KR100907474B1 - Bio sensor, its manufacturing method and detecting method of bio material using it - Google Patents

Abstract

The biosensor of the present invention functionalizes the surface of a long single nanowire device in series to be combined with a specific target biomolecule, thereby simultaneously detecting the same or multiple target biomolecules.

This allows for the efficient detection of various biomaterials qualitatively and / or quantitatively. Therefore, the cost of the manufacturing process can be reduced, and the detection of various biomolecules can be achieved quickly and at the same time accurate analysis is possible.

Detection unit, biosensor, carbon nanotube, multiple detection

Description

Bio sensor, manufacturing method thereof and detection method of bio substance using same {BIO SENSOR, ITS MANUFACTURING METHOD AND DETECTING METHOD OF BIO MATERIAL USING IT}

The present invention relates to a biosensor, a method for manufacturing the same, and a method for detecting a biomaterial using the same. More specifically, the surface of a long single nanowire device is partitioned in series to be functionalized to be combined with a specific target biomolecule. The present invention relates to a biosensor, a manufacturing method thereof, and a biomaterial detection method using the same, wherein the same or multiple target biomolecules are simultaneously detected.

Conventional techniques on biosensors using conventional nanowires, for example, "Electrical Measurement of Multiple Tumor Recognizers Consisting of Nanowire Array Sensors" by Nature Biotechnology No. 23 1294-1301 (1995) by Zheng et al. Referring to "nano scale sensors" of US Patent Publication No. 06/0269927 and "nano sensors" of US Patent No. 7,129,554, the structure of the arrangement of the sensor for detecting two or more different kinds of target biomolecules is shown. Looking at it, it has a structure functionalized with different biocognitive molecules on different nanowires. As such, in the case of conventional nanowires, it is very difficult to produce the same electrical characteristics of each nanowire. In particular, when carbon nanotubes are used, the electrical characteristics may be semiconductor or metallic. There is no known method for manufacturing carbon nanotube biosensors. Therefore, when the nanowires are functionalized with different kinds of bio-cognitive molecules in parallel as described above, the electrical properties of each transistor are very different. Therefore, the accuracy in analyzing the result after the reaction with the target molecule is remarkably accurate. There is a problem falling.

SUMMARY OF THE INVENTION The present invention has been made to overcome the above-mentioned problems, and an object of the present invention is to partition a surface of a long single nanowire device in series and functionalize it to be combined with a specific target biomolecule, thereby allowing the same or multiple target bios. The present invention provides a biosensor and a method of manufacturing the same, wherein the molecules are detected simultaneously.

Another object of the present invention is to provide a method of manufacturing a biosensor capable of extending the length of the nanowire to 10 μm or more in order to partition the surface of the nanowire device in series.

Still another object of the present invention is to provide a detection method for detecting the same or multiple target biomolecules using the biosensor of the present invention.

In the biosensor of the present invention for achieving the above-described problem, the biosensor comprising a transistor consisting of a source electrode, a drain electrode, a gate and a nanowire, the nanowire is a plurality of partitioned in the longitudinal direction A detection unit is provided.

The nanowires are preferably carbon nanotubes, more preferably single-walled carbon nanotubes having semiconductor properties, and compound semiconductors of silicon, germanium or GaN may be used.

The length of the transistor is preferably 100 µm to 10 cm.

The detection unit preferably has an independent drain electrode and does not share a source electrode or has an independent drain electrode and shares a source electrode, and more preferably has a symmetrical structure of source electrodes on both sides of the independent drain electrode. .

The nanowires have source and drain electrodes at both ends.

The plurality of detection units have an aptamer that specifically reacts or binds to a target biomaterial on its surface, and the target biomaterial is preferably a tumor marker such as CEA, AFP, PSA, or a protein, an organic small molecule. The aptamer is preferably any one or more selected from the group consisting of nucleic acids, amino acids, peptides, proteins, enzyme substrates, ligands, cofactors, antisense, organic small molecules and carbohydrates, wherein the nucleic acid is preferably a single Chain deoxynucleotides can be used.

