KR100754899B1 - Concurrent type laser marking device and method of the same - Google Patents

Abstract

A laser marking system and a laser marking method which can perform a large area marking operation using one laser head only, can drive a plurality os scan heads with one laser head only, can mark different contents at a plurality of irradiation object positions with a plurality of scan heads, and can concurrently mark different contents at a plurality of irradiation object positions with a plurality of scan heads by splitting a laser beam into a plurality of beams are provided. A large area laser marking system for concurrently marking different contents with one laser head comprises: a laser head(110) outputting a laser beam by receiving an ON signal of a Q-switch from a main controller or a scanner control processor; a light splitter(120) splitting the laser beam refracted by an optical axis control mirror(112) into a plurality of laser beams with the same level of energy; a plurality of optical modulators(170,172,174) refracting directions of the laser beams splitted by the light splitter; and a plurality of scan heads(150,152,154) marking different symbols, letters, figures and other patterns on a processing object with a large area using the laser beams refracted by the optical modulators. The light splitter includes a plurality of beam splitters(130,132,134).

Description

Large area laser marking device and method for simultaneously marking different contents simultaneously with one laser head {Concurrent type laser marking device and method of the same}

1 is a block diagram showing a general laser marking system.

2 is a perspective view showing a configuration of a general laser marking apparatus.

Figure 3 is a perspective view showing the configuration of a laser marking apparatus by a conventional energy sharing method.

4 is a plan view showing a configuration of a laser marking apparatus for a selectable multiple scan head according to a conventional time division method.

Figure 5 is a perspective view showing the configuration of a large-area laser marking device for simultaneously marking different contents with one laser head according to the present invention.

Figure 6 is a block diagram showing the configuration of a large-area laser marking device for marking different contents simultaneously with one laser head according to the present invention.

7 is a block diagram showing the configuration of an optical-acoustic modulator according to the present invention.

** Description of Codes for Major Configurations of Drawings **

110: laser head 112: optical axis adjustment mirror

120: optical splitter 130, 132, 134: beam splitter

150, 152, 154: scan head 160: optical modulator

162: piezoelectric substrate 164: transducer

170, 172, 174: acoustic-optic modulator 180: zero order

182: First order

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser marking apparatus and method for simultaneously marking a large area in multiple batches using a plurality of scan heads with one laser light source, among which a laser using a sharing mirror The beam dividing method can mark a large area, but there is a limit to marking only the same contents, and the method of dividing a laser beam using a selectable mirror has the advantage of marking various contents, but various contents The present invention relates to an energy marking laser marking apparatus for dividing a laser beam into a plurality of beam splitters so that a plurality of scan heads can simultaneously mark different contents on an object because there is a limitation in that it cannot be simultaneously marked.

Laser marking is a process of irradiating a laser beam to an object made of a material such as semiconductor, automobile, steel, plastic, or wood to evaporate or burn it. It means to record letters or figures. Laser marking can be applied continuously for a long time because no ink is required, and it is an environmentally friendly method in that solvent is unnecessary.

Laser marking devices and systems are largely classified into scanning type, mask type, and mixed type according to the construction method and the purpose of use.

Among them, the scanning method irradiates the laser beam focused on the workpiece with high density, and turns the laser light to the scanning mirror while scanning the laser spot light on the surface of the workpiece, and the beam spot is split on the surface of the workpiece. It is a technology to describe and mark desired patterns such as symbols, characters, and shapes while melting, evaporating, transforming, and modifying minute parts with laser energy. In other words, the scanning method scans the oscillated laser to an arbitrary point by an XY scanning scanning device and stamps the shape of a desired symbol, character, figure, and the like. The advantage is that the information can be precisely marked on the surface of the workpiece.

Scanning laser marking was formerly regarded as a laser marking method suitable for small quantity production, but recently, with the development of a digital signal processor (DSP) capable of ultra-fast processing, it can be used for high-speed mass production. It is also used for mass production of steel materials, plastics and wood.

