KR100774035B1 - Device under test mounting board and probe card - Google Patents

Abstract

There is provided a device-to-measurement board for electrically connecting an electronic device and a test apparatus for testing the electronic device. The device on which the device to be measured is mounted includes an IC socket for supporting an electronic device, a socket substrate for supporting the IC socket, and a test signal for receiving a test signal supplied to the electronic device from the test apparatus and supplying the IC socket to the IC socket. And a low frequency signal connector for receiving from the test apparatus a signal having a frequency lower than the test signal supplied by the high frequency signal connector to the IC socket and supplying the IC socket to the IC socket. The distance from the mounting position of the IC socket to the low frequency signal connector is longer than the distance from the mounting position of the IC socket to the high frequency signal connector.

Electronic Devices, Test Equipment, IC Sockets, Connectors, Low Frequency Signals, High Frequency Signals, Probe Cards

Description

Board and probe card for device under measurement {DEVICE UNDER TEST MOUNTING BOARD AND PROBE CARD}

1 is a view for explaining a first embodiment of a device-mounted board according to the present invention.

FIG. 2 is a view for explaining a second embodiment of the device-mounted board according to the present invention.

FIG. 3 is a view for explaining a third embodiment of the device-mounted board according to the present invention.

It is a figure for demonstrating the various structural examples of the device interface part of IC test apparatus. Fig. 4A shows an example of the configuration of the device interface section, and Fig. 4B shows another example of the configuration of the device interface section.

5 is a diagram illustrating an example of a detailed configuration of a performance board 300 that is an example of a board on which a device to be measured is mounted.

6 is a diagram illustrating an example of a cross-sectional enlarged view of the socket substrate 350. FIG. 6 (a) shows an example of an enlarged view in the vicinity of the low-frequency through hole 374. FIG. 6 (b) shows another example of an enlarged view in the vicinity of the low frequency through hole 374. FIG. 6 (c) shows an example of an enlarged view of the vicinity of the high frequency single-sided hole 382.

FIG. 7 is a diagram illustrating an example of measurement results of reflection components generated in each example described with reference to FIG. 6.

8 is a diagram illustrating another example of an enlarged vicinity of the high frequency single-sided hole 382.

9 is a diagram showing a detailed configuration example of a probe card 400 which is an example of a board on which a device to be measured is mounted.

10 is a diagram illustrating a test of an electronic device.

11 is a diagram illustrating an example of a surface view of the support substrate 30.

It is a figure which shows an example of the cross section of the support substrate 30 and the connection unit side connector 64.

13 is a diagram illustrating another example of the surface view of the support substrate 30.

It is a figure for demonstrating the whole structure of IC test apparatus.

It is a figure for demonstrating the conventional structure of the board | substrate with a to-be-measured device.

The present invention relates to a test apparatus. In particular, the present invention is generally referred to as a performance board, a probe card, and a socket board, and includes a device under test board, a device under test board, and a test apparatus main body used for mounting a device under test (DUT). It relates to the structure of the connection unit for connecting the. In addition, this application is related to the following Japanese patent application. Designated countries in which attachment by reference to a document is recognized are incorporated into the present application with reference to the contents described in the following application and are a part of the description of the present application.

Japanese Patent Application No. 2002-317287 Filed Oct. 31, 2002

Japanese Patent Application No. 2002-338560 Filed November 21, 2002

FIG. 14 shows an outline of a configuration of an IC test apparatus. First, the configuration of the IC test apparatus will be briefly described with reference to FIG.

The IC test apparatus is largely divided into mainframe 1, testhead 2, and device interface unit (DUT interface unit) 3, mainframe 1 and testhead 2 are connected by cable 4, and device interface unit 3 is testhead 2 It is mounted on and connected to the test head 2.

The device interface 3 is in this example a board 11, a mainboard (mainboard unit) 10 with a plurality of cables (e.g. thousands) of cables 12, a board 20 for mounting a device under test, commonly referred to as a performance board, and an IC socket. It consists of 320, and the board | substrate 11 is equipped with the connector (not shown) for connecting with the test head 2 in the lower surface.

The lower end of the cable 12 is soldered to the board 11 or connected via a connector, and the upper end is connected to the board under test 20 through a connector or the like (not shown). In the present example, one IC socket 320 is mounted on the board on which the device to be measured is mounted. 14 to 40 show a device under measurement (IC under measurement) mounted on the IC socket 320. 13 denotes a cover covering the cable 12.

Fig. 15 shows the connection relationship between the conventional device of the device under test 20 mounted on the device under test 20 and the device under test 20 mounted on the device under test 20 and the connector (the connector on the upper end of the cable 12) in the IC test apparatus having the above configuration. Is schematically illustrated, and the illustration of the IC socket 320 is omitted.

The device 20 to be mounted on the device to be measured has a multilayer printed wiring board structure, and electrode pads 21 and 22 required on the upper and lower surfaces thereof are formed for connecting the device under measurement 40 and the connector 15, respectively.

The upper and lower electrode pads 21 and 22 are connected to each other as the through holes 23 are formed in the electrode pads 21 and 22, respectively, and the through holes 23 are connected by the inner layer wiring pattern 24. The measurement device mounting board 20 employs a multilayer printed wiring board structure in which a through hole 23 is used to connect the electrode pads 21 and 22 and the inner layer wiring pattern 24 (see Non-Patent Document 1, for example). In addition, arrows in FIG. 14 indicate the flow of electrical signals.

By the way, the IC test apparatus has been speeded up, and a high speed signal such as 4 Gbps is used for the high speed test of the device under test.

As the signal speeds up, the design around the through-hole 23 has an influence in terms of reflection and band-blocking in the conventional board under measurement device 20 having the structure as shown in FIG.

That is, as shown by the dotted line in Fig. 15, since the stub portion (here, the unnecessary portion as the transmission line is referred to as the stub portion) 25 in the through hole 23 is large (long), the capacity of this stub portion 25 is problematic. As a result, waveform distortion and capacitive reflection occur, thereby degrading the signal quality (waveform quality) and making it impossible to cope with the high speed of the signal.

One of the objectives of the present invention is to provide a device under test device board capable of responding to a high-speed signal by reducing the stub capacity in view of this problem, and a device interface of an IC test apparatus including the device under test board. It is in providing wealth.

Moreover, when testing electronic devices, such as a semiconductor element, conventionally, the test apparatus which produces | generates a test signal, the performance board equipped with an electronic device, the connection unit which electrically connects a test apparatus and a performance board is used. The performance board and the connection unit are provided opposite to each other, and the connector on the connection unit side receives the test signal from the test apparatus and supplies the test signal to the electronic device through the connector on the performance board side.

