KR100863082B1 - Storage vessel for liquid high-purity substances - Google Patents

Abstract

PURPOSE: A storage vessel for liquid high-purity substances is provided to give a device for cleaning the connecting pieces and lines when the storage vessel is changed. CONSTITUTION: The storage vessel for liquid substances which are supplied to a consumer includes a device for cleaning the connecting pieces(7,8,13,18) when the storage vessel(1) is changed, the storage vessel(1) having a connecting piece(13) provided with a shut-off device(15) and a coupling(16) for connection to a connecting piece(7) provided with a coupling(10) to a pressure gas line(3) with a shut-off device(5), and a connecting piece(18) provided with a shut-off device(19) and a coupling(21) for connecting a discharge line in the storage vessel(1) to a connecting piece(8) provided with a coupling(11) and a shut-off device(6) for supplying the substance subjected to the pressure gas in the vessel(1) to the consumer. A solvent vessel(23) for flushing the connecting pieces(7,8,13,18), a vessel(28) for spent solvent which is evacuated in order to suck solvent into the connecting pieces(7,8,13,18) as a vacuum source form a package with the storage vessel(1).

Description

Storage container for high purity liquid substance {STORAGE VESSEL FOR LIQUID HIGH-PURITY SUBSTANCES}

1 is a schematic diagram of a package having a storage container, a solvent container and a container as a vacuum source for containing the solvent used.

2 is a schematic cross-sectional view of a package including a storage container and a solvent container disposed within the storage container or a container as a vacuum source containing a solvent used.

3 is a cross-sectional view showing one embodiment of such a package.

The present invention relates to a storage container for a liquid substance supplied to a consumer according to the preamble of claim 1, wherein the storage for a liquid substance has a device for cleaning the connecting portion and the connecting line when the storage container is replaced. It's about courage.

Such a consuming device is for example a reactor for chemical vapor deposition (CVD). Such CVD reactors are used to fabricate chips, i.e. integrated microcircuits and similar devices. In addition, for example, a device for producing a hard material layer or glass fibers must be provided with a liquid chemical product. In order to meet the ever-increasing requirements of these devices, extremely high purity materials for the corresponding process must be used.

However, in the case where the storage vessel containing the material supplied to such a consuming device is replaced, there is a risk that impurities are generated in the line from the storage vessel to the reactor, in particular through the inflow of air inevitable when the storage vessel is replaced. There is a risk of production. This can lead to the decomposition of the residue of liquid material in the feed line, especially because the material, typically the organometallic or semimetal compound, is often extremely sensitive to air and / or moisture.

To remove these impurities, up to now, the lines connecting the delivery line to the consumer and the pressure gas lines to pressurize the material in the storage vessel have been cleaned. After the exchange of the storage vessel by vacuuming a specific line with a vacuum pump, Absorbed in the solvent discharged from the solvent container, this solvent then flows into the waste container. This flushing process is generally performed several times. This cleaning process requires careful work and a reliable operator, which is time consuming (for example, the level of solvent containers, waste containers for solvents used and the level of vacuum must be monitored), and additional solvent containers and used Waste containers for solvents require sophisticated work.

It is therefore an object of the present invention to provide a device that is easily handled and reliable as a device for cleaning the connections and connection lines of a storage container of the type described in the preamble of claim 1.

This object is achieved by a storage container according to the invention with the features of claim 1 as a storage container for a high purity liquid material with an integrated device for cleaning the connection and connection lines of the storage container. The dependent claims form preferred embodiments of the storage container of the present invention.

That is, according to the present invention, the storage vessel is formed as a package with a solvent vessel and / or a vacuum vessel serving as a vacuum source for the flushing process.

In addition, a waste container may be installed for the solvent used for flushing. Such a vessel may also be combined with a vacuum vessel. Thus, the storage container can form a package with one, two or three other containers, which are replaced entirely by a new package when the storage container is replaced.

This means that when the storage container is replaced, for example, the solvent container, the container containing the solvent used, and the vacuum container are always configured for flushing, while sufficient solvent, the capacity for the solvent used and the vacuum are always available for flushing. This can significantly reduce the likelihood of operational errors while significantly simplifying the detailed steps.

