KR100820776B1 - Apparatus for analysis of nanoparticles in aqueous solution by using probe beam detection of laser-induced shock wave and thereon method - Google Patents

Abstract

An apparatus for measuring nanoparticles in an aqueous solution is provided to measure laser-induced breakdown of nanoparticles contained in an aqueous solution using a probe beam. An apparatus for measuring nanoparticles in an aqueous solution comprises a laser generating unit(10), a glove box(30), a probe beam generating unit(50) and a measuring unit(70). The laser generating unit includes a laser generating device(11), a diaphragm(13), a linear polarizing plate(14), a beam splitter(15) and a mirror(17). The glove box includes a first optical window(31), a sample cell(33), a lens(34), and second and third optical windows(35,36). The probe beam generating unit is located in one side of the glove box and includes a probe beam generating device(51) and a light diode(53). The measuring unit is connected to the light diode of the probe beam generating unit and includes a boxcar averager(71) and a computer(73).

Description

Apparatus for analysis of nanoparticles in aqueous solution by using probe beam detection of laser-induced shock wave and thereon method}

1 is a block diagram schematically showing an apparatus for measuring nanoparticles in an aqueous solution using probe beam detection of a laser induced shock wave according to the present invention;

2 is a flow chart showing a method for measuring nanoparticles according to the apparatus for measuring nanoparticles in an aqueous solution using probe beam detection of a laser induced shock wave according to the present invention;

3 is a view schematically showing the waveform of the laser induced shock wave measured using the probe beam of the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention,

4 is a view showing the frequency distribution of the probe beam signal intensity of the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention,

5 is a view schematically showing an embodiment in which the particle size is measured using the peak value of the probe beam intensity by the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention;

6 is a view schematically showing an embodiment in which the concentration of particles is measured using the burst probability of the laser induced shock wave according to the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention.

<Explanation of symbols for the main parts of the drawings>

1: Measurement apparatus of nanoparticles in aqueous solution using probe beam detection of laser induced shock wave,

10: laser generator, 11: laser generator,

13: optical aperture, 14: linear polarizing plate,

14a: first linear polarizer plate, 14b: second linear polarizer plate,

15: beam splitter, 17: mirror,

17a: first mirror, 17b: second mirror,

19: energy meter, 30: glove box,

31: first optical window, 33: sample cell,

34 lens, 35 second optical window,

36: third optical window, 37: beam block,

50: probe beam generator, 51: probe beam generator,

53: photodiode, 54: third mirror,

55: notch filter, 56: fine needle hole device,

56a: needle hole, 58: amplifier,

59: oscilloscope, 70: measuring unit,

71: Boxcar Averaging, 73: Computer.

The present invention relates to an apparatus for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser-guided shock wave and a method for measuring the same. More specifically, laser-induced breakdown of fine nanoparticles present in an extremely small amount in an aqueous solution. The probe beam signal is used to measure the phenomenon. When the laser induced rupture occurs, the path of the probe beam is changed by the laser shock wave, but the size of the nanoparticles can be determined by measuring the intensity distribution of the signal of the probe beam. In addition, it is possible to measure the concentration of nanoparticles using the breakdown probability measured by the probe beam, and to measure the size and concentration of nanoparticles in a non-contact, real-time and remote manner. Hazardous Samples are more easily applicable, and the sensitivity of the laser-guided shock wave can improve the reliability of the device because the measurement sensitivity is significantly higher than that of the turbidimeter and particle size analyzer of the general Light Scattering intensity measurement method. The present invention relates to an apparatus for measuring nanoparticles in an aqueous solution using detection and a method for measuring the same.

In general, a substance is evenly dispersed in a liquid in a molecular or ionic state, called a solution. In such a solution, fine particles larger than ordinary molecules or ions and having a diameter of about 1 nm to 1000 nm are aggregated or dispersed without being precipitated. The state of being called a colloidal state, these colloidal state is called a colloid (Colloid).

In order to measure colloidal nanoparticles in an aqueous solution, a continuous wave laser beam is incident on a sample, and a method of measuring the intensity of light scattered from the particle by the incident laser beam is generally used. Technology.

Meanwhile, most of the turbidimeters and particle size analyzers that are commercially available among the turbidimeters for measuring the turbidity of aqueous solutions and the particle size analyzers for analyzing the particle sizes adopt the light scattering intensity measurement method described above. In addition, a device for measuring the dynamic light scattering intensity of the particles in the brown motion in the aqueous solution is the most widely used.

However, in most commercial devices for measuring light scattering intensity in aqueous solution, the smaller the size of the nanoparticles, the weaker the intensity of the scattered light is. Therefore, when the size of the nanoparticles is small, a large number of nanoparticles is relatively large. The measurement of nanoparticles is possible only in limited conditions where the particles can contribute to scattering.

Therefore, when measuring fine nanoparticles in the ppt-ppb concentration range through a commercially available light scattering device such as a turbidimeter and a particle size analyzer as described above, the nanoparticles are measured using a device having better measurement sensitivity. It should be measured.

In order to improve the problems described above, "Laser-induced breakdown detection method (LIBD, Laser-Induced Breakdown Detection, US Patent 5316983, 1994)" was developed in Japan and Germany.

Here, the laser-induced rupture detection method is a technique that uses the principle of the laser-induced plasma (Laser-Induced Plasma) generated in the focal region of the lens is incident a pulsed laser beam having a time width of several nanoseconds through the lens.

In this case, since the energy of the laser beam required to generate the laser-induced plasma is increased in the order of solid, liquid, and gas, when the appropriate laser beam energy is used, only the solid particles in the aqueous solution may be ruptured to make the laser-induced plasma state.

In this fixed laser beam energy condition, nanoparticles are exploited using the characteristics that the probability of rupture varies depending on the concentration of particles and the threshold energy of the laser beam required for rupture depending on the particle size. The concentration and size of can be analyzed.

On the other hand, the detection limits for the concentration and size of the nanoparticles appear to be on the order of tens of ppt and several nm, respectively.

