KR100877941B1 - Method of menufacturing a probe, probe and measurement device for measuring complex permittivities and complex permeabilities - Google Patents

Abstract

The complex permittivity and complex permeability measurement probes include a center conductor, a first dielectric, a first coaxial conductor, a second dielectric, a second coaxial conductor, and a connection. A portion of the coaxial line is removed to form the first dielectric, the first coaxial conductor, the second dielectric, and the second coaxial conductor. The connecting portion electrically connects the first coaxial conductor and the second coaxial conductor. Therefore, the probe can be easily manufactured, the probe can be semi-permanently reused, the sample to be measured can be easily filled in the probe, and the complex dielectric constant and complex permeability can be easily measured.

Complex permittivity measurement, complex permeability measurement

Description

METHOD OF MENU FACTURING A PROBE, PROBE AND MEASUREMENT DEVICE FOR MEASURING COMPLEX PERMITTIVITIES AND COMPLEX PERMEABILITIES}

1 is a perspective view showing a probe according to an embodiment of the present invention.

2 is a flow chart showing a probe manufacturing method according to an embodiment of the present invention.

3 is a perspective view showing a probe according to an embodiment of the present invention.

4 is a perspective view showing a probe according to an embodiment of the present invention.

5 is a block diagram illustrating a measuring device according to an exemplary embodiment of the present invention.

FIG. 6 is a cross-sectional view taken along line II ′ of FIG. 3.

7 is a block diagram illustrating an equivalent circuit of the probe of FIG. 3.

8 is a cross-sectional view taken along line II-II ′ of FIG. 3.

9 is a view showing an example in which the measuring device according to an embodiment of the present invention measures the complex dielectric constant and the complex permeability of a sample.

10 is a flowchart showing a measuring method according to an embodiment of the present invention.

FIG. 11 is a flowchart illustrating a calculation step of the measuring method of FIG. 10.

<Explanation of symbols for main parts of the drawings>

100, 300, 400: probe 1000, 2000: measuring device

500: network analyzer 600: data processor

700: samples 111, 311, and 411: center conductor

112, 312, 313, 412, 413: connecting conductor

121: open part

131, 132, 331, 332, 431, 432: coaxial conductor

141, 142, 341, 342, 441, 442: dielectric

450: support 610: parameter conversion unit

602: parameter calculator 603: calculator

The present invention relates to a material constant measurement, and more particularly, to a method for manufacturing a probe for measuring the complex dielectric constant and complex permeability, a probe, a measuring device, and a measuring method.

Recently, with the development of the information and communication industry, the demand for various electronic devices and materials employed in communication devices is increasing. Examples of electronic devices and materials include passive devices such as RF filters, resonators, capacitors, and inductors used in mobile communication terminals, and electromagnetic wave absorbers for suppressing electromagnetic interference (EMI). In the case of employing such a device or material, precise measurement of material constants, for example, complex permittivity and complex permeability, in the electromagnetic band is required. Material constant measurement methods include a cavity resonant method, a free space method, and a waveguide method.

The cavity resonant technique is a method of measuring the complex dielectric constant and complex permeability of a sample from changes in resonant frequency and quality factor before and after filling a sample under measurement in all or part of the cavity. The cavity resonant technique is not suitable for the measurement of a large loss sample because it assumes a small change in the resonance frequency before and after the sample to be charged.

The free space method assumes free space as a transmission line and fills a sample under test in free space to measure complex permittivity and complex permeability from measurement results of reflection and transmission coefficients. In the free space method, the reflection coefficient of the sample must be accurately measured in order to accurately determine the material constant. However, the phase error of the reflection coefficient is likely to occur due to the error of the reflection surface according to the method of fixing the sample. Therefore, it is difficult to accurately measure the complex permittivity and the complex permeability.

The waveguide method is also called a coaxial cable method. The sample is filled inside a transmission line such as a coaxial line or a waveguide, and the complex dielectric constant and complex of the sample is changed by using a change in the transmission characteristics of the portion where the sample is filled. A measure of permeability. The waveguide method has a wide measurable frequency range and has the advantage of measuring gaseous and liquid dielectrics.

