KR100781095B1 - Differential interference contrast microscope for inspecting indentation provided with auto focusing module using line sensor - Google Patents

Abstract

A differential interference contrast microscope for inspecting indentation provided with an auto focusing module using a line sensor is provided to extend an inspection area and to increase data speed. A differential interference contrast microscope for inspecting indentation provided with an auto focusing module using a line sensor includes a first barrel(101), a second barrel(102), a third barrel(103), a seventh barrel(302), a forth barrel(104), a sixth barrel(301), an eighth barrel(303), a fifth barrel(105), an inspection camera, and an auto focusing module. The first barrel has an objective lens(140) and a differential interference prism inside. The second barrel is located on the top of the first barrel and has a first beam separator(130) inside. The third barrel is located on a side of the second barrel and has a polariscope inside and a light source outside. The seventh barrel is located on the top of the second barrel and has a second beam separator(330) inside. The forth barrel is located on a top of the seventh barrel and has an analyzer(160) inside. The sixth barrel is located on a side of the seventh barrel and has a light source(310) for controlling focus and a pattern(320). The eighth barrel is located on the side of the seventh barrel and has a line sensor(340). The fifth barrel is located on the top of the forth barrel and has an immersion lens(170) inside. The inspection camera is located on the top of the fifth barrel. The auto focusing module focuses the inspection lens in real time.

Description

DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPE FOR INSPECTING INDENTATION PROVIDED WITH AUTO FOCUSING MODULE USING LINE SENSOR}

1 is a schematic view of an optical path for inspection of an optical system according to a preferred embodiment of the present invention;

Figure 2 is a schematic view of the optical path for adjusting the focus of the optical system according to a preferred embodiment of the present invention;

3 is a schematic diagram of a differential submicroscope with the optical system of FIGS. 1 and 2; And

4 is a schematic diagram of a conventional differential microscope.

<Description of the symbols for the main parts of the drawings>

100: optical system 110: inspection light source

120 polarization filter 130 first beam splitter

140: differential differential prism 150: objective lens

160: analyzer 170: imaging lens

310: focus recognition light source 320: pattern

330: second beam splitter 340: line sensor

101 ~ 105, 301 ~ 303: First through eighth barrels

304: auto focus control unit 305: motor

306: Ball screw

The present invention relates to a differential microscope, and more particularly to a differential microscope that can focus the microscope at high speed.

Differential submicroscopes pass only a beam of light that vibrates in a certain direction when a normal ray passes through the polarizer, and when it passes through a double refraction prism (Normalski Prism), it is a beam of light in one direction due to vibration due to the characteristics of the prism When the two light beams collide with the object and then are combined by a special prism that opposes again, interference occurs when the objects are difficult to identify because they are high or low. It is a device using the principle that is visible to the observer in the direction of the polarized light beam in the analyzer (analyzer).

The differential microscopy shows the compressed traces (indentations) of conductive balls, etc., when the anisotropic conductive film (ACF) is attached to a panel of a flat panel display device such as a plasma display panel (PDP) or a liquid cyclic display (LCD). It is used when you want to observe.

An example of such a differential interference microscope is shown in FIG. 4.

As shown in FIG. 4, the first barrel 201 of the conventional differential microscope is installed at the bottom of the microscope, and has an objective lens 250 for condensing the light beam on the object and a light beam reflected from the object. The differential subprism 240 is provided to give a three-dimensional effect to the image of the indentation obtained by the.

The second barrel 202 is installed at an upper end of the first barrel 201, and a first beam splitter 230 for switching a path of the polarized light beam is installed therein.

The third barrel 203 is installed at the side end of the second barrel 220 and at the right end in the drawing, and a polarizer 220 for polarizing the light beam emitted from the light source 210 to facilitate image extraction of the indentation. The light source assembly 207 is installed on the side of the third barrel 203, the light source 210 for emitting a light beam for viewing the image of the indentation in the test object.

The fourth barrel 204 is installed at the upper end of the second barrel 220, and an analyzer 260 is installed inside the fourth barrel 204 to adjust the polarized light beam to the naked eye.

The fifth barrel 205 is installed at the upper end of the fourth barrel 204, and an imaging lens 270 for condensing the light beam adjusted by the analyzer 260 to the camera 20 is installed therein.