1 is a block diagram showing a general laser marking system. The laser beam for marking in the laser head 10 is output toward the scan head 30 via a Q-switch signal when the critical energy is reached, and the scan head 30 is driven from the main controller 40 with respect to the correct coordinates. It receives the signal and is driven precisely to reflect the laser to the workpiece disposed under the scan head 30 to irradiate it. The power supply 50 of the laser is also controlled by the main controller 40. The high performance main controller 40 is generally a computer capable of high speed processing, and can quickly grasp the situation of the laser system, and the user can easily input data according to the situation.

2 is a schematic view showing an example of a laser marking apparatus. The laser beam 12 is oscillated by the light source 14 hitting the rod in the load chamber 16, and the laser beam 12 reciprocates the medium between the front mirror 8 and the rear mirror 10 while the wavelength is changed. Energy is amplified as the same light overlaps. When the energy to be amplified is exceeded, the Q-switch 22 is turned on / off by the Q-switch control signal and the laser beam 12 is oscillated to the scan head 30. The Q-switch 22 is turned on / off by the main controller 40 or the scanner control processor (DSP). The scan head 30 has a built-in scanner (galvanometer) to adjust the laser reflection angle by the main controller 40 and the scanner control processor.

However, according to the conventional laser marking system, when the area of the workpiece to be lasered, such as an LCD panel, is large, the scan head 30 cannot simultaneously process the entire surface of such a large workpiece. In order to avoid such a problem, a method of cutting a work piece and performing laser marking separately or a method of performing laser marking by moving the feeder to the X axis or the Y axis without cutting the work piece is used. .

However, there are many cases in which the workpieces should not be cut, and when cutting and executing laser marking individually, there is a problem in that a lot of equipment and time are required for the individual marking. In addition, it takes considerable time to move the feeder to the X and Y axes without cutting the workpiece.

If the symbols, letters, figures, and shapes stamped on a large-area workpiece are the same in several parts, consider installing a plurality of scan heads and performing laser marking by dividing the laser toward each scan head. have.

3 is a schematic perspective view of an embodiment of a laser marking system using a plurality of scan heads in this manner. According to the marking system described above, the laser beam oscillated from the laser head 110 is first refracted by the reflecting mirror 120 to be distributed through the sharing mirror 130, and totally reflected through the plurality of total reflection mirrors 140. Each beam expander telescope 150 and scan head 160 are incident. In this case, since the workpieces need only be transported in either the X-axis or Y-axis direction, the yield per unit time can be increased, and the process can be reduced.

However, the above-described marking system is based on an energy sharing method of dividing and engraving the energy of the laser toward the various scan heads 160, and it is possible to mark only the same contents through the respective scan heads 160. There is. For example, only the same letter A can be engraved in plural as shown in FIG.

In view of these problems, the selector is capable of laser marking at a plurality of marking positions by reflecting the laser oscillated from one laser head toward a plurality of heads, but allowing each scan head to mark different contents. Apparatus and method for time division laser marking using double scan head

4 is a schematic perspective view of an embodiment of a time division laser marking system using the selectable multiple scan head in this manner. According to the marking system, the laser head 210 receives a Q-switch on signal from a main controller or a processor for controlling a scanner and outputs a laser beam. The laser beam is reflected by the reflective mirror 220 and directed toward the select mirror 230. At this time, the select mirror 230 is opposed to a path toward any one of the four scan heads 240 as shown in FIG. 4 by a select mirror controller for selectively adjusting the angle of the main processor or the select mirror 230. do. The laser beam is selectively reflected by the select mirror 230 and is incident toward the corresponding scan head 240 through the upper alignment mirror 230 and the lower alignment mirror 230.

However, in order to prevent the laser from oscillating when driving the select mirror 230, that is, while rotating the select mirror 230, the Q-switch is turned off before the rotation, and the Q-switch is turned on only after the rotation. By changing, the laser can be oscillated to the laser head 210. Therefore, when performing marking on one scan head 240, there is a critical problem in that the marking cannot be performed on the other scan head 240.

Accordingly, the present invention has been made to solve the problems of the prior art as described above, an object of the present invention is to provide a laser marking apparatus and method capable of performing large-area marking using only one laser head. .

Another object of the present invention is to provide a laser marking apparatus and method capable of driving a plurality of scan heads with only one laser head.

It is still another object of the present invention to provide a laser marking apparatus and method capable of marking different contents at a plurality of subject positions with a plurality of scan heads.