The connector on the connection unit side and the connector on the performance board side are respectively fixed at predetermined positions of the connection unit and the performance board, and electrically connect the test apparatus and the performance board by engaging corresponding connectors (for example, , Patent Document 1). For example, each connector is installed around the outermost perimeter of the connection unit and performance board.

However, since the connector on the connection unit side is fixed, it was difficult to connect the performance board and the connection unit having different positions of the connector. For this reason, it was necessary to prepare each connection unit in which the corresponding connector of the performance board from which a connector differs was arrange | positioned, respectively.

For example, when it is desired to supply a high frequency test signal to an electronic device, it is necessary to arrange the performance board side connector around the electronic device in order to shorten the transmission line length from the performance board side connector to the electronic device. In this case, the connector on the connection unit side also needs to be disposed corresponding to the position of the performance board side connector. However, since the conventional connection unit side connector is fixed, it is necessary to prepare a connection unit for a high frequency signal.

[Patent Document 1]

Patent Publication No. 2000-81461 (paragraphs 5 and 1-2)

[Non-Patent Document 1]

Kiyoshi Takagi, "Build-up Multilayer Printed Circuit Board Technology," Daily Industrial Newspaper, June 20, 2000, p. 7-8

Accordingly, an object of the present invention is to provide a device mounting board, a probe card, and a device interface unit capable of solving the above problems.

This object is achieved by combining the features described in the independent claims in the claims. The dependent claims also define more advantageous specific examples of the invention.

In order to achieve the above object, a first aspect of the present invention is a connection unit for electrically connecting a device-mounted board on which an IC socket is mounted and a test apparatus for testing an electronic device supported on the IC socket. A support substrate provided opposite the device mounting board, and a connection unit side connector provided on the support substrate so that the position on the support substrate can be changed, and connected to the performance board side connector included in the device mounting board under measurement; It provides a connection unit comprising.

The support substrate may have a structure capable of supporting the connection unit side connector by moving the connector to the position corresponding to the other arrangement position when the performance board side connector is in a different arrangement position in accordance with the type of the device under test board.

The support board included in the connection unit can be attached to or detached from the connector on the connection unit side, and the connector on the connection unit side is detached from the support board, so that the arrangement of the performance board side connector corresponding to the other measurement device mounting board is different. You may have a structure which can be replaced with the other support substrate which becomes a positional relationship.

It is preferable that a connection unit includes the several connection unit side connector provided on a support substrate so that mutual distance may change on a support substrate. The connector on the connection unit side may be provided so that the distance to the mounting position of the IC socket can be changed when the connection unit and the board under measurement device are connected.

The connection unit further includes a connection cable having one end fixed to the connector on the connection unit side and electrically connecting the connector on the connection unit side to the test apparatus, and the supporting substrate is positioned at a position supporting the connector on the connection side unit. You may have the through-hole of the magnitude | size which a connector of a connection unit side can pass.

The connection unit further includes a connection cable having one end fixed to the connector on the connection unit side and electrically connecting the connector on the connection unit side to the test apparatus, and the supporting substrate is provided between a plurality of changeable positions of the connector on the connection unit side. It may be provided with a through hole through which the connecting cable passes.

In addition, the support substrate may support the connection unit side connector so that a position can be changed in either the radial direction and the circumferential direction centering on the mounting position of the IC socket when the connection unit and the device under test are mounted. .

Moreover, in the surface substantially parallel to a support substrate, the cross section of an IC socket and a connector of a connection unit side is respectively rectangular, and when a connector is connected to the position closest to the mounting position of an IC socket in a radial direction, The supporting substrate may support the connector on the connection unit side such that the long side of the connector end face of the connection unit faces the closest side of the IC socket end face.

In addition, the support substrate may include a plurality of connector positioning members each provided at a plurality of predetermined positions on the support substrate and designating a position where the connector on the connection unit side can be changed.

Further, the connector on the connection unit side has grooves or protrusions that engage with each other, and the plurality of connector positioning members have protrusions or grooves, and the supporting substrate has a groove or protrusion on the connector on the connection unit side connector and a protrusion or groove on the connector positioning member. The connector on the connection unit side may be supported by engaging.

In addition, the device-to-measurement mounting board mounts a plurality of IC sockets, and the connection unit includes a plurality of connection unit side connectors provided corresponding to the plurality of IC sockets, and the supporting substrate supports each of the plurality of connection unit side connectors. You may support so that a position may change on a board | substrate.

Further, the connection unit is provided on the supporting substrate to support the small-diameter performance board positioning member for determining the position of supporting the device-mounted board having a diameter less than or equal to a predetermined size, and the device-to-measured board having a diameter larger than a predetermined size. A large-diameter performance board positioning member for determining a position to be made, and on a supporting substrate, a distance from the mounting position of the IC socket to the large-diameter performance board positioning member is determined from the mounting position of the IC socket to the small-diameter performance board position. It may be longer than the distance to the crystal member.

According to a second aspect of the present invention, there is provided a device under test board for electrically connecting an electronic device and a test apparatus for testing the electronic device, comprising: an IC socket for supporting the electronic device, a socket substrate for supporting the IC socket, A high frequency signal connector for receiving a test signal supplied to an electronic device from the test apparatus and supplying it to the IC socket, and a signal having a frequency lower than that of the test signal supplied by the high frequency signal connector to the IC socket and supplying the IC socket to the IC socket. A low-frequency signal connector is provided, wherein the distance from the mounting position of the IC socket to the low-frequency signal connector is longer than the distance from the mounting position of the IC socket to the high-frequency signal connector.

The socket board is electrically connected to the low-frequency signal connector and electrically connected to the high-frequency signal connector so that the high-frequency single-sided hole and the socket board are formed from a lower surface on which the high-frequency signal connector is installed to a mid-layer position that is less than the upper surface of the socket board. In the present invention, a lower frequency through hole may be provided on the outer circumferential side of the socket substrate than the high frequency single-sided hole and penetrates from the lower surface of the socket substrate to the upper surface on which the electronic device of the socket substrate is mounted.

The socket substrate is electrically connected to the high frequency signal pin of the electronic device, and is provided on the outer circumferential side of the socket substrate than the high frequency through hole penetrating from the upper surface to the lower surface of the socket substrate and the high frequency through hole in the socket substrate. The low frequency single-sided holes may be electrically connected to the pins for low frequency signals, and formed from an upper surface of the socket substrate to a middle layer position that is lower than the lower surface of the socket substrate.