As a laser induced burst detection method currently used, there are two methods of measuring a laser induced shock wave using a piezoelectric element and a method of measuring glare during laser induced plasma generation using a CCD camera or an optical multiplier. That is, a method of measuring a laser-induced shock wave accompanying a laser-induced plasma by using a piezoelectric transducer and using a CCD (Change Coupled Device) camera or a photomultiplier tube Therefore, it is divided into a method of measuring flash when a laser induced plasma is generated.

The method of measuring the laser induced shock wave and the method of measuring the glare when the induced plasma is generated can precisely measure the breakdown probability and the threshold energy. However, when using a piezoelectric element, It is inconvenient to measure the shock wave by attaching directly, and when using a CCD camera or an optical tube, it is necessary to install a high magnification lens system in a position close to the sample cell in order to record flashes in a limited size camera pixel. In terms of work and installation is cumbersome.

For example, when using a sample containing elements and ultra clean water harmful to the human body, including radioactive materials, the piezoelectric element is directly attached to the sample cell or the sample cell must be placed and installed in a special environment isolated from the surrounding atmosphere. It is not only easy to install various measuring devices having a predetermined volume and a predetermined space in a proximate position, but also has a problem of being cumbersome and inconvenient.

Therefore, there is an urgent need to develop a nanoparticle measuring apparatus that has an excellent measurement sensitivity and can be remotely measured to detect trace nanoparticles having a concentration of several tens of ppt in an aqueous solution.

The present invention is to solve the problems described above, characterized in that it can be measured by using a probe beam (Probe Beam) in the laser induced rupture phenomenon of the micro-nanoparticles present in a very small amount in the aqueous solution, laser induced rupture phenomenon The path of the probe beam is changed by the laser shock wave when it occurs, but the size of the nanoparticles can be determined by measuring the intensity distribution of the signal of the probe beam. Breakdown probability measured by beam can be used to measure the concentration of nanoparticles, and to measure the size and concentration of nanoparticles in non-contact, real-time and remotely, which can be applied to harmful samples such as radioactive materials. It is more easily applicable, and the measurement sensitivity is higher than that of general turbidimeter and particle size analyzer of light scattering intensity measurement method. It is an object of the present invention to provide an apparatus for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser-guided shock wave which can significantly improve the reliability of the apparatus, and a method for measuring the same.

In order to achieve the above object, the present invention, a laser generator for forming a plasma, an optical diaphragm (Diaphragm) for adjusting the diameter of the laser beam emitted through the laser generator, and the optical A linear polarizer for adjusting the energy and polarization of the laser beam passing through the iris, a beam splitter for transmitting and reflecting the controlled laser beam passing through the linear polarizer, and the path of the laser beam passing through the beam splitter A laser generation unit including a mirror for; The first optical window formed at the center of one side in order to enter the laser beam reflected through the mirror of the laser generating unit, and aligned in a straight line to the first optical window, the nano made of a radioactive material or harmful elements A sample cell in which a particle sample is installed, between the sample cell and the first optical window, a lens having a center of focus positioned at the center of the sample cell, and positioned at both centers of both sides thereof; A glove box including second and third optical windows positioned in a straight line; A probe beam generator positioned at one side of the glove box and configured to emit a probe beam, and a probe beam emitted from the probe beam generator to measure the probe beam passing through the second optical window and the third optical window A probe beam generation unit including a photodiode for; And a box car averager connected to the photodiode of the probe beam generator and configured to adjust a delay time and a width of the probe beam detected through the photodiode, and a probe beam connected to the box car averager. A measuring unit including a computer for processing the intensity of the data; Characterized in that consisting of a configuration including a.

Here, the laser beam emitted through the laser generator is a green wavelength of 532 nm of Nd: YAG laser having a pulse width of about 6 nanoseconds.

The linear polarizer is positioned on one side of the optical aperture and is rotatable to adjust the energy of the laser beam, and the linear polarizer is positioned on one side of the first linear polarizer and polarized perpendicular to the bottom surface. And a second linear polarizer for passing only the laser beam of components.

In addition, the beam splitter is inclined at a predetermined angle and reflects about 4% of the adjusted laser beam energy passing through the linear polarizer.

On the other hand, one side of the beam splitter is provided with an energy meter for measuring the energy of the laser beam reflected through the beam splitter.

Here, the mirror is configured to include a first mirror and a second mirror installed at an inclined angle so as to be able to adjust the path of the incident laser beam in left, right, up and down directions.

In addition, a beam block for blocking the laser beam passing through the sample cell is provided on one side of the sample cell in the glove box.

And, it can be applied when the size of the nanoparticles present in the sample cell is formed in the range of about 5 ~ 200nm.

In addition, it can be applied when the concentration of the nanoparticles present in the sample cell is formed in the range of less than 1ppm.

Meanwhile, the probe beam emitted from the probe beam generator of the probe beam generator is a He-Ne laser system including a He-Ne laser beam.

In this case, a third mirror for adjusting the path of the probe beam is provided at one side of the probe beam generator of the probe beam generator.

A notch filter is installed between the photodiode of the probe beam generator and the third optical window to prevent the laser beam emitted through the laser generator from being scattered in the sample cell and detected by the photodiode.

In addition, a fine needle hole device is installed between the notch filter and the photo diode to finely measure the change in intensity of the probe beam incident on the photo diode.

In addition, an amplifier for electrically amplifying the probe beam signal detected and measured by the photodiode is connected to one side of the photodiode.

An oscilloscope for measuring the waveform of the laser induced shock wave detected by the photodiode and then amplified by the amplifier is connected to one side of the amplifier.

