KR100828718B1 - Apparatus for conversing gas using plasma and Method of gas conversion - Google Patents

Abstract

The present invention relates to a gas conversion device and a gas conversion method using plasma. The gas conversion device, the reaction chamber; A nozzle for injecting the source gas downward into the reaction chamber; A plasma generation unit rotatably installed in the reaction chamber and spaced apart from each other and having a positive electrode plate and a negative electrode plate; A power supply for supplying a positive electrode and a negative electrode to the positive electrode plate and the negative electrode plate, respectively; It includes a driving unit for rotating the plasma generating unit. In addition, the gas switching method, the electrode plate rotating step of rotating the positive electrode plate and the negative electrode plate at a predetermined speed through the drive unit; Applying electric power of a positive electrode and a negative electrode to the positive electrode plate and the negative electrode plate to induce plasma between the electrode plates; And a source gas injection step of converting the molecular structure of the gas by injecting the source gas downwardly between the positive electrode plate and the negative electrode plate through the nozzle to allow the source gas to pass through the plasma region.

According to the present invention as described above, since the electrode for inducing the plasma can rotate, the plasma region inside the reaction chamber is so wide that the gas conversion rate is high, and in particular, the rotational speed of the electrode can be adjusted, so that The contact time can be adjusted as needed to control conversion and selectivity of the reaction product.

Description

Apparatus for conversing gas using plasma and Method of gas conversion

1 is a configuration diagram schematically showing the configuration of a conventional gas switching device.

2 is a view illustrating a problem of the above-described conventional gas switching device.

3 is a block diagram showing the overall configuration of a gas conversion device using a plasma according to an embodiment of the present invention.

4 is a cutaway perspective view of a side wall of the reaction chamber illustrated in FIG. 3.

5 is a cutaway perspective view of a part of the electrode illustrated in FIG. 3.

FIG. 6 is a cutaway exploded perspective view illustrating the driving principle of the driving unit and the electrode shown in FIG. 3.

7 and 8 are perspective views illustrating another example of the electrode plate applicable to the gas switching device according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

12 gas conversion device 14 reaction chamber 14a top plate

16: Nozzle 18: Exhaust port 20: Negative electrode plate

22: positive electrode plate 24: power supply 26: power line

40: gas conversion device 42: reaction chamber 42a: top plate

42b: side wall 42c: bottom 44: nozzle

46: exhaust port 48: negative electrode plate 50: positive electrode plate

48a, 50a: Through hole 51: First guide rail 51a: Receiving groove

52: second guide rail 52a: receiving groove 54: support rod

54a: Insertion part 55: Fixing screw 56: Connector

58: electrode holder 58a: bolt hole 58b: fitting space

60: support rod 62: drive shaft 62a, 64a: pulley

64: motor 66: belt 68: heat exchanger

70: coolant pipe 72: insulation shield 72a: through hole

74a: Bolt 74b: Nut 76, 78: Electrode plate

A: Plasma area P: Plasma

The present invention relates to a gas conversion device and a gas conversion method using plasma.

There are many types of gas converters that transform the molecular structure of one gas (raw gas) and convert it into another (gas after reaction).

Most of these gas converters have a similar configuration and operating principle. In other words, the conventional gas switching device generates a plasma in a closed reaction chamber and injects a source gas into the plasma region to induce the source gas to collide with electrons of the plasma while passing through the plasma region, thereby decomposing molecules from the gas molecules. It has the principle of disengaging part.

For example, when methane gas (CH ₄ ) is introduced into the plasma region, the methane molecules collide with the high-energy electrons of the plasma, and hydrogen is eliminated from the methane molecules. Thus, radicals such as methyl group (CH ₃ ) and methylene (CH ₂ ) Is formed. The radicals remain in this state when the energy supply is interrupted, and in some cases, they become ethane (C ₂ H ₆ ) through a recombination reaction. However, if the energy supply is continued, the dehydrogenation is continuously performed, and the methyl group (CH ₃ ) radicals are changed into methylene (CH ₂ ) or methylidine (CH) radicals.

In addition, the CHx radicals obtained as described above may form C ₂ hydrocarbons such as ethane, ethylene or acetylene through a predetermined bonding process.

A conventional gas switching device for applying plasma energy to a gas using the above principle is shown in FIG.

