KR100782351B1 - Device and package for analyzing solution component and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a microanalytical device, a package, and a method for manufacturing the same, and includes a micro piezoelectric pump, thereby allowing a solution to flow quickly into a reaction channel groove, thereby increasing a solution analysis speed.

In addition, the present invention is packaged even if a simple insertion process of the microanalysis device into the package body, so that the assembly process can be simplified, by varying the number of injection holes and by varying the length and structure of the reaction channel grooves of various types of micro designed The analytical device can be easily packaged according to the application.

In addition, the present invention is provided with protrusions and insertion grooves in the microanalyzing device and the package body, so that the optical alignment of the light source of the package body and the optical fibers of the photo detector and the microanalyzing device is excellent.

Micro, analysis, device, package, pump, solution, insert

Description

 Micro device and package and manufacturing method thereof {Device and package for analyzing solution component and manufacturing method

1 is a schematic configuration diagram of a solution component analysis apparatus according to the prior art

2 is a view briefly showing an example of a graph measured in a solution component analyzer according to the prior art;

3 is a schematic cross-sectional view of a microanalysis element according to the present invention.

4 is a plan view schematically showing a lower substrate of a microanalysis device according to the present invention;

5 is a partial plan view of a schematic lower substrate for explaining a micro piezoelectric pump according to the present invention;

6 is a schematic partial cross-sectional view of a micro piezoelectric pump mounted on a microanalysis element according to the present invention.

7A and 7B are schematic cross-sectional views for explaining the operation of the micro piezoelectric pump according to the present invention.

8 is a schematic plan view of a channel groove connected to a micro piezoelectric pump according to the present invention;

9 is another schematic plan view of a channel groove connected to a micro piezoelectric pump according to the present invention;

10 is a schematic structural layout view of a package of a microanalysis device according to the present invention

11 is a schematic structural layout view of a package of a microanalysis device according to the present invention

12 is a schematic cross-sectional view illustrating a structure for improving optical alignment of a microanalysis device and a package according to the present invention.

Figure 13 is a schematic cross-sectional view showing the shape of the protrusion for improving the optical alignment of the microanalysis device and the package according to the present invention.

<Description of the symbols for the main parts of the drawings>

100: lower substrate 111,112,113,114: inlet groove

121,122,123,124: Micro Piezo Pump 130: Reaction Channel Groove

140: measuring channel groove 150: outlet groove

161,162: Fiber Optic Groove 171,172: Channel Groove

171a, 171b, 321,322: protrusions 171a1,171b1: vertices

180: solution storage groove 210: adhesive

220: piezoelectric 300: micro analysis device

500: package body 510: insertion groove

Side grooves 531,532 Ball lens

540: light source 550: photodetector

571: protrusion insertion groove

The present invention relates to a microanalytical device, a package, and a method for manufacturing the same. More particularly, the microanalytical device includes a micro piezoelectric pump to quickly flow a solution into a reaction channel groove, thereby increasing a solution analysis rate, and a microanalytical device is packaged. The present invention relates to a microanalysis device, a package, and a method of manufacturing the same, which are packaged even by performing a simple insertion process, thereby simplifying the assembly process.

Generally, a solution having different components is mixed and reacted, and the components of the reacted solution are analyzed.

Such a device for analyzing a solution has been developed.

1 is a schematic configuration diagram of a solution component analysis apparatus according to the prior art, comprising: a light source 10; A monochromator 20 for separating the light of the light source 10 into multiple wavelengths; A transparent sample container 30 that transmits light of multiple wavelengths separated from the monochromator 20 and contains a sample solution; The light having a plurality of wavelengths transmitted through the transparent sample container 30 is transmitted through the optical system 40, and is configured as a light receiving unit 50 for measuring light intensity.

Here, the light source 10 used uses a light source such as a Xenon lamp or a tungsten haloken lamp, and the light emitted from the light source 10 uses a monochromator using a diffraction grating or an optical filter. Separate into wavelength light.

The separated multi-wavelength light passes through the transparent sample container 30 filled with the measurement sample solution.