The detection units of the present invention are each provided with an aptamer capable of detecting a specific biomolecule, but have a kind of aptamer sufficient to meet a target number of types of target biomolecules to be detected, typically 1 to 6 It is preferable to consist of an aptamer which can detect dog biomolecules.

On the other hand, the nanowires preferably include a section having no aptamer.

In the biomolecule detection method according to another feature of the present invention, the biomolecule is detected by changing the electrical conductivity between the drain provided in one detection unit and the shared source electrode.

According to another aspect of the present invention, a biomolecule detection method detects biomolecules by measuring electrical conductivity of a plurality of detection units by a four-point probe method.

According to another aspect of the present invention, there is provided a method of manufacturing a biosensor, which includes: 1) manufacturing a transistor including a source electrode, a drain electrode, a gate, and a nanowire; Insulating; And 3) dividing the nanowire into a plurality of detection units in a longitudinal direction.

In the method of manufacturing the transistor of step 1), a FeCl ₃ catalyst dissolved in alcohol is deposited on part or all of the SiO ₂ substrate, and the pretreatment is performed to raise the temperature to 800 to 1200 ° C. while contacting the substrate with hydrogen or oxygen and argon. Step, growing the carbon nanotubes by supplying carbon and hydrogen for 15 to 30 minutes while maintaining the temperature of the substrate subjected to the pretreatment step, hydrogen or oxygen while lowering the temperature to 15 ~ 30 ℃ the substrate is completed growth And argon contacting the substrate to cool the substrate.

Another method of manufacturing the transistor of step 1), the step of depositing a platinum catalyst on a portion or all of the SiO ₂ substrate to a thickness of 1 to 3 nm, the temperature to 800 ~ 1200 ℃ while contacting the hydrogen to the substrate Increasing the temperature, increasing the temperature of the SiCl ₄ to the substrate for 20-40 minutes SiH ₂ Cl ₂ And SiH ₄ Contacting any one or more of the compounds, and contacting the hydrogen while lowering the temperature of the substrate to 15 ~ 30 ℃.

The length of the transistor is preferably 100 μm to 10 cm. The plurality of detection units have an aptamer that specifically reacts or binds to a target biomaterial on its surface, and the biomaterial is preferably a tumor marker including a CEA, AFP, PSA, or the like, or a protein, an organic small molecule. And the like, and the aptamer is preferably any one or more selected from the group consisting of nucleic acids, amino acids, peptides, proteins, enzyme substrates, ligands, cofactors, antisenses, organic small molecules and carbohydrates, among which Is preferably a single chain deoxynucleotide.

The aptamers provided in the one detection unit of the present invention recognize a specific kind of biomaterial and include aptamers of a kind suitable for the number of biomolecule types to be detected. It is preferable to have 1-6 types.

The number of detection units partitioned in a serial manner of the present invention is preferably 1000 or less.

Here, the detection unit refers to a basic unit partitioned from semiconductor nanowires capable of detecting a specific biomaterial or molecule, and the channel region, which is a path through which the current on the nanowire flows when the biomaterial is detected or the current is measured. The detection units are partitioned in a serial manner that does not overlap or share with each other.

As described above, a biosensor made up of transistors divided in series into long nanowires of the present invention can efficiently detect various biomaterials qualitatively and / or quantitatively. Therefore, the cost of the manufacturing process can be reduced, and the detection of various biomolecules can be achieved quickly and at the same time accurate analysis is possible.

Hereinafter, the present invention will be described in more detail.

As described above, the conventional biosensor composed of carbon nanotubes is configured to configure nanowires in parallel in order to detect different kinds of biomaterials, and fix aptamers to the nanowires configured in parallel to target biomaterials. Was detected. Therefore, since the electrical properties of each transistor are very different, there is a problem that the accuracy of the detection result for the target biomaterial is significantly reduced.