In the socket substrate, the wiring is formed in a plurality of layers in the depth direction, and the low frequency signal wiring which is formed somewhere in the plurality of layers and electrically connects the low frequency through hole and the low frequency single-sided hole, among the plurality of layers, the low frequency signal wiring It may have a high frequency signal wiring formed in the lower surface side of the socket substrate rather than the formed layer and electrically connecting the high frequency single-sided hole and the high frequency through-hole.

According to the third aspect of the present invention, in a device under test board for electrically connecting an electronic device and a test apparatus for testing the electronic device, the electronic device is provided on the lower surface of the socket substrate and the socket substrate having wiring formed in a plurality of layers, And a connector for receiving a test signal from a test apparatus for supplying the device, wherein the socket substrate is formed on one layer of the socket substrate, and is formed on the upper layer of the socket substrate rather than the signal wiring and signal wiring for transmitting the test signal to the electronic device. A plurality of upper ground (ground, hereinafter referred to as "GND") wirings connected to the ground potential, lower layer GND wirings formed on the lower side layer of the socket substrate than the signal wirings, and connected to the ground potentials respectively, and the sockets from the lower surface of the socket. A plurality of upper layer GNs having one-sided holes formed toward the upper surface of the circuit board to electrically connect the connector and signal wiring; At least a part of the D wiring and the distance in the horizontal direction of the one-sided hole are larger than the distance in the horizontal direction of the lower layer GND wiring and the one-sided hole.

Among the plurality of upper layer GND wirings, the distance in the horizontal direction of the upper layer GND wiring and the one-sided hole closest to the signal wiring is substantially the same as the distance in the horizontal direction of the lower layer GND wiring and the one-sided hole, and the horizontality of the other upper GND wiring and the one-sided hole is It is preferable to be smaller than the distance in the direction.

In addition, the one-sided hole may be formed from the lower surface of the socket to a middle layer position that is less than the upper surface of the socket.

According to the fourth aspect of the present invention, in a device under test board that electrically connects an electronic device and a test apparatus for testing the electronic device, the electronic device is provided on the lower surface of the socket substrate and the socket substrate having wiring formed in a plurality of layers, A connector that receives a test signal from a test apparatus supplied to the device, wherein the socket substrate is formed on one layer of the socket substrate to transmit a test signal to the electronic device, and a middle layer that is less than the upper surface of the socket from the bottom of the socket. One side hole formed up to the position and electrically connecting the connector and the signal wiring, and in a plurality of layers different from the signal wiring, in the case where the one side hole is extended to the upper surface of the socket substrate, the one side hole is formed except the area where the one side hole is formed. A device-mounted beam having a plurality of GND wires connected thereto Provide de

According to a fifth aspect of the present invention, in a board used for interfacing an electric signal for testing a device under test in an IC test apparatus, the board has a multilayer printed wiring board structure and one end of the inner layer wiring pattern is through-hole. A ground layer connected to the other end and connected to a surface buried via hole (SVH), and having a top and bottom ground layer interposed therebetween, wherein the ground layer at the periphery of the SVH is a stub portion of the SVH. The distance between the stub portion and the ground layer is formed so as to reduce the deterioration of the transmission characteristics accompanying the presence of the wire, and the wiring between both sides of the front and back is formed by the connected SVH, the inner layer wiring pattern, and the through hole. Provided is a board on which a device to be measured is mounted.

The device-to-be-measured board includes a multilayer printed circuit board having a multilayer structure having a layer of an inner layer wiring pattern and a ground layer, and is connected to one of both ends of the inner layer wiring pattern after pasting at least two multilayer printed circuit boards. Through-holes are formed to form a multilayer printed wiring board, and the predetermined through-holes formed in the step of the multilayer printed circuit board are applied as SVH connected to the other of both ends of the inner layer wiring pattern, and the conductor widths of the inner wiring pattern The predetermined characteristic impedance may be formed based on the distance of the ground layer.

According to a sixth aspect of the present invention, a device interface portion of an IC test apparatus that interfaces an electrical signal passing between a test head and a device under test is used to interface an electrical signal for testing a device under test. The board under test has a multilayer printed wiring board structure, one end of the inner layer wiring pattern is connected to the through hole, and the other end is connected to the surface buried via hole (SVH), and the ground layer formed on the upper and lower layers with the inner layer wiring pattern layer interposed therebetween. Wherein the ground layer at the periphery of the SVH forms a distance between the stub portion and the ground layer to reduce degradation of transmission characteristics associated with the presence of the stub portion of the SVH, the connected SVH, inner layer wiring pattern, and through hole Provided is a device interface unit characterized in that wiring between both sides is formed.

In addition, the summary of the present invention does not enumerate all the necessary features of the present invention, and combinations of these feature groups may be inventions.

EMBODIMENT OF THE INVENTION Hereinafter, although this invention is demonstrated through embodiment of invention, the following embodiment does not limit the invention contained in a claim, and all the combination of the feature described as embodiment is a solution of the invention. It is not necessarily necessary.

FIG. 1 schematically shows an embodiment of a device-mounted board according to the present invention, in which parts corresponding to those of FIG. 15 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this example, the device-mounted board 50 having the multilayer printed wiring board structure uses through holes 23 and surface buried via holes (SVHs) 51 for connecting the upper and lower electrode pads 21 and 22 and the inner layer wiring pattern 24.

One end of each inner layer wiring pattern 24 is connected to the through hole 23 at one end thereof, and the other end thereof is connected to the SVH 51, and the upper and lower surfaces of the inner layer wiring pattern 24 correspond to the electrode pads. The wiring between 21 and 22 is comprised.

In FIG. 1, three inner wiring patterns 24 are schematically shown, but two of them have SVH 51 formed on the electrode pad 21 for the connection of the device 40 to be measured, and the other one is for the connector 15 connection. SVH 51 is formed in the electrode pad 22 part of. Whether the SVH 51 is provided on both ends of the inner layer wiring pattern 24 is appropriately selected in consideration of, for example, the wiring position of the inner layer wiring pattern 24, the pitch of the electrode pad 21 on the connection side of the device under test, and the like.

According to the device under test board 50 having the above-described configuration, the SVH 51 is adopted at either of the both ends of the inner layer wiring pattern 24, compared with the conventional device under test board 20 shown in FIG. By using the SVH 51, the length of the stub portion 25 can be shortened, and therefore, the capacity of the stub portion 25 can be reduced, so that the signal can be speeded up.