It is still another object of the present invention to provide a laser marking apparatus and method capable of simultaneously marking different contents at a plurality of subject positions with multiple scan heads by dividing a laser beam into multiple beams.

It is still another object of the present invention to provide a laser marking apparatus and method for dividing a single laser beam into laser beams having the same level of power in order to simultaneously mark different shapes on a large-area workpiece. It is.

It is still another object of the present invention to provide a laser marking apparatus and method for determining the transmission amount and the reflection amount of a beam splitter differently according to the number of scan heads so that each divided laser beam has the same level of laser power.

It is still another object of the present invention to provide a laser marking apparatus and method for forming a mirror by repeatedly coating optically different materials with different refractive indices in order to determine different amounts of transmission and reflection of each beam splitter.

According to a feature of the present invention for achieving the above object, the present invention provides a laser head for outputting a laser beam and the laser beam emitted from the laser head into a plurality of laser beams having the same level of energy A light splitter for dividing, a plurality of light modulators for refracting the direction of the laser beam split in the light splitter, and a laser beam refracted in the light modulator, with different symbols, letters, figures, and other patterns on a large-area workpiece. It comprises a plurality of scan heads marking.

The optical modulator uses multiple beam splitters so that each scan head can simultaneously mark patterns of different contents without affecting the other scan heads.

The plurality of beam splitters are optical mirrors coated to determine the transmission amount and the reflection amount differently according to the number of scan heads.

According to another aspect of the invention, the present invention is a laser marking apparatus for marking a plurality of objects using a single laser, the laser head for oscillating a laser beam when power is applied, and the laser beam to a plurality of beams And a light splitter for dividing, an optical modulator for modulating the divided beam, and a plurality of scan heads for irradiating the modulated beam to the workpiece to mark the workpiece.

Between the laser head and the light splitter further includes an optical axis adjustment mirror for refracting the laser beam.

The optical splitter is comprised of multiple beam splitters so that multiple scan heads can simultaneously mark different content.

The beam splitter is a mirror capable of selectively reflecting or transmitting a laser beam, and a transmission amount and a reflection amount are determined at an appropriate ratio according to the number of the scan heads, and the last mirror is a total reflection mirror.

When the number of scan heads is N, the size of the split beam emitted from each scan head is set to 1 / N of the laser beam.

When the number of the scan heads is N, the size of the beam reflected by the first beam splitter is 1 / N times that of the laser beam emitted from the laser head, and the rest are all transmitted, and the size of the beam reflected by the second beam splitter. Is 1 / (N-1) times the transmitted beam, all the others are transmitted, and in the Nth beam splitter, all are totally reflected.

In the N-th beam splitter, a total reflection mirror is used such that the optical thickness is one quarter of the beam wavelength.

The transmittance and the reflectance are determined by the thickness of a repeatedly stacked material having a high refractive index and a low refractive index, and in order to increase the reflectance and decrease the transmittance at the same time, to increase the stack thickness of the material and, conversely, to reduce the reflectance and at the same time increase the transmittance. Is to lower the lamination thickness of the material.

As the optical modulator, an acoustic-optic modulator, an optoelectronic modulator or an acoustic light control filter is used.

The acousto-optic modulator converts electrical energy applied to one side of the piezoelectric substrate and one side of the piezoelectric substrate into acoustic energy to generate sound waves on opposite surfaces of the piezoelectric substrate, thereby generating Bragg gratings on the piezoelectric substrate. It consists of a transducer.

As the frequency of the voltage applied to the aco-optic modulator using the aco-optic effect is changed, the frequency of the sound wave generated in the transducer is changed, and thus the period of the Bragg grating generated in the piezoelectric substrate is changed so that the piezoelectric body is changed. The diffraction angle of the light incident on the substrate is changed.

When the beam split in the beam splitter passes through the acousto-optic modulator, the beam split from the beam splitter exits in a zero order which is transmitted through the beam splitter before the actuation signal is output to the acousto-optic modulator. When output, the beam split from the beam splitter is emitted to the first order which is eccentrically folded, only the first order is used for marking, and the zero order is dumped to an arbitrary place.