Referring to FIG. 1, the conventional gas switching device 12 includes a reaction chamber 14 having a closed inner space and having an exhaust port 18 at a lower side thereof, and installed inside the reaction chamber 14. To supply a plurality of negative electrode plates 20 and a plurality of positive electrode plates 22 respectively corresponding to the negative electrode plates 20 and the negative electrode plates 20 and the positive electrode plates 22, respectively. One power source 24 is included.

In addition, a nozzle 16 is provided at the center of the upper plate 14a of the reaction chamber 14. The nozzle 16 is used to inject a gas (hereinafter, referred to as a raw material gas) for converting by applying energy downward between the negative electrode plate 20 and the positive electrode plate 22 inside the reaction chamber 14.

The negative electrode plate 20 and the positive electrode plate 22 take the form of a plate having a predetermined thickness and are fixed vertically through separate supporting means (not shown). In particular, the opposing surfaces of the negative electrode plate 20 and the positive electrode plate 22 are curved in a direction away from each other as they go down.

In any case, when electricity is applied to the electrode plates 20 and 22 fixed as described above, an arc is generated between the electrode plates and plasma is formed. The plasma is located between opposite surfaces of the negative electrode plate 20 and the positive electrode plate 22.

Figure 2 is a view showing a state from above the electrode plate in the conventional gas switching device.

As shown in the drawing, three negative electrode plates 20 and three positive electrode plates 22 are provided in the reaction chamber 14. The negative electrode plate 20 and the positive electrode plate 22 correspond to one to one and form a pair.

On the other hand, when electricity is applied to the electrode plates 20 and 22 having the above-described arrangement structure, plasma is induced between each of the negative electrode plates 20 and the positive electrode plates 22 and the plasma region A is formed. In the case of three pairs of electrode plates, three plasma regions A are formed.

However, the conventional gas switching device 12 has a problem that the conversion rate of the gas is not good because the plasma region A is not wide enough. That is, since the area A occupied by the induced plasma is very narrow compared to the total volume of the reaction chamber, a large amount of source gas supplied into the reaction chamber 14 does not react with the plasma (for example, between the electrodes). Out) and is discharged through the exhaust port 18 as it is, and that is inefficient.

In addition, since the plasma region A is narrow as described above, the time for the source gas injected from the nozzle to pass through the plasma region is also very short. In order to solve such a problem, that is, to control the amount of input gas or to control the ejection speed to prolong the residence time of the source gas in the plasma region as much as possible, this also has little effect on increasing the conversion rate.

Referring to a paper published in relation to the fixed electrode type gas switching device, when the plasma region A is formed to the maximum and the ejection amount and the ejection rate of the source gas are optimally controlled, a conversion rate of up to 40% is obtained. Have a report. 60% of the source gas is discharged to the outside through the exhaust port 18 without reacting with the plasma.

In addition, the fixed electrode type gas switching device has a problem that it is very difficult to control the gas conversion rate. In fact, it is necessary to increase or decrease the conversion rate according to the type of the target object (gas after conversion), and the conventional gas conversion device can only control the conversion rate by changing the flow rate or flow rate of the source gas. Its poor responsiveness makes it nearly impossible to control accurately.

The present invention has been made to solve the above problems, and since the electrode for inducing plasma can rotate, the plasma region inside the reaction chamber is so wide that the gas conversion rate is high, and in particular, the rotational speed of the electrode can be adjusted. It is an object of the present invention to provide a gas converting apparatus and a gas converting method using a plasma capable of controlling the conversion rate as well as the selectivity of the reaction product by adjusting the contact time of the gas and the plasma as necessary.

Gas conversion device using the plasma of the present invention for achieving the above object, the reaction chamber provides a closed inner space and the exhaust port is provided on one side; A nozzle installed at an upper portion of the reaction chamber and injecting a source gas supplied from the outside into the reaction chamber; Plasma is rotatably installed in the reaction chamber, spaced apart from each other, symmetrical about a rotation center axis, and a plasma generation having a positive electrode plate and a negative electrode plate disposed so that the rotation center axis is positioned vertically below the nozzle. Wealth; By supplying positive and negative electrodes to the positive electrode plate and the negative electrode plate, respectively, and inducing a plasma therebetween, the source gas which is injected downward through the nozzle and passes between the positive electrode plate and the negative electrode plate receives energy from the plasma and is converted ( a power supply for conversion; And a driving unit configured to rotate the positive electrode plate and the negative electrode plate of the plasma generation unit based on the rotation center axis to revolve around the rotation center axis in a state where the positive electrode plate and the negative electrode plate are spaced apart from each other.
In addition, the positive electrode plate and the negative electrode plate is symmetrical about the center of rotation, the distance between the positive electrode plate and the negative electrode plate, characterized in that the interval between the lower end of the electrode plate is larger than the interval between the upper end.

