KR100907444B1 - Catalyst-type perfluoro compound treatment apparatus and method having resistance for particulate matter - Google Patents

Abstract

The present invention relates to a catalytic perfluorinated compound treatment apparatus and method having resistance to particulate matter, and more particularly, to improve the structure of the catalytic reactor to increase the resistance to particulate matter introduced simultaneously with PFC gas, catalytic decomposition A catalytic perfluorinated compound treatment apparatus and method having a resistance to particulate matter that minimizes pressure loss in a reactor and improves ease of catalyst replacement.

Accordingly, the present invention is provided with a catalytic reactor consisting of a cylindrical outer frame, an inner frame mounted on the inside of the outer frame and a stopper mounted on the outer frame, so that waste gas containing particulate matter and PFC flows into the catalytic reactor in the transverse direction. The present invention provides a catalytic perfluorinated compound treating apparatus and method having resistance to particulate matter dispersed evenly over the entire catalyst portion.

Particulate matter, perfluorinated compounds, waste gases, catalysts, cyclones, cartridges, plugs

Description

Catalytic-type perfluoro compound treatment apparatus and method having resistance for particulate matter}

The present invention relates to a catalytic perfluorinated compound treatment apparatus and method having resistance to particulate matter, and more particularly, to improve the structure of the catalytic reactor to increase the resistance to particulate matter introduced simultaneously with PFC gas, catalytic decomposition A catalytic perfluorinated compound treatment apparatus and method having a resistance to particulate matter that minimizes pressure loss in a reactor and improves ease of catalyst replacement.

In general, a perfluoro compound (PFC, hereinafter referred to as "PFC") is a gas widely used as an etchant in a semiconductor etching process and a chamber cleaner in a chemical vapor deposition process.

However, since the PFC used in the semiconductor process is not consumed in the whole process, unreacted gas is often left, and in addition, a secondary gas may be generated. In some cases.

As the PFC for this purpose, CF ₄ , CHF _{3 ,} NF ₃ , SF _6, etc. may be used. Furthermore, the cleaning agent and the etching agent may be substituted for the conventional chloro-fluorocarbon (CFC) as well as the semiconductor process. It may also be included in the waste gases emitted from processes and workplaces used for the purpose of solvents, reaction materials, and the like.

Although PFCs are safer and more stable than conventional CFCs, the global warming potential is thousands to tens of thousands times higher than that of carbon dioxide.

Therefore, the discharge of PFCs into the atmosphere is subject to regulation to protect the environment, and the regulation is expected to be strengthened in the future.

Therefore, in order to treat the PFC contained in the waste gas discharged from the semiconductor process or the PFC process and the workplace, various removal methods such as i) direct combustion method, ii) plasma decomposition method, iii) recovery method, and iv) catalytic decomposition method are known. However, there is a problem in each of the technologies, and there are still problems in commercial applications.

Specifically, referring to the PFC removal method, i) the direct combustion method is a method of directly burning a waste gas containing PFC at a high temperature of 1,400 ° C. or more using a combustible gas, which is one of the simplest PFC treatment methods.

However, due to the high reaction temperature, various additional problems occur. In particular, nitrogen and oxygen, which are included with PFC in the waste gas, react to not only generate a large amount of thermal NOx, but also decompose PFC. The corrosion of the device is severely caused by the HF generated at the time, and there is a problem in that excessive costs for nitrogen oxide treatment and device maintenance are required.

ii) Plasma Decomposition is a technique that decomposes and removes waste gas containing PFC through the plasma region, and is effective for PFC decomposition, but because it uses plasma of high energy state, it is secondary of radicals generated by indiscriminate decomposition of PFC. There is a problem that various kinds of by-products are generated by the reaction.

In addition, there is a problem in the durability and economical efficiency of the plasma generator for generating plasma stably for a long time.

iii) The recovery method is a method of separating and recovering the PFC component contained in the waste gas by using a pressure swing adsorption (PSA) or a membrane (membrane), and is preferable in view of the possibility of recycling the PFC. In the case of treating irregularly discharged PFC, it is a low economic method.

iv) Catalytic cracking is widely used as an alternative to direct cracking and plasma cracking because it can significantly reduce the generation of thermal NOx and device corrosion by inducing PFC decomposition at low temperatures of 500-800 ° C using catalysts and water vapor. Has been studied.