Further, in order to configure the SVH 51 with the device-mounted board 50 having the structure as shown in FIG. 1, via holes are formed in only one wiring board, and then two wiring boards (substrates) are bonded together to produce the SVH 51. The dashed-dotted line in FIG. 1 shows the bonded portion (butted surface) 52.

Fig. 2 shows an example in which a resistance element or the like needs to be mounted as a part of the inner layer wiring pattern 24 as another embodiment of the device-mounted board according to the present invention, and the SVH 51 is provided in the middle of the inner layer wiring pattern 24. It is. 2 to 53 show elements such as resistance elements. The element 53 is mounted on a pair of electrode pads 54 in which the SVH 51 is formed.

The board under measurement device 55 as shown in FIG. 2 is also used according to the required specifications. The device under test device 55 can be manufactured according to the same manufacturing method as the method for manufacturing the device under test device 50 described above.

FIG. 3 is different from the structures of the device-mounted boards 50 and 55 shown in FIGS. 1 and 2, and in order to form the SVH 51, a third wiring board is interposed between two wiring boards on which via holes are formed. The measurement device mounting board 56 having the structure in which the wiring boards are bonded together is shown. When such a structure is adopted, the capacity of the stub portion 25 can be further reduced compared to the measurement device mounting board 50 shown in FIG. 1.

The above-mentioned device-mounted boards 50, 55, and 56 are referred to as the performance boards in the device interface unit 3 of the IC test apparatus shown in FIG. 14, but the structure of the device interface unit 3 is shown in FIG. The present invention is not limited to the structure, and other configurations may be adopted depending on the use and use of the IC test apparatus.

4 (a) and 4 (b) show another configuration example of such a device interface unit 3 together with the test head 2, which will be briefly described below.

The device interface 3 in Fig. 4A is composed of a performance board 60, a plurality of cables 12 as shown in Fig. 14, a plurality of device-mounted boards 57, commonly referred to as socket boards, and an IC socket 320.

The performance board 60 has a connector (not shown) for connection to the test head 2 on its lower surface, and is connected to the test head 2 and mounted on the test head 2. In this example, the position of a board called a performance board is different from FIG.

The lower end and upper end of the cable 12 are soldered and connected to the performance board 60 and the board under measurement device 57, respectively, and an IC socket 320 is mounted on each board 57 under measurement device. The number of the device-mounted board 57 under measurement is simplified in FIG. 4A, but is 16 or 32, for example.

On the other hand, the device interface unit 3 in Fig. 4 (b) is a main board (mainboard unit) 70 consisting of a plurality of cables 12, and a plurality of device-mounted boards 57, called socket boards as shown in Fig. 4 (a); IC sockets 320 mounted on the board 57 for mounting the device under measurement.

In this example, the cable 12 has connectors (not shown) at its lower and upper ends, respectively, and its lower end is directly connected to the test head 2, and its upper end is connected to the board 57 to be measured.

As shown in Fig. 1 to Fig. 3, the structure of the device-mounted board according to the present invention is a device to be measured generally referred to as a socket board of the device interface unit 3 shown in Figs. 4 (a) and (b). It can also be applied to the onboard 57, whereby high-speed signals can be responded to.

5 is a diagram illustrating an example of a detailed configuration of a performance board 300 that is an example of a board on which a device to be measured is mounted. 5 shows a cross-sectional view of a performance board 300. The performance board 300 has the same functions and configurations as or similar to those of the device under test boards 50, 55, 56, and 57 described with reference to FIGS. 1 to 4, and the electronic device 310 (the device under test 40) and the electronic device. The test apparatus for testing 310 is electrically connected.

The performance board 300 includes an IC socket 320, a socket substrate 350, a plurality of high frequency signal connectors 370, and a plurality of low frequency signal connectors 372.

The IC socket 320 supports the electronic device 310 and electrically connects each pin of the electronic device 310 and each pin of the performance board 300. In addition, the socket substrate 350 supports the IC socket 320 on the upper surface of the socket substrate 350 and is electrically connected to the electronic device 310 through the IC socket 320. In addition, the socket substrate 350 is electrically connected to the test apparatus 200 (see FIG. 10) through the connection unit 100 (see FIG. 10).

The plurality of high frequency signal connectors 370 and the plurality of low frequency signal connectors 372 are installed on the lower surface of the socket substrate 350 and receive the test strip signals to be supplied to the electronic device 310 from the test apparatus 200 through the connection unit 100. The electronic device 310 is supplied through the electronic device 310.

Although the surface facing the electronic device 310 is made into the upper surface among the surfaces of the socket substrate 350 in this example, and the surface facing the test apparatus 200 is described as the lower surface, in another example, the surface facing the test apparatus 200 is the upper surface. The surface facing the electronic device 310 may be a lower surface.

In addition, the low frequency signal connector 372 is installed farther from the IC socket 320 than the high frequency signal connector 370 and receives a signal having a lower frequency than the test signal supplied by the high frequency signal connector 370 to the IC socket 320 from the test apparatus 200 through the connection unit 100. .

In the socket substrate 350, low-frequency signal wiring 376, high-frequency signal wiring 380, and GND wiring are formed in a plurality of layers in the depth direction. The low frequency signal wiring 376 and the high frequency signal wiring 380 are examples of the inner layer wiring pattern 24 described with reference to FIGS. 1 to 4.

The socket substrate 350 is provided with a low frequency through hole 374, a high frequency through hole 362, a low frequency single side hole 360, a high frequency single side hole 382, and a GND through hole 384 in a plurality of layers.

The low frequency through hole 374, the high frequency through hole 362 and the GND through hole 384 are examples of the through holes 23 described with reference to FIGS. 1 to 4, and the low frequency single side hole 360 and the high frequency single side hole 382 are illustrated in FIGS. This is an example of SVH 51 described with reference to FIG. 4.

The low frequency through hole 374 is electrically connected to the low frequency signal connector 372 and penetrates from the lower surface on which the low frequency signal connector 372 of the socket substrate 350 is installed to the upper surface on which the electronic device 310 of the socket substrate 350 is mounted. In this example, the low frequency through hole 374 is provided on the outer circumferential side of the socket substrate 350 than the high frequency single side hole 382, the low frequency single side hole 360 and the high frequency through hole 362.

In addition, the low frequency single-sided hole 360 is the SVH 51 described above, and is electrically connected to the low frequency signal pin of the electronic device 310, and is formed from an upper surface of the socket substrate 350 to a middle layer position that is less than the lower surface of the socket substrate 350. In this example, the low frequency single-sided hole 360 is provided on the outer circumferential side of the socket substrate 350 than the high-frequency through hole 362.