The sixth barrel 206 is installed at an upper end of the fifth barrel 205, and a second beam splitter 280 is installed therein. The camera assembly 208 is installed at the upper end of the sixth barrel 206.

The autofocus camera 209 is installed at the side end of the sixth barrel 220 and at the left end in the drawing.

However, in the conventional microscope having the above-described configuration, in order to focus the camera assembly 208, the entire microscope mounted with the autofocus camera 209 is moved up or down, or the test object 10 is moved up and down. Since it is necessary to perform a separate operation after acquiring an image with an area camera that takes a lot of time to acquire an image from a location, it takes a lot of time to focus, and therefore the inspection speed is slow and a lot of work is required.

The present invention is to solve the problem of excessive time required to focus in the above-described prior art, an object of the present invention is to project a regular pattern on the target object using a light source and a pattern of infrared or visible light and the line sensor It is to provide an optical system having an autofocusing module (autofocusing module) to find the position in focus by acquiring the information in the reflected shape in the.

Another object of the present invention is to provide a differential microscope that can significantly reduce the inspection time in the inspection equipment using the differential microscope by mounting an autofocusing module (autofocusing module) in place of the auto focusing camera.

In order to achieve the above object of the present invention, the present invention provides a light source for emitting a focusing light beam; A pattern of the focusing module for converting the light beam emitted from the light source into stripes; A second beam splitter for converting the striped light beam into an object to be focused; A line sensor which receives the light beam reflected by the second beam splitter after being reflected from the object; An automatic focus control unit for receiving line image information from the line sensor and analyzing the line image information and transmitting a position value to the motor; A motor which receives the position value from the controller and moves the ball screw; Ball screw to change the position of the microscope by changing the rotational motion of the motor to a linear motion; An LED, halogen or metal halide light source for emitting an inspection light beam; A polarizer for converting the light beam into a polarized state; A first beam splitter for converting the path of the polarized light beam to the object under test; An objective lens for condensing a light beam having a switched path to the object under test; Differential subprism for giving a three-dimensional effect to the image obtained from the subject; An analyzer for visually observing a polarized light beam having a three-dimensional image; And an imaging lens for condensing the adjusted light beam on the camera, wherein the second beam splitter provides an optical system for converting the light beam collected by the imaging lens to the camera.

The present invention also provides a first barrel provided with an objective lens and a differential interference prism therein, a second barrel disposed at an upper end of the first barrel and provided with a first beam splitter therein, and positioned at a side end of the second barrel, A third barrel provided with a polarizer and a light source, a seventh barrel disposed at an upper end of the second barrel and a second beam splitter provided therein, and a fourth barrel disposed at an upper end of the seventh barrel and provided with an analyzer therein; And a fifth barrel positioned at an upper end of the fourth barrel and an imaging lens provided therein, an inspection camera disposed at an upper end of the fifth barrel, and provided at the outside, a light source and a pattern for adjusting focus located at a side end of the seventh barrel. And a line sensor positioned at the side end of the sixth barrel and the seventh barrel, and projecting a predetermined pattern formed by the pattern of the light beam from the light source for focus adjustment onto the object and receiving image information of the pattern. Provided is an eighth barrel is provided that includes a differential focusing microscope comprising an autofocus module for focusing the inspection camera in real time.

The differential microscopic microscope of the present invention has an inspection light source and a focusing light source using an infrared light source or visible light projected to an arbitrary position outside the inspection area for the purpose of avoiding light interference with the inspection light source. It is done.

In addition, the differential differential prism, the polarizer and the analyzer are characterized in that each of the adjustable in the outside of the first barrel, the third barrel and the fourth barrel.

In addition, the inspection camera is characterized in that the area camera or line camera.

Hereinafter, an optical system and a differential interference microscope according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the optical system 100 according to the present embodiment includes a light source 110, a beam polarizer 120, a first beam splitter 130, a differential interference prism 140, an objective lens 150, An analyzer 160 and an imaging lens 170 are included. Arrows in the figure indicate the path of the light beam.

The light source 110 is for emitting a light beam for viewing the image of the indentation in the object 10, it is preferable to use a visible light using a metal halide, halogen or LED as a light source.