 Accordingly, in the present invention, each compartment detects a specific biomolecule by partitioning it into several nanowires in the serial direction (the longitudinal direction of the nanowire) and functionalizing the specific biomaterial in each nanowire channel. Form a detection unit. For this purpose, the length of the nanowires is preferably at least 10 ㎛. Because, when the length of the nanowire is 10 ㎛ or less, the length of each partitioned detection unit has a short length of 1 ㎛ or less, it is difficult to have a sufficient number of molecular recognition material, in particular, it can be provided with a high resolution alignment in the manufacturing An exposure apparatus is required, making manufacturing difficult and increasing costs. In this case, the partitioned detection units have the same electrical characteristics, so that the nanowire transistors having the same electrical characteristics as the number of partitions can be easily formed. Therefore, it is possible to accurately determine the presence or absence of specific kinds of target biomaterials according to the change in the electrical conductivity of the transistor of each detection unit, and also to determine the approximate concentration of the target biomaterial. In addition, a single long device can be divided into aptamers that recognize several types of biomaterials, thereby reducing manufacturing costs and increasing the response area between the target biomaterials and the sensor, thereby increasing the sensitivity of the target biomaterials. Can increase.

On the other hand, even when detecting the same kind of biomolecules, the same biocognitive molecules are functionalized by dividing several compartments using the same long nanowire to increase the reliability of the data. In this case, the electrical characteristics of each compartmentalized transistor are the same, so more quantitative data is obtained. More specifically, if you have long nanowires and divide them into N detection units, each of which has more than one aptamer that recognizes the same biomaterial, it will eventually be N identical that detect the same kind of material. The result is the same as manufacturing a characteristic biosensor, and by obtaining N measurement results simultaneously, the measurement data of the biosensor is statistically more accurate.

Furthermore, when long nanowires are partitioned into detection units in a serial fashion, one or more compartments can be left unintentionally functionalized, or they can be functionalized as chemicals that can characterize most typical sensors and used as reference transistors. Can be used as That is, the reliability of the data can be improved by comparing the change of the resistance of the partition transistor monitored and the reference transistor after reacting with the target material, respectively.

The nanowires used in the present invention are preferably carbon nanotubes, more preferably single wall carbon nanotubes, and have semiconductor characteristics.

The nanowires have source and drain electrodes at both ends.

In addition, in the present invention, in order to partition the nanowires into the detection unit in the serial direction, the length of the nanowires is appropriately at least 10 μm, preferably in the range of 10 μm to 10 cm. If the length of the nanowire is less than 10 μm, it is difficult to functionalize a plurality of bio-recognition materials and the manufacturing cost is increased. If the length of the nanowire is 10 cm or more, the size of the sensor may be too large, resulting in a problem of deterioration of sensitivity.

Meanwhile, in order to extend the length of the nanowire to 10 μm or more, in the first embodiment of the present invention, a FeCl ₃ catalyst dissolved in alcohol is deposited on a part or all of the SiO ₂ substrate, and hydrogen or oxygen and argon are brought into contact with the substrate. The temperature is increased to 800 to 1200 ° C, followed by supplying carbon and hydrogen for 15 to 30 minutes while maintaining the temperature of the substrate to grow carbon nanotubes, and lowering the substrate to 15 to 30 ° C, The length of the carbon nanotubes may be grown to a size of 10 μm or more through a process of contacting oxygen and argon to the substrate.

Unlike the first embodiment, in the second embodiment of the present invention, a platinum catalyst is deposited on a portion or all of the SiO ₂ substrate to a thickness of 1 to 3 nm, and 800 to 1200 ° C. is brought into contact with hydrogen on the deposited substrate. The temperature was raised to, followed by SiCl _{4 ,} SiH ₂ Cl ₂ , SiH ₄ on the elevated temperature for 20-40 minutes. Contact any one or more of the compounds. Thereafter, the temperature of the substrate may be lowered to 15 to 30 ° C., and hydrogen may be contacted to finally grow the length of the nanowire (carbon nanotube) to a size of 10 μm or more.

In another embodiment, after dispersing a solution containing carbon nanotubes or nanowires synthesized using laser ablation or arc discharge on a substrate on which coordinate systems have been previously formed using electron beam lithography, The location of each nanowire may be determined using an atomic force microscope (AFM) or the like, and carbon nanotube transistors may be fabricated by generating an electrode using electron beam lithography at the determined location.