On the other hand, laser generation including a laser generating device, an optical diaphragm, a linear polarizing plate comprising a first linear polarizing plate and a second linear polarizing plate, a beam splitter, an energy meter, and a mirror consisting of a first mirror and a second mirror part; A glove box comprising a first optical window, a sample cell, a lens, second and third optical windows, and a beam block; A probe beam generator including a probe beam generator, a photodiode, a third mirror, a notch filter, a fine needle hole device having a needle hole, an amplifier, and an oscilloscope; And a measuring unit including a box car average and a computer; Claims [1] A method for measuring a nanoparticle in an aqueous solution using a probe beam detection of a laser guided shock wave, the method comprising: generating and emitting a laser beam at a laser generator of the laser generator; Injecting a laser beam emitted by the laser generator into a sample cell in a glove box; Generating a laser induced plasma in the center of the sample cell; Generating and releasing a probe beam from the probe beam generator in the probe beam generator; Injecting a probe beam emitted by the probe beam generator into a sample cell in a glove box; Changing the path of the probe beam penetrating the sample cell due to a change in the refractive index of the medium by the laser induced plasma generated in the sample cell; The probe beam passing through the sample cell is incident to a photodiode outside the glove box; Providing a measurement value of the probe beam measured by the photodiode to a boxcar averager to adjust delay time and width of the probe beam measurement value; And collecting, by a computer, probe beam measurements adjusted by the boxcar averager. It is made, including.

Here, the laser beam emitted by the laser generating device is incident to the optical stop to adjust the diameter; A laser beam whose diameter is adjusted by the optical stop is incident on the linear polarizer to control energy; Injecting an energy-controlled laser beam into the beam splitter by the linear polarizer; And changing a path of the laser beam transmitted through the beam splitter through the first mirror and the second mirror to enter the inside of the glove box. It further comprises.

At this time, the energy is adjusted by the rotation of the first linear polarizer of the laser beam whose diameter is adjusted in the optical aperture; And passing only a laser beam having a polarization component perpendicular to a bottom surface among the laser beams whose energy is controlled by the first linear polarizer is passed through the second linear polarizer. It further comprises.

In addition, the laser beam of about 4% of the laser beam transmitted through the linear polarizing plate by the beam splitter is reflected and incident to the energy meter; And measuring energy of a laser beam incident to the energy meter. It further comprises.

Here, the laser beam path is changed by the mirror is incident to the first optical window of the glove box while minimizing energy loss; Injecting a laser beam through the first optical window into the lens; Forming a laser beam incident on the lens at the center of a sample cell which is a focal length of the lens; And blocking the laser beam passing through the sample cell by the beam block. It further comprises.

And changing a path of the probe beam emitted from the probe beam generator through a third mirror; And passing the probe beam whose path is changed through the third mirror through the second optical window to be incident into the glove box. It further comprises.

On the other hand, the probe beam passing through the sample cell is incident to the third optical window; Injecting the scattered laser signal into the notch filter after the probe beam passing through the sample cell reacts with the laser induced plasma generated in the sample cell; Filtering the laser light scattering signal scattered in the sample cell by the notch filter; And the probe beam passing through the notch filter is incident on the needle hole of the fine needle hole device. It is made to include more.

And amplifying the probe beam measurement incident to the photodiode by an amplifier; And providing a probe beam measurement signal amplified by the amplifier to a boxcar averager. It further comprises.

In addition, the probe beam amplified by the amplifier display the waveform of the laser induced shock wave by the oscilloscope; It further comprises.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram schematically showing an apparatus for measuring nanoparticles in an aqueous solution using probe beam detection of a laser induced shock wave according to the present invention. As shown in the drawings, the nanoparticle measuring apparatus 1 in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention is a laser generator 10, the glove box 30 and the probe beam generator 50 ) And a measuring unit 70.

The laser generator 10 includes a laser generator 11, an optical aperture 13, a linear polarizer 14, a beam splitter 15, and a mirror 17.

Here, the laser generator 11 is for emitting a laser beam, using a green wavelength 532nm beam of the Nd: YAG laser having a pulse width of about 6 nanoseconds as a light source. That is, the laser generator 11 uses a second harmonic beam having a green wavelength of 532 nm of Nd: YAG laser as a light source to generate a laser induced plasma.

The optical diaphragm 13 is provided at one side of the laser generator 11, and adjusts the diameter of the laser beam incident after being emitted from the laser generator 11. The diameter of the laser beam emitted from the laser generator 11 is variably adjusted by the optical stop 13.

On the other hand, the linear polarizing plate 14 is provided on one side of the optical aperture 13 to adjust the energy and polarization of the laser beam having a predetermined diameter after passing through the optical aperture 13, the first linear It consists of the polarizing plate 14a and the 2nd linear polarizing plate 14b.

Here, the first linear polarizing plate 14a is provided on one side of the optical aperture 13 and is rotatably installed, and the second linear polarizing plate 14b is on one side of the first linear polarizing plate 14a. It is provided to be fixed but made to pass only the laser beam of the polarization component perpendicular to the bottom surface.

As described above, the first linear polarizing plate 14a is rotatably installed to adjust the energy of the laser beam that is emitted through the laser generator 11 and then incident to the sample cell 33 to be described later. The controlled laser beam passes through the second linear polarizer 14b which passes only the laser beam of polarization component perpendicular to the surface of the test bench bottom surface.

The beam splitter 15 transmits most of the laser beam incident after energy is controlled by the linear polarizing plate 14 including the first linear polarizing plate 14a and the second linear polarizing plate 14b. Reflect a portion of the incident laser beam. That is, the beam splitter 15 is provided to be inclined at a predetermined angle on one side of the linear polarizing plate 14 composed of the first linear polarizing plate 14a and the second linear polarizing plate 14b, and the linear polarizing plate 14 is disposed. After the energy passed is adjusted, it passes through most of the incident laser beam and reflects a portion of the incident laser beam.

To this end, the beam splitter 15 is configured to have a reflectance of about 4% to reflect the energy-controlled laser beam through the linear polarizer 14.

In one embodiment of the present invention, the beam splitter 15 is configured to have a reflectance of about 4%, but the reflectance of the beam splitter 15 is not limited thereto, and the beam splitter ( It is preferable that the reflectance of 15) is made variable.

Here, an energy meter 19 for incident the laser beam reflected through the beam splitter 15 is provided on one side of the beam splitter 15, and the energy meter 19 reflects through the beam splitter 15. The energy of the laser beam.

On the other hand, the mirror 17 is for adjusting the path of the laser beam passing through the beam splitter 15, the first mirror 17a and the first mirror (one side provided on one side of the beam splitter 15) It is composed of a second mirror 17b provided at a predetermined distance apart from 17a.