In this case, the light having a plurality of wavelengths passing through the transparent sample container 30 is absorbed by the measurement sample solution component, and the light having passed through the transparent sample container 30 is received by the light receiving unit 50. The light receiving sensor of measures the change of the light intensity for each wavelength band.

FIG. 2 is a view schematically illustrating an example of a graph measured by a solution component analyzer according to the related art, in which light of a specific wavelength band is absorbed by a sample solution and thus the light intensity decreases as 'a'. 50).

Here, the pattern of the light absorption spectrum may appear in a more complex form according to the sample solution, and the component and the concentration in the sample solution may be determined using the pattern of the light absorption spectrum and the light intensity change of the pattern.

Since the conventional solution component analysis device is composed of a light source, a monochromator, a sample container, a light receiving sensor, and the like, the volume and weight of the measuring device are increased, and thus the mobility of the device is not easy. have.

In addition, a mixer or reactor for mixing and reacting the additives for adjusting the acidity (pH) of the sample solution or the catalyst additives for promoting the reaction to prepare a sample solution for measuring the component and its concentration in the solution. Separately required, sometimes additional equipment, such as a separator, is used to separate only the measurement sample solution separately.

Therefore, there is a problem in that a solution is taken at a site outside a laboratory where a solution component analyzer is installed, and the component cannot be analyzed immediately, and it takes a considerable time to analyze the component.

In order to solve the above problems, an object of the present invention is to provide a microanalytical device, a package, and a method of manufacturing the same, including a micro piezoelectric pump, allowing a solution to flow quickly into a reaction channel groove to increase a solution analysis speed. There is this.

Another object of the present invention is packaged even if the microanalysis device is carried out in a simple insertion process to the package body, so that the assembly process can be simplified, the number of injection holes is varied and the length and structure of the reaction channel grooves are designed in various forms The present invention provides a microanalysis device, a package, and a method of manufacturing the microanalysis device that can be easily packaged according to a use.

It is still another object of the present invention to provide a microanalysis device and a package body with protrusions and insertion grooves, so that the optical analysis of the optical source of the optical source of the light source and the photo detector and the microanalysis device of the package body and the package and It is to provide a manufacturing method thereof.

A first preferred aspect for achieving the above objects of the present invention is

Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; A lower substrate having first and second optical fibers inserted in and fixed to each of the optical fiber insertion grooves, the optical fiber insertion grooves formed at both ends of the measurement channel grooves;

The microanalysis device is bonded to an upper portion of the lower substrate and includes an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves.

A second preferred aspect for achieving the above objects of the present invention is

A light source and a photo detector, each having an opening formed at one side thereof, having side grooves formed at both ends of the groove, and having ball lenses mounted at respective side grooves, optically aligned with the ball lenses, respectively. The package body is provided with,

It is configured to include a micro analysis element fixed to the insertion groove of the package body,

The micro analysis device,

Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; Optical fiber insertion grooves formed at both ends of the measurement channel grooves are formed at an upper portion thereof, and are bonded to an upper portion of the lower substrate having first and second optical fibers fixedly inserted into and respectively fixed to the optical fiber insertion grooves, And an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves,

A first and second optical fibers of the microanalysis device are optically aligned with the ball lens. A microanalysis device package is provided.

A third preferred aspect for achieving the above objects of the present invention is

A light source and a photo detector, each having an opening formed at one side thereof, having side grooves formed at both ends of the groove, and having ball lenses mounted at respective side grooves, optically aligned with the ball lenses, respectively. Preparing a package body is provided;

Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps connected to the inlet grooves to pump solutions, respectively; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; Optical fiber insertion grooves formed at both ends of the measurement channel grooves are formed at an upper portion thereof, and are bonded to an upper portion of the lower substrate having first and second optical fibers fixedly inserted into and respectively fixed to the optical fiber insertion grooves, Preparing a micro analysis device including an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves;

A method for manufacturing a microanalysis device package is provided, comprising inserting the microanalysis device into an insertion groove of a package body such that first and second optical fibers are optically aligned with the ball lens.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

3 is a schematic cross-sectional view of a microanalysis device according to the present invention, in which a channel groove through which a solution flows and is mixed and reacts with a channel groove through which light passes through the mixed solution is formed. and; The upper substrate 200 is bonded to the upper portion of the lower substrate 100.