After fabricating the nanowire transistor and before the biorecognition molecule, that is, the aptamer is immobilized and functionalized, it is desirable to protect the metal electrode and the insulating material following the metal wire, for example, PMMA, SiO ₂ , or nitride film. Therefore, the metal electrode, which is susceptible to chemical action, can block the reaction with a solution such as an electrolyte, and can block the offset current due to the ion current generated in the measurement of the electrolyte atmosphere.

The nanowire of the present invention is preferably a material having a semiconductor characteristic in order to be used as a channel of the transistor. For example, the structure of carbon nanotubes is a structure in which one graphite plane is rounded, and a single-walled carbon nanotube composed of one graphite plane and multiple layers of graphite planes form one central axis. Dried is multi-walled carbon nanotubes. The single-walled carbon nanotubes have metal or semiconductor properties depending on the diameter, and in the case of semiconductor-specific carbon nanotubes, energy gaps appear in inverse proportion to the diameter.

The nanowires forming the transistor of the present invention produced in this way are partitioned in series as a plurality of detection units that recognize one or more biomaterials. Here, in order to measure the electrical conductivity of the nanowire channel of each detection unit, it is electrically connected to correspond to each source or drain metal electrode. In particular, each detection unit is formed on one nanowire, but each detection unit is characterized in that the channel region is partitioned in series without overlapping each other. In particular, each of the detection units may be partitioned to have the same nanowire channel length in order to have exactly the same electrical structures. As each detection unit does not share its channel area, each detection unit has its own channel area, and the pressure for recognizing a specific biomolecule on the surface of the nanowire corresponding to the channel area of each detection unit. By functionalizing with a tamper or the like, a detection unit for recognizing a specific biomolecule is formed. Therefore, by measuring the electrical conductivity between the specific source and the drain electrode, it is possible to measure the detection signal in which the specific functionalized specific detection unit reacts with the specific biomolecule.

Specifically, the detection units each have one or more aptamers that specifically react or bind with the target biomaterial on its surface, and the aptamer included in one detection unit recognizes the same kind of target biomaterial. That is, the aptamers are fixed in series on the nanowires, and the aptamers are gathered one or more in succession to form one detection unit, and one or a plurality of aptamers belonging to one detection unit are all the same type of target biomass. Recognize matter. On the other hand, since each detection unit can recognize the same target biomaterial or different types of target biomaterials, and can vary the number of aptamers belonging to one detection unit, this allows for different types of target biomaterials. Can be detected very precisely and qualitatively at a time, as well as quantitatively detecting the target biomaterial. For example, the aptamer a that recognizes the biomaterial A, the aptamer b that recognizes the biomaterial B, and the aptamer c that recognizes the biomaterial C are positioned in series in the form of "aaaabbccccaabc" on the surface of the nanowire. The detection units are "aaaa", "bb", "cccc", "aa", "b", and "c" which are all six. At this time, if only the biomaterials "A" and "B" exist in the sample, when a current is applied to the biosensor, the reaction occurs in all detection units except the third and sixth. On the other hand, in the case of biomaterial A, there are two detection units that recognize this, but since the sensitivity is different for each detection unit, the concentration of biomaterial A may be quantitatively analyzed by comparing two current changes. Specifically, assuming that the first detection unit is sensitive above the specific concentration X of biomaterial A, and the third detection unit is sensitive at the specific concentration Y of biomaterial A (greater than X), the first and third detection units If both are sensitive, the concentration of biomaterial A is above Y. If only the first detection unit is sensitized, the concentration of biomaterial is greater than X and less than Y. If neither detection unit is sensitive, the concentration of biomaterial is below X. That is, since the number of aptamers provided in each detection unit is different, it is also possible to quantitatively analyze the biomaterial A through a method of applying a current to check the peak of the graph. In addition, it is also possible to achieve the accuracy of the sensor by having the same number of aptamers included in the detection unit.

In the method of electrically connecting the detection units, as illustrated in FIG. 1, it is preferable that each detection unit shares a source electrode 14 but has a method of independently forming a drain electrode 15. Therefore, when measuring the electrical conductivity corresponding to each detection unit, by measuring the electrical conductivity while fixing the source electrode and changing only the drain electrode, it is possible to sequentially measure the electrical signals of all detection units. In this case, more preferably, by having a symmetrical structure of the source electrode on both sides of the independent drain electrode, the surface of the nanowire can be effectively used by allowing two identical channel structures in one detection unit.