According to still another aspect of the present invention, the present invention provides a laser marking method for marking symbols, characters, figures, shapes, etc. on a plurality of workpieces by using one laser head and multiple scan heads. Outputting a laser beam by outputting a switch-on signal to the laser head, splitting the laser beam into a plurality of laser beams having a uniform level by entering the laser beam into an optical splitter of a plurality of beam splitters; And adjusting the intensity and direction of the split laser beam using an optical modulator, and dividing the split laser beam with the same power through the optical splitter, and driving the scan head with the laser beam refracted by the optical modulator. And irradiating the work piece to start the marking operation.

In the dividing into a plurality of laser beams having a uniform level, when N beam splitters are used in the light splitter, the laser beam incident to the light splitter is first reflected by only 100 / N% at the first beam splitter so that the first Transmitted to the scan head and the remaining split beam is transmitted to the second beam splitter, and only 100 / (Nl)% of the beam transmitted from the second beam splitter is reflected to the second scan head and the remaining split beam Transmitting through the three-beam splitter, and repeating the reflection and transmission process, and finally, in the N-th beam splitter are all totally reflected and sent to the N-th scan head.

An optical-acoustic modulator is used for the optical modulator, and when RF power is applied to the optical-acoustic modulator, a zero order is converted into a first order, and the intensity and direction of the divided laser beam are adjusted to be emitted to the scan head; If RF power is interrupted in the opto-acoustic modulator, the first order is converted to zero order and the split laser beam is further dumped.

The acoustic-optic modulation method applies electrical energy to a tubular transducer attached to a piezoelectric substrate, converts electrical energy into acoustic energy, generates sound waves on the opposite surface of the piezoelectric substrate, and advances the sound waves to the piezoelectric substrate. The Bragg grating is formed, and the split laser beam emitted from the beam splitter is irradiated in a direction perpendicular to the traveling direction of the sound wave, thereby diffracting the laser beam at an angle inversely proportional to the period of the Bragg grating.

According to the large-area laser marking apparatus and method for simultaneously marking different contents simultaneously with one laser head according to the present invention having such a configuration, it is possible to simultaneously mark different contents with only one laser. have.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of a large-area laser marking apparatus and method for simultaneously marking different contents simultaneously with one laser head having the configuration as described above will be described in detail. .

The laser marking apparatus of the present invention includes a laser head 110 that receives a Q-switch ON signal from a main controller, a scanner control processor, or the like, and outputs a laser beam, and the laser refracted by the optical axis control mirror 112. A plurality of light splitters 120 for dividing a beam into a plurality of beams, a plurality of scan heads 150, 152, and 154 for marking a workpiece by irradiating the divided beams with a processing object and the light splitters 120. And an optical modulator 160 installed between the scan heads 150, 152, and 154 to modulate the divided beam into other data.

When the laser head 110 is powered by a main controller (not shown), the laser head 110 oscillates the laser by a Q-switch signal when the laser energy reaches a threshold.

The light splitter 160 is composed of a plurality of beam splitters 130, 132, 134. Depending on the number of split beams, the split ratios of the respective beam splitters 130, 132, and 134 will be appropriately determined. For example, when the number of split beams is three, the size of the beams emitted from the respective beam splitters 130, 132, and 134 will be determined by one third the size of the light source, and the number of split beams is four. There will be a size of the beam of each beam splitter to be 1/4 the size of the light source.

That is, each beam splitter 130, 132, 134 should be configured to divide the energy of the laser beam as a light source by the same ratio. To this end, in the embodiment of the present invention, various optical mirrors having different reflectances and transmittances are used.

The first beam splitter 130 is an optical mirror that reflects only 33.33% of the split beam and transmits the remaining 77.33% of the split beam, and the second beam splitter 132 is again half of the transmitted 77.33% split beam. The optical mirror reflects only 33.33% of the split beam and transmits the remaining 33.33% of the split beam, and the final third beam splitter 134 is a total reflection mirror that totally reflects all of the transmitted 33.33% of the beam.

There may be various methods of adjusting the transmittance and reflectance for transmitting or reflecting the beam.

