KR100757470B1 - Gas supplying apparatus of rotary type - Google Patents

Abstract

A rotary gas supply apparatus is provided to prevent fluid from being introduced into an adjacent passage and being mixed with each other by accommodating partitions in a liquid accommodation vessel filled with oil. A rotary gas supply apparatus includes a base(300) and a rotary plate(400). A liquid accommodation vessel(250) including a plurality of annular grooves is formed in the base. A plurality of introduction passages(340a) is formed in the interior of the base to supply fluids from outside. The rotary plate is fixed to a rotational body so as to be communicated with the introduction passages of the base to supply the fluids to the rotational body. A partition is formed so as to be inserted into the liquid accommodation vessel in a closed state to prevent the fluids from being mixed with each other.

Description

Rotary gas supply device {GAS SUPPLYING APPARATUS OF ROTARY TYPE}

Figure 1a is a schematic diagram showing a gas supply device using a conventional lip seal.

Figure 1b is a schematic diagram showing a gas supply device using a conventional Eric seal.

Figure 2 is a schematic diagram showing a gas supply device using a conventional magnetic fluid.

Figure 3 is a schematic diagram showing a rotary gas supply apparatus according to an embodiment of the present invention.

Figure 4 is an exploded perspective view showing a rotary gas supply apparatus according to an embodiment of the present invention.

Figure 5 is a cross-sectional view showing a rotary plate of the rotary gas supply apparatus according to an embodiment of the present invention.

Figure 6 is a cross-sectional view showing a base of the rotary gas supply apparatus according to an embodiment of the present invention.

7 is a schematic view showing a rotary gas supply apparatus according to another embodiment of the present invention.

<Explanation of symbols for main parts of the drawings>

100: rotor 120a, 120b, 120c, 120d: supply path

200: upper plate 220: partition wall

240: oil 250: liquid container

260: spill prevention bracket 290a, 290b: transmission path

300: base 320: euro

340a, 340b, 340c, 340d: Inlet 400: Rotating plate

500: rotary seal 600a, 600b: bearing

700: injection plate 710: disc portion

720: boss 780: injection hole

The present invention relates to a rotary gas supply device, and more particularly, a partition wall is accommodated in a liquid container filled with oil therein to prevent fluid from flowing into and adjoining an adjacent flow path, thereby independently rotating a plurality of fluids. It relates to a rotary gas supply device that can be supplied to.

In general, a rotary gas supply device is a method for supplying a plurality of gas-like fluids to a rotating rotor. Currently, two gas supply devices are widely used, one of which is a mechanical seal. There is a using, and the other one is a gas supply device using a magnetic fluid.

The gas supply device using the mechanical seal is a mechanical seal medium such as an Eric seal or a lip seal, keeping close contact with the rotating body while maintaining a gap between passages when a plurality of fluids are supplied to each other. The gas supply device using magnetic fluid forms an oil film while maintaining a gap between the rotating body and the housing to which the fluid is supplied by using magnetic and magnetic fluids while maintaining a gap between the rotating bodies. Therefore, when a plurality of fluids such as gas are supplied, they do not flow through adjacent channels.

Looking at such a conventional gas supply device in more detail with reference to the drawings below.

Figure 1a is a schematic diagram showing a gas supply device using a conventional lip seal, Figure 1b is a schematic diagram showing a gas supply device using a conventional Eric seal, Figure 2 is a schematic diagram showing a gas supply device using a conventional magnetic fluid. .

As shown in FIG. 1A, the gas supply apparatus using the Eric seal includes a rotating body 10 rotating in the axial direction, a housing 20 formed at a predetermined interval on the rotating body 10, and the rotating body ( 10) and the bearing 40 inserted between the housing 20, a plurality of lip seals 30 formed through the O-ring (50) inside the housing 10, and a lip receiving the same It consists of a seal holder 35.

