KR100778535B1 - Apparatus for formation of fine wave pattern and method for thereof - Google Patents

Abstract

An apparatus for forming of a fine wave pattern and method for a method thereof are provided to form a relatively large horizontal wave pattern by driving an X-Y axial stage and to form a fine vertical wave pattern by driving a processing tool with a PZT(Piezoelectric) actuator. An apparatus for forming of a fine wave pattern comprises an X-Y axial stage(110), a Z axial stage(160), a processing tool(120), and a controller(130). A sample(10) is placed on the X-Y axial stage, and the X-Y axial stage reciprocates to the right and left, and moves back and forth along a pattern forming direction. The Z axial stage is installed to one part of the X-Y axial stage to move up and down on the sample. The processing tool is fixed to the Z axial shaft to vibrate vertically as contacting with the sample. The controller drives the X-Y axial stage, the Z axial stage, and the processing tool simultaneously. Horizontal wave patterns and vertical wave patterns finer than the horizontal wave patterns are formed on the sample by the X-Y axial stage, the Z axial stage, and the processing tool. The processing tool is vibrated vertically by a PZT(Piezoelectric) actuator(140).

Description

Apparatus for formation of fine wave pattern and method for

1 is a perspective view showing a conventional straight working pattern,

Figure 2 is a schematic diagram of a fine wave pattern processing apparatus according to an embodiment of the present invention,

3 is a perspective view of an embodiment of a fine wave pattern formed by FIG.

4 is a plan view of FIG.

5 is a side view of FIG. 3;

6 is a front view of FIG. 3;

7 is a front view according to another embodiment of FIG. 3;

8 is a flowchart of a method of processing a fine wave pattern using the apparatus of FIG. 2.

<Explanation of symbols for the main parts of the drawings>

10.Psalms

100 ... Micro wave pattern processing device 110 ... X-Y axis stage

120 processing tool 130 control unit

140 ... PZT actuator 151 ... left and right wave pattern

152 ... Upper and down wave pattern 160 ... Z axis stage

The present invention relates to an apparatus and method for processing a fine wave pattern, and more particularly, to an apparatus and method for processing a fine wave pattern of a mold.

In the above fine pattern processing method, a linear pattern forming method using a linear shaping method has been proposed in the related art.

According to the above conventional case, the shape of the formed pattern has a simple straight structure, and the wave structure of the pattern has a single structure by the up and down fluctuations, there is a simple manufacturing process.

However, when the micro pattern of the metal or plastic material is processed using the conventional straight processing method as described above, surface modification may not be performed properly. For example, when the optical film is manufactured, the luminance characteristics of the manufactured optical film may be There is a problem in that there is a limit in the operation of the optical characteristics such as brightness improvement is not excellent.

According to the present invention was created to solve the above-described problems, by forming a fine wave pattern that swings up and down and left and right along the processing direction, it is possible to obtain a surface modification effect of the metal or plastic material using the optical It is an object of the present invention to provide an apparatus and method for processing a fine wave pattern which can easily change optical characteristics when manufacturing a fine pattern mold.

Other objects and advantages of the invention will be described below and will be appreciated by the embodiments of the invention. Furthermore, the objects and advantages of the present invention can be realized by means and combinations indicated in the claims.

The fine wave pattern processing apparatus of the present invention for achieving the above object, the X-Y axis stage is provided with a specimen on the upper and reciprocating (Y-axis) back and forth along the left and right (X-axis) reciprocating movement and pattern processing direction; A Z-axis stage installed at one side of the X-Y-axis stage and vertically reciprocating to the upper surface of the specimen; A processing tool fixed to the Z-axis stage and vertically reciprocating the upper and lower surfaces of the specimen according to the movement of the Z-axis stage and vertically moving in contact with the specimen; And a left and right movement period signal and a left and right movement width signal and a pattern processing direction signal set in relation to the left and right reciprocating movement and the pattern processing direction of the XY axis stage, and the up and down reciprocating cycle signal and the up and down reciprocation movement set up and down in the Z axis stage. And a control unit which simultaneously controls driving of the XY axis stage, the Z axis stage, and the processing tool using a depth signal and an up and down vibration period signal set up and down with respect to the up and down vibration movement of the machining tool. The left and right wave patterns oscillated in the lateral direction by the driving of the XY axis stage, the Z axis stage and the processing tool, and the vertical wave is perpendicular to the pattern direction of the left and right wave patterns, compared to the left and right wave patterns A vertical wave pattern having a finer shape is formed.