In the simplest case, the package may include only one container for the solvent in addition to the storage container for the liquid material. A vacuum for cleaning the connection can be produced, for example, by a vacuum pump, and a waste container independent of the package can be provided to accommodate the solvent used.

Packages of only the vacuum container as the vacuum source for flushing the connection with the storage container or packages of only the waste container for the solvent used in addition to the storage container are also installable.

However, the package preferably includes both a solvent container and a vacuum container in addition to the storage container as a vacuum source capable of simultaneously forming a container for containing the solvent used.

The container for the solvent, the vacuum container and the separate waste container for the solvent used can be combined into the storage container and package in a wide variety of ways when present outside the vacuum container. For example, the containers may be disposed on the side, bottom, or inside of the storage container for the liquid material. Several containers for the solvent, vacuum and / or solvent used may be provided. Such containers may be formed by double or multiple jackets around the main container. However, these containers always form a package with a storage container that can be used for transport and storage.

The vacuum vessel may comprise, for example, a molecular sieve, for example a solid phase adsorbent such as zeolite. Such adsorbents may be installed to maintain a vacuum in the vacuum vessel, ie to suck air through the vacuum vessel through the outlet. When the vacuum vessel receives the solvent used, the adsorbent is used to absorb the solvent. The nature of this adsorbent is then applied to the solvent. That is, a hydrophobic adsorbent is used for a hydrophobic solvent such as hexane, and a hydrophilic adsorbent is used for a hydrophilic solvent such as ethanol.

The solvent vessel, the vacuum vessel and the vessel for the solvent used, if present, are at the connection of the pressure gas line and the delivery line, preferably between the coupling device of the coupling and pressure gas lines or between the coupling device and the blocking device of the delivery line. Is connected via a blocking device. Such a shutoff device can be a valve, a stopper or the like. The pressure gas line connection of the storage vessel is preferably connected to the connection of the delivery line by means of a connection with a shutoff device.

A shutoff device for connecting the pressure gas line and the discharge line, and a shutoff device for connecting the solvent vessel, the vacuum vessel and, if present, the vessel for the used solvent, to the connection of the pressure gas line and the discharge line, optionally supply pressure gas. In addition to the port to be connected to the pressure gas line and the discharge line is preferably installed on the plate provided with channels for connecting the interior of the storage vessel in addition to the delivery line. Another channel of this plate can interconnect the connections for the pressure gas line and the discharge line to the connection line.

Plates with attachment shut-off valves, also referred to as "surface mounting devices," require short channels and thus small dead volumes, for example, because only the shut-off device needs to be fastened in a corresponding taphole with a seal of the plate. (dead volume), and features better sealing and simple mounting. The connection and optionally the couplings for the pressure gas line and the discharge line can be coupled in the same way to the plate.

It is preferable that the shutoff device for connecting the solvent vessel, the vacuum vessel and / or the container for the solvent used to the pressure gas line and the discharge line, as well as the shutoff device for the connection of the pressure gas line and the discharge line, is preferably configured to be operable automatically. . For automatic operation, the shutoff device can be configured to operate pneumatically or electrically.

The control unit is preferably installed to drive the blocking device so that the cleaning process is automatically performed after the package with the storage container is replaced.

When the interruption device is driven by an external control via an electrical control line, it is desirable to connect the control line from the interruption device with a plug, socket or similar plugged member fastened to a counterpart for connection with the control. Do. This prevents an error from occurring when the control line is connected to the control unit after replacement of the package. The plugged member is preferably formed as a quick coupling. In addition, the pluggable member can be connected simultaneously to a level measuring device in a reservoir with a level indicator.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

According to FIG. 1, a storage container 1 filled with liquid material up to level 2 is connected to a pressure gas line 3 and an exhaust line 4 leading to a consuming device, for example a CVD reactor.

The pressure gas line 3 and the discharge line 4 each have valves 5 and 6, in particular the valve 6 of the discharge line 4 is a manifold for supplying liquid material to a number of consumer devices. ) May also be installed. The valves 5, 6 are connected to the couplings 10, 11 via the connections 7, 8.

