KR100772020B1 - Angle valve with strengthen airtight - Google Patents

Abstract

The present invention relates to an angle valve with enhanced airtightness, the angle valve with enhanced airtightness according to the present invention comprises a hollow formed therein, a first passage connecting the chamber and the hollow, and the hollow connected to the vacuum pump. A first body having a second passage; A second body coupled to a position opposite to the first passage of the first body, having a first through hole formed in the center thereof, and having a bellows inside; A cylinder coupled to the second body and including a seal plate having a second through hole formed at a central portion thereof; A piston reciprocating in the cylinder; A shaft connected to the piston and passing through the first through hole and the second through hole; A sealing plate coupled to the shaft to open and close a first passage; And an O-ring coupled to a rear surface of the sealing plate in contact with the second body.

According to the angle-tightness-enhanced angle valve according to the present invention, by providing an O-ring on the rear surface of the sealing plate in contact with the second body or the second body in contact with the sealing plate to prevent particles from being generated by the F radical gas This has the advantage of preventing contamination of the chamber.

1st, 2nd body, sealing plate, O-ring

Description

Angle valve with strengthen airtight}

1 is a cross-sectional view showing the configuration of a conventional angle valve,

Figure 2 is a side view showing a state when the closed angle valve reinforced airtightness of the present invention,

Figure 3 is a side view showing a state when the open angle valve reinforced airtightness of the present invention,

4 is an explanatory view showing a state in which the O-ring is coupled to the second body of the angle-tightness-enhanced angle valve of the present invention.

* Description of the symbols for the main parts of the drawings *

100: first body 110: first passage

120: second passage 130: hollow

200: second body 210: first through hole

220: bellows 230: bellows fixing portion

240: shaft guide portion 300: cylinder

310: seal plate 311: second through hole

320: piston 330: shaft

331: coil spring 400: sealing plate

405, 410: O-ring

The present invention relates to an angle valve with enhanced airtightness, and more particularly, having an O-ring on the rear surface of the sealing plate in contact with the second body or the second body in contact with the sealing plate to prevent particles from being generated by F radical gas. The present invention relates to an angle valve with enhanced airtightness which can prevent contamination of the chamber.

In general, semiconductors and LCDs have high precision, so high cleanliness and special manufacturing techniques are required. For this reason, the semiconductor device is manufactured in a vacuum state that can completely block the contact of foreign matter contained in the air. Therefore, the vacuum working area of the semiconductor manufacturing apparatus and the airtight technology also have a great influence on the quality of semiconductor products. In the process for manufacturing the semiconductor as described above, the air in the chamber in which the semiconductor device is integrated and the pollutant contained therein are cleaned and discharged using a vacuum pump. An apparatus for cleaning the pollutant is called a plasma cleaning module.

 An angle valve is generally installed between the chamber and the plasma cleaning module, and the angle valve functions to transfer or block the fluid passing through the cleaning module to the chamber.

1 is a "Sensor-sensing angle valve" of Republic of Korea Patent Publication No. 10-0448173 registered by the present applicant is interposed.

Referring to FIG. 1, a conventional angle valve includes a hollow 12 formed therein, a first passage 14 connecting the chamber and the hollow 12, and a connection connecting the hollow 12 and the vacuum pump. A body 10 having two passages 16; A seal plate (60) coupled to the opening (18) formed outside from the hollow (12) and having a through hole (62) at its center; An air cylinder (30) coupled to the body (10) outside the opening (18); A piston 32 reciprocating in the air cylinder 30; A compression spring (34) elastically supporting the piston (32) in the air cylinder (30); A shaft (40) connected to the piston (32) in a direction opposite to the compression spring (34) and passed through the through hole (62); A bellows 50 coupled to the seal plate 60 in the hollow 12; In the sensor-sensing angle valve having a; sealing plate 44 coupled to the shaft 40 in the upper portion of the bellows 50 to open and close the first passage 14,

The second O-ring 72 and the bushing 74 for guiding the shaft 40 are coupled to the through hole 62; a threaded portion 42 is formed at the tip of the shaft 40, and the sealing plate ( 44, a nut part 46 to which the screw part 42 is coupled is formed; A ring-shaped magnet 80 is coupled to the piston 32, and a pair of hall sensors (not shown) for detecting a magnetic field of the magnet 80 are external to the air cylinder 30 by a bracket (not shown). It is characterized in that attached to.