The control unit may further set a left and right vibration period signal and a left and right vibration width signal for simultaneously driving up and down and left and right vibrations of the processing tool, and the vibration movement of the processing tool may include up and down vibration period signals, left and right vibrations of the control tool. It may be driven by a PZT (Piezoelectric) actuator that is operated by receiving the vibration period signal, the vertical vibration depth signal, the left and right vibration width signal.

The cross-sectional shape of the specimen with respect to the left and right reciprocating direction may be adjusted by the left and right movement width signal or the vertical vibration depth signal set in the controller.

In addition, the specimen may be a metal or a nonmetal material.

In addition, the fine wave pattern processing method of the present invention for achieving the above object, the specimen preparation step of providing a specimen on the X-Y axis stage; The XY axis stage is reciprocated left and right (X-axis) in response to the left and right movement period signal set in the control unit and the left and right movement width signal, and reciprocated back and forth (Y axis) in accordance with the pattern processing direction signal of the control unit set in the pattern processing direction. A XY axis stage driving step that is moved; While the XY axis stage is being driven, the Z axis stage to which the processing tool is fixed is reciprocated up and down (Z axis) at the same time according to the up and down reciprocation period signal and the up and down reciprocation depth signal set in the controller. A machining tool driving step of vertically moving the machining tool in a state in which the machining tool is in contact with the specimen in accordance with a vertical vibration period signal and a vertical vibration depth signal set in a control unit; And a left and right wave pattern oscillated in the left and right directions on the specimen by the driving of the XY axis stage, the Z axis stage, and the processing tool, and vertically oscillated in the vertical direction and in the left and right wave pattern. Comprising a fine wave pattern forming step of forming a vertical wave pattern having a finer shape than that.

In the above method, the control unit, the left and right vibration period signal and the left and right vibration width signal for driving the vertical vibration and the left and right vibration of the machining tool at the same time is further set, the vibration movement of the machining tool, It can be driven by a PZT (Piezoelectric) actuator that is operated by receiving the up and down vibration period signal, the left and right vibration period signal, the up and down vibration depth signal, the left and right vibration width signal.

In addition, in the above processing method, the cross-sectional shape of the specimen with respect to the left and right reciprocating direction can be adjusted by the left and right movement width signal or the vertical vibration depth signal set in the control unit.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. It should be interpreted as meanings and concepts corresponding to the technical idea of the present invention based on the principle of definition.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

1 is a perspective view showing a conventional straight processing pattern, Figure 2 is a schematic view of a fine wave pattern processing apparatus according to an embodiment of the present invention, Figure 3 is a perspective view of an embodiment of a fine wave pattern formed by FIG. 4 to 7 are a plan view, a side view, a front view, and a front view according to another embodiment of FIG. 3, and FIG. 8 is a flowchart of a method of processing a fine wave pattern using the apparatus of FIG. 2.

As shown in FIG. 2, the micro wave pattern processing apparatus 100 according to the embodiment of the present invention includes an XY axis stage 110, a Z axis stage 160, a processing tool 120, and a controller 130. do.

The specimen 10 for pattern processing is provided on the upper part of the XY axis stage 110, the XY axis stage 110 is capable of reciprocating left and right (X axis) in a state in which the specimen 10 is fixed to the upper part It is possible to reciprocate back and forth (Y axis) along the pattern processing direction.

Here, the specimen 10 may be a non-metallic material such as metal or plastic.

The Z-axis stage 160 is installed on one side of the X-Y-axis stage 110, and may be reciprocated vertically (Z-axis) to the upper surface of the specimen 10 in a state in which the processing tool 120 is fixed.

In addition, the processing tool 120 is installed and fixed to the Z-axis stage 160 is a part that is vertically oscillated in contact with the upper surface of the specimen 10 in accordance with the movement of the Z-axis stage 160.

The control unit 130 is a left and right reciprocating movement of the XY axis stage 110 and the left and right movement period signal, the left and right movement width signal and the pattern processing direction signal set in relation to the processing direction, the vertical reciprocation of the Z-axis stage 160 The XY axis stage 110, Z using the up and down reciprocation period signal and the up and down reciprocation depth signal set with respect to the movement, and the up and down oscillation cycle signal and the up and down vibration depth signal set with respect to the up and down vibration movement of the processing tool 120. It is a part for simultaneously controlling the driving of the shaft stage 160 and the processing tool 120.

The controller 130 may be programmed and driven by receiving information about each signal from the outside.

On the other hand, the processing tool 120 may be driven by a PZT (Piezoelectric) actuator 140 is operated by receiving the up and down vibration period signal and the up and down vibration depth signal of the control unit 130. According to the PZT (Piezoelectric) actuator 140 there is an advantage in the fine and delicate pattern processing and the shape change of the pattern.