In the above configuration, the housing 20 is formed by forming a plurality of gas inlets 21, 22, 23 for supplying gas to a flow path formed in the rotating body 10. At this time, the lip seal 30 is made of a disc-shaped donut shape, made of a material having elasticity and abrasion resistance, by being in close contact with the rotating body 10 in a curved state in one direction, the gas flowing into the adjacent flow path Will be blocked.

The gas supply device using the lip seal configured as described above may be made by applying an Eric seal, which is a kind of mechanical seal, instead of the lip seal, as shown in FIG. 1B, the lip seal in the gas supply device using the lip seal described above ( 30) and the circumferential spring-like Eric seal 60 having elasticity instead of the lip seal holder 35 and the Eric seal holder 65 for accommodating the same.

Since the mechanical seal method using the lip seal and the Eric seal is made by directly contacting the rotating body, there is a problem that it is easily worn due to the difference in the surface strength of the rotating body and the strength of the seal material. Since it is necessary to form (圓), when the rotating body is rotated eccentrically, there was a problem that the gas flows in and out of the adjacent flow path through the non-contact portion.

On the other hand, as shown in Figure 2, the gas supply device using the magnetic fluid, the same as the gas supply device using the mechanical seal described above, the magnet 76 is supported by the O-ring 50 instead of the lip seal or Eric seal ), A magnetic inductor 75 accommodating the magnet 76, and a magnetic fluid 70 formed between the magnet 76 and the rotor 10.

In the gas supply apparatus using the magnetic fluid configured as described above, the magnetic fluid is magnetized through the magnetic force of the magnet fixed to the housing, and the magnetic fluid magnetized by the magnetic derivative magnetizes the rotating body so that the magnetic fluid is separated from the magnetic derivative. It is achieved by separating adjacent flow paths as it is continuously formed by the magnetic force between the rotors. This method can be applied only when the rotor is made of a material that can be magnetized. (Fe) contains a lot of components, there is a problem that is easy to corrode, and also, the magnetic flux density (magnetic force) is deteriorated as the temperature increases, in particular, the separation between the flow path as the magnetic force is completely lost at 80 ~ 120 ℃ There was a problem that can not.

On the other hand, the magnetic fluid is generally a solution of the iron oxide (FeO ₂ ) -based particles in the organic solvent, so when the corrosive gas is supplied, the iron oxide particles are gradually deformed characteristics are difficult to use permanently, the magnetic flux density is In accordance with the law of magnetic force inversely proportional to distance, the magnetic inductor and the rotating body are formed in close proximity to form a magnetic fluid with a strong magnet density. There was a problem that the separation between the flow path due to wear.

In addition, since the gas supply device using the mechanical seal and the magnetic fluid as described above is a method of supplying a plurality of gases by being in close contact with the shaft of the rotating body or by magnetizing the rotating body, the fluid supply method should be configured along the rotating shaft. In order to supply a plurality of fluids, the rotating shaft needs to be long, and in order to rotate the long rotating shaft, a high torque rotary drive device is required, and a mechanical device for preventing the eccentricity from rotating requires a complicated device. There was this.

The present invention has been made in order to improve the above-mentioned conventional problems, in the gas supply device for separating and supplying a plurality of fluids independently to the rotating body, a plurality of partitions and the partitions therein to block each flow path It is an object of the present invention to provide a rotary gas supply device that forms a liquid container so as to be accommodated, thereby preventing a plurality of fluids from being mixed with each other so that the fluids can be supplied separated from each other.

As a means for achieving the above object, the rotary gas supply device of the present invention, in the gas supply device for separating and supplying a plurality of fluid to the rotating body rotated by the rotation driving means, a plurality of annular grooves Each of the liquid reservoirs formed therein are formed therethrough and penetrated between the liquid reservoirs, and a plurality of inlet passages are formed in communication with each of the base and the respective inlet passages formed therein so as to supply a fluid supplied from the outside. It is fixed to the rotating body to supply to the rotating body, the partition is formed to be inserted into the liquid receiving tank in a closed state is composed of a rotating plate to prevent the fluid supplied to the adjacent inlet passages mixed with each other, the partition Each of these flow paths can be separated through this contained liquid reservoir, allowing multiple fluids to be It characterized in that it can offer a whole.