Here, the first mirror 17a and the second mirror 17b are configured to adjust the path of the laser beam incident after passing through and passing through the beam splitter 15 in left, right, up and down directions, To this end, the first mirror 17a and the second mirror 17b are installed to be inclined at a predetermined angle.

In one embodiment of the present invention, although the path of the laser beam transmitted and passed through the beam splitter 15 is adjusted through the first mirror 17a and the second mirror 17b, the beam splitter 15 is controlled. In order to adjust the path of the transmitted and passed laser beam, the number of the mirrors 17 may be more or less than the number of the mirrors 17, and the number of the mirrors 17 is not limited thereto.

The glove box 30 is for handling radioactive substances or harmful elements, and includes a first optical window 31, a sample cell 33, and a lens 34.

The first optical window 31 has one side surface of the glove box 30 to receive a laser beam whose path is adjusted through the second mirror 17b of the mirrors 17 of the laser generator 10. It is provided at the center.

In addition, the sample cell 33 is positioned at the center of the glove box 30, and contains a sample such as a radioactive substance or a harmful element, and is aligned in a straight line with the first optical window 31. do. As such, the sample cell 33 is aligned with the first optical window 31 in a straight line so that the laser beam whose path is adjusted through the second mirror 17b of the laser generating unit 10 is the sample cell ( 33).

At this time, the nanoparticles installed in the sample cell 33 is preferably made of a size in the range of 5 ~ 200nm, the concentration of the nanoparticles is preferably limited to less than 1ppm.

Here, the lens 34 is interposed between the sample cell 33 and the first optical window 31, the laser whose path is adjusted through the second mirror 17b of the laser generator 10 The beam passes through the first optical window 31 and then enters the lens 34 to focus on the sample cell 33, at which point a laser induced plasma is generated. For this purpose, the focal point of the lens 34 is formed at the center of the sample cell 33.

The focal length of the lens 34 and the beam splitter according to the diameter adjusted by the optical diaphragm 13 of the laser generator 10 and the laser beam incident on the glove box 30 by the structure as described above. The output density of the laser beam may be calculated by using the measured value of the laser beam reflected by 15 and incident on the energy meter 19.

Here, the second optical window 35 and the third optical window 36 are provided at both side centers of the glove box 30, respectively, and the second optical window 35 and the third optical window are provided. Reference numeral 36 is located in a straight line with the sample cell 33. That is, based on the first optical window 31 formed on one side of the glove box 30, the second optical window 35 and the third optical window 36 are provided at the centers of both sides thereof, respectively. The second optical window 35, the sample cell 33, and the third optical window 36 are located in a straight line.

Meanwhile, a beam block 37 is installed inside the glove box 30, and the beam block 37 is configured to block the laser beam that has passed through the sample cell 33.

Here, the probe beam generator 50 for remotely measuring the shock wave by using the probe beam includes the probe beam generator 51 and the photodiode 53.

The probe beam generator 51 is positioned at one side of the glove box 30 to emit a probe beam. The probe beam generated and emitted from the probe beam generator 51 is formed of a He-Ne laser beam. .

The photodiode 53 is installed near the third optical window 36 on the outside of the glove box 30, and the probe beam emitted from the probe beam generator 51 is incident therefor. The photodiode 53 is located in line with the second optical window 35 and the third optical window 36. By the structure as described above, after being generated and emitted by the probe beam generator 51, the second optical window 35, the sample cell 33 and the third optical window 36 are sequentially passed. The probe beam is incident on the photodiode 53.

As described above, the probe beam generated and emitted by the probe beam generator 51 is formed by the laser-induced plasma formed by the laser beam generated and emitted by the laser generator 11 of the laser generator 10. The shock wave can be measured remotely using the Beam Deflection Method near the focal point of (34).

That is, the laser-induced shock wave generated near the focal point of the lens 34 inside the sample cell 33 propagates the medium due to the laser beam generated and emitted by the laser generator 11 of the laser generator 10. As the refractive index of the medium changes, the path of the probe beam changes due to the change of the medium. As a result, the path change of the probe beam changes the intensity of the probe beam incident on the photodiode 53 to measure the shock wave. Can be.

Here, a third mirror 54 is provided at one side of the probe beam generator 51 to adjust the path of the probe beam emitted from the probe beam generator 51. At this time, the third mirror 54 is inclined at a predetermined angle so that the incident path of the probe beam generated and emitted through the probe beam generator 51 is directed toward the second optical window 35 of the glove box 30. Is installed.

Meanwhile, the laser generator 11 is disposed between the photodiode 53 and the third optical window 36 positioned outside the glove box 30 and located close to the third optical window 36. Notch filter for preventing the laser beam, which is incident through the sample cell 33 of the glove box 30 and scattered after being emitted through the second mirror 17b, is detected by the photodiode 53 ( 55).

That is, after being generated and emitted through the laser generator 11, the path is adjusted through the first mirror 17a and the second mirror 17b to enter the sample cell 33 of the glove box 30. Between the photodiode 53 and the third optical window 36 to prevent the laser beam scattered from the sample cell 33 from being incident and detected by the photodiode 53 through the third optical window 36. The notch filter 55 is provided in the laser beam, and the notch filter 55 filters the laser beam scattered toward the photodiode 53 through the third optical window 36.

As described above, green generated and emitted by the laser generator 11 of the laser generator 10 by the notch filter 55 interposed between the photodiode 53 and the third optical window 36. Nd: YAG laser beam of the wavelength is prevented from being scattered in the sample cell 33 of the glove box 30 to be detected by the photodiode 53, the accuracy according to the measured value of the probe beam measured at the photodiode 53 and Reliability can be guaranteed.

Herein, a needle hole having a predetermined diameter in the center of the notch filter 55 and the photodiode 53 to measure the intensity change of the probe beam incident through the third optical window and the notch filter 55 is fine. A fine needle hole device 56 through which 56a) is formed is interposed.

Meanwhile, an amplifier 58 for electrically amplifying the probe beam signal detected and measured by the photodiode 53 is connected to one side of the photodiode 53, and the photodiode 53 is provided by the amplifier 58. The probe beam signal detected and measured at is amplified and provided to the boxcar averager 71 of the measurement unit 70 to be described later.

