KR100817731B1 - Capacitance type humidity sensor and method for fabricating the same - Google Patents

Abstract

A capacitive humidity sensor and a method of manufacturing the same are provided to keep constant output characteristic, and to improve productivity by forming an area control pattern on an upper or lower electrode through trimming process. A capacitive humidity sensor comprises a lower electrode(110), an insulation film(120), a humidity sensing film(130) and an upper electrode stacked in the order on a substrate. Any one of the upper and lower electrodes includes a groove and a projection at the side surface. The end part of the projection is extended to be received in the groove.

Description

Capacitive Type Humidity Sensor And Method For Fabricating The Same

1 is a perspective view for schematically illustrating a structure of a general capacitance type humidity sensor.

Figure 2 is a perspective view for explaining a preferred embodiment of the capacitive humidity sensor according to the present invention.

3A and 3B are plan views illustrating an example of adjusting the capacitance output from the humidity sensor through the cutting of a predetermined region of the protrusion according to the present invention.

4 is a plan view for explaining another preferred embodiment of the lower electrode according to the present invention.

5 is a graph showing changes in capacitance values before and after adjusting capacitance in accordance with the present invention.

6A to 6E are perspective views illustrating a method of manufacturing a capacitive humidity sensor according to a preferred embodiment of the present invention.

7 is a real picture showing a state in which a predetermined area of the protrusion is cut with a laser to adjust the capacitance in accordance with the present invention.

<Description of Signs of Major Parts of Drawings>

100. Substrate 110. Lower electrode

120. Insulation film 130. Humidity film

140. Upper electrode 150. Protective layer

The present invention relates to a capacitive humidity sensor and a method of manufacturing the same, and more particularly, to correct the error of the capacitance due to the deviation of the film thickness of the capacitive humidity sensor by adjusting the electrode area to the same at the same humidity The present invention relates to a capacitive humidity sensor having a structure capable of detecting a capacitance value and improving a production yield, and a manufacturing method thereof.

Unlike other surroundings, humidity was not a direct harm to the human body or a significant environmental impact.

However, in modern times, the importance of humidity measurement and control is increasing day by day not only for the industrial production process and quality control but also to maintain a comfortable indoor environment in the home.

Humidity, commonly used in everyday life, is the relative humidity, which is the ratio of the partial pressure of water vapor in air to the saturated water vapor pressure at this temperature.

The humidity sensor for measuring the humidity is usually measured by using a change in the electrical properties of the moisture-sensitive material by moisture, for example, there is a resistance type humidity sensor, a capacitance humidity sensor.

The resistive humidity sensor is difficult to measure in the low and high humidity ranges, and because of the large change in temperature change, the available temperature range is limited, the measured value for humidity changes nonlinearly, and water vapor, condensation, and salt water And there is a disadvantage that the stability to chemicals and the like is weak.

In addition, the resistance-type humidity sensor has a problem that can be caused by a permanent degradation due to the electrolytic action of the moisture sensitive material and the ionization of the electrode material.

However, the capacitive type humidity sensor is a sensor using the principle that the capacitance changes according to the water molecular weight adsorbed on the moisture-sensitive film. As the moisture-sensitive material of the moisture-sensitive film, a chemical, thermal, It has excellent electrical stability and can be operated without a temperature compensation device in a very wide temperature range of -40 ℃ ~ 100 ℃, and the measurement range of humidity is 0% RH (Relative Humidity) ~ 100% RH. Because the measured values are linear, it is very advantageous to simplify the application circuit, and it is easy to apply to the circuit using microcomputer because it operates at DC.

On the other hand, while the capacitive humidity sensor has a measurement error of about 1% RH, the resistive humidity sensor generally has a measurement error of about 3% RH. It is much superior to the humidity sensor.

Referring to the configuration of the conventional capacitive humidity sensor briefly, the capacitive humidity sensor is a lower electrode 11 and the upper electrode 14 as shown in FIG. Capacitor structure in between is generally a form, and for reference, the upper electrode 14 located on the upper portion of the moisture-sensitive film 13 to include a plurality of nucleus nucleus or micro cracks to allow the adsorption and desorption of water. It is composed.

Such a conventional capacitive humidity sensor is typically manufactured using a semiconductor manufacturing process, which is briefly described as follows.

First, the lower electrode 11 is deposited on the substrate 10, and the insulating film 12 is formed on the upper electrode.