The low frequency signal wiring 376 is formed in one of a plurality of layers of the socket substrate 350 to electrically connect the low frequency through hole 374 and the low frequency single-sided hole 360 to transmit a low frequency test signal. The socket substrate 350 is provided with GND wirings 378 in a plurality of layers, and the low frequency signal wirings 376 are formed between certain GND wirings 378.

By such a configuration, the socket substrate 350 can supply the low frequency test signal to the electronic device 310. In addition, since SVH is used as the low frequency single-sided hole 360 for electrically connecting to the IC socket 320, the area of the stub that does not contribute to the transmission of the test signal can be reduced, and the test signal can be transmitted accurately.

The high frequency single-sided hole 382 is the SVH 51 described above, and is electrically connected to the high frequency signal connector 370, and is formed from a lower surface on which the high frequency signal connector 370 of the socket board 350 is provided to a mid-layer position that falls short of the surface of the socket board 350.

The high-frequency through hole 362 is electrically connected to the high-frequency signal pin of the electronic device 310, and is formed to penetrate from the upper surface of the socket substrate 350 to the lower surface. The high-frequency signal wire 380 is formed in a layer on the lower surface side of the socket substrate 350 rather than a layer on which the low-frequency signal wire 376 is formed among the plurality of layers of the socket substrate 350 to electrically connect the high frequency single-sided hole 382 and the high-frequency through hole 362. Transmit high frequency test signal. Since the high frequency single sided hole 382 does not interfere with the low frequency signal wiring 376 of the upper layer and the low frequency single sided hole 360 does not interfere with the high frequency signal wiring 380 of the lower layer, it is possible to obtain an advantage of enabling high-density pattern wiring. .

By such a configuration, a high frequency test signal can be supplied to the electronic device 310. In addition, since SVH is used as the high frequency single-sided hole 382, the area of the stub portion that does not contribute to the transmission of the test signal can be reduced, so that the test signal can be transmitted accurately. In addition, by providing the high frequency single-sided hole 382 inward from the low frequency through hole 374, the transmission path length of the high frequency test signal can be shortened and the test signal can be transmitted more accurately.

Further, in the GND wiring 378 formed in the plurality of layers, all of the entire surfaces formed on almost the entire surface of the GND layer are ground planes, and are electrically connected to the GND through holes 384 and are connected to the ground potential through the GND through holes 384. . In addition, although only one GND through hole 384 is shown in FIG. 5, the some GND through hole 384 is provided in the pitch required for the whole surface of the socket substrate 350. As shown in FIG. In addition, it is provided in the vicinity of single-sided holes and through holes, such as high-frequency single-sided holes 382 and the like.

6 is a diagram illustrating an example of a cross-sectional enlarged view of the socket substrate 350. As described above, the GND wirings 378 are formed in the plurality of layers in the depth direction in the socket substrate 350, and the signal wirings of the low frequency signal wiring 376 or the high frequency signal wiring 380 are formed in the layers between the GND wiring 378, for example, characteristics of 50 kV. Impedance

In the GND layer of the socket substrate 350, in the region where the low frequency through hole 374, the high frequency single side hole 382, the low frequency single side hole 360, and the high frequency through hole 362 are formed, the through hole or single side hole and the GND wiring 378 are formed. In between, it is necessary to form a predetermined pattern on each GND layer in advance. That is, in the horizontal direction of each GND layer, a through hole or one-sided hole and the GND wiring 378 need to be formed at predetermined intervals. In this example, the diameter of the through hole or one side hole is about 0.3 mm to 0.35 mm.

FIG. 6 (a) is a diagram illustrating an example of an enlarged view in the vicinity of the low-frequency through hole 374. FIG. In this example, the GND wirings 378 are formed so as to be concentric with the low frequency through hole 374 in each GND layer, and in the circular region having a diameter larger than that of the low frequency through hole 374. In this example, in each GND layer, the GND wiring 378 is not formed in the circular region which is concentric with the low-frequency through-hole 374 and whose diameter is 0.7 mm.

FIG. 6B is a diagram illustrating another example of the enlarged view in the vicinity of the low-frequency through hole 374. In this example, the GND wiring 378 is not formed in the circular region having a larger diameter in each GND layer than the example described in Fig. 6A. In this example, the GND wiring 378 is not formed in a circular region having a diameter of 1.25 mm. With such a configuration, the distance between the low frequency through hole 374 and the GND wiring 378 can be extended, and the capacitance component generated between the low frequency through hole 374 and the GND wiring 378 can be reduced, and the test signal can be transmitted accurately. In addition, in the vicinity of the high-frequency through hole 362, it is preferable to have the configuration as shown in Fig. 6B.

FIG. 6 (c) is a diagram illustrating an example of an enlarged view in the vicinity of the high frequency single-sided hole 382. As shown in FIG. 6C, the one-sided hole of the high frequency one-sided hole 382 or the low frequency one-sided hole 360 is formed without penetrating the socket substrate 350. For this reason, the GND wiring 378 is formed in the area | region in which a single sided hole is formed, when the single sided hole extends to the upper surface or the lower surface of the socket substrate 350.

As described above, since the socket substrate 350 is formed by joining a plurality of substrates formed by using one side hole as a through hole, the length in the depth direction of the single side hole SVH is constant. For this reason, when electrically connected with the signal wiring in each layer with a different depth, even if SVH is used, the stub part which does not contribute to the transmission of a test signal will arise.

Here, a plurality of GND wirings 378 are formed in the upper layer GND wiring 378-2 formed on the upper surface side layer of the socket substrate 350 than the high frequency signal wiring 380 and in the lower layer GND wiring 378 formed in the lower layer side of the socket substrate 350 than the high frequency signal wiring 380. Divide by one.

As shown in Fig. 6 (c), the distance in the horizontal direction of at least a portion of the plurality of upper layer GND wirings 378-2 and the single side hole 382 for high frequency is in the horizontal direction of the lower layer GND wiring 378-1 and the single side hole 382 for high frequency. The capacitance component in the stub portion can be reduced by forming it to be larger than the distance of. That is, in the region where the high frequency single-sided hole 382 of the layer where the lower layer GND wiring 378-1 is to be formed is formed, if the diameter of the circular region where the lower layer GND wiring 378-1 is not formed is x, x is 1. It is preferably formed to be smaller than 25 mm.