Meanwhile, in the semiconductor manufacturing process, F-type halogen cleaning gases such as NF ₃ , F ₂ , C ₂ F ₆ , and C ₃ F ₆ are used to clean the inside of the chamber. F radical gas is decomposed by plasma or the like, and when F radical gas is introduced into the valve, particles are generated by reaction when exposed to a bellows made of stainless steel (SUS) or iron (Fe) in the valve. As these particles enter the chamber through the valve, they contaminate the chamber.

However, the conventional angle valve has a structure in which the hollow 12 part is open, and therefore, when using F-type halogen gas such as NF ₃ , F ₂ , C ₂ F ₆ , C ₃ F _6, etc., as the gas for cleaning the chamber. In addition, the F radical gas is exposed to the stainless steel (SUS) or iron-containing compression spring 34 or the bellows 50 in the valve to generate particles, and these particles are introduced into the chamber again to contaminate the chamber. there was.

In addition, there is a problem that the generated particles are adhered to the inside of the valve to reduce the life of the valve.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an O-ring on the rear surface of the sealing plate in contact with the second body or the second body in contact with the sealing plate, thereby preventing particles from being generated by F radical gas. Thus, it is to provide an angle-tightened angle valve that prevents particles from entering the chamber and consequently prevents contamination of the chamber.

In addition, to provide an angle-tightened angle valve that prevents particles from sticking in the valve to increase the life of the valve.

In order to solve the above problems, the airtight-enhanced angle valve according to the present invention has a hollow formed therein, a first passage connecting the chamber and the hollow, and a second passage connecting the hollow and the vacuum pump. First body; A second body coupled to a position opposite to the first passage of the first body, having a first through hole formed in the center thereof, and having a bellows inside; A cylinder coupled to the second body and including a seal plate having a second through hole formed at a central portion thereof; A piston reciprocating in the cylinder; A shaft connected to the piston and passing through the first through hole and the second through hole; A sealing plate coupled to the shaft to open and close a first passage; And an O-ring coupled to a rear surface of the sealing plate in contact with the second body or the second body in contact with the sealing plate.

The second body may further include a bellows fixing part to which the bellows is fixed and a shaft guide part that moves together with the movement of the shaft and guides the movement of the shaft.

In addition, the O-ring is characterized in that the Teflon material.

In addition, the shaft is characterized in that the coil spring is fitted.

Hereinafter, the present invention will be described in detail with reference to the drawings. Like reference numerals in the drawings denote like elements.

Figure 2 is a side view showing a state when the closed angle valve reinforced airtight of the present invention, Figure 3 is a side view showing a state when the open angle valve enhanced airtightness of the present invention, Figure 4 is a present invention It is explanatory drawing which showed the state that the O-ring is couple | bonded with the 2nd body of the angle valve of which the airtightness was strengthened.

2 to 4, the airtight angle valve according to the preferred embodiment of the present invention includes a first body 100, a second body 200, a cylinder 300, and a sealing plate 400. .

The first body 100 is a passage for allowing fluid to move from the plasma cleaning module to the chamber, and includes a first passage 110 connected to the plasma cleaning module and a second passage 120 connected to the chamber. .

The first body 100 is a hollow 130 is formed inside the movable plate 400 to be described later to be movable.

The second body 200 is coupled to a position opposite to the first passage 110 formed in the first body 100, the first through-hole in the central portion to move the shaft 330 to be described later It is preferable that 210 is formed.

Referring to FIG. 4, in the present invention, the second body 200 extending to the first body 100 is provided, and the bellows 220 is positioned in the second body 200. By forming an O-ring 410 in the second body 200 in contact with the sealing plate 400 to be described later, a problem in which particles are generated by F radical gas at the time of fluid movement due to a structural problem of a conventional valve. It is possible to solve.

One side of the bellows 220 is fixed by the bellows fixing part 230 located inside the second body 200, and the other side is driven by the shaft 330 to be described later in the second body 200. It is preferable to be connected to the shaft guide 240 which is moved together. Because of this, the bellows 220 is to expand and contract the expansion and contraction in accordance with the movement of the shaft guide portion 240 is to work.

The bellows 220 is preferably provided with a reinforcing ring between the wrinkles in order to prevent the occurrence of cracking or tearing as the wrinkles are repeatedly stretched when the expansion and contraction occurs continuously for a long time. Do.

The cylinder 300 is coupled to the second body 200 to drive the valve, it is preferable that the seal plate 310 is provided in a portion in contact with the bellows fixing portion 230.

The seal plate 310 has a second through hole 311 is formed in the center portion to enable the movement of the shaft 330, the compressed air flows into the cylinder 300 when the piston 320 is driven, the piston The movement range of the 320 is adjusted.