Then, after the moisture sensitive film 13 is formed on the insulating film 12, the upper electrode 14 is deposited on the moisture sensitive film 13.

Here, the lower electrode 11 and the upper electrode 14 are deposited using evaporation or sputtering, which is a physical vapor deposition method, and the moisture sensitive film 13 spin-coats the liquid polyimide ( It is formed by coating by spin-coating method.

Meanwhile, the capacitance value detected by the capacitive humidity sensor is calculated by Equation 1 below.

Where C is the capacitance value, ε ₀ is the dielectric constant in the vacuum state, ε _r is the relative dielectric constant (or relative dielectric constant) of the material filling between the electrodes for vacuum, A is the area of the region where the electrodes commonly overlap, d represents the distance between electrodes, respectively.

In this case, since the material filling the electrodes includes both the insulating film 12 and the moisture absorbing film 13, ε _r may vary depending on the amount of moisture adsorbed, in other words, humidity.

On the other hand, as can be seen in Equation 1, the capacitance value (C) of the capacitance-type humidity sensor is between the area (A) and the electrodes (11, 14) of the area where the electrodes (11, 14) commonly overlap Is determined according to the distance d.

Therefore, in order for the capacitance value of each of the capacitive humidity sensors to be constantly detected at the same humidity, the areas A of the areas overlapping in common between the electrodes 11 and 14 of each of the humidity sensors are the same. In addition, the distances d between the electrodes 11 and 14 should also be configured to be the same.

Here, the distance (d) between the electrodes (11, 14) is determined by the thickness of the moisture-sensitive film 13, as mentioned above, the moisture-sensitive film 13 is spin-coated using a liquid polyimide Is formed in a manner.

However, since the liquid polyimide has a considerably high viscosity, it is not only easy to uniformly manufacture the thickness of the moisture sensitive film 13, but also has a problem that it is very difficult to make each of the humidity sensors have the same moisture resistant film thickness. This leads to a decrease in the production yield of the humidity sensor.

Conventional methods for ensuring that each of the capacitive humidity sensors have the same capacitance output value under the same conditions include a method of increasing the uniformity of the humidity sensor by reducing the viscosity of the moisture sensitive material, reducing the thickness variation of the moisture sensitive film, There is a method of compensating the thickness of the damp film by partially etching the non-uniform thickness region of the damp film, which has the disadvantage that the process is complicated and the effect on the actual yield improvement is not large.

Another method is to adjust the capacitance output value by reducing the electrode area through drilling during the trimming process. This method has low precision, problems such as short-circuit between electrodes and reliability deterioration due to distortion of the device structure. May cause.

In addition, in the method of trimming through a laser, minute process by-products may contaminate the surface of the upper electrode including a plurality of nucleus or microcracks and may act as a factor that prevents normal adsorption and desorption of moisture, and a change in characteristics may occur due to laser heating. It is not actually applied.

The present invention for solving the problems of the prior art, the laser trimming on the lower electrode or the upper electrode so that the capacitance value of each of the elements can be constantly output under the same humidity conditions even if the moisture-sensitive film has a thickness variation By providing a pattern for adjusting the electrode area through a trimming process, it is possible to mass-produce a capacitive humidity sensor having the same output characteristics, and to provide a capacitive humidity sensor and a manufacturing method thereof capable of improving yield. Purpose.

In addition, another object of the capacitive humidity sensor of the present invention and a method of manufacturing the same is to provide a suitable area according to the error size of the capacitance value by having a plurality of patterns having various areas to finely adjust the area of the electrode. It is possible to precisely control the output capacitance value by electrically disconnecting the patterns having the laser pattern through a laser trimming, and to provide an electrode pattern structure for preventing device characteristics from deteriorating due to laser heating during laser trimming.

The capacitive humidity sensor of the present invention is a capacitive humidity sensor in which a lower electrode, an insulating film, a moisture sensitive film, and an upper electrode are sequentially stacked on a substrate, wherein any one of the lower electrode and the upper electrode is disposed at a side thereof. And each of the protrusions protruding outward from the groove and the side of the groove, and the edge of the protrusion is extended to be received into the groove.

In addition, according to the capacitive humidity sensor of the present invention, a predetermined region of the protrusion may be cut out.

In addition, according to the capacitive humidity sensor of the present invention, it is preferable that the edge of the protrusion does not contact the inner wall of the groove.