However, in the conventional coaxial line method, since the complex dielectric constant and the complex permeability are measured by inserting a sample to be measured in a limited space, it is difficult to fill the sample at a specific position inside the coaxial line. In addition, even if the conventional coaxial line method is filled with the sample inside the coaxial line to measure the complex dielectric constant and complex permeability, in order to measure the complex dielectric constant and complex permeability of other samples completely removed the sample packed inside the coaxial line And the other sample must be refilled. Therefore, the coaxial line used to measure the complex permittivity and the complex permeability by the conventional coaxial line method, that is, the conventional probe, can measure the complex permittivity and the complex permeability once.

In order to solve the above problems, an object of the present invention is to provide a probe manufacturing method that can be semi-permanently reused, and can easily fill the sample to be measured.

Another object of the present invention is to provide a probe that can be semi-permanently reused and easily fills a sample to be measured.

Furthermore, an object of the present invention is to provide a measuring device that can easily fill a sample to be measured, can be semi-permanently reused, and can easily measure complex dielectric constant and complex permeability.

Moreover, an object of this invention is to provide the measuring method which can easily fill a sample to be measured and can measure a complex dielectric constant and complex permeability easily.

In order to achieve the above object, in the probe manufacturing method according to an embodiment of the present invention, by removing a portion of the coaxial conductor in the coaxial line to separate the coaxial conductor into the first coaxial conductor and the second coaxial conductor, the removed A portion of the dielectric corresponding to the portion of the coaxial conductor is removed, and the first coaxial conductor and the second coaxial conductor are electrically connected.

The first coaxial conductor and the second coaxial conductor may be electrically connected through one connection conductor. In addition, the first coaxial conductor and the second coaxial conductor may be electrically connected through a first connection conductor, and may be electrically connected through a second connection conductor symmetrical with the first connection conductor with respect to the center conductor. .

The coaxial line may be molded in a '' shape. In addition, a support for maintaining the '' 'shape of the coaxial line may be formed.

A probe according to an embodiment of the present invention includes a center conductor, a first coaxial conductor, a first dielectric, a second coaxial conductor, a second dielectric, and a connection portion.

The center conductor is cylindrical. The first coaxial conductor is formed in a hollow cylindrical shape coaxial with the center conductor from one side of the center conductor. The first dielectric is formed between the center conductor and the first coaxial conductor. The second coaxial conductor is separated from the first coaxial conductor and is formed in a hollow cylindrical shape coaxial with the center conductor from the other side of the center conductor. The second dielectric is formed between the center conductor and the second coaxial conductor. The connection part electrically connects the first coaxial conductor and the second coaxial conductor.

The connection part may include one connection conductor electrically connecting the first coaxial conductor and the second coaxial conductor. The connecting part may be configured to be symmetrical with the first connecting conductor, the first connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor, and the center conductor, and the first coaxial conductor and the second coaxial conductor. It may include a second connecting conductor for electrically connecting the coaxial conductor.

The probe may have a '' shape. In addition, the probe may further include a support for maintaining the '' 'shape. In some embodiments, the probe may be made compact using MEMS technology or LTCC technology.

Measurement apparatus according to an embodiment of the present invention includes a probe, a network analyzer, and a data processor.

The probe has a coaxial conductor and a dielectric removed from a portion of the coaxial line, and a sample to be measured is filled in an open portion, and the first coaxial conductor and the second coaxial conductor formed by removing the coaxial conductor are electrically connected to each other. The network analyzer is electrically connected to the probe to measure the S-parameters of the probe filled with the sample to be measured. The data processor calculates a complex permittivity and a complex permeability from the S-parameters measured from the network analyzer.

The probe may have a cylindrical center conductor, a first coaxial conductor formed in a hollow cylindrical shape coaxial with the center conductor from one side of the center conductor, and a first dielectric formed between the center conductor and the first coaxial conductor. And a second coaxial conductor separated from the first coaxial conductor and formed into a hollow cylindrical shape coaxial with the center conductor from the other side of the center conductor, a second formed between the center conductor and the second coaxial conductor. It may include a dielectric, and a connecting portion for electrically connecting the first coaxial conductor and the second coaxial conductor.