For example, when a mirror is formed by repeatedly stacking a material having a high refractive index and a material having a low refractive index, the reflectance and transmittance are determined according to the thickness of the stacked material. In order to increase the reflectance and at the same time lower the transmittance, it is necessary to increase the stack thickness of the material, and conversely, to lower the reflectance and at the same time increase the transmittance, the stack thickness of the material should be lowered.

Therefore, the second beam splitter 132 will have to increase the stack thickness of the material compared to the first beam splitter 130, and in the third beam splitter 134, the optical thickness of the mirror layer is equal to 1 of the beam wavelength for total reflection. Use a total reflection mirror that will be / 4.

In addition, a non-polarized or polarized beam may be separated into a linearly polarized beam having a perpendicular axis of polarization, and a multiphotochromic beam or a broadband beam having a plurality of wavelength elements may be converted into a plurality of corresponding monochromatic emission beams. There may be a case where the separation, there is no limitation in separating the beam in the embodiment of the present invention.

Next, the optical modulator 160 used to modulate the laser beam includes an acoustic-optic modulator (AOM), an electro-optical modulator (EOM) and an acoustic-optic tunable filter: AOTF) may be used, but in the embodiment of the present invention, only the acoustic-optic modulator of which the driving circuit is simple will be described.

The acoustic-optic modulators 170, 172, and 174 are devices for deflecting the input beam by inclining sound waves that traverse the path of the input beam in the device, to inject or block the input beam, or to change its intensity. It is about.

FIG. 7 is a schematic configuration diagram of an acoustic-optic modulator for obtaining the light diffraction effect due to the acoustic dense wave, and is a piezoelectric material plate 162 and electricity applied to one side of the piezoelectric substrate 162. A transducer 164 converts energy into acoustic energy to generate sound waves on the opposite surface of the piezoelectric substrate 162 to generate Bragg gratings on the piezoelectric substrate 162.

According to the acoustic-optic modulators 170, 172, and 174, when the transducer 164 is attached to one surface of the piezoelectric substrate 162, and a voltage is applied to the transducer 164, the transducer 164 ) Converts the applied electrical energy into acoustic energy. The acoustic energy appears in the form of sound waves traveling from one surface of the piezoelectric substrate 162 to which the transducer 164 is attached to the other surface of the piezoelectric substrate 162 facing the surface.

The Bragg grating is formed in the piezoelectric substrate 162 by the progress of the acoustic wave, and the lattice period of the Bragg grating is changed according to the electric energy applied to the transducer 164.

When the laser beam emitted from each beam splitter 130, 132, 134 is irradiated onto the piezoelectric substrate 162 in a direction perpendicular to the direction in which the sound wave travels in the state where the Bragg grating is formed, it is inversely proportional to the period of the Bragg grating. The laser beam is Bragg diffraction at an angle.

When the acousto-optic modulators 170, 172, and 174 using the aco-optic effect change the frequency of the applied voltage, the frequency of the sound wave generated by the transducer 164 is changed and accordingly within the piezoelectric substrate 162. The period of the Bragg grating generated at is changed to change the diffraction angle of the light incident on the piezoelectric substrate 162. In addition, the intensity of the sound wave is changed according to the intensity of the voltage applied to the transducer 164, where the diffraction efficiency of the diffracted beam is changed.

However, in this embodiment, since a high power laser beam is used as a light source for laser marking, the acoustic-optic modulators 170, 172, and 174 used herein should have a structure that can withstand high power sufficiently.

That is, before the operation signal is output to the acoustic-optic modulators 170, 172, and 174, the beam split out from the beam splitters 130, 132, and 134 will be transmitted as it is. When the operation signal is output, the beam splitter ( Beams split out from 130, 132, and 134 will be eccentric and bent. At this time, the direction transmitted through the original is called a zero order (180 order), the direction to be folded is called a first order (First order: 182). Used for marking is the first order 182 with the greatest intensity of the beam, and the zero order 180 is dumped to an arbitrary location.

Referring to the operation of the large-area laser marking apparatus for simultaneously marking different contents simultaneously with one laser head according to an embodiment of the present invention.