In order to apply the pressure of the pressure line 3 to the liquid substance 2 inside the storage container 1, a connection 13 is provided in the cover 12 of the storage container 1. This connection has a coupling 16, for example via port 14, which is communicated over the liquid substance 2 into the storage container 1, and which can be connected to the valve 15 and the coupling 10. It projects out of the bottom of the storage container 1 in order to supply the liquid substance 2 in the storage container 1 which is pressurized by the pressure gas supplied through the connecting portion 13 to the discharge line 4 leading to the consuming device. A discharge line, which is formed as the delivery line 17, is installed in the cover 12 and is connected to a connection 18 having a coupling 21 for connection with the valve 19 and the coupling 11. Interconnectable couplings 10, 16 and 11, 21 can be formed by conventional connectors for gas lines.

The two connections 13, 18 are connected to the valve 20 by a connection line 22. The vessel 23 for the solvent 24 is connected to the connection 18 via a valve 25, and the vessel 27, which is vacuum and contains a solid adsorbent 28, is connected via a valve 26 to the connection 18. ) The vessel 24 and / or vessel 28 may also be connected by a connection 13 and / or a connection line 22.

The containers 23, 27 together with the storage container 1 form a package 30 (FIG. 2). The new package 30 has closed valves 15, 19, 20, 25, 26. The valves 5 and 6 are closed before the removal of the previously connected package. In order to clean the air filled connections 7, 8, 13, 18 after connection of the couplings 10, 16, 11, 21, the connection part comprising the connection line 22 is first opened by opening the valves 20, 26. The extension lines from (7, 8, 13, 18) and the connection part 18 to the valves 25 and 26 are made into vacuum. The valve 26 is then closed and the valve 25 is opened to allow the solvent 24 to flow from the vessel 23 to the connections 7, 8, 13, 18 and the connection line 22. After the valve 25 is closed, the valve 26 is opened so that the solvent in the connections 7, 8, 13, 18 and the connection line 22 is sucked into the vessel 27 and the adsorbent 28 contained therein. Is absorbed in. This process can be repeated several times.

In order to perform this process automatically, the valves 15, 19, 20, 25, 26 are connected to the control unit 39 via a plug connection including pluggable members 37, 38. Via 34), ie pneumatically or electrically actuated, for example. The valves 5, 6 of the connections 7, 8 are operable by the control 39 via control lines 35, 36. At the end of the wash treatment operation, the valves 20, 25, 26 are closed. The valves 5, 15, 6, 19 can then be opened to supply liquid material to the consuming device via line 4 under pressure gas.

According to FIG. 2, the portion 40 of the device shown by the dashed-dotted line of FIG. 1 can be coupled as a surface mounting device to a plate 41 which simultaneously closes the storage container 1. The vessel 23 and the vacuum vessel 27 for the solvent are arranged inside the storage vessel 1. The connections 7, 8, 13, 18 can also be formed by the holes in the plate 41 as in the couplings 10, 11, 16, 21 or are coupled to the valves 5, 6, 15, 19. Can be. In addition, the connection line 20 may be installed between the connection parts (7, 8).

In order to protect the cover, i.e. the plate 41, the storage container 1 has a hoop-shaped extension 42 with a border 43, for example like a taut ring. Make sure the protective cover is fastened.

According to FIG. 2, the package 30 of FIG. 3 is a cylinder having a cylindrical wall 45, an inwardly bottomed base 46 with an annular support 47 and a partition 48. Also formed, this partition 48 is followed by an extension 42 with a border 43.

The storage container 1 with the discharge or discharge line 17 is disposed inside the cylinder 30 concentrically with the cylindrical wall 45 and supported on the bottom 46. The space between the columnar wall 45, the bottom 46, the partition 48 and the storage container 1 is vacuumed to form a container 27 for the solvent used. Such vessels may also be filled with solid adsorbents, for example zeolites. Thus, since the solvent used is absorbed, the risk of fire is reduced if, for example, the columnar wall 45 is damaged. In addition, if the container 1 is damaged, the liquid substance 2 in the container 1 is absorbed, thereby significantly increasing the safety of the package 30. A connection 49 connecting the vessel 27 with the valve 26 (FIG. 1) is provided in the partition 48. The solvent container 23 is formed by a tube coil disposed around the storage container 1 in the space 27. Instead, a ring or hollow cylinder around the storage container 1 can also form a solvent container.