The connection part may include one connection conductor electrically connecting the first coaxial conductor and the second coaxial conductor. The connecting part may be configured to be symmetrical with the first connecting conductor, the first connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor, and the center conductor, and the first coaxial conductor and the second coaxial conductor. It may include a second connecting conductor for electrically connecting the coaxial conductor.

The data processor includes a parameter converter for converting the S-parameter into a measured T-parameter, a parameter calculator for calculating an equivalent T-parameter of an equivalent circuit of the probe filled with the sample to be measured, and the measured T-parameter. And a calculation unit for calculating a complex dielectric constant and a complex permeability based on the equivalent T-parameter. The calculation unit may utilize the coefficients calculated by a correction operation of calculating coefficients included in the equivalent T-parameter by using a sample having a complex dielectric constant and a complex permeability.

In a measuring method according to an embodiment of the present invention, a sample having a known complex permittivity and complex permeability is filled in an open portion of a probe to calculate coefficients included in an equivalent T-parameter. The sample under test is filled in the open portion of the probe to measure the S-parameter of the probe filled with the sample under test. The complex permittivity and complex permeability of the sample under measurement are calculated from the S-parameters.

Convert the S-parameters into measurement T-parameters, calculate the equivalent T-parameters of an equivalent circuit of the probe filled with the sample under test, and based on the measurement T-parameters and the equivalent T-parameters The complex permittivity and complex permeability of the sample to be measured can be calculated. In this case, the coefficients calculated in the correction step may be utilized.

Therefore, the sample to be measured can be easily filled, the probe can be semi-permanently reused, and the complex dielectric constant and complex permeability can be easily measured.

With respect to the embodiments of the present invention disclosed in the text, specific structural to functional descriptions are merely illustrated for the purpose of describing embodiments of the present invention, embodiments of the present invention may be implemented in various forms and It should not be construed as limited to the embodiments described in.

As the inventive concept allows for various changes and numerous modifications, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms may be used for the purpose of distinguishing one component from another component. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between. Other expressions describing the relationship between components, such as "between" and "immediately between," or "neighboring to," and "directly neighboring to" should be interpreted as well.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof that is described, and that one or more other features or numbers are present. It should be understood that it does not exclude in advance the possibility of the presence or addition of steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. .

On the other hand, when an embodiment is otherwise implemented, a function or operation specified in a specific block may occur out of the order specified in the flowchart. For example, two consecutive blocks may actually be performed substantially simultaneously, and the blocks may be performed upside down depending on the function or operation involved.

Hereinafter, with reference to the accompanying drawings, it will be described in detail a preferred embodiment of the present invention. The same reference numerals are used for the same elements in the drawings, and duplicate descriptions of the same elements are omitted.

1 is a perspective view showing a probe according to an embodiment of the present invention.

Referring to FIG. 1, the probe 100 may include a center conductor 111, a connection conductor 112, a first coaxial conductor 131, a second coaxial conductor 132, a first dielectric 141, and a second dielectric. 142.

The central conductor 111 has a cylindrical shape, the first coaxial conductor 131 is formed in a hollow cylindrical shape coaxial with the central conductor 111 from one side of the central conductor 111, and the central conductor 111 and A first dielectric 141 is formed between the first coaxial conductors 131. The second coaxial conductor 132 is separated from the first coaxial conductor 131, is formed in a hollow cylindrical shape coaxial with the central conductor 111 from the other side of the central conductor 111, and has a central conductor 111. ) And a second dielectric 142 is formed between the second coaxial conductor 132. In addition, the connection conductor 112 electrically connects the first coaxial conductor 131 and the second coaxial conductor 132.

The open part 121 of the probe 100 is filled with a sample to be measured. The probe 100 is filled in the probe 100 with the sample under test because the sample under test is filled in the open part 121, which is a portion where the coaxial conductor and the dielectric are removed from a coaxial cable. Can be. After the sample to be measured is filled in the open portion 121, electromagnetic waves are transmitted through the center conductor 111, which is a signal line. In this case, the electromagnetic wave transmitted through the center conductor 111 may be transmitted with a small loss due to the presence of the first coaxial conductor 131 and the second coaxial conductor 132 which are ground or shield. Can be. In addition, the electromagnetic wave passing through the open portion 121 may be transmitted with a small loss due to the presence of the connection conductor 112. On the other hand, because the sample to be filled in the open portion 121, the probe 100 has a parameter (parameter) depends on the complex dielectric constant and complex permeability of the sample to be measured, the probe filled with the sample to be measured The complex dielectric constant and complex permeability of the sample to be measured can be measured by measuring the parameter of 100.