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In addition, the lower portion of the plasma generating unit is further characterized in that the heat exchanger is injected into the reaction chamber through the nozzle to control the temperature of the gas passing through the plasma generating unit.

In addition, the driving unit; And an insulating support rod fixedly supporting the positive electrode plate and the negative electrode plate in a spaced apart state, a shaft fixed to the center of the support rod and extending out of the reaction chamber, and a motor for axially rotating the shaft. .

In addition, the reaction chamber takes the form of a cylinder, the inner wall surface of the conductive first guide rail for supporting the positive electrode plate and guides the rotational movement, and the conductive second guide rail for supporting the negative electrode plate and guides the rotational movement Is provided, the first and second guide rails are characterized in that it is electrically connected to the power source through a power line to transfer electricity to each electrode plate.

In addition, between the positive electrode plate and the first guide rail, a supporting rod extending to the first guide rail while being fixed to the positive electrode plate and having an extended end guided in contact with the first guide rail is provided. Between the second guide rail, it is characterized in that the support rod which is extended to the second guide rail fixed to the negative electrode plate, the extension end of which is guided in contact with the second guide rail.

In addition, the first and second guide rails have a shape of a ring having a predetermined cross section and have receiving grooves parallel to each other and open toward the center of the reaction chamber on the inward surfaces thereof, It is characterized in that the insertion portion is inserted into the receiving groove and makes an electrical connection to the inner peripheral surface of the receiving groove.

In addition, the gas conversion method of the present invention for achieving the above object, provides a sealed inner space and one side of the reaction chamber is provided with an exhaust port, the reaction gas is installed on top of the reaction chamber and supplied from the outside A nozzle which is sprayed downward into the chamber and rotatably installed in the reaction chamber, spaced apart from each other, symmetrical about a center of rotation axis, and a positive electrode disposed such that the center of rotation is located vertically below the nozzle A plasma generating unit including a plate and a negative electrode plate, a power source for supplying a positive electrode and a negative electrode to the positive electrode plate and the negative electrode plate, respectively, to induce plasma between the positive electrode plate and the negative electrode plate, and the positive electrode plate of the plasma generating unit; Rotate the negative electrode plate about the center of rotation axis to rotate the center of the axis with the positive electrode plate and the negative electrode plate spaced apart It is for converting the raw material gas supplied from the outside by using a gas conversion device including a drive unit to be idle as a reference,
An electrode plate rotating step of revolving the positive electrode plate and the negative electrode plate at a predetermined speed about the rotation center axis through the driving unit; Applying electric power of an anode and a cathode to the positive electrode plate and the negative electrode plate to induce a plasma between the electrode plates; and spraying the source gas downward between the positive electrode plate and the negative electrode plate through the nozzles, and thus the source gas forms a plasma region. It characterized in that it comprises a source gas injection step of converting the molecular structure of the gas by passing through.

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Hereinafter, one embodiment according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a block diagram showing the overall configuration of a gas conversion device using a plasma according to an embodiment of the present invention.

Referring to the drawings, the gas switching device 40 according to the present embodiment, the reaction chamber 42 to provide a cylindrical inner space, and the negative electrode plate 48 rotatably installed in the reaction chamber 42 And a positive electrode plate 50, a heat exchanger 68 installed below the electrode plates 48 and 50, and cooling the gas after the reaction, and a first guide to guide the rotational movement of the electrode plates 48 and 50. And two guide rails 51 and 52, a power source 24 for applying electricity to the electrode plates 48 and 50, and a nozzle 44 for injecting raw material gas into the reaction chamber 42. do.

