KR100833879B1 - Method and apparatus of transferring a substrate, and apparatus of collecting carbon nano tube having the same - Google Patents

Abstract

A method and an apparatus for transferring a substrate, and a carbon-nano synthesizing apparatus are provided to improve reliability and productivity during a manufacturing operation of a carbon-nano tube by reducing contamination of peripheral members due to carbon-nano tube powder. An apparatus for transferring a substrate includes a transfer unit(10), an injection unit(12), and a dust collection unit(14). The transfer unit transfers a substrate having a synthesized carbon-nano tube. The injection unit is connected to the reaction chamber and is installed on a path along which the substrate is transferred. The injection unit injects gas from the upper side to the lower side of the transfer path of the substrate in a region excluding the substrate when the substrate is transferred outside the reaction chamber. The dust collection unit is installed below the injection unit to collect the carbon-nano tube dispersing from the substrate as the gas is injected using the injection unit.

Description

Method and apparatus for transferring a substrate, and apparatus of collecting carbon nano tube having the same

1 is a schematic configuration diagram showing a substrate transfer apparatus according to an embodiment of the present invention.

FIG. 2 is a process flowchart showing a substrate transfer method using the substrate transfer apparatus of FIG. 1.

3 is a schematic configuration diagram showing a device for synthesizing carbon nanotubes according to an embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10: transfer unit 12: injection unit

14: dust collector 16: cassette

18: sensor unit 20: control unit

The present invention relates to a method and apparatus for transferring a substrate and a device for synthesizing carbon nanotubes including the same, and more particularly, to a method and apparatus for transferring a substrate on which carbon nanotubes are synthesized and a carbon nanotube including the same. It relates to a synthesis apparatus.

A carbon allotrope, carbon nanotubes, is a material in which one carbon atom is combined with another carbon atom in a hexagonal honeycomb pattern to form a tube, and has a diameter of several nanometers (nm). In particular, carbon nanotubes have excellent mechanical properties, electrical selectivity, field emission characteristics, high efficiency hydrogen storage medium characteristics and the like. Therefore, carbon nanotubes can be applied to a wide range of technical fields such as aerospace, biotechnology, environmental energy, materials industry, medicine, electronic computer, security and safety.

Examples of methods for synthesizing carbon nanotubes include electric discharge, laser deposition, plasma chemical vapor deposition, thermal chemical vapor deposition, and thermal decomposition. Among these methods, thermal chemical vapor deposition and thermal decomposition are common.

Here, in the case of the carbon nanobute synthesized by the thermal chemical vapor deposition or pyrolysis mainly has a powder form. That is, the synthesis of the carbon nanotubes in powder form on the substrate.

However, in the case of the carbon nanotubes synthesized in the form of powder, a situation where the carbon nanotube powder is scattered frequently occurs when transferring from the reaction chamber to the cassette. Specifically, the carbon nanotubes in the powder form have a low density, so that the carbon nanotube powders are easily scattered even in the minute vibration. In addition, since the carbon nanotubes are synthesized in a swelling form on the substrate, the carbon nanotubes easily collide with the members located around the transfer path, and as a result, the carbon nanotube powders also easily scatter.

As mentioned, in the related art, since carbon nanotube powder is easily scattered when transporting a substrate on which carbon nanotubes are synthesized, the recovery rate of carbon nanotubes is reduced, and carbon nanotube powders scattered from the substrate are located around. This results in contamination of the members, leading to malfunction.

An object of the present invention is to provide a transfer method that can easily recover the carbon nanotube powder scattered when transferring the substrate on which the synthesis of carbon nanotubes are made.

Another object of the present invention is to provide a transfer apparatus that can easily recover the carbon nanotube powder scattered when transferring the substrate on which the synthesis of carbon nanotubes are made.

It is another object of the present invention to provide a device for synthesizing carbon nanotubes comprising the aforementioned transport device as a member.

According to a preferred embodiment of the present invention for achieving the above object, a method of transferring a substrate on which carbon nanotubes are synthesized transfers a substrate on which carbon nanotubes are synthesized to the outside of the reaction chamber. When the substrate is transferred to the outside of the reaction chamber, the carbon nanotube powder scattered from the substrate is collected by injecting a gas from an upper portion to a lower portion based on the transfer path of the substrate in a region other than the substrate.