Here, an oscilloscope 59 for measuring the waveform of the laser induced shock wave detected by the photodiode 53 and amplified by the amplifier 58 is connected to one side of the amplifier 58.

The measuring unit 70 is configured to include a box car averager 71 and a computer 73.

Here, the boxcar averager 71 is connected to the photodiode 53 of the probe beam generator 50 and adjusts the delay time and the width of the probe beam detected through the photodiode 53. .

The computer 73 is connected to the boxcar averager 71 to process the intensity of the probe beam. In an embodiment of the present invention, a computer 73 made of a desktop is connected to the box car averge 71 to process data of the intensity of the probe beam incident on the photodiode 53, but a laptop generally applied It is also possible for a computer to be connected to the boxcar averifier 71, or for a mobile communication terminal and a PDA to perform the role of the computer 73.

At this time, it is preferable that a program for processing data of the intensity of the probe beam is installed in a computer including a desktop computer and a notebook computer, a mobile communication terminal, a PDA, and the like.

Hereinafter, a measuring method according to an apparatus for measuring nanoparticles in an aqueous solution using probe beam detection of a laser induced shock wave according to the present invention will be described with reference to FIG. 2.

First, a laser beam is generated and emitted from the laser generator 11 of the laser generator 10 by an operator or an experimenter (S11).

The laser beam emitted from the laser generator 11 is incident on the optical diaphragm 13 provided on one side of the laser generator 11, and the diameter of the laser beam is adjusted by the optical diaphragm 13. (S11-1).

The laser beam whose diameter is adjusted by the optical diaphragm 13 is incident on the linear polarizing plate 14 to control energy (S11-2). At this time, the energy of the laser beam incident by the rotation of the first linear polarizing plate 14a of the linear polarizing plate 14 is adjusted (S11-2a), the energy is controlled by the first linear polarizing plate 14a Only the laser beam having the polarization component perpendicular to the bottom surface of the beam passes through the second linear polarizer 14b (S11-2b).

As described above, the diameter is controlled by the optical stop 13, the energy is adjusted by the linear polarizer 14, the laser beam having only a polarization component perpendicular to the bottom surface is incident to the beam splitter 15 (S11-3).

In this case, about 4% of the laser beam incident to the beam splitter 15 among the laser beams whose energy is controlled by the linear polarizer 14 is reflected by the energy meter 19 and is incident (S11-3a). The energy of the laser beam incident by the measuring device 19 is measured (S11-3b). That is, most of the laser beams incident to the beam splitter 15 by the linear polarizing plate 14 pass through the beam splitter 15, but about 4% of the laser beams are inclined at a predetermined angle. The energy of the laser beam is measured by the energy meter 19 after being reflected by 15 and input to the energy meter 19.

The path is changed through the mirror 17 including the first mirror 17a and the second mirror 17b in which the laser beam transmitted through the beam splitter 15 is inclined at a predetermined angle so that the glove box 30 It enters inside (S11-4).

As described above, after the laser beam emitted from the laser device passes through the optical diaphragm 13, the linear polarizing plate 14, and the beam splitter 15, the path is changed by the mirror 17 so that the glove box 30 is provided. A laser induced plasma is generated at the center of the sample cell 33 by the laser beam incident on the sample cell 33 positioned in the inner center of the sample cell 33 (S12).

At this time, the laser beam whose path is changed through the mirror 17 including the first mirror 17a and the second mirror 17b is minimized by the first optical window 31 of the glove box 30. While being incident (S12-1), the laser beam passing through the first optical window 31 is incident on the lens 34 located inside the glove box 30 (S12-2), and the lens 34 The laser beam incident on the beam forms a center of the sample cell 33 which is the focal length of the lens 34 (S12-3), and the laser beam passing through the sample cell 33 strikes the beam block 37. It is blocked (S12-4).

As described above, the laser beam emitted through the laser generator 11 of the laser generator 10 is incident on the sample cell 33 located in the inner center of the glove box 30 and the probe beam is generated at the same time. The probe beam is generated and emitted from the probe beam generator 51 of the unit 50 (S14), and the probe beam emitted by the probe beam generator 51 is the sample cell 33 inside the glove box 30. Is incident on (S15).

Thus, the probe beam emitted through the probe beam generator 51 is provided on one side of the probe beam generator 51, and the path is changed through the third mirror 54 inclined at a predetermined angle (S14-). 1), the probe beam whose path is changed through the third mirror 54 is incident on the second optical window 35 provided in the glove box 30 and is incident into the glove box 30 (S14-2). ).

As described above, the sample cell is emitted through the probe beam generator 51 and the path is controlled by the third mirror 54 to pass through the second optical window 35 of the glove box 30. The path of the probe beam incident and transmitted through the 33 is changed due to the change of the refractive index of the medium by the laser induced plasma generated in the sample cell 33 (S16). That is, the laser induced plasma generated in the sample cell 33 by the laser beam emitted through the laser generator 11 is a probe beam incident to the sample cell 33 located in the center of the glove box 30. The path is changed due to the change of the refractive index.

Thus, the probe beam whose path is changed and the laser beam deep scattered from the sample cell 33 are incident on the third optical window 36 due to the laser induced plasma generated in the laser beam of the laser generator 11 (S16-). 1), the probe beam and the laser scattering signal transmitted through the third optical window 36 are incident to the notch filter 55 (S16-2), and the sample cell 33 is moved by the notch filter 55. After the scattered laser light scattering signal is filtered (S16-3), only the probe beam whose path is changed is incident to the needle hole 56a of the fine needle hole device 56 (S16-4).

As described above, the probe beam whose path is changed by the laser induced plasma while passing through the sample cell 33 inside the glove box 30 is transferred to the third optical window 36, the notch filter 55, and the fine needle hole. After passing through and passing through the device 56, it is incident to the photodiode 53 provided outside the glove box 30 (S17).

Here, the measured value of the probe beam incident and detected by the photodiode 53 is electrically amplified by the amplifier 58 (S17-1), and the measurement of the probe beam electrically amplified by the amplifier 58. The value signal is provided to the boxcar averifier 71 (S17-2), and together with the oscilloscope 59 after the measured value of the probe beam electrically amplified by the amplifier 58 is provided to the oscilloscope 59. Is displayed as the waveform of the laser induced shock wave (17-3).