First, the reaction chamber 42 includes a side wall 42b having a cylindrical shape, and an upper plate 42a and a lower plate 42c that are hermetically fixed to upper and lower portions of the side wall 42b.

In addition, an exhaust port 46 is provided below the side wall 42b. The exhaust port 46 is a passage through which gas injected into the reaction chamber 42 is discharged to the outside. In addition, a nozzle 44 is provided at the center of the upper plate 42a. The nozzle 44 serves to inject the raw material gas provided from the outside into the reaction chamber 42 (more precisely, the space between the positive electrode plate 50 and the negative electrode plate 48).

In particular, the reaction chamber 42 is made of a non-conductive material including ceramic, synthetic resin, and the like.

Meanwhile, as shown in FIG. 4, the first and second guide rails 51 and 52 have their respective negative electrode plates 48 and the positive electrode plates 50 fixed in parallel to the inner circumferential surface of the side wall 42b. Support and guide its rotation.

In addition, the first and second guide rails 51 and 52 have the same cross-sectional shape in the circumferential direction, and receiving grooves 51a and 52a are formed on the inward surface thereof. The accommodating grooves 51a and 52a are opened to the inside of the reaction chamber 42 as a groove for accommodating and supporting the insertion portion 54a, which is an extended end of the supporting rod 54, which will be described later.

In particular, the first and second guide rails 51 and 52 are electrically connected to the external power line 26 through the respective connectors 56. Each of the connectors 56 is a conductive member, one end of which is connected to the first and second guide rails 51 and 52, respectively, and extends outside the reaction chamber 42 to be connected to the power line 26. Therefore, the electricity of the power source 24 can be supplied to the first guide rail 51 and the second guide rail 52 through the power line 26 and each connector 56.

In addition, the negative electrode plate 48 and the positive electrode plate 50 supported by the first and second guide rails 51 and 52 are spaced apart from each other in a vertically standing state as a plate member having a predetermined thickness. In particular, the opposing surfaces of the negative electrode plate 48 and the positive electrode plate 50 are curved in a direction away from the lower side.

In this way, the gap D2 at the lower end portion is larger than the gap D1 at the upper end portions of the electrode plates 48 and 50. A strong arc is generated at the upper end portions of the electrode plates 48 and 50, and the thermal plasma having the same electron temperature and ion temperature ( The thermal plasma is generated, and at the lower end, the electron temperature is maintained, but the ion temperature is rapidly cooled, so that a nonthermal plasma is generated. In addition, it is possible to minimize the flow resistance of the gas flowing downward by bending the electrode facing surface.

The material used as the electrode should have good electrical conductivity and abrasion resistance, such as tantalum, molybdenum or tungsten.

In addition, the support rod 54 is fixed to the outside of the upper end of the negative electrode plate 48. The support rod 54 is a connector for electrically connecting the first guide rail 51 and the negative electrode plate 48, and is horizontally extended in the state fixed to the negative electrode plate 48 through the fixing screw 55 to the front end thereof. Is accommodated and supported in the receiving groove 51a of the first guide rail 51. (See Figure 5)

In particular, the insertion portion 54a at the tip of the support rod 54 is slidable along the longitudinal direction of the first guide rail 51 in a state accommodated in the receiving groove 51a, and at the same time, electricity is transferred from the first guide rail 51. Can be delivered. To this end, it is preferable to include a conductive lubricant on the inner peripheral surface of the receiving groove (51a).

Like the negative electrode plate 48, the support rod 54 is horizontally fixed to the outer side of the positive electrode plate 50. The support rod 54 extends toward the second guide rail 52 and is inserted into the receiving groove 52a. The insertion portion 54a, which is the extended end of the support rod 54, is electrically connected to the guide rail 52 in a state of being fitted into the receiving groove 52a. In addition, a conductive lubricant may be included on the inner circumferential surface of the accommodating groove 52a.

Meanwhile, the electrode plates 48 and 50 are rotatably supported in a vertically fixed state, and are fixed to a support rod 60 having a holder 58 at both ends thereof, and a center of the support rod 60. A drive shaft 62 extending out of the reaction chamber 42 and a motor 64 for axially rotating the drive shaft 62 are provided.

As shown in FIG. 6, the supporting rod 60 is flat like a wing of an airplane, and both edge portions thereof are horizontal bars formed in a streamlined shape. The flattening of the support rod 60 in this manner and the two side edge portions formed in a streamlined shape are to prevent vortices during rotation as much as possible.

