KR20020009875A - Apparatus of vapor phase synthesis for synthesizing carbon nanotubes or carbon nanofibers and synthesizing method of using the same - Google Patents

Abstract

PURPOSE: A chemical vapor deposition equipment is provided which deposits carbon nanotube or carbon nanofiber having a diameter of tens nm or less in large quantities, and a chemical vapor deposition method is provided which deposits carbon nanotube or carbon nanofiber having a diameter of tens nm or less in large quantities using the equipment. CONSTITUTION: The chemical vapor deposition equipment for depositing carbon nanotube or carbon nanofiber comprises a gas supply part(100) which supplies a vaporized or sublimed catalytic metal source gas and a vaporized carbon source gas; a vertical reaction furnace consisting of a gas injection port(212) of the catalytic metal source gas and the carbon source gas that are supplied from the gas supply part, wherein the injection port is equipped at the upper part of the vertical reaction furnace, an exhaust port(214) of unreacted gases which is equipped at the lower part of the vertical reaction furnace, a low temperature area(220) which is installed adjacently to the gas injection port so as to form catalytic metal particles by pyrolyzing the catalytic metal source gas, a high temperature area(230) which is installed adjacently to the exhaust port so that carbon nanotube or carbon nanofiber is deposited by pyrolyzing the carbon source gas on the catalytic metal particles that are formed by being pyrolyzed at the low temperature area, and a collector(240) which is installed at the lower part of the vertical reaction furnace so as to collect the deposited carbon nanotube or carbon nanofiber; and flow rate controllers which are connected to the exhaust port, and installed at the outer part of the reaction furnace so as to control flow rates of the source gases and reactants thereof in the reaction furnace.

Description

Apparatus of vapor phase synthesis for synthesizing carbon nanotubes or carbon nanofibers and synthesizing method of using the same}

The present invention relates to a gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers and a synthesis method using the same.

Carbon nanotubes or carbon nanofibers are formed by hexagonal annulus by connecting three carbon atoms adjacent to one carbon atom by sp ² bonds. It is known to have a form that has been achieved. It is known that the cylindrical structure is generally several nanometers to several hundred nanometers in diameter, and its length is tens to thousands of times longer in diameter. Such carbon nanotubes or carbon nanofibers are conductive in the arm-chair structure and exhibit semiconductivity in the zig-zag structure, and have excellent electrical properties, high mechanical strength, and chemically stable materials. Therefore, it is expected to be applied in various ways in the information industry.

Known methods for synthesizing carbon nanotubes or carbon nanofibers include electric discharge, laser deposition, vapor phase synthesis, thermochemical vapor deposition, or plasma chemical vapor deposition.

The dual gas phase synthesis method is a method of synthesizing carbon nanotubes in the gas phase by pyrolyzing carbon source gas in a reactor without using a substrate, which is advantageous in mass synthesis, but has carbon nanotubes or carbons having a large diameter of 0.05 to 30 μm. Nanofibers are the main product and have a disadvantage in that their diameter is difficult to control to several tens of nm or less.

For example, a method of synthesizing at 600 to 1300 ° C. using an organometallic compound, a hydrocarbon compound, and a hydrogen gas is disclosed in US Pat. No. 4,578,813, but the diameter of the carbon fiber formed according to this method is very large, 0.05 to 2 μm. . Furthermore, this method has longer residence time in the reactor than several seconds because the reaction gases used for synthesis are injected directly into the vertical reactor. Therefore, it is difficult to synthesize carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less.

EP 0424922 also discloses a method of synthesizing carbon fibers at 550-800 ° C using organometallic compounds including carbon monoxide, hydrogen gas and transition metals, but this method also has a diameter of several tens of nm or less as the reaction gas is injected directly into the reactor. It is difficult to synthesize a carbon nanotube or carbon nanofibers having a.

US Pat. No. 5,102,647 also discloses an inorganic material (100 to 0.01) that allows effective use of radiant heat transfer and prevents the synthesis of carbon fibers in combination with fine transition metal particles thermally decomposed from carbon dioxide and benzene and Fe (CO) ₅ . Alumina, mullite or zirconia having a particle diameter of mm) is introduced into a reactor to synthesize carbon fibers. However, the carbon fibers synthesized by this method also have a diameter of about 0.7 μm.