According to a method of transferring a substrate on which carbon nanotubes are synthesized according to an embodiment of the present invention, the gas includes an inert gas, and as soon as the substrate passes through the rear end of the substrate, the inert gas is passed. The substrate may be sprayed or sprayed at the rear end of the substrate and the front end of the substrate, based on the transfer path of the substrate. In addition, the method may further include the step of loading the substrate, which has been transferred to the outside of the reaction chamber, in a cassette.

According to a preferred embodiment of the present invention for achieving the above object, a substrate transfer apparatus in which a carbon nanotube unit is synthesized includes a transfer unit, an injection unit, and a dust collecting unit. Here, the transfer unit transfers a substrate on which carbon nanotubes are synthesized to the outside of the reaction chamber, and the injection unit is installed in a path through which the substrate is transferred while being connected to the reaction chamber, and transfers the substrate to the outside of the reaction chamber. Injects gas from the top to the bottom of the substrate in a region excluding the substrate, and the dust collecting unit is installed below the spraying unit, and scatters gas from the substrate as the gas is sprayed using the spraying unit. It collects blowing carbon nanotubes.

According to the transfer apparatus of the substrate, the synthesis of the carbon nanotubes according to an embodiment of the present invention, the gas injected by the injection unit may include an inert gas.

According to another embodiment of the present invention, there is provided a substrate transfer apparatus in which carbon nanotubes are synthesized, the sensor unit sensing a transfer position of the substrate when transferring the substrate to the outside of the reaction chamber, and a sensing result of the sensor unit. It may further include a control unit for controlling the gas injection by the injection unit. Here, the sprayer controls the jetting unit to inject gas as soon as the substrate passes the rear end of the substrate, based on the transfer path of the substrate, or the rear end of the substrate and the front end of the substrate that passes by the substrate. The injection unit is controlled to inject gas into the gas.

According to another embodiment of the present invention, there is provided a substrate transfer apparatus for synthesizing carbon nanotubes, and the gas injected by the injection unit may include an inert gas. It may further include a cassette that can be stacked in multiple sheets.

The apparatus for synthesizing carbon nanotubes according to a preferred embodiment of the present invention for achieving the above another object includes a reaction chamber, a transfer unit, an injection unit, a dust collector, a sensor unit, a control unit and a cassette. Here, the reaction chamber provides a space for synthesizing carbon nanotubes on the substrate accommodated therein, the transfer unit transfers the substrate on which the carbon nanotubes are synthesized to the outside of the reaction chamber, and the injection unit is the reaction Is connected to the chamber is installed in the path to transfer the substrate, when transporting the substrate to the outside of the reaction chamber injecting gas from the top to the bottom based on the transfer path of the substrate to the region excluding the substrate, The dust collecting unit is installed under the spraying unit, and collects carbon nanotubes scattered from the substrate as the gas is injected using the spraying unit, and the sensor unit transfers the substrate when transferring the substrate to the outside of the reaction chamber. And the control unit controls the gas injection of the injection unit based on the sensing result of the sensor unit. And wherein the cassette is then loaded with a substrate of the transfer to the outside of the reaction chamber into a plurality pieces.

According to an apparatus for synthesizing carbon nanotubes according to an embodiment of the present invention, the control unit controls the injection unit to inject gas as soon as the substrate passes at the rear end of the substrate, based on the transfer path of the substrate, or The injection unit is controlled to inject gas into the rear end of the substrate and the front end of the substrate, based on the transfer path of the substrate.