When the laser head 110 receives the Q-switch on signal from the main controller, the laser head 110 emits a laser beam, and the output laser beam is totally reflected by the optical axis adjusting mirror 112 and directed to the optical splitter 120. When RF power is applied to the opto-acoustic modulators 170, 172 and 174, the split beam is irradiated onto the workpiece to start the marking operation.

The laser beam incident to the optical splitter 120 first transmits only the 33.33% split beam to the first scan head 150 by the first beam splitter 130, and transmits the remaining 77.33% split beam to the second beam. Send to splitter 132. The second beam splitter 132 reflects only the 33.33% split beam, which is 50% of the transmitted 77.33% split beam, to the second scan head 152 and transmits the remaining 33.33% split beam. 3 beam splitter (154). Finally, 33.33% of the transmitted beams are totally reflected in the third beam splitter 134 and sent to the third scan head 154.

At this time, if RF power is not applied to the optical-acoustic modulator, the beams transmitted through the beam splitters 130, 132, and 14 are reflected or the first beams 182 are switched to the zero orders 180 and dumped. The marking operation is stopped without irradiating the workpiece.

As described above, in the present invention, in order to simultaneously mark various different shapes on a large-area workpiece, one laser beam must be divided into laser beams having the same level of power, and each division In order to ensure that the laser beam has the same level of laser power, it can be seen that the technical idea is to configure the transmission amount and the reflection amount of the beam splitter differently according to the number of scan heads and to optically coat it.

As described above, according to the configuration of the present invention, the following effects can be expected.

First, since a plurality of scan heads can be driven by only one laser head, an effect that can mark a large area with one laser is expected.

Second, by driving the plurality of scan heads separately, an effect of marking different contents at a plurality of positions of the examinees is expected.

Third, by radiating the laser beam into a plurality of beams, a plurality of scan heads are used to irradiate the plurality of examinee positions, whereby an effect that can simultaneously mark different contents is expected.

Fourth, by using a plurality of beam splitters, an effect of dividing one laser beam into a plurality of laser beams having the same level of power is expected.

Fifth, by setting the transmission amount and the reflection amount of the beam splitter differently according to the number of scan heads, an effect of supplying a uniform level of laser can be expected from a plurality of scan heads.

Claims (19)

