10 M acetic acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 56.68 grams butanol, 87.99 grams 2-propanol, 44.10 grams acetone, 59.31 grams ethanol, 9.55 grams DI water and 3.75 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.25 g of APTEOS was added. To each solution, the APTEOS was added before, during and after reflux.

Example  11

9-anthracene carboxy - methyl Synthesis of Absorbing Spin-on Materials Containing Triethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-methyl triethoxysilane, 0.6 grams of 0.1M, 0.01M and 1.0M nitric acid (three Each in separate solution) and 72 grams of deionized water. To two other solutions containing 0.1 M nitric acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.25 g of HCl was added. To each solution, the HCl was added before, during and after reflux.

Synthesis of Absorbent Spin-On Material Containing 9-Anthracene Carboxy -Ethyl Triethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-ethyl triethoxysilane, 1.0 M, 10 M and 0.6 grams of pure lactic acid (three separate Each to the solution) and 72 grams of deionized water. To two other solutions containing 10 M lactic acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.2 g of APTEOS was added. To each solution, the APTEOS was added before, during and after reflux.

Synthesis of Absorbent Spin-on Material Containing 9-Anthracene Carboxy -propyl Triethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-propyl triethoxysilane, 1.0 M, 10 M and 0.6 grams of pure lactic acid (three separate Each to the solution) and 72 grams of deionized water. To another two solutions containing 10M lactate, 90g and 110g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.2 g of APTEOS was added. To each solution, the APTEOS was added before, during and after reflux.

9-anthracene carboxy - pentyl Synthesis of Absorbing Spin-on Materials Containing Triethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-pentyl triethoxysilane, 0.6 grams of 0.1M, 0.01M and 1.0M nitric acid (three Each in separate solution) and 72 grams of deionized water. To two other solutions containing 0.1 M nitric acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.0 g of potassium hydroxide was added. To each solution, the potassium hydroxide was added before, during and after reflux.

9-anthracene carboxy - methyl Synthesis of Absorbing Spin-on Materials Containing Trimethoxysilane and pH Control

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-methyl trimethoxysilane, 1.0 M, 10 M and 0.6 grams of pure acetic acid (three separate Each to the solution) and 72 grams of deionized water. To another two solutions containing 10 M acetic acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams of butanol, 88 grams of 2-propanol, 44 grams of acetone, 59 grams of ethanol, 9.5 grams of deionized water and 3.7 grams of 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 2.4 g of TMAH was added. To each solution, the TMAH was added before, during and after reflux.

Synthesis of Absorbent Spin-on Material Containing 9-Anthracene Carboxy -Ethyl Trimethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-ethyl trimethoxysilane, 1.0 M, 10 M and 0.6 grams of pure lactate (three separate Each to the solution) and 72 grams of deionized water. To another two solutions containing 10M lactate, 90g and 110g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.2 g of APTEOS was added. To each solution, the APTEOS was added before, during and after reflux.

Synthesis of Absorbent Spin-on Material Containing 9-Anthracene Carboxy -propyl Trimethoxysilane and pH Controlling Agent

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, 30 grams of 9-anthracene carboxy-propyl trimethoxysilane, 0.6 grams of 0.1 M, 0.01 M and 1.0 M hydrochloric acid (three Each in separate solution) and 72 grams of deionized water. To another two solutions containing 0.1 M hydrochloric acid, 90 g and 110 g of deionized water were added, respectively. The flask was refluxed and / or heated for 1-12 hours. To the solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.4 g of APTEOS was added. To each solution, the APTEOS was added before, during and after reflux.

Example  12

With 9-anthracene methanol pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, and 10 grams of 9-anthracene methanol were mixed. The solution is refluxed for 6 hours. To each of the three separate solutions were added a mixture of 0.6 grams of 0.1 M hydrochloric acid, 0.6 grams of 0.01 M hydrochloric acid, and 0.6 grams of 1.0 M hydrochloric acid and 72 grams of deionized water. Two different solutions containing 0.1 M hydrochloric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To this solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water, and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.4 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

