KR100800333B1 - System for environment control of mini clean room by automatic control - Google Patents

Abstract

The present invention relates to an environmental control system for local cleaning using automatic control for automatically controlling environmental elements such as temperature, humidity, wind speed, differential pressure, and fume of a local clean room, and a fan filter unit (FFU) for providing air volume. In the environmental control system for local clean using automatic control, the internal clean of the local clean clean room is checked and the clean state of the local clean clean room is recognized and output, and the pressure inside is maintained at positive pressure. An automatic control device for managing the environmental values of the local clean room including the wind speed, temperature, humidity, differential pressure, and fine dust number as identification information; A monitoring computer connected to a network with the automatic control device and storing clean state data of a local clean clean room input through the network, matching the identification information of the automatic control device, and outputting them on a screen; A host for collecting and managing clean state data of the local clean clean room transmitted from the monitoring computer, and recognizing the current state of the local clean clean room using the clean state data to remotely control the automatic control device. computer; And a data communication network serving to transmit and receive data between the monitoring computer and the host computer.

Local clean room, automatic control, temperature, humidity, wind speed, differential pressure, fume, environmental elements

Description

Local control system of local clean using automatic control {System for environment control of mini clean room by automatic control}

1 is a view for explaining a fan filter unit provided in a general topical clean room,

2 is a view for explaining the concept of an environmental control system for local clean using automatic control according to the present invention;

3 is a block diagram for explaining the configuration of an automatic control system applied to FIG.

4 to 6 are diagrams illustrating a user interface screen output on the screen of the monitoring unit.

*** Explanation of symbols on main parts of drawing ***

100: automatic control device 102: temperature sensor

104: humidity sensor 106: chemical sensor

108: wind speed sensor 110: differential pressure sensor

112: particle counter 114: control unit

116: fan filter unit 118: acid and base neutralizer

120: monitoring unit 122: alarm unit

124: communication interface

150: network device 200: monitoring computer

300: data communication network 400: host computer

The present invention relates to an environmental control system for local clean using automatic control.

More specifically, the present invention relates to an environmental control system for local cleaning using automatic control for automatically controlling environmental factors such as temperature, humidity, wind speed, differential pressure, and fume in a local clean room.

The existing Mini-Environment system adopts a fan filter unit (FFU) method, and the fan filter unit (FFU) method controls the fine particles by the wind speed to maintain a desired class. to be.

That is, the fan filter unit (FFU) method will be described briefly with reference to FIG. 1.

The clean room 2 in the building 1 has a system ceiling 3 formed of a partition frame 5. The fan filter unit 16, which is a combination of the filter 14 and the blower fan 13, is integrated in a rectangular fan housing 15 formed by the partition frame 5 of the ceiling 3 of the system. It is.

The blowing fan 13 of the fan filter unit 16 sucks air in the ceiling 17 and supplies it to the clean room 2 through the filter 14.

However, the existing local cleaning system only maintains a constant wind speed to control the fine particles, and can not respond quickly to changes in the environment by controlling the clean system to operate without excluding environmental factors such as differential pressure, temperature, and humidity. In addition, there is a problem that affects the production yield decrease.

The present invention has been made to solve the problems of the prior art as described above, an object of the present invention is to provide a means for automatically recognizing environmental factors such as temperature, humidity, wind speed, differential pressure and Fume in the local clean system The local clean system of the local clean clean room is provided to provide an environmental control system for local clean using automatic control to automatically operate according to the environmental conditions set by the administrator.

One embodiment of the present invention proposed to solve the above technical problem, in the local control system for local clean using automatic control having a fan filter unit (FFU) for providing the air flow, the local clean room Check the internal environment of the local clean clean room to recognize and output the clean state, control the internal pressure to maintain a positive pressure, environmental value of the local clean clean room, including wind speed, temperature, humidity, differential pressure, the number of fine dust Automatic control device for managing the identification information; A monitoring computer connected to a network with the automatic control device and storing clean state data of a local clean clean room input through the network, matching the identification information of the automatic control device, and outputting them on a screen; A host for collecting and managing clean state data of the local clean clean room transmitted from the monitoring computer, and recognizing the current state of the local clean clean room using the clean state data to remotely control the automatic control device. computer; And a data communication network serving to transmit and receive data between the monitoring computer and the host computer.

Hereinafter, with reference to the accompanying drawings will be described in detail an environmental control system for local clean using automatic control.