2 is a flow chart showing a probe manufacturing method according to an embodiment of the present invention.

A portion of the coaxial conductor is removed from the coaxial line to separate the coaxial conductor into the first coaxial conductor and the second coaxial conductor (S201), and a portion of the dielectric corresponding to the portion of the coaxial conductor is removed (S202). That is, the coaxial conductor and the dielectric are removed from a portion of the coaxial line. Only the center conductor remains in the portion where the coaxial conductor and the dielectric are removed. After removing the coaxial conductor and the dielectric, the first coaxial conductor and the second coaxial conductor are electrically connected (S203). According to an embodiment, the first coaxial conductor and the second coaxial conductor may be connected to one connecting conductor, and may be connected to the first connecting conductor and the second connecting conductor which are all coplanar with the central conductor. In this case, the first connecting conductor and the second connecting conductor on the same plane may be symmetrical with respect to the center conductor. In addition, according to the embodiment, the coaxial conductor and the dielectric are removed from a portion of the coaxial line, and the probe formed by electrically connecting the separated coaxial line may be molded in a '-' shape. In this case, the probe may be manufactured so that the coaxial conductor and the dielectric are removed at the center portion of the '-' shape to more conveniently fill the sample. In addition, the probe may further include a support to maintain the '' 'shape.

3 is a perspective view showing a probe according to an embodiment of the present invention.

Referring to FIG. 3, the probe 300 includes a center conductor 311, a first connection conductor 312, a second connection conductor 313, a first coaxial conductor 331, a second coaxial conductor 332, and a third conductor. A first dielectric 341 and a second dielectric 342.

The center conductor 311 has a cylindrical shape, the first coaxial conductor 331 is formed in a hollow cylindrical shape coaxial with the center conductor 311 from one side of the center conductor 311, and the center conductor 311 and A first dielectric 341 is formed between the first coaxial conductors 331. The second coaxial conductor 332 is separated from the first coaxial conductor 331, is formed in a hollow cylindrical shape coaxial with the center conductor 311 from the other side of the center conductor 311, and has a center conductor 311. ) And the second coaxial conductor 332 is formed with a second dielectric 342. In addition, the first connecting conductor 312 and the second connecting conductor 313 electrically connect the first coaxial conductor 331 and the second coaxial conductor 332, respectively, and the center conductor 311 and the first connection conductor. 312 and the second connecting conductor 313 are on the same plane.

Since the sample under test is filled in the open portion 321 of the probe 300, the sample under test can be easily filled in the probe 300. Since the sample under test is filled in the open portion 321, the probe 300 has a parameter depending on the complex permittivity and the complex permeability of the sample under test, and the parameter of the probe 300 with the sample under test is filled. By measuring the complex dielectric constant and complex permeability of the sample to be measured can be measured.

4 is a perspective view showing a probe according to an embodiment of the present invention.

Referring to FIG. 4, the probe 400 includes a center conductor 411, a first connection conductor 412, a second connection conductor 413, a first coaxial conductor 431, a second coaxial conductor 432, and a first A first dielectric 441, a second dielectric 442, and a support 450.

The probe 400 of FIG. 4 is similar to the probe 300 of FIG. 3, but the probe 400 of FIG. 4 has a 'c' shape and further includes a support 450. An open portion 421 of the probe 400 is formed at the center portion of the 'c' shape, and the probe 400 is placed in a beaker containing the sample to be measured, thereby opening the portion 421 of the sample to be opened. It can be easily charged. By the support 450, the probe 400 may maintain a '-' shape. Therefore, the complex dielectric constant and complex permeability of the sample to be measured can be easily measured. In addition, according to the embodiment, the probe may have a '11' shape. The '11' shaped probe may be formed by folding the '1' shaped probe in half. In this case, the open portion of the probe may be located in the folded portion of the probe.