With 9-anthracene ethanol pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, and 10 grams of 9-anthracene ethanol were mixed. The solution is refluxed for 6 hours. Three separate solutions were mixed with 72 grams of deionized water and a mixture of 0.6 grams of 0.1 M nitric acid, 0.6 grams of 0.01 M nitric acid, and 0.6 grams of 1.0 M nitric acid, respectively. Two different solutions containing 0.1 M nitric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To this solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water, and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.4 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

9-anthracene With propanol pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 123 grams of TEOS, 77 grams of MTEOS, and 10 grams of 9-anthracene propanol were mixed. The solution is refluxed for 6 hours. To each of the three separate solutions were added a mixture of 0.6 grams of 1.0 M acetic acid, 0.6 grams of 10 M acetic acid, and 0.6 grams of pure acetic acid and 72 grams of deionized water. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To this solution was added 57 grams butanol, 88 grams 2-propanol, 44 grams acetone, 59 grams ethanol, 9.5 grams DI water, and 3.7 grams 10% FC 430 (3M, Minneapolis, MN).

To the three additional solutions, 1.25 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

Example  13

9-anthracene carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-methyl triethoxysilane, 1.0 M acetic acid 0.6 added to each of the three separate solutions) Grams, 0.6 grams of 10M acetic acid, 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.25 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

With 9-anthracene carboxy -ethyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-ethyl triethoxysilane, 0.6 M of nitric acid (added to three separate solutions each) 0.6 Gram, 0.6 grams of 0.01 M nitric acid, 0.6 grams of nitric acid 1.0 M, and 72 grams of deionized water were mixed. Two different solutions containing 0.1 M nitric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To the three additional solutions, 0.25 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

9-anthracene carboxy - methyl With trimethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1-liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-methyl trimethoxysilane, 0.6 M of lactic acid (added to three separate solutions each) 0.6 Grams, 0.6 grams of 10M nitrate, 0.6 grams of pure nitrate, and 72 grams of deionized water were mixed. Two different solutions containing 10 M of lactic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.5 grams of potassium hydroxide was added. To each solution the potassium hydroxide was added before, after and during the reflux step.

With 9-anthracene carboxy -propyl triethoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-propyl triethoxysilane, 0.6 M of nitric acid (added to three separate solutions each) 0.6 Gram, 0.6 grams of 0.01 M nitric acid, 0.6 grams of nitric acid 1.0 M, and 72 grams of deionized water were mixed. Two different solutions containing 0.1 M nitric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.5 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

9-anthracene carboxy - methyl Tripropoxysilane Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-methyl tripropoxysilane, 1.0 M acetic acid 0.6 each added to three separate solutions Grams, 0.6 grams of 10M acetic acid, 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 0.75 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

9-anthracene carboxy-ethyl tree butoxysilane and Synthesis of Absorbing Spin-on Materials Containing pH Controlling Agents

In a 1 liter flask, 297 grams of 2-propanol, 148 grams of acetone, 90 grams of TMOS, 59 grams of MTMOS, 60 grams of 9-anthracene carboxy-ethyl tributoxysilane, 1.0 M acetic acid 0.6 each added to three separate solutions Grams, 0.6 grams of 10M acetic acid, 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution was added 115 grams butanol, 488 grams 2-propanol, 245 grams acetone, 329 grams ethanol, 53 grams DI water, and 3.8 grams 10% FC 430 (3M, Minneapolis, MN).

To three additional solutions, 1.00 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

Example  14

With phenyltriethoxysilane pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

To 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 104 grams (0.432 mol) of phenyltriethoxysilane, (to three separate solutions each) 0.6 grams of 1.0 M acetic acid, 0.6 grams of 10 M acetic acid, 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added. Thickness = 1727 kPa, n = 1.957, k = 0.384.

To three additional solutions, 1.00 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

With phenyltrimethoxysilane pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

To 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 104 grams (0.432 mol) of phenyltriethoxysilane, (to three separate solutions each) A mixture of 0.6 grams of 0.1 M nitric acid, 0.6 grams of 0.01 M nitric acid, 0.6 grams of 1.0 M nitric acid, and 72 grams of DI water. Two different solutions containing 0.1 M nitric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 1.00 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

With phenyltripropoxysilane pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

To 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 104 grams (0.432 mol) of phenyltriethoxysilane, (to three separate solutions each) 0.6 grams of 1.0 grams of nitrate, 0.6 grams of 10 grams of nitrate, 0.6 grams of pure nitrate, and 72 grams of deionized water. Two different solutions containing 10 M of lactic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 0.75 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