As mentioned, in the method and apparatus for transporting a substrate on which carbon nanotubes are synthesized, and a carbon nanotube synthesis device including the same, a gas is injected from a substrate other than the substrate on which carbon nanotubes are synthesized. Easily collect the scattering carbon nanotube powder. As a result, the carbon nanotube powders scattered during the transfer can be recovered, so that the recovery rate according to the synthesis of the carbon nanotubes can be expected to be improved. In addition, since the contamination of the peripheral members due to the carbon nanotube powder can be sufficiently reduced, it is possible to improve the mechanical stability.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed subject matter is thorough and complete, and that the spirit of the present invention to those skilled in the art will fully convey. Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component. When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between. Other expressions describing the relationship between components, such as "between" and "immediately between," or "neighboring to," and "directly neighboring to" should be interpreted as well. In the drawings, the reaction chamber, the transfer unit, the injection unit, the dust collector, the sensor, the controller, the cassette, and the like are somewhat exaggerated for clarity.

Method and apparatus for transferring substrates on which carbon nanotubes are synthesized

1 is a schematic configuration diagram showing a substrate transfer apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the transfer apparatus 100 includes a transfer unit 10, an injection unit 12, a dust collecting unit 14, a sensor unit 18, a control unit 20, a cassette 16, and the like. Subsequently, the substrate 11 mentioned below is made of carbon nanotubes synthesized thereon.

Specifically, the transfer unit 10 transfers the substrate 11 on which the carbon nanobubble is synthesized to the outside of the reaction chamber. Here, as an example of the transfer unit 10, as shown in FIG. 1, the blade 10a integrally supporting the substrate 11, the arm 10b connected to the blade 10a, and the horizontal movement path and the vertical movement path of the arm 10b. The robot etc. which have a Cartesian coordinate structure containing the rail 10c etc. which provide this are mentioned.

In addition, as another example, a robot including an arm having an articulated joint while being connected to a blade and a blade that directly supports a substrate may be mentioned.

In particular, when the transfer unit 10 mentioned above is a robot having the rectangular coordinate structure of FIG. 1 mentioned above, the transfer unit 10 itself loads the substrate 11 when loading the substrate 11 into the cassette 16 to be described later. The height can be adjusted according to the configuration.

However, in the case of the robot including the arm having the articulated joint as in the other embodiments mentioned, the cassette itself, which will be described later, has a configuration capable of height adjustment according to the loading of the substrate.

In addition, the injection unit 12 injects gas from the upper part to the lower part based on the transfer path when the substrate 11 is transferred to the outside of the reaction chamber by using the transfer part 10. Therefore, it is preferable that the injection part 12 is provided with the nozzle 12a which can inject gas at the upper part, and in this case, more than one is more preferable. In addition, it is preferable to determine the structure of the injection part 12 in consideration of the installation relationship of the nozzle 12a, the installation relationship of the dust collection part 14 mentioned later, and the transfer relationship of the board | substrate 11. Thus, the injection part 12 is open to the portion where the transfer of the substrate 11 is directly, the upper portion is open while the nozzle 12a can be installed, the lower portion is to enable the dust collecting portion 14 to be collected. It has a mesh-type structure, the remaining portion may be made of a box type having a closed structure.

In addition, when the gas is injected directly to the substrate 11 using the injection unit 12, all of the carbon nanotube powder synthesized on the upper part may be scattered, which is not preferable. Therefore, it is preferable that the injection part 12 injects gas to the area | region except the board | substrate 11. Accordingly, the gas using the injection unit 12 is injected at the rear end through which the substrate 11 passes and the front end through which the substrate 11 passes, based on the transfer path of the substrate 11, and injected at the rear end where the substrate 11 passes. In this case it is appropriate to spray as soon as the substrate 11 passes.

In addition, the gas which can be injected by using the injection unit 12 does not react with the tasmananotube powder synthesized on the substrate 11, and the carbon nanotubes that are scattered from the substrate 11 during transport through a simple injection. What is necessary is just to allow dust collection of a powder. Inert gas is mentioned as an example of the gas which can be used for this. That is, nitrogen gas and argon gas can be used. These may be used alone or in combination of two.