As shown in FIG. 6, the holder 58 provided at both ends of the support rod 60 is a member having a cross-sectional shape of approximately c-shaped, and accommodates and fixes lower ends of the electrode plates 48 and 50 in its inner region. do. As a result, each of the electrode plates 48 and 50 is supported by the respective holders 58 and the guide rails 51 and 52 and guided to the guide rails 51 and 52 in a vertically standby state and is rotatable.

The drive shaft 62 for rotating the support rod 60 extends outside the reaction chamber 42 through the lower plate 42c as a conventional electric shaft. A bearing is provided between the lower plate 42c and the drive shaft 62, and a separate sealing device (not shown) is added.

The drive shaft 62 and the motor 64 are powered by a belt 66. Of course, the pulleys 62a and 64a are fixed to the drive shaft 62 and the drive shaft of the motor so that the belt 66 can be fastened.

In addition, the heat exchanger 68 is installed below the support rod 60 to adjust the temperature of the gas passing downward through the plasma region induced between the electrode plates (48, 50). To this end, a coolant pipe 70 for passing coolant through the heat exchanger 68 is provided. The coolant pipe 70 circulates the coolant through the heat exchanger 68 and extends outside the reaction chamber 42. Of course, a pump must be added to the coolant pipe 70.

4 is a cutaway perspective view of the side wall and the rail of the reaction chamber shown in FIG. 3 separately.

As shown, the side wall 42b has a cylindrical shape and has a first guide rail 51 and a second guide rail 52 on its inner circumferential surface. As described above, the first guide rail 51 and the second guide rail 52 are parallel to each other and have receiving grooves 51a and 52a on their respective inward faces, so that the insertion portion of the support rod 54 is formed ( 54a).

In particular, the inlet portion of the receiving groove (51a, 52a) takes a slightly concave form. That is, the gap z2 of the inlet portion is slightly smaller than the maximum inner diameter z1 in the accommodating grooves 51a and 52a, so that the insertion portion 54a can be confined therein. Of course, it is possible to pull out by applying a force to the support rod 54 from the receiving groove (51a, 52a). In this way, the gap between the inlets is narrow, so that the support rods 54 are inserted into the first and second guide rails 51 and 52 through an interference fitting method.

However, the type of receiving groove formed in the support rail or the way of fitting the support rod can be changed as long as the rail can support the electrode plate.

5 is a cutaway perspective view of a part of the electrode illustrated in FIG. 3.

As shown, it can be seen that the support rod 54 is fixed through the fixing screw 55 in a state of being fitted to the outer edge portion of the electrode plate (48, 50). The support rod 54 is made of a conductive metal and is mounted with a fixing screw 55 so that it can be easily replaced when worn.

In particular, the support rod 54 should have a weaker wear resistance than the first guide rail 51 or the second guide rail 52. This is to prevent the wear of the guide rails (51, 52) during friction between the guide rails (51, 52) and the support rod (54).

FIG. 6 is an exploded perspective view illustrating the driving principle and the fixing principle of the electrode shown in FIG. 3.

Referring to the drawings, it can be seen that the support rod 60 is fixed to the upper end of the drive shaft 62. The drive shaft 62 is fixed to the center of the support rod 60 and rotates the support rod 60 as if the stirring blade is turned. The drive shaft 62 or the support rod 60 is preferably made of a non-conductor.

In particular, as described above, since the support rod 60 is flat and the edge lines at both sides are streamlined, the supporting rod 60 does not interfere with the downward flow of the gas moving downward without generating vortices in the reaction chamber 42 during rotation.

The electrode holder 58 provided at both ends of the support rod 60 is a rigid member having a fitting space 58b therein and accommodates and fixes lower ends of the electrode plates 48 and 50. In addition, an insulating shield 72 is fitted between the electrode plates 48 and 50 and the inner wall surface of the electrode holder 58.

The insulating shield 72 is a member made of rubber or synthetic resin to cover the lower ends of the electrode plates 48 and 50 to insulate the electrode plates 48 and 50 from the electrode holder 58. However, when any one of the electrode holder 58, the support rod 60 or the drive shaft 62 is made of a non-conductor, the insulating shield 72 is unnecessary.