With phenyltributoxysilane pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

To 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 104 grams (0.432 mol) of phenyltriethoxysilane, (to three separate solutions each) 0.6 grams of 1.0 M acetic acid, 0.6 grams of 10 M acetic acid, 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 0.50 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

Example  15

4 -ethoxyphenylazobenzene- 4- carboxy - methyl With triethoxysilane Synthesis of Absorbing Spin-on Materials with pH Control

In a 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 77 grams (0.432 mol) of MTEOS, 4-ethoxyphenylazobenzene-4-carboxy- 44.5 grams (0.13 mole) of methyl triethoxysilane, 0.6 grams of 1.0 M acetic acid (added to three separate solutions each), 0.6 grams of 10 M acetic acid and 0.6 grams of pure acetic acid, and 72 grams of deionized water were mixed. Two different solutions containing 10 M acetic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 0.50 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

Synthesis of Absorbent Spin-on Material Containing 4- ethoxyphenylazobenzene- 4- carboxy -ethyl triethoxysilane

In a 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 77 grams (0.432 mol) of MTEOS, 4-ethoxyphenylazobenzene-4-carboxy- 44.5 grams (0.13 mole) of methyl triethoxysilane, 0.6 grams of 1.0 grams of acetic acid (added to each of the three separate solutions), 0.6 grams of 10M of nitrates and 0.6 grams of pure nitrate, and 72 grams of deionized water were mixed. Two different solutions containing 10 M of lactic acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 0.25 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

Synthesis of Absorbent Spin-on Material Containing 4 -Methoxyphenylazobenzene- 4- carboxy -propyl triethoxysilane

In a 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 77 grams (0.432 mol) of TEOS, 4-ethoxyphenylazobenzene-4-carboxy- 44.5 grams (0.13 mole) of methyl triethoxysilane, 0.6 grams of 0.1 M nitric acid (added to each of three separate solutions), 0.6 grams of 0.01 M nitric acid, and 0.6 grams of 1.0 M nitric acid, and 72 grams of deionized water It was. Two different solutions containing 0.1 M nitric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added.

To three additional solutions, 0.10 grams of APTEOS was added. To each solution the APTEOS was added before, after and during the reflux step.

4-methoxyphenyl-4-carboxy azobenzene-synthesized material of the on-absorbing spin-containing trimethoxysilane

In a 1 liter flask, 297 grams (4.798 mol) of 2-propanol, 148 grams (2.558 mol) of acetone, 123 grams (0.593 mol) of TEOS, 77 grams (0.432 mol) of MTEOS, 4-ethoxyphenylazobenzene-4-carboxy- 44.5 grams (0.13 mole) of methyl triethoxysilane, 0.6 grams of 0.1 M hydrochloric acid (added to each of three separate solutions), 0.6 grams of 0.01 M hydrochloric acid, and 0.6 grams of 1.0 M hydrochloric acid, and 72 grams of deionized water It was. Two different solutions containing 0.1 M hydrochloric acid were added 90 grams and 110 grams of deionized water, respectively. The flask was refluxed and / or heated for 1 to 12 hours. To the solution, 57 grams (0.769 moles) butanol, 88 grams (1.422 moles) 2-propanol, 44 grams (0.758 moles) acetone, 59 grams (1.227 moles) ethanol, 9.5 grams (0.528 moles) Ion water was added. K = 0.162 per 365 nm, n = 1.499.

To three additional solutions, 0.50 grams of TMAH was added. To each solution the TMAH was added before, after and during the reflux step.

Example  16

PGMEA Wow pH  Synthesis of Absorbing Spin-on Materials Containing Modulators

In a 1 liter flask, 504.829 grams PGMEA, 123.6 grams TEOS, 76.9 grams MTEOS, 5.608 grams 0.1M nitric acid and 66.869 grams of DI water were mixed. The flask was refluxed and / or heated for 1 to 12 hours. 43.777 grams of butanol was added to the solution. The solution was filtered for use in pH adjustment experiments.