WO 99/06618 discloses a method of directly injecting an organic metal compound containing carbon monoxide and hydrogen gas, molybdenum and cobalt into a reactor to synthesize single-walled and multi-walled carbon nanotubes at a yield of 50% within 700-1100 ° C. Is disclosed. However, this method controls the time the reactants stay in the reactor by adjusting the pressure within the range of 0 to 100 p.s.i.g. Therefore, the reactor must be formed of a material that can withstand high pressure, and the concentration of the reactant also increases with increasing pressure, thereby producing a large amount of amorphous carbon particles.

Smalley (P. Nikolaev, MJ Bronikowske, RKBradly, F. Rohmund, DTColbert, KASmith and RESmalley, Chem. Phys. Lett., Vol 303, p.91, 1999) also described carbon monoxide as an organometallic compound of Fe (CO) ₅ . A method of synthesizing a single-walled carbon nanotube by bubbling an organometallic compound while injecting it into a vaporizer and spraying it into a reactor through a nozzle at a pressure of 0 to 100 atm. However, this method also uses a high pressure to control the size of the catalyst metal particles, so that the concentration of the reactant also increases with increasing pressure, there is a disadvantage that a large amount of amorphous carbon particles are generated.

That is, it is very difficult to synthesize a large amount of carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less by methods or devices known to date.

An object of the present invention is to provide a gas phase synthesis apparatus capable of synthesizing a large amount of carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less.

Another object of the present invention is to provide a method for synthesizing a large amount of carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less by using the above-described gas phase synthesis apparatus.

1 is a schematic diagram of a gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to an embodiment of the present invention.

2 is a cross-sectional view of a nozzle that may be used as the injector of FIG. 1.

3 and 4 are plan views of showerheads that may each be used as the injector of FIG. 1.

5 and 6 are schematic diagrams of a fan and a vacuum pump that can be used as the flow regulator of the present invention, respectively.

The gas phase combined growth value according to the present invention for achieving the above technical problem is installed outside the reactor by being connected to the gas supply unit, the vertical reactor and the exhaust of the vertical reactor, source gases in the reactor and their A flow controller for controlling the flow rate of the reactants in the reactor.

Specifically, the supply portion of the gas supplies the vaporized or sublimed catalytic metal source gas and the vaporized carbon source gas. The vertical reactor has an inlet for the catalyst metal source gas and the carbon source gas supplied from the gas supply at the upper end, and an exhaust port for the unreacted gases at the lower end, and pyrolyzes the catalyst metal source gas adjacent to the gas inlet side to form catalytic metal particles. And a low temperature region for forming carbon nanotubes, and a high temperature region for thermally decomposing carbon source gas to synthesize carbon nanotubes or carbon nanofibers on catalytic metal particles formed by pyrolysis in a low temperature region adjacent to the exhaust port. It includes a collector for obtaining the synthesized carbon nanotubes or carbon nanofibers. The flow controller is connected to the exhaust port of the vertical reactor and installed outside the reactor, and controls the flow rate of the source gases and their reactants in the reactor.

Preferably, the gas supply unit is connected to a gas inlet of the reactor, and connected to a vaporizer and a vaporizer for vaporizing a carbon source solution in which the catalyst metal source is dissolved, and reacts the catalytic metal source gas and carbon source gas vaporized in the vaporizer. A carrier gas supply for supply to the furnace.

It is preferable that the sulfur-containing compound is further dissolved in the carbon source solution.

The gas supply further includes a hydrogen gas supply, an ammonia gas supply and an argon gas supply, each of which is preferably connected to the gas inlet of the reactor.

Preferably, the gas phase combined growth value according to the present invention is installed in the reactor in connection with the gas inlet, and further includes an injector for uniformly injecting the carbon source gas and the catalytic metal source gas into the reactor.

The injector is provided at a position corresponding to the low temperature region, and the ratio of the diameter of the reactor and the diameter of the injector is preferably 1: 0.05 to 1: 0.5.

On the outer circumference of the vertical reactor, a first heater for maintaining the low temperature region at the first temperature and a second heater for maintaining the high temperature region at the second temperature are provided. It is preferable that it is maintained at the temperature of -450 degreeC, and a high temperature area | region is maintained at the temperature of 700-1250 degreeC by a 2nd heater.