5 is a block diagram illustrating a measuring device according to an exemplary embodiment of the present invention.

Referring to FIG. 5, the measuring apparatus 1000 includes a probe 300, a network analyzer 500, and a data processor 600. The data processor 600 includes a parameter converter 601, a parameter calculator 602, and a calculator 603.

The probe 300 of FIG. 5 is the same component as the probe 300 of FIG. 3. The probe 300 is formed by removing the coaxial conductor and the dielectric from a portion of the coaxial line, and the separated coaxial conductor is electrically connected. Here, the sample to be measured is filled in the open portion by removing the coaxial conductor and the dielectric. The network analyzer 500 is electrically connected to the probe 300 and measures an S-parameter (SPARAM) of the probe 300 filled with the sample to be measured. The data processor 600 calculates the complex dielectric constant and the complex permeability of the sample under measurement from the S-parameter (SPARAM) measured by the network analyzer 500. Looking at the process of calculating the complex dielectric constant and the complex permeability of the sample under measurement from the S-parameter (SPARAM), the parameter converter 601 converts the S-parameter (SPARAM) to the measured T-parameter (TPARAM1), The calculator 602 calculates an equivalent T-parameter TPARAM2 of an equivalent circuit of the probe 300 filled with the sample to be measured. Here, the measured T-parameter (TPARAM1) is a value obtained by converting the S-parameter (SPARAM) measured by the network analyzer 500 into a T-parameter form, and the equivalent T-parameter (TPARAM2) is the value of the probe 300. Theoretical T-parameters of the equivalent circuit. In addition, T-parameter means ABCD-parameter as a transmission parameter. The equivalent T-parameter (TPARAM2) varies in value depending on the complex permittivity and complex permeability of the sample charged in the probe 300. The calculation unit 603 calculates the complex dielectric constant and the complex permeability using the same measurement T-parameter TPARAM1 and equivalent T-parameter TPARAM2. The measurement T-parameter TPARAM1 has constant values since the value measured by the network analyzer 500 is converted, and the equivalent T-parameter TPARAM2 includes the complex dielectric constant and complex permeability of the sample under measurement as unknowns. have. According to an embodiment, the calculation unit 603 may pre-calculate the coefficients included in the equivalent T-parameter by a correction operation and use the pre-calculated coefficients when calculating the complex dielectric constant and the complex permeability of the sample to be measured. The correction operation is to precalculate the coefficients using a sample of which the complex permittivity and complex permeability are known.

Hereinafter, a process of measuring the complex dielectric constant and the complex permeability of the sample to be measured will be described with reference to FIGS. 6 to 8.

6 is a cross-sectional view taken along line II ′ of FIG. 3, FIG. 7 is a block diagram illustrating an equivalent circuit of the probe of FIG. 3, and FIG. 8 is a cross-sectional view taken along line II-II ′ of FIG. 3.

When the sample under test is filled in the open portion 321, the parameter of the probe 300 is changed according to the complex permittivity and the complex permeability of the sample under test. After the sample under test is filled in the probe 300, the network analyzer measures the S-parameters of the probe 300. Here, the S-parameter is a 2 × 2 matrix as shown in Equation 1 having constant values obtained by the network analyzer.

The S-parameter may be converted into a measured T-parameter by Equation 2.

Here, the measured T-parameter generated by converting the S-parameter having constant values also has constant values. That is, the measured T-parameter is the S-parameter measured by the network analyzer is converted for ease of calculation, and is a value obtained through the measurement of the network analyzer. In this case, when the probe 300 filled with the sample to be measured is converted into an equivalent circuit, and the equivalent T-parameter of the equivalent circuit is calculated, the equivalent T-parameter is the same as the measured T-parameter. This is because the same T-parameters are obtained by measuring the measured T-parameters, and the equivalent T-parameters are theoretically calculated and calculated.