4 is a plan view schematically illustrating a lower substrate of a microanalysis device according to the present invention, including injection hole grooves 111, 112, 113, and 114 into which a plurality of solutions are injected; Micro piezoelectric pumps 121, 122, 123, and 124 connected to the inlet grooves 111, 112, 113, and 114 to pump solutions, respectively; A reaction channel groove 130 connected to the micro piezoelectric pumps 121, 122, 123, and 124 to mix and react the solutions pumped from the micro piezoelectric pumps 121, 122, 123, and 124; A measurement channel groove 140 through which the solution reacted in the reaction channel groove 130 flows and light passes through the flowing solution; An outlet groove 150 for discharging the solution passed through the measurement channel groove 140; Optical fiber insertion grooves 161 and 162 formed at both ends of the measurement channel groove 140 are formed on an upper portion of the lower substrate.

The first and second optical fibers 181 and 182 are inserted into and fixed to the optical fiber insertion grooves 161 and 162, respectively.

Meanwhile, through holes corresponding to the inlet grooves 111, 112, 113, and 114 and the outlet groove 150 are formed in the upper substrate bonded to the upper portion of the lower substrate.

Therefore, the microanalysis device of the present invention has an advantage of increasing the solution analysis rate by quickly flowing the solution into the reaction channel groove with a micro piezoelectric pump.

5 is a partial plan view of a schematic lower substrate for explaining the micro piezoelectric pump according to the present invention, the micro piezoelectric pump is formed in the lower substrate 100, one side is connected to the inlet groove, the other side to the reaction channel groove Connected solution storage groove 180; An upper substrate region above the solution storage groove 180; It is composed of a piezoelectric film formed on the upper substrate region.

The piezoelectric film may be formed of a piezoelectric body 220 bonded to the upper substrate region using an adhesive.

In addition, one side of the solution storage groove 180 is connected to the inlet grooves 111, 112, 113, and 114 shown in FIG. 4 and the channel groove 171, and the other side thereof is connected to the reaction channel groove 130 and the channel groove 172. have.

In addition, the upper substrate is preferably made of a material having an elastic force, the material of which is preferably glass (Glass).

That is, when the upper substrate is made of a material having elastic force, the same deformation as the upper substrate occurs according to the deformation (shrinkage and expansion) of the piezoelectric film, thereby performing the function of a pump.

FIG. 6 is a schematic partial cross-sectional view of a micro piezoelectric pump mounted on a microanalysis device according to the present invention. A solution storage groove is formed on an upper portion of the lower substrate 100, and channel grooves are formed at both ends of the solution storage groove. have.

The upper substrate 200 is positioned on the lower substrate 100, and the piezoelectric member 220 is bonded to the adhesive 210 on the upper substrate 200 located above the solution storage groove region.

7A and 7B are schematic cross-sectional views illustrating the operation of the micro piezoelectric pump according to the present invention. When alternating current is applied to the piezoelectric body 220, the piezoelectric body 220 contracts and expands according to the positive and negative components of the alternating current. Repeatedly, the solution is sucked from the channel groove connected to the inlet groove, and the pumping process of repeatedly discharging the solution into the channel groove connected to the reaction channel groove is performed.

That is, in FIG. 7A, due to the contracting action of the piezoelectric member 220, the upper substrate region where the piezoelectric member 220 is bonded is raised to the upper portion, and the solution is sucked into the solution storage groove.

In addition, FIG. 7B illustrates an expansion action of the piezoelectric material 220, in which the upper substrate region where the piezoelectric material 220 is bonded is lowered to discharge the solution in the solution storage groove into the reaction channel groove.