In the above configuration, the lower portion of the base is characterized in that it further comprises an injection plate in communication with at least one of the inlet passages of the base to inject a separate independent fluid.

Preferably, the injection plate is formed of a cylindrical portion and the boss portion is formed integrally extending, the disk portion formed with at least one injection hole so that the fluid can be injected downward.

The above objects, features and advantages will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same components as much as possible, even if shown on the other drawings.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 3 is a schematic diagram showing a rotary gas supply apparatus according to an embodiment of the present invention, Figure 4 is an exploded perspective view showing a rotary gas supply apparatus according to an embodiment of the present invention, Figure 5 is one of the present invention 6 is a cross-sectional view illustrating a rotating plate of a rotary gas supply device according to an embodiment, and FIG. 6 is a cross-sectional view illustrating a base of a rotary gas supply device according to an embodiment of the present invention.

As shown in the figure, the rotary gas supply apparatus according to an embodiment of the present invention, the rotating body 100 rotates by the rotation driving means, and the upper plate fixed to the rotating means by the rolling means ( 200 and the rotating plate 400 is fixed to the rotating body 100, the transmission path (290a, 290b) is formed to communicate with the rotating body 100, and fixed to the upper plate 200, It is composed of a base 300 is formed with the inlet passages (340a, 340b, 340c, 340d) communicated with the delivery passages (290a, 290b).

In the above configuration, the rotating body 100 is composed of a shaft shaft 110 which is rotated by a drive motor which is a rotation driving means, and a cylindrical portion 130 integrally formed at the lower end of the shaft shaft 110, The cylindrical body 130 may be applied to the rotary body 100 of the conventional gas supply device formed by drilling a plurality of supply paths (120a, 120b, 120c, 120d) as it is.

A bearing 600a, which is a rolling means, is inserted and fixed to the shaft shaft 110 of the rotating body 100, and the upper plate 200 is fixed to the bearing 600a.

The upper plate 200 may be formed in a disk shape, the bearing 600a is fixed to the inner circumferential surface of the upper plate 200 to reduce the frictional resistance during the rotation of the rotating body 100.

The upper plate 200 is coupled to the base 300 by fastening means such as bolts, and the combined portion is sealed with an O-ring to seal the gap so that the rotating plate described below is formed. 400 may be installed inside the sealed state.

In the above configuration, the base 300 is formed with a liquid container 250 to receive a portion of the partition wall 220 (detailed below) of the rotating plate 400, and communicates with the delivery paths (290a, 290b). And the inlet passages 340a, 340b, 340c, and 340d for supplying a fluid to the rotating body 100 are formed.

The liquid container 250 may be formed by forming a plurality of annular grooves having a predetermined depth so as to form a plurality of annular tracks in the base 300. The same liquid (hereinafter referred to as oil 240) is accommodated by a certain height.

The transmission paths 290a, 290b, hereinafter, 290c, 290d are not shown, one side is in communication with the inlet paths (340a, 340b, 340c, 340d) formed in the base 300, the other side is the rotating body ( It is made in communication with the supply path (120a, 120b, 120c, 120d) of 100, respectively.

The rotating plate 400 is formed in a disk shape, the bottom surface has a plurality of partitions 220 are formed at regular intervals, respectively, the partition wall 220 is formed to extend downwards by a predetermined height (that is, annular A plurality of which are formed on the lower surface of the rotating plate 400), and a portion of the partition wall 220 is accommodated in the liquid container 250. At this time, the lower end of the partition wall 220 is partially accommodated in the oil 240 in the liquid container 250, a space portion is formed between the partition wall 220 by a predetermined space, which is drawn from the outside through the space portion The fluid stays to form the flow path 320 of the circular track in the space portion. The fluid stayed in the flow path 320 as described above is in communication with the inlet passages (340a, 340b, 340c, 340d) of the base 300 and the transfer passages (290a, 290b) of the rotating plate 400, respectively, the rotor 100 ) Is supplied through supply paths 120a, 120b, 120c, and 120d.