However, operating conditions of 500 to 800 ℃ is a high obstacle to ensuring the durability of the catalyst is still a high temperature condition to maintain the activity for a long time without physical or chemical changes.

In other words, the development of a catalyst having a durable durability in the reaction atmosphere of 500 ~ 800 ℃ where HF and water vapor generated by by-products are present at the same time is the key to commercialization, and therefore, the development of PFC decomposition catalyst has continued until recently. .

In addition, the catalytic cracking method uses a catalytic scrubber, since the PFC waste gas treated by the catalytic scrubber contains a large amount of particulate matter, so that particulate matter introduced together with the waste gas is deposited on the catalytic scrubber, whereby There is a problem of clogging or deterioration of the catalytic performance.

In order to overcome the problem of PFC scrubber with low resistance to particulate matter, Korean Patent Laid-Open No. 1999-0045278 discloses a method of removing particulate matter by installing a wet scrubber using water or alkaline water in front of the catalyst layer to protect the catalyst. Started.

However, when the wet scrubber is used, it is greatly effective in removing particulate matter of a normal size, but there is a problem in that it is difficult to completely protect the catalyst because there is a limit in removing particulate matter smaller than a micron.

In addition, in Japanese Patent Application Laid-Open No. 2005-319401 and Japanese Patent Laid-Open No. 2005-185933, in order to prevent particulate matter from entering the catalytic reactor for PFC decomposition, a catalyst is installed at the front of the catalytic reactor to solidify the component that generates particulate matter. A method of protection is disclosed.

However, the method has a problem that it is difficult to apply to a compact PFC scrubber of which the solidification apparatus is complicated and occupies a lot of installation space and has limitations on the installation site.

The present invention has been made in order to solve the above problems, by improving the structure of the catalytic reactor installed in the reaction section, the waste gas flowing into the catalytic reactor is in contact with the catalyst section in a transverse direction different from the conventional, the contact area The purpose of the present invention is to provide a catalytic perfluorinated compound treating apparatus and method having a resistance to particulate matter which facilitates replacement of the catalytic reactor by improving the decomposition efficiency of the catalytic part and forming the catalytic reactor in the form of a cartridge due to the maximization of the catalyst. have.

The present invention for achieving the above object

An introduction part through which waste gas is supplied; A preheater to preheat the supplied waste gas; A reaction unit in which the PFC of the preheated waste gas reacts with the catalyst to decompose the PFC; A steam supply unit supplying steam to the reaction unit for PFC decomposition; A cooling unit cooling the waste gas discharged from the reaction unit; A gas processing unit for removing corrosive gas from waste gas cooled by the cooling unit; In the catalytic perfluorinated compound processing apparatus having a resistance to particulate matter comprising a; water removal unit for removing the water of the waste gas containing water,

The reaction unit includes a catalytic reactor,

The catalytic reactor is formed in a cylindrical shape of the upper surface is open, the outer frame made of a porous material so that the waste gas flows in from the outside;

A cylindrical inner frame made of a porous material installed inside the outer frame to secure an inner space at a center thereof;

A catalyst unit filled between the outer frame and the inner frame to decompose PFC of the waste gas;

Characterized in that comprises a.

In a preferred embodiment, the catalytic reactor is characterized in that it further comprises a stopper mounted on the outer frame to block the waste gas is introduced into the catalytic reactor in the longitudinal direction.

In another preferred embodiment, the waste gas introduced through the inlet is heated by the preheater and moved to the reaction section;

The waste gas flowing into the reaction unit is uniformly dispersed in the transverse direction from the outer side of the catalytic reactor and transferred to the catalyst unit filled between the outer frame and the inner frame of the catalytic reactor;

PFC of the waste gas delivered to the catalyst unit is removed by reacting with the catalyst material, the waste gas from which the PFC is removed is discharged from the reaction unit through the central space of the inner frame of the catalytic reactor;

After the waste gas discharged from the reaction unit is cooled in the cooling unit, the corrosive gas contained in the waste gas is removed by the gas treatment unit;

After the water of the waste gas is removed by the water removal unit is discharged to the outside through the duct pipe;

Characterized in that comprises a.