In another 1 liter flask, 297 grams of 2-propanol, 148.560 grams of acetone, 139.902 grams of TEOS, 19.10 grams of MTEOS, 51.7 grams of PTEOS, 5.624 grams of 0.1 M nitric acid and 66.827 grams of deionized water were mixed. The flask was refluxed and / or heated for 1 to 12 hours. 43.93 grams butanol was added to the solution. The solution was filtered for use in pH adjustment experiments.

The two prepared solutions were mixed and a pH adjuster, APTEOS, was added to six separate solutions of 650 g of spin-on material having an initial pH of about 1.7. The APTEOS was added in the following amounts so that the pH was as follows: a) 1.49 g (pH = 8.07); b) 0.26 g (pH = 7.12); c) 0.1 g (pH = 6.29); d) 0.06 g (pH = 5.50); e) 0.03 g (pH = 2.49); f) 0 g (pH = 1.76). The solution was then dispensed for 20 seconds at 3000 rpm thick spins and heated at 80 ° C. and 180 ° C. for 1 minute each. Optical properties were measured with a N & K Technology Model 1200 analyzer. Optical properties of the respective solutions from A to F are as follows.

a) thickness = 1686 mm 3; k = 0.297; n = 1.802; Etch ratio; er = 9.33

b) thickness = 1332 mm 3; k = 0.295; n = 1.802; Etch ratio; er = 8.5

c) thickness = 1298 mm 3; k = 0.294; n = 1.802; Etch ratio; er = 8.316

d) thickness = 1292 mm 3; k = 0.293; n = 1.802; Etch ratio (er) = 8.17

e) thickness = 1304.9 kPa; k = 0.292; n = 1.802; Etch ratio; er = 8.01

f) thickness = 1263.9 mm 3; k = 0.289; n = 1.802; Etch ratio; er = 7.83

Accordingly, certain embodiments and applications of composites and methods for making spin-on materials, spin-on inorganic materials and spin-on glass materials comprising absorbing compounds and including pH adjusters are disclosed. However, it will be apparent to those skilled in the art that more modifications are possible without departing from the scope of the present invention in addition to the embodiments described above. Therefore, the technical idea of the present invention is not limited except in the spirit of the claimed claims. In addition, in the interpretation of the specification and claims, all terms should be interpreted in the widest manner suitable for the context. In particular, the terms 'comprising' and 'comprising' should be construed as quoting elements, components, or steps in a non-exclusive manner, wherein the recited elements, components, or steps are explicitly It may be present, used or combined with other elements, components, or steps that are not recited.

1A-1F show chemical formulas of absorbent compounds included in spin-on-glass compositions.

2A-2H illustrate the use of absorbent spin-on compositions comprising a pH adjuster as an antireflective coating layer in a photolithography process.

Claims (32)