As another example of the electrical connection method, as shown in Figure 2, one electrode provides a simple structure that can be used simultaneously to share the electrode of the neighboring detection unit of both neighboring. More specifically, the electrodes 32 and 33 may be used to measure the electrical conductivity of the specific detection unit functionalized with the specific aptamer 16 of FIG. 2. In this case, the electrode 33 is reused as a source electrode in order to measure the electrical conductivity of the detection unit functionalized by the specific aptamer 17, which is its adjacent channel, to provide a spatially simple and efficient method.

On the other hand, the biomaterials usable in the present invention are not limited as long as they can be detected by conventional biosensors, and preferably, not only tumor markers including CEA, AFP, PSA, but also E. coli, viruses, and the like. The aptamer to be reacted or bound with the substance is preferably used for the type of biomaterial in any one or more compounds selected from the group consisting of nucleic acids, amino acids, peptides, proteins, enzyme substrates, ligands, cofactors, antisenses, organic small molecules and carbohydrates. According to the present invention, the nucleic acid may be preferably a single chain deoxynucleotide. For example, DNA which immobilizes a ligand biotin as an aptamer on the surface of the nanowire of the present invention and detects streptoavidin which specifically reacts with the biotin, immobilizes DNA and complementarily binds to the DNA Can be detected and used for genome analysis, mutation search, pathogenic bacteria diagnosis, and the like. Furthermore, single-chain deoxynucleotides can be immobilized on the surface of the nanowires and used for gas detection such as trimethylamine.

The biomolecule detection method according to the present invention will be described in detail. In the above-described biosensor, biomolecules can be detected through a change in electrical conductivity between a drain provided in one detection unit and a shared source electrode. For example, specific biomolecules corresponding to one specific detection unit are combined to change the electrical conductivity of the detection unit. At this time, the presence of the specific biomolecule is detected by reading the change in electrical conductivity.

According to another aspect of the present invention, a method for detecting biomolecules may detect biomolecules by measuring electrical conductivity of a plurality of detection units by a method of a four-point probe, which is one of methods for measuring current. For example, by connecting both ends of a nanowire to a constant current source system to allow a constant current to flow, and to measure the voltage drop of each detection unit with a voltage meter to measure the resistance value or electrical conductivity of the detection unit. In this case, it provides an advantage of eliminating the measurement error due to the junction resistance of the metal wire and the nanowire connected to the electrode.

The present invention will be described in more detail with reference to the accompanying drawings. First, FIG. 1 relates to a nanowire 10 forming a part of a transistor as an embodiment of the present invention, wherein the nanowire is a substrate 11. It is disposed in, and connected to the metal wires (12, 13) and the metal electrode extending from a predetermined position of the nanowire to apply a current to the nanowire through the source electrode 14 and the drain electrode (15). Aptamers (16 to 21) for detecting a target biomaterial partitioned by the metal electrode is located on the surface of the nanowire. At this time, the aptamers fixed in series in the longitudinal direction on the surface of the nanowires are respectively partitioned by metal lines 13 connected to the metal electrodes, and a path of current between one specific drain electrode 15 and source electrode 14 is provided. Therefore, the same biomolecule recognition material is formed. That is, the same aptamer in FIG. 1 recognizes the same kind of biomaterial. Therefore, the aptamers 16 to 21 all recognize different kinds of biomaterials. The method for detecting the actual biomolecule is as follows. The blood of the patient to be tested is dropped on the sensor reaction part (nanowire) to react the sensor, and after a suitable time, the change in electrical conductivity is measured at the source electrode 14 shared with each drain electrode. In this case, it is not necessary to continuously supply a voltage to the channel of the sensor, and a resistance may be read by connecting a measuring device, for example, a resistance meter, to measure the electrical conductivity of each detection unit. More preferably, in order to monitor the real-time detection signal, a target material, for example, blood, to be detected is dropped on the sensor reaction part (nanowire) while the source electrode 14 of FIG. 1A is connected to the measuring device source terminal. . At this time, the electric conductivity of each cycle can be recorded in real time by measuring the current of each drain electrode 15 at each cycle through an automatic switching converter (74 in FIG. 6). Each cycle is preferably 1 second to 1 minute, and according to the reaction rate of the target biomolecule, the real time measurement recording time can be arbitrarily adjusted according to the purpose of diagnosis. In a more preferable measurement method, a plurality of identical detection units are formed for quantitative measurement, and the target material is qualitatively determined by examining the detection units in which the electric conductivity changes.