One laser head for outputting a laser beam; An optical splitter for dividing the laser beam emitted from the laser head into a plurality of laser beams having the same level of energy; A plurality of light modulators for refracting the direction of the laser beam split in the light splitter; A plurality of scan heads marking different symbols, letters, figures, and other patterns on a large-area workpiece by using the laser beam refracted by the optical modulator; A large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, characterized in that configured to include. The method of claim 1, The optical modulator uses multiple beam splitters so that each scan head can simultaneously mark different patterns of content without affecting the other scan heads. Large-area laser marking device for marking multiple batches simultaneously. The method of claim 2, And the plurality of beam splitters are optical mirrors which are coated to determine the transmission amount and the reflection amount differently according to the number of scan heads. In the laser marking device for marking a plurality of objects using a single laser, A laser head which oscillates a laser beam when power is applied; An optical splitter dividing the laser beam into a plurality of beams; An optical modulator for modulating the split beam; A plurality of scan heads for marking the object by irradiating the modulated beam to the object; A large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, characterized in that configured to include. The method of claim 4, wherein A large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, further comprising an optical axis adjusting mirror for refracting a laser beam between the laser head and the optical splitter. The method of claim 4, wherein The optical splitter is a large-area laser marking device for simultaneously marking different contents simultaneously with a single laser head, characterized in that a plurality of beam splitters so that a plurality of scan heads can simultaneously mark different contents. The method of claim 6, The beam splitter is a mirror capable of selectively reflecting or transmitting a laser beam, and a transmission amount and a reflection amount are determined at an appropriate ratio according to the number of the scan heads, and one of the mirrors installed at the end is a total reflection mirror. Large-area laser marking device that simultaneously marks different contents with a laser head. The method of claim 7, wherein When the number of scan heads is N, the size of the split beam emitted from each scan head is determined to be 1 / N of the laser beam. Large area laser marking device. The method of claim 7, wherein When the number of the scan heads is N, the size of the beam reflected by the first beam splitter is 1 / N times that of the laser beam emitted from the laser head, and the rest are all transmitted, and the size of the beam reflected by the second beam splitter. Is a 1 / (N-1) times the transmitted beam, and the rest are all transmitted, and in the N-th beam splitter, all are totally reflected, and a large-area laser marking simultaneously marking different contents simultaneously with one laser head Device. The method of claim 4, wherein The optical modulator is a large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, characterized in that an acoustic-optic modulator is used. The method of claim 4, wherein The optical modulator is a large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, characterized in that an electro-optical modulator is used. The method of claim 4, wherein The optical modulator is a large-area laser marking device for simultaneously marking different contents simultaneously with one laser head, characterized in that an acoustic optical tunable filter is used. The method of claim 10, The acoustic-optic modulator, Piezoelectric substrates; One laser characterized in that the transducer is configured to convert the electrical energy applied to one side of the piezoelectric substrate applied to the acoustic energy to generate sound waves on the opposite surface of the piezoelectric substrate, generating a Bragg grating on the piezoelectric substrate Large-area laser marking device for marking different contents simultaneously with multiple heads. delete In the laser marking device for marking a plurality of objects using a single laser, A laser head which oscillates a laser beam when power is applied; An optical splitter configured to split the laser beam into a plurality of beams, the beam splitter including a plurality of beam splitters so that a plurality of scan heads can mark different contents of the verb; An acoustic-optic modulator for modulating the split beam; A plurality of scan heads for marking the object by irradiating the modulated beam to the object; It is configured to include, When the beam split in the beam splitter passes through the acousto-optic modulator, before the actuating signal is outputted to the acousto-optic modulator, the beam split out from the beam splitter is output in a zero order through which the split beam is originally transmitted, and the actuation signal is output. Then, the beam split from the beam splitter is emitted to the first order which is eccentrically folded, and only the first order is used for marking, and the zero order is dumped to an arbitrary place. Large-area laser marking device for marking multiple batches simultaneously. In the laser marking method for marking a symbol, a character, a figure or a shape on a plurality of workpieces using one laser head and multiple scan heads, Outputting a laser beam by outputting a Q-switch on signal from a main controller to the laser head; Injecting the laser beam into a light splitter of a plurality of beam splitters and dividing the laser beam into a plurality of laser beams having a uniform level; Adjusting the intensity and direction of the split laser beam using an optical modulator; Irradiating a laser beam, which is split at the same power by the optical splitter and refracted by the optical modulator, to the workpiece by driving the scan head to initiate a marking operation; A large-area laser marking method for simultaneously marking different contents simultaneously with one laser head, characterized in that configured to include. The method of claim 16, The dividing into a plurality of laser beams having a uniform level may be achieved when N beam splitters are used in the light splitter. The laser beam incident to the optical splitter first reflects only 100 / N% at the first beam splitter and is sent to the first scan head and the remaining split beam is transmitted to the second beam splitter; Only 100 / (N−1)% of the beam transmitted from the second beam splitter is reflected and sent to the second scan head and the remaining split beam is transmitted to the third beam splitter; Repeating the reflection and transmission process, and finally totally reflected in the N-th beam splitter and sent to the N-th scan head; A large-area laser marking method for simultaneously marking different contents simultaneously with one laser head, characterized in that consisting of. The method of claim 16, An optical-acoustic modulator is used for the optical modulator, and when RF power is applied to the optical-acoustic modulator, a zero order is converted into a first order, and the intensity and direction of the divided laser beam are adjusted to be emitted to the scan head; If the RF power is interrupted in the opto-acoustic modulator, the first order switches to zero order and the split laser beam is dumped; A large-area laser marking method for simultaneously marking different contents simultaneously with one laser head, further comprising a. The method of claim 18, The acoustic-optic modulation method applies electrical energy to a tubular transducer attached to a piezoelectric substrate, converts electrical energy into acoustic energy, generates sound waves on the opposite surface of the piezoelectric substrate, and advances the sound waves to the piezoelectric substrate. Forming a Bragg grating and irradiating a split laser beam emitted from the beam splitter in a direction perpendicular to the traveling direction of the sound wave, thereby diffracting the laser beam at an angle inversely proportional to the period of the Bragg grating; A large-area laser marking method for marking different contents simultaneously with multiple heads.

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