Referring to FIGS. 6 and 7, a process of calculating the equivalent T-parameter of the probe of FIG. 3 filled with the sample to be measured will be described. In FIG. 7, the characteristic impedance of the measurement unit 370 is a characteristic impedance of the first connection conductor 312, the second connection conductor 313, the center conductor 311, and the measurement portion 350 filled with the sample to be measured. to be. The first impedance 371 is the characteristic impedance of the first portion 361 with the first coaxial conductor 331, the first dielectric 341, and the center conductor 311. The second impedance 372 and the third impedance 373 are characteristic impedances by the first discontinuity plane between the measurement portion 350 and the first portion 361. For example, the second impedance 372 may be an inductance generated in the first coaxial conductor 331 of the first discontinuous surface, and the third impedance 373 may be the center conductor 311 and the first conductor in the first discontinuous surface. It may be a capacitance generated between the coaxial conductors 331. The fifth impedance 371 is the characteristic impedance of the second portion 362 with the second coaxial conductor 332, the second dielectric 342, and the center conductor 311. The fourth impedance 374 and the sixth impedance 376 are characteristic impedances by the second discontinuous plane between the measurement portion 350 and the second portion 362. For example, the fourth impedance 372 may be an inductance generated in the second coaxial conductor 332 of the second discontinuity, and the sixth impedance 376 may be the center conductor 311 and the second in the second discontinuity. It may be a capacitance generated between the coaxial conductors 332.

The equivalent T-parameter of the equivalent circuit of the probe 300 filled with the sample to be measured having the complex dielectric constant epsilon and the complex permeability μ is expressed by Equation 3 below.

Where Z1 represents the first impedance 371, Z2 represents the second impedance 372, Z3 represents the third impedance 373, Z4 represents the fourth impedance 374, and Z5 represents the first impedance. 5 represents the impedance 375, Z6 represents the sixth impedance 376, Z represents the measuring unit characteristic impedance 370, Y represents the inverse of the measuring unit characteristic impedance 370, ι is the probe 300 Represents the length in the direction of the center conductor 311 of the open portion 321 of (), and γ represents the complex propagation constant. The complex propagation constant is equal to Equation 4, and the measurement unit characteristic impedance 370 is equal to Equation 5.

In Equation 4, ω represents the angular velocity of the electromagnetic wave applied to the probe 300 in the network analyzer. In Equation 5, s represents the distance between the first connecting conductor 312 and the second connecting conductor 313 of Figure 8, r is the first connecting conductor 312, the center conductor 311, and the second Represents the radius of each of the connecting conductors 313, y is a coefficient for ease of calculation, ε _r represents the relative dielectric constant of the sample to be measured, and μ _r represents the relative permeability of the sample to be measured.

For the sake of ease of calculation, the equivalent T-parameter is expressed as in Equation 6, and the same equation as in Equation 7 is established using the same measured T-parameter and the equivalent T-parameter.

Where a, b, c, d, e, f, g, and h are coefficients for ease of calculation. When equations 4 and 5 are substituted into equation 7, equations such as equation 8 are established.

When the coefficients of Equation 8 are simply summarized, Equation 9 is established.

If Equation 9 is expressed as a determinant, Equation 10 is obtained.

이고, k2는

이며, k3는

이다.Where k1 is

K2 is

K3 is

to be.

In Equation 10, A, B, and C are measured values, and the coefficients a ', b', c ', e', f ', g', l ', m', and n 'represent a first impedance 371. ), The second impedance 372, the third impedance 373, the fourth impedance 374, the fifth impedance 375, the sixth impedance 376, the s of Equation 5, and the above Equation 5 It can be found by measuring r. According to an embodiment, the coefficients a ', b', c ', e', f ', g', l ', m', and n ', probe 300 for a sample having a known complex dielectric constant and complex permeability ) By measuring the S-parameter from the network analyzer and calculating k1, k2, and k3 using known complex permittivity and complex permeability. As such, the process of pre-calculating the coefficients a ', b', c ', e', f ', g', l ', m', and n 'is called a calibration operation, and the calibration operation is performed by the same sample. It may be performed by measuring the S-parameter three times by varying ω, or may be performed by measuring the S-parameters of different samples three times.