2 is configured to apply a four-point probe method of measuring the resistance of the nanowires so as to ignore the effect of the junction resistance between the metal and the semiconductor as an embodiment of the present invention. Hereinafter, except for the same parts as in the first embodiment, the description will be mainly focused on different parts. For example, in FIG. 2, a current source system is electrically connected between the metal electrode 40 and the metal electrode 41 so that a constant current flows. At this time, since it is partitioned in series, the same current flows through the channels of all detection units. At this time, the resistance value or the electric conductivity of the detection unit can be measured by reading the voltage difference between the electrodes on both sides of each detection unit. have. For example, in order to measure the electrical conductivity of the detection unit functionalized by the aptamer 16, the voltage difference between the electrode 32 and the electrode 33 may be measured by a voltmeter to measure the accurate electrical conductivity. In this case, it provides an advantage of eliminating the measurement error due to the junction resistance of the metal wire and the nanowire connected to the electrode.

3 shows a method of selectively proceeding to a specific compartment when immobilizing the aptamer, a biorecognition molecule, on the surface of the nanowire. FIG. 3A is a photographic process and FIG. 3B is a method using a micro spatter, but is not limited thereto. Do not. In detail, as shown in FIG. 3A, a photomasking operation is performed for functionalization in a specific section, and the photolithography process is performed so that only a region to be functionalized is opened. Thereafter, the aptamer 52 is immersed in the solution or the solution is dropped to fix the aptamer.

On the other hand, the method of using the micro spatter is simpler. Specifically, as illustrated in FIG. 3B, the solution containing the aptamer 52 is directly sprayed on a specific portion to functionalize the solution. Given the productivity and cost of manufacturing, the appropriate method can be used among the two methods, or a combination of the two methods can be used. As a preferred example, the length of each compartment is preferably 20 to 50 μm, but when using a photographic process, a compartment having a length of less than 1 μm is also possible. At this time, each of the partitioned electrodes (drain) and the source electrode of the transistor functionalized in series is packaged into a single chip using a wire bonder and the like to easily interface with the measuring equipment.

Figure 4 is an optical micrograph of a nanowire having a length of 1000㎛ or more of the present invention, silicon nanowires having a length of 1000 micrometers or more are disposed on the metal wire 60 arranged periodically. The silicon nanowires begin at arrow 61 and extend out of the image of the optical microscope.

FIG. 5 shows in real time the electrical conductivity of carbon nanotube transistors when exposed to 5 μl of a solution containing AFP in an AFP-antibody functionalized nanotube transistor targeting AFP present in liver cancer cells.

FIG. 6 shows a diagram of partitioning and functionalizing various biorecognized molecules in series on one nanowire. For example, A, B, C, D, E, F function as antibodies that bind and respond well to CEA, AFP, PSA, b-hcg, CA 125, CA 19-9, respectively. At this time, the specific target molecule may be selected and measured by using an electrical or mechanical switch 74. For example, A is breast cancer, B is liver cancer, C is prostate cancer, D is gastric cancer, F is breast cancer, prostate cancer, esophageal cancer; G is a target molecule associated with esophageal cancer. The functionalization is completed and the nanowire sensor manufactured on the wafer proceeds by wire bonding with a gold wire 73 or the like, and selects a section to be measured with the switch 74 to read the value with the ammeter 75 or the like.

The present invention can detect various biomaterials qualitatively and / or quantitatively effectively, and thus may be very useful for the biosensor industry.