As described above, the catalytic perfluorinated compound treating apparatus and method having resistance to particulate matter according to the present invention provide the following effects.

First, the waste gas flowing into the catalytic reactor is supplied transversely to the catalyst part having a large contact area, thereby minimizing the amount of particulate matter deposited on the catalyst part to resist the particulate matter contained in the PFC,

In addition, by designing the diameter and height of the catalytic reactor in an appropriate range to reduce the pressure loss in the catalyst portion,

In addition, the catalyst reactor is manufactured in the form of a packaged cartridge, thereby facilitating replacement of the catalytic reactor with respect to the reaction part.

In addition, since there is no need to install a pretreatment device such as a wet scrubber, there is an effect of minimizing the installation space.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. A singular expression includes a plural expression unless the context clearly indicates otherwise. In this application, the terms “comprises” or “having” are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and one or more other It is to be understood that the present invention does not exclude the possibility of the presence or the addition of features, numbers, steps, operations, components, parts, or a combination thereof.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram of a catalytic perfluorinated compound processing apparatus having resistance to particulate matter, FIG. 2 is a front view of a catalytic reactor according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. 4 is a flow chart illustrating a waste gas of a catalytic reactor according to an embodiment of the present invention.

In addition, Figure 5 is a schematic diagram of a catalytic perfluorinated compound treatment apparatus, Figure 6 is a mounting view of the catalytic reactor plug according to another embodiment of the present invention, Figures 7a and 7b is another embodiment of the present invention 8 is a front view of a catalytic reactor inner frame, and FIG. 8 is a front view of a catalytic reactor according to another embodiment of the present invention.

Catalytic perfluorinated compound processing apparatus using the catalytic reactor 170 provided by the present invention, as shown in Figures 1 and 5, usually, the introduction unit 100, the waste gas is supplied, and the preheated waste gas is preheated The unit 110, a reaction unit 120 in which the preheated waste gas reacts with the catalyst to decompose the PFC, a steam supply unit 130 supplying water vapor to the reaction unit 120 for PFC decomposition, and the reaction unit Cooling unit 140 to cool the waste gas discharged from the 120, the gas treatment unit 150 to remove the corrosive gas from the waste gas cooled in the cooling unit 140, and to remove the moisture of the waste gas containing water It is composed of a water removal unit 160.

In particular, in the present invention by improving the structure of the catalytic reactor 170 included in the reaction unit 120 so that the waste gas flows in the lateral direction of the catalyst unit 200, particulate matter contained in the waste gas is the catalyst unit ( Accumulation at 200) is minimized.

As shown in FIG. 2, the catalytic reactor 170 has a cylindrical outer frame 180 having an open upper surface, and a cylindrical shape mounted inside the outer frame 180 to form an inner space 220 at the center thereof. The inner frame 190 and the outer frame 180 and the inner frame 190 is filled between the catalyst unit 200 for decomposing the PFC of the waste gas.

The outer frame 180 and the inner frame 190 is made of a material resistant to corrosion and thermal corrosion, protected from corrosive gas contained in the waste gas, and made of a porous material or a mesh material, the waste gas is the outer frame 180 And the inner frame 190 passes through the outer wall, the catalyst filled in the outer frame 180 and the inner frame 190 does not pass through the outer wall of the outer frame 180 and the inner frame 190, the catalyst unit The catalyst material of 200 is prevented from flowing out of the catalytic reactor 170.

In addition, a lower portion of the outer frame 180 is formed with a connecting portion 230 protruding in the form of a disc as shown in FIG. 3, and the connecting portion 230 is coupled to the bottom surface of the reaction portion 120. By doing so, the outer frame 180 is connected and fixed to the reaction unit 120.

The inner frame 190 is mounted at the inner center of the outer frame 180 to secure a cylindrical inner space, so that the pressure loss of the catalytic reactor 170 can be minimized.