The beam polarizer 120 polarizes the light beam emitted from the light source 110 to facilitate image extraction of the indentation. The beam polarizer 120 polarizes the light beam by transmitting a light beam having a wavelength in a specific direction and reflecting a light beam having a wavelength in a different direction. .

The first beam splitter 130 is used to switch the path of the polarized light beam, and reflects the light beam from the light source 110 to the test object 10 and passes the light beam reflected from the test object 10 as it is. By sending to the camera 20, the operator can see the image of the indentation in the object 10 through the camera 20.

The differential subprism 140 is used to give a three-dimensional effect to the image of the indentation obtained by the light beam reflected from the inspected object 10, and may be used in any form known in the art.

The objective lens 150 is for condensing the light beam from the light source 110 on the object 10, and may be any type known in the art.

The analyzer 160 adjusts the polarized light beam having an image of three-dimensional indentation to be visually observed by a worker. The analyzer 160 transmits or blocks the light beam of a specific wavelength to the naked eye. Adjust to the light beam visible.

The imaging lens 170 is for condensing the light beam adjusted by the analyzer 160 to the camera 20, and any type of known lens may be used.

The operation of the optical system 100 of the present embodiment having the above-described configuration will be described.

The light beam emitted from the light source 110 is polarized by the polarizer 120, reflected by the first beam splitter 130, collected by the objective lens 150 across the prism 140, and irradiated onto the object 10. do.

Next, the reflected light beam passes through the objective lens 150 and the prism 140 while passing through the first beam splitter 130 while obtaining an image of the indentation in the object 10. The light beam is adjusted in a form visible to the human in the analyzer 160 and then focused by the imaging lens 170 and enters the line camera 20.

With the help of the light beam that has passed through the above path, the operator can check the image of the indentation through the line camera 20.

Next, the optical path of the autofocus control module will be described in detail with reference to FIG. 2.

As shown in FIG. 2, the light source emitted from the focusing illumination 310 using infrared light or visible light passes through the stripe pattern 320 to make a light beam of the stripe, and changes the direction to the second beam splitter 330. Projected onto the target object 360 to be focused. At this time, the light beams whose focus state is changed according to the height are reflected again and come to the second beam splitter 330 so that the direction is changed to form an image on the line sensor 340. Since the focus state is changed according to the height of the object, the stripes are changed. The well-focused position becomes thinner, and the streaks in the non-focused position become thicker. The image received by the line sensor 340 is sent to the automatic focusing control unit 304 to analyze the focus position.

Next, the differential interference microscope having the above-described optical system will be described in detail with reference to FIG. 3.

As shown in FIG. 3, since the microscope has the optical system 100 of FIG. 1 and the autofocus module of FIG. 2, the description of the same components will be omitted and the same reference numerals will be used.

The microscope includes autofocus modules 301, 302, 303, 304, 305, 306, 310, 320, 330 and 340 for real time focusing of the first to sixth barrels 101 to 105 and the inspected object 10 which are operatively coupled to each other.

The first barrel 101 is installed at the bottom of the microscope, and the objective lens 150 and the differential interference prism 140 are installed therein. Prism 150 is adjustable from the outside.

The second barrel 102 is installed at the upper end of the first barrel 101, and the first beam splitter 130 is installed therein.

The third barrel 103 is installed at the side end of the second barrel 102, at the right end in the drawing, and the polarizer 120 is installed in the inside so as to be adjustable from the outside by an adjustment knob not shown. A light source assembly 107 having a light source 110 installed therein is provided at a side surface of the 103.

The fourth barrel 104 is installed at an upper end of the seventh barrel 302, and an analyzer 160 is installed therein. The analyzer 160 can be adjusted from the outside by a control knob (not shown).

The fifth barrel 105 is installed at an upper end of the fourth barrel 104, and an imaging lens 170 is installed therein.

The camera assembly 108 is installed inside the inspection line camera 20 is installed.

The sixth barrel 301 is installed at the side end of the seventh barrel 302 and at the left end in the drawing, and includes a light source 310 and a pattern 320 therein.

The seventh barrel 302 is positioned at the top of the second barrel 102 and includes a second beam splitter 330 therein.