Moreover, the distance in the horizontal direction of the upper layer GND wiring 378-2 closest to the high frequency signal wiring 380 and the high frequency one side hole 382 among the plurality of upper layer GND wiring 378-2 is that of the lower layer GND wiring 378-1 and the single side hole 382 for the high frequency. It is preferable that it is substantially the same as the distance in a horizontal direction, and smaller than the distance in the horizontal direction of another upper layer GND wiring 378-2 and the high frequency single-sided hole 382. With such a configuration, it is possible to reduce the capacitive component at the stub portion while reducing the influence of noise on the high-frequency signal wiring 380.

FIG. 7 is a diagram illustrating an example of measurement results of reflection components generated in each example described in FIG. 6. In Figure 7, the vertical axis represents the magnitude of the reflection component, and the horizontal axis represents the position where the reflection component occurs. In Fig. 7, (a) is a reflection component in the example shown in Fig. 6 (a), (b) is a reflection component in the example shown in Fig. 6 (b), and (c) is an example shown in Fig. 6 (c). Represents the size of the reflection component at.

In the example shown in Fig. 6 (a), as shown in Fig. 7, the test signal in the stub portion of the single-sided hole is -19. 5% of reflective components are produced. In contrast, in the example shown in FIG. It is understood that the reflection component is reduced by generating a 5% reflection component and widening the gap between the single-sided hole and the GND wiring 378.

In addition, in the example shown in FIG. 6 (c), -7.2% of the reflection component is generated with respect to the test signal, and the GND wiring 378 is formed as shown in FIG. It turns out that a reflection component reduces further by doing so.

8 is a diagram illustrating another example of the enlarged vicinity of the high frequency single-sided hole 382. In this example, the GND wiring 378 in the region 390 is removed. With such a configuration, the capacitance component generated between the GND wiring 378 formed above the stub portion and the single-sided hole 382 for high frequency can be reduced, and the test signal can be transmitted more accurately.

In this example, in each GND layer, the diameter of the circular region where the GND wiring 378 is not formed is formed as 1.5 mm. The diameter of the circular region is preferably as large as possible except for the GND layer adjacent to the high frequency signal wiring 380. However, as described above, since the GND through hole 384 is formed and adjacent to the entire surface of the socket substrate 350, The size is limited. That is, the diameter of the circular region in which the GND wiring 378 is not formed in each GND layer is formed to be the maximum in the non-overlapping range with a predetermined margin to the GND through hole 384 formed in the entire surface of the socket substrate 350. It is preferable.

9 is a diagram showing an example of a detailed configuration of a probe card 400 which is an example of a board on which a device to be measured is mounted. 9 shows a cross-sectional view of the probe card 400. In FIGS. 5 to 8, the performance board 300 is electrically connected to the electronic device 310, but instead of the performance board 300, the probe card 400 may be electrically connected to the electronic device 310.

In this case, the probe card 400 has the same function and configuration as the performance board 300. In this example, the probe card 400 has a plurality of probe pins 364 electrically connected to the terminals of the electronic device 310 in place of the IC socket 320 in the configuration of the performance board 300. In this case, the socket substrate 350 functions as a probe substrate supporting the probe pin 364. In addition, when the probe card 400 is used, the electronic device 310 can be tested in the shape of an unpacked wafer.

Next, the connection unit which connects the performance board 300 or the probe card 400 and the test apparatus main body is demonstrated. The connection unit is an example of the motherboard 70 described with reference to FIG. 4, for example.

10 is a diagram illustrating a test of an electronic device. The electronic device 310 to be tested as described with respect to FIG. 4 is mounted on the performance board 300, which is an example of a device mounting board under measurement. The performance board 300 has the same or similar function and configuration as the performance board 300 described with reference to FIGS. 5 to 8. The test apparatus 200 generates a test signal for testing an electronic device 310 such as a semiconductor device. In addition, the connection unit 100 electrically connects the test apparatus 200 and the performance board 300 and supplies a test signal to the electronic device 310 mounted on the performance board 300.

The test apparatus 200 generates a test signal having a desired pattern corresponding to the electronic device 310, and supplies the test signal to the electronic device 310 through the connection unit 100 and the performance board 300. In addition, the test apparatus 200 receives an output signal output from the electronic device 310 through the connection unit and the performance board 300. The test apparatus 200 generates an expected value signal corresponding to the electronic device 310, and determines whether the electronic device 310 is good or not compared with the received output signal.

The performance board 300 includes a socket board 350, an IC socket 320, a plurality of performance board side connectors 330, and a plurality of signal wires 340. The performance board 300 supports the plurality of performance board side connectors 330 on the surface facing the connection unit 100, and supports the IC socket 320 on the upper surface of the facing surface. The performance board side connector 330 is, for example, the high frequency signal connector 370 and the low frequency signal connector 372 described with reference to FIG. 5.

IC socket 320 supports electronic device 310. The IC socket 320 also has a terminal that electrically connects with each pin of the electronic device 310.

The plurality of performance board side connectors 330 receive the test signals to be supplied to the electronic device 310 from the test apparatus 200 through the connection unit 100, and supply them to the IC socket 320 through the signal wire 340. In addition, the output signal of the electronic device 310 is received from the IC socket 320 and supplied to the connection unit 100. The signal wire 340 corresponds to the high frequency signal wire 380, the high frequency single side hole 382, the high frequency through hole 362, the low frequency through hole 374, the low frequency signal wire 376 and the low frequency single side hole 360.

In the present example, the performance board side connector 330c provided near the IC socket 320 receives a high frequency test signal among test signals to be supplied to the electronic device 310 and functions as a high frequency signal socket 370 to be supplied to the IC socket 320. Further, the performance board side connectors 330a and 330b provided at a position farther from the IC socket 320 than the performance board connector 330c are connected to the connection unit 100 using a signal having a lower frequency than the test signal supplied by the performance board connector 330c to the IC socket 320. It functions as a low frequency signal connector 372 which is received by the test apparatus 200 and supplied to the IC socket 320.

The position of the performance board side connector 330 changes in correspondence with the number of IC pins and IC pin arrangement of the electronic device 310. The performance board side connector 330, which receives a higher frequency signal, is installed closer to the IC socket 320. Thus, the distance to the IC socket 320 changes with the electronic device 310. In addition, the performance board side connectors 330a and 330b provided at a position far from the IC socket 320 may be provided to the power supply voltage of the electronic device 310.