Here, the inner frame 190 may be formed as a conical 300 or inverted cone 310, the diameter of which is sequentially changed as shown in Figure 7a and 7b, the shape of the inner frame 190 Is not limited to the above form and can be freely modified.

The catalyst unit 200 is filled in the space between the outer frame 180 and the inner frame 190, except the central space of the inner frame 190, from the outside of the outer frame 180 surrounding the catalyst unit 200 The waste gas flows into the catalyst unit 200, and the waste gas introduced into the catalyst unit 200 moves to the cooling unit 140 through the central space 220 of the inner frame 190 surrounded by the catalyst unit 200.

In addition, the catalyst unit 200 may be made of aluminum oxide, aluminum complex oxide in which a transition material is added to aluminum oxide, or a composite phosphate in which a metal component is added. The decision is made by considering the efficiency versus the purchase cost of the catalyst.

In addition, the stopper 210 is installed on the upper portion of the outer frame 180 to seal the upper portion of the outer frame 180, so that the waste gas introduced into the reaction unit 120 is introduced into the catalyst unit 200 in the longitudinal direction. As a result, the waste gas flows from the outer side of the outer frame 180 and flows into the catalyst unit 200 in a lateral direction, thereby maximizing the area where the PFC of the waste gas reacts with the catalyst unit 200.

At this time, the stopper 210 is formed as a circular plate to be mounted without a free space with the outer frame 180, as shown in Figure 3, or is formed in a conical shape 320 as shown in Figure 6 the outer It is possible to be mounted with a free space between the frame 180, the stopper 210 is not limited in shape as long as it serves to seal the upper portion of the outer frame (180).

In another embodiment according to the present invention, as shown in FIG. 8, when the catalytic reactor 170 is installed without the stopper 210 installed, the waste gas is not only in the transverse direction of the outer frame 180. Since the amount of waste gas introduced in the longitudinal direction and introduced into the catalyst unit 200 increases, the amount of PFC decomposition of the catalyst unit 200 increases. However, this embodiment has a disadvantage in that the accumulation amount of particulate matter is increased than the embodiment in which the stopper 210 is installed to allow the waste gas to pass through the catalyst unit 200 only in the transverse direction.

Therefore, it is determined whether the stopper 210 is attached to the outer frame 180 in consideration of the generation amount, the generation speed, the type and the amount of particulate matter contained in the waste gas generated in the semiconductor process.

On the other hand, when the life of the catalyst unit 200 is to be replaced by pulling the handle (not shown) and the slide structure (not shown) installed in the reaction unit 120, the reaction unit 120 preheating unit 110 After separation from the catalyst reactor 170 mounted inside the reaction unit 120 separated as shown in Figure 4 is moved away by moving downward.

In addition, the step of installing the catalytic reactor 170 and the reaction unit 120 is performed in the reverse order to the separation order.

Here, the catalytic reactor 170 is formed in the form of a cartridge packaged with the outer frame 180, the inner frame 190, the catalyst unit 200 and the stopper 210, the catalytic reactor 170 to the reaction unit It becomes easy to attach or detach to the 120.

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Hereinafter, the catalytic reactor 170 according to the diameter ratio of the outer frame 180 and the inner frame 190 and the diameter ratio of the outer frame 180 and the height ratio of the catalytic reactor 170 using the accompanying drawings and tables. Let's compare the efficiency of

9 is a pressure graph according to the ratio of the diameter of the outer frame and the inner frame, and FIG. 10 is the pressure graph of the height ratio of the diameter of the outer frame and the catalytic reactor.

The conditions of the following Comparative Examples and Examples are the total flow rate of the waste gas flowing into the catalytic reactor 170 is 100 L / min, the type of particulate matter is SiH ₄ , the flow rate is 1 L / min, PFC gas is CF ₄ The flow rate is 0.5 L / min, the reaction temperature of the catalyst unit 200 is 750 degrees Celsius.