Thus, the measured value of the probe beam measured by the photodiode 53 is provided to the box car averager 71, and the delay time and width are adjusted by the box car averager 71 according to the measured value of the probe beam. (S18). That is, the measured value of the probe beam measured by the photodiode 53 is input to the box car average, and the measured value of the probe beam input to the box car averager 71 is provided in the box car averager 71. The gate integrator is used to selectively adjust and measure the intensity of the probe beam by adjusting the delay time and width of the gate.

As described above, the measurement values of the probe beam such as the intensity of the probe beam whose delay time and width are adjusted by the boxcar averifier 71 are collected by the computer 73 having a data processing function (S19).

Here, the shock wave generated in the laser-induced plasma according to the laser beam generated through the laser generator 11 has a characteristic that the speed changes as the aqueous medium proceeds, so that the velocity at the initial stage of the laser-induced plasma Because it is faster than the speed of general acoustic wave, it shows the characteristics of ultrasonic wave, and as the medium progresses, the speed decreases gradually, showing the characteristics of general acoustic wave. At this time, the speed of a typical acoustic wave is 1486m / s in the case of an aqueous solution.

Therefore, when generating and emitting the probe beam through the probe beam generator 51, since the time resolution and spatial resolution according to the position of the probe beam can be measured by separating the ultrasonic wave and the acoustic wave.

On the other hand, by using the nanoparticle measuring device (1) in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention it is possible to measure the trace amount of fine metal impurities particles generated in the reactor coolant system, wherein the fine metal impurities element It is generally made of iron (Fe), chromium (Cr), nickel (Ni), manganese (Mn), cobalt (Co), titanium (Ti) and the like, but the kind of the fine metal impurity element is not limited thereto. Do.

In addition, by using the nanoparticle measuring device (1) in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention, it is not only possible to measure the nano-colloid particles contained in groundwater and drinking water, but also for semiconductor manufacturing and other industrial purposes. It is also possible to measure trace nanoparticles contained in ultra clean water.

In addition, the solubility of the actinide compound in the aqueous solution can be precisely measured using the nanoparticle measuring apparatus 1 in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention, wherein the actinide compound is uranium ( U), Curium (Cm), Americium (Am), Plutonium (Pu), and Neptunium (Np).

3 is a view schematically showing the waveform of the laser induced shock wave measured using the probe beam of the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention.

Referring to Figure 1, as shown in the figure, as showing the waveform of the laser induced shock wave measured by the nanoparticle measuring apparatus 1 in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention as , The waveform of the probe beam signal detected when the probe beam generated and emitted by the probe beam generator 51 passes about 10 mm from the point where the laser-induced plasma is generated at the focal point of the lens 34 of the glove box 30. Indicates.

Here, the first signal observed after about 6 kHz from the laser signal is a signal measured directly when the path of the probe beam is changed by the laser induced shock wave, and the second signal is a shock wave traveling through the aqueous medium in the sample cell ( 33), it is the signal generated by changing the path of the probe beam while returning.

As described above, the intensity of the probe beam can be selectively measured by adjusting the delay time and the width of each signal by using the gate integrator of the boxcar averager 71. have.

The intensity of the probe beam measured by the box car averger 71 is collected by the computer 73 connected to the box car averger 71.

4 is a diagram showing the frequency distribution of the probe beam signal intensity of the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention, the width of the frequency distribution using the peak value to measure the particle size It is a figure which shows the Example which can be made.

Referring to FIG. 1, as shown in the drawing, in the present embodiment, a delay time and a width of a signal in which the delay time and the width are adjusted by using the gate integrator shown in FIG. 3. The result of calculating the histogram by measuring the intensity 2000 times is shown.

Here, the relative values of the intensity of the probe beam signal and the measured number of bursts are compared, and the x-axis section in which the data is processed to draw the frequency distribution diagram is 0.1 [V].

It can be observed that the peak value and the half-width in the intensity distribution of the signal measured by the method described above change with the size of the nanoparticles.

In this case, the symbol represented by ○ and the symbol represented by □ are frequency distribution diagrams measured on polystyrene standard particles having diameters of 21 nm and 125 nm, respectively. Here, it can be observed that the frequency distribution measured in polystyrene standard particles having a diameter of 125 nm has a larger peak value and half width than the frequency distribution measured in polystyrene standard particles having a diameter of 21 nm.

Here, when the size of the nanoparticles increases, the threshold energy required for the rupture is lower, so that rupture may occur even at a point out of the focal point of the lens 34. As the strength of the shock wave is weakened, the half width of the intensity distribution is expected to expand relatively.

On the other hand, assuming that the temperature and pressure of the plasma are relatively high because the number of initial electrons (Speed Electrons) that contribute to the laser-induced plasma generation increases as the size of the nanoparticles increases, the focal point of the lens 34, that is, the sample cell. The peak value of the probe beam signal distribution corresponding to the intensity of the shock wave generated at (33) also seems to have a large value as the size of the nanoparticles increases.

5 is a view schematically showing an embodiment in which the particle size is measured using the peak value of the probe beam intensity by the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave according to the present invention.

Referring to FIG. 1, as shown in the figure, the peak value of the frequency distribution diagram according to the size of the polystyrene standard particles is measured. The diameter and the concentration of the standard particles used in this example are 21 nm (300 ppt), respectively. ), 33nm (500ppt), 46nm (1ppb), 60nm (2ppb), 125nm (8ppb), 240nm (30ppb). The average value and standard deviation are shown by repeating three experiments. You can see the increasing phenomenon.

This shows that the size of the nanoparticles can be distinguished by analyzing the intensity distribution of the laser induced shock wave measured using the probe beam of the nanoparticle measuring apparatus 1 in the aqueous solution using the probe beam detection of the laser induced shock wave according to the present invention. will be.

FIG. 6 is a diagram schematically showing an embodiment in which particle concentration is measured using a burst probability of a laser induced shock wave according to a nanoparticle measuring apparatus in an aqueous solution using a probe beam detection of a laser induced shock wave according to the present invention.