As shown in FIG. 2, the environmental control system for local clean using automatic control according to the present invention checks the internal environment of the local clean clean room, recognizes and outputs the clean state of the local clean clean room, and internal pressure. The automatic control device 100 is controlled to maintain the positive pressure, and manages the environmental value of the local clean clean room including the wind speed, temperature, humidity, differential pressure, fine dust number as identification information, and the automatic control device 100 and Monitoring computer 200 connected to the network device 150 to match the clean state data of the local clean clean room input through the network device 150 to the identification information of the automatic control device, and to be output on the screen And, collecting and managing clean state data of the local clean clean room sent out from the monitoring computer 200, and using the clean state data, present the local clean clean room. A host computer 400 for recognizing a state and controlling the automatic control device 100 remotely, and a data communication network for transmitting and receiving data between the monitoring computer 200 and the host computer 400. Consisting of 300.

As shown in FIG. 3, the automatic control device 100 detects and outputs an internal temperature of the local clean clean room and a temperature sensor 102 for detecting and outputting an internal temperature of the local clean clean room. Humidity sensor 104, the wind speed sensor 108 for detecting and outputting the wind speed of the air volume generated by the fan filter unit 116, and the differential pressure for detecting the differential pressure generated in accordance with the external environment of the local clean room A sensor 110, a particle counter 112 for measuring the number of particles in the local clean clean room, and chemical fumes generated in the local clean clean room or smoke emitted during a fire is sensed. An acid and base neutralizing device 118 for neutralizing the acidic or basic fumes of the local clean room in response to a driving control signal input from the chemical sensor 106 and a control unit 114 to be described later. , Prize The monitoring unit 120 for outputting the state data of the local clean clean room input from the control unit 114 on the screen, and the temperature and humidity input from the temperature sensor 102, the humidity sensor 104 to the manager. When the temperature and humidity is higher than or lower than the set by the air filter, the air volume of the fan filter unit 116 is controlled to maintain the temperature and humidity at which the temperature and humidity of the local clean room are set. When the wind speed input from the sensor 108 is out of the set wind speed condition, the fan filter unit 116 is controlled to operate according to the set wind speed condition, the differential pressure condition is set to the differential pressure state input from the differential pressure sensor 110 When it is out of the local clean room to control the pressure to maintain the set pressure, if the smoke is detected by the chemical sensor 106 the acid and base neutralizer 118 A control unit 114 for controlling a driving condition of the fan filter unit 116 when the number of particles measured by the particle counter 112 is greater than the set number of particles while outputting a low driving control signal; The alarm unit 122 blinks a lamp when an abnormality occurs in the local clean clean room, and the signal generated by each sensor and counter under the control of the controller 114 is monitored through the network device 150. The communication interface 124 is configured to be transmitted to the computer 200 or to receive data output from the host computer 400 through the monitoring computer 200 and the network device 150 and output the data to the controller 114.

In addition, the automatic control device 100 is installed in the local clean clean room door and detects whether the door is open or closed, and operates in response to the control signal of the control unit 114 and the limit switch 126 to output to the control unit The relay unit 128 to turn on the tower lamp 130 is further included. That is, the control unit 114 allows the relay unit 128 to operate when the door is opened and the limit switch 126 is operated so that power is supplied to the tower lamp 130 and turned on.

In addition, the controller 114 continuously transmits a control signal that was last transmitted. That is, even when the automatic control apparatus 100 is paralyzed by a power failure, the controller 114 may continuously control the fan filter unit 116 by transmitting the last control signal of the controller 114 to the fan filter unit 116. Make sure

The network device 150 transmits a signal generated through the automatic control device in a serial form.

The monitoring unit 120 or the monitoring computer 200 is displayed in the form of an icon on the screen, so that the monitor that the icon is displayed on the screen has a touch screen, so that the user can search and view the desired data by touching the icon And, the local clean clean room controls the automatic control device 100 to maintain the environment of the condition desired by the administrator.

The acid and base neutralizer 118 sprays acidic or basic substances into the local clean room to neutralize the internal air.

Therefore, the operation of the environmental control system for local cleaning using the above-described automatic control is as follows.

2 and 3, first, the control unit 114 of the automatic control device 100 has a temperature and humidity input from the temperature sensor 102 and the humidity sensor 104 installed in the local clean room. When higher or lower than the temperature and humidity set by the administrator, the air volume of the fan filter unit 116 is controlled to maintain the temperature and humidity at which the temperature and humidity of the local clean room are set.