The flow regulator is preferably such that the time for the source gases and their reactants to stay in the high temperature range is 0.1 to 5 seconds, and as the flow regulator, a fan or a vacuum pump may be used.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention and to those skilled in the art to fully understand the scope of the invention. It is provided to inform you. In the drawings, each device is schematically illustrated for the sake of explanation, and the gas pipes are shown in lines for convenience of description. Like reference numerals in the drawings denote like elements. In the following, the gas phase synthesis apparatus according to the present invention is referred to as carbon nanotubes or carbon nanofibers for synthesis. Carbon nanotubes refer to a state in which crystallinity is superior to that of carbon nanofibers, and even in the same apparatus, carbon nanotubes alone or carbon nanotubes may be mainly synthesized depending on the synthesis conditions and the reaction gas used. That is because only carbon nanofibers or carbon nanofibers may be mainly synthesized.

Referring to Figure 1, the carbon nanotubes or carbon nanofiber composite growth value for synthesizing the carbon nanofibers according to the present invention comprises a gas supply unit 100, the synthesis reaction and reactant collection unit 200 and the flow control unit 300, etc. do.

The gas supply unit 100 includes a reaction source gas supply unit 100a and an auxiliary gas supply unit 100b.

The reaction source gas supply unit 100a is composed of a vaporizer 110 and a carrier gas supply 120. The vaporizer 110 vaporizes the carbon source solution in which the catalytic metal source is dissolved. The catalytic metal source may be an organometallic compound selected from the group consisting of Fe (CO) ₅ , Mo (CO) ₅ , Co ₂ (CO) ₈ , (C ₅ H ₅ ) ₂ Fe, and Ni (CO) ₅ . As the source, any one selected from the group consisting of methane, ethylene, acetylene, cyclohexane, benzene, xylene, carbon monoxide and carbon dioxide is used. Preferably the carbon source solution further comprises a sulfur source. As the sulfur source, a sulfur-containing solid compound such as thiophene (C ₄ H ₄ S) is used. Sulfur promotes nuclear growth on carbon nanotubes or early growth catalysts of carbon nanofibers.

The reaction gases vaporized in the vaporizer 110 are injected into the reactor 210 of the synthesis reaction and the collecting unit 200 by the carrier gas supplied from the carrier gas supplier 120. As a carrier gas, an inert gas such as argon is mainly used. If necessary, a mixed gas of a hydrocarbon gas such as methane, acetylene, carbon monoxide or carbon dioxide may be used as a carrier gas together with an inert gas.

When (C ₅ H ₅ ) ₂ Fe is used as the catalytic metal source, a (C ₅ H ₅ ) ₂ Fe solid may be provided with a sublimer (not shown) maintained at a temperature of 300 to 700 ° C. separately from the vaporizer 110. After being contained in the sublimer, it may be sublimed and injected into the reactor 210 together with the carbon source gas and / or the sulfur source gas vaporized in the vaporizer 110.

The auxiliary gas supply unit 100b includes a hydrogen gas supplier 150, an argon gas supplier 160, and an ammonia gas supplier 170. Hydrogen gas is supplied to prevent oxidation of the catalytic metal particles decomposed in the reactor 210 and to promote the growth of the growing carbon nanotubes or carbon nanofibers. Argon gas is supplied using a high flow rate to induce all gases injected into the reactor 210 to have a high flow rate. Ammonia gas is supplied to improve the properties of carbon nanotubes or carbon nanofibers synthesized by catalysis.

Each gas supplier 120, 150, 160, 170 is provided with flow meters 125, 155, 165, 175, respectively.

Synthesis reaction and reactant collection unit 200 is largely composed of a vertical reactor 210 and a filter 260.

The reactor 210 has an injection port 212 of a reaction source gas and an auxiliary gas supplied from the gas supply unit 100 at an upper end thereof, and an exhaust port 214 of unreacted gas at an lower end thereof. The reactor 210 is divided into two regions, that is, the low temperature region 220 and the high temperature region 230. The low temperature region 220 adjacent to the inlet 212 is a region for pyrolyzing the catalytic metal source gas supplied from the inlet 212 to form catalytic metal particles, and the high temperature region 230 adjacent to the outlet 214 is The carbon source gas is thermally decomposed on the catalytic metal particles formed by pyrolysis in the low temperature region 220 to synthesize carbon nanotubes or carbon nanofibers.

