KR100854929B1 - System for measuring magnet RPM - Google Patents
System for measuring magnet RPM Download PDFInfo
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- KR100854929B1 KR100854929B1 KR1020030102139A KR20030102139A KR100854929B1 KR 100854929 B1 KR100854929 B1 KR 100854929B1 KR 1020030102139 A KR1020030102139 A KR 1020030102139A KR 20030102139 A KR20030102139 A KR 20030102139A KR 100854929 B1 KR100854929 B1 KR 100854929B1
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- KR
- South Korea
- Prior art keywords
- cover
- rotor
- counter
- detection
- rpm
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3476—Testing and control
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
- H01J37/3455—Movable magnets
Abstract
본 발명은 마그네트 RPM 측정 시스템에 있어서, 로터를 둘러싸고 있는 커버의 상부만을 분리할 수 있도록 한 커버; 상기 커버에 내부에 설치되어 로터의 회전시 검출신호를 발생하는 검출센서; 상기 커버의 외부에 설치되는 카운터; 상기 검출센서 및 카운터에 전원을 공급하기 위한 전원공급부; 및 로터의 상부에 센서의 검출부위를 통과하여 실제 검출 회수를 측정하기 위하여 설치되는 라인을 포함하여 구성되며, 센서의 검출회수를 카운터에 제공함에 의해서 RPM을 측정하는 마그네트 회전수 측정 시스템에 관한 것이다.The present invention provides a magnet RPM measurement system comprising: a cover capable of separating only an upper portion of a cover surrounding a rotor; A detection sensor installed inside the cover to generate a detection signal when the rotor is rotated; A counter installed outside the cover; A power supply for supplying power to the detection sensor and the counter; And a line installed in the upper part of the rotor to measure the actual number of detections passing through the detection part of the sensor, and relates to a magnet rotation speed measurement system for measuring RPM by providing a detection frequency of the sensor to a counter. .
본 발명에 의해서 로터 커버의 설치 및 분리가 용이할 뿐만 아니라, 카운터를 커버의 바깥에 설치하는 경우 시스템 정지없이 회전수를 측정하므로서 균일도와 RS 관리 부실로 인한 프로세스상 결함 방지를 통해 수율을 향상시킬 수 있다.The present invention not only facilitates the installation and removal of the rotor cover, but also improves the yield through preventing process defects due to uniformity and poor RS management by measuring the rotation speed without stopping the system when the counter is installed outside of the cover. Can be.
마그네트, 회전수, 카운터Magnet, rpm, counter
Description
도1은 종래의 기술에 의한 RPM 측정방법.1 is a RPM measurement method according to the prior art.
도2는 본 발명에 의한 로터 커버 구조.Figure 2 is a rotor cover structure according to the present invention.
도3은 본 발명에 의한 회전수 측정 시스템.3 is a rotation speed measuring system according to the present invention.
본 발명은 마그네트 회전수 측정 시스템에 관한 것으로서, 특히 RPM을 측정하기 위해 일일이 커버 전체를 제거함 없이 간단한 장치로 RPM을 측정할 수 있는 마그네트 회전수 측정하는 시스템에 관한 것이다.The present invention relates to a magnet rotation speed measurement system, and more particularly, to a magnet rotation speed measurement system capable of measuring RPM with a simple device without removing the entire cover to measure the RPM.
일반적으로 PVD(Phyical Vapor Deposition, 이하 PVD) 소스는 대부분 마그네트와 이의 운용을 위한 컴포넌트들로 구성되어 있으며, 이러한 마그네트의 운용에서 가장 중요한 부분은 필름상의 균일도와 RS값에 영향을 주어 수율에 직접적인 영향을 미치는 RPM이다. In general, the PVD (Physical Vapor Deposition) source is mostly composed of a magnet and components for its operation, the most important part of the operation of this magnet affects the film uniformity and the RS value, which directly affects the yield. It is RPM.
그러나, 이러한 RPM의 확인을 위해 도1에 나타낸 종래의 기술은 RPM을 확인하기 위해서는 일일이 커버를 분리해야만 확인이 가능할 뿐만 아니라, 커버를 분리한 다음 하우징 부분에 Tie-rap을 묶어 마그네트의 회전 상태를 확인 할 수 있게 한다.However, the conventional technique shown in FIG. 1 for checking the RPM can be confirmed only by removing the cover one by one in order to check the RPM, and after removing the cover, tie the tie-rap to the housing part to check the rotation of the magnet. Make sure to check.
또한 보정을 위해서는 다른 작업자가 카운터를 들고 마그네트를 회전시킨다음 눈으로 직접 회전수를 체크하도록 하여 많은 어려움이 존재한다.
In addition, there are a lot of difficulties to calibrate by allowing another operator to lift the counter, rotate the magnet, and then check the number of revolutions by eye.
따라서, 본 발명이 이루고자 하는 기술적 과제는 상기한 종래의 기술이 가지는 단점을 개선하기 위하여 커버 전체의 분리없이 일부만 분리가능하도록 하고, 마그네트의 회전수를 카운터를 사용하여 측정 가능 하도록 하는 것에 있다.Therefore, the technical problem to be achieved by the present invention is to make it possible to remove only a part without removing the entire cover in order to improve the disadvantages of the prior art described above, and to be able to measure the rotational speed of the magnet using a counter.