The dust collecting unit 14 collects carbon nanotube powder scattered from the substrate 11 during transfer by gas injection of the spraying unit 12. At this time, since the gas of the injection unit 12 is injected from the upper side to the lower side based on the path of the substrate 11, the dust collecting unit 14 is preferably located below the injection unit 12. In addition, since the dust collecting unit 14 collects carbon nanotube powder scattered from the substrate 11 during transfer, not only the above-mentioned tanno nanotube powder but also a pollutant floating in a region where gas is injected may be collected. Therefore, it is preferable that the dust collecting part 14 includes a filter which can remove the mentioned pollution source. In addition, the dust collector 14 may further include a member capable of purifying the carbon nanotube powder scattered from the substrate 11 during transfer. This is to improve the purity of the carbon nanotube powder in which dust is collected through the dust collector 14.

In addition, since the injection of the gas using the injection unit 12 needs to consider the transfer relationship of the substrate 11 as mentioned, the transfer device 100 may include a sensor unit 18 that senses a transfer position of the substrate 11. The controller 20 may control a gas injection of the injection unit 12 according to the sensing result of the sensor unit 18. Here, the sensor unit 18 may be appropriately installed at a portion capable of sensing the transfer position of the substrate 11. Examples of the sensor unit 18 that can be used include a member capable of sensing a distance difference due to water and light emission. In addition, the control unit 20 is connected to control the driving of the injection unit 12. That is, the controller 20 controls the injection unit 12 to inject gas into the rear end of the substrate 11 as soon as the substrate 11 passes by the sensing result of the sensor unit 18, or the substrate 11 is controlled. The injection unit 12 is controlled to inject gas into the rear end that passes and the front end that the substrate 11 passes.

In addition, the cassette 16 loads the substrate 11 transferred from the reaction chamber. At this time, the cassette 16 has a structure in which slits face mainly on both side walls. Therefore, a plurality of substrates 11 are loaded into one cassette 16. In addition, since the cassette 16 loads the substrate 11 through which the transfer is carried out from the reaction chamber, the cassette 16 is preferably installed at the rear end of the transfer unit 10. In addition, when stacking a plurality of substrates 11 in the cassette 16, it is necessary to consider the height of the substrate 11 is loaded. Therefore, as mentioned, when the transfer part 10 includes a robot having a rectangular coordinate structure, the cassette 16 has a fixed configuration because the transfer part 10 itself adjusts the height. However, when the transfer section 10 includes a robot having an arm having multiple joints, it is preferable to further provide a member capable of adjusting the height of the cassette 16 because the cassette 16 itself must adjust the height.

As mentioned, the transfer device 100 according to an embodiment of the present invention is the transfer unit 10, the injection unit 12, the dust collecting unit 14, the sensor unit 18, the control unit 20, the cassette 16 And the like, and when the substrate 11 is transported, the carbon nanotube powder scattered from the substrate 11 can be easily collected.

Hereinafter, a method of transferring the substrate on which the carbon nanotubes are synthesized using the above-mentioned transfer device will be described. In addition, below, the same code | symbol is used about the same member in FIG.

FIG. 2 is a process flowchart showing a substrate transfer method using the substrate transfer apparatus of FIG. 1.

Referring to FIG. 2, a process for synthesizing carbon nanotubes in a reaction chamber is performed. Thus, the synthesis of carbon nanotubes is performed on the substrate 11.

Subsequently, transfer of the substrate 11 on which the carbon nanotubes are synthesized is performed (S20). The substrate 11 is loaded on the blade 10a of the transfer unit 10. Here, the transfer unit 10 is located inside the reaction chamber and loads the substrate 11 on the blade 10a. As such, the substrate 11 on which the carbon nanotubes are stacked on the blade 10a is transferred. The transfer is performed by driving the arm 10b and the rail 10c of the transfer section 10. Therefore, the substrate 11 on which the carbon nanotubes are synthesized by the transfer unit 10 is transferred to the outside of the reaction chamber.

As mentioned, the substrate 11, which is transported out of the reaction chamber, is via the injection unit 12. Then, the sensor unit 18 senses the position of the substrate 11 to which the transfer is performed (S22), and outputs the sensing result to the control unit 20.