The couplings 16, 21 and the surface mounting device 40 are arranged in the extension 42. The surface mounting device 40 is located on a plate 41 connected with the flange 52 on the storage container 1. The line 51 connecting the solvent vessel 23 with the valve 25 (FIG. 1) in the surface mount apparatus is connected to the bottom of the filled solvent vessel 23 through a connection 53 through the partition 48. . The cover 54 of the border 43 closes the package 30 at the top. 3 also shows several actuators 55-58 for actuation valves 15, 19, 20, 25, 26 (FIG. 1).

Accordingly, the present invention provides an easy handling and reliable cleaning effect by using a storage container for high purity liquid material with an integrated device for cleaning the connection and connection line of the storage container for cleaning the connection and connection line of the storage container. You can get it.

Claims (14)

A storage container 1 of liquid substance supplied to a consuming device, comprising a device for cleaning the connections 13, 18 provided in the storage container when the storage container is replaced, the connection 13 being connected to a connection 7. And a coupling device (16) and a shutoff device (15), the connection portion (7) having a coupling (10) connected to a pressure gas line (3) with a shutoff device (5). The connection part 18 is provided with a coupling 11 and a blocking device 6 with a delivery line 17 of the storage container 1 for supplying the substance of the storage container 1 to the consuming device by pressure gas. A coupling vessel 21 for connecting the coupling portion 8 and a blocking device 19, a solvent vessel 23 for flushing the coupling portion, a container for the solvent used, and a connection portion 7 for the solvent used. In the storage container (1), which is provided with a vacuum source for suctioning from, 8, 13, 18, At least one of the solvent container (23) and the vacuum container (27) forming the vacuum source forms a package (30) together with the storage container (1). The method of claim 1, Storage container, characterized in that the container for the solvent used forms a package (30) together with the storage container (1). The method of claim 1, The storage container, characterized in that the vacuum container (27) forms a container for the solvent used. The method according to claim 1 or 3, Storage vessel, characterized in that the vacuum vessel (27) comprises a solid phase adsorbent (28). The method according to any one of claims 1 to 3, At least one of the solvent vessel 23, the vacuum vessel 27, and the vessel for the solvent used is via a shutoff device 25, 26 to a connection 13 and delivery line 17 leading to the pressure gas line 3. Storage container, characterized in that connected to the following connection (18). The method according to any one of claims 1 to 3, A storage container, characterized in that the connection (13) leading to the pressure gas line (3) and the connection (18) leading to the delivery line (17) are connected to the shut-off device (20) via a connection line (22). The method of claim 6, At least one of the shutoff devices 15, 19 of the connections 13, 18 leading to the pressure gas line 3 and the delivery line 17, and the solvent vessel 23, the vacuum vessel 27 and a vessel for the solvent used. At least one of the blocking devices 25 and 26 connecting one to the connecting portion 13 and the connecting portion 18 leading to the pressure gas line 3 and the sending line 17 is connected to the connecting portions 13 and 18. A storage container, characterized in that it is installed on a plate (41) having channels connecting the interior of the storage container (1) and at least one of the delivery line (17) and the connection line (22). The method of claim 7, wherein The plate (41) closes the opening of the storage container (1). The method of claim 6, At least one of the shutoff devices 15, 19 of the connections 13, 18 leading to the pressure gas line 3 and the delivery line 17, and the solvent vessel 23, the vacuum vessel 27 and a vessel for the solvent used. At least one of the blocking devices 25 and 26 connecting one to the connecting portion 13 and the connecting portion 18 and the blocking device 20 of the connecting line 22 passes through the control lines 31 to 34. A storage container, characterized in that it is formed to be operable automatically. The method of claim 9, Control lines 31 to 34 from the blocking devices 15, 19, 20, 25, 26 are connected to a pluggable member 37 which is fastened to a corresponding part 38 for connection with the control unit 39. Storage container. The method of claim 10, Storage container, characterized in that the plugged member (37) is formed as a quick coupling. The method of claim 10, The storage container (1) comprises a level measuring device, wherein the line of the level measuring device is connected to a pluggable member (37) to connect the level measuring device to the level indicator. The method according to any one of claims 1 to 3, The storage container is arranged inside the cylinder, and the space between the storage container (1) and the cylindrical wall (45) forms a container for the solvent used. The method of claim 13, Storage container, characterized in that the solvent container (23) is arranged around the storage container (1) in the space between the storage container (1) and the columnar wall (45).

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