1A and 1B are a plan view and a cross-sectional view of a serially functionalized biosensor in accordance with one embodiment of the present invention.

2A and 2B are plan and cross-sectional views of a biosensor according to an exemplary embodiment of the present invention.

3A is a conceptual diagram of a method of using a photographic process among the methods of functionalizing long nanowires into multiple cognitive molecules, and FIG. 3B is a conceptual diagram of a method of using a microspotter.

4 is an optical micrograph of a nanowire having a length of 1000 μm or more of the present invention.

FIG. 5A is a conceptual diagram showing real-time electrical property measurement by AFP tumor markers of nanowire transistors functionalized with specific antibodies, and FIG. 5B is a graph of the results.

6 is a conceptual diagram illustrating a process of detecting a biomaterial using the biosensor of the present invention.

<Description of the symbols for the main parts of the drawings>

10: nanowire

11: substrate

12, 13: metal wire

14: source electrode

15: drain electrode

16, 17, 18, 19, 20, 21: aptamer

30, 31: metal wire

32, 33, 34, 35, 37, 37, 38: voltage measuring electrode

40, 41: source and drain electrodes

50: liquid containing the photosensitive film 51 molecular recognition material

52: aptamer 55 microspatter

60 metal wire

70, 72: source and drain electrodes

71: metal wire

73: electric signal connection cable (gold wire)

74: selector switch

75: current meter

Claims (32)

The nanowire is provided with a plurality of detection units partitioned in the longitudinal direction, One or more electrodes are electrically connected to each of the plurality of detection units to provide source and drain electrodes on both sides of the detection unit, wherein the source and drain electrodes form a channel of a transistor, and the detection within the channel. Unit is located, The plurality of detection units are located in series so as not to overlap each other, One of each of the source electrode and the drain electrode provided in the plurality of detection units is provided to be shared with each other for the plurality of detection units, and the other is provided independently of the plurality of detection units. , And detecting a biomaterial located in the detection unit from the change in electrical conductivity in the plurality of detection units. The biosensor of claim 1, wherein the nanowires are carbon nanotubes. The biosensor of claim 2, wherein the nanowires are single-walled carbon nanotubes and have semiconductor characteristics. The biosensor of claim 1, wherein the nanowire is a compound semiconductor of silicon, germanium, or GaN. The method of claim 1, The length of the nanowire is the biosensor, characterized in that 10㎛ ~ 10 cm. delete delete delete delete The biosensor according to claim 1, wherein an aptamer specifically reacts or binds to the biomaterial on the surfaces of the plurality of detection units. The biosensor of claim 1, wherein the biomaterial is any one selected from the group consisting of proteins, organic small molecules, peptides, nucleic acids, and enzyme substrates. The biosensor of claim 10, wherein the aptamer is at least one selected from the group consisting of nucleic acids, amino acids, peptides, proteins, enzyme substrates, ligands, cofactors, antisenses, organic small molecules, and carbohydrates. The biosensor of claim 12, wherein the nucleic acid is a single chain deoxynucleotide. The biosensor according to claim 10, wherein 1 to 6 kinds of aptamers are provided in the plurality of detection units in the same or different numbers. The biosensor of claim 10, wherein the plurality of detection units recognize one or more types of biomaterials. The biosensor according to claim 1, wherein at least one of the plurality of detection units is not provided with an aptamer that specifically reacts or binds with the biomaterial. The biosensor according to claim 1, wherein the number of detection units is 1000 or less. delete The biosensor according to any one of claims 1 to 5 or 10 to 17, wherein the biomolecule is detected by measuring electrical conductivity of a plurality of detection units by a four-point probe method. Method of detecting molecules. delete delete delete delete delete delete delete delete delete delete delete The biosensor having one or more aptamers in different numbers of the biosensors according to claim 14, wherein the biomaterial specifically reacts with the aptamers from the electrical conductivity change of the two or more detection units. Detection method of a biomolecule, characterized in that the detection. The method according to any one of claims 1 to 5 or 10 to 17, The biosensor, characterized in that for measuring the electrical conductivity is selectively connected to the source electrode or the drain electrode provided independently for the plurality of detection units via a switch means.

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