In addition, according to the capacitive humidity sensor of the present invention, it is preferable that the grooves or protrusions are plural.

Here, according to the capacitive humidity sensor of the present invention, the protrusions may be configured to have different areas of the ends accommodated in the grooves.

On the other hand, according to the capacitive humidity sensor manufacturing method of the present invention, forming a lower electrode on the substrate; Patterning the lower electrode into a groove extending from the side to the inside and a protrusion protruding from the side to an extended shape such that the edge of the protrusion is received into the groove; Stacking an insulating film, a moisture sensitive film, and an upper electrode on the lower electrode in order to cover the edge region of the protrusion accommodated in the groove of the lower electrode; And forming a protective layer on the substrate to cover all of the lower electrode, the insulating film, the moisture sensitive film, and the exposed outside of the upper electrode.

Alternatively, stacking a lower electrode, an insulating film, a moisture sensitive film, and an upper electrode in order on the substrate; Patterning the upper electrode into a groove extending from the side to the inside and a protrusion protruding from the side to an extended shape such that the edge of the protrusion is received into the groove; And forming a protective layer on the substrate to cover all of the formed lower electrode, the insulating film, the moisture sensitive film, and the exposed outside of the upper electrode.

Here, according to the method of manufacturing the capacitive humidity sensor of the present invention, after the forming of the protective layer, the method may further include trimming a predetermined region of the protrusion of the lower electrode or the upper electrode covered with the protective layer. desirable.

In addition, according to the capacitive humidity sensor manufacturing method of the present invention, it is preferable to form a plurality of grooves or protrusions in the patterning step.

In addition, according to the method of manufacturing the capacitive humidity sensor of the present invention, it is preferable to form the edge of the protrusion so as not to contact the inner wall of the groove in the patterning step.

In addition, according to the capacitive humidity sensor manufacturing method of the present invention, the trimming step is preferably using a laser.

Hereinafter, exemplary embodiments of a capacitive humidity sensor and a method of manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings.

2 is a perspective view for explaining a preferred embodiment of the capacitive humidity sensor according to the present invention.

In the capacitive humidity sensor according to the preferred embodiment of the present invention, the lower electrode 110, the insulating film 120, the moisture sensitive film 130, and the upper electrode 140 as shown on the substrate (not shown) are stacked. It is made of a structure.

Here, the lower electrode 110 includes grooves 111a, 111b and 111c which are dug inwards from the side of the electrode and protrusions 112a and 112b which protrude outwardly from the side, respectively, and the edges of the protrusions ( It is preferable that the shapes 112a-1, 112a-2, 112b-1, and 112b-2 extend to accommodate the grooves 111a, 111b, and 111c.

In this case, when the groove and the protrusion are defined in detail, the grooves indicate portions 111a, 111b, and 111c which are broken into the electrode based on the conventional lower electrode side line II, and the protrusions are the conventional lower electrode side lines. It points to the electrode surface part which protruded outside based on (II).

Here, two protrusions such as 112a and 112b protrude from the side of the lower electrode 110, and the protrusions 112a and 112b are divided into two as 112a-1, 112a-2 and 112b-1 and 112b-2. For example, the splitting is divided into two pairs of ends, but each of the protrusions may be configured to have one end.

In addition, although 112a-2 and 112b-1 of the ends 112a-1, 112a-2, 112b-1 and 112b-2 of the protrusion are configured to be accommodated in one groove 111b, they correspond to the respective ends. It may be configured to have a groove, and each of the edges may be configured to be received in a separate groove.

And, as mentioned above, it is preferable that the ends 112a-1, 112a-2, 112b-1, 112b-2 of the protrusions are accommodated into the grooves 111a, 111b, 111c, where each of the ends Some areas (①, ②, ③, ④) are configured to be accommodated inside the grooves.

In this case, it is preferable that the partial regions ①, ②, ③, and ④ have an area calculated in advance so as to contribute a predetermined capacitance.

The edges of the protrusions are preferably spaced apart from contacting the inner wall of the grooves.

The insulating layer 120 is preferably laminated to cover some regions ①, ②, ③, and ④ of the edges as described above.

In addition, the insulating film 120 may be formed of a conventional oxide film or nitride film, and the thickness thereof may be different depending on the design of the capacitance change ratio, but is formed at about 1000 mW.