The control unit 20 receives the sensing result of the sensor unit 18 and controls the injection unit 12 to inject gas according to the position of the substrate 11 being transferred by the transfer unit 10. . That is, the control unit 20 controls the injection unit 12 so that the gas can be injected to the region where the substrate 11 during transfer is not located. In detail, the controller 20 controls the sprayer 12 to spray the gas to the rear end of the substrate 11 or the sprayer 12 to spray the gas to the front end where the substrate 11 passes. In addition, when the substrate 11 which is being transported stays in the injection unit 12 for a while, the injection unit 12 is controlled to inject gas at the front and rear ends of the substrate 11.

As described above, under the control of the control unit 20, the injection unit 12 injects gas into a region other than the substrate 11, and carbon nanotube powder scattered from the substrate 11 is transferred to the dust collection unit 14 during transportation. Dust is collected. (S24 and S26)

Subsequently, the substrate 11 on which the carbon nanotubes are synthesized is transferred and loaded into the cassette 16 (S28).

Therefore, in the transfer of the substrate 11 in which the carbon nanotubes are synthesized using the transfer apparatus 100 mentioned above, the carbon nanotube powder scattered from the substrate 11 can be easily collected. Accordingly, the recovery rate of the carbon nanotube powders according to the transfer of the substrate 11 in which the carbon nanotubes are synthesized may be improved, and the contamination of the peripheral member due to the carbon nanotube powders may be reduced.

Synthesis device of carbon nanotube and synthesis method using same

3 is a schematic configuration diagram showing a device for synthesizing carbon nanotubes according to an embodiment of the present invention. In addition, since the apparatus for synthesizing the carbon nanotubes of FIG. 3 includes the aforementioned transfer device of the substrate of FIG. 1 as a member, the same reference numerals are used for the same members, and a detailed description thereof will be omitted.

Referring to FIG. 3, the carbon nanotube synthesis apparatus 300 includes a reaction chamber 200, a transfer unit 10, an injection unit 12, a dust collector 14, a sensor unit 18, a controller 20, and a cassette. (16) and the like.

First, the transfer unit 10, the injection unit 12, the dust collecting unit 14, the sensor unit 18, the control unit 20, and the cassette 16 are the same as in FIG. The description will be omitted. However, in the case of the cassette 16, it is for recovering the substrate 11 to which the transfer has been carried out. If the carbon nanotube synthesizing apparatus 300 provides a member for recovery separately, it may be omitted. That is, when the carbon nanotube synthesizing apparatus 300 includes a space for recovering the substrate 11 on which carbon nanotubes are synthesized at one end thereof connected to the transfer part 10, the cassette 16 is omitted. You can do it.

In addition, the reaction chamber 200 may include a reactor for providing a space for accommodating the substrate 11 therein, a heating unit for heating the reactor, a source gas providing unit for providing a source gas into the reactor, And a source gas discharge part for discharging the source gas inside the reactor to the outside of the reactor.

Specifically, the reactor provides a space for synthesizing carbon nanotubes on the substrate 11 accommodated therein as mentioned above. In addition, the reaction furnace is preferably formed using a material having sufficient heat resistance because it must be robust in an atmosphere of about 500 to 1,100 ℃ process temperature when synthesizing carbon nanotubes. Therefore, the reaction furnace can be formed mainly using quartz, graphite, or the like. In particular, these may be used alone to form a reactor, or a mixture thereof may be used to form a reactor.

The heating unit is for heating the reactor, but may be provided in various ways, and generally includes a heating coil surrounding the reactor. Thus, the heating unit having a heating coil is heated so that the inside of the reactor has a process temperature of about 500 to 1,100 ℃.

In addition, the source gas providing unit provides a source gas inside the reactor as mentioned. That is, the source gas providing unit provides a source gas for synthesizing carbon nanotubes on the substrate 11 accommodated in the reactor. Here, the source gas providing unit is mainly connected to one side of the reactor to provide a flow path for flowing the source gas, a valve installed in the line to open and close the flow of the source gas and to store the source gas, the source gas storage connected to the line It includes wealth.

In addition, in the synthesis of carbon nanotubes, the substrate 11 accommodated inside the reactor has a configuration mainly placed in a boat located inside the reactor. In particular, the boat generally has a multilayer structure that can accommodate a plurality of substrates 11 inside the reactor.