On the other hand, the flow path 320 between the partition wall 220 is installed with a spill prevention bracket 260 to prevent the oil 240 is drawn in and out of each other, the spill prevention bracket 260 is a high temperature and friction It can be formed of polyimide, a durable material.

In addition, the outer circumferential surface of the rotating plate 400 is fixed to the inner circumferential surface of the base 300 through a bearing 600b, so as to reduce frictional resistance during rotation of the rotating plate 400 fixed to the rotating body 100. It is desirable to.

In the above configuration, the injection plate 700 may be coupled to the lower surface of the base 300. The injection plate 700 is formed integrally with the boss portion 720 and the boss portion 720 formed in a cylindrical shape, at least one injection hole 780 so that the fluid can be injected downward on the lower surface ) Is formed of a disc portion 710, the boss portion 720 is fixed to the annular groove 760 formed on the lower surface of the base 300 so as to be spaced apart by a predetermined interval on the rotating body (100).

The formed injection plate 700 is in communication with any one of a plurality of inlet paths 340a, 340b, 340c, and 340d formed in the base 300, and separates the separate gas into the injection plate 700. Through the base 300 to be sprayed. Therefore, when the injection plate 700 is fixed to the base 300, it may be made to have an annular groove 760 to form a flow path therein.

In the above configuration, the top of the upper plate 200 is provided with a rotary sealing device 500 for sealing the gap between the rotating body 100 and the upper plate 200.

The rotary sealing device 500 is a known technique, a magnetic fluid sealing device using a magnetic fluid seal (Magnetic Fluid Seal) may be applied, such a magnetic fluid seal is a liquid after a special surface treatment of the fine particles having a magnetic It achieves colloidal state (dispersed state) so that it does not settle in the liquid and distributes uniformly so as to move like a molecule, and magnetic fluid is located in the gap of the magnetic fluid seal in which magnetic flux is formed. Apparatus using the principle to form a seal can be applied.

Rotational sealing device 500 as described above, a conventional rotational sealing device of various forms is disclosed, in the present invention, such a rotational sealing device 500 is installed on the upper surface of the upper plate 200 by bearing 600a ) And the fluid supplied to the rotating body 100 through the gap between the upper plate and the upper plate 200 is prevented from being discharged.

Hereinafter, the coupling and operation of the rotary gas supply device according to an embodiment of the present invention having the above-described configuration will be described.

First, the base 300 is seated on the cylindrical portion 130 formed at the lower portion of the rotating body 100, and the oil 240 is accommodated to a predetermined depth in the liquid container 250 formed in the base 300. Next, the partition wall 220 of the rotating plate 400 is combined to correspond to each liquid container 250, and the inside of the rotating plate 400 is fixed to the rotating body 100 through a bolt, and the rotating body A ring-shaped bearing 600b is fastened to the outer circumferential surface of the 100 to reduce frictional resistance between the inner circumferential surface of the base 300 and the outer circumferential surface of the rotating plate 400.

On the other hand, the inner circumferential surface of the upper plate 200 is fixed to the rotating body 100 through the bearing 600a so that the upper portion of the rotating plate 400 is spaced apart by a predetermined interval, the outer circumferential surface of the upper plate 200 is the base Sealed by a sealing member such as O-ring to 300 is fixed. When the coupling is completed in this way, the upper surface of the upper plate 200 is provided with a rotary sealing device 500 to seal (sealing) the gap between the bearing 600a and the upper plate 200. On the other hand, the lower surface of the base 300 is formed with an annular groove 760, the annular groove 760 is made of a fixing plate 700 is fixed by a fastening means such as a bolt.