In addition, it serves as a buffer layer for the moisture sensitive film 130 formed on the insulating film 120 and has a constant dielectric constant, and also serves as a sensing unit for inducing a capacitance change along with the moisture sensitive film.

The moisture sensitive film 130 is made of a polyimide-based material, and a polymer material having different electrical properties may be used according to the application form thereof.

In addition, the moisture-sensitive film 130 is preferably applied to a thickness of about 1㎛ using a centrifugal force by rotating the liquid polyimide through a spin-coater (Spin-Coater), through a process of curing at a constant temperature Can be formed.

The upper electrode 140 is generally deposited by evaporation or sputtering of nickel (Ni), chromium (Cr) or nickel-chromium (Ni-Cr) alloy, which is a physical vapor deposition method. It is desirable to be manufactured to have a structure including a plurality of nucleus nuclei or microcracks to enable adsorption and desorption of moisture.

In addition, the capacitive humidity sensor according to an exemplary embodiment of the present invention selectively cuts predetermined regions T1, T2, T3, and T4 of the protrusions in the lower electrode 110 through a laser trimming process. In addition, it is possible to selectively reduce the amount of capacitance contributed by some areas (①, ②, ③, ④), thereby precisely correcting the output capacitance and adjusting the error of the capacitance.

In addition, the laser trimming of some areas ①, ②, ③, and ④ located on the edge of the electrode as described above, there is little risk of deterioration of the characteristics of the humidity sensor due to laser heating.

On the other hand, the output capacitance of the capacitive humidity sensor according to an embodiment of the present invention is determined in proportion to the sum of the areas of the hatched ①, ②, ③, ④, ⑤ areas, these areas are the upper electrode ( 140 is a region overlapping the projection surface when vertically projected, and may be referred to as a portion that affects the output capacitance value of the humidity sensor, that is, a portion that contributes to the capacitance.

Here, it is preferable that the area ⑤ has a fixed area to contribute a constant capacitance value.

In the present embodiment, the case in which the areas of the areas (①, ②, ③, ④) of the edges are all configured differently is taken as an example, but they may all be configured to have the same area, and only four areas must be configured. There is no.

Although not shown, each of the lower electrode 110 and the upper electrode 140 may be further provided with a terminal for electrically connecting with the outside, but may be misunderstood as a feature of the present invention. It is judged that it does not help to clearly understand the essential configuration, and description thereof is omitted.

3A and 3B are plan views illustrating an example in which the capacitance output through the cut-off of a predetermined region of the capacitive humidity sensor according to the preferred embodiment of the present invention is adjusted.

As mentioned above, predetermined regions T1, T2, T3, and T4 of the protrusions in the lower electrode 110 may be selectively selected through the laser trimming process, specifically, regions corresponding to the side edges of the lower electrode 110 in the protrusions. By cutting into, it is possible to selectively reduce the amount of capacitance contributed by some areas (①, ②, ③, ④), thereby precisely correcting the output capacitance and adjusting the error of capacitance.

For example, assuming that a difference between the capacitance output at a constant humidity and a predetermined reference capacitance value is generated by approximately the capacitance value according to the area of the area ①, as shown in FIG. 3A, through laser trimming. By cutting the T1 region, the capacitance can be adjusted.

On the other hand, assuming that a difference between the capacitance output at a constant humidity and a predetermined reference capacitance value is generated by approximately the capacitance value according to the sum of the areas of the areas ② and ④, the T2 and T4 areas are the same as described above. By making an incision as shown in FIG. 3B, the capacitance can be adjusted.

In summary, the area of the predetermined areas ①, ②, ③, and ④ is electrically disconnected through the cutting of the areas T1, T2, T3, and T4 to be cut, thereby reducing the amount of capacitance corresponding to the corresponding area. Can be reduced.

That is, as shown in FIG. 3A, since the area of the area is electrically disconnected, the humidity sensor is the area of the remaining areas 2, 3, 4, and 5 excluded by the capacitance value of the area of the area. A capacitance value proportional to is outputted.

In addition, in the case shown in FIG. 3B, since the areas of the areas ② and ④ are electrically disconnected, the humidity sensor is excluded by the capacitance values for the areas of the areas ② and ④. The capacitance value which is proportional to the area of is outputted.

4 is a plan view for explaining another preferred embodiment of the lower electrode according to the present invention.