When the coefficients a ', b', c ', e', f ', g', l ', m', and n 'are obtained through the correction operation or the like, A, B, and C values are determined by the network analyzer. Ω is a value that can be adjusted in a network analyzer, ι is a value that the probe 300 is measured or known in the manufacturing process of the probe 300, and c is a value known as the speed of light. Here, since the unknown is only the relative dielectric constant ε _r of the sample under measurement and the relative permeability μ _{r of the} sample under measurement, the relative dielectric constant ε _r and relative permeability μ _r of the sample under measurement are calculated, and the complex of the sample under measurement is calculated. The permittivity ε and the complex permeability μ can be obtained.

9 is a view showing an example in which the measuring device according to an embodiment of the present invention measures the complex dielectric constant and the complex permeability of a sample.

Referring to FIG. 9, the measuring device 2000 includes a probe 400, a network analyzer 500, and a data processor 500.

In FIG. 9, the sample 400 to be filled is filled in the probe 400. In the example of FIG. 9, the sample 400 of liquid is filled in the probe 400, but the sample 400 of gas may be filled in the probe 400 in a similar manner. In addition, in the case of a solid sample to be measured, the powder to be measured may be filled in the probe 400 similarly to FIG. 9, and even after the sample is melted, the probe 400 may be melted after melting the solid sample to be measured. It is possible to measure the complex dielectric constant and the complex permeability of the sample to be measured as a solid by charging the sample to be measured.

10 is a flowchart showing a measuring method according to an embodiment of the present invention.

In the method of measuring complex permittivity and complex permeability of a sample to be measured, using a sample of known complex permittivity and complex permeability, an equivalent T-parameter is calculated through an equivalent circuit of a probe, the known sample is charged into the probe, and a network Measure the measuring T-parameter with the analyzer. A correction operation for calculating the coefficients included in the equivalent T-parameter in advance is performed by using the same measured T-parameter and the equivalent T-parameter (S810). After the calibration operation, the sample to be measured is charged into the probe and the S-parameter is measured through a network analyzer (S820). The complex permittivity and complex permeability of the sample to be measured are calculated from the S-parameter (S850). In this case, the coefficients previously calculated in the correction operation may be utilized.

FIG. 11 is a flowchart illustrating a calculation step of the measuring method of FIG. 10.

The calculation step (S850) of FIG. 10 is a step after measuring the S-parameters of the probe after filling the probe under test with the sample under test, first, the S- of the probe with the sample under test The parameter is converted into a measured T-parameter (S851). In addition, the equivalent T-parameter of the equivalent circuit of the probe filled with the sample to be measured is converted into an equivalent circuit by converting the probe filled with the sample to be measured (S852). Here, the complex dielectric constant and the complex permeability of the sample to be measured may be calculated using the same measured T-parameter and the equivalent T-parameter (S853). On the other hand, the calculated T-parameters and the equivalent T-parameters are the same that the equivalent T-parameters, which are calculated in advance during the calibration operation in calculating the complex dielectric constant and complex permeability of the sample to be measured using the same Coefficients can be used.

On the other hand, the probe can be made compact by utilizing the MEMS (Micro Electro Mechanical Systems) technology or Low Temperature Cofired Ceramics (LTCC) technology. Here, the compactly manufactured probe may be a planar type. According to an embodiment, a planar type probe manufactured using MEMS technology or LTCC technology may include a first ground plate, a second ground plate parallel to the first ground plate, the first ground plate and the second ground plate. And a first dielectric plate disposed between the ground plane plates and to which signals are transmitted, a first dielectric filled between the first ground plate and the signal plate, and a second dielectric filled between the first ground plate and the signal plate. The horizontal area of the first dielectric and the horizontal area of the second dielectric may be the same, and the horizontal area of the first ground plate and the horizontal area of the second ground plate may be the same. In the planar type probe, the first dielectric and the second dielectric are the first ground plate such that the sample under test can be charged in contact with the first ground plate, the signal plate, and the second ground plate. And a horizontal area smaller than that of the second ground plate. Here, the signal plate may be a 'c' shaped plate when viewed from the first ground plate to the second ground plate for efficient signal transmission, and the central portion of the 'c' shape is the first ground plate. The first dielectric material and the second dielectric material may not be filled between the plate and the second ground plate, and thus may be located in an open portion in which the sample to be measured is filled.

The method of manufacturing a probe for measuring a complex dielectric constant and a complex permeability according to an embodiment of the present invention as described above, a probe, a measuring device, and a measuring method can easily fill a sample to be measured.