본 발명의 상기 목적과 기술적 구성 및 그에 따른 작용효과에 관한 자세한 사항은 본 발명의 바람직한 실시예를 도시하고 있는 도면을 참조한 이하 상세한 설명에 의해 보다 명확하게 이해될 것이다.Details of the above object and technical configuration of the present invention and the effects thereof according to the present invention will be more clearly understood by the following detailed description with reference to the drawings showing preferred embodiments of the present invention.
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이하, 도2 및 3을 참조하여 본 발명의 실시예에 대하여 상세히 설명한다.Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 2 and 3.
도2는 로터용 커버구조를 나타낸 것이다.2 shows the cover structure for the rotor.
본 발명은 종래의 기술이 로터는 커버를 분리하여야만 RPM을 확인할 수 있으며, 로터를 둘러싸고 있는 커버를 완전히 분리하기 불편하다는 단점을 개선하기 위하여 커버의 상단만 분리 가능한 구조를 가지도록 한다.According to the present invention, the rotor can check the RPM only when the rotor is removed from the cover, and in order to improve the disadvantage that it is inconvenient to completely separate the cover surrounding the rotor, the rotor has a structure capable of detaching only the top of the cover.
이는 로터를 둘러싸고 있는 커버의 상단을 절단한 후 상기 절단된 상부 커버의 원형의 안쪽끝만 "ㄱ" 형상으로 꺾고, 본체의 커버에 상부 커버 부위에 꺾인 넓이와 같은 홀을 형성하여 본체 커버와 상부커버를 결합시킨다.This cuts the upper end of the cover surrounding the rotor and then bends only the inner end of the circular shape of the cut upper cover into a "b" shape, and forms a hole equal to the width of the upper cover portion in the cover of the main body, thereby forming the main cover and the upper part Fit the cover.
도3은 마그네트의 회전수 측정 방법을 나타낸 개략도이다.3 is a schematic view showing a rotation speed measurement method of a magnet.
우선 커버의 안쪽에 로터의 회전시 온/오프로 감지하는 검출센서를 설치하 고, 커버의 바깥쪽에는 수동 카운터/타이머/리셋의 기능을 포함하는 카운터를 별도로 설치한다.First, install a detection sensor that detects the on / off when the rotor rotates inside the cover, and separately install a counter that includes the function of manual counter / timer / reset on the outside of the cover.
이중 검출센서와 카운터의 전원 라인은 소스의 위쪽에 있는 다른 24V 전원 커넥터에 연결되며, 검출센서의 신호라인은 검출될 때마다 신호를 카운터에 보내준다.The dual detection sensor and the counter's power line are connected to another 24V power connector on top of the source, and the signal line of the detection sensor sends a signal to the counter each time it is detected.
이러한 신호의 검출은 로터의 위쪽에 센서의 검출부위를 통과 할 수 있는 정도의 라인을 설치하여 실제로 센서를 통과시켜 본다. 이렇게 측정된 센서의 검출 회수로 RPM의 측정을 행하게 된다.In order to detect such a signal, a line is installed on the upper part of the rotor to pass through the detection part of the sensor. RPM is measured by the detection frequency of the sensor measured in this way.
상세히 설명된 본 발명에 의하여 본 발명의 특징부를 포함하는 변화들 및 변형들이 당해 기술 분야에서 숙련된 보통의 사람들에게 명백히 쉬워질 것임이 자명하다. 본 발명의 그러한 변형들의 범위는 본 발명의 특징부를 포함하는 당해 기술 분야에 숙련된 통상의 지식을 가진 자들의 범위 내에 있으며, 그러한 변형들은 본 발명의 청구항의 범위 내에 있는 것으로 간주된다.
It will be apparent that changes and modifications incorporating features of the invention will be readily apparent to those skilled in the art by the invention described in detail. It is intended that the scope of such modifications of the invention be within the scope of those of ordinary skill in the art including the features of the invention, and such modifications are considered to be within the scope of the claims of the invention.
상술한 바와 같이 본 발명의 마그네트 회전수 측정 시스템에 의해서 로터 커버의 설치 및 분리가 용이할 뿐만 아니라, 카운터를 커버의 바깥에 설치하는 경우 시스템 정지없이 회전수를 측정하므로서 균일도와 RS 관리 부실로 인한 프로세스상 Defect 방지를 통해 수율을 향상시킬 수 있다.As described above, the magnet rotation speed measurement system of the present invention not only facilitates the installation and removal of the rotor cover, but also causes the uniformity and RS mismanagement due to the measurement of the rotation speed without stopping the system when the counter is installed outside the cover. Through the prevention of defects in the process, the yield can be improved.
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KR1020030102139A KR100854929B1 (en) | 2003-12-31 | 2003-12-31 | System for measuring magnet RPM |
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KR1020030102139A KR100854929B1 (en) | 2003-12-31 | 2003-12-31 | System for measuring magnet RPM |
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KR100854929B1 true KR100854929B1 (en) | 2008-08-27 |
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KR20040056216A (en) * | 2002-12-23 | 2004-06-30 | 재단법인 포항산업과학연구원 | Revolution sensor using the magnetic shape distortion material and piezoelectric material |
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KR20040056216A (en) * | 2002-12-23 | 2004-06-30 | 재단법인 포항산업과학연구원 | Revolution sensor using the magnetic shape distortion material and piezoelectric material |
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