Temperatures of the low temperature region 220 and the high temperature region 230 are controlled by the first and second heaters 225 and 235 installed at the outer periphery of the vertical reactor 210, respectively. The first heater 225 and the second heater 235 are preferably isolated from each other with a heat insulating material (not shown) therebetween. In addition, thermocouples (not shown) are mounted in the low temperature region 220 and the high temperature region 230, respectively, and it is preferable to detect the temperature in these regions.

In the synthesis reaction, the low temperature region 220 is maintained at a temperature of 150 to 450 ° C., preferably 200 to 450 ° C., which is a temperature suitable for pyrolyzing the catalyst metal source gas to form catalyst metal particles. 230) is preferably maintained at a temperature of 700 to 1250 ° C, preferably 900 to 1150 ° C, which is a temperature suitable for thermal decomposition of the carbon source gas.

At the bottom of the reactor 210, a collector 240 for collecting the synthesized carbon nanotubes or carbon nanofibers is installed. Collector 240 is made of stainless steel fiber or quartz wool.

Most of the carbon nanotubes or carbon nanofibers synthesized in the reactor 210 are collected in the collector 240. Some reactants that are not collected in the collector 240 are finally collected by the filter 260.

In the reactor 210, the injector 250 is preferably connected to the gas injection hole 212. The injector 250 is installed to uniformly inject the reaction source gas supplied from the gas supply unit 100 into the reactor 210. In particular, by uniformly injecting the catalyst metal source gas in the reaction source gas into the reactor 210 to form a catalyst metal particles of a certain size to enable the synthesis of carbon nanotubes or carbon nanofibers of a constant diameter. Therefore, the injector 250 may be installed at a position corresponding to the low temperature region 220, which is a region where pyrolysis of the catalytic metal source gas occurs.

The diameter ratio of the reactor 210 and the diameter of the injector 250 is preferably 1: 0.05 to 1: 0.5. This is because when the diameter ratio is 1: 0.05 or less, there is a disadvantage in that an uninjected region exists in the reactor, and when it is 1: 0.5 or more, there is a disadvantage in that excessive injection exists.

As the injector 250, a nozzle or a showerhead is preferably used.

Specifically, referring to FIG. 2, the nozzle suitable for the injector 250 is a spray-type slit nozzle, and when the diameter of the reactor is 50 to 200 mm, the outer diameter of the nozzle is 10 to 50 mm, and each of the slits 252s is formed. The diameter of 0.5 to 3 mm is suitable for uniformly distributing the reaction gas, particularly the catalyst metal source gas, in the reactor 210.

As a showerhead suitable for the injector 250, a showerhead as shown in FIGS. 3 and 4 may be used. It is preferable that the outer diameter of a showerhead is 30-50 mm, and the diameter of the injection hole 252h is 0.5-3 mm similarly to a nozzle. As shown in FIG. 3, the gas jetting apparatus of the present invention has the injection holes 252h uniformly distributed on the surface, or distributed at regular intervals (for example, 10 mm) along the spiral as shown in FIG. 4. It is suitable as an injector.

Referring back to FIG. 1, the gas phase synthesis apparatus according to the present invention is connected to an exhaust port 214 and an exhaust pipe 216 and installed outside the reactor 210, and source gases in the reactor 210 are provided. And a flow rate controller 300 for controlling the flow rate of these reactants. The flow rate control unit 300 desires a time for the reactants formed in the reactor 210, in particular, the catalytic metal particles formed by pyrolysis to stay in the reactor 210, specifically, the high temperature region 230 where the synthesis reaction proceeds. It is intended to minimize within a time range suitable for the synthesis of carbon nanotubes or carbon nanofibers of length. The reason is that in order to synthesize carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less, nano-sized catalytic metal particles formed by pyrolysis of a catalytic metal source gas in a low temperature region 220 synthesize carbon nanotubes or carbon nanofibers. This is because it is necessary to prevent the diameters of the catalyst metal particles from growing to agglomerate with each other while passing through the hot zone 230 where this occurs. Therefore, it is necessary to minimize the residence time of the catalytic metal particles pyrolyzed in the low temperature region 210 in the high temperature region 230 in the reactor 210. In consideration of the synthesis mechanism of carbon nanotubes or carbon nanofibers, the carbon nanotubes generally have a time in which the pyrolyzed catalytic metals stay in the high temperature region 230 regardless of the size of the reactor 210. Alternatively, it is possible to synthesize carbon nanotubes or carbon nanofibers having a diameter of 100 nm or less, preferably 60 nm or less, which is the upper limit of the diameter of carbon nanofibers.