FIG. 8 is a schematic plan view of a channel groove connected to a micro piezoelectric pump according to the present invention. In the channel groove region connected to the solution storage groove in the inlet groove, both sides of the channel groove protrude to have a narrow channel groove width. It is desirable to have.

When the channel groove width is narrowed, the pumping action of the micro piezoelectric pump facilitates the suction of the solution in the inlet groove into the solution storage groove and reduces the amount discharged to the inlet groove when it is discharged from the solution storage groove to the reaction channel groove. It is possible to increase the amount discharged to the reaction channel grooves.

Therefore, as shown in FIG. 8, the channel groove 171 is connected to the solution storage groove, and protrusions 171a and 171b facing each other are formed at both sides of the region of the channel groove 171 connected to the solution storage groove. The width W1 between the opposing protrusions 171a and 171b becomes smaller than the channel groove width W2.

In this case, the protrusions 171a and 171b may be convexly protruding into the channel groove 171.

9 is another schematic plan view of a channel groove connected to a micro piezoelectric pump according to the present invention, and protruding convexly on both sides of the channel groove region connected from the inlet groove to the solution storage groove, and opposing protrusions 171a and 171b. ) Is formed, and each of the protrusions 171a and 171b has vertices 171a1 and 171b1.

In other words, each of the protrusions 171a and 171b which protrude convexly on both sides of the channel groove region connected to the solution storage groove is asymmetrically formed with respect to the vertices 171a1 and 171b1.

Even in this case, the pumping action of the micro-piezoelectric pump facilitates the suction of the solution in the inlet groove into the solution storage groove, and when the solution is discharged from the solution storage groove into the reaction channel groove, the amount of discharge into the inlet groove is reduced, It is possible to increase the amount discharged to the groove.

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10 is a schematic configuration layout view of a package of a microanalysis device according to the present invention, in which the microanalysis device 300 is inserted into a package body 500, and the package body 500 includes a microanalysis device 300. Insertion grooves 510 having one side open to be inserted are formed, and side grooves 521 and 522 are formed at both ends of the inner side of the insertion grooves 510, respectively, and a ball lens is formed in each of the side grooves 521 and 522. 531 and 532, and a light source 540 and a photo detector 550 optically aligned with each of the ball lenses 531 and 532.

As such, the first and second optical fibers of the microanalysis element 300 are optically aligned with the ball lenses 531 and 532, and the microanalysis element is inserted into and fixed to the insertion groove 510 of the package body.

Therefore, when the sample solution and the catalyst solution injected into the inlet grooves of the microanalysis device 300 are mixed and reacted to flow in the measurement channel groove, the light is emitted from the light source 540, and the emitted light is micro-analyzed. The first optical fiber of the device 300 is transmitted to the measurement channel groove.

The transmitted light is partially absorbed in the reacted solution and is detected by the photo detector 550 through the second optical fiber.

Therefore, by measuring the change in intensity of the light detected by the photo detector 550, it is possible to analyze the solution component.

The ball lenses 531 and 532 are for focusing light.

11 is a schematic configuration layout view of a package of a microanalysis device according to the present invention, including injection hole grooves 111, 112, 113, and 114 into which a plurality of solutions are injected; Micro piezoelectric pumps 121, 122, 123, 124 connected to the inlet grooves 111, 112, 113, 114 to pump solutions, respectively; A reaction channel groove 130 connected to the micro piezoelectric pumps 121, 122, 123, and 124 to mix and react the solutions pumped from the micro piezoelectric pumps 121, 122, 123, and 124; A measurement channel groove 140 through which the solution reacted in the reaction channel groove 130 flows and light passes through the flowing solution; An outlet groove 150 for discharging the solution passed through the measurement channel groove 140; Optical fiber insertion grooves 161 and 162 formed at both ends of each of the measurement channel grooves 140 are formed at an upper portion, and lower portions in which first and second optical fibers 171 and 172 are inserted into and fixed to the optical fiber insertion grooves 161 and 162, respectively. A substrate; Through holes corresponding to the inlet grooves 111, 112, 113, and 114 and the outlet groove 150 are formed, and a micro analysis device including an upper substrate bonded to an upper portion of the lower substrate is inserted into the package body.