In addition, the controller 114 controls the fan filter unit 116 to operate according to the set wind speed condition when the wind speed input from the wind speed sensor 108 deviates from the set wind speed condition. In addition, the controller 114 controls the pressure of the local clean clean room to maintain the set pressure when the differential pressure state input from the differential pressure sensor 110 is out of the set differential pressure condition. That is, the fan filter unit 116 is provided with a controller to control the fan speed of the fan filter unit 116 under the control of the controller 114 to control the wind speed and the differential pressure environment in the local clean room.

In addition, when the smoke is detected by the chemical sensor 106, the controller 114 outputs a driving control signal to the acid and base neutralizer 118 while the number of particles measured by the particle counter 112. If is greater than the set number of particles to control the driving conditions of the fan filter unit 116.

As described above, the control unit 114 determines the environmental state of the local clean clean room using signals input through the sensors 102 to 110 and the counter 112 installed in the local clean clean room. Then, the fan filter unit 116 and the acid and base neutralizer 118 are controlled according to the identified result so that the local clean clean room can always maintain an environmental state corresponding to the set condition.

In addition, the control unit 114 converts and stores the signals input through the sensors 102 to 110 and the counter 112 into digital data in the storage unit provided therein, and stores the converted signals into digital data, and then monitors the computer through the network device 150. Send to 200.

Then, the monitoring computer 200 stores the local clean clean room environment data received by matching the identification information of the automatic control device 100, and transmits the local clean clean room environment data to the host computer 400 through the data communication network 300. It is possible to accurately recognize the current state of the local clean room without having to visit the clean room and to immediately deal with any abnormalities.

That is, the monitoring unit 120 of the automatic control apparatus 100 displays only the data checked for one local clean clean room, and the monitoring computer 200 of all the local clean clean rooms connected to the network device 150. It saves the current status data and provides the user interface screen for the administrator to easily understand.

4 to 6 are user interface screens provided as the screen of the monitoring unit 120. FIG. 4 is a main screen, and the main screen is a three-dimensionally clean local room so that a fan filter unit can appear. , A window (2) for displaying a signal detected by each sensor, a light emitting unit provided to one side of the display window so as to know whether the sensor is operated, and a window (3) for indicating a current operating state of the fan filter unit 116. ), Interlocking control button (2) for switching the current mode to the automatic control mode. That is, the main screen of FIG. 4 allows the administrator to view the wind speed, temperature, humidity, and differential pressure values input from the fan filter unit and each sensor at a glance, and the desired control value through the LOGIN and CONTROL menus. To adjust it.

5 is a sub-screen provided when a fan filter unit is clicked on the main screen of FIG. 4 and shows resources and status of the fan filter unit.

FIG. 6 is a sub screen provided at a glance to check an operation state of each fan filter unit through a top view in the main screen of FIG. 4, and an administrator may log in and control the sub screen. The (CONTROL) menu allows you to control the fan filter unit to produce the desired wind speed.

When the control unit 114 of the automatic control device 100 recognizes that the door of the local clean clean room is opened using a signal input through the limit switch 126, the fan filter unit 116 has the maximum capability (100%). While operating as the relay unit 128 is operated so that the tower lamp 130 is turned on.

On the other hand, the control unit 114 of the automatic control device 100 causes the lamp of the alarm unit 122 to blink when it is determined that the current state of the local clean clean room being checked is not automatically adjusted or exposed to danger. Workers near the clean room can easily know, and this alarm signal is sent to the host computer 400 via the data communication network 300 as well as the monitoring computer 200 so that the administrator can respond quickly do.

In addition, when the automatic control apparatus 100 is paralyzed due to disconnection or power failure, and thus fails to transmit a control signal to the fan filter unit 116 and the monitoring unit 120, the controller 114 returns the last control signal. Continuously transmitted to the fan filter unit 116 and the monitoring unit 120 to operate the fan filter unit 116 in response to the last control signal, and to output the last data on the screen to the monitoring unit 120.

The monitoring computer 200 or the host computer 400 checks whether the portable terminal number registered by the administrator is stored when abnormality notification data is received from the automatic control apparatus 100, and when the monitoring computer 200 or the host computer 400 is stored therein. An error notification message is sent to the portable terminal number. At this time, the most commonly used is a short message, and may include a cause of an abnormality in the short message to be transmitted.

The present invention is not limited to the above embodiments, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention included in the appended claims.

The present invention having the configuration and operation and the preferred embodiment as described above can make an immediate response to environmental changes. For example, if the door is opened, the pressure inside the ME drops below the reference value, making it difficult to maintain positive pressure. Therefore, the outside polluted air can enter and cause considerable pollution. This is called interlocking control, which sets up one expected emergency situation and emits a control signal suitable for maintaining the system.