Rotary type gas supply device according to an embodiment of the present invention coupled as described above, in order to supply a plurality of fluids to the rotating body 100 to be rotated, a plurality of inlet passages 340a, formed in the base 300 Injecting the respective fluid into the 340b, 340c, 340d.

For example, to supply a plurality of gases, such as A, B, C, and D gases, to the rotating body 100 that rotates, the respective gas supply ports are provided at the inlets 340a and 340b respectively formed in the base 300. Secure 350. Each gas is injected through the gas supply port 350, and each gas is supplied along the inlets 340a, 340b, 340c, and 340d respectively formed in the base 300, and each of the independent gases is the inlets 340a and 340b. , 340c and 340d are introduced into the transmission paths 290a and 290b of the rotating plate 400, wherein each independent gas of the flow path 320 formed between the partition walls 220 is accommodated in the liquid container 250. Gas is prevented from being introduced into the adjacent flow path 320 by the oil 240, each of the flow paths 320 to each of the flow paths (320) through a liquid receiving tank 250 in which a portion of the partition wall 220 is accommodated. The gas is prevented from being drawn in and drawn out.

Therefore, even in the continuous rotation of the rotating plate 400 is to prevent the independent gas is mixed with each other in each flow path 320, so that the independent gas is supplied to the rotating body 100 so as not to mix with each other.

Hereinafter, a rotary gas supply apparatus according to another embodiment of the present invention will be described with reference to the drawings below.

7 is a schematic view showing a rotary gas supply apparatus according to another embodiment of the present invention.

Rotary gas supply device according to another embodiment of the present invention, as shown in Figure 5, the rotating body 100 is rotated by the rotary drive means, and fixed to the rotating body 100 by the rolling means, the lower A plurality of partition walls 220 are formed on the surface, and the base 300a having a plurality of inlet passages 340a, 340b, 340c, and 340d formed therein and fixed to the rotating body 100, wherein the partition walls 220 are formed. The liquid container 250 is formed to receive a portion, the rotary plate 400 formed with a transmission path (290a, 290b) to communicate with the inlet (340a, 340b, 340c, 340d), and the base (300a) The outer circumferential surface is fixed to, and the inner circumferential surface to the rotating body 100 is composed of another base 300b fixed by the rolling means.

At this time, 340c and 340d of the reference numerals are not shown and may be formed in the same manner as the inflow paths 340c and 340d of one embodiment.

In the above configuration, the base 300a may be fixedly installed on the upper surface of the another base 300b so that the rotating plate 400 may be sealed, and the inner circumferential surface of the base 300a may have Bearing 600a is inserted to reduce frictional resistance during rotation. In addition, a plurality of partitions 220 are provided on the bottom surface, and the partitions 220 have the same shape and function as the partitions 220 of the above-described embodiment.

In this case, inflow paths 340a, 340b, 340c, and 340d are formed in the base 300a to allow a plurality of fluids to flow therein, and the inflow paths 340a, 340b, 340c, and 340d are formed in various directions and shapes. It can be made, but allows to form a standardized path through which the fluid can be easily supplied.

The rotating plate 400 is formed with a plurality of liquid container 250 to accommodate a portion of the partition wall 220, the groove between the liquid container 250 is a circular track flow path ( 320, the independent fluid may be supplied to the rotating body 100 so that the fluid supplied from the inlet passages 340a, 340b, 340c, and 340d does not mix with the fluid of the side flow path 320.

At this time, the leakage preventing packing 265 may be fixed between the liquid container 250 and the partition wall 220 to prevent the oil 240 from leaking out and flowing out. At this time, the leakage preventing packing 265 is inserted between the partition wall 220 and the liquid container 250 may be a conventional sealing packing that can be sealed.

The another base 300b is fixed to the rotating body 100 by a predetermined interval through the bearing 600b, and has an annular groove 760 formed on the lower surface thereof, and the trough groove 760 described above. By fixing one injection plate 700, a separate independent gas can be directly injected from the bottom of the base 300.