And, as mentioned above, the source gas discharge unit discharges the source gas provided into the reactor to the outside of the reactor. In addition, when the source gas discharge unit performs a forced discharge instead of simply discharging the source gas, the source gas discharge unit includes a line having a tube structure for discharge of the source gas and a pump connected to the pump to perform forced discharge. It is desirable to.

In addition, when synthesizing the carbon nanotubes under the vacuum process conditions other than atmospheric pressure, a member for adjusting the vacuum pressure reduction may be further connected to the reactor.

Here, in the case of using the carbon nanotube synthesis apparatus according to an embodiment of the present invention, the carbon nanotube powder scattered from the substrate 11 can be easily collected during the transfer of the substrate 11 on which the carbon nanotubes are synthesized. Can be. Accordingly, the recovery rate of the carbon nanotube powders according to the transfer of the substrate 11 in which the carbon nanotubes are synthesized may be improved, and the contamination of the peripheral member due to the carbon nanotube powders may be reduced.

In addition, in an embodiment of the present invention, only the carbon nanotube synthesizing apparatus 300 is described. However, in order to obtain carbon nanotubes, a carbon nanotube synthesis system including the synthesizing apparatus 300 mentioned above should be used. . That is, the carbon nanotube synthesis system includes a cleaning apparatus, a catalyst thin film forming apparatus, a catalyst thin film etching apparatus, a post-treatment apparatus, etc. in addition to the synthesis apparatus 300 mentioned above.

The synthesis method of carbon nanotubes using the system having the above-mentioned configuration is as follows.

First, a substrate 11, which is a substrate for synthesizing carbon nanotubes, is prepared. Here, examples of the substrate 11 include a silicon substrate, an induim tin oxide (ITO) substrate, an ITO-coated glass, soda lime glass, and the like. In addition, if carbon nanotubes have sufficient rigidity when synthesized, it is possible to use various kinds of substrates in addition to the examples mentioned.

As mentioned, after preparing the substrate 11, the substrate 11 is loaded into the cleaning apparatus. Then, the foreign matter remaining on the substrate 11 is sufficiently removed by using a cleaning gas or the like. At this time, the cleaning gas mainly uses an inert gas.

Subsequently, the substrate 11 is unloaded from the cleaning apparatus and then loaded into the catalyst thin film forming apparatus. Then, a catalyst thin film is formed on the substrate 11. Here, the catalyst thin film is formed by a sputtering method, a chemical vapor deposition method, or the like. Therefore, the catalyst thin film forming apparatus is similar in structure to a sputtering apparatus, a chemical vapor deposition apparatus and the like. In addition, the catalyst thin film formed on the substrate 11 mainly contains iron, nickel, cobalt and the like. These may be used alone or in combination of two or more.

Subsequently, the substrate 11 is unloaded from the catalyst thin film forming apparatus and then loaded into the catalyst thin film etching apparatus. In etching the catalyst thin film, HF or NH ₃ gas diluted in water is mainly used. As such, the catalyst thin film is formed on the substrate 11 by etching the catalyst thin film.

Subsequently, the substrate 11 is unloaded from the catalyst thin film etching apparatus and then loaded into the carbon nanotube synthesis apparatus 300. Then, the inside of the reactor is heated to have a temperature of about 500 to 1,100 ° C. using the heating part of the synthesis apparatus 300, and a source gas for synthesizing carbon nanotubes is provided to the inside of the reactor using the source gas providing part. Here, examples of the source gas include acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, and the like. These may be used alone or in combination of two or more thereof. As such, the temperature and the pressure inside the reactor are adjusted to meet the conditions, and the carbon nanotubes are synthesized on the substrate 11 having the catalyst thin film etched by providing the source gas. In particular, it is possible to synthesize carbon nanotubes more uniformly by providing a source gas using the source gas providing unit mentioned above.

Then, the source gas is discharged to the outside of the reactor using the source gas discharge unit. Here, the method of transferring the substrate on which the carbon nanotubes are synthesized to the outside of the reactor is the same as described with reference to FIG. 2, so a detailed description thereof will be omitted.