The flow controller 310 constituting the flow control unit 300 may be configured by using a ventilator illustrated in FIG. 5 or a vacuum pump illustrated in FIG. 6. 5, the fan 510 and the main body 520 are preferably made of a metal which is not corroded by exhaust gases among metals such as steel. In addition, the body 520 should be completely sealed except for the joint portion with the exhaust pipe 216. Preferably, the fan is equipped with an inverter so that the flow rate in the reactor 210 can be freely adjusted by adjusting the rotation speed of the fan.

The pump shown in FIG. 6 should also have the same material properties as the ventilator 500. The pump is suitable when the flow rate in the reactor 210 is to be adjusted freely even if the flow rate is large.

Hereinafter, the gas phase synthesis apparatus according to the present invention and a synthesis method using the same will be described in detail by explaining an experimental example of synthesizing carbon nanotubes or carbon nanofibers using the gas phase synthesis apparatus of the present invention.

Carbon nanotubes were synthesized by using a reactor 210 having a diameter of 150 mm, a length of 1500 mm, and a high temperature region 230 in which gas phase synthesis proceeds to 600 mm in length. First, the temperatures of the heaters 225 and 235 are raised such that the temperature of the low temperature region 220 is 300 ° C. and the temperature of the high temperature region 230 is 1100 ° C. The vaporizer 110 contained a solution in which the catalytic metal source Fe (CO) ₅ and the sulfur source C ₄ H ₄ S were dissolved in benzene, which is a carbon source, and then, the vaporization reaction occurred by raising the temperature of the vaporizer.

The argon gas was supplied into the reactor 210 at 500 ml / min from the argon gas supplier 160 while the temperature of the reactor and the temperature of the vaporizer were raised. After the temperature in the reactor 210 reaches the process temperature, the source gas vaporized in the vaporizer 110 by supplying argon gas, which is a carrier gas, into the vaporizer 110 at 500 ml / min from the carrier gas supplier 120. To be fed into the reactor 210. The source gases are installed in the middle of the position corresponding to the low temperature region 220 of the reactor 210, and have a reaction head through the shower head 250 having an outer diameter of 40 mm and a uniform injection hole of 1.5 mm. 210). The source gas is supplied from the vaporizer 110 and at the same time hydrogen gas from the hydrogen gas supply 150 at a flow rate of 3 l / min, ammonia gas from the ammonia gas supply 170 at a flow rate of 1 l / min, and from the argon gas supply 160. Argon gas was supplied into the reactor 210 at a flow rate of 10 l / min. At the same time as the supply of the gas was started, the exhaust flow rate of the exhaust fan 310 of the flow rate adjusting unit 300 was operated to be 70 l / min. Under the above process conditions, gas phase synthesis was performed for 2 hours to continuously synthesize carbon nanotubes. After the synthesis reaction was completed, carbon nanotubes collected in the collector 240 and the filter 260 installed at the bottom of the reactor 210 were obtained. The yield was 85%, the average diameter of the obtained carbon nanotubes was 35nm, the average length was 40㎛.

The reason why the carbon nanotubes having an average diameter of 35 nm could be formed was that the catalyst metal particles formed by pyrolysis in the low temperature region 220 stay in the high temperature region 230 in which the synthesis reaction proceeds. By calculation, it was found that it was about 1.9 seconds.

^{_{t r = π · d 2 ·}} l · T 0/4 · T · F

Where d is the diameter of the reactor 210 (150 mm), l is the length of the second region 230 (600 mm), F is the exhaust flow rate of the flow regulator (70 l / min), T ₀ is room temperature (K), T Is the process temperature (K) 1373K.