When the eighth barrel 303 is installed at the side end of the seventh barrel 302 and the right end in the drawing, it includes the line sensor 340 therein.

The line image information obtained from the line sensor of the eighth barrel 303 is sent to the automatic focusing control unit 304 to calculate the focus position 350 by analyzing the widths of the stripe patterns and convert the focus position to the motor 305 coordinate system. The position value is changed to give a movement command to the motor 305. As the motor 305 rotates, the ball screw 305 moves to move the position of the microscope to the focal position.

By continuously performing these focusing operations, even if the position of the microscope is moved in the left and right directions in the drawing, the focusing position is continuously adjusted so that the focus is always focused at the time when the movement in the left and right directions is completed. If applied, the time required for inspection can be greatly reduced.

As mentioned above, although the optical system and the differential interference microscope of the present invention have been described with reference to the preferred embodiment of the present invention, it will be apparent to those skilled in the art that various changes, modifications, or modifications can be made without departing from the spirit of the present invention.

According to the optical system of the present invention, by using infrared light as the focusing light source to avoid optical interference with the inspection light source, even if the two light sources are projected at the same position, there is no problem in the focusing operation and the image acquisition for the inspection work. .

In the case of projecting a stripe pattern in a position slightly out of the inspection area, visible light may be used as a focusing light source.

In addition, according to the differential differential microscope of the present invention, since the use of an autofocus module using a line sensor capable of real-time focusing instead of the conventional autofocus area camera can greatly reduce the inspection time.

In addition, since the line camera is used instead of the conventional area camera, the scanning operation is performed by moving in a one-dimensional array, thereby increasing the inspection area and increasing the data speed.

Even if the inspection work is performed using the area camera instead of the line camera, the use of the auto focusing module makes the inspection time unnecessary because it is unnecessary at the time required for focusing.

Claims (7)

A light source for emitting a focusing light beam; A pattern of a focusing module for converting the light beam emitted from the light source into stripes; A second beam splitter for converting the striped light beam into an object to be focused; A line sensor which receives the light beam reflected by the second beam splitter after being reflected from the object; An automatic focus control unit for receiving line image information from the line sensor and analyzing the line image information and transmitting a position value to the motor; A motor for moving the ball screw by receiving the position value from the controller; A ball screw for changing the position of the microscope by changing the rotational motion of the motor into a linear motion; An LED, halogen or metal halide light source for emitting an inspection light beam; A polarizer for converting the light beam into a polarized state; A first beam splitter for converting the path of the polarized light beam into an object under test; An objective lens for condensing the converted light beam on the inspected object; Differential subprism for giving a three-dimensional effect to the image obtained from the subject; An analyzer for visually observing a polarized light beam having the three-dimensional image; And And an imaging lens for condensing the adjusted light beam on the camera. The second beam splitter converts the light beam focused by the imaging lens to the camera. The method of claim 1, An optical system, characterized in that the light source for emitting the light beam for focus adjustment is an infrared light source. A first barrel provided with an objective lens and a differential interference prism therein; A second barrel positioned at an upper end of the first barrel and provided with a first beam splitter therein; A third barrel positioned at a side end of the second barrel and provided with a polarizer and a light source respectively in and out; A seventh barrel positioned at an upper end of the second barrel and provided with a second beam splitter therein; A fourth barrel positioned at an upper end of the seventh barrel and provided with an analyzer therein; A sixth barrel positioned at a side end of the seventh barrel and provided with a light source for focus adjustment and a pattern; An eighth barrel positioned at a side end of the seventh barrel and provided with a line sensor; A fifth barrel positioned at an upper end of the fourth barrel and provided with an imaging lens therein; An inspection camera positioned at an upper end of the fifth barrel; And Differential submicroscope, characterized in that it comprises an autofocus module for focusing the inspection camera in real time. The method of claim 3, The differential focusing microscope is characterized in that the focus light source is an infrared light source. delete The method of claim 3, The differential interference prism, the polarizer and the analyzer are adjustable in the outer surface of the first barrel, the third barrel and the fourth barrel respectively. The method of claim 3, The inspection camera is a differential microscope, characterized in that the line camera or area camera.

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