According to the performance board 300 in this example, since the performance board side connector 330 is provided at a position corresponding to the frequency of the signal to be received, the signal can be supplied to the electronic device 310 with good transmission characteristics. The performance board 300 is manufactured by changing the position of the connector 330 on the performance board side corresponding to the number of IC pins and the IC pin arrangement of the electronic device 310.

The connection unit 100 is provided with the support board 30, the some connection unit side connector 64, and the some connection cable 66a, 66b, 66c. The support substrate 30 is a structure for fixing the plurality of connection unit side connectors 64 at a predetermined position, and is provided to face the performance board 300. In addition, the support substrate 30 supports the plurality of connection unit side connectors 64 on the surface facing the performance board 300.

The plurality of connection unit side connectors 64a, 64b, 64c are detachable on the support board 30 so that they can be reused in common, and are installed on the support board 30 so that the performance board side connectors 330a, 330b, 330c). For example, the plurality of connection unit side connectors 64 can be used as they are by converting the plurality of connection unit side connectors 64 into the supporting substrate 30 corresponding to the position of the performance board side connector 330 on the performance board 300 to be connected.

Each connecting cable 66 is fixed to the corresponding connecting unit side connector 64 so as to electrically connect the connecting unit side connector 64 and the test apparatus 200. The test apparatus 200 is connected to the other end of the connection cable 66, supplies a test signal to the connection unit 100 through this connection, and receives the output signal outputted by the electronic device 310 from the connection unit 100 via the connection cable 66.

According to the connection unit 100 in this example, the performance board side connector 330 can be connected to a plurality of types of performance boards 300 having different arrangements only by replacing the inexpensive support substrate 30. For this reason, the big advantage that the several connection unit side connector 64 can be reused as it is is repeated.

In this example, the test signal is supplied to the electronic device 310 using the performance board 300. In another example, the test signal may be supplied to the electronic device 310 using the probe card 400 as described with reference to FIG.

11 shows an example of a top view of the support substrate 30. When the connection unit 100 and the performance board 300 are connected, the electronic device 310 is mounted in the mounting position 312.

The plurality of connection unit side connectors 64 (refer to FIG. 10) can be detached and can be moved to the plurality of arrangement positions 34. For example, as shown in FIG. 11, the some arrangement position 34 is provided on the support substrate 30 so that the mutual distance on the support substrate 30 of the connector 64 of the some connection unit side can be changed. As shown in FIG. 11, a plurality of arrangement positions 34 are provided on the support substrate 30 so that the distance to the mounting position 312 of the IC socket 320 of the plurality of connection unit side connectors 64 can be changed. If a probe card is used instead of the performance board 300, the mounting position 312 of the IC socket 320 becomes the mounting position of the probe pin.

In addition, the support substrate 30 has a positioning member 42 for supporting the connection unit side connector 64 at each arrangement position 34. Thereby, the arrangement | positioning position 34 which the connector 64 of the connection unit side can change is specified.

In addition, the support substrate 30 has through-holes 32 of the size which the connection unit side connector 64 can pass through in each arrangement position 34. FIG. The through hole 32 is provided from the surface facing the performance board 300 of the support substrate 30 to the surface facing the test apparatus 200. When the mounting position of the connector 64 on the connection unit side is moved, the connector 64 on the connection unit side is passed through the through hole 32 to the test apparatus 200 side and separated, and the performance board 300 through the through hole 32 corresponding to the arrangement position 34 to be moved. Pass it through the side and install it. Thereby, even when the connection cable 66 (refer FIG. 10) is being fixed to the connection unit side connector 64, the connection unit side connector 64 can be moved to a desired position. Therefore, there is a big advantage that repetitive reuse is possible.

In addition, the through hole 32 may be provided over the some arrangement position 34. FIG. That is, the opening of the through hole 32 may be provided over the some arrangement position 34. FIG. For example, the opening of the through hole 32-1 and the opening of the through hole 32-4 shown in FIG. 11 may be connected to each other to form one through hole. In this case, when the connection unit side connector 64 is moved from the arrangement position 34-1 to the arrangement position 34-4, the connection cable 66 can pass through the through hole from the arrangement position 34-1 to the arrangement position 34-4. The position of the connector 64 on the connection unit side can be changed easily.

11, it is preferable that the some arrangement position 34 is provided so that the position of the connection unit side connector 64 can be changed in both a radial direction and a circumferential direction centering on the mounting position 312 of the IC socket 320. As shown in FIG.

Incidentally, in this example, the cross sections of the IC socket 320 and the connection unit side connector 64 in the plane substantially parallel to the supporting substrate 30 are respectively rectangular. When supporting the connection unit side connector in the arrangement position 34 closest to the mounting position 312 of the IC socket 320 in the said radial direction, the long side of the cross section of the connector 64 of the connection unit side is closest to the cross section of the IC socket 320 in the support board 30. It is preferable to support the connector unit side connector 64 so as to face the side. For example, the positioning member 42 provided in the arrangement position 34-4 supports the connection unit side connector so that the long side of the connection unit side connector 64 is substantially parallel to the closest side of the cross section of the IC socket 320. Although a plurality of terminals are provided in the connection unit side connector 64 along the long side direction, according to this example, when the connection unit side connector 64 is disposed near the IC socket 320 to supply a high frequency signal, each terminal and the electronic device 310 The distance between the pins can be substantially the same, and a signal can be supplied to the electronic device 310 with good transmission characteristics.

The support substrate 30 also has a small diameter performance board positioning member 46 and a large diameter performance board positioning member 44. For example, the small-diameter performance board positioning member 46 and the large-diameter performance board positioning member 44 may be a plurality of joining protrusions provided on the surface of the support substrate 30 facing the performance board 300.

The small-diameter performance board positioning member 46 determines the position where the diameter of the performance board 300 must be supported. In addition, the large-diameter performance board positioning member 44 should be installed at a position farther from the mounting position 312 of the IC socket 320 than the small-diameter performance board positioning member 46 on the support substrate 30 to support the performance board 300 having a diameter larger than a predetermined size. Pick a location to do it. According to the connection unit 100 in this example, it can connect with the performance board 300 of several types from which diameter differed with precision.

12 shows an example of a cross section of the support substrate 30 and the connection unit side connector 64. As described in FIG. 11, the support substrate 30 has the positioning member 42 on the surface supporting the connector 64 on the connection unit side. In this example, the positioning member 42 is a protrusion extending in the direction of the connector 64 on the connection unit side.