In any case, in order to fix the electrode plates 48 and 50 to the electrode holder 58, a bolt hole 58a is formed in the electrode holder 58, and through holes (holes) are formed in the insulating shield 72 and the electrode plate, respectively. 72a, 48a, and 50a are formed. Therefore, the lower end portions of the electrode plates 48 and 50 are inserted into the electrode holder 58, and after fitting the holes, passing the bolt 74a and tightening the nut 74b from the opposite side, the electrode plate for each electrode holder 58 The installation of is complete.

7 and 8 are perspective views illustrating another example of the electrode plate applicable to the gas switching device according to an embodiment of the present invention.

As shown in FIGS. 7 and 8, the electrode plates 76 and 78 are vertically erect, and the gaps between the lower ends are wider than the gaps between the upper ends.

The wider gap at the lower end than the gap at the upper end of the electrode plates 76 and 78 as described above causes thermal plasma to occur at the upper end of the electrode plates 76 and 78 and the nonthermal plasma at the lower end. plasma). In this embodiment, the type of electrode plate can be changed as many as possible.

Operation of the gas switching device according to the present embodiment configured as described above is made as follows.

First, the motor 64 is driven to rotate the electrode plates 48 and 50 through the drive shaft 62. At this time, each of the electrode plates 48 and 50 is in a state of being connected to the power supply through the support rods 54, the guide rails 51 and 52, the connector 56, and the power line 26, respectively. The rotational speed of the drive shaft 62 may vary depending on the need and may be rotated at, for example, about 350 RPM.

In addition, as described above, since the negative electrode plate 48 and the positive electrode plate 50 are spaced apart from each other, and the center of rotation thereof is located vertically below the nozzle 44, when the source gas is injected downward through the nozzle 44, The source gas flows in between the negative electrode plate 48 and the positive electrode plate 50 along the arrow s direction.

The electrode plates 48 and 50 are rotated and the power source 24 is operated to apply the cathode electric to the negative electrode plate 48 and the positive electrode to the positive electrode plate 50. When electricity is applied as described above, the plasma P is induced between the negative electrode plate 48 and the positive electrode plate 50, and the plasma P forms a plasma region through which source gas passes.

In particular, since the electrode plates 48 and 50 are rotating, the plasma region takes the form of a cone (concave inclined surface thereof). The conical space is a space partitioned between the electrode plates when the electrode plate is rotated at a high speed.

In the case of the conventional gas switching device (12 of FIG. 1), since the plasma region is limited to only the space between the negative electrode plate 20 and the positive electrode plate 22, most of the supplied source gas flows out of the plasma region and is discharged to the outside. In this embodiment, since the plasma region is so wide (by the rotation of the electrode plates 48 and 50), the source gas moving in the arrow s direction almost passes through the plasma region.

On the other hand, the average plasma density inside the (conical) plasma region is related to the rotation speeds of the electrode plates 48 and 50. Increasing the rotational speed of the electrode plates 48, 50 increases the average plasma density inside the plasma region, and decreasing the rotational speed decreases the plasma density.

Increasing the plasma density means that the source gas passing through the plasma region has a greater chance of contact with the plasma, which means that the total contact time for the gas destined for the exhaust port 46 to come into contact with the plasma becomes longer.

As is known, in the reaction of the source gas, the product after the reaction depends on the contact time between the source gas and the plasma. This means that adjusting the reaction time changes the composition of the reaction product. For example, if methane stays in the plasma region, it is completely decomposed into carbon particles and hydrogen (H2).

As a result, the reaction time of the source gas to the plasma can be controlled by adjusting the rotational speeds of the electrode plates 48 and 50 as described above, thereby obtaining a reaction product having a desired composition.

The reaction product obtained through the above process is cooled through the heat exchanger 68, stabilized, and then discharged to the outside through the exhaust port 46.

As mentioned above, although this invention was demonstrated in detail through the specific Example, this invention is not limited to the said Example, A various deformation | transformation is possible for a person with ordinary knowledge within the scope of the technical idea of this invention.

According to the present invention as described above, since the electrode for inducing the plasma can rotate, the plasma region inside the reaction chamber is so wide that the gas conversion rate is high, and in particular, the rotational speed of the electrode can be adjusted, so that The contact time can be adjusted as needed to control conversion and selectivity of the reaction product.