Here, the driving source of the machining tool 120 is not limited to the above-described Piezoelectric (PZT) actuator 140, and may be changed to any driving apparatus capable of driving the machining tool 120 in motion.

According to the present invention as described above, as shown in Figs. 3 to 5, the XY axis stage 110, Z axis stage 160 and the processing tool 120 at the same time through the signal control of the control unit 130 As it is performed, the left and right wave patterns 151 having a relatively large shape swinging on the specimen 10 in the lateral direction by driving the XY axis stage 110 and the PZT (Piezoelectric) actuator 140 By the driving of the machining tool 120, the vertical wave pattern 152 that is perpendicular to the pattern direction of the left and right wave patterns and is swung in the vertical direction and has a finer shape than the left and right wave patterns 151 may be formed.

4 to 5, the left and right movement period (A) and the left and right movement width (B) for the left and right reciprocating movement of the XY axis stage 110, the up and down vibration for the up and down reciprocating movement of the processing tool 120 The period (C) and the vertical vibration depth (D) may be changed and adjusted according to the left and right moving period signal, the left and right moving width signal, the up and down vibration period signal, and the up and down vibration depth signal, respectively, which are the signals set in the controller 130. As a result, the shape of the fine wave pattern may also be modified in various forms.

On the other hand, according to the present invention, the control unit 130 may be further set to the left and right vibration period signal and the left and right vibration width signal which is the periodic information on the left and right vibrations so that the vertical vibration and the left and right vibrations of the processing tool 120 is simultaneously driven Can be. Here, the left and right vibration of the processing tool 120 means a vibration of a minute period compared to the left and right reciprocating movement period of the X-Y axis stage 110. In this case, the PZT (Piezoelectric) actuator 140 may further control the fine motion of the machining tool 120 by receiving the left and right vibration period signal and the left and right vibration width signal as well as the vertical vibration period signal and the vertical vibration depth signal. have.

That is, the processing tool 120 can form a finer and finer pattern than in FIGS.

Meanwhile, although the cross-sectional shape of the specimen 10 with respect to the left and right reciprocating direction of the XY-axis stage 110 is illustrated in FIG. 3 or FIG. 6, the cross-sectional shape of the test piece 10 may be triangular in shape. By using the control of changing each signal such as the movement width signal and the vertical vibration depth signal, it can be transformed into a variety of shapes such as the semicircle of FIG. 7 or the trapezoid, rectangle, polygon, etc. other than the triangular shape. .

As described above, the micro wave pattern is processed by the stage motion control using the reciprocating movement of the stages 110 and 160, and the vertical wave is driven by the PZT actuator 140, so that the fine wave pattern is controlled by the stage motion control. By processing the microwave pattern of a smaller period can be processed a micropattern of a smaller period in the fine wave pattern.

That is, according to the present invention, it is possible to form a complex and sophisticated fine wave pattern that is fluctuated by periodic fine displacements in the up, down, left and right directions along the machining direction, thereby using it to obtain a surface modification effect of a metal or plastic material. In addition, there is an effect that can easily change and improve the optical characteristics such as the luminance characteristic when manufacturing the optical fine pattern mold.

Hereinafter, a method of processing a fine wave pattern using the fine wave pattern processing apparatus 100 of the present invention having the above configuration will be described in detail with reference to FIGS. 1 to 8.

First, the specimen 10 to form a pattern is provided on the X-Y axis stage 110 (S100).

Next, the XY axis stage 110 is reciprocated left and right (X-axis) in accordance with the left and right movement period signal and the left and right movement width signal set in the control unit 130, the control unit 130 is set for the pattern processing direction In accordance with the pattern processing direction of the signal is reciprocated back and forth (Y-axis) (S110).

In addition, the Z-axis stage 160 to which the processing tool 120 is fixed according to the up / down reciprocation period signal and the up / down reciprocation depth signal set in the control unit 130 while the XY axis stage 110 is driven. The upper and lower (Z-axis) reciprocating movement of the upper surface of the specimen 10, the processing tool 120 is in contact with the specimen 10 in accordance with the vertical vibration period signal and the vertical vibration depth signal set in the controller 130 Vertical vibration is moved in one state (S120).

Next, the left and right wave patterns 151 oscillated in the left and right directions on the upper surface of the specimen 10 by the driving of the XY axis stage 110, Z axis stage 160 and the processing tool 120 as described above. And a vertical wave pattern 152 that is oscillated in a vertical direction perpendicular to the pattern direction of the left and right wave patterns to form a final fine wave pattern (S130).

Of course, the vertical vibration and reciprocating movement of the processing tool 120 receives the vertical vibration period signal, the vertical vibration depth signal, the left and right vibration period signal and the left and right vibration width signal of the controller 130 as described above. It may be driven by a piezoelectric (PZT) actuator 140 that is actuated.