The connector 64 of the connection unit side has a groove 12 which engages with the positioning member 42 on a surface opposite to the support substrate 30. By coupling the positioning member 42 and the groove 12 of the connector unit side connector 64, the connector unit side connector 64 can be supported on the support board | substrate 30. FIG. The positioning member 42 may have a groove shape, and the connector 64 on the connection unit side may have protrusions.

13 shows another example of the top view of the support substrate 30. In this example, the performance board 300 has two IC sockets 320. The connection unit 100 has a plurality of connection unit side connectors 64 provided corresponding to the plurality of IC sockets 320.

The support substrate 30 supports the corresponding connection unit side connector 64 with respect to the mounting position 312 of each IC socket 320 so that the position in 30 on a support substrate can be changed. That is, the support substrate 30 has the function and configuration described with reference to FIG. 11 for each IC socket 320. For example, the connection unit side connector 64 can be moved to a desired position by passing the connection unit side connector 64 through the through-hole not shown.

As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various changes or improvements can be added to the above embodiments. It is clear from description of a claim that the form which added such a change or improvement can also be included in the technical scope of this invention.

As described above, according to the device-to-measurement board according to the present invention, the stub capacitance of the through-hole portion can be reduced, so that the device-to-measurement board capable of responding to a high speed signal can be obtained.

In addition, since the device interface unit of the IC test apparatus is provided with the device-mounted board under measurement, good waveform quality can be obtained even at a high speed signal, and the high speed test can be executed.

Moreover, according to the connection unit concerning this invention, it can connect with various types of performance boards or probe cards, and can supply a signal with a favorable transmission characteristic to an electronic device. Therefore, the electronic device can be tested with precision.

Claims (12)

In the board under measurement device for electrically connecting an electronic device and a test apparatus for testing the electronic device, An IC socket supporting the electronic device; A socket substrate supporting the IC socket; A high frequency signal connector that receives a test signal supplied to the electronic device from the test apparatus and supplies the test signal to the IC socket; And And a low frequency signal connector for receiving a signal having a frequency lower than the test signal supplied by the high frequency signal connector to the IC socket from the test apparatus and supplying the IC socket to the IC socket. The device to be measured board having a distance from the mounting position of the IC socket to the connector for the low frequency signal is longer than the distance from the mounting position of the IC socket to the connector for the high frequency signal. The method of claim 1, The socket substrate, A high-frequency single-sided hole electrically connected to the high-frequency signal connector and formed from a lower surface on which the high-frequency signal connector of the socket substrate is installed to a middle layer position less than an upper surface of the socket substrate; And The socket substrate, which is formed on the outer circumferential side of the socket substrate rather than the high frequency single-sided hole, is electrically connected to the low frequency signal connector, and is formed from the lower surface of the socket substrate from a lower surface of the socket substrate. A device-to-measurement board including a low frequency through hole penetrating to an upper surface on which an electronic device is mounted. The method of claim 2, The socket substrate, A high frequency through hole electrically connected to a pin for a high frequency signal of the electronic device and penetrating from the upper surface to the lower surface of the socket substrate; And The socket substrate is formed on the outer circumferential side of the socket substrate rather than the through hole for high frequency, and is electrically connected to the low frequency signal pin of the electronic device, and is formed from the upper surface of the socket substrate to a middle layer position that is less than the lower surface. A board under measurement device including a low frequency single-sided hole. The method of claim 3, In the socket substrate, wirings are formed in a plurality of layers in a depth direction, A low frequency signal wiring line formed in any one of the plurality of layers and electrically connecting the low frequency through hole and the low frequency single-sided hole; And Among the plurality of layers, a measurement object is formed in a layer on the lower surface side of the socket substrate rather than the layer in which the low frequency signal wiring is formed, and includes a high frequency signal wiring for electrically connecting the high frequency single-sided hole and the high frequency through hole. Device mounting board. In the board under measurement device for electrically connecting an electronic device and a test apparatus for testing the electronic device, A socket substrate having wirings formed in a plurality of layers; And A connector installed on a lower surface of the socket substrate and receiving a test signal supplied from the test apparatus to the electronic device, The socket substrate, A signal wiring line formed on any one layer of the socket substrate and transmitting the test signal to the electronic device; A plurality of upper layer GND wirings formed in a layer on the upper surface side of the socket substrate rather than the signal wirings, and connected to ground potentials, respectively; A lower layer GND wiring formed in a layer on the lower surface side of the socket substrate than the signal wiring and connected to a ground potential, respectively; And A one-sided hole formed from a lower surface of the socket toward an upper surface of the socket and electrically connecting the connector and the signal wiring; The device mounting board according to claim 1, wherein a distance in at least part of the plurality of upper layer GND wirings in the horizontal direction between the single sided hole is larger than a distance in the horizontal direction between the lower layer GND wiring and the single sided hole. The method of claim 5, The distance in the horizontal direction between the upper layer GND wiring and the one-sided hole closest to the signal wiring among the plurality of upper layer GND wirings is substantially equal to the distance in the horizontal direction between the lower layer GND wiring and the single-sided hole. The same device as the above, and the device-mounted board under measurement is smaller than the distance in the horizontal direction between the other upper layer GND wiring and the single-sided hole. The method of claim 5, And the single sided hole is formed from a lower surface of the socket to a middle layer position that is less than the upper surface of the socket. A device mounted board under test which electrically connects an electronic device and a test apparatus for testing the electronic device, A socket substrate having wirings formed in a plurality of layers; And A connector installed on a lower surface of the socket substrate and receiving a test signal supplied from the test apparatus to the electronic device, The socket substrate, A signal wiring line formed on any one layer of the socket substrate and transmitting the test signal to the electronic device; A one-sided hole formed from a lower surface of the socket to a middle-layer position less than the upper surface of the socket, and electrically connecting the connector and the signal wiring; And In a plurality of layers different from the signal wirings, a plurality of GND wirings, which are formed outside the region where the single-sided holes are formed when the single-sided holes extend to the upper surface of the socket substrate, are connected to ground potentials, respectively. Board with measuring device. A probe card for electrically connecting an electronic device and a test apparatus for testing the electronic device, A probe pin electrically connected to a terminal of the electronic device; A probe substrate supporting the probe pins; A high frequency signal connector that receives a test signal supplied to the electronic device from the test apparatus and supplies the test signal to the probe pin; And And a low frequency signal connector for receiving a signal having a lower frequency than the test signal supplied by the high frequency signal connector to the probe pin from the test apparatus and supplying the signal to the probe pin. And a distance from the mounting position of the probe pin to the connector for the low frequency signal is longer than the distance from the mounting position of the probe pin to the connector for the high frequency signal. delete delete delete

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