In this case, as mentioned above, the area ⑤ has a fixed area contributing to a constant capacitance value, and predetermined areas (①, ②, ③, ④) that contribute to the capacitance but can be electrically disconnected selectively. It is desirable to have a pre-calculated area to contribute capacitances of 0.25pF, 0.5pF, 1.0pF and 2.0pF, respectively.

For example, assuming that the capacitance value of the humidity sensor having such a lower electrode at a predetermined humidity is about 1.75pF different from the reference capacitance value, contributes 0.25pF, 0.5pF, 1.0pF capacitance. By cutting the T1, T2, and T3 areas to electrically disconnect the areas ①, ②, and ③, it is possible to adjust the capacitance output from the humidity sensor and to output a uniform capacitance at the same humidity. I can make it.

In the case of the embodiment as shown in Figure 4, when the appropriate incision by selectively combining the T1, T2, T3, T4 region can be adjusted in the range of 0pF ~ 3.75pF in 0.25pF units.

5 is a graph showing changes in capacitance values before and after adjusting capacitance in accordance with the present invention.

The graph shows the change in capacitance with the change in humidity before and after electrically disconnecting an area having an area contributing about 1 pF of capacitance, that is, before and after adjusting the capacitance value.

As described above, the humidity sensor according to the present invention can adjust to reduce the value of the output capacitance by trimming the partial region contributing to the capacitance of the electrode to be electrically disconnected.

For reference, the capacitive humidity sensor has a precise advantage in detecting humidity compared to other humidity sensors because the capacitance value is relatively linearly output in the overall humidity range as can be seen from the graph shown.

6A through 6E are perspective views illustrating a method of manufacturing a capacitive humidity sensor according to a preferred embodiment of the present invention.

First, a lower electrode 110 is formed on an upper portion of the substrate 100, and the lower electrode has grooves 111a, 111b and 111c which are dug inwards from the side, and protrusions 112a and 112b which protrude outwards from the side, The ends 112a-1, 112a-2, 112b-1, 112b-2 of the protrusion are patterned to extend in a shape accommodated into the grooves as shown (FIG. 6A).

Here, in order to prevent deterioration of device characteristics due to laser heating during laser trimming, predetermined regions T1, T2, T3, and T4 for cutting the protrusion may be formed in the electrode edge region as shown. .

In addition, it is preferable to form the edges of the protrusions so as not to contact the inner wall of the grooves during the patterning.

In addition, an insulating film 120, a moisture sensitive film 130, and an upper electrode 140 are sequentially stacked on the lower electrode so as to cover all edge regions of the protrusion received in the grooves of the lower electrode 110. 6b)

In this case, it is preferable that the areas of the insulating film 120, the moisture sensitive film 130, and the upper electrode 140 are all the same.

The insulating film 120 may be formed of a conventional oxide film or nitride film. The thickness of the insulating film 120 may be different depending on the design of the capacitance change ratio, but is formed at about 1000 mW.

In addition, it serves as a buffer layer for the damp film 130 formed on the insulating film 120 and has a constant dielectric constant, and also serves as a sensing unit for inducing a capacitance change along with the damp film.

Meanwhile, the moisture sensitive film 130 may be made of a polyimide-based material, and a polymer material having different electrical properties may be used according to the application form thereof.

The moisture-sensitive film 130 is preferably applied to a thickness of about 1㎛ using a centrifugal force by rotating the liquid polyimide through a spin-coater (Spin-Coater), formed through a process of curing at a constant temperature Can be.

The upper electrode 140 is generally deposited by nickel (Ni), chromium (Cr) or nickel-chromium (Ni-Cr) alloy through evaporation or sputtering, which is a physical vapor deposition method. It is desirable to have a structure that includes a plurality of nuclei or microcracks to allow adsorption and desorption of moisture.

Subsequently, a protective layer 150 is formed to cover all of the exposed outer surfaces of the lower electrode 110, the insulating film 120, the moisture sensitive film 130, and the upper electrode 140 formed on the substrate 100. 6c)

In the drawings, the protective layer 150 is shown by hatching only, not shown in shape, for better understanding of the description.