Absorption spin-incorporating at least one inorganic compound, at least one compoundable organic compound that absorbs light over a wavelength range of at least 5 nm at wavelengths less than 375 nm and at least one pH tuning agent. As an on-glass composition, The pH adjusting agent may be selected from the group consisting of amines including г-aminoalkyltrialkoxysilanes including г-aminopropyltriethoxysilanes (APTF or APTEOS) to improve compatibility between the resist material and the spin-on composition; Sodium alkoxides, potassium alkoxides, oxides and alkoxides including potassium hydroxide; Hydrogen halides including hydrogen bromide; TMAH; An absorbent spin-on-glass composition comprising a compound selected from amine oligomers comprising oligomers having inorganic atoms comprising silicon, and combinations thereof. delete The method of claim 1, An absorption spin-on-glass composition in which the organic compound strongly absorbs light over a wavelength range of at least 10 nm wide at wavelengths less than 375 nm. The method of claim 1, An absorption spin-on-glass composition having the wavelength range of less than 260 nm. The method of claim 1, An absorption spin-on-glass composition, wherein the organic compound comprises at least one benzene ring and a reactor selected from the group consisting of hydroxyl groups, amine groups, carboxylic acid groups and substituted silyl groups. The method of claim 5, Absorption spin-on-glass composition wherein the organic compound comprises two or more benzene rings. The method of claim 6, An absorbent spin-on-glass composition in which two or more benzene rings are fused. The method of claim 5, Organic compounds that absorb light over a wavelength range at least 5 nm wide at wavelengths less than 375 nm include anthraclavic acid, 9-anthracene carboxylic acid, 9-anthracene methanol, alizarin, quinizarine, primoline, 2-hydroxy. -4 (3-triethoxysilylpropoxy) -diphenylketone, rosolic acid, triethoxysilylpropyl-1,8-naphthalimide, 9-anthracene carboxy-alkyl triethoxysilane, phenyltriethoxy Silane, 10-phenanthrene carboxy-methyl triethoxysilane, 4-phenylazophenol, 4-ethoxyphenylazobenzene-4-carboxy-methyl triethoxysilane, 4-methoxyphenylazobenzene-4-carboxy-methyl tri An absorbent spin-on-glass composition comprising an organic absorbent compound comprising ethoxysilane and mixtures thereof. The method of claim 1, Absorption spin-on-glass composition in which the inorganic compound comprises a silicon compound. The method of claim 9, Absorption spin-on-glass composition, wherein the silicon compound comprises a polymer. The method of claim 10, An absorbent spin-on-glass composition, wherein the polymer comprises methylsiloxane, methylsilsesquinoxane, phenylsiloxane, phenylsilesquinoxane, methylphenylsiloxane, methylphenylsilsesquinoxane, silicate polymers, silazane polymers, and mixtures thereof. The method of claim 10, The polymers are hydrogensiloxane, hydrogensilsesquioxane, organohydridosiloxane and organohydridosilsesquioxane polymers; An absorbent spin-on-glass composition comprising a copolymer of hydrogensilsesquinoxane and alkoxyhydridosiloxane or hydroxyhydridosiloxane and mixtures thereof. The method of claim 10, The polymer is (H _0-1.0 SiO _1.5-2.0 ) x (where x is greater than 4) and (H _0-1.0 SiO _1.5-2.0 ) n (R _0-1.0 SiO _1.5-2.0 ) m where m is 0 Wherein the sum of n and m is from 4 to 5000 and R is a C ₁ -C ₂₀ alkyl group or a C ₆ -C ₁₂ aryl group). delete The method of claim 1, An absorption spin-on-glass composition wherein the pH adjuster comprises a base. The method of claim 15, Absorption spin-on-glass composition wherein the base comprises an amine. The method of claim 16, Absorption spin-on-glass composition, wherein the amine comprises an amine oligomer. The method of claim 1, Absorption spin-on-glass composition wherein the pH adjuster comprises an acid. A coating solution comprising the absorption spin-on-glass composition of claim 1 and a solvent or solvent mixture. The method of claim 19, A coating solution having an absorption spin-on-glass composition of 0.5% to 20% by weight in the solution. At least one alkoxysilane or halosilane; At least one organic compound capable of mixing at least one and absorbing light over a wavelength range of at least 5 nm at wavelengths less than 375 nm; At least one pH adjusting agent; Acid / water mixtures; And mixing one or more solvents to form a reaction mixture; And A method of preparing a coating solution containing a spin-on material comprising heating a reaction mixture to form a spin-on polymer, The pH adjusting agent may be selected from the group consisting of amines including г-aminoalkyltrialkoxysilanes including г-aminopropyltriethoxysilanes (APTF or APTEOS) to improve compatibility between the resist material and the spin-on composition; Sodium alkoxides, potassium alkoxides, oxides and alkoxides including potassium hydroxide; Hydrogen halides including hydrogen bromide; TMAH; A method of producing a coating solution containing a spin-on material comprising a compound selected from amine oligomers comprising oligomers having inorganic atoms comprising silicon, and combinations thereof. delete The method of claim 21, A method of making a coating solution containing a spin-on material, further comprising the step of adding one or more dilution solvents to the spin-on composition to prepare a coating solution. A layered material comprising the spin-on composition of claim 1 mated to a resist material. A layered material comprising the coating solution of claim 19 mated to a resist material. The method of claim 24, Wherein the resist material comprises a development line at an angle of at least 85 ° relative to the spin-on composition. The method of claim 25, The layered material comprising a development line at which the resist material is at an angle of at least 85 ° with respect to the coating solution. A semiconductor comprising the spin-on composition of claim 1. A semiconductor comprising the coating solution of claim 19. The method of claim 1, A composition designed to at least partially remove the spin-on composition. delete The method of claim 1, A composition wherein the resist material absorbs light over a wavelength range comprising 157 nm, 193 nm, 248 nm, and 365 nm.

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