In addition, the control unit 130 may further set the left and right vibration period signal and the left and right vibration width signal of the machining tool 120, in this case, as well as the vertical vibration of the machining tool 120 as well as the left and right vibrations Of course, it is possible to form a fine and sophisticated pattern.

As described above, the present invention has been described by means of limited embodiments and drawings, but the present invention is not limited thereto and is described below by the person skilled in the art and the following description of the present invention. Various modifications and variations are possible without departing from the scope of the appended claims.

According to the apparatus and method for processing a micro wave pattern according to the present invention, it is possible to form a complex and fine wave pattern fluctuated by periodic micro displacement of up and down and left and right along the processing direction, thereby using a metal or plastic material. The surface modification effect can be obtained and the optical properties can be easily changed at the time of manufacturing the optical fine pattern mold.

Claims (7)

An X-Y axis stage provided with a specimen on the upper side and reciprocating back and forth (Y axis) along a left and right (X axis) reciprocating movement and a pattern processing progress direction; A Z-axis stage installed at one side of the X-Y-axis stage and vertically reciprocating to the upper surface of the specimen; A processing tool fixed to the Z-axis stage and vertically reciprocating the upper and lower surfaces of the specimen according to the movement of the Z-axis stage and vertically moving in contact with the specimen; And The left and right reciprocating period signal and the left and right drift period signal and the pattern processing direction signal, which are set in relation to the left and right reciprocating movement and pattern processing direction of the XY axis stage, and the up and down reciprocating period signal and up and down reciprocating depth, which are set in the vertical movement And a control unit for simultaneously controlling the driving of the XY axis stage, the Z axis stage, and the processing tool by using a vertical vibration period signal and a vertical vibration depth signal set with respect to the vertical vibration movement of the processing tool. The left and right wave patterns oscillated in the lateral direction by the driving of the XY axis stage, the Z axis stage and the processing tool, and the vertical wave is perpendicular to the pattern direction of the left and right wave patterns, compared to the left and right wave patterns The fine wave pattern processing apparatus, characterized in that the vertical wave pattern having a more fine shape is formed. The method of claim 1, wherein the control unit, The left and right vibration period signal and the left and right vibration width signal for simultaneously driving up and down and left and right vibrations of the processing tool are further set. The vibration movement of the processing tool, Fine wave pattern processing apparatus characterized in that it is driven by a PZT (Piezoelectric) actuator that is operated by receiving the vertical vibration period signal, the left and right vibration period signal, the vertical vibration depth signal, the left and right vibration width signal of the control unit. According to claim 1, wherein the cross-sectional shape of the specimen with respect to the left and right reciprocating direction, Fine wave pattern processing apparatus characterized in that the adjustment by the left and right movement width signal or the vertical vibration depth signal set in the control unit. The method of claim 1, wherein the specimen, Microwave pattern processing apparatus, characterized in that the metal or non-metal material. A specimen preparation step of preparing a specimen on the X-Y axis stage; The XY axis stage is reciprocated left and right (X-axis) in response to the left and right movement period signal set in the control unit and the left and right movement width signal, and reciprocated back and forth (Y axis) in accordance with the pattern processing direction signal of the control unit set in the pattern processing direction. A XY axis stage driving step that is moved; While the XY axis stage is being driven, the Z axis stage to which the processing tool is fixed is reciprocated up and down (Z axis) at the same time according to the up and down reciprocation period signal and the up and down reciprocation depth signal set in the controller. A machining tool driving step of vertically moving the machining tool in a state in which the machining tool is in contact with the specimen in accordance with a vertical vibration period signal and a vertical vibration depth signal set in a control unit; And The left and right wave patterns oscillated in the lateral direction by the driving of the XY axis stage, the Z axis stage and the processing tool, and the vertical wave is perpendicular to the pattern direction of the left and right wave patterns, compared to the left and right wave patterns The fine wave pattern processing method comprising the step of forming a fine wave pattern to form a vertical wave pattern having a finer shape. The method of claim 5, wherein the control unit, The left and right vibration period signal and the left and right vibration width signal for simultaneously driving up and down and left and right vibrations of the processing tool are further set. The vibration movement of the processing tool, A fine wave pattern processing method characterized in that it is driven by a PZT (Piezoelectric) actuator that is operated by receiving the vertical vibration period signal, the left and right vibration period signal, the vertical vibration depth signal, the left and right vibration width signal of the controller. According to claim 5, wherein the cross-sectional shape of the specimen with respect to the left and right reciprocating direction, Fine wave pattern processing method characterized in that the control by the left and right movement width signal or the vertical vibration depth signal set in the control unit.

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