Subsequently, the catalyst thin film is removed from the synthesized carbon nanotubes using a post-treatment apparatus, and carbon nanotubes are recovered. Then, a series of processes for the synthesis of carbon nanotubes is completed.

As mentioned, using the apparatus and method for transporting a substrate on which the carbon nanotubes are synthesized according to the present invention, and the carbon nanotube synthesis apparatus including the same, carbon scattered from the substrate during transport of the substrate on which the carbon nanotubes are synthesized Nanotube powder can be easily collected.

Therefore, the present invention can improve the recovery rate of the carbon nanotube powder, and can also reduce the contamination of the peripheral member due to the carbon nanotube powder. Therefore, the present invention can be expected to improve the reliability and productivity according to the production of carbon nanotubes.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims (12)

Transferring the substrate on which the carbon nanotubes are synthesized to the outside of the reaction chamber; And In the case of transporting the substrate to the outside of the reaction chamber to collect the carbon nanotube powder scattered from the substrate by injecting a gas from the top to the bottom based on the transfer path of the substrate in the region other than the substrate A method of transporting a substrate on which nanotubes are synthesized. The method of claim 1, wherein the gas is sprayed as soon as the substrate passes through a rear end of the substrate, based on a transfer path of the substrate. The method of claim 1, wherein the gas is injected at a rear end of the substrate and a front end of the substrate, based on the transfer path of the substrate. The method of claim 1, wherein the gas comprises an inert gas. The method of claim 1, further comprising loading a substrate, which has been transferred out of the reaction chamber , into a cassette. A transfer unit configured to transfer the substrate on which the carbon nanotubes are synthesized to the outside of the reaction chamber; The substrate is connected to the reaction chamber and is installed in a path through which the substrate is transferred. When the substrate is transferred to the outside of the reaction chamber, gas is injected from the upper part to the lower part based on the transfer path of the substrate in a region excluding the substrate. Injection unit; And And a dust collecting unit disposed below the spraying unit and collecting the carbon nanotubes scattered from the substrate as the gas is sprayed using the spraying unit. 7. The apparatus of claim 6, wherein the gas injected by the injector comprises an inert gas. The apparatus of claim 6, further comprising: a sensor unit configured to sense a transfer position of the substrate when transferring the substrate to the outside of the reaction chamber; And And a control unit for controlling the gas injection of the injection unit by the sensing result of the sensor unit. The method of claim 7, wherein the controller controls the jetting unit to inject gas as soon as the substrate passes after the substrate passes based on the transfer path of the substrate or passes the substrate based on the transfer path of the substrate. The apparatus for transporting a substrate, characterized in that for controlling the injection unit to inject a gas to the rear end and the front end to pass the substrate. The substrate transfer apparatus of claim 6, further comprising a cassette capable of stacking a plurality of substrates transferred to the outside of the reaction chamber . A reaction chamber providing a space for synthesizing carbon nanotubes on a substrate accommodated therein; A transfer unit configured to transfer the substrate on which the carbon nanotubes are synthesized to the outside of the reaction chamber; The substrate is connected to the reaction chamber and is installed in a path through which the substrate is transferred. When the substrate is transferred to the outside of the reaction chamber, gas is injected from the upper part to the lower part based on the transfer path of the substrate in a region excluding the substrate. Injection unit; A dust collecting unit installed below the spraying unit and collecting the carbon nanotubes scattered from the substrate as the gas is sprayed using the spraying unit; A sensor unit configured to sense a transfer position of the substrate when transferring the substrate to the outside of the reaction chamber; A control unit controlling gas injection of the injection unit according to a sensing result of the sensor unit; And A device for synthesizing carbon nanotubes comprising a cassette capable of stacking a plurality of substrates transferred to the outside of the reaction chamber . The method of claim 11, wherein the control unit controls the injection unit to inject gas as soon as the substrate passes after the substrate passes based on the transfer path of the substrate, or the substrate passes by the transfer path of the substrate. The apparatus for synthesizing the carbon nanotubes, characterized in that for controlling the injection unit to inject gas into the rear end and the front end to pass the substrate.

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