Therefore, the present invention can be packaged to simplify the assembly process even if the microanalysis device is simply inserted into the package body. Therefore, the microanalysis of various types designed by varying the number of injection holes and the length and structure of the reaction channel grooves can be made. The advantage is that the device can be easily packaged according to the application.

12 is a schematic cross-sectional view illustrating a structure for improving optical alignment of a microanalysis device and a package according to the present invention, and a stripe shape spaced apart from each other on a lower surface of the lower substrate 100 of the microanalysis device 300. A pair of protrusions 321 and 322 are formed, and a pair of protrusion insertion grooves 571 and 572 are formed on the bottom surface of the insertion groove 510 of the package body 500 to insert the pair of protrusions.

As such, when the microanalysis device and the package body are provided with protrusions and insertion grooves such as precision rails, when the microanalysis device is inserted into the package body and packaged, additional light sources of the package body and optical fibers of the photo detector and the microanalysis device are provided. There is no need to perform optical alignment with the field.

That is, when the protrusion is inserted into the insertion groove, if the microanalytical element and the package body are designed to be optically aligned, both of them may maintain optical alignment even after external package impact.

Figure 13 is a schematic cross-sectional view showing the shape of the protrusion for improving the optical alignment of the microanalysis device and the package according to the present invention, the protrusion 321 formed on the lower surface of the lower substrate 100 of the microanalysis device The width W6 is formed in a shape larger than the width W5 of the upper portion, and the protrusion insertion groove 571 formed in the bottom surface of the insertion groove of the package body 500 is formed in a shape in which the width of the upper portion is smaller than the width of the lower portion. It is.

In addition, the cross section of the protrusion 321 and the cross section of the protrusion insertion groove 571 may be thin.

The above-described shape prevents the protrusion 321 from escaping from the protrusion insertion groove 571, thereby preventing the microanalysis element from being separated from the package body.

As described above, the present invention has an effect of increasing the solution analysis rate by providing a micro piezoelectric pump to quickly flow the solution to the reaction channel.

In addition, the present invention is packaged even if only a simple insertion process of the micro analysis device is packaged, so that the assembly process can be simplified, by varying the number of injection holes and by varying the length and structure of the reaction channel grooves of various types of micro designed The analytical device can be easily packaged according to the application.

In addition, the present invention is provided with protrusions and insertion grooves in the microanalyzing device and the package body, so that the optical alignment of the light source of the package body and the optical fibers of the photo detector and the microanalyzing device is excellent.

Although the invention has been described in detail only with respect to specific examples, it will be apparent to those skilled in the art that various modifications and variations are possible within the spirit of the invention, and such modifications and variations belong to the appended claims.

Claims (15)

Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; A lower substrate having first and second optical fibers inserted in and fixed to each of the optical fiber insertion grooves, the optical fiber insertion grooves formed at both ends of the measurement channel grooves; The upper substrate is bonded to the lower substrate, and includes an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves. The micro piezoelectric pump includes: a solution storage groove formed in the lower substrate, one side of which is connected to the inlet groove, and the other side of which is connected to the reaction channel groove; An upper substrate region above the solution storage groove; A piezoelectric film formed on the upper substrate region, One side of the solution storage groove is connected to the inlet grooves and the channel groove, the other side is connected to the reaction channel groove and the channel groove, The channel groove region connected to the solution storage groove in the inlet groove is formed in a shape in which both sides of the channel groove protrude to narrow the channel groove width. delete The method of claim 1, The piezoelectric film, And a piezoelectric body is bonded above the upper substrate region. delete Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; A lower substrate having first and second optical fibers inserted in and fixed to each of the optical fiber insertion grooves, the optical fiber insertion grooves formed at both ends of the measurement channel grooves; The upper substrate is bonded to the lower substrate, and includes an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves. The micro piezoelectric pump includes: a solution storage groove formed in the lower substrate, one side of which is connected to the inlet groove, and the other side of which is connected to the reaction channel groove; An upper substrate region above the solution storage groove; A piezoelectric film formed on the upper substrate region, One side of the solution storage groove is connected to the inlet grooves and the channel groove, the other side is connected to the reaction channel groove and the channel groove, The micro-analysis device, characterized in that the convex protrusions are formed on both sides of the channel groove region connected to the solution storage groove from the inlet groove, the protrusions are opposed to each other. delete delete A light source and a photo detector, each having an opening formed at one side thereof, having side grooves formed at both ends of the groove, and having ball lenses mounted at respective side grooves, optically aligned with the ball lenses, respectively. The package body is provided with, It is configured to include a micro analysis element is fixed to the insertion groove of the package body, The micro analysis device, Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped in the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; Optical fiber insertion grooves formed at both ends of the measurement channel grooves are formed at an upper portion thereof, and are bonded to an upper portion of the lower substrate having first and second optical fibers fixedly inserted into and respectively fixed to the optical fiber insertion grooves, And an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves, And the first and second optical fibers of the microanalysis device are optically aligned with the ball lens. The method of claim 8, On the lower surface of the lower substrate of the microanalysis device, a pair of protrusions having a stripe shape spaced apart from each other are formed. On the bottom surface of the insertion groove of the package body is formed a pair of projection insertion grooves for inserting the pair of projections, And the protrusion is inserted into the protrusion insertion groove, and the micro analysis element is inserted into and fixed to the insertion groove of the package body. The method of claim 9, The protrusion formed on the lower surface of the lower substrate of the microanalysis device is formed in a shape in which the width of the lower portion is larger than the width of the upper portion. The protrusion insertion groove formed on the bottom surface of the insertion groove of the package body is formed in a shape of the upper width is smaller than the width of the lower micro analysis device package. The method of claim 10, The cross section of the projection section and the projection insertion groove is a micro analysis device package, characterized in that the curved. The method according to any one of claims 8 to 11, The micro piezoelectric pump, A solution storage groove formed on the lower substrate, one side of which is connected to the inlet groove, and the other side of which is connected to the reaction channel groove; An upper substrate region above the solution storage groove; And a piezoelectric film formed on the upper substrate region. A light source and a photo detector, each having an opening formed at one side thereof, having side grooves formed at both ends of the groove, and having ball lenses mounted at respective side grooves, optically aligned with the ball lenses, respectively. Preparing a package body is provided; Injection hole grooves into which a plurality of solutions are injected; Micro piezoelectric pumps respectively connected to the inlet grooves to pump solutions; A reaction channel groove connected to the micro piezoelectric pumps to mix and react the solutions pumped by the micro piezoelectric pumps; A measurement channel groove in which the solution reacted in the reaction channel groove flows and light passes through the flowing solution; A discharge groove for discharging the solution passed through the measurement channel groove; Optical fiber insertion grooves formed at both ends of the measurement channel grooves are formed at an upper portion thereof, and are bonded to an upper portion of the lower substrate having first and second optical fibers fixedly inserted into and respectively fixed to the optical fiber insertion grooves, Preparing a micro analysis device including an upper substrate having through holes corresponding to the inlet grooves and the outlet grooves; And inserting the microanalysis element into an insertion groove of a package body such that first and second optical fibers are optically aligned with the ball lens. The method of claim 13, On the lower surface of the lower substrate of the microanalysis device, a pair of protrusions having a stripe shape spaced apart from each other are formed. On the bottom surface of the insertion groove of the package body is formed a pair of projection insertion grooves for inserting the pair of projections, And the protrusion is inserted into the protrusion insertion groove so that the micro analysis element is inserted into and fixed to the insertion groove of the package body. The method according to claim 13 or 14, The micro piezoelectric pump, A solution storage groove formed on the lower substrate, one side of which is connected to the inlet groove, and the other side of which is connected to the reaction channel groove; An upper substrate region above the solution storage groove; And a piezoelectric film formed on the upper substrate region.

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