In addition, the present invention has the effect of enabling the environmental control and the removal of chemical contamination. In particular, the removal of chemical contamination not only improves the yield of the product, but also has the effect of being able to quickly remove the material causing secondary pollution by convection. In other words, it realizes the optimum environment for the production of the product, so that the yield of the defect rate is almost zero.

In addition, the present invention has an effect that can be expected to improve the product yield by automatically controlling the production environment by adjusting the temperature, humidity, and air volume when producing a product such as a semiconductor or LCD which is very affected by static electricity and fine dust have.

In addition, the present invention has the effect of being able to easily manage the ME close to infinity. In other words, by enabling multi-control using ICU and GMU communication, it is possible to collectively control more than 10,000 local clean systems at short distance as well as at a long distance. And it is effective to reduce the management cost.

In addition, the present invention can be operated by setting the environmental factors and conditions of the local cleaning system by displaying an icon on the PC or touch panel screen and the operating conditions, etc. when controlling the local cleaning system at a near or far distance There is an effect that anyone can easily operate.

Claims (7)

In an environmental control system for local cleanness using automatic control provided with a fan filter unit (FFU) for providing air flow rate, By checking the internal environment of the local clean clean room, it recognizes and outputs the clean state of the local clean clean room, controls the internal pressure to be maintained at a positive pressure, and uses the local clean clean including wind speed, temperature, humidity, differential pressure, and fine dust number. An automatic control device for managing an environment value of a room as identification information; A monitoring computer connected to the automatic control device and a network device to match and store clean state data of a local clean clean room inputted through the network, with identification information of the automatic control device, and output on a screen; A host for collecting and managing clean state data of the local clean clean room transmitted from the monitoring computer, and recognizing the current state of the local clean clean room using the clean state data to remotely control the automatic control device. computer; A data communication network for transmitting and receiving data between the monitoring computer and a host computer; It is configured to include, the automatic control device, A temperature sensor for sensing and outputting the internal temperature of the local clean room; A humidity sensor for sensing and outputting the internal humidity of the local clean room; A wind speed sensor for sensing and outputting wind speed of the air volume generated by the fan filter unit; A differential pressure sensor for detecting a differential pressure generated according to an external environment of the local clean room; A particle counter for measuring the number of particles in the local clean room; A chemical sensor that detects and outputs chemical fumes generated in the local clean clean room or fumes discharged when a fire occurs; An acid and base neutralizing device for neutralizing acid or basic fumes of the local clean room in response to a drive control signal input from the outside; A monitoring unit which outputs state data of the local clean clean room input from the outside on a screen; When the temperature and humidity input from the temperature sensor and the humidity sensor are higher or lower than the temperature and humidity set by the administrator, the air volume of the fan filter unit is controlled to set the temperature and humidity of the local clean room. Control to maintain temperature and humidity, and control the fan filter unit to operate according to the set wind speed conditions if the wind speed input from the wind speed sensor is out of the set wind speed conditions, the differential pressure state input from the differential pressure sensor is set When the pressure difference is exceeded, the pressure of the local clean clean room is controlled to maintain the set pressure so that the internal pressure of the local clean clean room is maintained at a positive pressure, and when the smoke is detected by the chemical sensor, the acid and The party measured by the particle counter while outputting a drive control signal to the base neutralizer Control unit for controlling the driving conditions of the fan filter unit when the number of the number of particles is greater than the number of particles set Local clean environment control system using automatic control, characterized in that consisting of. The method of claim 1, wherein the monitoring computer or host computer, And the abnormality notification message is transmitted to the portable terminal registered by the administrator when the abnormality notification data is included in the data transmitted from the automatic control device. delete The method of claim 1, wherein the automatic control device, And an alarm unit for blinking a lamp when an abnormality occurs in the local clean clean room. The method of claim 4, wherein the automatic control device, It is installed in the local clean clean room door further includes a limit switch for detecting whether the door is open or closed, and outputs to the control unit, and a relay unit for operating the control signal input from the outside to turn on the tower lamp, And the control unit outputs a control signal to the relay unit when the door is opened and the limit switch is operated. The method of claim 1, wherein the control unit, And the last control signal transmitted to the fan filter unit is continuously transmitted to the fan filter unit. The method of claim 1, wherein the network device, Local cleaning system using a local control, characterized in that for transmitting the signal generated by the automatic control device in a serial form.

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