Referring to Figure 1, as shown in the figure, the burst probability measured using the probe beam as a function of the concentration of the polystyrene standard particles, 125nm nanoparticles having a higher concentration than the 21nm nanoparticles It can be seen that the burst probability of increases, and as a result, the burst probability increases as the concentration of nanoparticles increases under a fixed laser beam energy condition.

In an embodiment of the present invention, the two nanoparticles are compared in comparison, but when the nanoparticles having various sizes larger than that are obtained as a result according to the concentration of the particles as described above, the implementation of the present invention It is preferable not to limit.

While the invention has been shown and described with respect to particular embodiments, it will be understood by those skilled in the art that various modifications and changes can be made without departing from the spirit and scope of the invention as indicated by the appended claims. Anyone can grow up easily.

As described above, the present invention having the configuration as described above generates a laser induced burst phenomenon by using a probe beam in the laser-induced breakdown phenomenon of the fine nanoparticles present in an extremely small amount in an aqueous solution. By using the principle that the path of the probe beam is changed by the laser shock wave, it is possible to determine the size of the nanoparticles by measuring the intensity distribution of the signal of the probe beam, The breakdown probability can be used to measure the concentration of nanoparticles, and the He-Ne laser beam can be used as the probe beam to facilitate handling, reduce costs, and provide non-contact, real-time and The size and concentration of nanoparticles can be measured remotely, resulting in samples such as radioactive materials and ultra-clean water that are harmful to the human body. Measurement sensitivity compared to turbidimeters and particle size analyzers of the general light scattering intensity measurement method for the measurement of fine nanoparticles of 100 nm or less, which are more easily applicable to the present invention, and are present in trace concentrations of less than several ppm. In addition, it is possible to measure traces below the ppm concentration of fine nanoparticles ranging from several nm to several tens of nm, which is difficult to measure with conventional equipment, and traces of fine metal impurity particles generated in the coolant system of nuclear power plants. Measurement of nano colloidal particles in groundwater and drinking water, measurement of ultra-fine nanoparticles in super clean water for semiconductor manufacturing and other industrial use, and precise measurement of solubility of actinide compounds according to pH value change in aqueous solution. Can be applied directly, which improves the accuracy and reliability of the device. It can reap the effects of which can award.

Claims (24)