On the other hand, the upper portion of the upper plate 200 can be sealed (sealed) for the gap between the bearing 600a and the upper plate 200 through the rotary sealing device 500 as described above. Rotary type gas supply apparatus according to another embodiment of the present invention configured as described above, as shown in the above-described embodiment, each of the independent gas supply path (120a, 120b, so that a plurality of gases do not mix with each other), 129c and 120d to be supplied to the separate inlet gas 340a, 340b, 340c, 340d through the injection plate 700 connected to any one of the independent gas can be injected to the bottom of the base 300 do.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

As described above, the rotary type gas supply device of the present invention forms a plurality of partitions therein and a liquid container to accommodate the partitions in a base so as to independently supply a plurality of gases to a rotating rotor. Thus, each fluid can be independently supplied to the rotating body.

In addition, the rotary gas supply device of the present invention, the partition wall is accommodated in the oil contained in the liquid container as described above to separate each of the fluids to provide the effect of preventing the occurrence of mechanical defects such as friction and wear. .

In addition, since the rotary gas supply apparatus of the present invention can separate a plurality of fluids on a flat plate, it is possible to prevent the rotation axis from lengthening and to prevent eccentric rotation or deflection from occurring, and to drive the rotating body. There is an effect that can reduce the load on the means.

Claims (6)

In the gas supply device for separating and supplying a plurality of fluid to the rotating body 100 rotated by the rotation drive means, Liquid receiving tanks 250 having a plurality of annular grooves are respectively formed therein, and are formed through the liquid receiving tanks 250 to provide a plurality of inlet passages 340a, 340b, and 340c to supply fluid supplied from the outside. Bases 300 formed therein, respectively; And Is formed in communication with each of the inlet passage (340a, 340b, 340c, 340d) of the base 300 is fixed to the rotating body 100 to supply fluid to the rotating body 100, the liquid containing in the sealed state A partition plate 220 formed to be inserted into the tank 250 to prevent the fluids supplied to the adjacent inlet paths 340a, 340b, 340c, and 340d from being mixed with each other; Rotary gas supply device characterized in that it comprises a. In the gas supply device for separating and supplying a plurality of fluid to the rotating body 100 rotated by the rotation drive means, A plurality of annular partition walls 220 are formed therein, and are formed through the partition walls 220 so that a plurality of inlet passages 340a, 340b, 340c, and 340d are provided to supply fluid supplied from the outside. Bases 300 formed on each; And Is formed in communication with each of the inlet passage (340a, 340b, 340c, 340d) of the base 300 is fixed to the rotating body 100 to supply fluid to the rotating body 100, the partition wall ( A rotating plate 400 which is formed with a liquid container 250 to insert the 220 to prevent the fluids supplied to the adjacent inlet passages 340a, 340b, 340c, and 340d from being mixed with each other; Rotary gas supply device characterized in that it comprises a. The method according to claim 1 or 2, The lower portion of the base 300 further comprises an injection plate 700 connected to at least one of the inlet passages (340a, 340b, 340c, 340d) of the base 300 to inject a separate independent fluid Rotary type gas supply device. The method of claim 3, The injection plate 700 and the boss portion 720 made of a cylindrical shape, Is formed integrally extending to the boss portion 720, the rotary gas supply device, characterized in that consisting of a disk portion (710) formed with at least one injection hole (780) so that the fluid can be injected downward. The method of claim 1, Rotary gas, characterized in that the leakage preventing bracket 260 is installed in the space between the partition wall 220 inserted into the liquid container to prevent the oil 240 in the liquid container 250 is drawn in and out of each other. Feeder. The method of claim 2, At the upper end of the liquid container 250 into which the partition wall 220 is inserted, leakage preventing packings 265 are installed to prevent oil 240 from flowing into and out of each other. Rotary gas supply device characterized in that.

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