The piston 320 is connected to the shaft 330 is moved together in accordance with the movement of the piston 320, the end of the shaft 330 is coupled to the sealing plate 400 to be described later the first passage 110 ) Will be opened and closed.

On the other hand, the shaft 330 is preferably coupled to the shaft guide portion 240. The shaft guide part 240 serves to guide the shaft 330 to move in parallel without leaving the first through hole 210 and the second through hole 311 when the shaft 330 moves.

In addition, when the coil spring 331 is inserted into the shaft 330 and compressed air does not flow into the cylinder 300, the valve may be closed by moving the drive shaft due to its elastic force. Preferably, the coil spring 331 is fixed to one side of the seal plate 310, the other side is fixed to the shaft guide portion 240, according to the movement of the shaft guide portion 240 connected to the other side It is preferable to repeat the expansion and contraction with the bellows 220.

The sealing plate 400 is coupled to the shaft 330 to open and close the first passage 110 and the first passage 110 so that fluid does not move from the chamber to the vacuum pump when the valve is closed. O-ring 405 is preferably coupled to the front surface abuts.

In the present invention, the O-ring 410 also in the opposite of the O-ring 405 that is coupled to the rear surface of the sealing plate 400 that is in contact with the second body 200, that is, the front portion of the sealing plate 400 This is characterized in that, by providing the O-ring 410 is to close the gap between the second body 200 and the sealing plate 400 is to enhance the airtightness. Therefore, when the valve is opened, it is possible to block the F radical gas from flowing into the second body 200 and the cylinder 300.

Hereinafter will be described the action of the airtight angle valve with the above configuration.

First, the process of closing the angle-enhanced angle valve is described.

Referring to the closing process of the angle-tightness-enhanced angle valve with reference to Figures 2 and 3, in the open state, the sealing plate 400 closes the first through-hole 210 of the second body 200 to clean the plasma module The fluid is prevented from flowing into the second body 200 when the fluid moves into the chamber. At this time, when the compressed air is blocked to close the valve, the contracted coil spring 331 is expanded by the elastic force acting to move the shaft guide portion 240 connected to the coil spring 331, the shaft guide The piston 320 coupled to the part 240 moves in the direction of the seal plate 310, and the sealing plate 400 coupled to the end of the shaft 330 connected to the shaft guide part 240. ) Closes the first passage 110 to block the flow of fluid from the plasma cleaning module to the chamber.

Next, the process of opening the angle-tightened angle valve is described.

Referring to FIGS. 2 and 3, the process of opening the airtight angle valve is described. In the closed state, the sealing plate 400 closes the first passage 110 to prevent fluid from moving from the plasma cleaning module to the chamber. do. At this time, when compressed air is injected to open the valve, the piston 320 moves in a direction opposite to the seal plate 310, and the shaft 330 connected to the piston 320 moves together. When the shaft 330 moves, the sealing plate 400 connected to the shaft 330 is moved to open the first passage 110. At this time, the O-ring 410 so that the F-radical gas introduced through the first passage 110 is not introduced into the second body 200 in a portion where the rear surface of the sealing plate 400 and the second body 200 abut. It is desirable to combine this to enhance airtightness.

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been used herein, they are used only for the purpose of describing the present invention and are not intended to limit the scope of the present invention as defined in the claims or the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

As described above, according to the present invention, an O-ring is provided on the rear surface of the sealing plate in contact with the second body or the second body in contact with the sealing plate, thereby preventing particles from being generated by the F radical gas, thereby extending the life of the valve. There are advantages to it.

In addition, there is an advantage to increase the life of the valve by preventing the particles are stuck in the valve.

Claims (4)

A first body having a hollow formed therein, a first passage connecting the chamber and the hollow, and a second passage connecting the hollow and the vacuum pump; A second body coupled to a position opposite to the first passage of the first body, having a first through hole formed in the center thereof, and having a bellows inside; A cylinder coupled to the second body and including a seal plate having a second through hole formed at a central portion thereof; A piston reciprocating in the cylinder; A shaft connected to the piston and passing through the first through hole and the second through hole; A sealing plate coupled to the shaft to open and close a first passage; And And an o-ring coupled to a rear surface of the closure plate in contact with the second body or the second body in contact with the closure plate, wherein the bellows fixing portion is fixed to the bellows and the shaft is moved to the second body. A tightly sealed angle valve further comprises a shaft guide for moving and guiding the movement of the shaft. delete The method according to claim 1, The O-ring is an airtight-enhanced angle valve, characterized in that the Teflon material. The method according to claim 1, An airtight-enhanced angle valve, characterized in that the coil spring is fitted to the shaft.

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