Pressure loss (mmH ₂ O) Driving time (minutes) PFC Treatment Efficiency (%) Remarks Comparative example 100 65 99  Aspect Ratio = 2    Example Division ratio (D1 / D2) 2.5 50 326 90   Aspect Ratio = 2 5 60 287 97 10 80 257 99 Aspect Ratio (H / D1) One 90 125 70  Division ratio = 10 2 80 257 99 4 50 597 99

Table 1 shows the characteristics of each example according to the diameter and height of the comparative example and the catalytic reactor described below.

Comparative Example

As a result of using a conventional catalytic reactor 170 in which waste gas is introduced into the catalyst unit 200 in the longitudinal direction, the pressure loss initially generated in the catalyst unit 200 was 100 mmH ₂ O, and 2) particulate matter. The inlet pressure of the catalytic reactor before the introduction of the material was -100 mmH ₂ O lower than the atmospheric pressure, and after 65 minutes after the introduction of the particulate material, the inlet pressure was increased to 0 mmH ₂ O. Removal efficiency of 99% was shown from 4,985 ppm.

Example 1

When the outer frame 180 diameter (D1) and inner frame 190 diameter (D2) ratio (D1 / D2) of the catalytic reactor 170 according to the present invention is 2.5,

1) The pressure loss initially generated in the catalyst unit 200 was 50 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before introducing the particulate matter was -100 mmH ₂ O lower than atmospheric pressure. After 326 minutes after the inflow, it increased to 0 mmH ₂ O, which is more than five times higher than the catalytic reactor 170 operating time of Comparative Example 1, and 3) PFC has 90% removal efficiency from the inlet concentration of 4,985 ppm. Indicated.

Example 2

When the outer frame 180 diameter D1 and the inner frame 190 diameter D2 ratio D1 / D2 of the catalytic reactor 170 according to the present invention are 5,

1) The pressure loss initially generated in the catalyst unit 200 was 60 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before the introduction of particulate matter was -100 mmH ₂ O lower than atmospheric pressure. After 287 minutes after the inflow, it increased to 0 mmH ₂ O and improved by more than 4.4 times compared to the operating time of the catalytic reactor 170 of Comparative Example 1, and 3) PFC removed 97% from the inlet concentration of 4,985 ppm. Indicated.

Example 3

When the outer frame 180 diameter D1 and the inner frame 190 diameter D2 ratio (D1 / D2) of the catalytic reactor 170 according to the present invention is 10,

1) The pressure loss initially generated in the catalyst unit 200 was 80 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before the introduction of particulate matter was -100 mmH ₂ O lower than atmospheric pressure. 257 minutes after the inflow was increased to 0 mmH ₂ O bar 3.9 times better than the catalytic reactor 170 operating time of Comparative Example 1, 3) PFC 99% removal efficiency from the inlet concentration of 4,985ppm Indicated.

Here, Examples 1 to 3 were tested under the condition that the ratio (H / D1, Aspect ratio) of the height H of the catalytic reactor 170 and the diameter D1 of the outer frame 180 was two.

Example 4

When the ratio (H / D1, Aspect ratio) of the height (H) and the outer frame 180 diameter (D1) of the catalytic reactor 170 according to the present invention is 1,

1) The pressure loss initially generated in the catalyst unit 200 was 90 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before introducing the particulate matter was -100 mmH ₂ O lower than atmospheric pressure. After 125 minutes, it increased to 0 mmH ₂ O, and 3) PFC showed 70% removal efficiency from 4,985 ppm of inlet concentration.

Example 5

When the ratio (H / D1, Aspect ratio) of the height (H) and the outer frame 180 diameter (D1) of the catalytic reactor 170 according to the present invention is 2,

1) The pressure loss initially generated in the catalyst unit 200 was 80 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before the introduction of particulate matter was -100 mmH ₂ O lower than atmospheric pressure. After 257 minutes, it increased to 0 mmH ₂ O. 3) PFC showed 99% removal efficiency from 4,985 ppm of inlet concentration.