A laser generating device 11 for forming a plasma, an optical diaphragm 13 for adjusting a diameter of a laser beam emitted through the laser generating device 11, and an optical diaphragm 13 Linear polarizer 14 for adjusting the energy and polarization of the laser beam passed through, a beam splitter 15 for transmitting and reflecting the controlled laser beam passed through the linear polarizer 14, and the beam splitter 15 A laser generator 10 including a mirror 17 for adjusting a path of a laser beam passing through the laser beam; The first optical window 31 formed at the center of one side of the laser beam reflected through the mirror 17 of the laser generator 10 and the first optical window 31 are aligned in a straight line. Is positioned in alignment with, the sample cell 33 is installed between the nanoparticle sample made of radioactive material or harmful elements, and is installed between the sample cell 33 and the first optical window 31, the center of focus is A lens 34 positioned at the center of the sample cell 33 and second and third optical windows 35 and 36 positioned at the centers of both sides thereof, respectively, and located in line with the sample cell 33. Glove box 30 comprising a; Located on one side of the glove box 30, the probe beam generator 51 for emitting a probe beam and the probe beam generator 51 is emitted from the probe, the second optical window 35 and the A probe beam generator 50 including a photodiode 53 for measuring the probe beam passing through the optical window 36; And A box car averager 71 connected to the photodiode 53 of the probe beam generator 50 to adjust the delay time and the width of the probe beam detected through the photodiode 53. A measurement unit 70 connected to the box car averifier 71 and including a computer 73 for data processing the intensity of the probe beam; Device for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser-guided shock wave, characterized in that consisting of a configuration. The method of claim 1, The laser beam emitted through the laser generator (11) is a nanoparticle measuring apparatus in an aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that the green wavelength of 532nm Nd: YAG laser having a pulse width of about 6 nanoseconds. The method of claim 1, The linear polarizing plate 14 is located on one side of the optical aperture 13 and is rotatable to adjust the energy of the laser beam, and the first linear polarizing plate 14a and one side of the first linear polarizing plate 14a. Located in, but comprises a second linear polarizing plate 14b for passing only the laser beam of the polarization component perpendicular to the bottom surface of the nanoparticles in the aqueous solution using a probe beam detection of the laser-guided shock wave, characterized in that the configuration . The method of claim 1, The beam splitter 15 is installed at an inclined angle and has a reflectance of about 4% with respect to the adjusted laser beam energy passing through the linear polarizing plate 14 in the aqueous solution using the probe beam detection of the laser induced shock wave. Nano particle measuring device. The method of claim 4, wherein One side of the beam splitter 15 is provided with an energy meter 19 for measuring the energy of the laser beam reflected through the beam splitter 15, the nano-in-aqueous solution using the probe beam detection of the laser induced shock wave Particle measuring device. The method of claim 1, The mirror 17 is configured to include a first mirror 17a and a second mirror 17b which are installed to be inclined at a predetermined angle so as to adjust the path of the incident laser beam in left, right, up and down directions. An apparatus for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser induced shock wave. The method of claim 1, A beam block 37 for blocking a laser beam that has passed through the sample cell 33 is provided at one side of the sample cell 33 in the glove box 30. The probe beam of the laser induced shock wave may be provided. Device for measuring nanoparticles in aqueous solution using detection. The method of claim 1, Apparatus for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser-guided shock wave, characterized in that can be applied when the size of the nanoparticles present in the sample cell 33 is formed in the range of about 5 ~ 200nm. The method of claim 1, Apparatus for measuring nanoparticles in an aqueous solution using probe beam detection of a laser-guided shock wave, characterized in that applicable when the concentration of the nanoparticles present in the sample cell 33 is formed in a range of less than 1 ppm. The method of claim 1, The probe beam emitted from the probe beam generator 51 of the probe beam generator 50 is a He-Ne laser system comprising a He-Ne laser beam. Nano particle measuring device. The method of claim 1, In the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that the third mirror 54 for adjusting the path of the probe beam is provided on one side of the probe beam generator 51 of the probe beam generator 50 Nano particle measuring device. The method of claim 1, Between the photodiode 53 of the probe beam generator 50 and the third optical window 36, a laser beam emitted through the laser generator 11 is scattered in the sample cell 33, so that the photodiode 53 A nanoparticle measuring apparatus in aqueous solution using probe beam detection of a laser-guided shock wave, characterized in that the notch filter (55) is installed to prevent the detection by a. The method of claim 12, In order to finely measure the intensity change of the probe beam incident on the photodiode 53 between the notch filter 55 and the photodiode 53, the size of the needle hole 56a formed at the center thereof may be finely adjusted. A device for measuring nanoparticles in an aqueous solution using a probe beam detection of a laser-guided shock wave, characterized in that the needle hole device 56 is installed. The method of claim 1, An amplifier 58 for electrically amplifying the probe beam signal detected and measured by the photodiode 53 is connected to one side of the photodiode 53 in the aqueous solution using the probe beam detection of the laser induced shock wave. Nano particle measuring device. The method of claim 14, An oscilloscope 59 for measuring a waveform of a laser induced shock wave detected and measured by the photodiode 53 and then amplified by the amplifier 58 is connected to one side of the amplifier 58. Device for measuring nanoparticles in aqueous solution using probe beam detection. A linear polarizer 14 comprising a laser generator 11, an optical aperture 13, a first linear polarizer 14a and a second linear polarizer 14b, a beam splitter 15, and an energy meter ( 19 and a laser generator 10 including a mirror 17 comprising a first mirror 17a and a second mirror 17b; Glove box 30 comprising first optical window 31, sample cell 33, lens 34, second and third optical windows 35 and 36, and beam block 37. ); Fine needle hole device 56 having a probe beam generator 51, a photodiode 53, a third mirror 54, a notch filter 55, a needle hole 56a, and an amplifier 58 And a probe beam generator 50 including an oscilloscope 59; And a measuring unit 70 including a box car averager 71 and a computer 73. In the measuring method by the nano-particle measuring apparatus 1 in aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that the configuration comprising a, Generating and emitting a laser beam at the laser generator (11) of the laser generator (10) (S11); A step (S12) in which the laser beam emitted by the laser generator (11) is incident on the sample cell (33) inside the glove box (30); Generating a laser induced plasma in the center of the sample cell 33 (S13); Generating and releasing a probe beam from the probe beam generator (51) of the probe beam generator (50) (S14); A step (S15) in which the probe beam emitted by the probe beam generator (51) enters the sample cell (33) in the glove box (30); Changing the path of the probe beam passing through the sample cell 33 due to a change in the refractive index of the medium by the laser induced plasma generated in the sample cell 33 (S16); The probe beam passing through the sample cell 33 is incident to the photodiode 53 outside the glove box 30 (S17); Providing a measurement value of the probe beam measured by the photodiode (53) to the boxcar averager (71) to adjust the delay time and width of the probe beam measurement value (S18); And Collecting (S19) the probe beam measurements adjusted by the boxcar averager (71) to a computer (73); Measuring method by the nanoparticle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that comprises a. The method of claim 16, A step (S11-1) in which the laser beam emitted by the laser generator 11 is incident to the optical stop 13 to adjust the diameter; A step in which a laser beam whose diameter is adjusted by the optical diaphragm 13 is incident on the linear polarizing plate 14 to control energy (S11-2); A step (S11-3) of injecting a laser beam whose energy is controlled by the linear polarizer 14 into the beam splitter 15; And A step of changing the path of the laser beam transmitted through the beam splitter 15 through the first mirror 17a and the second mirror 17b and entering the inside of the glove box 30 (S11-4); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 17, The energy of the laser beam whose diameter is adjusted in the optical stop 13 is controlled by the rotation of the first linear polarizer 14a (S11-2a); And Passing only a laser beam having a polarization component perpendicular to a bottom surface among the laser beams whose energy is controlled by the first linear polarizer 14a (S11-2b); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 17, The laser beam of about 4% of the laser beam transmitted through the linear polarizing plate 14 by the beam splitter 15 is reflected and incident to the energy meter 19 (S11-3a); And Measuring energy of the laser beam incident to the energy meter (S11-3b); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 16, A step (S12-1) in which the laser beam whose path is changed by the mirror 17 is incident to the first optical window 31 of the glove box 30 while minimizing energy loss; A step (S12-2) in which a laser beam penetrating the first optical window 31 is incident on the lens 34; Forming a laser beam incident on the lens 34 at the center of the sample cell 33 which is a focal length of the lens 34 (S12-3); And The laser beam passing through the sample cell 33 is blocked by the beam block 37 (S12-4); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 16, Changing the path of the probe beam emitted from the probe beam generator (51) through the third mirror (S14-1); And Passing the probe beam whose path is changed through the third mirror (54) through the second optical window (35) and entering the glove box (30) (S14-2); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 16, A step (S16-1) in which the probe beam passing through the sample cell 33 is incident on the third optical window 36; After the probe beam passing through the sample cell 33 reacts with the laser-induced plasma generated in the sample cell 33, the scattered laser signal is incident to the notch filter 55 (S16-2); Filtering the laser light scattering signal scattered from the sample cell 33 by the notch filter 55 (S16-3); And The probe beam penetrating the notch filter 55 is incident on the needle hole 56a of the fine needle hole device 56 (S16-4); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 16, A step (S17-1) in which the probe beam measurement incident on the photodiode (53) is amplified by an amplifier (58); And Providing a probe beam measurement signal amplified by the amplifier (58) to a boxcar averager (S17-2); Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises. The method of claim 16, Displaying (17-3) the probe beam measurement value amplified by the amplifier (58) by the oscilloscope (59) as a waveform of a laser induced shock wave; Measuring method by the nano-particle measuring apparatus in the aqueous solution using the probe beam detection of the laser-guided shock wave, characterized in that further comprises.

Images