The gas phase synthesis apparatus according to the present invention is connected to the exhaust port of the reactor and installed outside the reactor, and includes a flow controller for controlling the flow rate of the reaction source gases and their reactants in the reactor. Therefore, the nano-sized catalyst metal particles formed by pyrolysis of the catalyst metal source gas in the low temperature region of the reactor are aggregated with each other while passing through the high temperature region where carbon nanotube or carbon nanofiber synthesis occurs to prevent the diameter of the catalyst metal particles from increasing. can do. Therefore, it is possible to synthesize carbon nanotubes or carbon nanofibers having a desired diameter, that is, a diameter of several tens of nm or less.

In addition, when further provided with an injector (nozzle or showerhead) for evenly injecting reaction source gases into the reactor, the catalyst metal source gas may be uniformly injected into the reactor. Therefore, the catalyst metal particles can be uniformly distributed in the reactor, thereby minimizing agglomeration between the catalyst metal particles, thereby increasing the effect of synthesizing carbon nanotubes or carbon nanofibers having a predetermined size.

Claims (13)

A supply of vaporized or sublimed catalytic metal source gas and vaporized carbon source gas; At the upper end, the catalyst metal source gas and the carbon source gas inlet supplied from the gas supply unit are provided at the lower end of the exhaust port of unreacted gases, and the catalytic metal source gas is thermally decomposed adjacent to the gas inlet side to form catalytic metal particles. And a high temperature region for forming carbon nanotubes or carbon nanofibers by thermal decomposition of the carbon source gas on the catalyst metal particles formed by pyrolysis in the low temperature region adjacent to the exhaust port. A vertical reactor including a collector for obtaining the synthesized carbon nanotubes or carbon nanofibers; And Carbon nanotubes or carbon nanofibers, which is connected to the exhaust port and installed outside the reactor, and includes a flow controller for controlling the flow rates of the source gases and their reactants in the reactor. Vapor phase synthesis device. According to claim 1, wherein the gas supply unit A vaporizer connected to a gas inlet of the reactor and for vaporizing the carbon source solution in which the catalytic metal source is dissolved; And A gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers, the carrier gas supply being connected to the vaporizer and supplying the catalytic metal source gas and the carbon source gas vaporized in the vaporizer to the reactor. . The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 2, wherein a sulfur-containing compound is further dissolved in the carbon source solution. The gas supply unit of claim 2, wherein the gas supply unit Hydrogen gas supply; Ammonia gas supply; And Further comprising an argon gas supply, The gas supply apparatus for synthesizing carbon nanotubes or carbon nanofibers, wherein the feeders are connected to the gas inlet of the reactor. The carbon nanotube of claim 1, further comprising an injector connected to the gas inlet and installed in the reactor to uniformly inject the carbon source gas and the catalytic metal source gas into the reactor. Or a gas phase synthesis apparatus for synthesizing carbon nanofibers. The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 5, wherein the injector is installed at a position corresponding to the low temperature region. The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 5, wherein the diameter ratio of the reactor and the diameter of the injector is 1: 0.05 to 1: 0.5. According to claim 1, The outer periphery of the vertical reactor is provided with a first heater for maintaining the low temperature region at a first temperature, and a second heater for maintaining the high temperature region at a second temperature, The low temperature region is maintained at a temperature of 150 ~ 450 ℃ by the first heater, the high temperature region is maintained at a temperature of 700 ~ 1250 ℃ by the second heater, carbon nanotubes or carbon nanofibers Gas phase synthesis apparatus for synthesis. The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 1, wherein the flow controller adjusts the source gases and their reactants to remain in the high temperature range of 0.1 to 5 seconds. The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 1, wherein the flow regulator is a fan or a vacuum pump. The method of claim 1, wherein the catalytic metal source is selected from the group consisting of Fe (CO) ₅ , Mo (CO) ₅ , Co ₂ (CO) ₈ , (C ₅ H ₅ ) ₂ Fe, and Ni (CO) ₅ . Vapor phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers, characterized in that the organic metal compound. The gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers according to claim 1, wherein the carbon source is any one selected from the group consisting of methane, ethylene, acetylene, cyclohexane, benzene, xylene, carbon monoxide and carbon dioxide. . A method for synthesizing carbon nanotubes or carbon nanofibers using the apparatus of claim 1.