Example 6

When the ratio (H / D1, Aspect ratio) of the height (H) and the outer frame 180 diameter (D1) of the catalytic reactor 170 according to the present invention is 4,

1) The pressure loss initially generated in the catalyst unit 200 was 50 mmH ₂ O. 2) The inlet pressure of the catalytic reactor before introducing the particulate matter was -100 mmH ₂ O lower than atmospheric pressure. After 597 minutes of inflow, it increased to 0 mmH ₂ O, and 3) PFC showed 99% of removal efficiency from 4,985 ppm of inlet concentration.

In this case, Examples 4 to 6 were tested under the condition that the outer frame 180 diameter D1 and the inner frame 190 diameter D2 ratio (D1 / D2) of the catalytic reactor 170 were 10.

As such, the pressure loss of the catalytic reactor 170 according to Examples 1 to 6 was lower than the pressure loss (100 mmH ₂ O) of the catalytic reactor 170 according to the comparative example, and when the inflow of particulate matter The operating time until the pressure of the inlet of the catalytic reactor was changed from -100 mmH ₂ O to 0 mmH ₂ O was improved by about 2 to 5 times more than that of the catalytic reactor 170 according to the embodiment. PFC removal efficiency of the catalytic reactor 170 according to the example was similar to the comparative example.

Here, the inlet pressure of the catalytic reactor means a pressure relative to the atmospheric pressure, and the inlet pressure of -100 mmH ₂ O indicates that the pressure of the catalytic reactor inlet is 100 mmH ₂ O lower than the atmospheric pressure.

Therefore, increasing the catalytic reactor operating time until the inlet pressure of the catalytic reactor changes by 100 mmH ₂ O means that the amount of particulate matter that can accumulate per unit volume in the catalytic reactor increases.

As a result, when the catalytic reactor 170 according to the embodiment of the present invention is designed in consideration of the above range, reducing the pressure loss of the catalyst unit 200 and increasing the operating time of the catalytic reactor 170, the removal efficiency of the PFC It is maintained at the same level as the prior art.

However, the diameter and height of the catalytic reactor 170 according to the present invention is not limited to the above embodiments, and may be modified depending on the type of PFC, the PFC-containing concentration of the waste gas, the flow rate of the waste gas, the flow rate and the reaction temperature of the PFC, and the like. .

Hereinafter, a catalytic perfluorinated compound treatment method using the catalytic reactor 170 according to the present invention will be described.

First, the waste gas introduced through the introduction unit 100 is heated by the preheater 110, and the waste gas heated by the preheater 110 moves to the reaction unit 120.

Next, as shown in FIG. 3, the waste gas introduced into the reaction unit 120 does not flow into the upper portion of the catalytic reactor 170 equipped with the stopper 210, but from the outside of the catalytic reactor 170. It is uniformly dispersed in the transverse direction and is delivered to the catalyst unit 200 filled between the outer frame 180 and the inner frame 190 of the catalytic reactor 170.

The PFC of the waste gas delivered to the catalyst unit 200 is removed by reacting with the catalyst material, and the waste gas from which the PFC is removed is discharged from the reaction unit 120 through the central space of the inner frame 190 of the catalytic reactor 170. The cooling unit 140 undergoes a cooling process.

Subsequently, the corrosive gas contained in the waste gas is removed by the gas treatment unit 150 after the cooling process, and the moisture of the waste gas is removed by the water removing unit 160 and then discharged to the outside through the duct pipe.

While the invention has been shown and described with respect to certain preferred embodiments thereof, the invention is not limited to these embodiments, and has been claimed by those of ordinary skill in the art to which the invention pertains. It includes all the various forms of embodiments that can be carried out without departing from the spirit.

1 is a block diagram of a catalytic perfluorinated compound processing apparatus having resistance to particulate matter,

2 is a front view of a catalytic reactor according to an embodiment of the present invention,

3 is a waste gas flow diagram of a catalytic reactor according to one embodiment of the present invention,

4 is a replacement start diagram of a catalytic reactor according to one embodiment of the present invention;

5 is a perspective view schematically showing the apparatus of FIG. 1;

6 is a mounting view of the catalytic reactor plug according to another embodiment of the present invention,

7A and 7B are views of the inner frame of the catalytic reactor according to another embodiment of the present invention,

8 is a front view of a catalytic reactor according to another embodiment of the present invention,

9 is a pressure graph according to the ratio of the diameter of the outer frame and the inner frame,

10 is a pressure graph according to the ratio of the diameter of the outer frame and the height of the catalytic reactor.