Claims (8)

A reaction chamber that provides a sealed interior space and has an exhaust port at one side thereof; A nozzle installed at an upper portion of the reaction chamber and injecting a source gas supplied from the outside into the reaction chamber; Plasma is rotatably installed in the reaction chamber, spaced apart from each other, symmetrical about a rotation center axis, and a plasma generation having a positive electrode plate and a negative electrode plate disposed so that the rotation center axis is positioned vertically below the nozzle. Wealth; By supplying positive and negative electrodes to the positive electrode plate and the negative electrode plate, respectively, and inducing a plasma therebetween, the source gas which is injected downward through the nozzle and passes between the positive electrode plate and the negative electrode plate receives energy from the plasma and is converted ( a power supply for conversion; The plasma generating unit includes a driving unit for rotating the positive electrode plate and the negative electrode plate based on the rotation center axis so as to revolve around the rotation center axis in a state where the positive electrode plate and the negative electrode plate are spaced apart from each other. Switching device. The method of claim 1, The positive electrode plate and the negative electrode plate are symmetric about the rotation center axis, The distance between the positive electrode plate and the negative electrode plate, the gas switching device using a plasma, characterized in that the interval between the lower end of the electrode plate is larger than the interval between the upper end. The method of claim 1, The lower portion of the plasma generating unit is a gas switching device using a plasma, characterized in that the heat exchanger which is injected into the reaction chamber through the nozzle to control the temperature of the gas passing through the plasma generating unit. The method of claim 1, The driving unit; An insulating support rod for fixing and supporting the positive electrode plate and the negative electrode plate in a spaced state; A shaft fixed to the center of the support rod and extending out of the reaction chamber; Gas conversion device using a plasma, characterized in that it comprises a motor for rotating the shaft. The method according to any one of claims 1 to 4, The reaction chamber takes the form of a cylinder, and the inner wall has a conductive first guide rail supporting the positive electrode plate and guiding a rotational movement, and a conductive second guide rail supporting the negative electrode plate and guiding the rotational movement. Become, And the first and second guide rails are electrically connected to the power source through a power line so as to transfer electricity to each electrode plate. The method of claim 5, Between the positive electrode plate and the first guide rail, a support rod extending to the first guide rail while being fixed to the positive electrode plate, the extended end of which is guided in contact with the first guide rail, Between the negative electrode plate and the second guide rail, a support rod which is extended to the second guide rail fixed to the negative electrode plate and whose extended end is guided in contact with the second guide rail is mounted. Gas switching device. The method of claim 6, The first and second guide rails take the form of a ring having a predetermined cross-section, and have parallel accommodating grooves and receiving grooves open inwardly toward the center of the reaction chamber. An extension end of each of the supporting rods is inserted into the receiving groove and the insertion portion which is electrically connected to the inner peripheral surface of the receiving groove, characterized in that the gas switching device using a plasma. A reaction chamber provided with an exhaust port at one side thereof, a nozzle configured to downwardly inject a raw material gas supplied from the outside and supplied from the outside into the reaction chamber, and a inside of the reaction chamber; A plasma generating unit having a positive electrode plate and a negative electrode plate which are rotatably spaced apart from each other, symmetric about a rotation center axis, and the rotation center axis is disposed below the vertical of the nozzle, and the positive electrode plate and A positive electrode and a negative electrode are respectively supplied to the negative electrode plate to induce a plasma between the positive electrode plate and the negative electrode plate, and the positive electrode plate and the negative electrode plate are rotated about the center of rotation of the positive electrode plate and the negative electrode plate of the plasma generating unit. Gas conversion field comprising a drive unit for revolving relative to the center of rotation in a spaced state To convert the source gas supplied from the outside using the An electrode plate rotating step of revolving the positive electrode plate and the negative electrode plate at a predetermined speed about the rotation center axis through the driving unit; Applying electric power of a positive electrode and a negative electrode to the positive electrode plate and the negative electrode plate to induce plasma between the electrode plates; And a source gas injection step of converting the molecular structure of the gas by spraying the source gas downward between the positive electrode plate and the negative electrode plate through the nozzle to allow the source gas to pass through the plasma region. .

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