Meanwhile, the protective layer 150 serves to protect the surface of the upper electrode 140 including a plurality of cracks from moisture by-products or contaminants generated during semiconductor post-processing such as dicing, soldering, trimming, etc. As the layer to be formed, it is preferable to use a material which is easy to remove such as photoresist, zinc oxide (ZnO), silicon oxide film (SiO ₂ ), aluminum nitride (AlN) and the like.

Then, a predetermined region is cut out so that some regions having an area equal to the capacitance to be reduced among the regions of the protrusions of the lower electrode 110 covered by the protective layer 150 are electrically disconnected. 6d)

Here, an example is a case where the capacitance is reduced by cutting the T1 region through laser trimming, thereby electrically disconnecting the capacitor so that a capacitance proportional to the area of the region is not detected.

Finally, the protective layer 150 formed on the substrate 100 is removed (FIG. 6E).

Through the capacitive humidity sensor manufacturing method according to a preferred embodiment of the present invention as described above, by reducing the error of the capacitance output value of each of the humidity sensors in the same humidity conditions, it is possible to mass-produce humidity sensors with uniform characteristics, As a result, the manufacturing yield of the capacitive humidity sensor can be improved.

FIG. 7 is an actual photograph showing a state in which a predetermined area A of the protrusion 112 is cut by a laser to adjust the capacitance according to the present invention.

In the above, the configuration of the invention according to the embodiment of the present invention has been described in detail with respect to the lower electrode, but may be applied to the upper electrode instead of the lower electrode, and furthermore, the present invention is not necessarily limited to these embodiments. Various modifications can be made without departing from the spirit.

The capacitive humidity sensor and its manufacturing method according to the present invention as described above can maximize the production yield, ensure the reliability of the output value of the device, as well as applying a protective layer to the upper electrode, Even without a separate cleaning process, the by-products generated during laser trimming can prevent many nuclei or micro cracks of the upper electrode, thereby preventing the problem of smooth moisture adsorption and desorption. The process can be simplified further.

Claims (13)

In a capacitive humidity sensor in which a lower electrode, an insulating film, a moisture sensitive film, and an upper electrode are sequentially stacked on a substrate, Any one of the lower electrode and the upper electrode, And a groove which is protruded from the side to the inside and a protrusion which protrudes from the side to each other, wherein the edge of the protrusion is extended to be received into the groove. The method of claim 1, Capacitive humidity sensor, characterized in that the area corresponding to the side edge of the electrode in the protrusion selectively cut. The method of claim 1, At the end of the protrusion, Capacitive humidity sensor, characterized in that not in contact with the inner wall of the groove. The method of claim 1, The groove or protrusion, Capacitive humidity sensor, characterized in that a plurality. The method of claim 4, wherein The protrusions, Capacitive humidity sensor, characterized in that the area of the ends accommodated in the grooves are different. Forming a lower electrode on the substrate; Patterning the lower electrode into a groove extending from the side to the inside and a protrusion protruding from the side to an extended shape such that the edge of the protrusion is received into the groove; Stacking an insulating film, a moisture sensitive film, and an upper electrode on the lower electrode in order to cover the edge region of the protrusion accommodated in the groove of the lower electrode; And And forming a protective layer on the substrate to cover all of the formed lower electrode, the insulating film, the moisture sensitive film, and the exposed outside of the upper electrode. Stacking a lower electrode, an insulating film, a moisture sensitive film, and an upper electrode on the substrate in order; Patterning the upper electrode into a groove extending from the side to the inside and a protrusion protruding from the side to an extended shape such that the edge of the protrusion is received into the groove; And And forming a protective layer on the substrate to cover all of the formed lower electrode, the insulating film, the moisture sensitive film, and the exposed outside of the upper electrode. The method of claim 6, After forming the protective layer, And trimming a predetermined region of the protruding portion of the lower electrode covered with the protective layer. The method according to claim 6 or 7, In the patterning step, Capacitive humidity sensor manufacturing method characterized in that a plurality of grooves or protrusions are formed. The method according to claim 6 or 7, In the patterning step, A method of manufacturing a capacitive humidity sensor, characterized in that the edge of the protrusion is formed so as not to contact the inner wall of the groove. The method of claim 8, The trimming step, Capacitive humidity sensor manufacturing method characterized in that using a laser. The method of claim 7, wherein After forming the protective layer, And trimming a predetermined region of the protrusion of the upper electrode covered with the protective layer. The method of claim 12, The trimming step, Capacitive humidity sensor manufacturing method characterized in that using a laser.

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