<Description of the symbols for the main parts of the drawings>

120: reaction unit 170: catalytic reactor

180: outline 190: inner frame

200: catalyst 210: stopper

230: connection

Claims (11)

An introduction part through which waste gas is supplied; A preheater to preheat the supplied waste gas; A reaction unit in which the PFC of the preheated waste gas reacts with the catalyst to decompose the PFC; A steam supply unit supplying steam to the reaction unit for PFC decomposition; A cooling unit cooling the waste gas discharged from the reaction unit; A gas processing unit for removing corrosive gas from waste gas cooled by the cooling unit; In the catalytic perfluorinated compound processing apparatus having a resistance to particulate matter comprising a; water removal unit for removing the water of the waste gas containing water, The reaction unit includes a catalytic reactor, The catalytic reactor is formed in a cylindrical shape of the upper surface is open, the outer frame made of a porous material so that the waste gas flows in from the outside; A cylindrical inner frame made of a porous material installed inside the outer frame to secure an inner space at a center thereof; A catalyst unit filled between the outer frame and the inner frame to decompose PFC of the waste gas; Catalytic perfluorinated compound processing apparatus having a resistance to particulate matter, characterized in that comprising a. The catalytic overcharge of claim 1, wherein the catalytic reactor further comprises a stopper mounted on the outer frame to block waste gas from flowing into the catalytic reactor in a longitudinal direction. Chemical Compound Treatment Apparatus. The apparatus according to claim 2, wherein the ratio (D1 / D2) of the outer frame diameter (D1) and the inner frame diameter (D2) is 1.2 or more and 10 or less. . The ratio (D1 / D2) of the outer frame diameter (D1) and the inner frame diameter (D2) is 2.5 or more and 10 or less, and the height (H) and the outer frame diameter (D1) of the catalytic reactor A catalytic perfluorinated compound treating apparatus having resistance to particulate matter, wherein the ratio (H / D1) is 2. The catalytic perfluorinated compound treating apparatus having resistance to particulate matter according to claim 2, wherein the ratio (H / D1) of the height (H) and the outer diameter (D1) of the catalytic reactor is 1 or more and 10 or less. . 3. The ratio H / D1 of the height H and the outer diameter D1 of the catalytic reactor is 1 or more and 4 or less, and the outer diameter D1 and the inner diameter D2 of the catalyst reactor. A catalytic perfluorinated compound treating apparatus having resistance to particulate matter, wherein the ratio (D1 / D2) is 10. delete The method according to claim 2, wherein the catalytic reactor is a catalyst type overcharge having resistance to particulate matter, characterized in that the outer frame, the inner frame, the catalyst portion and the stopper packaged cartridge form is easy to attach and detach the reaction portion Chemical Compound Treatment Apparatus. The catalytic perfluorinated compound processing apparatus of claim 2, wherein the inner frame is formed in a cylindrical or conical shape to secure an inner space. The apparatus of claim 2, wherein the stopper is formed in a disk shape or a cone shape sealing the upper portion of the outer frame. The waste gas introduced through the introduction part is heated by the preheater and moved to the reaction part; The waste gas flowing into the reaction unit is uniformly dispersed in the transverse direction from the outer side of the catalytic reactor and transferred to the catalyst unit filled between the outer frame and the inner frame of the catalytic reactor; PFC of the waste gas delivered to the catalyst portion is removed by reacting with the catalyst material; The waste gas from which the PFC is removed is discharged from the reaction unit through the inner space of the inner frame of the catalytic reactor; After the waste gas discharged from the reaction unit is cooled in the cooling unit, the corrosive gas contained in the waste gas is removed by the gas treatment unit; After the water of the waste gas is removed by the water removal unit is discharged to the outside through the duct pipe; Catalytic perfluorinated compound treatment method having a resistance to particulate matter, characterized in that comprising a.

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