In addition, the probe manufacturing method, the probe, the measuring device, and the measuring method for measuring the complex dielectric constant and the complex permeability according to the embodiment of the present invention can be used semi-permanently and broadband.

On the other hand, the method for producing a complex dielectric constant and complex permeability measurement probes, probes, measuring devices, and measuring methods according to an embodiment of the present invention can be easily manufactured at a low cost, and the complex dielectric constant of the sample to be measured and The complex permeability can be measured.

While the invention has been described above with reference to preferred embodiments, those skilled in the art will be able to make various modifications and changes to the invention without departing from the spirit and scope of the invention as set forth in the claims below. I will understand.

Claims (20)

Removing a portion of the coaxial conductor from the coaxial line to separate the coaxial conductor into a first coaxial conductor and a second coaxial conductor; Removing a portion of the dielectric corresponding to the portion of the removed coaxial conductor; And And electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 1, wherein the step of electrically connecting: And electrically connecting the first coaxial conductor and the second coaxial conductor through one connecting conductor. The method of claim 1, wherein the step of electrically connecting: Electrically connecting the first coaxial conductor and the second coaxial conductor through a first connecting conductor; And And electrically connecting the first coaxial conductor and the second coaxial conductor through a second connecting conductor symmetrical with the first connecting conductor with respect to the center line of the coaxial line. The method of claim 1, Probe manufacturing the coaxial line further comprises the step of forming a '' 'shape. The method of claim 4, wherein Probe manufacturing method characterized in that it further comprises the step of forming a support for maintaining the '' 'shape of the coaxial line. Cylindrical center conductor; A first coaxial conductor formed in a hollow cylindrical shape coaxial with the center conductor from one side of the center conductor; A first dielectric formed between the center conductor and the first coaxial conductor; A second coaxial conductor separated from the first coaxial conductor and formed in a hollow cylindrical shape coaxial with the center conductor from the other side of the center conductor; A second dielectric formed between the center conductor and the second coaxial conductor; And And a connection part electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 6, wherein the connecting portion, And a connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 6, wherein the connecting portion, A first connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor; And And a second connecting conductor symmetrical with the first connecting conductor with respect to the center conductor, and electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 6, The probe is characterized in that the '' 'shape. The method of claim 9, Probe further comprising a support for maintaining the '' 'shape. delete A probe to which a sample to be measured is filled in an open part by removing the coaxial conductor and the dielectric from a portion of the coaxial line, and the first coaxial conductor and the second coaxial conductor formed by removing the coaxial conductor are electrically connected to each other; A network analyzer electrically connected to the probe and measuring an S-parameter of the probe filled with the sample to be measured; And And a data processor for calculating a complex permittivity and a complex permeability of the sample under measurement from the S-parameters measured by the network analyzer. The method of claim 12, wherein the probe, Cylindrical center conductor; The first coaxial conductor formed in a hollow cylindrical shape coaxial with the center conductor from one side of the center conductor; A first dielectric formed between the center conductor and the first coaxial conductor; A second coaxial conductor separated from the first coaxial conductor and formed in a hollow cylindrical shape coaxial with the center conductor from the other side of the center conductor; A second dielectric formed between the center conductor and the second coaxial conductor; And And a connecting portion electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 13, wherein the connection portion, And a connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor. The method of claim 13, wherein the connection portion, A first connecting conductor electrically connecting the first coaxial conductor and the second coaxial conductor; And And a second connecting conductor which is symmetrical with the first connecting conductor with respect to the center conductor, and electrically connects the first coaxial conductor and the second coaxial conductor. 13. The system of claim 12, wherein the data processor is A parameter converter for converting the S-parameters into measured T-parameters; A parameter calculator for calculating an equivalent T-parameter of an equivalent circuit of the probe filled with the sample to be measured; And And a calculation unit for calculating a complex dielectric constant and a complex permeability based on the measured T-parameter and the equivalent T-parameter. The method of claim 16, wherein the calculation unit, And using the coefficients calculated by a correction operation for calculating the coefficients included in the equivalent T-parameter using a sample having a complex dielectric constant and a complex permeability. delete delete delete

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